• book

From the Publisher

This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications.

This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing. The book is a balanced presentation in that it gives both a theoretical treatment and practical applications. It should be of considerable interest to scientists and engineers working on plasma source design, and process development.
Published: Elsevier Science an imprint of Elsevier Books Reference on
ISBN: 9780815517894
List price: $200.00
Read on Scribd mobile: iPhone, iPad and Android.
Availability for High Density Plasma Sources by Oleg A. Popov
With a 30 day free trial you can read online for free
  1. This book can be read on up to 6 mobile devices.

Related Articles

Nautilus
4 min read

The Lightning Beneath Our Feet: The strange lights that occur before earthquakes may originate underground.

An earthquake shook the central Italian city of L’Aquila in the early morning of April 6, 2009. In the months that followed, scientists collected dozens of accounts from people who claimed to have seen “luminous phenomena” both before and after the shock: flashes from the ground, glowing clouds, and floating balls of light that sparked like lightning. The bizarre episodes were far from unprecedented: Time and again across history, people have reported seeing lights just before earthquakes. These lights have taken many forms: In addition to the balls and flashes seen in L’Aquila, they have bee
Futurity
2 min read

Wearable ‘Plasma Paper’ Kills All Sorts Of Germs

Researchers have invented an inexpensive, effective way to kill bacteria and sanitize surfaces with devices made of paper. “Paper is an ancient material, but it has unique attributes for new, high-tech applications,” says Aaron Mazzeo, an assistant professor in Rutgers University department of mechanical and aerospace engineering. “We found that by applying high voltage to stacked sheets of metallized paper, we were able to generate plasma, which is a combination of heat, ultraviolet radiation, and ozone that kill microbes.” In the future, paper-based sanitizers may be suitable for clothing th
Nautilus
3 min read

The Man Who Discovered the Sun’s Puzzling Heat Is Being Forgotten

When you observe a solar eclipse—with great care, of course—what you see is a thin, red crescent outlining the blocked-out Sun and, extending beyond it, a stark white mane. This is the corona, an aura millions of miles thick of superheated plasma. It’s natural to assume the corona is cooler than the sun’s blazing surface. But in fact it gets hotter as it ranges outward. The Sun’s surface temperature is about 10,000 degrees Fahrenheit. The corona can get as hot as 5.4 million degrees Fahrenheit. This phenomenon, known as the “coronal heating problem,” “remains one of the great unsolved problem