◈ S/Parts List ◈

NO 재고구분
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48

B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C

S/L

Mat. Code

SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01

S1A20230
S1J10005
S1J50007
S2A20050
S2A20051
S4A60003
S4A60012
S5D90005
S5D90015
S5D90018
S5D90019
S5D90020
S5D90021
S5D90032
S5D90038
S5D90039
S5D90042
S5D90043
S5D90050
S5D90051
S5D90056
S5D90060
S5D90061
S5D90062
S5D90068
S5D90075
S5D90076
S5E50020
SZ980111
SZ980118
SZ980246
S1A20235
S1J10003
S1J10004
S1J40004
S1J40008
S1J40009
S1J40010
S2A20001
S2A20002
S2A20003
S2A20005
S2A20006
S2A20007
S2A20009
S2A20010
S2A20011
S2A20012

LOCATION

장비Model
DJ-802V

AP-612A
AP-612A
AIM801
AIM801
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
WI880
IS2000
IS2000
DJ-802V

AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A

Mat.Description
FLECXIBLE GAS PIPE 3/8in
ROAP
SEQUENCE (SAME:S9Z60154)
CHECK VALVE
CHECK VALVE
STEPPING MOTOR
LASER SENSOR AMP(LX2-60)
IC
IC
IC
IC
IC
THERMAL FUSE 250V 2A 98C
MEASUREMENT HEAD
IC
IC
IC
IC
UDN 2952B
UDN 5712M
IC 74LS06
IC- 74LS377
IC SOCKET- 20PIN DIP-ROUND
RESISTOR ARRAY-1K OHM- 5PIN
IC
IC SOCKET 14PIN- DIP TYPE
IC SOCKET 8PIN - CAN TYPE
MAGNETIC VALVE(PREALIGN/TRANSF
DC MICRO MOTOR
D3142 DISK DRIVE
DI FILTER
PIRANI SENSOR
ROAP
ROAP (SAME:S1K40001)
MOTOR
SERVO MOTOR UNIT
SPEED CONTROL UNIT
PHOTO SENSOR
CONTROL UNIT B/D-D68PC02A
CONTROL UNIT B/D-S68MR01C
O-RING FOR GATE
SERRVO PACK
GAS LINE FILTER
CPU B/D-H68SB04-1
GATE O-RING
BUFFER HEATER
ENCODER
SERVO PACK

Vendor Part. No
321-6-X-6-B2
280J18
C500-ID219
4Z-C4L-1-SS
6Z-C6L-1-SS
UDX5107N
PH0-4129-000
74LS75
74S04N
74HC245N
74HC374E
74LS42N
250V 2A 98C
545-4480
74F74N
74F86N
27C256
27C64A
2952B
5712M
74LS06
74LS377
20PIN
"1K OHM, 5PIN"
6N137
"SOCKET DIP, 14PIN"
"SOCKET CAN, 8PIN"
V030E1
2233F012SG-22/2K
134-500558-669
CWVI010HF
PRM 10K
278J18
315J18
IHT9PF40
4SM-U
4SPC-U
UM-R3TV
D1105750(CPB5)
D1105755(CPB10)
D3125063-1
PACK-10
FILTER-10
D4173779(CPB2)
O-RING-10
BH-6558
ENCODER-10
PACK-11

현재고
2
1
2
1
1
1
1
2
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
4
2
1
1
1
1
1
2
1
3
1
2
1
3
1
3
2
2
2
2
1

NO 재고구분
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
77
78
79
80
81
82
83
84
85
86
87
88
89
90
91
92
93
94
95
96
97
98

C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C

S/L

Mat. Code

SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01

S2A20013
S2A20014
S2A20015
S2A20016
S2A20017
S2A20018
S2A20019
S2A20020
S2A20021
S2A20022
S2A20023
S2A20024
S2A20025
S2A20027
S2A20029
S2A20047
S2A20048
S2A20052
S2A20054
S2A20055
S2A20058
S2A20060
S2A20063
S2A20064
S2A20065
S2A20067
S2A20074
S2A20075
S2A20076
S2A20077
S2A20078
S2A20079
S2A20080
S2A20081
S2A20082
S2A20083
S2A20085
S2A20087
S2A20088
S2A20090
S2G80033
S2G80036
S2G80037
S2G80038
S2G80039
S2G80040
S2G80041
S2G80042
S2G80043
S2G80044

LOCATION

I-6-3

장비Model
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800

Mat.Description
CONNECTOR FOR MAINTENCE
HEATER COVER
HEATER WIRE
O-RING & BELT KIT
GEAR
GUIDE BLOCK
REVOLUTION BEARING
HEATER FUSE
REFLECTOR MIRROR
REGURATOR
CONTROL UNIT B/D 6
FIBER CABLE
QUARTZ ROD
CAP
HEATER BLOCK UNIT
GAS REGULATOR
AIR VALVE
J815 CONNECTOR(BRACKET)
J801 CONNECTOR CASE(CABLE)
J802 CONNECTOR(CABLE)
804 CONNECTOR
811 CLUMP
815 CONNECTOR
815 CLUMP
PUSHER
HEAT WIRE INNER
J804 CONNECTOR(BRACKET)
J811 CONNECTOR(BRACKET)
CONTROL UNIT B/D D68PC02C
CONTROL UNIT B/D D68PC02B
CONTROL UNIT B/D
CONTROL UNIT B/D S68MR01B
CONTROL UNIT B/D ZSA906
CONTROL UNIT B/D D68L07
CONTROL UNIT B/D D69L09
CONTROL UNIT B/D D68L09A
FORK WIRE
J812 CONNECTOR(BRACKET)
CABLE ASSEMBLY(B)
TERMINAL BAR
ALIGNMENT STAGE CHUCK
REACTOR HEATER
MAGNETIC VALVE CASSETTE STAGE
VACUUM SENSOR
HANDLING ROBOT ARM
THERMO COUPLE / BUBBLER
TWO-WAY VALVE
TWO-WAY VALVE N.C
AC SERVO MOTOR
LM GUIDE

Vendor Part. No
CONNECTOR-10
COVER-10
WIRE-10
BELT-10
D4165513-1
D4144312-A
BEARING-10
FUSE-10
REFLE-10
959100W4RFSMMMM
BOARD-10
PDO-9077-000
PDO-2543-000
CAP-10
OUTSIDE
D3137140-2
D4302815-8
D4223606-141
D4122600-324
D4223543-120
D4039549-2
D4223606-616
D4223606-266
D4138335-106
PUSHER-10
H3305756-B
D4039549-12
D4165863-3
D1105752(CPB 9)
D1105751(CPB 7)
D1105753(CPB 6)
D1105754(CPB 8)
D1105762(CPB11)
D1105697(CPB 12)
D1105757(CPB 18)
D1105758
WIRE-12
D4223606-135
D3125577-B
D4121598-1
CHUCK 2
HEATER 1
STAGE 1
SENSOR 1
ARM 1
TC 1
VALVE 1
VALVE 2
MOTOR 1
GUIDE 1

현재고
2
2
1
1
3
3
2
8
1
1
1
1
2
46
5
1
2
6
2
2
2
2
2
2
6
36
3
3
1
1
3
2
1
1
1
1
8
3
2
3
1
1
1
1
1
1
1
3
1
1

NO 재고구분
99
100
101
102
103
104
105
106
107
108
109
110
111
112
113
114
115
116
117
118
119
120
121
122
123
124
125
126
127
128
129
130
131
132
133
134
135
136
137
138
139
140
141
142
143
144
145
146
147
148

C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C

S/L

Mat. Code

SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01

S2G80045
S2G80046
S2G80047
S2G80048
S2G80049
S2G80050
S2G80051
S2G80052
S2G80053
S2G80054
S2G80056
S2Q50108
S2Q50109
S2Q50132
S2Q50133
S2Q50138
S3A30238
S3A30251
S3A90033
S3B40021
S3T10379
S4A50006
S4A50007
S4A50029
S4A50036
S4A60002
S4A60004
S4A60005
S4A60006
S4A60007
S4A60008
S4A60009
S4A60010
S4A60011
S4A60013
S4A60014
S4A60015
S4A60016
S4S10268
S4S10270
S4S10271
S4S10272
S4S10273
S4S10274
S4S10275
S4S10276
S4S10277
S4S10278
S4S10279
S4S10280

LOCATION

장비Model
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
ANELVA-1051
ANELVA-1051
ANELVA-1051
ANELVA-1051
ANELVA-1051
PSC
PSC
UVAS
TCA24/25
AIM-630
AIM-630
AIM-630
AIM-630
AIM-801
AIM-801
AIM-801
AIM-801
AIM-801
AIM-801
AIM-801
AIM-801
AIM-801
AIM-801
AIM-801
AIM-801
AIM-801
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)

Mat.Description
WAFER TRANAFER ROBOT CHECK
BUBBLER HEATER
REVERSE BOTTLE HEATER
S.S.R
CIRCUIT BREAKER (10A)
CIRCUIT BREAKER (1A)
SUSCETOR GRIPPER
NOZZLE PLATE (A)
MAIN ELIVATOR CYLINDER
SOLENOID V/V
BEARING(ALIGNMENT STAGE)
CATHODE ASS'Y(AL)
HOLDER ASS'Y
MOSI CATHODE/FRONT FRANGE SET
MOSI HOLDER COVER SET
SEP ARM ASS'Y
FRONT HEATING PLATE
ISOLATOR(애자)
LAMP POWER SUPPLY(UV LAMP)
CLAMP RING
TMP BATTERY
OPT PCB
PSE. V1.ADR.V1 PCB
NEW SHUTTER UNIT
DC MOTOR 1/30
STEPPING MOTOR
EXP PCB(APPEX)
LASER SENSOR(LX2-02)
ESU PCB
SOLENOID VALVE(V100EL-LF-DC24V
COUPLING(MST(S)-25C-φ6 엠?)
DETECTOR PCB
COUPLING(MST(S)-20C-φ6 엠?)
EHU PCB
PHOTO SENSOR(PQ-01)
FIBER SENSOR(FU-37)
STEPPING MOTOR-2PHASE(PH266-01
STEPPING MOTOR-2PHASE(PH268-21
DIGI MICRO METOR
DC MOTOR
DC MOTOR
ILLUNINATION DC MOTOR
MOTOR DRIVE UNIT
STAGE DC MOTOR
AIR CYLINDER
AIR CYLINDER
AIR PORT
APPDISP PCB
CLOCK GENERATION PCB
WAFER UP/DOWN UNIT

Vendor Part. No

현재고

ROBOT 1
HEATER 3
HEATER 4
SENSOR4
BREAKER 1
BREAKER 2
HG-HTR
PDO-2866-000/B-CAI-AL-001
DA20-150-A
A040-4EI DC24V
PS2-0257-000
A18-05676
A18-00132
M11-5689
M11-785HY
AS-6754
DES-212-304AVL111
애자
UV LAMP POWER SUPPLY
MP-3-00210
12VDC
P13-0910-000
P13-0914-000
PF3-0153-000
PH2-0087-000
UPD533HGI-NA
PH4-0104-01
PH0-4128-000
PH4-0107-01
PT4-1026-000
PS2-7017-000
PH4-0065-01
PS2-7016-000
PH4-0108-01
PH0-4125-000
PH0-4126-000
PH2-0059-000
PH2-0138-000
KBB01700-501
KBB02621-503
W/L-501
505
A01-G6
KBB02100-511
KBB00650-10
KBB00651-10A
KBB00651-13
KBB00600-AE21
PPD-AE1
KBB02100-A05

1
1
1
1
1
1
1
2
6
1
2
2
1
16
16
2
1
2
1
1
3
1
1
1
5
2
3
2
3
4
1
2
2
3
2
2
2
1
1
1
1
1
1
1
1
1
1
1
1
1

Code SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 S4S10281 S4S10282 S4S10283 S4S10284 S4S10285 S4S10286 S4S10287 S4S10288 S4S10289 S4S10290 S4S10291 S4S10292 S4S10293 S4S10294 S4S10295 S4S10296 S4S10297 S4S10298 S4S10302 S4S10303 S4S10304 S4S10305 S4S10308 S4S10309 S4S10310 S4S10311 S4S10312 S4S10313 S4S10314 S4S10315 S4S10316 S4S10317 S4S10318 S4S10319 S4S10320 S4S10321 S4S10322 S4S10323 S4S10324 S4S10325 S4S10326 S4S10327 S4S10328 S4S10329 S4S10330 S4S10331 S4S10332 S4S10333 S4S10334 S4S10336 LOCATION 장비Model I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) Mat.NO 재고구분 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C S/L Mat. No 현재고 KBB02003-AE08 KBB02100-A04 A01 KBB02003-G07 ARL-FM-A01 KBB02100-AE02 KBB02100-AE03-1 KBB02003-501 KBB02400-14 WL-10 KBB02201-502 KBB02201-501 KBB02201-15 KBB02400-13 KBB00610-502 KBB02400-15 KBB02201-16 KBB02201-17 KBB02600 KBB02700-503 KBB02003-506 526-G6 KBB00127-AE3 KBB02400-A01 KBB00651-A05 KBB00640-A03 KBB00651-08 KBB02100-B06 KBB02201-06 KBB02400-B08 KBB02201-04 KBB02201-B504 KBB02278-AE07 KBB00651-A04 KBB02650-503 KBB02650-504 KBB02650-505 KBB02003-15 KBB060-AL03 KB00795-AE05 KBB00695-AE02 KBB00695-AE03 KBB02003-AL03 504 KBB02003-514 KBB00127-AE5 KBB02003-G04 501 KBB0261-AE01 KBB02003-10 1 2 1 1 1 1 1 1 1 1 1 2 2 1 1 1 1 1 1 3 1 2 1 1 1 1 1 1 1 2 1 1 1 2 2 1 2 1 1 1 1 1 1 5 1 1 1 1 2 1 . FLAT CABLE FLEXIBLE FLAT CABLE TIMING BELT TIMING BELT MOTOR ENDRESS BELT TUBE TUBE TUBE JOYSTIC-PP420 HE-NE LASER POWER RECIVER PCB LD DRIVE PCB LOAD ARM OF TABLE SIDE SLIDE ARM FLEXBLE COUPLING FLEXBLE COUPLING FLEXBLE COUPLING FLEXBLE COUPLING FLEXBLE COUPLING MICRO SWICH HPOTO SENSOR PCB POSITION LED SOLENOID VALVE SOLENOID VALVE SOLENOID VALVE SYNTHETIC MICA WAFER DECTOR UNIT B CONT PCB CONTROL PCB CONTROL PCB HINDERED FILTER UNIT PHOTO MULTI FILTER PHOTO MULTI FILTER PHOTO SENSOR PCB SUB INTERFERENCE FILTER THERMO STST(SAME:S3B30020) VAC SENSOR UNIT AIR CYLINDER Vendor Part.Description WA MPX PCB SYSTEM DRIVE UNIT SHUTTER UNIT LIGHT GRIDE SIDE SLIDE STAGE 62 PCB STAGE VAC PCB CABLE ENDRESS BELT ENDRESS BELT-G6Inch.

TC9142AP IC. MJ15012 TR.NO 재고구분 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C S/L Mat.74LS377N IC. No 현재고 KBB02003-B11 KBB02600-02 KBB0223-05 KBB02223-05 KBB00795-AE03 KBB02100-11 KBB02100-12 KBB02600-03 KBB02100-B10 WL-505 KBB02003-AE16 KBB02400-AE10 KBB00795-01 5126 PLDCMR 01-13779-00 1/2/1962 01-15245-00 MP-006 1B58051 SH-006 PX245-028 H4311523-1 H3102303-12 DECO H43114236-1 EPROM 512KB G3FD-X03S TL-5135 74574 74541 74377 75324 9142 7259 1233 82S123 LM358 MCT6 MJ15012 D1195 MAX 232 DS1235Y LT 1054 HLN 2003A LM 339AN TIP107 IRF 511 LM 340 3771 1 1 1 1 1 2 2 1 8 1 1 2 1 1 1 1 1 1 65 1 1 3 1 1 1 13 18 3 2 8 8 6 2 2 2 18 3 2 4 6 10 1 3 8 5 5 20 20 10 2 .TA75324P IC.PBL 3771 Vendor Part.Description AIR CYLINDER AIR CYLINDER AIR PISTON AIR PISTON P SENSOR PCB PADIAL BEARING RADIAL BEARING SPEED CONTROLLER THRAST BEARING ASS'Y VACUUM SENSOR VACUUM SENSOR(PS4) VACUUM SENSOR UNIT WORM GEAR CYBOR P/R PUMP POLAROID CARERA ASS'Y CASSETTE C-DRIVE ASS'Y VACUUM(SAME:S5D80111) ROLL PAPER FOR MINIPRINTER CERAMIC ARM SPPINDLE HEAD DC MOTOR(ARM1) SPINDLE HEAD BEARING FOR TURN TABLE BEARING FOR XY STAGE CENTERING COLOR IC-EPROM 512KB RELAY G3FD-X03S LITHIUM BATTERY IC-74LS574BN IC-74LS541N IC. Code SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 S4S10337 S4S10338 S4S10339 S4S10340 S4S10341 S4S10342 S4S10343 S4S10344 S4S10345 S4S10346 S4S10347 S4S10348 S4S10871 S4T30262 S5B70225 S5D80033 S5D80053 S5D80055 S5D90001 S5D90002 S5D90003 S5D90008 S5D90009 S5D90010 S5D90011 S5D90013 S5D90022 S5D90023 S5D90024 S5D90025 S5D90026 S5D90027 S5D90028 S5D90029 S5D90030 S5D90031 S5D90033 S5D90034 S5D90035 S5D90036 S5D90037 S5D90040 S5D90041 S5D90044 S5D90045 S5D90046 S5D90047 S5D90048 S5D90049 S5D90053 LOCATION 장비Model I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) I8C(NIKON) S-6000 METRA METRA METRA LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 Mat.TA7259P IC DS 1233 IC 82S123 IC LM358 IC MCT6 TR. D1195 IC IC IC IC IC TR TR TR IC.

No 현재고 350 9620 74LS148 74LS173 GM16C450 2716 D8751H LM393N D8749H D2764-25 MC1488 MC1489 AD7512 LH0002H P8253 DS1488N DS3486 DS3487 P8251A 62003P ED-2 AFL-6 FD-8 SW-9 PC-10 L-12 W-13 SP-14 CB-15 FT-FM2 FX4-A3R FU-63 SS-5GL2-F EHM-3S00MKXP1 347825 CE-9602/9702 UGRMEM-02SA2X7 PCB-101 169-106-G LB40E 8INCH XPL-500 398-18674-1 398-19049-1 398-19146-1 398-19355-1 51606A 51606C R1355 398-19478-15 3 3 2 2 9 2 6 4 3 4 9 9 18 16 10 10 10 10 10 3 1 1 1 1 1 6 1 48 30 3 3 3 3 5 1 1 1 1 2 1 1 1 1 1 1 1 1 1 1 1 .DS3487 IC.DS3486 IC.P8253 IC.Description IRF 530(SAME:S4T30089) IRF 9620 IC IC GM16C450 EPROM 2716 (16KB) D8751H.P8251A IC 62003P EL DISPLAY AUTO FLOT ALIGNER (8Inch.S4 HEPA SENSOR(PRE ALIGN)(SAME:S9 HEPA SENSOR(ELEVATOR UNIT) MICRO SWITCH(SAME:S3A60433) PUSH BOTTON SWITCH PCB-FILTER WHEEL DRIVER COLOR MONITOR MINERTIA ARM CONTROL BOARD LAMP SERVO MOTOR CPCR-UGTMEM-01 FDD-412A LAMP POWER SUPPLY ROBOTIC HANDLER B/D ASSY EXTEND/RETRACT MOTOR EDGE DETECTO BOARD PMT ASSY PRINT CATRIDGE BLACK PRINT CATRIDGE COLOR PMT TUBE ADU BOARD Vendor Part.NO 재고구분 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C S/L Mat.AD7512 IC LH0002H IC.EPROM 32K IC IC IC IC-MC1488AN IC-MC1489N IC.DS1488N IC.) FD DRIVE STANDARD WAFER POLAROID CAMERA LAMP WAFER SERVO PACK(FUSE) CIRCUIT BOARD(FUSE) HEPA SENSOR(PRE ALIGN)(SAME. Code SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 S5D90054 S5D90055 S5D90057 S5D90058 S5D90059 S5D90063 S5D90066 S5D90067 S5D90069 S5D90070 S5D90071 S5D90072 S5D90073 S5D90077 S5D90078 S5D90079 S5D90080 S5D90081 S5D90082 S5D90083 S5E50002 S5E50004 S5E50005 S5E50006 S5E50007 S5E50008 S5E50009 S5E50010 S5E50011 S5E50021 S5E50022 S5E50023 S5E50025 S5E50029 S5E50033 S5E50036 S5E50037 S5E50039 S5E50040 S5E50042 S5E50043 S5E50044 S5E50046 S5E50047 S5E50048 S5E50049 S5E50050 S5E50051 S5E50052 S5E50056 LOCATION 장비Model LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 LS-6000 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 WI880 Mat.

