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Lecture 10 MEMS

Lecture 10 MEMS

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03/18/2014

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Lecture 9
Biomedical
Microtechnology
and
Nanotechnology

Microfabrication and Nanofabrication
applied to Biomedical Instrumentation
Why Micro/Nano ?
SCALING OF PARAMETERS
The values of various parameters depends on the dimensions of the system
and this proves to be helpful in a number of cases.
Example : Cantilever bending (Mechanical Parameters)
Force F
Deflection d
Density of Material = 3.5 x 103 kg/m3
Young\u2019s Modulus = 1012 N/m2
Material properties such as Young\u2019s modulus remain approximately the
same in the micro and macro versions.
However, they are relatively more different in case of nano dimensions
because nano dimensions come closer to molecular level.
Why Micro/Nano ?
SCALING OF PARAMETERS
Mass
Mass = Density x Volume = Constant x S3

Consider that the dimensions of the cantilever are reduced 10000 times, i.e
the length, breadth and thickness change from 100 cm, 10cm and 1cm to
100microns, 10 microns and 1 micron respectively.

If S represents any dimension in general then,
Therefore mass goes down (104)3 or is reduced 1012 times as the original beam
Strength to Mass Ratio
Total strength scales with its cross-sectional area. Hence, total strength scales
as S2. Hence, total strength to mass ratio scales as S-1.
As a result, the micro cantilever is 104 times stronger than the macro model.

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