Please note that this work is published under a :Attribution-NonCommercial 2.5You are free:
to copy, distribute, display, and perform the work
to make derivative worksUnder the following conditions:Attribution.Please attribute this work using: “A (not so) short Introduc-tion to Micro Electromechanical Systems”, F. Chollet, HB. Liu,version 2.0, Aug. 2006,
.Noncommercial.You may not use this work for commercial purposes.
For any reuse or distribution, you must make clear to others the licenseterms of this work.
Any of these conditions can be waived if you get permission from thecopyright holder.Your fair use and other rights are in no way aﬀected by the above.This is a human-readable summary of the Legal Code(