Learning Objectives Part 3
– Nanoscale Science –After completing PART 3 of this course you should have an understanding of, and be able to demonstrate, thefollowing terms, ideas and methods.(i) Appreciate what is meant by
wrt the fabrication of nanostructures(ii) Understand the process of photolithography as applied to the microelectronics industry.(iii) Understand the limits of photolithography
(iv) Understand the process of e-beam lithography.(v) Understand the process on scanning near field optical lithography(vi) Understand the process of dip-pen nanolithography.(vii) Understand the process of nanooxidation on surfaces, induced by SPMs.(viii) Understand that SPMs can not only image, but draw and move particles on surfaces.