NO 재고구분 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 C C C C C C C C C C C C C C C C C C A A A A A A A A B B B B B B B B B B B B B B C C C C C C C C C C S/L Mat.15A*PL4150 CABLE FOR ROBOT HAND EDDY SWITCH(SH-302) INTERLOCK SWITCH(E6-30A) MAGNETIC SWITCH AIR FILTER(7PCS) PALM FOR ROBORT HAND(2PCS) STAGE CHUCK (CERAMICS) TOMING BELT(465H100) TOMING BELT (110MXL6.F P-RH-0010/AB-AL-001 SC-0012 TB-0014 TB-0015 WC-PA-0017 VS-0018 AD7512 AC-0020 MP-0023 125 1500W E3R-5L EAUM-773400 EAUF-391-900 EE-SX671 P-7 9010038/2213-75SL EAUF-270700 MOGCN029 G162054 H433200 H433197 G-230 84-15-02210 20006547A-S 532=200/100 H-R 532-50-R 2-F4-39977 2-J4-31192 2-J4-31194 BAMSD023A1X BA88040LDMB EAUA-766101 EAUM-783400 MS6804VV-S EAUM-777600 EAUM-783200 MOENS018 EAUM-773200 MOENS031 1 1 16 1 1 1 1 3 1 1 1 2 1 2 2 2 2 1 2 2 1 2 1 3 1 1 1 4 1 1 1 17 1 1 2 1 1 2 2 2 2 2 1 4 7 2 3 2 1 4 .4) WAFER CHUCK FOR PRE-ALIGNMENT VACUUM SWITCH(3PCS) ANALOGE SWITCH(SAME:S5D90073) AD CONVERTER(ADC847B) MULTI PURCURSOR(AD7502JQ) STAGE CHUCK 125 HALOGEN LAMP(1500W)(SAME:S1J50 CARRIER SENSOR A(TEL) STEPPING MOTOR UNIT MANUAL KEY PANEL PHOTO MICRO SENSOR (SAME:S9Z60 O-RING INVERTER LASER ASSY KIT WF730-FO OPERATION PANEL UNIT (SAME:S2G MIST PURE FILTER #1 AL SEAT 고정 NUT(H433200) ELECTRODE SHAFT GUIDE (H433197 O-RING THETA SPRING EXT 1250DX.Description HARD DISK DRIVE(HDD) MONITOR FUSE SET(PS-IS)250V.020WX1 R AXIS INTERC PCB YAG LASER YAG LASER CPU2 WIRE ROPE(SAME:S4T80388) WIRE ROPE(SAME:S4T80387) WIRE ROPE(SAME:S4T80389) DRIVE-AC SERVO (SAME:S2G30028) DRIVE-AC SERVO MOTOR(SAME:S2Q1 PCB-INTERFACE CYLINDER UNIT RADIAL BALL BEARING SWITCH UNIT FLOW CYLINDER UNIT TWIN ROD CYLINDER(SAME:S2Q1007 AC SERVO MOTOR UNIT ROTARY ACTUATOR (SAME:S2G3005 Vendor Part. No 현재고 ST-125 JC/404 HMA-1 FS-0001 CRH-0003 ES-0005 IS-0006 MS-0008 A. Code SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF01 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 S5E50058 S5E50059 SZ980095 SZ980096 SZ980097 SZ980098 SZ980099 SZ980100 SZ980101 SZ980102 SZ980103 SZ980104 SZ980105 SZ980106 SZ980107 SZ980108 SZ980109 SZ980116 S1D30023 S1J50094 S2G40016 S2P80149 S2R10016 S4A40103 S5A30113 SZ980646 S2P80004 S2P80182 S2R10047 S3H40068 S3H40069 S3H40078 S4A40081 S5E20042 S5E20197 S5E20198 S5F30017 SZ983158 SZ983159 SZ983160 S2G40002 S2G40003 S2G40004 S2G40005 S2G40006 S2G40008 S2G40012 S2G40013 S2G40014 S2G40017 LOCATION 장비Model WI880 IS-2000 IS-2000 IS-2000 IS-2000 IS-2000 IS-2000 IS-2000 IS-2000 IS-2000 IS-2000 IS-2000 IS-2000 IS-2000 IS-2000 IS-2000 IS-2000 Mat.

AY K3 AFM-2000-02B TMC-301(CPU) F-7161-1A F-7161-2A F-7161-5A GAUGE PAD TOWER PLASMA MONITOR H434116 G-325 현재고 3 8 18 1 1 1 1 1 1 1 10 1 1 2 1 1 1 1 2 1 2 2 4 10 3 1 4 29 29 3 2 4 4 3 1 5 4 2 2 1 2 1 2 2 3 1 2 1 7 25 . Code SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 S2G40018 S2G40019 S2G40023 S2G40024 S2G40025 S2G40026 S2G40028 S2G40029 S2G40030 S2G40031 S2G40032 S2G40033 S2G40034 S2G40035 S2G40037 S2G40040 S2G40041 S2G40043 S2G40044 S2G40045 S2G40047 S2P80024 S2P80026 S2P80151 S2P80152 S2P80154 S2P80155 S2P80156 S2P80157 S2P80162 S2P80163 S2P80164 S2P80168 S2P80169 S2P80170 S2P80171 S2P80172 S2P80177 S2R10012 S2R10081 S2R10085 S2R10089 S2R10090 S2R10091 S3A50179 S3A50180 S3A50181 S3H30114 S3H40075 S3H40079 LOCATION M-3-2 장비Model Mat.S2G3 INVERTER MONITOR (SAME:S2G30029) TEXT GRAPHIC B'D(SAME:S2Q10041 4 AXIS MOTOR CONTROL B'D COLLAR PIN PIPE PACKING-DUCT CYLINDER MOTOR MANUAL KEY BOX UNIT(SAME:S2Q10 OPERATION PANEL UNIT(SAME:S2G3 BLOCK SET-CASSETTE GUIDE-T-SHUTTER SWITCH-SELECTER PCB-RS232C CONVERTER BALL BEARING (SAME:S2G10079) BALL BEARING ADAPTOR VARI SEAL PEN CYLINDER BUSH (SAME:S2G10067) BRUSH (R) (SAME:S2G10073) BRUSH (L) (SAME:S2G10074) VENTURI VALVE BALL BEARING BALL BEARING FUSE(GLASS) FUSE(GLASS) VACUUM MEASURE JIG VACUUM GAUGE CYLINDER-SPINNER MOTOR ASS'Y-SPINNER LIMIT SENSOR MIST SEPARATER PULSE GENERATER FUSE FUSE FUSE GAUGE PAD WAFER DETECTION TOWER B. No EAUM-778800 MOENH019 MOENH146 AFHJ1B-82S BAAK-BX511K BADV707S200A BBXC-1498C2 FBPCB-0022 FBPCB-0043 MOENL023-A MOENL046-A MOENR095-A MOENS016 MOENT106 MOGCN02855 EAUF-765600 EAUF-765400 MOENLA-Z MOENH176 AHAD31K2221U EAUA-334700' MSSSRF1030ZZ MSSSRF1340ZZ MOGCT044 MOGCT126 MOGCH078 MOGCH057 MOGCH055 MOGCH056 MSVAE-10SU-3 MSLF840ZZ-M MSRF2280ZZ-M APG00004A250 APG00005A250 MOGCJ002-DY MOGCJ023-AY MOGCS106 MOGCS105.Description DC MOTOR UNIT BEARING GROMMET SWITCH-DOOR INTERLOCK DRIVER-5PHASE SEPPIN(SAME..D PLASMA MONITOR ASS'Y WAFER SUCTION PAD O-RING Vendor Part.NO 재고구분 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C S/L Mat.

NO 재고구분 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C S/L Mat. Code SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 S3H40080 S3H40081 S3H40082 S3H40088 S3H40107 S3H40114 S3H40115 S3H40155 S3H40157 S3H40158 S3H40159 S3H40160 S3H40161 S3H40168 S4A10018 S4A10021 S4A10022 S4A10023 S4A10024 S4A10028 S4A10031 S4A10032 S4A10033 S4A40060 S4A40061 S4A40062 S4A40063 S4A40064 S4A40065 S4A40102 S4A40104 S4A40107 S4A40108 S4A40109 S4A40112 S4A40114 S4A40116 S4A40117 S4A40118 S4A40119 S4A40121 S4A40122 S4A40123 S4A40124 S4A40125 S4A40126 S4A40128 S4A40135 S4A60017 S5D50004 LOCATION G-1-1 G-1-1 G-1-1 장비Model Mat. No 현재고 G-360 AS568-NO1761 V-185FLORO SI UPD 566-A T-15 (C15912) DWG #H427575 DWG #H427338 H105291-1 H105293-1 H218171-1 H219211-1 H104939-1 H337324-1 FP511-TC21 CAB-2002 APX 850-24R SETUP PART APX 850-240W WDS 유량 측정용 TOOL I/F FINGER C/S FINGER STREAM NOZZLE 개조 KIT 1/15/2146 03-20-00778 03-20-093002 03-20-00933-03 03-20-019892 04-15-01721 9313-DE11 S82F-2424P PB-0599-B SB-10-63X MY-4N D24V M2GJ-90A1-Z4EY NNS-15-5 ES3-5000 CCD-1CH-DRV2 SB-9151A SC2N DLCU ESS-1000 EE-SX673 CCD-M25 RA3BA512L003-E140 DVBA512S382 PJ-50A CLD-HEAD PV-001 23 20 10 2 3 3 4 2 1 1 1 1 1 1 1 5 3 1 2 1 1 1 2 10 3 2 6 3 3 1 1 1 1 1 10 1 10 1 2 2 1 10 6 2 1 1 2 1 1 1 .Description O-RING O-RING O-RING(SAME:S9Z62692) STEP MOTOR BULB VIEW PORT(1) VIEW PORT(2) BOX INSULATION RING(2) RING RETAINER BELLOWS FIXING RING TUBE(탄소봉) SHAFT FIXING PLATE DIGITAL FLAT PANEL CABLE ASSY. PERICLE SLAVE DISPLAY STPR MOTOR DRIVER BOARD STAGE DRIVER BOARD FOCUS DRIVER BOARD GREEN LIGHT SHUTTER ROBOT COMMUNICATION PCB POWER SUPPLY PC BOARD LAMP FOR MICROSCOPE RELAY LED POWER SUPPLY FUSE PO BOARD CCD CAMERA POWER PCB MAGNETIC CONTUCTOR PC BOARD(TOKEN B'D)(SAME:S3C40 FUSE SENSOR CCD CAMERA MOTOR MOTOR DRIVE AREA SENSOR AMP2 MASK SEJONG-MOTOR DRIVE B'D Vendor Part.RS232C LED LAMP PIN(TRS-IFB) LED LAMP CATCH CUP CLEANER 유량 측정 TOOL I/F FINGER C/S FINGER STREAM NOZZLE 개조 KIT 6Inch.

.VJ3133T-6LOZ-X Inch.Description CASSETTE STAGE W/F CHUCK W/F CHUCK MINERIA MOTOR KEY B/D CERAMIC FINGER MODIFY CHUCK POWER SUPPLY PCB PCB PCB NOISE FILTER NOISE FILTER SENSOR SENSOR 접촉기 SHELF GUIDE PHOTO FIBER SENSOR(SAME:S2R100 AMP(SAME:S9Z60740) 광전SENSOR (SAME:S9Z60739) BCR CONNECT CABLE LINEAR ENCODER MOTOR DRIVER AIR CYLINDER TUNGSTEN PROBE TIPS TUNGSTEN PROBE TIP INDIUM PROBE TIP FAN PACK 300CFM 115V VALVE-SOL. Code SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 S5D80149 S5D80150 S5D80151 S5E20181 S5E20182 S5E20183 S5E40040 S5F60001 S5F60003 S5F60004 S5F60005 S5F60007 S5F60008 S5F60009 S5F60010 S5F60011 S5F60013 S5F60014 S5F60015 S5F60016 S5F60017 S5F60018 S5F60019 SZ980014 SZ980631 SZ980634 SZ980635 S2A60595 S4T40145 S4T40268 S4T40431 S5B80071 S1K40265 S1K40266 S2A60585 S2A70037 S2A70040 S2J30168 S2J30191 S2J30194 S2J30203 S2J30213 S3H30416 S4A40127 S4A40142 S4A40143 S4A40144 S4A40147 S4A40148 S4A40149 LOCATION 장비Model Mat.BELT-TIMING.. No 현재고 METRA21XX-R METRA2100(ALUMINUM)-R METRA2100(CERAMIC)-R UTOPI-100MUB-R TIRUC-R CERAMIC-M LG CHUCK RWS50A CPU8031 SAE9206-80 SAE9206-81 WYFS10 A3 WYF-T10 A5 FU49 FU34 CH-3N 0 E32-TC200 E3S-X3CE4 E3S-LS20XE4 9-15PIN E6L-H1000 AGH24A12 SE-TD PSE-TP(R) IP-P-O(R) 0190-70066 012-001824-1 023-001280-1 1910-423138-11 567-1488 SAV-3260-131CI SAV-3260-131CIZ 0200-09405 58MA2249 5601007 φ6 * φ4 (10M) PM2-LH10 SH5MO21T1 FMNUS F16 NPT BP TEMP CHECK용 COVER CHUCK SPACER 2-822651-1 2441-3141 6000-8426 6000-1940 6000-8464 6000-2565 2808-2181 6000-4339 1 1 1 1 1 1 4 1 1 1 1 1 1 1 1 1 2 1 1 1 1 1 1 3 3 9 7 1 1 1 7 14 1 2 2 5 1 3 4 7 3 3 2 36 2 6 2 5 1 5 .687-3GT-8Inc PIN HALOGEN PJT LAMP(12V-50W) AIR OPERATION VALVE AIR OPERATION VALVE GIANT GAP SHIELD(SAME:S9Z62427 FRAME-SUSCEPTOR GEAR MOTOR-DC TEFLON TUBE PHOTO SENSOR FILTER HOUSING BP TEMP CHECK용 COVER CHUCK SPACER PROTECT RING LAMP HEAD WIRE MOTOR DRIVER SENSOR MOTOR O-RING LED BOARD MOTOR SEAL Vendor Part.NO 재고구분 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 C C C C C C C C C C C C C C C C C C C C C C C C C C C A A A A A B B B B B B B B B B B B B B B B B B S/L Mat.

No 6000-0876 6000-6574 6000-7180 6000-0527 6000-44306 6000-8206 6000-8536 6001-1511 6001-1508 BG4-4400-000 MB12Z-BUL (USED) 2985-417703-11 2986-409580-11 2986-409865-11 2986-410363-11 2986-409866-11 023-000049-1 023-000365-1 023-000585-1 023-000831-1 023-001290-1 1910-427632-12 023-000832-1 1380-100350-11 569-6542 2-L468038 2-FT1-500 PRD-024 12-0002 31-0008 31-0027 31-0029 31-0042 32-0100 32-0047 32-0108 32-0109 32-0110 32-0120 32-0121 36-0006 39-0032 39-0014 1. Code SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 S4A40150 S4A40151 S4A40152 S4A40153 S4A40155 S4A40156 S4A40160 S4A40161 S4A40162 S4S40006 S4S40354 S4T10018 S4T10019 S4T10020 S4T10021 S4T10044 S4T40004 S4T40157 S4T40158 S4T40266 S4T40267 S4T40426 S4T40634 S4T41174 S5B80076 S5B80085 S5B80090 S5H80013 S5K10001 S5K10002 S5K10003 S5K10004 S5K10005 S5K10006 S5K10007 S5K10008 S5K10009 S5K10010 S5K10011 S5K10012 S5K10013 S5K10014 S5K10016 S5K20002 S5K20003 S5K30003 S1A30642 S1A30670 S1A30671 S1A30672 LOCATION G-1-3 M-1-1 장비Model Mat.25Inch.TIMING..0 AMP(20MM*5MM) S FUSE.BROWN.*2 FUSE.2-5-144 METAL O-RING 725-PLM(PRM) FUCL-715-6.0 AMP(1.250V 2.BELT-TIMING.25Inch.BELT-TIMING.MAXON SOLENOID VALVE(FOR CONTROLLING SOLENOID VALVE(FOR VACUUM ACTU O-RING.550-2GT-6Inc Inch.SAPPHIRE#242 ELECTRODES REPLACEMENT FOR ANNOZZLE ASEMBLY LAMP HEATER ALUMINUM O-RING MICROPOSITIONER & HOLDERS CHECK VALVE BREAKER BREAKER BREAKER Vendor Part.TIMING.BELT-TIMING..35-0.125 AMP (20MM*5MM FUSE.0 AMP(20MM*5MM) S ATOMIZER ORIFICE.NO 재고구분 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 B B B B B B B B B B B B B B B B B B B B B B B B B B B B B B B B B B B B B B B B B B B B B B C C C C S/L Mat.250V 1.196-2GT-9Inc Inch.BELT-TIMING.25 AMP(1. 186-2GT-9 Inch...B150S3M207GI SUPPORT PIN AD Inch. ASS'Y.250V 0.250V 2.0 AMP SB FUSE.290-2GT-9Inc FUSE(8A) UL200T MOTOR FAN (DISPLAY) METAL GASKET 953-5016 FUJIFILM THERMAL IMAGE PRINTER PUSHER RODS 1/2Inch.07-S1-UP EB-50C2P5A30MATBL EB-50C2P30A30MATBL EB-50C2P50A30MATBL 현재고 2 2 2 4 6 2 1 1 1 1 1 4 1 1 1 1 1 2 1 2 3 13 2 2 1 4 7 1 1 1 1 1 3 1 2 2 2 2 2 2 2 1 1 1 10 3 2 2 2 2 .VITON SOLID STATE RELAY SPADE LUG FUSE.* FUSE.MAIN PCB GEARMOTOR.250V 1. 530-2GT-6 BELT.Description SWITCH RELAY FAN AREA SENSOR SENSOR CCD CAMERA TOKEN BOARD ALIGNMENT STAGE CONTROLLER TRANSFER CONTROLLER VACUUM SW UNIT FAN (USED) W/F CENTERING TOOL D15P-D15J CABLE #002 A3P CABLE #015 1500 A3P-A5J CABLE #003 1500 A5P-A3P CABLE #005 1500 BELT.250V 0.

NO 재고구분 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C S/L Mat.6F78 COGNEX UNIT ZSTGWH BOARD PUSH BUTTON SWITCH THEMOSTAT SIPOCCO AMMETER SOLENOID VALVE(SAME:S4S10482) PHOTO SW PCB CLEANING PLATE TH5 (新品) (USED) Vendor Part.USED CIRCUIT BREAKET(30A)USED FLOW METER USED N2 ANL GAS PATTERRN PANEL USED SOLENOID BLOCK VALVE.USED HEATER BASE(ANNEAL용)USED CAP BASE(ANNEAL용)USED HIGH VACUUM VALVE(AV53)USED ANNEAL용 TUBE FLANGE COOLING P RELAY PHOTO MICRO SENSOR PUSH SPRING CUTTER PRESSURE PLATE FIBER SENSOR PHOTO MICRO SENSOR(SAME:S9Z607 PHOTO MICRO SWITCH(SAME:S5J200 PHOTO MICRO SWITCH(SAME:S9Z619 AIR PRESSURE SWITCH RELAY RINS HEATER MAGNETIC CONTACTOR POWER SUPPLY CCD BOARD CCD DRIVER LAMP FOR MICRO SCOPE POWER SUPPLY.1/4.Description BREAKER BREAKER BREAKER BREAKER BREAKER PHOTO ELECTRIC SWITCH. No 현재고 EB-50C2P20A30MATBL EX-100-3P100AAC100-200-30 EX-225-3P225AAC200-30MA-T EX-225-3P200AAC200-30MA-T EX-400-3P250AAC200-30MA-T FE7B-TLB6VG(R/E) EC52021NI 214 E00775 SQ140E502PFSFFPM A067974 WGNS2RR2 CV1.USED APC VALVE USED NEEDLE VALVE USED SCV BELLOWSE VALVE(AV72)USED REGULATOR USED PERSSURE SWITCH(PG1/PS1)USED FILTER USED CHECK VALVE(CV1).USED TRANS(30A). Code SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 S1A30675 S1A30676 S1A30677 S1A30678 S1A30679 S1A30712 S1A30730 S1A30733 S1A30734 S1A30735 S1A30737 S1A30738 S1A30739 S1A30740 S1A30741 S1A30743 S1A30744 S1A30746 S1A30747 S1A30748 S1A30749 S1A30750 S2R10124 S2R10128 S2R10136 S2R10137 S2R10141 S2R10144 S2R10145 S2R10146 S2R10148 S2R10157 S3H30438 S4A40139 S4A40140 S4A40145 S4A40146 S4A40159 S4A40163 S4A40175 S4R40246 S4S10417 S4S10449 S4S10450 S4S10487 S4S10523 S4S40085 S4S40323 S4S40359 LOCATION G-1-2 G-1-2 장비Model Mat.1/4 D4EX03995 EB-50C FLOW METER T2DD2-15327(ANL) SOLENOID BLOCK VAVLE HEATER BASE(ANNEAL용) CAP BASE(ANNEAL용) XLD50 ANNEAL용 TUBE FLANGE COOL G2R-1-SND EE-SFT401 C362013 D113032 E-32-TC200 EE-SX671 EE-SX672 EE-SX673 IS300-02-L5 G2R-232-V-US WHITE LINE E-135662 VB3-4483-113 692-6125 KBBO5614 516 KBBO5011 510 KBBO5011 511 KBBO5700 503 KBBO5650-503 BG4-2838-000 BD4-7497-000 Y75-4088 (USED) 2 2 2 2 2 1 1 1 1 2 1 4 1 1 1 3 2 1 1 1 1 1 2 7 2 1 2 3 4 3 2 2 27 2 1 1 1 1 2 1 1 1 1 1 1 1 1 1 1 ..

