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Radiation Hardening of MEMS Based Devices

Radiation Hardening of MEMS Based Devices

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Published by Felix Lu
Brief overview of radiation damage mechanisms of devices with a focus on MEMS devices.
Brief overview of radiation damage mechanisms of devices with a focus on MEMS devices.

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Published by: Felix Lu on May 01, 2009
Copyright:Attribution Non-commercial

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02/01/2013

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Operation of MEMS baseddevices in space
Felix LuDuke UniversityJanuary 18, 2007
http://www.sandia.gov/mstc/images/galileo.gif
Literature review on
From wikipedia
 
2
Outline
Motivation and backgroundRadiation types and effectsRadiation testingEffects on materialsEffects on DevicesExamplesMitigation techniquesSummary
http://see.msfc.nasa.gov/pf/pf.htm
 
3
Background & Components
Radiation
 –Degrades electrical and optical components –Induces noise in detectors –Induces errors and latch-ups in digital circuits –Builds up charge in insulators –Harmful to organisms
MEMS based device componentsinclude:
-Mechanical properties of semiconductors-Electrically insulating oxides-P-n junctions-Oxides for optical fibers
MEMS based systems include:
-Inertial navigation-Bolometers-RF switches and Variable capacitors-Optical switching and communications-Propulsion-Bio&microfluidics

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