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SEM
Scanning Electron Microscopy
TS. Nguyn Hong Vit
H Ni, 11/2013
Instructor: Dr. Nguyen Hoang Viet
Office Location: C5-312, Dept. Iron and Steelmaking
Hanoi University of Science and Technology
Facebook: https://www.facebook.com/viet4777
Website: http://kythuatvatlieu.org
About the Author
Ni dung
Nguyn l ca h thng SEM
H thng SEM
Tng tc in t - mu
in t th cp, in t tn x ngc, Tia X c trng
ng dng SEM
Hnh thi b mt
Vi phn tch nguyn t
NGUYN L SEM
Cu to ca h thng SEM
Tng tc in t - mu
SE, BSE v tia X c trng
SEM vs. OM
nh hin vi quang hc
(OM)- nh sng trng
nh hin vi in t qut
(SEM) in t th cp
Scanning l g?
phng i - Magnification
Vng c
chiu/qut
chm in t
Chuyn i
thng tin
F (x, y, S)
Cu to ca thit b SEM
Vacuum System
Electron Source and Accelerating
Voltage
Electron Lenses (electromagnetic)
Condenser Lens(es)
Objective Lens
Stigmator Coils
Beam Deflectors (electromagnetic)
Alignment
Scanning (raster)
Objective Aperture
Multi-Axis Specimen Stage
Detectors
Imaging detectors
Analytical detectors
Operating / Display Systems
Thng s chm in t
4 tham s xc nh c trng u d
ng knh d
p
Dng in i
p
Gc hi t - o
p
Th tng tc V
o
Cc tham s c lp ny cn phi c cn
bng bi ngi vn hnh ti u trng thi
u d p ng yu cu v:
phn gii
di tiu c
Cht lng nh (t s S/N)
Hiu nng phn tch
sng quang in t, |, ca u
d hay sng ngun in t - l
tham s rt quan trng nh
gi ngun in t
2 2 2 2
2
4
4
p p
p p p
p
i i
d d
|
t o t
to
= =
| |
|
|
\ .
su trng
Depth of Field (Focus)
( )
2 ix
2
tan tan
f
p el size
d R
D
M o o o
= = ~
=
+