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Bai Giang Ky Thuat Vi Dien Tu_ThangVC

Bai Giang Ky Thuat Vi Dien Tu_ThangVC

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Published by Tam Vo

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Published by: Tam Vo on Nov 27, 2011
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03/02/2013

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1
KHOA CÔNG NGH
THÔNG TIN

MÔN:

N T
 
- VI
N THÔNG
THS. V
CHI
N TH
NG

THU
T VI

N T
 

P BÀI GI
NG(L
 
u hành n
i b
)
THÁI NGUYÊN 9/2010
 
2

C L
C

C L
C.........................................................................................................................1Ch
 
ng 1: C
S
V
T ...............................................................................................41.1. C
u trúc tinh th
......................................................................................................41.2. C
u trúc vùng n
ng l
 
ng........................................................................................61.3. Bán d
n tinh khi
t....................................................................................................71.4. Bán d
n lo
i P..........................................................................................................81.5. Bán d
n lo
i N.........................................................................................................91.6.

linh

ng,

d
n..............................................................................................11Ch
 
ng 2: C
U TRÚC M
CH VI

N T
 
..................................................................132.1. Chuy
n ti
p PN......................................................................................................132.2. Công ngh
l
 
ng c
c.............................................................................................152.2.1. Cách

n b
ng chuy
n ti
p PN.......................................................................152.2.2. Cách

n b
ng Oxide.....................................................................................162.2.3. Transistor l
 
ng c
c.......................................................................................172.2.4. Diode,

n tr
 
và t

n................................................................................212.3. Công ngh
CMOS.................................................................................................242.3.1. M

u...........................................................................................................242.3.2. Quá trình ch
t
o.............................................................................................262.3.3. Ch
t
o gi
ng..................................................................................................272.3.4.

n c
c c
ng.................................................................................................28Ch
 
ng 3: CÔNG NGH
CH
T
O M
CH VI

N T
 
.............................................303.1. Ch
t
o phi
n bán d
n............................................................................................303.1.1. Quy trình ch
t
o phi
n bán d
n silic...............................................................303.1.2. Ch
t
o Silic
a tinh th
..................................................................................313.1.3. Ch
t
o Silic
 
n tinh th
................................................................................323.1.4. Ch
t
o phi
n bán d
n.....................................................................................373.1.5. Phòng s
ch......................................................................................................373.2. Oxy hóa.................................................................................................................493.2.1.Gi
 
i thi
u công ngh
Oxy hoá..........................................................................493.2.2.Oxy hóa nhi
t...................................................................................................493.3. Quang kh
c............................................................................................................533.3.1. Khái ni
m.......................................................................................................533.3.3. Các khái ni
m c
 
b
n......................................................................................543.3.4. Các giai

n c
a quá trình quang kh
c...........................................................563.4.
n mòn..................................................................................................................603.4.1.
n mòn
 
t.....................................................................................................613.4.2.
n mòn khô....................................................................................................663.5. Khu
ch tán............................................................................................................683.6. C
y ion..................................................................................................................693.6.1. M

u...........................................................................................................693.6.2. Thi
t b
c
y ion...............................................................................................713.6.3. M
t n
dùng cho c
y ion.................................................................................723.6.4.
nhi
t............................................................................................................723.7. Epitaxy..................................................................................................................72
 
33.7.1. M

u...........................................................................................................723.7.2. Làm s
ch phi
n và t
y l
 
p Oxit t
nhiên.........................................................733.7.2. Nhi
t

ng h
c quá trình Epitaxy pha h
 
i........................................................733.7.3. Pha t
p............................................................................................................753.7.4. Khuy
t t
t trong l
 
p Epitaxy...........................................................................753.7.5. Epitaxy GaAs..................................................................................................763.7.6. Epitaxy chùm phân t
.....................................................................................773.8. Các ph
 
ng pháp t
o màng m
ng: Bay h
 
i, phún x
..............................................813.8.1. M

u...........................................................................................................813.8.2. Bay h
 
i trong chân không...............................................................................823.8.3. Phún x
...........................................................................................................913.9. K
t t
a hóa h
c pha h
 
i CVD................................................................................963.9.1. M

u...........................................................................................................963.9.2. H
CVD
 
n gi
n

ch
t
o màng Si.............................................................963.9.3. Ch
t
o màng

n môi b
ng CVD áp su
t khí quy
n......................................973.9.4. Ch
t
o màng

n môi và bán d
n b
ng CVD áp su
t th
p.............................983.9.6. Ch
t
o màng kim lo
i b
ng CVD...................................................................99Ch
 
ng 4: M
T S
H
VI M
CH C
B
N...............................................................1014.1. Phân lo
i vi m
ch................................................................................................1014.1.1. Theo ch
c n
ng.............................................................................................1014.1.2. Theo công ngh
ch
t
o.................................................................................1014.1.3. Theo linh ki
n c
 
b
n....................................................................................1014.1.4. Theo m
c

t
h
 
p......................................................................................1014.2. Các h
vi m
ch s
................................................................................................1014.2.1. T
ng quan.....................................................................................................1014.2.2. Các

c tr
ng c
a các vi m
ch s
..................................................................1024.2.3. H
RTL (Resistor-Transistor Logic)..............................................................1034.2.4. H
DTL (Diode-Transistor Logic).................................................................1044.2.5. H
TTL (Transistor-Transistor Logic)...........................................................1044.2.6. H
CMOS.....................................................................................................1064.2.7. M
t s
c
ng..................................................................................................106TÀI LI
U THAM KH
O..............................................................................................108

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