Welcome to Scribd, the world's digital library. Read, publish, and share books and documents. See more
Download
Standard view
Full view
of .
Look up keyword or section
Like this
40Activity

Table Of Contents

REFERENCES
1.0OBJECTIVE AND SCOPE OF THIS BOOK
4.1Evaporative Technologies
4.2Glow-Discharge Technologies
4.3Gas-Phase Chemical Processes
4.4Liquid-Phase Chemical Formation
5.1Thin-Film Applications
5.2Material Characteristics
5.3 Process Technology
5.4Thin-Film Manufacturing Equipment
6.0SUMMARY AND PERSPECTIVE FOR THE FUTURE
ACKNOWLEDGMENTS
Silicon Epitaxy by Chemical Vapor Deposition
1.1Applications of Silicon Epitaxy
2.0THEORY OF SILICON EPITAXY BY CVD
3.0SILICON EPITAXY PROCESS CHEMISTRY
4.0COMMERCIAL REACTOR GEOMETRIES
4.1Horizontal Reactor
4.2Cylinder Reactor
4.3Vertical Reactor
4.4New Reactor Geometry
5.0THEORY OF CHEMICAL VAPOR DEPOSITION
6.0 PROCESS ADJUSTMENTS
6.1Horizontal Reactor
6.2Cylinder Reactor
6.3Vertical Reactor
6.4Control of Variables
7.1Gas Control System
7.3Gas Flow Control
7.4Dopant Flow Control
8.0OTHER EQUIPMENT CONSIDERATIONS
8.1Heating Power Supplies
8.2Effect of Pressure
8.3 Temperature Measurement
8.4 Backside Transfer
8.5Intrinsic Resistivity
8.6Phantom p-Type Layer
9.0DEFECTS IN EPITAXY LAYERS
10.0 SAFETY
11.0 KEY TECHNICAL ISSUES
11.1 Productivity/Cost
11.2Uniformity/Quality
11.3Buried Layer Pattern Transfer
Buried layer pattern transfer[27]
13.0LOW TEMPERATURE EPITAXY
CONCLUSIONS
Chemical Vapor Deposition of Silicon Dioxide Films
2.1Basis of Atmospheric Deposition
2.2Parameters Affecting Chemical Reactions
2.3Reaction Chamber Designs
2.4Process Exhaust and Particle Containment
3.1 Deposition Rates
3.2Film Characteristics for Different Chemistries
4.0PROPERTIES OF DIELECTRIC FILMS
5.0NEW DEPOSITION TECHNOLOGIES
5.1Trends for CVD of Dielectric Films
2.0APPLICATIONS OF MOCVD
3.2Organometallic Source Packaging
3.3Hydride Sources and Packaging
4.1Growth Mechanisms
5.0SYSTEM DESIGN AND CONSTRUCTION
5.1Leak Integrity and Cleanliness
5.2Oxygen Gettering Techniques
5.3Gas Manifold Design
5.4 Reaction Chamber
5.5Exhaust and Low Pressure MOCVD
6.0 FUTURE DEVELOPMENTS
6.1Improved Uniformity Over Larger Areas
6.2In-situ Diagnostics and Control
6.3 New Materials
Feature Scale Modeling
3.0ETCH MODELING
3.1Ion Transport in Sheath
3.2Selection of Surface Transport Mechanism
3.3Surface Reaction Kinetics
3.4 Simplifying Assumptions
3.5Modeling of Surface Re-emission
3.6 Modeling of Surface Diffusion
3.7Numerical Methods
4.0ETCH EXAMPLES
5.0DEPOSITION MODELING
6.0DEPOSITION EXAMPLES
7.0REAL LIFE
3.1Trends in Metrology
3.2Trends in Defect Inspection
4.1Film Thickness Measurement Systems
4.2Resistivity Measurement Systems
4.3Stress Measurement Systems
4.5Automatic Defect Classification
4.6Defect Data Analysis Systems
GLOSSARY
3.0SOURCES OF PARTICLES
4.3Patterned Wafer Surface Defect Detection
5.3Residual Gas Analyzers, Mass Spectrometry
6.2 Aqueous Chemical Cleaning and Etching
6.3Role of Organic Contamination
8.0PROCESS EVOLUTION
10.0 CONCLUSION
ACKNOWLEDGMENT
1.0 INTRODUCTION
Sputtering and Sputter Deposition
2.0PHYSICAL SPUTTERING THEORY
2.1Energy Dependence of Sputtering
2.2Energy and Direction of Sputtered Atoms
3.0PLASMAS AND SPUTTERING SYSTEMS
4.0DEPOSITION RATES AND EFFICIENCIES
5.0REACTIVE SPUTTER DEPOSITION
6.0SPUTTERING SYSTEMS
7.0CONCLUSIONS AND FUTURE DIRECTIONS
Laser and Electron Beam Assisted Processing
2.0BEAM ASSISTED CVD OF THIN FILMS
2.1Conventional CVD Methods
2.2Electron Beam Assisted CVD
2.3Laser Assisted CVD
4.0BEAM INDUCED THERMAL PROCESSES
4.3Electron Beam Alloying of Silicides
5.0SUMMARY AND CONCLUSIONS
ACKNOWLEDGEMENTS
1.0THE BASIC MBE PROCESS
2.0COMPETING DEPOSITION TECHNOLOGIES
2.1Liquid Phase Epitaxy
2.2Vapor Phase Epitaxy and MOCVD
3.0 MBE-GROWN DEVICES
3.1 Transistors
3.2Microwave and Millimeter Wave Devices
3.3Optoelectronic Devices
3.4 Integrated Circuits
4.0MBE DEPOSITION EQUIPMENT
4.1Vacuum System Construction
4.3Sample Manipulation
4.4 System Automation
4.5 Performance Parameters
5.0PRINCIPLES OF OPERATION
5.1 Substrate Preparation
5.2Growth Procedure
5.3In Situ Analysis
5.4Materials Evaluation
5.5 Safety
6.0 RECENT ADVANCES
6.1RHEED Oscillation Control
6.2GaAs on Silicon
6.3Oval Defect Reduction
6.4Chemical Beam Epitaxy/Gas Source MBE
6.5 Superlattice Structures
7.0 FUTURE DEVELOPMENTS
7.1 Production Equipment
7.2In Situ Processing
7.3Process Developments
7.4Toxic Gases and Environmental Concerns
Ion Beam Deposition
2.0OVERVIEW OF ION BEAM APPLICATIONS
2.1Categories of Kaufman Ion Sources
2.2 Operational Considerations
3.0ION BEAM PROBING
4.0SUBSTRATE CLEANING WITH ION BEAMS
5.1Ion Beam Sputtering
5.2Ion Assisted Deposition
5.3 Application Summary
6.0 CONCLUDING COMMENTS
2.0PROCESSING
2.2STI Polish
2.3Tungsten Polish
3.0 POLISH EQUIPMENT
4.0 HISTORY
5.0 INNOVATIONS
6.0 AUTOMATION
7.0 WAFER/PAD RELATIVE MOTION
8.0 FUTURE CHALLENGES
CONCLUSION
1.0GENERAL INTRODUCTION
2.0 HISTORICAL PERSPECTIVE
3.1Materials Options
3.2 Polyimide Structure
3.3 Depositing Polyimides
3.4 Moisture Absorption
3.5Solvent Effects
3.6 Oxidation
3.7 Dimensional Stability
3.8 Metal-Polymer Interactions
3.9 Photosensitive Organic Dielectrics
4.0PROCESSING OF POLYMER FILMS
4.1Substrate Preparation and Polyimide Coating
4.2 Polyimide Adhesion
4.4Diffusion of Water
5.1Processes for Forming MLM Structures
5.2Patterning of Organic Dielectrics
5.3 Planarization
5.4Thermal Budget Considerations
5.6 Summary
6.0 RELIABILITY
6.2Effect of Moisture Ingress
6.3 Mechanical
6.4Electrical Properties
6.5Long Term Reliability
6.6 Summary
7.1 Performance Comparisons
7.2Performance Conclusions
7.3Factors in the Ultimate Limits to Performance
8.0FUTURE TRENDS
2.0SCALING THE TRANSISTOR
4.0TREND TO LOW K MATERIALS
5.0LITHOGRAPHY AND PLANARIZATION
6.1Detection/Types of Contamination
6.2Trends in Integrated Processing
Index
0 of .
Results for:
No results containing your search query
P. 1
Handbook of Thin Film Deposition Processes and Techniques (Materials and Processing Technology)