.152F-P0-2 PIN.BELT-TIMING.. Code SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF03 SF04 SF04 SF04 SF04 SF04 SF04 SF04 SR01 SR01 SR01 SR01 SR01 SR01 S4S50084 S4T10043 S4T40003 S4T40005 S4T40006 S4T40007 S4T40009 S4T40047 S4T40162 S4T40296 S4T40365 S4T41101 S4T41138 S4T41145 S4T41172 S4T41176 S4T41196 S4T41199 S4T41225 S4T41233 S4T41234 S4T41236 S4T41762 S4U10140 S5B80007 S5B80008 S5B80010 S5B80012 S5B80054 S5B80056 S5G70001 S5G70002 S5K20001 S5K20013 S5K20014 S5K30001 S5K30002 S1A20198 S1A20226 S1A30691 S1A30696 S1A30852 S1A30853 S2X40157 S1A30669 S1A80411 S2D50004 S2J30237 S2J30263 S1A30649 LOCATION G-1-1 장비Model Mat.80-XL-025UIn Inch..200-XL-037UI Inch.300-XL-025UI HPO AIR CYLINDER Inch... 303-3GT-15 Inch.BELT-TIMING..BELT-TIMING.VJ314MY-6LOZ-M5 SOL VALVE..BELT-TIMING.P-700-1U (TEL83-ASI) FUSE.T-VV3J3-2-3CL2-B0 VALVE SOL..VJ3233Y-6LOZ-X39 THC POWER SUPPLY ASSY-CPU EPC6-S DC POWER SUPPLY HR-9-24 DC POWER SUPPLY RT-3-5FR DC POWER SUPPLY EWS50-5 DC POWER SUPPLY EWS300-5 DC POWER SUPPLY EWS120-24 DC POWER SUPPLY EWS180-24 POWER SUPPLY 175W POWER SUPPLY 100W TEST MATERIAL THERMO COUPLE CERAMIC RING 열전대 INDIUM PROBE ELEMENT PROBE TIPS PHOTO S/W(CASSETTE LACK ?(SAM PHOTO SENSOR(CASSETTE LACK용) PHOTO SENSOR PHOTO SENSOR T/C FOR CONTROLLER T/C FOR OVERHEATER PUSH BUTTON SWITCH POWER SUPPLY CONTROLLER PRESSURE.IF-Z-16-0 73 BELT.192-3GT-9Inc FM...Description ADP-2A PCB CABLE ASSY RS232C BELT.RTW Inch..VJ3233T-6LOZ-X43 SOL VALVE.6-150-3M IP-P-O SE-TD(SE-T) EE-SX670 EE-SX670A EE-SX672 EE-SX673A NM150SR5/PR-GSS-002 D4EX06095/PR-GSS-003 AH164-SLG11E3 CQM1-PA203 012-002579-1 0200-09614 V-34 P3 DFC1507 현재고 1 2 1 2 2 2 2 14 1 2 4 2 1 2 1 3 1 1 10 5 5 1 1 2 1 1 1 1 1 1 1 1 1 2 1 9 9 10 12 2 13 2 2 7 1 1 2 6 4 1 ..VJ3133T-6LOZ-X44(SAM SOL VALVE.VZ110-6PS-M5-F-X13 SOL VALVE. No BG4-8700-000 041-006888-1 023-000044-1 023-100921-1 023-100917-1 023-000043-1 023-100916-1 024-011385-1 1380-100546-11 023-101162-1 024-006915-1 045-000019-1 021-000340-1 023-000911-1 024-011755-1 045-125276-1 012-002444-1 012-000545-1 012-001824-1 012-001823-1 012-003002-1 012-002312-1 POWER SUPPLY 908149-001 K621546 K621673 K621690 K621717 K621714 K621778 498413-01 498414-01 E52CA H 337520 K 1.B6053M789GIn Inch.NO 재고구분 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C A A A A A B S/L Mat.LIFT WAFER 200MM BWCV(SAME O-RING(SAME:S9Z62887) O-RING(SAME:S9Z60428) MOTOR DRIVER Vendor Part.TIMING 3640-5GT-15 FILTER ZX1-F FUSE(GP20) 2A-250V RING-RETAINING C-TYPE-INT..BELT-TIMING.BELT-TIMING.GTE 125V 10A VALVE SOL..TIMING..

..NF100-SP-2P-75A CIRCUIT BREAK.FHT-2020M HEATER TAPE.FHT-0502H HEATER TAPE.5M LEA HEATER TAPE..750 SHAFT-4.336 OD..6.NF50-SP-2P-30ACIRCUIT BREAK.BLA030(T) O-RING(SAME:S9Z61771) CHEMICAL FILTER CHEMICAL FILTER BELLOWS PUMP(20L용) TIMING BELT BELT TIMING BELT TIMING.0...C)BAFFLE PER-HEAT RING MS BATH(MEGA) VALVE-SOLENOID-2-WAY-115V BELTING-POLY-1/4Inch..NF50-SP-2P-50ACIRCUIT BREAK.NO 재고구분 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 B B B B B B B C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C C S/L Mat..5 SEAL-5.000 SHAFT.5 O/LG BELT-V-GRIPHOTCH-53. REGULATOR-PILOT3/4Inch.NV50-CP-3P-50ATEMP.100V 120W 3M(SAME HEATER TAPE.ORANGE CONTROLLER-TEMPERATURE MOTOR-CHAMBER DRIVER REVERSIBL REGULATOR-PILOT 1/2Inch.NV50-CP-3P-30ACIRCUIT BREAK..135-L-100 BE(SAME BELT TIMING.FHT-1020M HEATER TAPE. No 043-000158-1 045-000181-1 P-300 WGFG80P01 WDFV40WOF PFD2 ZSP-2001 023-000789-1 023-000709-1 023-000725-1 031-001991-1 031-002001-1 031-002031-1 031-001987-1 031-001821-1 031-002039-1 T4M-B3SK4C 043-000232-1 043-000039-1 043-000445-1 043-000452-1 043-000454-1 043-000448-1 043-000095-1 0200-35159 0200-35101 FK20P001 BB0150-01 KK-8738-03 FB8123-01 CJ1427-02 BB8158-02 BB8158-03 BB8071-01 BB9240-01 HA9445-03 FA-9558-01 DS080020 EJ010505 EJ010513 FJ031820 FJ032929 FJ033782 HM280395 HS190000 HS190002 HT170014 HV160001 PU160035 PU160042 현재고 2 3 43 1 3 2 1 2 2 2 1 1 2 2 1 3 3 1 1 1 1 1 1 2 1 1 1 1 1 1 1 1 1 1 1 2 1 2 1 1 2 1 1 1 1 1 1 1 1 1 ..B40S2M190U CIRCUIT BREAK..0.771 SHAFT-2. SLIT PLATE FLUID SENSOR CONTROL UNIT FLUID SENSOR PTFE ENCAP SENSOR PRESSURE SWITCH FLOAT SWITCH SENSOR FIBER OPTIC FU37 SENSOR KEYENCE Vendor Part.NF100-SP-3P-100 CIRCUIT BREAK.. Code SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 SR01 S1A80317 S1M50159 S2J30022 S2N30419 S2N30420 S2N30422 S3A60208 S1A80011 S1A80336 S1A80345 S1A80404 S1A80406 S1A80407 S1A80408 S1A80409 S1A80410 S1A80414 S1A80417 S1A80418 S1A80420 S1A80421 S1A80422 S1A80423 S1A80426 S1C20010 S1C20016 S1L60454 S1Q10109 S1Q10148 S1Q10149 S1Q10150 S1Q10151 S1Q10152 S1Q10154 S1Q10155 S1Q10157 S1Q10158 S1S40021 S1S40022 S1S40023 S1S40024 S1S40025 S1S40026 S1S40031 S1S40033 S1S40034 S1S40035 S1S40037 S1S40038 S1S40039 LOCATION 장비Model Mat.5 O/LG SEAL-1...31 SEAL-2.681 OD-0.Description HEATER TAPE FUSE.FNPT VALVE-SOLENOID 4-WAY 24VAC VALVE-4-WAY-24VAC OVER TEMP BOARD THERMO COUPLE-K TYPE-1/8"(SAME COUPLING-SHAFT 5/8*5/8 BELT-V-GRIPHOTCH-33.100V 60W 1..FHT-3020M HEATER TAPE (C.007 OD. CONTROLLER HEATER TAPE.

NO 재고구분
698
699
700
701
702
703
704
705
706
707
708
709
710
711
712
713
714
715
716
717
718
719
720
721
722
723
724
725
726
727
728
729
730
731
732
733
734
735
736
737
738
739
740
741
742
743
744
745
746
747

C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C

S/L

Mat. Code

SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01

S1S40040
S1S40041
S1S40043
S1S40044
S1S40045
S1S40046
S1S40047
S1S40048
S1S40049
S1S40050
S1S40051
S1S40052
S1S40055
S1S40057
S2D50014
S2D50016
S2D50017
S2D50019
S2G80104
S2G80106
S2G80107
S2G80113
S2G80114
S2N30421
S2N30423
S2N30426
S2N30428
S2N30429
S2N30430
S2N30431
S2N30432
S2N30433
S2N30434
S2N30435
S2N30437
S2N30439
S2N30440
S2N30441
S2N30442
S2N30443
S2N30444
S2N30446
S2N30448
S2N30452
S2N30457
S2N30458
S2S20046
S2S20140
S2S20144
S2S20146

LOCATION

장비Model

Mat.Description
PHOTOELECTRIC AMP
SWITCH SENSOR FIBER OPTIC
SOLID STATE SWITCH
SWITCH- SOLID STATE SWITCHES
SWITCH-N.O.-HALL EFFECT
CAPACITIVE PROXIMITY SWITCH
C/B 2-POLE 20AMP
C/B 2-POLE 15AMP
C/B 2POLE 30AMP
C/B 2-POLE 25AMP
OVERLOAD RELAY
RELAY-24VDC
FAN 240 CFM
VARISTOR-250V RMS 50KA SCREW B
SUSCEPTOR-NITRIDE
REFLECTOR-RTP(R-47-1C)
CAL용PRE-HEAT RING(NIT)
TEMP CAL용 SUSCEPTOR KIT(NIT)
BUBBLER TANK ASSEMBLY
VACUUM FILTER
ADAPTER-SLOW VACUUM
ARM HANDLING
EXHAUST PRESSURE GAUGE(DIGITAL
CHEMICAL FILTER
CHEMICAL FILTER
3 POLE 40 AMP CB
MALE BRANCH TEE
CAPUCITANCE SWITCH
PORT CONNECTOR OF 1/4
FEMALE CONNECTOR 1/4
BARDED TUBING CONNECTOR
RTD ASSY W/HUPVC
PRESSURE TRANSMITTER
REGULATOR 10-60
33MHZ 486 BASE CPU MOD(SAME:S1
CIRCUIT BREAKER OF 10 AMP
BALL VALVE
BELLOWS VALVE 1/4
FEMALE CONNECTOR OF 3/8(SAME:S
DIAPHRAGM VALVE
FLARETEK STRA10GHT
BELLOWS VALVE N/C
RELAY 24VDC COIL
부르동 GAUGE(30PSI)
WAFER TRANSFER SPECIALISTS
4270W O-RING
O-RING ID 28.0X.210 CSD
JIG DC BIAS POST ALIGNMENT
PVD CHAMBER POS C WATER RETURN
PVD CHAMBER LID

Vendor Part. No

현재고

PU160047
PU160081
PU670045
PU670046
PU690045
PV380012
QH090096
QH090107
QH090110
QH090124
QP040033
QP070016
RA030037
VR590008
0200-35113
0021-35163
0200-35072
0200-35168
PG6-1461-000
SS-4TF-90U
D20-3089-000
PS5-3029-000
TX-320-AC-A
WDFZATXOF
WGFZ80P01
MG27182
IMP2MBT/FLUOROCARBON
KIE-3015-FEKG
SS-401-PC
SS-600-7-4
12364
A-PX-1-25-3-1-5-X
CDTTSB100-CC-4DCT
R35-02B
EPC-5-33102752/VDO
Q0210E316SQUARED
SS-62TF4
SS-4BK-VP-KM
SS-400-7-2
N/O 695-1.5-039175-2
PANEL MOUNT UNION
SS-6BK-K
AB700-HA32Z25
CFM-01
WTC-01
AS568-448
3700-01426
0270-20070
0040-75313
0040-21289PA

1
1
1
1
1
1
1
1
3
2
1
2
1
3
1
1
1
1
1
5
3
1
1
1
1
1
1
6
2
2
20
1
1
4
1
1
1
1
2
1
5
1
2
1
1
1
2
1
1
1

NO 재고구분
748
749
750
751
752
753
754
755
756
757
758
759
760
761
762
763
764
765
766
767
768
769
770
771
772
773
774
775
776
777

C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C

S/L

Mat. Code

SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01

S3H70050
S3H70051
S3H70052
S3H70074
S4A20002
S4T41401
S4T41402
S4T41405
S4T41407
S4T41441
S4T41442
S4T41443
S4T60008
SZ982237
SZ982247
SZ982250
SZ982251
SZ982252
SZ982253
SZ982254
SZ982263
SZ982264
SZ982265
SZ982266
SZ982269
SZ982271
SZ990069
SZ990071
SZ990072
SZ990073

LOCATION

장비Model

Mat.Description
MANUAL V/V
10T MANOMETER
MINI CONVECTRON GAUGE
LIFT KIT ASSY
SI APERTURE 2 HOLDER(E-BEAM장?
O-RING..BUTYL AS568-162 BLK
O-RING..BUTYL AS568-257 BLK
O-RING..PF S-11.2 BLK
O-RING..PF S-22.4 BLK(SAME:S9Z
O-RING..NBR AS568-223 BLK
O-RING..NBR AS568-218 BLK
O-RING..KALREZ4079 BLK(SAME:S9
WAFERGARD F40 0.1UM FILTER
8Inch. BLADE(SAME:S2D50005)(SA
ANALYZER MOTOR (SAME:SA971950)
ANGLE ENCODER POLARIZER INCL.C
EDA BOARD
EAD BOARD
EMA BOARD
ANGLE ENCODE FOR ANALYZER INCL
OL APERTURE PLATE
PENNING VACUUM GAUGE(C-4)
CERAMIC ARM(TABOT CHUCK)
A POSI SENSOR
PA/TORR METER
O-RING(S25)
DURAN
FC-0901F
FC-0901F
Y2021

Vendor Part. No

현재고

TRIKON-01
TRIKON-05
TRIKON-06
0240-34866
1800UM PITCH(593-1198)
027-001485-1
027-001487-1
027-101985-1
027-102595-1
027-000313-1
027-000483-1
027-001131-1
WGVL40S01
0200-35004
E9A170
E9A110
E9A540
E9A550
E9A530
E9A130
3
2/1/1909
UA-0000-3/Y-TAO-CE-001
EE-SX670(JY5)
WSG-65GD-2NN-3S
S25
DURAN
FC-0901F
1B05-200030-11
Y2021

1
1
1
1
3
1
1
8
25
1
1
1
5
2
1
1
1
1
1
1
1
1
1
2
1
3
14
1
1
1
2368

PARTS LIST2
No
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51

Item no

장비명

3101B-001
3101B-002
3101B-003
3101B-004
3101B-051
3101C-021
3101F-002
3101F-104
3101G-001
3101M-001
3101M-021
3101M-105
3101P-002
3101P-104
3101S-051
3101S-155
3101S-158
3103A-006
3103B-007
3103B-021
3103B-024
3103B-025
3103B-026
3103B-027
3103B-032
3103B-036
3103B-038
3103B-043
3103B-053
3103B-055
3103B-056
3103B-057
3103B-058
3103B-059
3103B-060
3103B-066
3103B-067
3103B-068
3103B-070
3103B-101
3103B-104
3103B-106
3103B-109
3103B-110
3103B-111
3103B-113
3103B-118
3103B-121
3103B-125
3103B-131
3103C-002

FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE

DESCRIPTION
(X)FIRING CIRCUIT BOARD
(X)I/O PC BOARD
(X)MFS END CLOSURE POWER SUPPL
(X)FLOW CONTROL PC BOARD
(X)60 AMP BREAKER
(X)BOAT LOADER CABLE
(X)FILTER ELEMENT
(X)FLUORESCENT DISPLAY
(X)RING GASKET(SILICONE)
(X)BOAT LOADER MOTOR
(X)FLOW METER FOR HYDROGEN
(X)CANTILEVER MOUNT
(X)POWER SUPPLY
(X)PULLEY BOAT LOADER
(X)SEAL RING GRAPHOIL
(X)ELECOATSPRAY
(X)DUAL SCR (3131S-158)
(Y)5"B/L LINE ACTUATOR
(Y)5"OPTO-INPUT MODU
(Y)5"PLUG-IN MODULE +/- 5V PCB
5"PCB HIGH LEVEL AMP 0-10V
(Y)5"BOATLOAD BACK P
(Y)5"DRIVE BOARD
(Y)5"PCB SCANNER HIG
(Y)5"PCA BINARY I/O
5"PCB ASS'Y BINARY I
(Y)5"PCB ASSY SO NO/
(Y)5"PCB PWR SPLY MF
5"IC AD521 FOR AMP/F
(Y)5"CENTRAL MCB PCB
(Y)5"SLAVE DTC PCB A
(Y)5"PCB ASSY AMP MO
(Y)5"MPC INTERFACE B
(Y)5"PCB ASSY SS SCMR/AMP STD
(Y)5"TEMP CONTROLL B
~Y)5"KEYPAD INTERFAC
(Y)5"IBAL CONTROL BO
(Y)5"E2 BATTERY PCB
(Y)5"DRIVER BOARD
(Y)5"MAIN CIRCUIT BOARD
(Y)5"VESTIBLE BLOCK
5"B/L GUIDE BEARING
5"BARATRON 2 TORR
(Y)5"BATTERY 3.6V
(Y)5"BOAT CONTROL PC
(Y)5"VESTIBLE BLOCK(Y)5"VESTIBLE BLOCK(X)5"REPEATABLE POSIT V-BLOCK
CB 2P 480V 100A SQD FAL ST

LOCATION

D-3-5-1
D-3-5-1
J-3-1
D-3-5-1

D-3-5-1
K-9-3-1, D-2-5-1
D-3-5-2
K-9-3-1
M-6-3-3

N-4-3-1
J-1-3-2
J-4-3-4
N-4-3-1

VENDOR PART NO
905053-001
901868-001
902979-001
900830-001
219-2-6882-3
903188-001
P-511-03-O1ZLPO
FG108M1
904298-001
903621-001
5811

905945-001
904603-001
420ML
CD631615
6100012
3161101
3160292
3160301
3161501
3130033
3160332
3160072
3161031

J-1-3-2

N-4-3-1
N-4-3-1
J-1-3-2
N-4-3-1
D-3-1-1
J-1-3-2
J-1-3-2
J-1-3-2
G-1-2

L-6-1-2
J-1-3-2
J-6-4

A-3-1
J-5-3

1560105
B7020-200-1
B7020-320-0
901270-005
3161522

EAS005-001
VEN900-003
3161201
9038-236-009
1805005
2952650
7449042
122AA-00002AB
8760459

FA-IN
HVB003-001
9011239

수량
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2
1
3
3
1
1
3
67
8
4
6
1
8
5
16
9
1
2
4
1
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6
3
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1
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20
5
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17
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9
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1
4

LOC

VENDOR

T14
T14
T31
T14
AA21
AA21
AA22
AA21
A21
P55,T21
AA21
A21
T21
AA21
AA21
DD23
AA22
A104
W14
W14
W14
W14
W14,T63
W14
W14
W14
W14
W14
W14
W14
W14
W14
W14
W14
U23
W14
W14
W14
W14
C32
L11
A104
B34
W14
A104
DD43
DD43
DD43
C32
DD10
A81

TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU

D-8-1 8603219 2057244 K-5-5-3 8609537 K-5-5-3 K-5-5-3 8609539 K-5-5-3 8580730 L-6-1-1 SS-4BMRG-TW C-2-3 AT-BC D-2-4-1 4764 3842 C-2-3 4684 2215 3886 G-2-1 G-2-5-4 D-2-4-1 D-2-4-1 D-2-4-1 I-5-3 L-5-1-3 J-4-1-2 L-5-1-3 J-4-1-2 L-5-1-3 D-3-1-1 N-4-3-2 L-5-1-3 L-2-4-3 D-3-1-1 L-5-1-3 L-5-1-3 46X7T 115X6.Q'TZ SHEATH (X)5"T.C CANTI' SEAL O-RING (X)5"O-RING (X)5"LTO DOOR O-RING (X)5"O-RING SILICON (X)5"O-RING SILICON C)5"O-RING(3996O-319) (X)5"SUPPORT RING PLATE (X)5"SPRING (X)5"SWIVEL (X)5"INJECTOR PROFILE T/C (Y)5"BOARD. LOAD STA 5"BOARD. AL 5"BOATLOUDER CONTROL (Y)5"BOARD INDUSTRIA 5"BOARD OVERTEMP DET (Y)5"BOARD SERVO INT (Y)5"DISC DRIVE MOTO (C)5"BEARING DUPLEX LOCATION VENDOR PART NO J-5-2 K-5-5-3 3201552 7006600 M-2-1-3. AUX INTR (Y)5"BRAIN BOARD 5"B/D. GAS INTERFA (Y)5"A/C FAIL DETECT (Y)5"BOARD.No 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 Item no 장비명 3103C-004 3103C-061 3103C-063 3103E-021 3103H-002 3103L-001 3103M-021 3103M-025 3103P-019 3103P-022 3103P-023 3103R-016 3103S-003 3103S-005 3103S-007 3103S-021 3103S-022 3103S-024 3103S-025 3103T-011 3103V-017 3103V-020 3105B-002 3105B-022 3105B-024 3105D-001 3105O-003 3105O-006 3105O-017 3105O-018 3105O-029 3105O-032 3105O-033 3105O-036 3105P-003 3105S-025 3105S-026 3105T-011 3106A-001 3106B-006 3106B-008 3106B-009 3106B-013 3106B-015 3106B-016 3106B-019 3106B-020 3106B-029 3106B-031 3106B-042 3106B-045 3106B-048 3106B-051 FURNACE FURNACE LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF DESCRIPTION (Y)5"CABLE (20FT) (Y)5"CABLE (Y)5"OPTICAL ENCODER (Y)5"FLEX HOSE 10'W/ (Y)5"LCD DISPLAY W/L (Y)5"BOAT PLATE MOTO 5"FAN & MOTOR (Y)5"LPCVD PWR SUPPL (Y)5"DC-POWER SUPPLY 5"KEY PAD ASSY-LH (X)5"CERAMIC RING (Y)5"SFT CONTROL SST (Y)5"FIBEROPTIC SENS 5"BANNER FIBOROPTIC 5"MICRO S/W (X)5"LIMIT S/W ASS'Y (Y)5"THERMOSTAT S/W (230F) (Y)5"S/W (2 K OHM) (Y)5" THERMOSTAT OP (Y)5"VALVE SOL PNEUT (Y)5"VALVE (X)5"TERMINATION BOAT (X)5"SUPPORT ARM BRACKET (X)5"BELLOWS FEEDTHRU CANTILEV (X)5"DOOR 200/206 3-RAIL (X)5"COLD TRAP O-RING (X)5"O-RING. SCR FIRING SO 5"BOARD. BOAT LOADER 5"BOARD H2 ANNEL.7T 5611 4882 4775 300X150X45T 124510-001 123970-001 HGK001-005 906539-001 120270-001 117690-001 147050-001 125280-004 905946-002 122630-007 122690-001 131660-001 904031-001 수량 16 1 1 4 1 2 21 7 3 1 2 1 10 1 1 10 1 2 6 1 1 3 20 1 2 1 5 22 224 370 100 300 100 11 1 2 1 4 2 2 1 1 1 2 1 1 1 1 4 2 1 1 5 LOC VENDOR A81 A104 L82 T63 B24 V25 A104 L22 W14 V14 W14 A105 A104 A104 D13 V25 Z14 A104 A104 A104 A104 B31 AA23 AA23 AA23 AA23 AA22 B22 B22 A22 AA22 AA41 BB22 BB22 AA23 AA23 AA23 AA23 Z19 A14 U23 W14 A14 W14 A14 U23 W12 A14 A91 U23 A14 A14 B25 BTU BTU BTU MANUAL BTU MANUAL BTU MANUAL BTU MANUAL BTU MANUAL BTU MANUAL BTU MANUAL BTU MANUAL BTU MANUAL BTU MANUAL BTU MANUAL BTU MANUAL BTU MANUAL BTU MANUAL BTU MANUAL BTU MANUAL BTU MANUAL BTU MANUAL BTU MANUAL BTU MANUAL ASM ASM ASM ASM ASM ASM ASM ASM ASM ASM ASM ASM ASM ASM ASM ASM THERMCO THERMCO " " THERMCO " " " " " " " " " " . L-11-3-4 VEN770-001 MH-QF-D10 N-1-1-3 VEN770-011 K-5-5-3 127X635X3T F-5-1 CL2T2 8196156 L-9-2 31-0010 HAS210-003 J-5-1 K-5-5-3 7670205 K-5-5-3 L-5-4-1 VEN770-004 N-1-1-3.

