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20080723-488-Metallization

20080723-488-Metallization

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Published by engineeringhandbook

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Published by: engineeringhandbook on Aug 06, 2008
Copyright:Attribution Non-commercial

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05/09/2014

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Hong Xiao, Ph. D.www2.austin.cc.tx.us/HongXiao/Book.htm1
Chapter 11Metallization
Hong Xiao, Ph. D.hxiao89@hotmail.com
www2.austin.cc.tx.us/HongXiao/Book.htm
 
Hong Xiao, Ph. D.www2.austin.cc.tx.us/HongXiao/Book.htm2
Objectives
Explain device application of metallizationList three most commonly used metalsList three different metallization methodsDescribe the sputtering processExplain the purpose of high vacuum inmetal deposition processes
 
Hong Xiao, Ph. D.www2.austin.cc.tx.us/HongXiao/Book.htm3
Metallization
DefinitionApplicationsPVD vs. CVDMethodsVacuumMetalsProcessesFuture Trends

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