S lc v phng sch

Ng c Th, G12 8QQ, UK

Nu ai tng xem qung co ca hng Intel, th no cng tng thy cnh qung co cc k s ca Intel mc b kn t u n chn nhy ma trong phng, trng nh cc phi hnh gia nhy ma trn tu v tr. V nu c mt cht yu thch v k thut, th no bn cng t m t hi h mc b qun o y lm g, v nu yu thch hn cht na, th no bn cng tng m c ngy mc b y lm vic nh h, mt cng vic tht th v? Xin tha, l cc b qun o bo h khi lm vic trong phng sch (v d nh phng sch v cng ngh bn dn ca Intel chng hn), v khi lm vic phi mc n cng chng d chu g u. Bn s hi tip, th phng sch l g? Ti sao phi c phng sch? Hi vng bi vit ny s gip cho bn c nhng hiu bit ban u v phng sch. 1. Phng sch l g? Nu cn ni mt cch n gin, ta c th tr li rng "phng sch" l mt phng rt sch. Phng sch (ting Anh l cleanroom - mt danh t ghp), theo nh ngha bi tiu chun ISO 14644-1 l: "L mt phng m nng ca ht l lng trong khng kh b khng ch v n c xy dng v s dng trong mt kt cu sao cho s c mt, s sn sinh v duy tr cc ht trong phng c gim n ti thiu v cc yu t khc trong phng nh nhit , m, p sut u c th khng ch v iu khin". Nguyn vn ting Anh: "A room in which the concentration of airborne is controlled, and which is constructed and used in a manner to minimise the introduction, generation and retention of particles inside the room and in which other relevant parameters, e.g. temperature, humidity, and pressure, are controlled as neccessary." [1] Ni mt cch n gin, phng sch l mt phng kn m trong , lng bi trong khng kh, c hn ch mc thp nht nhm trnh gy bn cho cc qu trnh nghin cu, ch to v sn xut. ng thi, nhit , p sut v m ca khng kh cng c khng ch v iu khin c li nht cho cc qu trnh trn. Ngoi ra, phng cn c m bo v trng, khng c cc kh c hi ng theo ngha "sch" ca n. 2. Lch s ca phng sch, s cn thit ca phng sch Phng sch c s dng ln u tin l trong lnh vc y t. M u l cc cng trnh nghin cu ca Pasteur, Koch, Lister v cc nh sinh hc tin phong khc ch ra rng s nhim khun l nguyn nhn ca nhiu cn bnh, m mt trong nhng nguyn nhn ca s nhim khun l s mt v sinh trong mi trng. Ln u tin vo nhng nm 1860, Joseph Lister (mt gio s i hc Tng hp Glasgow) thit lp mt h thng phng khp kn nhm hn ch bi bn, chng s nhim khun Vin x Hong gia Glasgow (Royal Infirmary, l mt Vin x thnh lp bi H Glasgow, ngy nay mang tn l Glasgow Western Infirmary). y chnh l phng sch s khai u tin [1]. V h thng phng sch s dng cho sn xut c bt u s dng vo thi gian chin tranh th gii th hai ci tin cc sng ng, v kh qun s. Cho n lc ny, phng sch mi ch mc s khai l lm sch bng cch h thng ht bi v ht m n gin, khc xa so vi ngy nay. Tip n, phng sch c pht trin thm mt bc nh s thc y t cc ngnh nghin cu v ht nhn, sinh v ha dn s ra i ca cc h thng lc khng kh. Cc phng sch vi dung tch ln, h thng lc khng kh tt bt u pht trin mnh t nm 1955. Cng ty in t Western Electric Company (Winston-Salem, M) gp phi cc vn trc trc vi cc sn phm sai hng do s c mt ca cc ht bi trong khng kh. Yu cu t ra cho h l cc phng sch khng nhim bi, v t h thng phng sch c pht trin, vi cc h thng lc, cc h thng iu khin, cc qun o bo h nhm chng bi bn cho phng... c pht trin nh ngy nay. V hin nay, phng sch c s dng cho nhiu lnh vc: y t, khoa hc v k thut vt liu, linh kin in t, l, ha, sinh, c kh chnh xc, dc...

3. Phng sch tiu chun Tiu chun u tin ca phng sch l hm lng bi, tc l hm lng cc ht bi l lng trong khng kh c khng ch n mc no (tt nhin l bi bm cng phi lm sch ri). Nu ta so snh mt cch hnh tng, ng knh si tc ngi vo c 100 m, ht bi trong phng c th c ng knh t 0,5 n 50 m (xem hnh nh so snh).

