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TriNano micro CMMNanometer uncertainty for a micro price
White paper discussing TriNano’s working principle,design and Gannen micro probes.
 
TriNano CMM: nanometer uncertainty for a micro price.
Current micro CMMs comply with the Abbe principle in 2D or even in 3D, which is a preferredmethod to reach 3D nanometer uncertainty. Most of these CMMs are the result of academicresearch, in which the challenge is to achieve the lowest uncertainty over a large measurementrange. This resulted in technologically advanced, but expensive systems.Within the micro manufacturing industry a large measurement range often is not the mostimportant factor. Most objects (or their molds) have dimensions of a few centimeters (lenses,watch base plates, small gears, etc.) and fit in a match box. To fasten market adaptation ofmicro coordinate metrology, a fast and cost effective micro CMM has been developed: TriNano.Working principle
TriNano is a newly developed CMM to measure objects withsub-millimeter features in three dimensions and withnanometer uncertainty. The TriNano N100 has a 3Duncertainty of 100 nanometer in its entire working volume[1,2]. In order to achieve this while keeping the device costefficient, a new working principle has been developed. Thisprinciple employs a moving work piece table and a stationaryprobe. The table moves in three directions by means of threeidentical linear translation stages as shown schematically infigure 1 and pictured in figure 3.
 
The 1D stages are positioned orthogonally and in paralleland support the work piece table via vacuum preloaded(VPL) porous air bearings as shown schematically in two dimensions in figure 2. From this figure theoperating principle of the TriNano becomes clear. A linear translation of a stage is transferred via aVPL air bearing to the work piece table. Translations of the work piece table with respect to the linear stage in other directions than the translation of the stage are decoupled by the VPL air bearing. In thismanner, the three stages independently determine the position of the work piece table in threedimensions.
Figure 2: Schematic 2D operating principle, with the work piece table in its neutral position (left) and after making a translation in local y’-direction (right).
On each linear stage, the scale of an optical linear encoder is mounted. At the point of intersection of the measurement axes of these encoders the probe tip is located. As the orientation of the encoder scale does not vary with respect to the probe, as can be seen in figure 2, the TriNano complies withthe Abbe principle over its entire measurement range. As a result, rotations of the work piece table willhave little effect on the measured dimension.
Figure 1: Schematic 3D representation of TriNano’s moving work piece table.
 
Cost effective design
Instead of a conventional orientation of the machine axes, i.e. two orthogonal axes in the horizontalplane (x and y) and a third vertically oriented axis (z), the three axes in the TriNano are oriented suchthat each stage experiences an equal gravitational load. This orientation of the axes combined withthe operating principle shown in figure 2, results in identical translation stages which can be producedat a lower cost.In addition, TriNano employs linear encoders to determine the position of the work piece table.Compared to conventional ultra precision CMMs, which often employ laser interferometer systems;this principle results in a considerable cost reduction. Several other means have been implemented toreduce costs without compromising on quality or ease of use.
Figure 3. TriNano employs a moving workpiece table (in the picture an aluminium dummy table for testing purposes is shown) supported by VPL air bearings in order to comply with the Abbe principle in 3D.
The parallel configuration of the three identical stages supporting the work piece stages results insuperior dynamic behavior of TriNano. This configuration allows a low and equal actuated movingmass of each stage with short and stiff structural loops. On machine measurements show that thenatural frequency of the complete system is 75 Hz. This allows a high control bandwidth required for ultra precision scanning measurements of unknown micro parts with high velocity.
Kinematic design
An unconstrained rigid body has six degrees of freedom (d.o.f.), three translations and three rotations.If all d.o.f. of a rigid body are fixed once, this body is said to be statically determined or exactlyconstrained. If more or less than six d.o.f. of a rigid body are constrained, it is said to be over or under constrained, respectively.
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