You are on page 1of 2

MEMS 1 Multiple choice A typical single ULSI chip may contain (a) 100 (b) 10 (c) 100 million

transistors First significant miniaturization occurred with

2 (a) ICs

(b) Laptops (c) 3. (a) 1940 (b) 1980 (c) 1970 4. The term LIGA refers to (a) Design (b) Material (c) Micro fabrication process. 5. Micromachining is used for the fabrication of Cell Phones. Development of ICs began in

(a) Transistor (b) ICs (c) Pressure Sensor. 6. Market value of Microsystems is intimately related to (a) Volume demand (b) Special features (c) Performance of the products a) Compare the microelectronics and Microsystems.

b) c) d)

Explain in detail the multidiscipline structure of Microsystems What are the advantages of miniaturization of Microsystems Explain the working principle of MEMS based pressure sensor. List out its advantages & disadvantages.

e)

Explain in detail the application of MEMS sensors for Automobile Industry.

f) g)

Explain the sensors used in Aerospace Industry. Why silicon is used for MEMS Fabrication, explain its advantages & characteristics

You might also like