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Stephen Senturia - Microsystem Design

Stephen Senturia - Microsystem Design

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Published by: api-3712372 on Dec 01, 2009
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03/18/2014

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MICROSYSTEM DESIGN
ABOUT THE COVER
The author gratefully acknowledges the cover photograph by Felice Frankel,
Artist in Residence at the Massachusetts Institute of Technology and coauthor
ofOn the Surface of Things: Images of the Extraordinary in Science.

This particular image, taken with Nomarski optics, presents a wafer-bonded piezoresistive pressure sensor. It is fabricated in the sealed-cavity process developed by Professor Martin Schmidt of the Massachusetts Institute of Tech- nology with his graduate students, Lalitha Parameswaran and Charles Hsu. The piezoresistors are clearly visible, and the slight contrast across the central diaphragm region shows that the diaphragm is actually slightly bent by the pressure difference between the ambient and the sealed cavity beneath.