CAR (Y)5"BELT. F-3-2 L-4-3-4 N-2-5-1 M-1-4-1 J-3-1 D-3-1-2 K-5-5-2 L-5-2-1 M-1-4-1 M-1-4-1 L-7-1 VENDOR PART NO 903888-001 121895-001 129348-001 127342-001 903889-004 906609-001 900605-004 125993-003 40261 40064 904033-002 904033-007 904033-003 906387-001 OPT022 B1TYPE 118860-001 900029-013 155770-001 SK18667-01-004 01-432-261 100378-001 903348-001 900862-002 900573-010 900034-007 900034-001 900869-030 900573-005 900573-015 904119-030 900869-060 142893-001 146655-001 904027-060 901034-006 904027-061 906904-001 5400-6070 138611-001 904513-001 03-0062 FTC322 04-267-386 10517 900721-001 321002 1/4X1-1/4 AGC 01-432-132 201300 31-7106 124422-001 수량 4 1 1 1 1 1 1 2 1 1 5 1 1 2 1 5 2 1 2 4 4 2 1 1 1 1 1 2 2 1 1 15 2 1 1 3 1 1 2 2 5 2 1 1 1 3 1 2 4 20 4 6 48 LOC VENDOR B25 A140 A94 A94 A94 A94 A94 L82 T31 A94 D12 D12 D12 D12 W14 W14 W14 T31 A94 A94 A14 A15 A14 D12 D12 D12 D12 D12 D12 L82 D12 A94 AA24 A91 A14 A91 U23 A94 A94 D12 A94 L33 A94 W12 AA24 AA44 A93 T31 A93 A93 AA24 AA24 A15 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " . SINGLE (Y)5"BLOCK. BEARING (Y)5"RETAINER.BLANK-OFF (NW-50) (X)5"GASKET VESTIBUL LOCATION M-6-4-1 L-5-1-3 L-4-3-4 L-4-3-4 J-3-3 D-3-1-2 L-4-3-4 J-4-1-2 J-4-1-2 L-4-2-4 D-3-1-2 L-4-3-4 L-4-3-4 L-4-2-4 K-3-2-3 L-4-2-4 L-5-5-2 L-5-5-2 L-5-5-2 L-5-5-2 L-5-5-2 L-5-5-2 L-5-5-2 L-4-3-4 M-1-4-1 L-4-2-4 D-3-1-1 L-4-3-4 L-4-3-4 L-5-5-2 L-4-3-4 H-3-3.No 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 Item no 장비명 3106B-052 3106B-054 3106B-055 3106B-056 3106B-058 3106B-059 3106B-060 3106B-061 3106B-063 3106B-070 3106B-071 3106B-072 3106B-073 3106B-074 3106B-078 3106B-081 3106B-084 3106B-099 3106B-101 3106B-104 3106B-105 3106B-106 3106B-109 3106B-111 3106B-121 3106B-122 3106B-125 3106B-127 3106B-128 3106B-132 3106B-133 3106B-141 3106B-142 3106C-006 3106C-008 3106C-016 3106C-018 3106C-059 3106C-071 3106C-087 3106C-090 3106C-093 3106E-001 3106E-003 3106E-005 3106F-001 3106F-004 3106F-011 3106F-012 3106F-050 3106F-102 3106F-106 3106G-002 LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF DESCRIPTION (C)5"BEARING. SPLIT 5"TEOS MFC 200SCCM (Y)5"ASSY H2 BURNOFF ELEMENT (X)5"ENCODER BLOCK A (X)5"FILTER AIR INTA (X)5"A PICO FUSE R (X)5"FUSE 0.3 POL (Y)5"BREAKER CIRCUIT (Y)5"BREAKER CIRCUIT (Y)5"BREAKER CIRCUIT (Y)5"BREAKER CIRCUIT (Y)5"BREAKER CIRCUIT (Y)5"BREAKER (Y)5"BREAKER 5"DISK HEAT BLOCK (Y)5"BREAKER CIRCUIT (Y)5"BREAKER MFG-MKS (X)5"BRACKET SUPPORT (Y)5"DOSTOP COLLER (Y)5"BALL SOCKET75/5 (Y)5"COLLAR DUSTOP (Y)5"TEMP CONTROLLER (X)5"HEATSINK CONTRO 5"CONTROL PANEL ASSY (Y)5"TEMPERATURE CONTROLLER (X)5"COOLAR. TIMING DR (Y)5"BELT TIMING (Y)5"BELT (Y)5"BELT TIMING (Y)5"BRAIN BOARD 5"MANDMETER PCB ASSY 5"CIRCUIT BREAKER 1 (X)5"BAM I/O PCB ASSY (Y)5"VELT BLOCK (Y)5"SIPPING BLOCK (Y)5"TERMINAL BLOCK (Y)5"C. BEARING (Y)5"BEARING BALL (Y)5"BEARING MINATUR (Y)5"BEARING (Y)5"BLOCK VESTIBULE (X)5"ENDOCER/HALL BUFFER BD (Y)5"72-PIN EXT.8A R (Y)5"FLATE MTN FAN (X)5"STANDOFF 3/16 (X)5"FLANGE.BREAKER. BEARI (Y)5"SEAT.

LED (X)5"P.6 (Y)5"POWER SUPPLY 24 (X)POWER SUPPLY. CER TRIM (X)5"POT. CER TRIM (X)5"RING CENTERING (X)5"RELAY 5"REGULATOR (Y)5"RELAY 10ADC (X)5"RECTIFIER BRIDGE (Y)5"RELAY (X)5"REDUCER SPEED (X)5"RES.No 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 Item no 장비명 3106G-008 3106G-013 3106G-022 3106G-023 3106G-024 3106H-001 3106I-001 3106I-004 3106I-010 3106J-002 3106K-001 3106L-001 3106L-008 3106L-009 3106M-003 3106M-008 3106M-011 3106M-012 3106M-014 3106M-051 3106M-061 3106M-062 3106M-063 3106M-064 3106M-065 3106M-081 3106M-082 3106N-005 3106P-002 3106P-003 3106P-004 3106P-023 3106P-024 3106P-025 3106P-031 3106P-042 3106P-043 3106P-044 3106P-045 3106P-051 3106P-052 3106R-002 3106R-004 3106R-022 3106R-043 3106R-045 3106R-046 3106R-061 3106R-062 3106S-001 3106S-007 3106S-008 3106S-012 LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF DESCRIPTION DOOR GASKET KIT GASKET SOLID (Y)5"GUAGE (Y)5"GAUGE (Y)5"GAGE PRESSURE (X)5"HEATING JACK (Y)5"INDICATOR GREEN (Y)5"INDICATOR AMBER 125V (Y)5"INDICATOR RED 1 (X)5"4-PIN SAFETY JUMPER (X)5"KEY (X-AXIS) (X)5"DIODE. MOTOR (Y)5"MOTOR 3/4 HP 11 (X)5"INPUT MODULE (X)5"OUTPUT MODULE (Y)5"MOUNT MOTOR (Y)5"ASSY SOLID STAT (Y)5"DC MODULE INPUT (Y)5"DC MODULE OUTPU (Y)5"MODULE (Y)5"MODULE (Y)5"MONITOR (Y)5"ROTO METER (Y)5"MANIFOLD (X)5"NUT.250W 900764-001 904246-005 318045 318046 129302-001 124576-001 906540-001 906540-002 1492-2004 1492-2001 1491-4005 2900-0002 1491-2000 03-0060 904032-001 A10610-1825 320082 1492-2003B 1490-1002 903088-001 906559-001 LSS-39-24 LUS-10A-24 LST-39-133 906653-001 903259-006 903259-005 904528-003 K10P-11D15-6 906715-003 904279-001 903245-001 90262-006 906462-001 900674-004 903111-002 139541-001 900765-002 903528-002 수량 10 20 1 1 1 3 2 1 2 2 1 7 3 70 2 1 1 1 1 2 1 1 1 1 1 1 1 1 1 4 2 1 1 1 2 1 2 2 1 2 1 1 1 1 1 2 1 1 2 4 1 2 1 LOC VENDOR A14 A13 A14 A14 A14 AA20 A14 A94 A14 AA24 AA24 T13 AA24 L12 D12 P43 T13 T31 A94 A94 D12 D12 D12 D12 D12 D12 D12 AA24 A14 AA24 AA24 A93 A93 A14 A94 A14 A14 T13 A14 T13 T13 A93 C12 R56 W14 AA24 A14 T31 W14 W14 C22 A94 T13 THERMCO THERMCO " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " THERMCO " " " " " " " " " " " " " " . L-4-1-4 K-4-3-3 K-4-4-3 K-4-4-3 K-4-4-3 C-4-1-3 L-5-1-3 L-4-3-4 L-5-1-3 M-1-4-1 M-1-4-1 E-3-3-3 L-5-5-2 E-1-4 D-3-1-2 L-4-3-4 L-4-3-4 L-5-4-1 L-5-5-3 L-5-5-3 L-5-5-3 L-5-5-3 L-5-5-2 L-5-5-3 M-1-4-1 L-4-2-4 M-1-4-1 M-1-4-1 J-4-2-3 L-4-2-4 L-4-3-4 L-4-2-4 L-4-2-4 B-1-4-1 L-4-2-4 K-5-5-2 K-3-4-2 A-3-5 J-4-1-2 M-1-4-1 L-5-1-3 D-3-1-2 J-4-1-2 J-4-1-2 K-5-5-4 L-4-3-4 VENDOR PART NO HAS115-001 HGK001-005 905546-006 905546-005 2900-0001 102A-11126 900030-002 900030-006 90030-005 40052 145799-001 900141-001 12V T-3-1/4 220V. MAIL SUPRORT (Y)5"20-GROOVE TIMING PULLEY (X)5"CHAIN PIN (X)5"2-PIN SHORTING PLUG (Y)5"PANEL (Y)5"PANEL TOP 5"METER DIGITAL PANEL ASSY (Y)5"TOGGLE PAD 5"POWER SUPPLY 24V.B LAMP R (Y)5"HEATER COLLAR O (Y)5"STARTER.1/4W 55 3K (Y)5"LIMIT SWITCH (Y)5"SWITCHING POWER (Y)5"HEATER MOTORSTA (X)5"SWITCH PB MUSHROOM LOCATION M-3-3.TUBE (Y)5"SUPPLY POWER (X)5"POT.5.12V.

(X)5"TUBING POLYURET (Y)5"TRANSFORMER FB1 (Y)5"TRANSFORMER FB3 (Y)5"TEFLON PTFE TAP (X)5"TRAP MULTI-NW.No Item no 211 3106S-014 212 3106S-015 213 3106S-016 214 3106S-017 215 3106S-022 216 3106S-023 217 3106S-024 218 3106S-025 219 3106S-030 220 3106S-033 221 3106S-035 222 3106S-037 223 3106S-038 224 3106S-039 225 3106S-042 226 3106S-055 227 3106S-105 228 3106S-106 229 3106S-107 230 3106S-108 231 3106S-109 232 3106S-110 233 3106S-121 234 3106T-022 235 3106T-029 236 3106T-030 237 3106T-031 238 3106T-032 239 3106T-034 240 3106T-060 241 3106T-061 242 3106T-091 243 3106T-095 244 3106U-001 245 3106V-001 246 3106V-017 247 3106V-018 248 3106V-031 249 3106W-001 250 3106W-002 251 3106W-007 252 3106W-009 253 3107B-029 254 3107C-015 255 3107P-007 256 3107P-008 257 3107P-031 258 3107P-051 259 3107R-011 260 3107S-024 261 3107S-025 262 3108A-001 263 3108B-003 장비명 LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE DESCRIPTION (Y)5"SWITCH TOGGLE (X)5"SWITCH GUARD HINGED RED 5"SWITCH PB MUSH (X)5"SWITCH ROCKER (X)5"SWITCH DISCONNECT MAIN LI (Y)5"SWITCH POWER (X)5"SWITCH ADJ FLOW 10-400ML (X)5"ADAPTOR MICROSWITCH (X)5"DOOR SWITCH R (X)5"SWITCH GUARD (E.5TX25X30000L 906537-001 TRAP-HT2 903822-001 7383-2334 8002-0483 1405-0013 900040-009 07-432-310-1 147219-001 902273-003 4022264 AT-DC-102 4016347 4016348 80096 4016337 4016335 8607539 8609539 TERMINAL BLOCKS NTN SARI-12 수량 2 2 4 2 1 1 1 1 1 1 2 19 10 10 1 4 10 3 3 2 2 2 1 4 1 1 1 1 1 1 1 7 1 2 3 2 2 1 40 1 1 100 4 1 1 1 1 1 4 4 1 1 3 LOC VENDOR A94 AA24 AA24 T13 DD41 A94 T31 T31 AA24 AA24 AA24 A14 A94 A94 C14 W21 A93 AA24 AA24 AA24 AA24 AA24 D12 A93 AA24 AA24 AA24 AA24 AA24 W12 W12 B41 AA43 L11 D12 B43 B43 AA24 A14 AA24 AA24 AA24 A93 A34 V14 V71 A93 W21 W21 A93 A93 A21 A21 " " THERMCO " " " " " " " " " " " " " " " " " " " " " " " " " " " " THERMCO " " " THERMCO THERMCO " " " " " BTU BTU " " " " " " " KOYO " . (X)5"SUPPORT. 3(Y)5"VALVE TEF (Y)5"VALVE TEF 2-WA (X)5"VELCRO (Y)5"WIRE T/C COMP (X)5"WIRE H2 BURN-OFF COIL (X)5"ASSY WIRING (X)5"WASHER #6 (Y)ROHLIX BEARING TEMP CONTROLLER (Y)SERVO POWER SUPPLY (Y)AUXILLARY POWER (Y)END EFFECTOR PIN SET (Y)PULLEY SET (Y)ROLLER (SMALL) (Y)STACK OVERTEMP SENSOR (Y)TORCH STACK OVERTEMP SEN (Y)AMP UNIT TAKCNAKA (Y)SPHERICAL BEARING LOCATION L-4-3-4 M-1-4-1 M-1-4-1 F-4-5-2 L-4-3-4 D-3-1-2 M-1-4-1 M-1-4-1 M-1-4-1 M-1-4-1 L-4-3-4 L-4-3-4 L-6-4-1 D-3-3-2 K-5-5-2 M-1-4-1 M-1-4-1 M-1-4-1 M-1-4-1 L-5-5-2 I-4-2 M-1-4-1 M-1-4-1 M-1-4-1 M-1-4-1 M-1-4-1 N-2-5-1 N-2-5-1 J-6-2 H-7-2 E-2-4 L-5-5-3 N-2-1-4 M-7-2-1 M-1-4-1 M-1-4-1 M-1-4-1 M-1-4-1 L-6-2-2 M-5-3-3 K-5-5-2 D-3-3-2 D-3-3-2 K-5-5-2 K-5-5-2 J-1-2-1 J-1-2-1 VENDOR PART NO 904714-001 903599-001 903528-001 902439-001 900105-025 5104-1000 905264-004 129432-001 40FR1-3 9O5190-001 147724-001 141074-001 154123-001 154127-001 A28702010 134698-001 11-0459 03-0009 03-1700 03-0065 03-2505 03-2504 904104-003 7400-0001 7400-3814 7401-0125 7401-0200 7401-0500 5600-0016 5600-0030 0. (X)5"TUBING TEFLON.O.P.2) (X)5"LIMITCH ASSY UPPER Y-AXIS (Y)5"SWITCH ASSY (Y)5"BLACK MOUNTING (Y)5"SPRING WIRE OPT (X)THERMAL T/C SW (DRY PUMP) 5"OPTICAL SENSOR (C)5"3997S-452 SCR.50 5"MULTITRAP UNIT 5"SOLENOID VALVE. SHIELD-OUTER (X)5"SCAV SHIELD-INNER (Y)5"SHAFT-FLEXIBLE (Y)5"CLOSED EXHUOST TUBE (X)5"TUBING POLYURAT (X)5"TUBING POLYURAT (X)5"TUBING TEFLON. 8" (X)5"SPRING OUTER 3" (X)5"SPRING CO6PRESSION (X)5"SCAV. MALL.

