Reference number
Num\u00e9ro de r\u00e9f\u00e9rence
ISO 14644-6:2007(E/F)
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
ISO
14644-6
First edition
Premi\u00e8re \u00e9dition
2007-07-15
Cleanrooms and associated controlled
environments \u2014
Part 6:
Vocabulary
Salles propres et environnements
ma\u00eetris\u00e9s apparent\u00e9s \u2014
Partie 6:
Vocabulaire
EN ISO 14644-6:2007
ii
iii
Contents
Page
Foreword.............................................................................................................................................................v Introduction.......................................................................................................................................................vii 1
Scope............................................................................................................................................................1
2
Terms and definitions.................................................................................................................................1 Bibliography......................................................................................................................................................30 Alphabetical index............................................................................................................................................31 French alphabetical index (Index alphab\u00e9tique).............................................................................................33
EN ISO 14644-6:2007
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iso 14644-6
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dear sir, please send me the pdf file of the same standard on my id kunalkp88@gmail.com advance thanks for your cooperation best regards, kunal patel