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Writing Engineering Abstracts(47)

Writing Engineering Abstracts(47)

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更多教學請參考http://www.chineseowl.idv.tw
更多教學請參考http://www.chineseowl.idv.tw

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Categories:Types, Research
Published by: 柯泰德 (Ted Knoy) on Mar 24, 2011
Copyright:Attribution Non-commercial

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07/25/2014

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Writing Engineering Abstracts(47)
工程英文摘要撰寫
 
柯泰德線 英文論文編修訓練服務
 
工程英文
 
 
強有力的工程英文摘要撰寫包括以下要素
:
簡介背景
 (
研究建構
+
研究問題
)
目標
 
方法
 
歸納希望的結果
 
對特定領域的貢獻
 
 
範例
(1 of 2)
簡介背景
 (
研究建構
+
研究問題
) Increasingly larger substrate requirements have spurred advances in semiconductor manufacturing, explaining the increasing importance of the pumping performance of vacuum pumps in etching, chemical vapor deposition (CVD), and physical vapor deposition (PVD) to satisfy ultraclean environment requirements. However, using oil-free backing pumps in combination with the TMP to satisfy ultraclean environment requirements is problematic.
 Therefore, this work describes a novel vacuum performance system (based on OR according to) ISO standards with automatic testing and human-machine interface functions.
方法
 Pumping performances are evaluated based on the flow meter method. The flow rate is then adjusted to obtain a balanced inlet pressure. Next, the pumping speed based on the difference of inlet pressure and ultimate pressure is divided by the throughput.  Additionally, results of the experimental pumping speed are compared with those of the simulations.

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/*********** DO NOT ALTER ANYTHING BELOW THIS LINE ! ************/ var s_code=s.t();if(s_code)document.write(s_code)//-->