Welcome to Scribd, the world's digital library. Read, publish, and share books and documents. See more
Download
Standard view
Full view
of .
Save to My Library
Look up keyword
Like this
8Activity
0 of .
Results for:
No results containing your search query
P. 1
A Project Report

A Project Report

Ratings: (0)|Views: 130 |Likes:
Published by ashu_update
Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology. While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical components are fabricated using compatible "micromachining" processes that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices.MEMS promises to revolutionize nearly every product category by bringing together silicon-based microelectronics with micromachining technology, making possible the realization of complete systems-on-a-chip. MEMS is an enabling technology allowing the development of smart products, augmenting the computational ability of microelectronics with the perception and control capabilities of microsensors and microactuators and expanding the space of possible designs and applications
In addition, the mechanical switch, it is a key component with huge potential in various microwave circuits. Optical MEMS technology is currently used in low- or medium-volume applications. It proves to be a boon for the modern world.
Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology. While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical components are fabricated using compatible "micromachining" processes that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices.MEMS promises to revolutionize nearly every product category by bringing together silicon-based microelectronics with micromachining technology, making possible the realization of complete systems-on-a-chip. MEMS is an enabling technology allowing the development of smart products, augmenting the computational ability of microelectronics with the perception and control capabilities of microsensors and microactuators and expanding the space of possible designs and applications
In addition, the mechanical switch, it is a key component with huge potential in various microwave circuits. Optical MEMS technology is currently used in low- or medium-volume applications. It proves to be a boon for the modern world.

More info:

Published by: ashu_update on Mar 08, 2010
Copyright:Attribution Non-commercial

Availability:

Read on Scribd mobile: iPhone, iPad and Android.
download as DOC, PDF, TXT or read online from Scribd
See more
See less

02/07/2013

pdf

text

original

 
MEMS
 
 A Project Report 
Submitted in partial fulfillment of the requirements for the B.tech
ASHUTOSH BISHOYI
Roll # ECE200610178
Mar-2010
Under the guidance of 
Mr. Boli Sridhar 
NATIONAL INSTITUTE OF SCIENCE&TECHNOLOGY 
PALUR HILLS, BERHAMPUR, ORISSA – 761008, INDIA
 
2
 
ABSTRACT
Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors,actuators, and electronics on a common silicon substrate through microfabrication technology.While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS,Bipolar, or BICMOS processes), the micromechanical components are fabricated usingcompatible "micromachining" processes that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices.MEMS promises to revolutionize nearly every product category by bringing together silicon-basedmicroelectronics with micromachining technology, making possible the realization of complete
systems-on-a-chip
. MEMS is an enabling technology allowing the development of smart products, augmenting the computational ability of microelectronics with the perceptionand control capabilities of microsensors and microactuators and expanding the space of possibledesigns and applicationsIn addition, the mechanical switch, it is a key component with huge potential in variousmicrowave circuits. Optical MEMS technology is currently used in low- or medium-volumeapplications. It proves to be a boon for the modern world.
3

Activity (8)

You've already reviewed this. Edit your review.
1 hundred reads
achuu1987 liked this
ameshlal liked this
ameshlal liked this
joydeep12 liked this
nish1802 liked this
kirangkvkit liked this
MATHANKUMAR.S liked this

You're Reading a Free Preview

Download
/*********** DO NOT ALTER ANYTHING BELOW THIS LINE ! ************/ var s_code=s.t();if(s_code)document.write(s_code)//-->