Welcome to Scribd, the world's digital library. Read, publish, and share books and documents. See more
Standard view
Full view
of .
Save to My Library
Look up keyword or section
Like this

Table Of Contents

0 of .
Results for:
No results containing your search query
P. 1
Introduction to Deep Submicron Cmos Devicw Tech & Its Impact on Ckt Design

Introduction to Deep Submicron Cmos Devicw Tech & Its Impact on Ckt Design

Ratings: (0)|Views: 1,137 |Likes:
Published by harishsharma1988

More info:

Categories:Types, Research, Science
Published by: harishsharma1988 on Oct 10, 2009
Copyright:Attribution Non-commercial


Read on Scribd mobile: iPhone, iPad and Android.
download as PDF, TXT or read online from Scribd
See more
See less





Slide 1Loke, Wee & PfiesterAgilent Technologies
Introduction to Deep SubmicronCMOS Device Technology& Its Impact on Circuit Design
Alvin L.S.Loke, Tin Tin Wee & James R. PfiesterAgilent Technologies, Fort Collins, COIEEE Solid-State Circuits SocietyDecember 8, 2004
Slide 2Loke, Wee & PfiesterAgilent Technologies
CMOS Technology TrendsMOSFET BasicsDeep Submicron FET Fabrication SequenceEnabling TechnologiesSecond-Order ConsequencesDealing with Process Variations in ManufacturingConclusions
A proper
alone would take weeks,let alone a whole semesterNeed to omit lots ofnitty-gritty yet important processdetailsHopefully, we’ll still learn lots of
device physics
Slide 3Loke, Wee & PfiesterAgilent Technologies
Source: Thompson
et al 
., Intel (2002)
Where is CMOS Technology Today?
Scaling is still alive & well130nm now standard fare90nm already in volume manufacturing65nm integration tough but not insurmountableSome key trends:Aggressive scaling of gate CD (critical dimension)Scaling driven by exclusively by digital circuit needs
Source: Wu
et al 
., TSMC (2002)
90nm Technology59nm59nm

Activity (22)

You've already reviewed this. Edit your review.
1 hundred reads
1 thousand reads
bschiranth liked this
vuaphu liked this
ohenri100 liked this
anilshaw27 liked this
mvreddy_222 liked this
redkryptonite liked this
shakun_00 liked this
Tanmoy Bhowmik liked this

You're Reading a Free Preview

/*********** DO NOT ALTER ANYTHING BELOW THIS LINE ! ************/ var s_code=s.t();if(s_code)document.write(s_code)//-->