KOYO (Y)O-RING (Y)POWER PACK (Y)ROUND PACKING (Y)SQUARE PACKING (Y)REGULATOR TESCOM (Y)BACK UP RING (Y)SUPER RING (Y)SUPER RING (Y)SUPER RING (Y)SUPER RING (Y)SUPER RING (Y)SUPER RING (Y)COMPRESSI6N SPRIN (Y)COMPRESSION SPRIN (Y)PRESSURE SWITCH (Y)DIGITAL FLOW SWIT (Y)PHOTO ELECTRIC SW (Y)LIMIT SWITCH (Y)HEAT RESISTING MICRO S/W (Y)FOAM SILICON 10X1 (Y)QUARTZ SHUTTER (Y)TAPER TUBE FOR FL (Y)TAPER TUBE FOR FL (Y)TAPER TUBE FOR FL (Y)SOLENOID VALVE (Y)SOLENOID VALVE (Y)TIMING BELT (Y)FIRERING BOARD (Y)S/W PRESS(1ATM. 0-1400C JS-32-11443-002 BARRIERTA 1S/V JS-36-1259 50XAT-1SNTP1/4" JS-37-431DET 2RJ4GB-A PS5913-AM KOYO AN02 P-15(V) MODEL F-070707F 403PK-170311 413PK-497410 44-2261-242-018 JS-36-803-002 JS-36-1047B-041 JS-36-1047B-061 JS-36-1047B-049 JS-36-1047B-058 JS-36-1178-001 JS-35-378 SANESU A12-02 SANESU A12-05 NIHON SEIKI BNDFS-1000 AC100V TAKENAKA PT02S TZ-1GV22 V-106-1A4T JS-36-1178-002 N2-50 SL/M N2-15 SL/M O2-15 SL/M SMC VZ4330-1GZTAIYO SP310-NNO 210 L075 RA8-8900-508 033-5243-A83 51103 6902 CYB 15H-250 SMC 93109-70001 214X340X195.No 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 Item no 장비명 3108B-013 3108B-014 3108B-015 3108B-016 3108B-032 3108B-101 3108C-001 3108C-005 3108C-061 3108C-062 3108G-001 3108G-002 3108G-062 3108G-081 3108J-001 3108M-001 3108M-002 3108M-003 3108N-002 3108O-001 3108P-001 3108P-023 3108P-024 3108R-031 3108R-051 3108R-052 3108R-053 3108R-055 3108R-056 3108R-057 3108R-059 3108S-001 3108S-002 3108S-031 3108S-032 3108S-033 3108S-037 3108S-039 3108S-101 3108S-103 3108T-021 3108T-022 3108T-023 3108V-001 3108V-002 3110B-001 3110B-023 3110B-025 3110B-051 3110B-052 3110C-051 3110F-001 3110H-002 FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF LPCVD/DIFF FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE DESCRIPTION BLOWER HDFC BOARD PCB AI/AO BOARD PCB PAI BOARD (C)ANGULAR BALL BEAR (Y)BOLT & SPRING LOC (Y)AUTO SWITCH CYLIN (Y)AIR CYLINDER(102-3) (Y)SPEED CONTROLLER (Y)EXCESS TEMP CONTR (Y)GAUGE PORT CAP GREASE (Y)GASKET FOR EXHAUS (Y)PRESSURE GAUGE (Y)QUARTZ TUBE JOINT (Y)REVERSIBLE MOTOR (Y)PULSE MOTOR DRI (Y)PULSE MOTOR MYCOM (Y)SLOTTED NUT.CM 수량 1 1 1 1 2 2 1 1 5 1 2 2 2 2 2 1 1 1 1 6 1 5 4 1 2 2 1 1 1 2 2 5 5 1 1 1 1 1 4 2 1 1 1 4 2 1 2 2 1 1 1 6 1 LOC VENDOR Y24 A22 A22 A22 A21 A21 A21 A21 A21 A22 A21 A21 A21 A21 A22 A22 A23 A22 A21 A21 A23 A101 A101 A101 A21 A21 A21 A21 A21 A21 A21 A21 A21 A21 A21 A21 A21 W13 A101 A22 A101 D31 D31 A21 A21 B74 W12 B53 A92 A92 R52 C22 B41 " " " " " " " KOYO " " " " " " " " " " " KOYO " " " " " " " " " " " " " " " " " " " " " " " " " ASM " " " " " " " .2P (Y)ROTATOR BEARING(1 (Y)ROTATOR BEARING(2 (Y)ROD-LESS CYLINDER (Y)BPSG TRAP FILTER (Y)WAFER HOLDER JIG LOCATION H-2-3 L-3-3-3 L-3-3-2 L-3-3-2 N-1-2-1 J-1-2-1 J-1-2-1 J-1-2-1 J-1-2-1 K-5-5-4 J-1-2-1 J-1-2-1 J-1-2-1 K-4-4-3 I-4-2 K-5-4-3 I-6-2 J-1-2-1 J-1-2-1 L-5-4-4 K-3-3-4 K-3-3-4 K-3-3-4 J-1-2-1 J-1-2-1 J-1-2-1 J-1-2-1 J-1-2-1 J-1-2-1 J-1-2-1 N-4-4-3 A-1-4 I-3-1 K-10-2-3 K-10-2-3 J-1-2-1 J-1-2-1 N-2-5-1 K-5-4-3 K-5-5-2 K-5-5-2 B-4-2-3 J-6-2 VENDOR PART NO VFC-506A HMSU2328A011 HMSU2481A02 HMSU2480A01 #7002 JS-32-13418 CMK2-00-20-200SD16N50 SMC AS2110F-01 TYPE R.

O.LIGHTED LOCATION H-1-2 L-5-4-1 N-2-5-1 J-2-3-1.BUGLE (Y)FLAG.GAS OPTION (Y)BREAKER.ANALOG OUTP (Y)BOARD.OXIDE.DIGITAL INP (Y)BOARD.CIRCUIT ( (X)40 MB CARTRIDGE FLAG.SENSOR (INT (Y)BOARD.COMMUNICATION (Y)CRT INTERFACE BD (Y)DISPLAY PANEL BD KEYBOARD.DIGITAL OUT (Y)CONTROL INTERFACE BOARD.7000.PRESSURE(0(Y)GAUGE.LED (MCV-EV (Y)HRNS SOLENOID GAS (Y)HRNS SOLENOID GAS (Y)BOARD.PROCESSOR (Y)BOARD.ANALOG INDU (Y)BOARD.C.No 317 318 319 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 Item no 장비명 3110M-002 3110R-002 3110S-001 3112A-007 3112A-022 3112B-003 3112B-006 3112B-042 3112C-011 3112C-012 3112C-034 3112C-041 3112G-001 3112G-002 3112G-003 3112K-001 3112K-002 3112O-010 3112O-018 3112R-002 3112S-005 3112S-006 3112S-007 3112S-008 3112S-009 3112S-010 3112S-011 3112V-007 3113B-001 3113B-002 3113B-003 3113B-005 3113B-006 3113B-007 3113B-009 3113B-010 3113B-011 3113B-012 3113B-013 3113B-014 3113B-015 3113B-015 3113B-019 3113B-022 3113B-023 3113B-051 3113F-002 3113F-033 3113F-052 3113F-053 3113G-001 3113G-002 3113I-001 FURNACE FURNACE FURNACE BPSG BPSG BPSG BPSG BPSG BPSG BPSG BPSG BPSG BPSG BPSG BPSG BPSG BPSG BPSG BPSG BPSG BPSG BPSG BPSG BPSG BPSG BPSG BPSG BPSG FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE DESCRIPTION (Y)MOTOR Z-AXIS ASSY (Y)SCR (Y)LIMIT SWITCH (X) LOWER HEATER ASS'Y WITH E (X) CONTACTOR 2 POLE 75 AMP SCR INTERCONNECT (X) PROCESS CONTROL BOARD CARVBON BRUSH FO CLAMP PUMP LINE CLAMPS PUMP INTA INVERTED CRUCIBL CONTROLLER (X) GASKETS PUMP INTAKE LINE GASKETS ISO TO GASKETS TRAP TO (X) SYSTEM PANEL KEY SYSTEM MODE KEY O-RING UPPER SEAL 5" ROTOR STOP POST (X) SWITCH N.THETA HOME (X)FITTING.C. 706355-001 (X) LIMIT S/W MAG 706330-001 LIMIT S/W REED (X) SOLENOID VALVE (Y)BOARD.PRESSURE(0(Y)INDICATOR. I-7-1 J-2-3-1 G-2-3-4 J-2-3-1 J-2-3-1 J-2-3-1 J-2-3-1 J-2-3-1 G-2-3-3 G-2-3-3 J-2-3-1 G-2-3-3 G-2-3-3 J-2-3-1 J-2-3-1 G-2-3-3 J-2-3-1 J-2-3-1 J-2-3-1 G-2-3-3 J-2-3-1 J-4-3-2 J-4-3-2 D-3-3-1 J-4-3-2 D-8-1 J-4-3-2 J-4-3-2 J-4-3-2 D-8-2-2 E-3-2-4 D-8-2-2 D-8-2-2 D-8-2-2 D-8-2-2 D-8-2-2 VENDOR PART NO MP-0003 PDT1008 Z-15 GW2-B 070036-001 701020-001 400050-001 734708-001 773016-001 773020-001 950010-001 773060-001 773063-001 773065-001 793828-001 749011 781019-001 781012-001 10503-01 706293-001 706292-001 706286-001 706285-001 706335-001 706330-001 706340-001 791025-001 600043-01 600050-04 600051-01 600053-01 600054-01 600055-01 600057-01 600058-01 600061-01 600062-02 600064-01 600069-01 600143-08 600143-08 600334-01 600404-01 600702-02 700547-001 705835-006 101362-01 101573-01 104543-01 209-068 209-075 100981-01 수량 1 2 4 3 2 1 3 10 1 1 1 3 4 10 5 1 2 5 3 5 2 2 4 2 4 2 1 2 1 2 2 2 1 1 2 1 1 1 2 1 1 1 2 2 1 1 1 4 2 3 1 1 2 LOC VENDOR W12 D13 W12 AA11.FLAME DETEC (Y)BOARD. 706293-001 (X) SWITCH N.VOLTAGE REG (Y)BOARD.MCV-EV (Y)BOARD.AA14 AA13 AA11 AA13 AA11 AA11 AA11 AA44 AA11 AA11 AA11 AA11 AA11 AA11 AA11 AA11 AA11 AA11 AA11 AA11 AA11 AA11 AA11 AA11 AA11 W11 V31 V31 V31 V25 V25 V31 V31 V25 V31 V21 V25 A92 A92 V31 V25 V25 A92 AA23 A92 AA23 A92 A92 A92 A92 " " " ANICON " ANICON " ANICON ANICON ANICON ANICON ANICON " ANICON ANICON " ANICON ANICON ANICON ANICON " " ANICON ANICON " " ANICON " THERMCO " " " " " " " " " " " " " " " " " " " " " " " " . 7062 SWITCH N.O. 7062 (X) LIMIT S/W MAG.1 (Y)GAUGE. 706292-001 SWITCH N.

DUAL (Y)VALVE . I-7-2 E-3-1 J-4-1-2 D-8-2-2 D-8-2-2 J-4-1-2 J-4-1-2 J-4-1-2 J-4-1-2 J-4-1-2 E-3-2-4 E-3-2-4 K-3-4-2 K-3-4-2 J-4-1-2 J-4-3-4 J-4-3-4 J-4-2-2 J-4-3-4 J-4-3-4 D-3-2-2 N-6-1-2 N-4-3-2 N-1-4-2 L-12-7 B-3-3-3 L-6-5-3 N-4-3-2 L-6-5-3 L-6-5-3 L-6-5-3 L-6-5-3 L-6-5-3 VENDOR PART NO 101490-01 100768-01 10975-01 100-016 100168-1 100169-01 100177-01 100178-01 600257-01 600275-01 600276-01 100592-01 600131-02S 100967-01 101500-01 701545-001 100566-01 209-019 600290-01 100982-01 701899-001 703044-001 703045-001 700169-001 101411-01 101412-01 700154-001 700218-001 700237-001 90-105480A41 90-105480A43 90-105480A49 03-111827D01 90-105480A46 90-105480A46 1302053 1302101 03-110887D01 64-115413A06 60-106554D01 02-110553D01 63-112063A01 68-106216A06 16-110086B04 16-110086B04 03-109964D01 4100 100-015 100-015 700-015 100-013 60-106206A57 16-104124B01 수량 1 2 4 2 1 1 2 1 2 1 3 2 2 1 1 4 1 1 1 2 3 2 2 2 1 1 1 1 2 1 3 2 1 2 1 1 1 3 1 4 1 1 2 19 10 1 7 12 150 7 8 1 4 LOC VENDOR DD10 C41 V12 A92 L31 A92 P55 P52 P55 P15 P52 L23 L21 W11 W11 V12 A92 A92 W11 V12 V12 V12 W11 V12 AA23 AA23 C81 C81 V12 T52 T52 W13 V23 W13.CRT POWER SUPPLY(DC) RELAY.SE (Y)SWITCH.LINEAR 200R (Y)MOTOR.PUSHBUTTON (Y)SURGE SUPPRESSOR (X)SPIKE.INTER PCB (Y)ASSY PCVB AUX MEM (Y)ASSY PCVB AUX MEM (X)SUPPORT PCB (Y)PET LOGIC BOARD A (X)PCB ASSY RPS PROCESSOR (Y)PCB DISPLAY (Y)BOAT CONTACTOR (1 BOAT 125MM COMP ASS (Y)COLD JUNCTION (Y)LATCH CLAMP(DOOR) (Y)TIE ROD CERAMIC (Y)TIE ROD CERAMIC (Y)CONTROLLER CVE (Y)CERAMIC AXCL (Y)CERAMIC SPACER (Y)CERAMIC SPACER (Y)CERAMIC SPACER(0.T52 W13 W13 W13 F82 W12 E74 Z19 F35 E76 H56 H56 W12 H56 H56 H56 H56 H56 E92 R62 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " ASM " " " ASM " " " " " " " " " " " " " " " " " " " .1.10 AMP (24 (Y)REGULATOR.35/25 (Y)LAMP.BEU MOTOR MOTOR.No 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 Item no 장비명 3113I-002 3113L-001 3113L-002 3113L-003 3113L-021 3113L-022 3113M-001 3113M-002 3113M-003 3113M-004 3113M-005 3113M-031 3113P-002 3113R-001 3113R-003 3113R-008 3113R-031 3113R-032 3113R-051 3113S-002 3113S-009 3113S-012 3113S-013 3113S-041 3113T-001 3113T-002 3113V-009 3113V-010 3113V-011 3121B-002 3121B-003 3121B-007 3121B-013 3121B-015 3121B-015 3121B-018 3121B-024 3121B-041 3121B-044 3121B-062 3121B-070 3121B-103 3121C-035 3121C-037 3121C-037 3121C-042 3121C-045 3121C-046 3121C-046 3121C-057 3121C-060 3121D-004 3121D-005 FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD DESCRIPTION (X)INJECTOR.LIGHTED (1 (Y)SWITCH.PUSHBUTTON (Y)SWITCH.FLUORESCENT 60 H2 (Y)LAMP.30V.SING (X)SPIKE.STEPPING MOTOR.NEON (Y)SLIDE.LINEAR 760 (Y)SLIDE.SUB/MIN.THETA AXIS MONITOR. (Y)CERAMIC WHEEL(NEW (Y)O-RING PRX TUBE D (Y)BELLOWS TUBE DOOR(BARATRON) LOCATION J-4-1-2 F-4-1 D-8-2-2 G-2-5-4 H-3-2.TEF (Y)VALVE.TIME DELAY (10 (Y)RELAY.2W NC.W/GAUGE (Y)REGULATOR-VACUUM (Y)POWER RESISTOR ASSY (Y)SWITCH.STEPPING (Y)ASSY.POWER (90 A (Y)RELAY.WAFER TRANSFER (Y)MOTOR.2W (Y)LAMP.3-WAY TEFLO (Y)VALVE (3-WAY POP) (Y)ASSY PCB DIG I/O (Y)ASSY PCB D/A (Y)ASSY PCB DC POWER (Y)ASSY GEN.

DC(0.(DO SPIKE T/C ASS'Y (Y)3-JUNCTION T/C (Y)SPIKE T/C (Y)CALIBRATION T/C (Y)R. L-11-4-3 42-106201A43 L-11-4-3 42-106201A30 N-6-1-2 HB24-1. N-8-3-1 K-TYPE 63-106758A18 N-6-1-2 TG 2SC 60 L-6-5-3 16-108824B01 N-8-3-1 802-6112-2-0 16-110129B01 N-6-1-2.5A) (Y)POWER SUPPLY(XP45-12W/OVP) (Y)POWER SUPPLY +24V (Y)IC-MC6803L-1 (Y)PUMP RESET ASS'Y (Y)ALARM SILENCE S/W(OPER PANE (Y)FLOW S/W(125-B RED WIRE) (Y)PUSH BUTTON S/W (Y)PUSH BUTTON S/W(O (Y)PRESSURE S/W(ATM (Y)TUBE DOOR CYL.TRIACGE S (Y)ASSY-RF FEED THRU (Y)TEFLON ELECTRIC S ISOLATOR V/V ASS'Y (Y)SEAL KIT ISOLATIO (Y)WHEEL CERAMIC (Y)CONTACT-125MM WAF (Y)CONTACT-125MM WAF (Y)INCO WASHER (. (X)MOTOR(1321-1078-G288X) (Y)G MONITOR (Y)MUFFLER AIA (Y)DISPLAY MODULE (X)NUT CERAMIC(OLD BOAT) (Y)O-RING WINDOW (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)0-RING TUBE DOOR (Y)POWER SUPPLY-48V (Y)POWER SUPPLY-48V. H-5-2 VC-1203A H-4-2.016 (Y)H2O2 MEASURING BATH (Y)QTZ F/R (1) BATH 5"ROBOT TENSION BOLT (L)5"N2 BUBBLER QUARTZ BOTTLE (Y)COUNTER UNIT (Y)CHLOFOSILANES (X)COOLTRON CONTRO COOLTRON (Y)ROBOT DRIVER (Y)ROBOT DRIVER LOCATION VENDOR PART NO 48-106661A38 69-106285A07 40-106215A02 100-010 1531-1078-G288X I-8-3 45-107147A03 M-7-1-1 48-109910A01 N-4-3-2 03-110107D01 L-6-5-3 16-1410263801 60-106206A10 60-106206A15 60-106206A12 60-106206A55 60-106206A55 60-106206A58 60-106206A48 N-8-3-1.2A J-4-2-2 36-105211A84 N-2-1-2 44-106648A02 N-6-1-2 60-105224A02 N-6-1-2 60-105243A44 N-6-1-2 33-105243A02 N-6-1-2 33-105243A04 N-6-1-2 33-105243A84 N-8-3-1 50-106742A03 N-3-1-1 50-106742A02 N-6-1-2 K-TYPE-TC 63-106758A10 N-6-1-2.F GEN. N-8-3-1 50-110109A03 L-6-5-3 16-1074180B01 B-3-3-3 16-110619C01 B-3-3-3 16-110619C02 B-3-3-4 125-WSH F-2-2 C9028518 C9028809 K-4-5-2 TB-01 I-3-3 M-001 I-4-2 421-31-XXXX K-4-2-3 KCY-2D-G D-11-3 500MIL NAOCHEM H-4-3.(LA (Y)TUBE DOOR CYL.BB41 L51 D14 D14 " " " " " ASM " " " " " " " " " " ASM ASM " " " " " " ASM " " " " " " " " " " " " " " " " " MUSASHI MUSASHI " " " " " " " " " . L-11-4-3 42-106201A43 N-8-3-1.No Item no 578 3121F-015 579 3121F-031 580 3121F-039 581 3121G-034 582 3121M-002 583 3121M-007 584 3121M-033 585 3121M-034 586 3121N-003 587 3121O-001 588 3121O-002 589 3121O-007 590 3121O-008 591 3121O-008 592 3121O-009 593 3121O-014 594 3121P-001 595 3121P-001 596 3121P-003 597 3121P-004 598 3121P-011 599 3121R-035 600 3121S-003 601 3121S-004 602 3121S-007 603 3121S-008 604 3121S-013 605 3121S-105 606 3121S-106 607 3121T-001 608 3121T-002 609 3121T-003 610 3121T-005 611 3121T-006 612 3121T-031 613 3121V-028 614 3121V-029 615 3121V-036 616 3121W-001 617 3121W-002 618 3121W-003 619 3121W-004 711 3141B-009 712 3141B-011 713 3141B-022 714 3141B-023 715 3141B-105 716 3141C-005 717 3141C-007 718 3141C-016 719 3141C-017 720 3141D-011 721 3141D-011 장비명 PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD PECVD WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION DESCRIPTION (Y)FILTER ALUMINA MO (Y)CAM-FOLLOW (Y)FAN(SATC) (Y)GRAHPITE AXLE (4. H-7-2 VC-663 L-5-2-4 RD-122 L-5-2-4 RD-122 N-6-1-2 D-3-3-2 M-7-1-1 수량 1 4 1 70 1 1 2 1 8 5 17 3 8 13 11 9 1 1 2 1 1 1 1 4 3 3 5 1 1 2 4 5 2 3 4 9 1 3 20 8 8 52 1 1 24 1 2 5 1 3 3 1 1 LOC VENDOR F82 F82 W21 F82 AA11 F111 F82 W12 H56 E92 E92 E92 E92 E92 E92 E92 F82 T52 T52 F82 V23 F35 F82 F82 F82 F82 F82 F82 F82 F82 Z19 F82 Z19 F82 H55 F82 F35 F82 H56 E76 E76 E76 Z19 Y11 A102 B102 B106 C23 B24 L62.

