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Introduction to HRXRD

Introduction to HRXRD

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Published by Trà Nguyễn
introduction to HRXRD
introduction to HRXRD

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Published by: Trà Nguyễn on Jul 28, 2012
Copyright:Attribution Non-commercial


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Introduction toHigh Resolution X-Ray Diffraction of Epitaxial Thin Films
Scott A Speakman, Ph.D.MIT Center for Materials Science and Engineering
Epitaxial films can be studied by rocking curves, omega-2theta coupled scans, reciprocal space maps, andreflectivity scans
Rocking curves can give information on
Defects such as dislocation density, mosaic spread, curvature, and inhomogeneity
Layer thickness, superlattice period, strain and composition profile
Lattice mismatch, ternary composition, misorientation, and relaxation
These parameters are correlated and be determined if only one of theseparameters is unknown
Coupled scans can give information on
Lattice mismatch, ternary composition, relaxation, thickness and superlattice period
Reciprocal space maps can give information on
Lattice mismatch, ternary composition, misorientation, and relaxation
Surface damage, dislocation density, mosaic spread, curvature
Thickness and superlattice period
X-Ray Reflectivity can give information on
Thickness, interface roughness, and composition or density
XRR works with non-epitaxial and even non-crystalline thin films
http://prism.mit.edu/xrayPage 2
The atoms in a crystal are a periodic array of coherent scatterers and thus can diffract light.
Diffraction occurs when each object in a periodic array scatters radiationcoherently, producing concerted constructive interference at specific angles.
in an atom coherently scatter light.
The electrons interact with the oscillating electric field of the light wave.
Atoms in a crystal form a periodic array of coherent scatterers.
The wavelength of X rays are similar to the distance between atoms.
Diffraction from different planes of atoms produces a diffraction pattern, whichcontains information about the atomic arrangement within the crystal
X Rays are also reflected, scattered incoherently, absorbed, refracted, andtransmitted when they interact with matter.

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