Hnh 1. So snh cc kch thc bi [1].

Cc tiu chun v phng sch ln u tin c a ra vo nm 1963 M, v hin nay tr thnh cc tiu chun chung cho th gii. l cc tiu chun quy nh lng ht bi trong mt n v th tch khng kh. Ngi ta chia thnh cc tm kch c bi v loi phng c xc nh bi s ht bi c kch thc ln hn 0,5 m trn mt th tch l 1 foot khi (ft3) khng kh trong phng. a) Tiu chun Federal Standard 209 (1963) [1] Tiu chun ny ln u tin c quy nh vo nm 1963 (c tn l 209), v sau lin tc c ci tin, hon thin thnh cc phin bn 209 A (1966), 290 B (1973)..., cho n 209 E (1992).
Bng 1. Gii hn bi trong tiu chun 209 (1963). S ht/ft3 Loi 0,1 m 0,2 m 0,3 m 0,5 m 1 35 7,5 3 1 10 350 75 30 10 100 750 300 100 1000 1000 10000 10000 100000 100000 (*) ch s - l khng xc nh 5,0 m - (*) 7 70 700

b) Tiu chun Federal Standard 209 E (1992) [2-3] Tiu chun ny xc nh hm lng bi lng trong khng kh theo n v chun (n v th tch khng kh l m3). S phn loi phng sch c xc nh theo thang loga ca hm lng bi c ng knh ln hn 0,5 m. Di y l bng tiu chun FS 209 E.
Bng 2. Gii hn bi trong tiu chun 209 E (1992).
Tn loi SI M1 M1.5 M2 M2.5 M3 M3.5 M4 M4.5 M5 M5.5 M6 M6,5 M7 English 1 10 100 1000 10000 100000 0,1 m n v m3 ft3 350 9,91 1240 35,0 3500 99,1 12400 350 35000 991 0,2 m n v m3 ft3 757 2,14 265 7,50 757 21,4 2650 75,0 7570 214 26500 750 75700 2140 Cc gii hn 0,3 m n v m3 ft3 30,9 0,875 106 3,00 309 8,75 1060 30,0 3090 87,5 10600 300 30900 875 0,5 m n v m3 ft3 10,0 0,283 35,3 1,00 100 2,83 353 10,0 1000 28,3 3530 100 10000 283 35300 1000 100000 2830 353000 10000 1000000 28300 3530000 100000 10000000 283000 5,0 m n v m3 ft3 247 7,00 618 17,5 2470 70,0 6180 175 24700 700 61800 1750

c) Tiu chun ISO 14644-1 [3,4] T chc Tiu chun Quc t (International Standards Organization - ISO) quy nh cc tiu chun v phng sch tiu chun quc t. Tiu chun ISO 14644-1 c pht hnh nm 1999 c tn "Phn loi sch khng kh" (Classification of Air Cleanliness). Cc loi phng sch c quy nh da trn biu thc:

0,1 Cn = 10 N D

2,08

vi: Cn l hm lng cho php ti a (tnh bng s ht/m3) ca bi lng khng kh ln hn hoc bng kch thc xem xt. N l ch s phn loi ISO, khng vt qu 9 v ch s cho php nh nht l 0,1 D l ng knh ht tnh theo m 0,1 y l hng s vi th nguyn l m. Nh vy, c th d dng xc nh cc gii hn hm lng bi t cng thc trn v d dng phn loi tng cp phng sch (bng 3).
Loi ISO 1 ISO 2 ISO 3 ISO 4 ISO 5 ISO 6 ISO 7 ISO 8 ISO 9 Bng 3. Cc gii hn hm lng bi trong tiu chun ISO 14644-1 [1,4]. Gii hn nng cho php (ht/m3) 0,1 m 10 100 1000 10000 100000 1000000 0,2 m 2 24 237 2370 23700 237000 0,3 m 10 102 1020 10200 102000 0,5 m 4 35 352 3520 35200 352000 3520000 35200000 1 m 8 83 832 8320 83200 832000 8320000 5 m 29 293 2930 29300 293000

