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Giao Trinh VLKT Va Mang Mong

Giao Trinh VLKT Va Mang Mong

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Published by nmta

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Published by: nmta on Sep 15, 2009
Copyright:Attribution Non-commercial

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12/29/2012

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V\u1ead t l\u00fd v\u00e0 k\u1ef9 thu\u1ead t m\u00e0ng m\u1ecf ng
1
V\u1ead t l\u00fd v\u00e0 k\u1ef9 thu\u1ead t m\u00e0ng m\u1ecf ng
2
M\u1ee5 c l\u1ee5 c
L\u1edd i n\u00f3i \u0111\u1ea7 u
v
Ch\u01b0 \u01a1 ng 1. Nh\u1ead p m\u00f4n v\u1ead t l\u00fd v\u00e0 k\u1ef9 thu\u1ead t m\u00e0ng m\u1ecf ng
1
1.1. Gi\u1edb i thi\u1ec7 u chung
1
1.1.1. Ph\u01b0 \u01a1 ng ph\u00e1p l\u1eaf ng \u0111\u1ecd ng pha h\u01a1 i ho\u00e1 h\u1ecd c
(CVD)
2
1.1.2. Ph\u01b0 \u01a1 ng ph\u00e1p ho\u00e1, ho\u00e1 l \u00fd k\u1ebf t h\u1ee3 p
3
1.2. Ph\u01b0 \u01a1 ng ph\u00e1p bay h\u01a1 i v \u1ead t l\u00fd (PVD)
3
1.2.1. C\u00e1c kh\u00e1i ni\u1ec7 m v\u00e0 \u0111\u1ea1 i l\u01b0 \u1ee3 ng c\u01a1 b\u1ea3 n
3
1.2.2. K\u1ef9 thu\u1ead t ch\u00e2n kh\u00f4ng v\u00e0 c\u00f4ng ngh\u1ec7 m\u00e0ng m\u1ecf ng
15
1.2.3. Ph\u00fan x\u1ea1
19
Ch\u01b0 \u01a1 ng 2. \u0110\u1ed9 ng h\u1ecd c ch\u1ea5 t kh\u00ed
23
2.1. \u00dd ngh\u0129a v\u1ead t l\u00fd c\u1ee7 a \u00e1p su\u1ea5 t v \u00e0 nhi\u1ec7 t \u0111\u1ed9 ch\u1ea5 t kh\u00ed
23
2.2. C\u00e1c h\u00e0m ph\u00e2n b\u1ed1 c\u1ee7 a ph\u00e2n t\u1eed
25
2.3. T\u1ea7 n s\u1ed1 va ch\u1ea1 m c\u1ee7 a ph\u00e2n t\u1eed v\u1edb i b\u1ec1 m\u1eb7 t
29
2.4. Qu\u00e3ng \u0111\u01b0 \u1edd ng t\u1ef1 do c\u1ee7 a ph\u00e2n t\u1eed kh\u00ed
32
2.5. M\u1ed9 t s\u1ed1 t\u00ednh ch\u1ea5 t
35
2.5.1. Nhi\u1ec7 t dung c\u1ee7 a h\u1ec7 kh\u00ed hai nguy \u00ean t\u1eed
35
2.5.2. Khu\u1ebf ch t\u00e1n
37
2.5.3. \u0110\u1ed9 nh\u1edb t
38
2.5.4. \u0110\u1ed9 d\u1eab n nhi\u1ec7 t
42
2.6. D\u00f2ng kh\u00ed
43
2.6.1. Ch\u1ebf \u0111\u1ed9 d\u00f2ng kh\u00ed
43
2.6.2. D\u00f2ng kh\u00ed trong ch\u1ebf \u0111\u1ed9 nh\u1edb t
44
2.6.3. D\u00f2ng kh\u00ed trong ch \u1ebf \u0111\u1ed9 Kudsen- D\u00f2ng ph\u00e2n t\u1eed
45
2.6.4. \u0110\u1ed9 d\u1eab n c\u1ee7 a c\u1ea5 u tr\u00fac d\u1eab n kh\u00ed
47
Ch\u01b0 \u01a1 ng 3. H\u1ea5 p ph\u1ee5 v\u00e0 ng\u01b0 ng t\u1ee5
49
