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Schmittdiel Michael c 200407 Mast

Schmittdiel Michael c 200407 Mast

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Published by: api-3834272 on Oct 18, 2008
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03/18/2014

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TALKACTIVE CONTROL OF A DIFFRACTION GRATING
INTERFEROMETER FOR MICROSCALE DEVICES

A Thesis Presented to
The Academic Faculty
By
Michael C. Schmittdiel

In Partial Fulfillment of the Requirements for the Degree
Master of Science in Mechanical Engineering
Georgia Institute of Technology
June, 2004
ACTIVE CONTROL OF A DIFFRACTION GRATING INTERFEROMETER
FOR MICROSCALE DEVICES

Approved:
Dr. Thomas R. Kurfess, Chair
Dr. F. Levent Degertekin
Dr. William P. King

07/12/2004
ACKNOWLEDGEMENTS

First and foremost, I would like to thank my primary advisor, Professor Thomas Kurfess for allowing me to join his lab group here at Georgia Tech and perform the work presented in this thesis. I would also like to thank Professor Levent Degertekin for his indispensable technical expertise and assistance with the work done toward this thesis. I would like to thank the final member of the thesis reading committee, Professor William King, for agreeing to be a member of the committee and giving me feedback on my work.

A number of students helped me perform this work. Special recognition must go to Dr. Byungki Kim, who worked in conjunction with me on this project. Also, I would like to thank Ryan Krauss for his assistance with the controls aspect of this work, and Guclu Onoran for this help with the analog electronics used in this project. I would like to acknowledge my office mates and lab mates in Professor Kurfess\u2019s and Professor Degertekin\u2019s lab groups for their help and advice on this project.

I would like to acknowledge my friends and family for their support and kindness towards me during my time working on this thesis. Without their motivation, producing the work presented in this document would have been much more difficult, if not impossible.

The author would like to take this opportunity to thank the engineers at National Instruments for their contributions to this research. This work was partially funded by the National Science Foundation under Grant Number DMI-0200331. The government has certain rights in this material. Any opinions, findings and conclusions or recommendations are those of the

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