Cn ch rng, mc nhim bn khng kh trong phng cn ph thuc vo cc ht bi sinh ra trong cc hot ng trong phng, ch khng ch l con s c nh ca phng. Chnh v th, trong cc tiu chun ca phng, lun i hi cc h thng lm sch lin hon v cn quy nh v quy m phng v s ngi, s hot ng kh d trong phng sch. Ngoi cc tiu chun ny, mi ngnh cn c th c thm cc i hi ring cho mnh, v d nh lm v cng nghip vi mch bn dn i hi khc vi ngnh y... Ta nh l cng nghip bn dn thao tc vi cc phn t vt liu ti c micron, v th m yu cu rt kht khe v hm lng bi nh, trong khi ngnh y t li i hi cao v mc sch v iu ha khng kh nhm chng nhim khun...
4. Cc thit k phng sch 4.1. Kiu phng thng hi hn lon (Turbulently Ventilated Cleanroom) [4] Nguyn l thng hi ca phng sch kiu ny cng tng t nh hu ht cc phng iu ha khng kh ph thng nh vn phng hay ca hng. Khng kh (sch) c cung cp bi my iu ha khng kh c ta i qua h thng khuch tn trn trn nh (hnh v).

Hnh 2. Phng sch kiu "thng hi hn lon".

Ngi ta gi l "thng hi hn lon" l do khng khi di chuyn mt cch ngu nhin v hn lon trong phng nh h thng khuch tn (hnh 3a) hoc nh h thng "phun" (hnh 3b).

(a)

(b)

Hnh 3. Cc kiu di chuyn khng kh trong phng sch kiu thng hi hn lon: di chuyn qua b khuch tn (a) v s phun nh mt h thng phun hi (b).

H thng "phun" khng kh (hnh 3b) thng bt gp trong cc h thng phng sch thng hi hn lon truyn thng. H thng kiu ny thng cho cc dng kh thng v c kh nng kim sot tt qu trnh nhim bn di b lc. H thng phun ny c th mang li cc iu kin kh d hn bn di khi vc cung cp, nhng do li lm km i cho cc vng xung quanh trong phng (hnh 4).

Hnh 4. Mt s n gin v phn b p sut dng kh trong phng sch vi h thng phun kh.

4.2. Phng sch kiu nh hng hon ton (Unidirectional Cleanroom) [4] H thng phng sch vi kiu thng hi tn lon thng ch t c cc sch tiu chun ti cp ISO 6 trong qu trnh sn xut. t c cc iu kin tt hn th trong sut qu trnh hot ng, iu cn thit l phi lm long s sn sinh cc ht. iu ny c th t c bng cch dng dng khng kh hon ton thng (hnh 5).

Hnh 5. H thng phng sch kiu dng khng kh thng ng.

Hnh 5 l mt ct ca mt thit k phng sch vi dng khng kh lu chuyn theo chiu thng ng v c vn hnh khp kn theo kiu nh cc piston. Do , dng khng kh ny gip cho vic y bay cc nhim bn. Khi c lu chuyn ra ca, dng khng kh n y s vn chuyn theo dng v li c lu chuyn khp kn qua cc h thng lc. H thng ny tin tin hn h thng thot kh hn lon rt nhiu bi kh nng kh cc nhim bn nhanh trng. Vn tc dng kh thng dng t 0,3 m/s n 0,6 m/s. Tuy nhin, loi phng sch kiu ny c gi thnh v chi ph vn hnh cao hn rt nhiu so vi phng sch thng kh hn lon.

Hnh 6. H thng thot kh thng ng vi cc ca thot kh b sung 2 bn.

Mt kiu khc ca h thng phng sch nh hng l h thng dng kh nm ngang (hnh 7), vi cch thc l dng kh i vo t mt vch bn ny qua h thng lc vi hiu sut cao v thi qua phng, ri c quay ngc li sau khi p vo vch i din. V din tch ca vch tng thng nh hn nhiu so vi din tch trn nh v th chi ph ca loi phng ny cng thp hn so vi kiu dng dng khng kh thng ng.

Hnh 7. H thng phng sch vi dng khng kh nm ngang.

H thng lu chuyn khng kh kiu nm ngang khng ph bin bng h thng thng ng d n r hn vi l do lin quan n s nhim bn (so snh qua hnh 8). Hnh 8 so snh cho ta 2 cch lm long s nhim bn 2 loi phng nm ngang v phng thng ng. phng c dng lu chuyn thng ng, cc bi bn s b y theo chiu thng ng xung sn, v thi bt xung cc v tr thot kh v khng gy nhim bn t v tr ny sang v tr khc cng nh t ngi ny sang ngi khc. Cn h thng lu chuyn kh nm ngang c th dn ti vic bi bn b thi t v tr ny sang mt v tr nm ngang khc, hoc t ngi pha trc (chiu kh lu chuyn) bay vo ngi pha sau (hnh 8).

