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Table Of Contents

II Introduction
1.1 Historical Background and Parallels to Microelectronics
1.2 The Motivation for Microsystem Technology
1.3 Microphysics and Design Considerations
1.4 From the microcomponent to the Microsystem
0 Photolithographic Microfabrication
2.1 Basic Concepts of Planar Processing
2.2 Materials
2.3 Unit Processes
2.4 Integrated Processes
2.5 Limitations of Planar Processes
0 Micromachining by Machine Tools
1. HISTORICAL ASPECTS
3. MICROTOOL PREPARATION
4. WIRE ELECTRODISCHARGE GRINDING (WEDG)
5 MICRO EDM
6. MICRO MECHANICAL MACHINING (MMM)
1 Tribologicai Aspects of Microsystems
4.2 Tribology- Friction, Lubrication and Wear
4.3 Surface Structure and Tribological Contact
4.4 Friction and Wear
4.5 Materials for Reliable Micromechanical Systems
Silicon Microsensors
5.3 PERFORMANCE OF MICROMECHANICAL SENSORS
5.4 EXAMPLES OF MICROMECHANICAL SENSORS
2 Electric Field Driven Actuators
3 Piezoelectric Actuators
4 Mechanical Transformers
5 Magnetic Field Driven Actuators
7.1. Classification of energy supply methods
7.2. Internal supply methods
7.3. External supply methods and noncontact manipulation
0 Control Method of Micro Mechanical Systems
8.1 Control Principle
8.3 Intelligent Control
8.4 Man-Machine Interface
0 Examples of Microsystems
1. INTRODUCTION
2. EXAMPLES OF MICROSYSTEMS
3. EXAMPLES OF MICROMACHINES
10. Future Problems
10.1 The complete Microsystem
10.2 The Industrial Potential of Microsystem Technology
10.3 The Importance of Standardization
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sensors n actuators

sensors n actuators

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Published by Muhammed Ayoob

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Published by: Muhammed Ayoob on Mar 07, 2011
Copyright:Attribution Non-commercial

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07/20/2013

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