NEMS.They are fabricated using modified silicon fabrication technology(used to make electronics), molding and plating,etc.
1) Inkjet printers, which use piezoelectrics.2) Accelerometers in modern cars for airbag deployment in collisions.3) MEMS gyroscopes used in modern cars for dynamic stability control..4) Displays e.g the DMD chip in a projector based on DLP technologyhas on its surface several hundred thousand micromirrors.
APPLICATIONS OF MEMS IN ROBOTICS:
MEMS-scale accelerometers, geophones, and gyrosthanks to theirsmall size and weight, modest power consumption and cost, and highreliabilityare replacing some of their standard-size precursors as wellas establishing new markets of their own.While accelerometers are the current leaders in commerciallysuccessful MEMS technology, other inertial devices such as rategyroscopes are poised for a similar success. In addition to high-volumemarkets for automotive crash sensors, there are niche markets forhigh-resolution seismic sensing and high-g sensors.The main applications of MEMS in robotics are1) Accelerometers2) Geophones3) Sensors-Digital compass4) Oscillators5) Microphones1)
An accelerometer measuresacceleration (change in speed) of anything that it'smounted on. How does it work? Inside an acceleratorMEMS device are tiny micro-structures that bend dueto momentum and gravity. When it experiences anyform of acceleration, these tiny structures bend by anequivelent amount which can be electrically detected.Today, accelerometers are easily and cheaply