Hnh 8. So snh 2 kiu gim nhim bn dng khng kh thng ng v nm ngang.

H thng phng sch vi dng khng kh lu chuyn thng ng c s dng ph bin cho cng nghip bn dn v cng ngh vt liu (hnh 9) trong mt s nm gn y. Trong cng ngh linh kin bn dn v cng ngh vt liu, khng kh c lc vi sch rt cao v c thi theo chiu t trn trn nh xung.

Hnh 9. Kiu thit k phng sch cho cng ngh vt liu (linh kin in t bn dn...) - kiu thit k ny c gi l kiu phng ballroom.

Cc phng c th c b tr theo nhiu kiu khc nhau to thnh cc kiu phng sch. Kiu nh hnh 9 gi l "ballroom" v ta s c mt phng sch ln (khng gian ton xng nh mt phng trong qu bng). Kiu phng ny c trn l mt b lc kh hiu nng cao cung cp kh khi cho ton xng cho d my mc ng v tr no. Trn thc t, khng kh cht lng nht ch thc s cn thit ti ni m sn phm xoay v hng c th nhim bn bi v cc vng khc c th chp nhn khng kh km cht lng hn cht xu. Vi thc t ny, ngi ta c th to ra cc phng sch t t tin hn v mt kiu khc l kiu thnh cc phng nh theo mt ng trc - kiu ny c tn l service chase (hnh 10b). Mi phng con s c sch tiu chun cao, cn cc vng bn ngoi c th c sch thp hn. Cc phng con nm dc

theo mt ng hm (y l kiu phng sch m ti ang lm vic). Kiu phng sch ny c gi thnh hot ng r hn rt nhiu so vi kiu ballroom.

Hnh 10. Ba kiu phng sch hay dng cho khoa hc v cng ngh vt liu.

Ngi ta cng c th chia phng kiu ballroom thnh cc phng chc nng nh (hnh 10c) v ng nhin, trong mi phng nh s c sch cc cao v cc khu vc xung quanh (service area) s c sch thp hn. * H thng lc khng kh cho phng sch [1,4] Khng kh trong phng sch phi t cc yu cu v mc cc ht bi v th lun cn c cc h thng lc bi. K t nm 1980, mt h thng lc c s dng rng ri mang tn High Efficiency Particle Air (HEPA - H thng lc ht hiu nng cao). HEPA l mt h thng c kh nng lc ht bi ti trong khng kh vi hiu sut 99,97% cho bi nh ti 0,3 m. Ngy nay, HEPA cn c b sung cc tnh nng lc vi khun v cc ht tr.

(a)

(b)

Hnh 11. Mt b lc HEPA kiu cc np gp su (a) v cc np gp nh (b).

Khng kh c lc qua cc cun giy lc cun tng lp thnh cc media lc c rng t 15 n 30 cm v c ngn cch bi cc l nhm mng. ngn cn cc ht bi nh, ngi ta s dng media lc l cc dy micro xp thnh cc li siu nh (hnh 12a) v do cho khng kh i qua, ng thi cn cc ht bi.

(a)

(b)

(c)

Hnh 12. Vi cu trc tm lc (a) v c ch lc bi ca tm lc (b) v hiu sut lc (c).

5. Trang b cn thit cho phng sch

Con ngi lm vic trong phng sch l mt ngun to ra bi bn cho phng. Khi con ngi di chuyn, c th sn sinh ti 100000 ht (kch thc ln hn 0,5 m) v hng ngn ht bi c micron mang theo ngi mi pht. Do vy, vi mi phng sch, ngi ta u c gii hn s ngi lm vic tng ng vi quy m ca phng. V m bo cho mi trng trong phng, ngoi cc my mc trang b cho cc cng vic thit yu trong phng sch, th trang b cho con ngi l rt cn thit gim thiu lng bi sn sinh. Cc trang thit b cn thit cho ngi lm vic gm: - Qun o bo h: Thng l o v qun lin mt khi. - M bo h chm u (ta nh tc ngi cng l ngun bt bi) - Giy vi chm kn chn - Mt n chm mt, c th c c b lc kh th mt n, knh bo v mt, gng tay Qun o, m, mt n, giy thng lm bng vi, c bn ngoi l b mt trn, khng bt bi, ng thi m bo cho con ngi d dng di chuyn v hot ng (hnh 13).

Hnh 13. Mt nhn vin lm vic trong phng sch, mang bo h: o, m, mt n, gng tay.

