Discover millions of ebooks, audiobooks, and so much more with a free trial

Only $11.99/month after trial. Cancel anytime.

Handbook of Chemical Vapor Deposition: Principles, Technology and Applications
Handbook of Chemical Vapor Deposition: Principles, Technology and Applications
Handbook of Chemical Vapor Deposition: Principles, Technology and Applications
Ebook378 pages5 hours

Handbook of Chemical Vapor Deposition: Principles, Technology and Applications

Rating: 0 out of 5 stars

()

Read preview

About this ebook

Handbook of Chemical Vapor Deposition: Principles, Technology and Applications provides information pertinent to the fundamental aspects of chemical vapor deposition. This book discusses the applications of chemical vapor deposition, which is a relatively flexible technology that can accommodate many variations. Organized into 12 chapters, this book begins with an overview of the theoretical examination of the chemical vapor deposition process. This text then describes the major chemical reactions and reviews the chemical vapor deposition systems and equipment used in research and production. Other chapters consider the materials deposited by chemical vapor deposition. This book discusses as well the potential applications of chemical vapor deposition in semiconductors and electronics. The final chapter deals with ion implantation as a major process in the fabrication of semiconductors. This book is a valuable resource for scientists, engineers, and students. Production and marketing managers and suppliers of equipment, materials, and services will also find this book useful.
LanguageEnglish
Release dateDec 2, 2012
ISBN9781437744880
Handbook of Chemical Vapor Deposition: Principles, Technology and Applications
Author

Hugh O. Pierson

Hugh Pierson is a private consultant in Chemical Vapor Deposition. He was the head of the Deposition

Related to Handbook of Chemical Vapor Deposition

Related ebooks

Technology & Engineering For You

View More

Related articles

Reviews for Handbook of Chemical Vapor Deposition

Rating: 0 out of 5 stars
0 ratings

0 ratings0 reviews

What did you think?

Tap to rate

Review must be at least 10 words

    Book preview

    Handbook of Chemical Vapor Deposition - Hugh O. Pierson

    Enjoying the preview?
    Page 1 of 1