Handbook of Thin Film Deposition Processes and Techniques (Materials and Processing Technology)

Ratings: (0)|Views: 1,667 |Likes:

More info:

Published by: Eduardo Aranda Plascencia on Jul 28, 2011
Copyright:Attribution Non-commercial

Availability:

Read on Scribd mobile: iPhone, iPad and Android.
download as PDF, TXT or read online from Scribd
See more
See less

10/12/2013

pdf

text

original

You're Reading a Free Preview
Pages 14 to 184 are not shown in this preview.
You're Reading a Free Preview
Pages 198 to 274 are not shown in this preview.
You're Reading a Free Preview
Pages 288 to 291 are not shown in this preview.
You're Reading a Free Preview
Pages 305 to 309 are not shown in this preview.
You're Reading a Free Preview
Pages 323 to 656 are not shown in this preview.

Activity (40)

You've already reviewed this. Edit your review.
1 hundred reads
1 thousand reads
sensha liked this
param_i47 liked this
331623468 liked this
albertofgv liked this
ELISBANSAC2 liked this
ronbinye liked this
Aleksandr Kriger liked this

You're Reading a Free Preview

Download
/*********** DO NOT ALTER ANYTHING BELOW THIS LINE ! ************/ var s_code=s.t();if(s_code)document.write(s_code)//-->