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AN
EXPERIMENTAL STUDY OF THE FORMATION OF POLYMER FILMS
IN
A
NONEQUILIBRIUM FLUOROCARBON PLASMA
G.K.
Vinogradov,
G.
Zh. Imanbaev,L. S. Polak, and
D.
I.
Slovetskii
UDC
537.525Features of the plasma polymerization of freon 318 are considered for
a
high-fre-quency capacitative discharge. The characteristic film and powder formationranges have been related to the discharge conditions.
It
is
found that the filmgrowth rate
is
dependent on the deposition time. The rates of deposition of filmand powder on the lower and upper electrodes areidentical. The powder on the up-per electrode
is
due to charges on the particles.There are many papers on the formation of polymer filmsin glow discharges, which haveused a wide range of experimental conditions [l, 21. The kinetic data are determined not on-ly by the discharge parameters but also by the reactor geometry and the method of supplyingthe gas [3, 41.
A
common type of reactor
is
one with plane-parallel electrodes in a vacuumchamber supplied with the working gas.Wehave examined the features of film formation in a high-frequency capacitative dis-charge in a reactor of this type with the vapor of freon 318 (maker's composition:92% octa-fluorocyclobutane, 7.78% hexafluoropropylene, and 0.12% impurities).The system was based on a VUP-4 universal vacuum system.Figure
1
shows the scheme. Thedischarge was fed from a modified Ekran-1
HF
generator,frequency 40.68
MHz.
The output cur-rent could be varied smoothly in the range 20-100
W.
The power deposited in the dischargewas determined with a transmitted-power meter based on directional branches.The pressure inthe chamber was measured with aU oil manometer (silicone oil). The pressure
limits
were25-260 Pa, error 510 Pa.The flow rate of the working gas
was
1-8
x
m3/min (under stan-dard conditions)and wasdetermined by means of a float rotameter with an error of not morethan +7%.The electrodes were copper disks of diameter 0.12
m.
The grounded lower electrode wascooled by water. The electrode gap was 7
mm.
The gas was supplied to the chamber through
a
tube of diameter 3
mm
and
it
diffused into the electrode gap. The substrates were plates ofsilicon, silicon dioxide, and mica. The plates had previously been washed in organic sol-vents before being placed in the center of the lower electrode for further purification in adischarge in argon at 130 Pa, flow rate
3
x
m3/sec and power 30
W
for
5
min.Afterthis,the chamber was evacuated to
1
Pa and the necessary flow rate and pressure of the work-ing gas were set up and the discharge was struck.
A
mask of thickness 0.1
mm
was placed ona step on the substrate in order to determine the film thickness by an interferometric method.The region of stable discharge burning was determined before the experiments were started.The size of the luminous part of the discharge was always greater than the substrate diame-ter of 40
mm.
RESULTS
AND
DISCUSSIONThe power deposited in the discharge,the pressure, and the flow rate alter the formand number of the plasma polymerization products (film and powder). Figure 2 shows the char-acteristic rangesin which film and powder are formedin relation to the power
w
and pressure
P.
There are no sharp boundaries between the ranges, which pass smoothly one into another.In ranges
I
and
I1
(P
<
70 Pa), powder
is
always formed along with the film. The color ofthe powder
is
white, whereas that of the film
is
yellowish.The particle size and shape andthe amount of powder vary on going from one region to another.
At
low power and pressure(region I), the particles mainly take the form of snowflakes and floccules (Fig. 3a), which
--
A.
V.
Topchiev Institute of zetrochemical Synthesis, Academy of Sciences of the
USSR.
Translated from Khimiya Vysokikh Energii, Vol. 17, No. 4, pp. 372-377, July-August, 1983.Original article submitted August 2, 1982.
0018-1439/83/1704-0289$07.50
O
1984
Plenum Publishing Corporation 289
of 00

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