Bi ging

K Thut Cm Bin (sensors)

1
Hoang Si Hong
----2011----
Faculty of Electrical Eng., Hanoi Univ. of Science and Technology (HUST),
Hanoi, VietNam
Hoang Si Hong-HUST
4
Ngun tham kho
Note: Bi ging mn hc ny c tham kho, trch dn v lc dch t cc ngun sau:
Sch
- K thut o lng cc i lng in tp 1, 2- Phm Thng Hn, Nguyn Trng Qu.
- Cc b cm bin trong o lng-L Vn Doanh
- Cc b cm bin-Nguyn Tng Ph
- o lng in v cc b cm bin: Ng.V.Ho v Hong S Hng
- Sensor technology handbook (edited by JON WILSON)
- Elements of Electronic Instrumentation and Measurement (Prentice-Hall Company)
- Sch gii thch n v o lng hp php ca Vit Nam
Bi ging v website:
- Bi ging k thut cm bin-Hong S Hng-BKHN(2005)
- Bi ging Cm bin v k thut o:P.T.N.Yn, Ng.T.L.Hng BKHN (2010)
- Bi ging MEMs ITIMS BKHN
- Mt s bi ging v cm bin v o lng t cc trng i hc KT khc Vit Nam
- Website: sciendirect/sensors and actuators Aand B
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Ni dung mn hc v mc ch
Ni dung
Chapter 1: Khi nim chung v Cm bin (2b)
Chapter 2: Cm bin in tr (2b)
Chng 3: Cm bin o nhit (2b)
Chng 4: Cm bin quang (2b)
Chng 5: Cm bin tnh in (2b)
Chng 6: Cm bin Hall v ho in
Chng 6: Cm bin v PLC(1b)
Mc ch: nm c cu to, nguyn l hot ng v ng dng ca
cc loi cm bin thng dng trong cng nghip v i sng. Nm
c xu th pht trin chung ca cng ngh cmbin trn th gii.
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Chng 3: Cm bin in tr
Ni dung
Cm bin in tr lc cng
Bin tr
Bao nhiu kg ?
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in tr lc cng (strain gage)-Cu to
Cu to (dy in tr, mng mng kim loi)
Dy mnh, l mng v mng mng
Trn giy mng cch in, dn dy in tr (constantan, nicrom..) hnh
rng lc ng knh 0.02 0.03 mm. Chiu di lo thng t 8-15 mm,
chiu rng a0 3-10 mm. in tr ban u 800 1000 , lng thay i
in tr khong 10-15
l
0
a0
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Nguyn l
Khi dy dn chu bin dng c kh th in tr ca n thay i, hin tng gi
l hiu ng tenzo (piezoresitive). Chuyn i lm vic da trn hiu ng gi l
chuyn i in tr lc cng
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Mt s tnh cht ca cmbin
-Tu theo ng knh dy s c dng cho php i qua tng ng.
-V d: ng knh = 12 mm th dng cho php l 15 mA
- ng knh = 15 mm th dng cho php l 35 mA
- Thng thng nhy theo l thuyt s khc so vi c tnh thc t. Do
vy khi sn xut ngi ta s ch to hng lot. Sau cc cm bin s
c hiu chun n chic tu tho ng dng thc t
- H s nhit ca vt liu cn phi b hoc cn c b nhit trong mch
o
- Vt liu ch to dy in tr cn c in tr sut ln gim kch thc
chuyn i
- Tng di tc dng lo tng nhy
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Cch dn tenzo
- K thut dn (hnh v): trc khi dn phi lm sch b mt vt liu bng ho cht->
ph lp keo dn
- Chn v tr dn: c bin dng ln nht tng nhy
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Mch o
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Mch o
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Cu 4 nhnh
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Mch phn p
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Sai s v ng dng
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Loadcell (ch to cn in t)
- Cn t
- Cn bng nh
lng
- Cn phi liu
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Loadcell
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ng dng hiu ng tenzo cho vic ch to cm
bin o p sut (MEMS)
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ng dng hiu ng tenzo cho vic ch to cm
bin o p sut (MEMS)
Cu hi v Lu
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