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Table Of Contents

Dopants
p-n Junctions
nMOS Transistor
pMOS Transistor
Power Supply Voltage
Transistors as Switches
CMOS NOR Gate
CMOS Fabrication
Inverter Cross-section
Well and Substrate Taps
Inverter Mask Set
Detailed Mask Views
Fabrication Steps
Oxidation
Photoresist
Lithography
Etch
Strip Photoresist
n-well
Strip Oxide
Polysilicon
Polysilicon Patterning
Self-Aligned Process
P-Diffusion
Contacts
Metallization
Layout
Simplified Design Rules
Inverter Layout
Summary
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lec0Fab

lec0Fab

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Published by Riyas Edarikode P

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Published by: Riyas Edarikode P on Jun 13, 2011
Copyright:Attribution Non-commercial

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06/13/2011

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