Z16 " A26 " C23 " A25 " A24 " A24 " A25 " A24 " A24 " A25 " A25 " A25 " A25 " A24 " A24 " A24 MUSASH Y11 ALPA-SCIENCE Z18 (ALPA-SCIENCE B25 ALPHA W24 " A25 " A26 ALPA-SCIENCE T31 DNS R52. F-1-2 L-6-1-2 K-4-2-3 B-2-1 B-2-1 L-5-1-2 K-3-2-2 K-3-2-2 K-4-5-3 K-4-2-3 L-5-1-2 J-5-4 K-3-2-2 K-3-2-2 L-5-5-3 I-4-3 I-4-3 G-1-3 M-5-1-3 L-5-1-2 L-5-2-2.ASD-M 4KA110 AV6280-414A PB-1 MB10Z-B3(100V) MB10Z-B3 AMD31-12U-10 SC-002A 100V N-1-3-2. H-5-2. N-4-1-1 20-180S-X105 T5-10-50 B-4-2-3 7-39-20337 M-6-4-1 6002 ZZ M-6-4-1.B25 " B74 " B54 " B25 " B25 " B25 " B85 " B25 " B74 " B74 " B54 " C84 " . D-3-3-2 6004 ZZ M-6-4-1 7-39-24428 I-4-2 M-6-4-1 7-39-15205 260J-5 220J-5 B-4-2-3 7-F3-22332 K-4-1-3 7-F3-22326 수량 1 7 1 4 2 1 1 19 2 1 1 2 2 3 2 2 1 1 5 2 2 1 2 2 2 4 1 1 1 1 1 2 1 1 1 1 1 2 3 5 2 2 4 2 8 10 4 1 2 1 3 6 3 LOC VENDOR C23 " A24 " Z19 " C23 " P14 " C23 " A26 " Y25 " A24 " L54 " A24 " A23 " A23 " A23 " B91 " A23 " B103 " A23 " L53.ASUM AV-350-114.I-4-2 I-4-1 I-3-2 H-3-2. I-3-2 I-4-1 M-2-4 I-2-2 J-5-4. L-6-4-2 VENDOR PART NO RD-153 ZGB2203-OUT 208/2000 (S) 100V 650W 2RK6GN-A SBR31-ZP SW562-A47 P-400-U 3-C9028801-N PE-80HA 3-C9028804 3-C9028802 3-C9028801 5X240X365 P-03A VC-663A MP10008-1 H5CN-YCN DC24V H5CN-YBN AV-6270-114 850-1146-1 AV8290-414-DIA4 AV 250-114A AV6280-114.No 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 Item no 장비명 3141D-012 3141F-061 3141H-007 3141L-002 3141M-001 3141M-005 3141M-028 3141M-041 3141P-001 3141P-007 3141P-012 3141P-017 3141P-018 3141P-019 3141P-022 3141P-023 3141P-025 3141P-028 3141P-041 3141R-016 3141S-044 3141T-003 3141T-009 3141T-010 3141V-002 3141V-004 3141V-017 3141V-018 3141V-023 3141V-024 3141V-025 3141V-030 3141V-033 3141V-043 3142B-001 3142B-001 3142F-031 3142F-041 3142H-011 3142V-003 3143A-002 3143A-003 3143B-001 3143B-021 3143B-022 3143B-023 3143B-024 3143B-027 3143B-051 3143B-072 3143B-073 3143B-077 3143B-078 WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION DESCRIPTION ROBOT DRIVER (Y)NOISE FILTER (Y)IR HEATER QTZ (Y)UV LAMP (Y)MOTOR/HEAD (Y)MOTOR CONTROLLER (Y)5"RESISTIVITY CON (Y)5"FLOW METER (R)5"H2SO4 BATH PLAT (C)BELLOWS PUMP(PILLAR) (Y)5"DIW QDR PLATE (Y)FINE SONIC CARRIE (L)5"QDR CARRIER PLA (Y)5"H2SO4 CARRIER P (Y)5"MEGASONIC SUPPO (Y)5"MEGASONIC PLATE (Y)NH40H QUARTZ PLAT (Y)Q'TZ DIW BATH PLA (Y)5"POWER SUPPLY (Y)ROBOT ARM (Y)SIT THF-51T (Y)5"TRANSFORMER 5"TIMER (AC100-240V) 5"TIMER (AC100-240V) (Y)5"AIR VALVE (DI S (Y)5"3-WAY VALVE (Y)5"VALVE 5"QDR DRAIN VALVE 5"AIR VALVE (Y)AIR VALVE (Y)TREE WAY AIR VALVE (Y)5"SOLENOID VALVE 5"FINAL BATH DRAIN V 5"AIR SELECTOR VALVE (Y)QUARTZ BATH(F/R) (Y)QUARTZ BATH(F/R) (Y)ORIX AC FAN MOTOR (Y)ORIX AC FAN (Y)WELDING M/C HEATE (Y)AIR OPERATED VALV (Y)TEMPERATURE ADJUS (Y)ROTARY ACTUATOR TIMING BELT(LOADER) (Y)RULON BALL BEARIN (C) BALL BEARING (C) BALL BEARING (Y)ANGLAR BALL BEARI (Y)Q'TZ PLATE (Y)INEAR BUSHING RIB STAR BELT U (Y)RIB STAR BELT U CHUCK SENSOR BELLOWS SEAL BELT(1) WSH-066 LOCATION K-4-2-3 K-3-2-2 K-4-2-3 M-2-4 A-2-4 I-2-1 I-4-2 I-2-3.

L-5-5-2 I-2-3 N-1-3-2 L-5-2-4 L-4-2-3 L-5-2-4 L-5-2-4. L-5-5-2 L-5-2-4 L-5-2-4 I-4-2 L-4-2-3 L-4-2-3 L-4-2-3 L-4-2-3 B-4-2-3 N-1-3-2 I-2-3 I-1-2 I-2-2 I-2-1 I-3-1 I-3-2 I-4-2 I-2-3 L-4-2-3 L-4-2-3 L-4-2-3 B-4-2-3 D-1-1 B-4-2-3 L-4-2-3 L-4-2-3 L-5-5-3 L-5-3-4.B25 A102 D14 B81 B25 D14 T31 W15 A15 D14 D14 D14 D14 A23 A15 A15 A15 A15 W15 B54.D.R SNOK (Y)DAN CHEMICAL TUBE (Y)F/R SUPPLY TUBE (Y)QTZ BATH TANK (Y)DIW SUPPLY VLAVE (PVC-M) 1 (Y)IPA DRIAN VLAVE (Y)SOLENOID VALVE(DC-24V) (Y)QUICK VALVE QDR (X)AIR OPERATION VALVE D: (Y)QUICK DRAIN VALVE (Y)COOL DI SUPPLY VALVE (Y)AIR OPERATED VALVE 5"3150 PROCESS CONTR (Y)5"ELECTROIC CONTROLLER 5"3151 TEMP CONTR (X)1100B QDR CONTROLLER (Y)5"DIODE IN4005 (Y)5"TEFLON DIAPHRAM LOCATION K-4-1-3 M-6-4-1 F-3-3 I-3-3 I-8-2 L-5-5-2 B-4-2-3.W15 B25 B92 B82 B81 B82 B102 B92 A102 B84 AA40 A15 A15 A15 B54 AA41 B54 A15 A15 D11 D11 D11 D11 T21 D11 A21 " " MAS MAS " " " " " " " " MAS " " " " " " " " MAS " " " " " " " " " " " " " " " " " " " " " " " " SCP SCP " " " " " . (Y)HCL CARRIER (Y)12V RELAY (5 PIN) (Y)12V RELAY (14 PIN) (Y)12V RELAY (8 PIN) (Y)TIMER RELAY (120V) (Y)PUSH SWITCH D (Y)PUSH SWITCH D (Y)TOGGLE SWITCH D (Y)SNOK(QDR) D: (Y)SNOK(F/R) D: (Y)SNOKE (Y)H2SO4 SNOK (Y)F/R SNOK (Y)Q. D-2-3-2 K-4-5-2 L-5-2-4. L-5-5-3 D-8-2-3 L-5-5-1 H-9-2 VENDOR PART NO 7-F3-22327 SS004ZZ 1/4 PIPE 480H100 KCY-2D-G AS2200-01 1/8 NJJRPO 20PP NRC110-10AAA NRC110-5AAA NRC110-20AAA NRC110-30AAA KUP5D15 CHB-38-70001 AVS 310-NR AVS 310-NR M-2011 EW9030704 EW9030763 EW9029727 EW9030723 EW9030753 EW9029705 220X42X170 EW9030754 7484SW AV-6280-414 AV-7270-114 AV-3242-415 AMD32-16-12 EW9027717 AV-5260-431 ACD-012NC 688-376-4A 583-005-1A 3151 1100B IN4005 수량 3 5 1 2 2 5 1 2 29 2 26 1 2 6 11 4 3 2 2 1 1 1 1 1 3 1 2 4 20 1 1 3 1 1 1 2 2 1 2 1 1 2 1 2 2 2 1 2 1 1 4 1 8 LOC VENDOR C84 B25 DD34 B102 B76 B25 Y23 D14 R52.No 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 Item no 장비명 3143B-079 3143B-080 3144B-003 3144B-031 3144B-034 3144C-003 3144C-034 3144C-100 3144C-116 3144E-001 3144G-001 3144G-021 3144H-004 3144N-002 3144O-032 3144P-001 3144P-005 3144P-007 3144P-009 3144P-010 3144P-011 3144P-051 3144R-001 3144R-002 3144R-003 3144R-005 3144S-037 3144S-037 3144S-038 3144S-072 3144S-073 3144S-074 3144S-075 3144S-076 3144S-077 3144T-013 3144T-015 3144T-065 3144V-001 3144V-007 3144V-009 3144V-013 3144V-021 3144V-029 3144V-031 3144V-032 3145C-002 3145C-004 3145C-007 3145C-010 3145D-003 3145D-004 3145E-031 WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION DESCRIPTION SEAL BELT(2) WSH-007 (Y)S/D CRADLE BEARIN (Y)BOE & FH BATH Q'TZ BUBBLER (X)TIMING BELT D: (X)HEATER COIL(R-10) (L) (Y)GRENT CONTROLER (Y)COUNTER D (Y)SPEED CONTROLLER (Y)HEATING ELEMENT 1 (Y)LOW PRESSURE GAUGE 14 PSI (Y)QTZ GUIDE D (Y)GRANT HEATER (Y)SHOWER NOZZLE D (X)CLOCK OSCILATOR 1011 (X)DVC PIPE (Y)ONRON RELAY PLATE (Y)CIRCUIT PROTECTOR (Y)CIRCUIT PROTACTOR (Y)CIRCUIT PROTECTER (Y)POWER SUPPLY(10A.

Y22 A93 A53 A53 A53 A53 W21 Z19 Y11 A95 A53 A55 Y11 " " " " " " " " " " " SCP " " " " " " " " " " " " " " " " " " " " " SCP SCP " " " " " " " SUGAI " " " " " SUGAI " " " SUGAI .FUSE 20 5"HEATER F/M MODULE (Y)5"POWBR PILOT LAM (Y)5"MUFFLER 1/8" (Y)5"O-RING 3/8 (Y)5"O-RING 1/2 (Y)5"ORIFICE NEW PAR (Y)5"WATER INLET PIN (X)MARCH PUMPTE-5.No Item no 828 3145F-006 829 3145H-009 830 3145H-010 831 3145L-001 832 3145M-004 833 3145O-005 834 3145O-006 835 3145O-031 836 3145P-001 837 3145P-022 838 3145P-026 839 3145P-027 840 3145P-031 841 3145P-032 842 3145P-033 843 3145P-035 844 3145P-036 845 3145P-037 846 3145P-038 847 3145P-039 848 3145P-052 849 3145R-001 850 3145R-101 851 3145S-001 852 3145S-003 853 3145S-006 854 3145S-021 855 3145S-053 856 3145T-003 857 3145T-004 858 3145T-023 859 3145T-084 860 3145T-085 861 3145T-086 862 3145V-001 863 3145V-003 864 3145V-011 865 3145V-012 866 3145V-013 867 3145V-014 868 3145V-021 869 3145W-001 870 3146A-004 871 3146A-005 872 3146B-011 873 3146B-015 874 3146B-023 875 3146B-032 876 3146B-035 877 3146B-044 878 3146B-049 879 3146B-051 880 3146B-066 장비명 WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION DESCRIPTION (Y)5"600V AC. PANEL (Y)5"PANEL (Y)5"SCP W/S PLATE (Y)5"110C FRONT PANN (Y)5"FINAL BATH PLAT (Y)5"PFA QDR PLATE 5"POWER SUPPLY(DC LO (Y)5"RELAY (Y)5"REDUCTION 1/4-5 (Y)5"AIR TOGGLE S/W (Y)5"TEM SENSOR S/W (Y)5"OPERATION SWITCH ALT 5"LIGUID LEVEL SENSO (Y)5"AIR OPERATED VA (X)UNION TEE (X)MALE BRANCH TEE (Y)5"AUTONICS TIMER (Y)5"TOOL 1/4" (Y)5"TOOL 3/8" (Y)5" TOOL 1/2" (Y)5"HIC SOLEOID VAL (Y)5"1/8 AIR PILOT V 5"24V DC SOLENOID VA (Y)5"SOLENOID VALVE 5"CHECK VALVE 1/4" (Y)5"CHECK VALVE 1/8 (Y)5"DRAIN PFA V/V (Y)5"10ID STANLESS W (Y)ASPIRATOR (Y)ASPIRATOR (Y)PVC BOLT(M8) ROBOT BEARING (1)ROBOT UP/DOWN BEA (Y)HCL BOIL BATH (OL (R)Q'TZ BATH (FINAL (X)RING BALL (Y)S/D MOTOR BELT SM BELT H2S04 BATH LOCATION D-8-2-3 H-7-1 C-2-1 K-5-5-4 K-5-5-4 K-5-5-4 L-5-5-1 I-3-3 M-1-FRONT D-2-3-2.5C-MD ASS'Y (Y)5"DIAPHRAGM PUMP (Y)5"PUMP (Y)5"CONTROLLER TOUC (Y)5"FLUSH PANEL (Y)5"FLUSH. D-3-3-2 L-5-5-1. D-2-3-3 L-5-5-1 L-5-3-4 L-5-5-1 L-5-2-3 VENDOR PART NO JJS-45 725988 513-001-1A KM-11 6 OR 8 OR 14001-009 653-001-4B 151-027-01 DP-25F GM-24 636-009-1A 636-006-1A 636-004-1A 5060091B-1100 L-5-4-1 I-1-3 L-5-5-1 N-2-1-2 L-5-3-3 L-5-3-3 I-8-1 L-5-5-1 K-5-1-4 F-1-3 L-5-4-1 K-5-5-4 L-5-5-1 K-5-5-4 L-5-3-3 L-5-4-1 K-5-5-4 L-5-3-3 L-5-5-1. H-7-2 M-7-2-3 M-7-2-3 L-4-1-3 L-4-1-3 D-3-3-2 001-284-01 684-011-1AS 709-007-1A USD 1/4-5/32 891-001-A 789-010-1A A3PJ-90D12 24EG 789-002-10 TKU-3/4 THB-3/4-6N FX5S-I T-8 T-10 T-12 814-004-1A 973-016-2A 180E1-21-DC24V 814-003-1A CVU-6 CVU-4 WB-2W8P 150-05-10 1/2-1/2 3/8-3/8 JMC CF-8 6001ZZ Q'TZ-BATH-HCL L-5-2-3 AUTO ARM L-7-5 NS-82UO/2 SGI O-1319 수량 8 2 3 50 20 25 8 5 2 1 1 2 8 12 5 5 4 2 1 7 1 3 15 7 1 70 3 16 116 167 1 1 1 1 1 8 5 7 32 36 50 14 4 2 50 7 10 1 1 1 8 4 1 LOC VENDOR D11 L14 Z19 D11 A32 A32 A32 D11 D11 B85 Y16 D11 D11 D12 D11 A95 B91 D11 B91 Y22 T21 D11 W15 D11 D11 Y16 D11 D11 L43 L43 D11 A32 D11 A32 D11 D11 A32 D11 D11 D11 Y15. D-3-3-2 H-2-3.

500.No 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916 917 918 919 920 921 922 923 924 925 926 927 928 929 930 931 932 933 Item no 장비명 3146C-003 3146C-004 3146C-005 3146C-013 3146C-014 3146C-015 3146C-017 3146C-018 3146C-019 3146C-021 3146C-022 3146C-040 3146C-054 3146C-063 3146C-064 3146C-075 3146C-104 3146C-105 3146C-106 3146C-108 3146C-111 3146C-112 3146D-060 3146F-011 3146F-013 3146F-039 3146F-045 3146F-046 3146F-999 3146G-001 3146G-004 3146H-001 3146H-010 3146H-021 3146H-022 3146H-023 3146H-029 3146H-031 3146I-001 3146K-002 3146L-003 3146L-010 3146M-009 3146M-010 3146M-013 3146M-015 3146M-085 3146O-005 3146P-001 3146P-002 3146P-011 3146P-016 3146P-021 WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION DESCRIPTION TEMP CONTROLLER (Y)MOTOR SPEED CONTR (Y)2.50 H-10-2 O-1530 I-7-2 K-3-1-2 K-3-1-2 I-7-3 I-7-3 K-3-1-2 H-4-3 K-11-6-1 L-6-3 L-5-2-3 L-2-2-3 B-2-2 H-1-1 F-2-3 K-11-6-1 I-2-3 E-1-2 I-3-3 PT 06M(1) OZAK GH-25UU 3-KW H-2-13 H-2-14 H-2-15 AC200V6KW E-220B-1 MD-55FY PFA-M 400W R88M-S10030 R88M-H20030-BS3 R88D-HT04 R88MH10030G10B PTFE + CARBON WH25/TF180/H66 SBR31-ZP 0-1318 MD-55FX 0-1319 수량 1 3 3 1 2 3 2 1 2 1 3 2 2 1 2 1 2 1 4 3 2 1 2 1 1 1 4 2 1 1 1 3 1 1 1 1 1 3 1 2 5 20 1 2 1 2 1 8 1 1 2 1 3 LOC VENDOR A51 D21 A53 B84 A45 B92 A53 A51 A53 A52 A53 A53 B32 D22 D22 A53 D22 L63 L62 R14 D24 B71 A52 Y22 Y22 Y22 B53 Y24 Y21 Y13 A53 A53 B82 X53 X53 X53 A54 L32 D22 D21 A95 D22 A54 A54 A53 R11 A52 B74 L13 D22 A44 AA25 B85 " " " " " " " " " " " " " " " " " SUGAI " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " SUGAI " .80 500. REX-F4FDRV2N AC-1 DB1150-000 JDAS 50X30 RU230301 ZW-160CU ZW-32NS4 R88A-CAH010S CVA-10HS100B DR-631-A(208V) O-1529 R88ACPH OR 5NS ORCA 25X420 SCY-CN201 3F88DHS04 500.500.3 ARM CHUCK (X)H2SO4 BATH CASSETTE SUPPORT (Y)HCL BATH CASSETE (Y)CASSETTE SUPPORT (Y)ENCORDER CABLE TEMP CONTROLLER (X)HCL CASSETTE (C)CONTROLLER TEMP CONTROLLER (Y)AIR CYLINDER (Y)S/D COVER MASH (Y)PROGRAM CONTROLLE (Y)I/O REMOTE CONTRO (Y)SERVO CABLE (Y)CONVUM (Y)CONTROL UNIT (Y)STAND BY TANK HEA (Y)SERVO POSITIONER SHUTTR CYLINDER PRINTER CABLE SERVO DRIVER(L/R) (L)HEPA FILTER (X)HEPA FILTER HOLDI (L)HEPA FILTER (Y)HEPA FILTER (L)S/D HEPA FILTER (Y)HEPA FILTER FINESONIC GENERATOR LM GUIDE (Y)PVC ARM2 (CHUCK H QUARTZ HEATER(HCL) (Y)NH4OH H/D TANK HEATER(L) (Y)NH4OH H/D TANK HEATER(M) (Y)NH4OH H/D TANK HEATER(S) HEATER ASS'Y HEAT EXCHANGER (C)MAGNET PUMP (Y)10KEY PC ENTRY-10 (Y)END PLATE LIMIT DB LAMP (Y)SPIN DRY MOTOR (4 (Y)AC SEVO MOTOR SERVO MOTOR (Y)SERVO MOTOR DRIVER (Y)SERVO MOTOR(L/R) (Y)O-RING WILDEN CIRCULATION P (X)BRAKE PACK (Y)QDR PLATE MAGNETIC PUMP (Y)Q'TZ HESO4 PLATE LOCATION K-4-6-1 K-10-2-2 L-4-1-3 I-1-2 I-2-2 K-4-6-1 M-7-2-3 L-6-2-4 L-3-3-1 L-4-1-3 A-3-3 K-11-6-1 K-11-6-1 H-3-3 F-5-4 N-6-1-3 VENDOR PART NO REX C72F32R SS371 (H2SO4 BATH) R88A-CRH010C.

I-8-3 I-8-2. CONTROLLER (Y)MEMORY RAM TOGGLESWITCH (Y)OIL SEAL (Y)S/D CARRIER PHOTO SENSOR (Y)QUARTZ TUBE 2" (Y)NH40H H/D TANK (X)UNION TEE (X)MALE BRANCH TEE HEATER TOOL ELEMENT (Y)HOT DI STAND BY (Y)HOT DIW SUPPLY Q'TZ TANK (Y)HOT DIW SUPLY SYS QTZ TANK (C)CONTROLLER SOLENOID VALVE (Y)SOLENOID VALVE (Y)AIR VALVE (Y)SAME 3146V-013(VA (Y)SOLENOID VALVE AIR VALVE (Y)SOLENOIDE V/V (Y)SOLENOIDE V/V SOLENOID VALVE (Y)H2SO4 PLATE (Y)CRADLE CYLINDER (Y)DAN INVFERTER (Y)SPIN DRYER MOTOR (Y)FLOW SWITCH (Y)QUICK DRAIN VALVE (Y)NH40H BATH (Y)FINAL RINSE BATH (L)Q'TZ HEATER COVER AIR CYLINDER (Y)HEAT EXCHANGE (Y)HEAT EXCHCNGE CON (Y)H2SO4 CARRIER PLA POWER SUPPLY SOLENOID VALVE SOLENOID VALVE(DC24V) (Y)CHUCK MISS-SENSOR ARM (L)Q'TZ HEATER (Y)BEARING (Y)BEARING (C)BEARING (N)H3PO4 BATH 6" (Y)RT CABLE (10 PIN) LOCATION I-3-3 H-6-3 E-1-2 I-3-2 L-5-2-3 I-3-1 K-3-1-2 K-3-1-2 K-11-6-1 N-8-2-2 K-3-1-2 I-8-2 D-1-1 L-2-2-3 VENDOR PART NO 0-1319 FF-10CT1 FF-10BT1 Q-10-2 60X130 60X270 REX-F4FDR-V*2N C2000H RAM 6P2 MF 13 DF E3S-R2E4 H-2-9 UT12-F BT8-6N IH4511 I-3-3 K-3-1-2 K-5-1-1 K-4-6-1 K-4-6-1 K-5-1-1 K-4-6-1 K-4-6-1 K-3-1-2 K-3-1-2 L-6-2-4 I-4-2 G-2-5-1 N-5-6 K-10-1-1 K-10-1-1 F-2-1 K-7-1 I-2-1 D-12-1 A-5-1.No 934 935 936 937 938 939 940 941 942 943 944 945 946 947 948 949 950 951 952 953 954 955 956 957 958 959 960 961 962 963 964 965 966 967 968 969 970 971 972 973 974 975 976 977 978 979 980 981 982 983 984 985 986 Item no 장비명 3146P-021 3146P-027 3146P-031 3146P-052 3146P-055 3146R-002 3146R-004 3146R-022 3146R-032 3146S-049 3146S-090 3146S-098 3146T-002 3146T-003 3146T-020 3146T-028 3146T-047 3146T-052 3146T-053 3146T-054 3146V-004 3146V-013 3146V-015 3146V-016 3146V-023 3146V-025 3146V-027 3146V-038 3146V-039 3146V-040 3147B-052 3147C-002 3147I-001 3147M-001 3147S-022 3147V-001 3148B-001 3148B-002 3148C-001 3148C-006 3148E-001 3148E-002 3148P-002 3148S-002 3148V-002 3148V-014 3149A-001 3149B-007 3149B-021 3149B-022 3149B-023 3149B-035 3149C-005 WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION DESCRIPTION (Y)Q'TZ HESO4 PLATE (C)BELLOWS PUMP (C)BELLOWS PUMP (Y)FINE SONIC CARRIER PLATE (Y)Q'TZ PLATE (DNS) (Y)QUARTZ ROD (Y)QUARTZ ROD (Y)TEMP. H-10-3 I-3-2 B-2-1 K-5-1-1 K-5-1-1 L-6-2-3 L-6-2-3 L-6-2-3 QEV-8 180-4E1-83-DC24 A150-4E2-25-AC10 NSAVH-123BC A183-4E2-83-DC24 AV-8289-114 VQ1101Y-5 AQ1301Y-5 180E1(A180E1-2 H2SO4 PLATE MK2-20-150 VFD-800 SF-JRV LK31 AV63 CDGIFN40-600-B VC-803B VC-803A 522*257*T5 S8VF-3024 A180-4E1-83-PLL VJ3410-5MZ 388120-A DES-91018 SS28-38 FLWA676ZZA 6201ZZ QZ-D15O2 수량 1 1 1 1 1 4 1 1 1 10 1 1 6 1 4 1 6 1 1 6 2 5 3 1 4 3 1 5 5 10 1 1 1 1 1 4 1 1 1 1 2 2 1 3 5 5 2 1 10 20 6 1 4 LOC VENDOR T63 L25 L25 A45 B93 A95 A95 A53 A53 D22 B36 W15 A53 DD13 AA41 A53 D22 DD10 Y24 Y24 A53 A32 A51 A51 A32 A51 A51 A53 A53 A52 B85 R42 C73 D49 D43 D43 Z18 Y11 A72 R52 Y23 Y24 A71 R11 A32 A32 A63 D42 A63 A63 A63 Y13 A63 SUGAI " " " " " " " " " " " " " " " " " " " " " " " " " " " " " DAN DAN " " DAN " WATANABE WATANABE WATANABE " " " " WATANABE " " KAIJO " KAIJO " " KAIJO " .

