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Silicon Technologies: Ion Implantation and Thermal Treatment
By Wiley
Book Actions
Start ReadingLength: 605 pages5 hours
- Publisher:
- Wiley
- Released:
- May 10, 2013
- ISBN:
- 9781118601143
- Format:
- Book
Description
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.
Book Actions
Start ReadingBook Information
Silicon Technologies: Ion Implantation and Thermal Treatment
By Wiley
Length: 605 pages5 hours
Description
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.
- Publisher:
- Wiley
- Released:
- May 10, 2013
- ISBN:
- 9781118601143
- Format:
- Book
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