KHOA CNG NGH THNG TIN

B MN: IN T - VIN THNG

CNG CHI TIT MN HC

1. Tn mn hc:
- 0305 K thut vi in t
- 0305 Microelectronic Technology
2. S tn ch: 3
3. iu kin ng k mn hc:
- iu kin song hnh:
- iu kin tin quyt: 0302, 0609, 0610, 0611, 0612.
4. Mc tiu mn hc:
Trang b cho sinh vin nhng kin thc c s v cu trc mch vi in t, cc cng
ngh ch to vi mch in t, phn loi mt s h vi mch c bn.
5. M t mn hc:
C s vt l, cu trc mch vi in t, cng ngh ch to mch vi in t, phn loi
mt s h vi mch c bn
6. Yu cu mn hc
- Ln lp l thuyt : 22T
- Tho lun, bi tp: 6T
- Kim tra: 2T
7. nh gi mn hc:
- Thang im: 10
- im bi kim tra: 30%
- im thi ht hc phn: 70%
8. Ti liu hc tp:
1. TS. Nguyn Ngc Trung , KT vi in t . i hc Bch Khoa H Ni, 2003.
2. TS. L Tun, Cng ngh phn x. i hc Bch Khoa H Ni, 2004.
3. TS. L Tun, Oxy ha nhit. i hc Bch Khoa H Ni, 2004.
4. TS. L Tun, Cy Ion. i hc Bch Khoa H Ni, 2004
5. Nguyn Vn Cng, Cng ngh vi in t
6. Stephen A. Campbell, The Science and Engineering of Microelectronic
Fabrication. Oxford University Press,1996.
9. Ni dung chi tit:

Chng 1: C s vt l
1.1. Cu trc nguyn t
1.2. Cu trc tinh th
1.3. Cu trc vng nng lng
1.4. Hm phn b Fermi Dirac
1.5. linh ng, dn
Chng 2: Cu trc mch vi in t
2.1. M u
2.2. Chuyn tip P-N
2.2.1. Phn cc chuyn tip P-N
2.2.2. in dung chuyn tip P-N
2.3. Transistor lng cc
2.3.1. Cu to
2.3.2. Ch lm vic ca Transistor lng cc
2.3.4. H s khuch i
2.3.5. Cc thng s c bn ca Transistor lng cc
2.4. Diode trong mch vi in t
2.5. in tr trong mch vi in t
2.6. T in trong mch vi in t
2.7. Transistor trng
2.7.1. Cu trc MOS
2.7.2. Lp giu, lp ngho v lp o
2.7.3. MOSFET
2.7.4. Cc thng s c bn
Tho lun, bi tp
Kim tra
Chng 3: Cng ngh ch to mch vi in t
3.1. M u
3.2. Ch to phin bn dn
3.3. Phng sch v cng ngh lm sch b mt bn dn
3.4. Ch to mng SiO2
3.5. Cng ngh Epitaxy
3.6. Pha tp bng khuch tn
3.7. Pha tp bng cy Ion
3.8. Quang khc v n mn
3.9. Tng quan v cng ngh VLSI
Tho lun, bi tp
Chng 4: Phn loi mt s h vi mch c bn

4T

6T

2T
1T
6T

2T
6T

4.1. Theo chc nng

4.1.1. Mch Logic Mch s
4.1.2. Mch tuyn tnh Mch tng t
4.2. Theo cng ngh ch to
4.2.1. Vi mch bn dn
4.2.2. Vi mch mng
4.2.3. Mch lai (Hybrid)
4.3. Theo linh kin c bn
4.3.1. Vi mch lng cc
4.3.2. Vi mch CMOS
4.3.3. Vi mch BiCMOS
4.4. Theo mc t hp
4.4.1. Mc t hp thp (SSI)
4.4.2. Mc t hp trung bnh (MSI)
4.4.3. Mc t hp ln (VSI)
4.4.4. Mc t hp rt ln (VLSI)
4.4.5. Mc t hp cc ln (ULSI)
Tho lun, bi tp
Kim tra
10 . B mn duyt

2T
1T