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Table Of Contents

INTRODUCTION
1.1 Introduction to MEMS
1.2 Transmission Electron Microscope
1.2.1 Electron microscopy
1.2.3 The TEM sample manipulator
1.2.4 Miniaturizing the TEM sample manipulator
1.3.1 In-plane positioning
1.3.2 Out-of-plane positioning
1.3.4 Assembly of MEMS devices
1.3.5 Conclusion regarding existing research
1.4 Precision Engineering
1.5 The goal of this research
1.6 Specifications of a TEM sample manipulator
1.7 TEM sample manipulator concept
1.7.1 Two stage concept
1.8 Thesis outline
2.1 Introduction
2.2 Background of MEMS design
2.3 Design principles with respect to MEMS design
2.4 Influence of a large deflection on leaf-spring behavior
2.4.1 Behavior of height restricted leaf-springs
2.4.2 Influence of drive stiffness on leaf-spring behavior
2.5 Straight guiding in MEMS
2.5.1 Types of straight guiding
2.5.2 Influence of reinforcement on folded flexure behavior
2.5.3 Non-linearity of actuation compliance
2.5.4 Improved straight guiding designs for MEMS
2.5.5 Design rules for straight guiding in MEMS
2.6 Conclusion
3.1 Introduction
3.2 MEMS-based Mechatronic System Design
3.2.1 Differences between MEMS and macro mechatronic design
3.2.2 Basis of design: Design principles and bulk micro machining
3.2.3 Motion in- and out-of-plane of the wafer
3.3 The Kinematic Concept
3.4 Concept 1: Planar hinge flexure concept
3.5 Concept 2: Slanted hinge flexure concept
3.6 Concept 3: Slanted leaf-spring concept
3.7 Slanted leaf-spring concept with clamping mechanisms
3.8 Conclusions
4.1 Introduction
4.2 Process design
4.3 Changes to the slanted leaf-spring design
4.4 Dimensioning the manipulator
4.5 Modeling the manipulator
4.5.1 Two DOFs model
4.5.2 Linearized system model of the manipulator
4.5.4 Errors due to the use of a first-order model
4.5.5 Actuation force and stroke
4.5.6 Platform stiffness blocked and unblocked
4.5.7 Modal analysis
4.5.8 Vibration mode frequency shift due to platform displacement
4.5.9 Robustness: Elastic stability and stress
4.5.10 Thermal Stability
4.6 Conclusions and recommendations
5.1 Introduction
5.2 Conceptual design of the Clamping Mechanism
5.3 Clamp mechanism design
5.4 Modeling the clamping mechanism
5.5 Process design
5.6 Measurement results
5.7 Conclusions and recommendations
CONCLUSIONS
6.1 Research objective
6.1.1 Designing and manufacturing a 6 DOFs manipulator
6.1.2 Principle solutions for MEMS-based kinematic constraint design
A.3 TEM applications
CONCEPT FOR LOADING A SAMPLE IN A TEM
MEMS-BASED ACTUATORS FOR PRECISION MANIPULATION
C.1 Introduction
C.2 Electro-magnetic actuators
C.2.1 Lorentz actuator
C.2.2 Conclusion regarding Electromagnetic actuators
C.3 Electrostatic actuation
C.3.1 Comb-drive actuator (lateral)
C.3.2 Transverse comb-drive actuator
C.3.3 Conclusion regarding electrostatic actuation
C.4 Piezo actuators
C.5 Thermal actuators
C.6 Steppers
C.7 Conclusion regarding actuation principles for MEMS
SCALING OF FLUX DENSITY
MULTIBODY SYSTEMS MODELED BY FINITE ELEMENTS
PROCESS DOCUMENT OF THE MANIPULATOR
PROCESS DOCUMENT OF THE CLAMPING MECHANISM
REFERENCES
ABSTRACT
SAMENVATTING
ABOUT THE AUTHOR
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Published by Bounty Jha

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Published by: Bounty Jha on May 17, 2012
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01/13/2013

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