3.1. H\u1ea5 p ph\u1ee5 kh\u00ed
51
3.1.1. V\u00ec sao kh\u00ed h\u1ea5 p ph\u1ee5 ?
51
3.1.2. Th\u1edd i gian l\u01b0 u tr\u00fa
53
V\u1ead t l\u00fd v\u00e0 k\u1ef9 thu\u1ead t m\u00e0ng m\u1ecf ng
3
3.1.3. \u0110\u1eb3 ng nhi\u1ec7 t h\u1ea5 p ph\u1ee5 Langmuir
54
3.1.4. Epitaxy l\u1edb p nguy\u00ean t\u1eed
57
3.2. \u00c1p su\u1ea5 t h\u01a1 i
62
3.2.1.\u00c1p su\u1ea5 t h\u01a1 i ho\u1ea1 t t\u00ednh nhi\u1ec7 t
62
3.2.2.\u00c1p su\u1ea5 t h\u01a1 i c\u1ee7 a c\u00e1c nguy\u00ean t\u1ed1
63
3.2.3. \u00c1p su\u1ea5 t h\u01a1 i c\u1ee7 a h\u1ee3 p kim v\u00e0 h\u1ee3 p ch\u1ea5 t
68
3.3. Ng\u01b0 ng t\u1ee5 t\u1eeb pha h\u01a1 i
71
3.3.1. Ng\u01b0 ng t\u1ee5 t\u1eeb pha h\u01a1 i \u0111\u01a1 n nh\u1ea5 t
71
3.3.2. Ng\u01b0 ng t\u1ee5 c\u00e1c h\u1ee3 p ch\u1ea5 t b\u1ea3 o to\u00e0n h\u1ee3 p th\u1ee9 c
73
3.3.3. Ho\u00e1 h\u01a1 i nhanh c\u00e1c h \u1ee3 p ch\u1ea5 t d\u1ec5 ph\u00e2n ly
74
3.3.4. \u0110\u1ed3 ng bay h\u01a1 i \u2013 ph\u01b0 \u01a1 ng ph\u00e1p \u201cBa nhi\u1ec7 t \u0111\u1ed9 \u201d
75
3.3.5. B\u1ed1 c bay ph\u1ea3 n \u1ee9 ng
77
Ch\u01b0 \u01a1 ng 4. V\u1ead t l\u00fd v\u00e0 k\u1ef9 thu\u1ead t ch\u00e2n kh\u00f4ng cao
79
4.1. M\u1ed9 t s\u1ed1 lo\u1ea1 i b\u01a1 m ch\u00e2n kh\u00f4ng
79
4.1.1. B\u01a1 m c\u01a1 h\u1ecd c
80
4.1.2. B\u01a1 m khu\u1ebf ch t\u00e1n
86
4.2. Nguy\u00ean l\u00fd ch\u00e2n kh\u00f4ng
89
4.2.1. T\u1ed1 c \u0111\u1ed9 b\u01a1 m
89
4.2.2. D\u00f2ng h\u00fat kh\u00ed
93
4.2.3. \u0110\u1ed9 d\u1eab n c\u1ee7 a h\u1ec7 ch\u00e2n kh\u00f4ng
95
4.3. \u0110\u1eb7 c t\u00ednh chung c\u1ee7 a h\u1ec7 ch\u00e2n kh\u00f4ng
96
4.3.1. C\u00e1c kh\u00e1i ni\u1ec7 m \u0111\u1ed9 ng h\u1ecd c c\u01a1 b\u1ea3 n
96
4.3.2. C\u00e1c hi\u1ec7 n t\u01b0 \u1ee3 ng kh\u1eed h\u1ea5 p ph\u1ee5 , nh\u1ea3 kh\u00ed
v\u00e0 th \u1ea9 m th\u1ea5 u
101
4.3.3. \u0110o ch\u00e2n kh\u00f4ng v\u00e0 \u0111\u01a1 n v \u1ecb \u00e1p su\u1ea5 t
102
Ch\u01b0 \u01a1 ng 5. L\u00fd thuy\u1ebf t b\u1ed1 c bay ch\u00e2n kh\u00f4ng
107
5.1. T\u1ed1 c \u0111\u1ed9 b\u1ed1 c bay
107
5.1.1. Ph\u01b0 \u01a1 ng tr\u00ecnh Hertz-Knudsen
107
5.1.2. B\u1ed1 c bay t\u1ef1 do - s\u1ef1 tho\u00e1t ph\u00e2n t\u1eed
109
5.1.3. C\u00e1c c\u01a1 ch\u1ebf b\u1ed1 c bay
111
5.2. Ph\u00e2n b\u1ed1 ph\u00e2n t\u1eed b\u1ed1 c h\u01a1 i theo c\u00e1c h\u01b0 \u1edb ng
116

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