Trong ngnh vt l, khoa hc vt liu, phng sch thng dng cho cc cng ngh ch to vt liu i hi sch cao nh: quang khc, cng ngh mng mng (MBE, sputtering, CVD...), cng ngh linh kin bn dn, linh kin in t, cc h thng vi c in t (MEMS, NEMS), cc php phn tch tinh t, cc x l l ha... n y, chc bn c t tr li c cu hi "Ti sao phi dng phng sch?", nu cha tr li c, hy tng tng, cng ngh ch to cc linh kin kch thc ch c micromet n nanomet, ch cn mt lng bi nh bm vo c th lm thay i hon ton tnh cht ca sn phm.

Hnh 14. Khu vc trung gian thay vo phng sch [2].

Khu vc u tin khi bn bc vo phng sch s l khu vc thay (hnh 14). y l mt khoang trung gian trc khi n cc phng chc nng, c sch khng cao. , bn s phi mc bo

h theo ng quy trnh v m bo khng lm bn khu vc ny ri mi bc vo khu lm vic. Sau khi kt thc cng vic, trc khi ra khi phng sch, ngi lm cng phi ci b bo h theo ng tin trnh v ra khi phng.
6. An ton trong phng sch

Trong phng sch, ngoi vic sch khng kh c khng ch, cn cc yu t khc l m phi iu khin mc thp, p sut, nhit ... c duy tr mc thch hp, m bo v trng. V th, iu u tin m mi ngi lm vic trong phng sch u phi tun th l cc quy tc an ton lao ng m bo an ton. cc nc pht trin, mi ngi trc khi vo lm phng sch u c hc rt cn thn cc quy tc lm vic trong phng sch, m ban u lun l cc quy tc an ton lao ng: - Thot ra khi phng sch nh th no khi c cc tai nn t xut (chy, n, chp in...); cc x l cn thit cho cc tai nn ny. - Lm th no gim thiu cc tai nn v m bo an ton lao ng bng cc quy tc s dng cng nh lm vic trong phng mt cch khoa hc v chnh xc. - Cc quy tc khng lm nhim bn phng: b cc vt dng c th d bt bi nh o len, m, gng tay m, o khoc... - S dng, di chuyn, v b cc ha cht, cc vt dng th nghim ng quy tc. - S dng cc thit b trong phng ng quy trnh.

Hnh 15. Lm vic trong phng sch NASA [2].

Chng ta hy tng tng vic lm sai quy tc trong phng sch, ngoi vic s lm nhim bn phng (s rt hi cho h thng lm sch), ng thi c th rt d xy ra cc tai nn, hng hng v gy thit hi ln v ngi v ti sn. nc Anh (ti khng r cc nc khc th no), trc khi vo lm vic c lp trong phng sch, ngi lao ng phi tri qua kha hc v an ton lao ng, k xc nhn tun th cc quy tc an ton v vt qua k kim tra cc quy tc ny nhm m bo an ton cho phng sch. Cn mt iu kh chu na l khi lm vic trong phng sch, hy chu kh nhn cc "ni bun" ca bn thn, v trong phng sch khng th cho php bn to ra cc cht bn .
7. Kt lun

Phng sch l mt h thng lm vic cc k tinh vi v hin i, v n chng xa l g cc nc c nn khoa hc v cng ngh tin tin. Vit Nam, do iu kin kinh t v nn khoa hc cn km pht trin, phng sch vn cn rt xa l, v d c n v khoa hc c trang b phng sch, nhng c nhn ti tin l cc phng sch chng th hot ng c do n i hi kinh ph hot ng (running cost) qu cao so vi iu kin kinh t ca cc n v. Chnh v th, c l phng sch Vit Nam ta vn cn mang tnh cht "trang tr" nhiu hn l mang li hiu qu nghin cu (hi vng nhn xt ny ca ti l sai). L mt ngi lm nghin cu v cng phi lm nhiu cng on trong phng sch, c nhn ti vn mong sao phng sch s sm tr nn ph thng hn Vit Nam ta dn nghin cu c c hi pht trin v c c nhn ti sau ny tr li t nc c c hi s dng nhng kin thc c hc nc ngoi.

Ti liu tham kho

[1] [2] [3] W. Whyte, A short course on cleanroom technology: Fundamentals of design, testing and operation (Handout of University of Glasgow), Glasgow, 2006. http://en.wikipedia.org/wiki/Clean_room http://www.rockwellautomation.com/anorad/guide/cleanroom_criteria.html W. Whyte, Clean room Technology: Fundamentals of design, testing and operating a room, John Wiley and Sons Inc., (2001).

[4]