MICRODEVICES
Physics and Fabrication TechnologiesSeries Editors: Ivor Brodie and Arden Sher
SRI International
Menlo Park, California
Recent volumes in this series:
COMPOUND AND JOSEPHSON HIGH-SPEED DEVICES
Edited by Takahiko Misugi and Akihiro Shibatomi
ELECTRON AND ION OPTICS
Miklos Szilagyi
ELECTRON BEAM TESTING TECHNOLOGY
Edited by John T. L. Thong
ORIENTED CRYSTALLIZATION ON AMORPOUS SUBSTRATES
E. I. Givargizov
PHYSICS OF HIGH-SPEED TRANSISTORS
Juras Polzela
THE PHYSICS OF MICRO/NANO-FABRICATION
Ivor Brodie and Julius J. Muray
PHYSICS OF SUBMICRON DEVICES
David K. Ferry and Robert O. Grondin
THE PHYSICS OF SUBMICRON LITHOGRAPHY
Kamil A. Valiev
RAPID THERMAL PROCESSING OF SEMICONDUCTORS
Victor E. Borisenko and Peter J. Hesketh
SEMICONDUCTOR ALLOYS
Physics and Materials EngineeringAn-Ban Chen and Arden Sher
SEMICONDUCTOR DEVICE PHYSICS AND SIMULATION
J. S. Yuan and J. J. Liou
SEMICONDUCTOR LITHOGRAPHY
Principles, Practices, and MaterialsWayne M. Moreau
SEMICONDUCTOR MATERIALS
An Introduction to Basic PrinciplesB. G. Yacobi
SEMICONDCUTOR PHYSICAL ELECTRONICS
Sheng S. Li
A Continuation Order Plan is available for this series. A continuation order will bring delivery of each newvolume immediately upon publication. Volumes are billed only upon actual shipment. For further informationplease contact the publisher.
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