PROCESS BATH (Y)INVERTER LM GUIDE (Y)BRUSHLESS DC MOTOR (UP.DOWN (Y)INDUCTION MOTOR (Y)INDUCTION MOTOR SPIN DRYER MAIN MOTO (Y)L/R SERVO MOTOR (Y)AC SERVO MOTOR (Y)SHOWER NOZZLE (L)QUARTZ PLAT WILDEN PUMP(LOW) (Y)GEAR PUMP SOLID STATE RELAY (Y)DIGITAL PRESSURE SWITCH LIMIT SWITCH (Y)LIMIT SENSOR (Y)PHOTO SENSOR (Y)OIL SEAL NC UNIT (Y)UNIT SMSE (Y)UNIT SMSE (Y)PLC UNIT (Y)PLC UNIT (Y)PLC UNIT (Y)PLC UNIT (Y)AIR VALVE (Y)SOLENOID VALVE (Y)SOLENOID VALVE SOLENOID VALVE (Y)MECHANICAL VALVE X80M SOLENOID VALVE (C)AIR OPERATED VALV (C)AIR OPERATED VALVE SOLENOID VALVE CHECK VALVE (Y)5"30 AMP BREAKER (Y)5"AMP BREAKER LOCATION L-9-1 K-9-3-2.8M 389542-2-A-3M VPA-10QS3B HRW27CA2UUCI 640L HRW27GA2UUCI 110L KAIJO-INVERTER HRW17CA1UUC1+1 4061N3E15 4RK-25GN-AM 4RK-25GN-AM FELF-5 R88M-H10030-GP R88M-H10030-G1 Y32232 B1/8HH 373287 WH25/TF100/H66 MDGL15KAAC100V US-K50DD PSI-P10K-6M-FL138264 D4C-1250 PU5 30X40X7 FN515-NC022 20GUU 16GUU FN515-PS221E FN515-BC043 FN515-CCH01N3 FN515-CCH01N1 AMD31 F1W180-4E1 F1W180-4KE2 VF3450-5EZ-02 66534-A VJ5120-5LZ-C4 AMD51-25-25 AMD31-15BUS-10-3 4KB129-00-D2-DC24 BV-DN08 BB-010 BB-004 수량 3 1 2 2 1 1 1 1 1 1 1 1 2 2 4 14 1 2 1 2 1 2 3 2 10 1 1 1 10 2 1 2 1 10 1 2 2 1 1 2 2 1 2 2 1 4 9 1 3 1 2 2 1 LOC VENDOR A63 R43 R43 B92 B85 A63 A63 A63 A63 A63 A63 A63 R42 Y27 Y27 A66 Y24 W15 P25 P23 A61 L45.5 38631-2.8 38631-2.5 38631-1.Y21 A62 P34 Q53 B92 L13 C72 D52 A63 R14 A63 A63 A63 A63 W21 W21 A64 A62 R14 A63 A61 A63 A63 R53 A63 W21 B21 A61 A63 A63 AA25 AA25 " " " " " " " " " " " " " " " " " " " " " " " " KAIJO " " " " " " " " " " " " KAIJO " " " " KAIJO KAIJO " " " KAIJO " KAIJO " POLY FLOW " .5M 389502-A-1.8 386316-2.No Item no 장비명 987 988 989 990 991 992 993 994 995 996 997 998 999 1000 1001 1002 1003 1004 1005 1006 1007 1008 1009 1010 1011 1012 1013 1014 1015 1016 1017 1018 1019 1020 1021 1022 1023 1024 1025 1026 1027 1028 1029 1030 1031 1032 1033 1034 1035 1036 1037 1038 1039 3149C-006 3149C-026 3149C-028 3149C-061 3149C-071 3149C-082 3149C-083 3149C-086 3149C-088 3149C-089 3149C-094 3149C-095 3149C-101 3149G-011 3149G-012 3149H-005 3149I-001 3149L-002 3149M-001 3149M-004 3149M-004 3149M-005 3149M-006 3149M-012 3149N-001 3149P-002 3149P-005 3149P-021 3149R-001 3149S-034 3149S-035 3149S-036 3149S-061 3149S-071 3149U-001 3149U-003 3149U-004 3149U-008 3149U-009 3149U-010 3149U-011 3149V-002 3149V-004 3149V-005 3149V-007 3149V-008 3149V-011 3149V-012 3149V-019 3149V-027 3149V-028 3151B-022 3151B-023 WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WASHER WASHER DESCRIPTION (Y)RT CABLE (7-4 PIN) (Y)DRAIN CYLINDER (Y)SELECTOR CYLINDER (Y)Q'TZ CARRIER STAND (Y)CARRIER STAND (OLD) (Y)ROBOT CABLE (Y)ROBOT CABLE (Y)ROBOT CABLE (Y)ROBOT CABLE (Y)ROBOT CABLE (Y)POWER CABLE (Y)CABLE (Y)3OMVOM (Y)LM GUIDE (Y)LM GUIDE (Y)Q'TZ HEATER. F-5-4 I-2-2 I-3-3 N-4-1-2 G-2-2 G-2-2 J-5-1 H-5-1 H-1-1 H-1-1 F-5-5 N-2-1-1 I-1-3 F-2-3 B-1-5-3 L-6-2-3 L-6-2-3 N-4-2-3 L-6-2-3 D-3-3-2 D-3-3-2 B-2-1 M-2-4 N-3-2-3 L-6-2-3 L-6-2-3 G-2-5-1 L-6-2-3 D-3-3-2 L-5-3-4 L-5-4-2 L-6-2-3 L-6-2-3 VENDOR PART NO MRL-WL-20-700-K2V-D SCA2-CB-30B0190-D 373732 373787 386316-1.

No Item no 장비명 1040 1041 1042 1043 1044 1045 1046 1047 1048 1049 1050 1051 1052 1053 1054 1055 1056 1057 1058 1059 1060 1061 1062 1063 1064 1065 1066 1067 1068 1069 1070 1071 1072 1073 1074 1075 1076 1077 1078 1079 1080 1081 1082 1083 1084 1085 1086 1087 1088 1089 1090 1091 1092 3151B-024 3151B-041 3151B-042 3151C-003 3151C-031 3151C-041 3151C-061 3151C-065 3151C-067 3151E-001 3151F-002 3151F-041 3151G-001 3151H-001 3151H-003 3151H-004 3151H-005 3151H-006 3151H-007 3151I-002 3151L-001 3151L-002 3151L-003 3151M-001 3151M-004 3151M-005 3151M-022 3151M-023 3151N-001 3151N-002 3151N-003 3151N-004 3151N-005 3151N-006 3151O-001 3151O-003 3151P-003 3151P-025 3151P-026 3151P-041 3151P-042 3151R-003 3151R-005 3151R-006 3151R-021 3151S-001 3151S-002 3151S-003 3151S-004 3151S-005 3151S-007 3151S-008 3151S-021 TUBE WASHER WASHER WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER DESCRIPTION 5"CIRCUIT BREAKER (Y)5"TURBO BOLT-PVDF (Y)5"TURBO BOLT (Y)5"TEMPERATURE CONTROL (Y)5"CLAMP (Y)5"DOOR LOCK AIR C (Y)5"CAROUSEL BASE-PVDF (Y)5"AIR CHAMBER (X)AIR CYLINDER (Y)5"FILTER ELEMENT (Y)5"CAROUSEL MOTOR FAN (X)MICRONFILTER (Y)5"PRESSURE GAUGE (Y)5"N2 HEATER(100W) (Y)5"N2 HEATER (Y)5"HEAD (2-342 VIT (Y)5"N2 HEATER OVERT (Y)5"AIR FLOW HEATER (Y)5"HOT N2 (Y)5"INTERLOCKS 5"MANUAL DOOR LOC (Y)5"LUBRICATOR FOR (Y)5"MANUAL DOOR LOCK (Y)5"MOTOR START W/R (Y)5"PUMP MOTOR AND (Y)5"CAROUSEL MOTOR (Y)5"TYMKON MICROPRO (Y)5"REGULLATOR MONN (Y)5"CAROUSEL NOZZLES PVDF (Y)5"CAROUSEL BASE NOZZLES (Y)5"TURBO NOZZLE (Y)5"HALD NOZZLE PVC (Y)5"CAROUSEL SPRAY (Y)5"CAROUSEL BASE N (Y)5"T-PISTON O-RING (Y)5"O-RING (Y)5"PUMP (Y)5"POWER SUPPLY (Y)5"POWER SUPPLY (Y)5"FINGER PLATE (Y)5"HOLE PLATE (Y)5"24 VOLT AC RELA (X)RELAY (X)RELAY (Y)5"FILTER REGULATO (Y)5"VERSAVALVE SEAL (Y)5"SEAL FOR 63MM UNION (Y)5"SEAL FOR 32MM UNION (Y)5"SEAL FOR 25MM U (Y)5"TEFLON SEALS FOR 3/4" (Y)5"CAROUSEL SEAL (Y)5"SEAL FOR 63MM U (Y)5"MICRO SWITCH LOCATION D-1-2-2 C-3-4 H-10-3 H-10-3 N-7-3-2 E-3-3-1 D-1-2-2 G-2-5-3 G-2-5-3 M-3-4 G-2-3-2 D-1-2-2 G-2-5-3 G-2-5-3 G-2-5-3 D-1-2-2 D-1-2-2 G-2-5-3 G-2-5-3 G-2-5-3 G-2-5-3 G-2-5-3 G-2-5-3 G-2-5-3 VENDOR PART NO MSZZZ00134 01-7105 BH-004 P89 01-2905 MSZZZ00114 1108 DN50-720PPV 273001 ENZZZ00002 GX01-10 270003 DHYZ30616 01-3400 283003 259002 259001 269007 265001 01-1405 270009 MSZZZ00154 ERZZZ00003 RK-025 BJ-001 251008 270001 FNZZZ00007 MSZZZ00131 FNZZZ00006 AM-202 AM-100 283005 800 X 600 M2PT KS-200C WK50S24 01-7312 01-7311 BA-002 KH-103-4C KH-102-2C 270008 MSZZZ55320 FNZZZ00332 FNZZZ00218 DC-214 FVZZZ90107 DA-224 DC-332 FSZZZ00010 수량 1 2 1 1 10 3 1 3 1 15 2 5 1 1 1 3 1 2 1 1 1 1 3 1 1 1 1 1 3 6 2 4 3 6 3 34 1 1 1 1 1 2 2 2 1 1 1 3 5 2 2 1 1 LOC VENDOR AA25 AA25 AA25 T33 AA25 AA25 AA25 AA25 L54 AA25 AA25 AA25 AA25 AA25 AA25 AA25 AA25 AA25 AA25 AA25 AA25 AA25 AA25 AA25 P34 T33 T13 AA25 AA25 AA25 AA25 AA25 AA25 AA25 AA31 AA31 Y25 T33 T33 AA31 AA31 AA31 T33 T33 AA31 AA31 AA31 AA31 AA31 AA31 AA31 AA31 AA31 POLY FLOW POLY FLOW " POLY FLOW " " " " POLY FLOW " " " " " " " " " " " POLY FLOW " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .

PORT CAP DI TRIAC CIRCUIT DI COMPARITOR CIRCUI DI OVERTEMP CONTROL (Y)DRIP RACK SET (Y)DIAPHAGM ASS'Y KI (Y) 1A/600V SLOW BELOW F 2A/600V SLOW BELOW F (Y)H2SO4 BATH GUIDE (Y)HTR PAD 9"*14" W/ (Y)HTR PAD 9"*14" W/ LOCATION G-2-5-3 G-2-5-3 D-1-2-2 G-2-5-3 G-2-5-3 G-2-5-3 L-2-1 G-2-5-3 L-10-5-1 G-2-5-3 L-10-5-1 L-10-5-1 G-2-5-3 G-2-5-3. L-10-5-1 L-10-4-1 L-10-4-1 L-10-5-1 L-10-5-1 G-2-5-3 H-1-3 H-3-2 B-3-4-2 N-2-1-2 N-2-5-1 K-3-4-3 N-8-4-1 K-10-4-1 K-10-4-1 K-3-4-3 K-3-4-3 K-5-4-4 N-2-3-1 N-8-1-2 N-8-1-2 I-3-1 N-2-3-1 H-10-1 H-8-1 E-2-1 E-2-1 VENDOR PART NO ESZZZ00002 ESZZZ00010 BG-036 252018 269008 MSZZZ00046 BA-114 FTZZZ00016 BF-050 MRZZZ00005 MRZZZ00007 FVZZZ84101 VFF90105 RK-002 RK-001 AO-087 2" 286001006 269010 255013 255014 AO-286 SB-JR4P 200V2.D55 D43 D43 " " " " " " " " " " " " " " " " " " " " " " " SUGAI " " " " " SUBMICRO " " " " " " " " " " SUBMICRO " " " " " " " " " " " " .Z19 C22 B45 T21 D54 D54 A91 B45 L71 T21 T21 L44.2 S/D SHAFT ASSE CLASSY00-1 030-4E1 030E1 SK-032 PCB5B0002 PCB5B0003 PCB1A0001 RBT1B0002 RBT1B0003 TB20EFG-55 8901/33-293/000/ 8901/31-280/165/ A6020830G MC-10026 SK-0000 1900B0018 TB-1 CC-7 OT-2-A DR-40026/SET KTB950 F-1 F-2 W05-FA-110 SK914N-21992 SK914H-21992 수량 4 6 3 3 1 1 2 5 1 2 1 6 4 4 1 1 3 1 2 2 1 1 2 1 1 1 1 1 3 2 1 1 1 4 8 2 1 1 1 3 1 2 1 1 1 2 1 8 2 2 3 1 1 LOC VENDOR AA31 AA31 AA31 T33 AA31 AA31 AA31 AA31 AA24 AA24 AA31 AA31 AA31 AA31 AA31 AA31 AA31 AA31 AA31 AA31 AA31 AA31 AA31 Y24 P45 L14 Y26 W15 W15 C54 D54 T22 T22 T22 T22 B74 C54 C54 T22 L74.No Item no 장비명 1093 1094 1095 1096 1097 1098 1099 1100 1101 1102 1103 1104 1105 1106 1107 1108 1109 1110 1111 1112 1113 1114 1115 1116 1117 1118 1119 1120 1121 1122 1123 1124 1125 1126 1127 1128 1129 1130 1131 1132 1133 1134 1135 1136 1137 1138 1139 1140 1141 1142 1143 1144 1145 3151S-022 3151S-023 3151S-024 3151S-026 3151S-027 3151S-041 3151S-043 3151T-002 3151T-022 3151T-023 3151V-004 3151V-006 3151V-007 3151V-008 3151V-012 3151V-013 3151V-014 3151V-015 3151V-017 3151V-019 3151V-022 3151V-023 3151V-024 3152M-003 3152M-007 3152S-089 3152T-010 3152V-007 3152V-009 3153A-001 3153B-001 3153B-002 3153B-003 3153B-011 3153B-012 3153B-021 3153B-041 3153B-042 3153B-043 3153C-001 3153C-011 3153C-021 3153C-022 3153C-023 3153C-024 3153D-001 3153D-011 3153F-001 3153F-003 3153F-004 3153G-001 3153H-002 3153H-003 TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER TUBE WASHER WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION DESCRIPTION (Y)5"PRESSURE SWITCH (Y)5"MICRO SWITCH (Y)5"PRESSURE SWITCH (Y)5"2 POLE 24 VOLT (Y)5"PNEUMATIC ELECT (Y)5"PUMP SHAFT (Y)5"MOTOR SCRATER AND RESET (Y)5"THERMOCOUPLE (Y)5"24 VOLT AC TRAN (Y)5"TRANSFORMER (Y)5"VERSA VALVE KIT (Y)5"VERSA-VALVE (Y)5"AIR MINISOLENOID (Y)5"EPDM SEALS FOR (Y)5"VERSZ VALVE KIT (Y)5"VERSA VALVE KIT (Y)5"DI FILL VALVE (Y)5" VALVE (Y)5"T-PISTON DRAIN (Y)5" TEFLON ACID VA (Y)5"PNEUMATIC CARRI (Y)5"PNEUMATIC CARRI (Y)5"AIR SOLENOID (Y)SPIN MAIN MOTOR (Y)MAIN MOTOR (N)S/D SHAFT ASSEMBL (N)S/D TURN TABLE ASSY (Y)SOLENOID VALVE (Y)SOLENOID VALVE (Y)ROTARY ACTUATOR (Y)PCB OPTO 22 IBM-P (Y)PCB OPTO 22 DIGIT (Y)PCB LEVEL SONIC P (Y)ROBOT MOTOR BRUSH (Y)ROBOT TACH BRUSHE (Y)BELT FOR MOTIOR (Y)ZENER BARRIER (Y)ZENER BARRIER (Y)LITTLE BOARD (Y)COOLING COILS MOD (Y)TEMP CONTROL (Y)EXT.

