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Method of Making Curved Charge-Coupled Device

Method of Making Curved Charge-Coupled Device

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The Naval Research Laboratory (NRL) has developed a method of making a curved charge-coupled device (CCD) for use in large field of view applications. The new method and CCD overcome the breakage problems due to mechanical bending of thinned CCDs. Using standard silicon fabrication methods, the novel NRL method uses 3D gray tone lithography and plasma etching to shape the silicon holding the CCD. The NRL method forms a simple CCD without mechanical manipulation, thus forming a CCD with a large field of view. The NRL method in turn enables multi-spectral ultra-sensitive imaging necessary for large and very large telescope applications. The NRL CCD is also ideal for large telescopes involving infrared image acquisition and spectroscopy, conducted over wide fields of view. NRL Technology Transfer Office http://www.nrl.navy.mil/techtransfer/fs.php?fs_id=OPT14 Naval Research Laboratory website http://www.nrl.navy.mil

The Naval Research Laboratory (NRL) has developed a method of making a curved charge-coupled device (CCD) for use in large field of view applications. The new method and CCD overcome the breakage problems due to mechanical bending of thinned CCDs. Using standard silicon fabrication methods, the novel NRL method uses 3D gray tone lithography and plasma etching to shape the silicon holding the CCD. The NRL method forms a simple CCD without mechanical manipulation, thus forming a CCD with a large field of view. The NRL method in turn enables multi-spectral ultra-sensitive imaging necessary for large and very large telescope applications. The NRL CCD is also ideal for large telescopes involving infrared image acquisition and spectroscopy, conducted over wide fields of view. NRL Technology Transfer Office http://www.nrl.navy.mil/techtransfer/fs.php?fs_id=OPT14 Naval Research Laboratory website http://www.nrl.navy.mil

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Categories:Types, Research, Science
Published by: U.S. Naval Research Laboratory on Oct 02, 2012
Copyright:Attribution Non-commercial

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11/03/2013

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