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Brief Overview of Residual Stress in Thin Films

Brief Overview of Residual Stress in Thin Films

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Published by Felix Lu

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Published by: Felix Lu on May 01, 2009
Copyright:Attribution Non-commercial

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12/20/2012

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1
Physical mechanisms ofresidual stress in metallic thinfilms
-A review of the literature -February 19
th
, 2008Felix Lu
Applied Quantum Technologies / Duke University
 
2
Outline
Stresses & Strains
Residual stresses
Thin film formation
Growth modes
Mechanisms of intrinsic stress
Effect of sputtering
 
3
Stresses & Strains
Stress (
σ
) = force/area
 –Typically in Dynes/cm
2
, where 1 dyne =10
-5
N or 1 g
·
cm/s
2
Strain (
ε
) = (
length)/length (%)
σ
= E
ε,
where E is Young’s modulusDefinitions
http://matthieu.lagouge.free.fr/phd_project/extractor.html
Unreleased structureReleased structure with stressThermally actuated structure
σε
Plastic deformation
Elastic region
UltimatestrengthYieldstrength

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