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MEMS工艺(1)

MEMS工艺(1)

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Published by coldice5202003

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Categories:Types, School Work
Published by: coldice5202003 on Apr 04, 2009
Copyright:Attribution Non-commercial

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05/10/2014

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MEMS
工艺
 
 
课程内容
 
2
 
第二章 半导体制造技术(
6
4
 
第三章 硅微加工技术(
6
2
 
第四章 光刻技术(
3
2
 
第五章
LIGA
技术(
3
 
第六章 微机械装配与集成(
3
2
 
第七章 典型微机械系统装置(
4
 
第八章
MEMS
制造设备(
3
考试:开卷考试 
80%+
平时 
20%
(包括作业)考试:考试 
70%+
课堂 
10%+
作业 
20%
(包括试验 
 
 
第一章主要内容
MEMS
的基本概念及其特点
MEMS
的 展概况
MEMS
MEMS
工艺的基本概念
MEMS
 
工艺的国内外情况及发展趋势

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