Code No: 53231/MT
M.Tech. \u2013 II Semester Regular Examinations, September, 2008
DESIGN AND MANUFACTURING OF MEMS AND MICRO SYSTEMS
(Design for Manufacturing)
Answer any FIVE questions
All questions carry equal marks
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1.a) How microsystems are different from microelectronics systems?
b) Explain in detail any two applications of MEMS in medical or
pharma sciences with features and advantages.
2.a) Describe in detail three principal transduction methods for
b) Discuss the principles, method of ionization that are important in
MEMS design and manufacture.
3.a) Explain various concepts of thinfilm that are useful in the
manufacture of MEMS and their typical applications in use.
b) Explain the fundamentals of accelerometer design from its first
4.a) Write any two applications of MEMS in Aerospace industry with
b) How scaling in Geometry in MEMS have influence on:
5.a) How heat conduction takes place in multilayered thin film and
solids in sub micrometer scale? What are various applications of
b) Write the characteristics of fluid flow in Nanoscale. What are
various applications of such devices? given with examples.
6.a) What are various substrate materials for MEMS. Give the relative
advantages of materials used.
b) Describe micropumping in microfluids.