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jayaprakash(MEMS)

jayaprakash(MEMS)

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Published by yuben joseph

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Published by: yuben joseph on Jan 25, 2011
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04/08/2011

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ACKNOWLEDGEMENT
I extend my sincere gratitude to Dr.N.Premachandran, principal , Govt.Engineering College ,Thrissur , and Prof.K P Indira Devi, Head Of theElectronics and Communication Department, Govt. Engineering collegeThrissur , For providing me with the necessary infrastructure fosuccessful completion of my seminar.I would like to convey my deep sense of gratitude to the seminacoordinator, Smt. C.R. Muneera .Asst. Prof, Electronics andcommunication department for her relentless support.I am also thankful to Mr.C.D. Anilkumar, Lecturer electronics andcommunication department, for his suggestions.I am thankful to all of my friends for their moral support for me
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SEMINAR REPORT’04 MEMS BASED OPTICAL CROSS CONNECTS 
Abstract
Over the few years an amazing amount of interest hasemerged for applications of micro electro mechanical systems intelecommunications. MEMS devices are beginning to impact almostevery area of science and technology. In fields as disparate as wirelesscommunications, automotive design, entertainment, and light wavesystems. Continuous growth in demand for optical network capacityhas fueled the development of optical cross connects having highcapacity and reliability. Micro-Electro-Mechanical-Systems devices arerecognized to be the enabling technologies which provide a costeffective and reliable way to the implementation of these optical crossconnects. Silicon based MEMS have proved to be the technology of choice for low cost scalable photonic applications because they allowmass manufacturing of highly accurate miniaturized parts and usematerials with excellent electrical and mechanical characteristics. Theuse of MEMS for optical switching has tuned out to be most attractivesince this application could revolutionize fiber optictelecommunications. While the promises of automaticallyreconfigurable networks and bit rate independent photonic switchingare bright, the endeavor to develop a high port count MEMS basedOXC involves overcoming challenges in MEMS design and fabrication, optical packaging and mirror control.
dept. of ece gec thrissur
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SEMINAR REPORT’04 MEMS BASED OPTICAL CROSS CONNECTS 
CONTENTS
1.
INTRODUCTION………………………..……………..….03
2.
OPTICAL SWITCHING……………………….……..…..04
2.1.
ALL OPTICAL SWITCHING..…………………….05
2.1.1.
PLANAR LIGHT WAVE CIRCUITS……………..06
2.1.2.
MICRO ELECTRO MECHANICAL SYSTEMS...06
2.1.3.
INK JET BUBBLE SYSTEMS………….………….06
2.1.4.
ELECTROHALOGRAPHY………….…………..…073. MEMS SWITCHES………………………………………....083.1. ACTUATION METHODS……………………….…....123.2. MEMS SWITCH ARCHITECTURES……………….123.2.1. 2-D ARCHITECTURE…………………………..123.2.2. 3-D ARCHITECTURE…………………….….…144. DESIGN AND FABRICATION…………………………….164.1. DESIGN…………………………………………………164.2 FABRICATION……………………………………..…..174.2.1. MICROMACHINING PROCESS………….……..184.2.2. ELECTRO STATIC MEMS MIRROR……….…..195. PERFORMANCE CHARACTERISTICS…………………..206. APPLICATIONS ….………..…………................................…21 CONCLUSION ………………….…………….....................…22REFERENCES…….……………………..........................…...23
dept. of ece gec thrissur
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