No Item no 장비명 1146 1147 1148 1149 1150 1151 1152 1153 1154 1155 1156 1157 1158 1159 1160 1161 1162 1163 1164 1165 1166 1167 1168 1169 1170 1171 1172 1173 1174 1175 1176 1177 1178 1179 1180 1181 1182 1183 1184 1185 1186 1187 1188 1189 1190 1191 1192 1193 1194 1195 1196 1197 1198 3153H-004 3153M-001 3153M-002 3153M-011 3153O-001 3153P-001 3153P-003 3153P-011 3153P-021 3153P-022 3153P-023 3153R-003 3153R-012 3153S-001 3153S-002 3153S-003 3153S-012 3153S-014 3153S-021 3153S-022 3153S-023 3153S-024 3153S-031 3153S-041 3153S-042 3153S-043 3153S-051 3153S-052 3153S-053 3153S-054 3153S-055 3153S-056 3153S-057 3153S-058 3153S-059 3153T-002 3153T-003 3153T-004 3153T-005 3153T-010 3153T-011 3153T-012 3153U-001 3153U-002 3153U-003 3153U-004 3153V-001 3153V-002 3153V-003 3153V-005 3153V-006 3153V-010 3153V-011 WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION DESCRIPTION (Y)HTR PAD 14"*14" W (Y)STEPPING MOTOR (Y)FLOW METER WITH V (Y)MUFFLER MEDIA (Y)O-RING FKM (Y)PLATE PUSH (Y)IPA SUPPLY PUMP (Y)CHECK PISTON (Y)CHECK PLUG (Y)Q.E PORT (Y)ROBOT BELT 100A 30 MERCURY RELA (Y)SENSOR L/V SONIC (Y)SENSOR LEVELITE 1 (Y)SENSOR R/A CAP 24VDC (Y)MAGNETIC POSITION (Y)SWITCH. N-8-1-2 N-2-5-1 K-3-4-3 I-3-1 I-3-1 D-2-5-2 D-2-5-2 D-2-5-2 N-2-3-2 N-2-2-4 N-8-2-2 N-2-3-1 N-2-3-1 VENDOR PART NO SK1414TC-21992 BO-6-BW GGE2A0002 1900A0017 98002240 7020-0010 1900B0046 NDP-5FPT 1900B0007 1900B0010 1900B0016 RBT2B0011 RL3-MC100 SNS1A0002 SNS1B0013 SNS1B0006 1AV2A AML21CBA2AC SKVP003 1900B0008 1900B0009 1900B0045 W50-FA-110-1 1900A0037 98001588 98001585 1900B0026-01 1900A0013 1900B0015 SNS1B0014 SW-SDA SW-DDMN SW-SDMN P-28 P-14 ST-1002618 SK-200 SK003 SK001 SNS1B0009 STRAIGHT C-SHAPED A61P-UL A2NCPU-UL AX71 AY51-UL VLV2B0151 VLV1B0009 SK-500 VLV2B0013 110012200 VLV2B0107 VLV2B0101 수량 2 1 2 2 5 1 2 1 4 2 2 4 1 1 1 1 2 6 1 2 2 2 1 5 4 2 2 2 1 2 1 1 1 2 2 2 1 1 1 10 2 2 1 1 1 2 2 3 4 4 2 2 1 LOC VENDOR D43 Y22 B42 A94 A94 B85 B45 A74 B45 B45 A94 B74 D53 C54 D53 D53 C54 C54 D54 B55 B55 B55 L74 C54 A94 A94 C54 A94 A94 A94 C54 C54 C54 A94 A94 L72 D51 W15 C54 D55 A94 A94 T14 T21 T14 T14 B45 D53 W15 B45 B36 B45 B45 " " " " " " " SUBMICRO " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " . PUSH BUTT (Y)OPERATOR TOUCH SC (Y)SUCTION SLEAVE (Y)DISCHARGE SLEAVE (Y)SHAFT (Y)H2SI4 BATH SUPPORT (Y)SHAFT SEAL (Y)QUICK EXHAUST SEA (Y)MAIN SEAL (Y)SHUTTLE ASS'Y (Y)SHUTTLE DETANT (Y)SHUTTLE CAP (Y)SENSOR QUARTZ TIP SPDT ALTERNATE ACTIO DPDT MOMENTARY SWITC SPDT MOMENTARY S/W 28V SWITCH BULB 14V SWITCH BULB (Y)SAUCER TRAY ARC (Y)MULTI-RANGE TIMER (Y)W-TW303 RDT TRANS (Y)W-MM1410 OVERTEMP (Y)THEMOCOUPLE (Y)LIQUID LEVEL TUBE (Y)LIQUID LEVEL TUBE (Y)PLC UNIT (Y)PLC UNIT (Y)PLC UNIT (Y)PLC UNIT (Y)VLV DILUTION10:1 (Y)VLV PNEU 3 WAY NC (Y)SOLENOID VALVE (Y)3/4" 3WAY BANDIT (Y)PILOT VALVE (Y)1/2 NPT CHECK V/V (Y)CHECK V/V 1/2FNPT LOCATION E-1-1 L-12-3-2 I-2-1 N-2-3-1 N-2-3-1 N-2-3-1 L-12-3-2 B-1-5-3 K-3-4-3 K-3-4-3 K-3-4-3 N-8-4-1 M-7-2-1 M-7-2-1 M-7-2-1 F-3-1 K-3-4-3 L-12-3-2 K-3-4-3 L-12-3-2 L-12-3-2 I-3-1 K-3-4-3 K-3-4-3 K-3-4-3 L-12-3-2 L-12-3-2 H-3-1 N-2-5-1.

No Item no 장비명 1199 1200 1201 1202 1203 1204 1205 1206 1207 1208 1209 1210 1211 1212 1213 1214 1215 1216 1217 1218 1219 1220 1221 1222 1223 1224 1225 1226 1227 1228 1229 1230 1231 1232 1233 1234 1235 1236 1237 1238 1239 1240 1241 1242 1243 1244 1245 1246 1247 1248 1249 1250 1251 3153V-012 3153V-013 3153V-014 3153V-015 3153V-016 3153V-017 3153V-018 3153V-019 3161C-001 3161F-021 3161G-001 3161G-002 3161G-003 3161G-004 3161H-003 3161L-001 3161M-003 3161O-001 3161O-003 3161O-004 3161O-005 3161O-006 3161O-007 3161O-008 3161O-031 3161O-034 3161O-035 3161O-036 3161O-037 3161P-001 3161R-002 3161S-001 3161S-002 3161S-004 3161S-005 3161S-022 3161T-001 3161T-002 3161T-003 3161T-004 3161T-006 3161V-005 3171B-002 3171B-007 3171B-010 3171B-013 3171B-014 3171B-015 3171B-016 3171B-018 3171H-001 3171H-002 3171M-001 WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD APCVD POLYMIDE STRIP POLYMIDE STRIP POLYMIDE STRIP POLYMIDE STRIP POLYMIDE STRIP POLYMIDE STRIP POLYMIDE STRIP POLYMIDE STRIP POLYMIDE STRIP POLYMIDE STRIP POLYMIDE STRIP DESCRIPTION (Y)QUICK EXH V/V (Y)3-WAY BANDIT V/V (Y)WHI BANDIT 3/4FNP (Y)WHI BANDIT 1/2FNP (Y)WHI BANDIT 1/2FNP (Y)CHECK V/V 1/2NPT(Y)CHEM DISP BLOCK ( (Y)3/4"NC BANDIT W/O (X) SEQUNCE MANUAL CONTROLLER (X) FILTER BG VACUUM (X) GAS ZONE GAUGE (X) GAUGE (0-100 PSI) (X) WATER FLOW GENERATOR (X) GAUGE (0.30 PSI) (X) FUSE HOLDER OPEN (X) STATUS LED (X) AC TIMER MOTOR (X) CHAMBER SEAL O-RING (X) O-RING (X) O-RING (X) O-RING (X) O-RING (X) O-RING 3/8" (X) O-RING (1/2") (X) ORIFICE (41706) (X) ORIFICE (LINE 1) (X) ORIFICE (VCR) (X) ORIFICE (LINE 4) (X) ORIFICE (LINE 6) (X)THERMOCUPLE PLUG(FEMALE) (X) REGULATOR(VERIFLO) (X) MICRO SWITH (X) LIMIT MICRO S/W (X) N2 FLOW S/W IN SPRING (X) N2 INTERLOCK FLOW S/W (X) SOLENOIDS (X) THERMOCUPLE (X) TIME PROP (LIME 120VAC) (X) FLOWMETER TUBE (X) FLOWMETER TUBE (X) FLOWMETER TUBE (X) SOLENOID VALVE BRD 4 CHNL SERTAL ASSY BRD ASSY NTR INTRFCE BRD ASSY 32BIT OUTPUT B/D ASSY QUAD SERIAL 32 CHANNEL INPUT ASSY BOARD ANALOG CONTROL ASSY BOARD CPU 68000 128K BOARD QUAD OVER TEMP CONTROL BOARD (Y)HTR CTG 600W 220V TEFLON HEATER 200 2K (X)MOTOR 1/3HP 3000RPM EXP LOCATION N-2-1-4 M-7-2-1 M-7-2-1 N-2-3-1 M-7-2-1 N-2-3-1 N-2-3-1 N-2-3-1 D-1-2-2 C-4-2-3 C-4-2-3 C-4-2-3 C-4-2-3 C-4-2-3 C-4-2-3 N-3-3-3. D-1-2-2 C-4-2-3 C-4-2-3 C-4-2-3 C-4-2-3 C-4-2-3 C-4-2-3 C-4-2-3 C-4-2-3 C-4-2-3 E-3-2-3 C-4-2-3 C-4-2-3 E-3-2-3 E-3-2-3 E-3-2-3 E-3-2-3 J-4-1-1 J-4-1-1 J-4-1-1 J-4-1-1 J-4-1-1 J-4-1-1 J-4-1-1 J-4-1-1 K-10-2-4 K-10-2-4 VENDOR PART NO QEV-22 VLV2B0008 VLV2B0005 VLV2B0002 VLV2B0010 VLV2B0110 VLV2B0012 VLV2B0011 66414 57436 63915 60475 53900 66198 56954 28685 51050 51085 63438 63442 51405 V5-113 41706 37172-01 37172-03 37172-04 37172-06 52903 58598 53799 62931 64879 63830 66041 53171 800-336 63739 63740 63737 63798 14837-01 16753-509 16799-01 16744-503 14830-501 14889-01 14899-501 16801-505 930R0002-03 73004-01 61104 수량 3 2 2 2 1 2 2 2 1 2 3 1 1 2 1 3 1 4 10 10 10 10 10 10 5 10 8 4 10 9 4 1 1 1 2 5 10 3 3 4 2 19 1 1 1 1 1 1 1 1 1 2 1 LOC VENDOR B45 B55 B55 B45 B55 B45 B45 B45 T33 AA32 AA32 AA32 AA32 AA32 AA32 T33 AA32 AA32 AA32 AA32 AA32 AA32 AA32 AA32 AA32 AA32 AA32 AA32 AA32 AA32 AA32 AA32 AA32 AA32 AA32 AA32 AA32 T31 AA32 AA32 AA32 AA32 T34 T34 T34 T34 T34 T34 T34 T34 D34 D34 Y25 " " " " " " " " TEMPRESS " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " SEMITOOL " " " " " " " SEMITOOL SEMITOOL " .

No Item no 1252 3171V-001 1253 3171W-001 1254 3172A-001 1255 3172B-001 1256 3172B-003 1257 3172B-004 1258 3172B-005 1259 3172B-006 1260 3172B-007 1261 3172B-032 1262 3172B-033 1263 3172B-037 1264 3172B-038 1265 3172B-039 1266 3172B-040 1267 3172B-045 1268 3172B-047 1269 3172B-048 1270 3172B-049 1271 3172B-050 1272 3172B-051 1273 3172B-052 1274 3172B-053 1275 3172B-055 1276 3172B-056 1277 3172B-057 1278 3172B-058 1279 3172B-059 1280 3172B-060 1281 3172B-061 1282 3172B-062 1283 3172C-005 1284 3172C-005 1285 3172C-007 1286 3172C-009 1287 3172C-013 1288 3172C-015 1289 3172C-016 1290 3172C-017 1291 3172C-019 1292 3172C-020 1293 3172C-021 1294 3172C-023 1295 3172C-025 1296 3172D-001 1297 3172D-004 1298 3172D-005 1299 3172D-006 1300 3172D-007 1301 3172E-001 1302 3172F-001 1303 3172F-003 1304 3172F-032 장비명 POLYMIDE STRIP POLYMIDE STRIP SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER DESCRIPTION (Y)VALVE SOLENOID (Y)3INDOW TEMPERED GLAS360-380 (Y)ASIPRATOR ASS'Y MOTOR CONTROL BOARD PROCESS CONTROL BOAR (Y)CPU CARD POWER SUPPLY BOARD (Y)PCB CONNECTOR (Y)IO BOARD 5"240D BOWL (C)BEARING (Y)DOOR SWITCH BRACK (Y)BULB (Y)TIMING BELT (Y)TUBE CUTTER BLADE 27OD BOWL ASS'Y (Y)CIRCUIT BREAKER (Y)CIRCUIT BREAKER (Y)BALL BEARING SSR(S)4 CHANNER SEAIL A (S)4 CHANNER SEAIL A (S) LIQUID LEVEL SEN (S)32 CHANNER INPUT (S)ANALONG CONTROL A (S)CONVERTER ASS'Y (S)CONVERTER ASSS'Y (S)CPU G8000 W/SEAIL (S)CPU EL ADAPTER (S)FLOPPY DISC CONTR (S)OUTPUT ASS'Y DISPLAY BOARD "BUS" (Y)CABLE REMOTE 10" (Y)CABLE REMOTE 10" (Y)TEFLON END CAP (X)COMPLETE (Y)PIN CYLINDER MTG (Y)PLATE CARD CPU (Y)PLATE CARD (Y)POWER CORD (Y)QUARTZ CRYSTAL MOTOR CONTROLLER (Y)EPEED CONTROLLER (Y)CANISTER CONNECTO (Y)SEQUENCER MEMORY (Y)VIBRATION DAMPER (Y)DISPLAY (Y)DISPENSER (S)SPEAKER DRIVER DOOR FRAME (Y)MALE ELBOW5/32 TU (Y)FITTING (X)GALTEK U6ION B6RR FITTING (S) FILTER CARTRIDGE LOCATION K-10-2-4 K-10-2-4 B-1-3-2 K-5-4-3 L-3-2-3 L-3-2-3 L-3-2-3 M-4-3 J-5-5 L-2-4-2 D-8-2-3 L-2-4-2 K-10-4-1 K-10-4-1 N-1-3-1 L-3-2-3 L-3-2-3 J-5-2 L-3-2-3 L-3-2-3 L-3-2-3 L-3-2-3 L-3-2-3 L-3-2-3 L-3-2-3 L-3-2-3 L-3-2-3 B-1-3-2 L-2-4-2 L-2-4-2 L-2-4-2 L-3-2-1 D-8-2-3 H-9-2 J-2-3-1 J-2-3-1 J-2-3-1 J-2-3-1 J-2-3-1 K-1-2 J-2-3-1 J-2-3-1 B-1-3-2 H-10-2 VENDOR PART NO 61591 123S0005-01 11007-007-012 60701-3 14709-2 14817-501 60801-2 60502 1470-1 12306-1 SSR-4ZZ 10820-01 60706 300117 12888-1 TCBB131-01-041 TCB5131-01-051 1/4"-5/8" 14837-01 14837-501 16761-505 16750-501 14889-01 1486-501 1486-507 16746-01 16836-01 14894-01 16799-01 16707-1 61704-1 61704-1 HET-60814A 6802-2-3 653-007-1A 12008-1 12007-1 61702-1 X005 60710-26 F-ROM-1 62730-1 60452 70738-D 16782-01 10782-501 405-013-1A 70903-01 수량 19 1 6 12 11 4 1 10 8 2 15 2 20 5 8 4 1 1 12 1 4 2 2 1 1 1 1 1 1 1 2 2 1 17 1 9 1 1 1 15 1 1 15 1 2 1 6 1 2 34 4 67 4 LOC VENDOR D34 D34 B55 A41 A42.T22 A81 T22 A42 A42 A42 A42 A42 A42 A42 A42 B72 B72 B55 Y23 A103 A103 A103 B72 T22 A82 C55 B55 A41 A41 A41 A41 A41 B53 A41 A41 B55 A81 SEMITOOL " SEMITOOL " " " " " " SEMITOOL " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .T22 T22 T22 A42 A82 C61 A103 C55 C55 A103 L73 T22 T22 B34 A42 A42.T22 A42.

G65.3 .10 EPT.G75. L-4-1-2 D-8-2-3 N-1-3-1 L-3-4-3.75" (Y)PANEL SOCKET LOCATION K-4-4-3 J-2-3-1 L-2-2-4 L-2-2-4 N-4-3-3 J-2-3-1 J-2-3-1 L-3-4-2. J-5-5 H-1-2 L-2-4-2 J-2-3-1 J-2-3-1 J-2-3-1 J-2-3-1 L-2-4-2 K-10-4-1 K-5-3-4 K-5-3-4 J-2-3-1 J-2-3-1 L-6-1-1 J-2-3-1 L-2-4-2 L-2-4-2 J-2-3-1 N-1-3-1 K-5-3-4 K-10-4-1 K-5-3-4 K-5-3-4 K-5-3-4 VENDOR PART NO 16000-006 OF5 60801-02 ME-DVV-100 61501 61501-04 61553-1 10967-1 12564-1 17410-01 KDM30-PFF-8-100 10168-503 62723 EPT. D-8-2-3 L-2-1.A82 A41 A103 A41 A41 A41 A41 A103 A41 A41 A41 A41 A103 T22 C55 C55 B35 A41 A41 A41 B31 A41 A103 A103 A41 B34 C55 T22 C55 C55 C55 T22 C55 C54 A103 A103 B34 A103 A103 C54 A41 A103 " " " " " " " " " " " " " SEMITOOL " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .G165.+ (Y)RESISTOR (Y)RING (Y)SPONGE ROLLER (Y)REGULATOR BEARING RESISTER (Y)SWITCH PRESSURE S/W 5"START SWITCH 5"STOP SWITCH (Y)POWER SWITCH S/D (Y)POWER BREAK S/W (Y)POWER SWITCH REAR BOWL SEAL (C)DOOR SEAL ST-260D ADAPT SEAL SHAFT BOW BLINGER SHAFT SEAL ( (Y)DOOR SEAL 260D (Y)CYLINDER SENSOR (Y)RTD SENSOR 8.10 EPT.3 .No Item no 장비명 1305 1306 1307 1308 1309 1310 1311 1312 1313 1314 1315 1316 1317 1318 1319 1320 1321 1322 1323 1324 1325 1326 1327 1328 1329 1330 1331 1332 1333 1334 1335 1336 1337 1338 1339 1340 1341 1342 1343 1344 1345 1346 1347 1348 1349 1350 1351 1352 1353 1354 1355 1356 1357 3172F-052 3172F-054 3172G-003 3172G-021 3172H-001 3172H-005 3172L-002 3172M-002 3172M-009 3172M-011 3172M-012 3172M-013 3172M-042 3172N-001 3172O-002 3172O-003 3172O-004 3172O-005 3172O-006 3172O-007 3172O-008 3172O-009 3172O-011 3172O-052 3172P-001 3172P-002 3172P-003 3172P-006 3172P-007 3172P-011 3172P-012 3172P-018 3172P-021 3172R-051 3172R-061 3172R-081 3172R-091 3172R-092 3172S-002 3172S-004 3172S-005 3172S-006 3172S-008 3172S-009 3172S-010 3172S-032 3172S-033 3172S-035 3172S-036 3172S-037 3172S-056 3172S-057 3172S-103 SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER DESCRIPTION (Y)DI WATER FLOWMETER ASS'Y (Y)CAN FOLLOWER (Y)POWER GENERAL (Y)5"RPM GAUGE (METER) (Y)5"N2 HEATER N2 HEATER(220V) (Y)DOOR SEAL LIGHT ( (Y)RESISTIVITY MONITOR (THOR 5"H20 MANIFOLD 5"N2 MANIFOLD (X)SPEED METER S/D 5"BRUSHLESS MOTOR (Y)DRIVE CONVEROR MO (Y)NOIZZLE 240 (Y)CENTER BLOCK O-RI (Y)SHAFT SPACER O-RI (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (BAN COAT FERRO-FLUID OIL(10CC (Y)SPEED CONTROL POT (Y)VOLTAGE CONTROL P ROTOR STOP POS ASS'Y SHAFT PLATE ASS'Y (Y)STRAIN BELIEF (Y)PLUG (Y)PLUG STRAIN RELIE (Y)STI TEFLON VALVE PLATE POWER SUPPLY +5VDC.10 S-55 S-65 V0501H01 615520 61402-3 10503-1 12442-501 61714 61741 61742 16710-505 PVA-20X8-215 INA-13-757-2 60272-13 60705-2 61510 61561 61562 K-5-3-4 L-2-4-2 L-2-4-2 N-1-3-1 L-2-4-2 L-2-4-2 D-8-2-1 J-2-3-1 L-2-4-2 60704 10777-1 10722-1 13401-3 10776-1 2022N674-70 CD3B5 61719 수량 1 3 2 19 4 6 7 2 1 1 5 2 1 11 3 2 9 5 4 4 3 2 1 1 4 5 2 4 1 3 2 6 1 2 2 2 8 5 5 2 3 4 4 1 6 4 5 14 1 6 4 3 3 LOC VENDOR A41 A41 A41 A41 A41 A41 A41 C93 C55 B34 C55 P44.3 .

C101 D40 R42 R42 " " " " " " " " " " " " " " " " " " " ALPHA ALPHA " " " " ALPHA " " " " " " ALPHA " YUKI " " " " YUKI " " " " " YUKI " " " " " " " .No Item no 1358 3172S-104 1359 3172S-122 1360 3172S-123 1361 3172S-124 1362 3172S-127 1363 3172S-128 1364 3172S-129 1365 3172T-006 1366 3172T-013 1367 3172T-015 1368 3172T-043 1369 3172V-003 1370 3172V-006 1371 3172V-007 1372 3172V-010 1373 3172V-011 1374 3172V-016 1375 3172W-002 1376 3172Z-001 1377 3173A-001 1378 3173B-003 1379 3173B-021 1380 3173B-041 1381 3173B-042 1382 3173B-045 1383 3173C-003 1384 3173C-051 1385 3173C-081 1386 3173G-001 1387 3173G-002 1388 3173M-001 1389 3173M-002 1390 3173R-001 1391 3173W-001 1392 3174B-002 1393 3174B-004 1394 3174B-005 1395 3174B-006 1396 3174B-032 1397 3174B-033 1398 3174B-035 1399 3174B-036 1400 3174B-037 1401 3174B-039 1402 3174B-061 1403 3174B-062 1404 3174B-101 1405 3174B-103 1406 3174C-001 1407 3174C-002 1408 3174C-011 1409 3174C-021 1410 3174C-022 장비명 SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER DESCRIPTION (X)BATH SUPPORT (S)TRUN BEAM SENSOR (S)OPTICAL S/W(TACH) J TYPE SENSOR DOOR SEAL 870 SEAL DOOR 260 WHT VT SEAL DOOR 270 WHT VT (Y)AZ-3000 TEMP (Y)PHOTO TRANSISTOR (Y)PHOTO TRANSISTOR (S)OVERTEMP ASS'Y STI TEFLON H2O VALVE (Y)AIR OPERATED VALV (Y)ASPIRATOR VALVE W (Y)SOLENOID VALVE (X)AIR VLAVE (S) VALVE SOLENOID 2 (L)600 WINDOW (Y)MICRO SWITCH (Y)ROTARY ACTUATOR BELT (Y)BEARING (Y)JOINT BALL (Y)JOINT BALL (Y)BEARING SUPORT (Y)AIR CYLINDER (Y)PLAT CAPLE (Y)FLAT CABLE 3795 (Y)GEAR HEAD (Y)VACUUM GENERATOR (Y)CLUTCH BREAK MOTO (Y)INDEX MOTOR RING PACKING (Y)LOCK WASHER AW07 (Y)RELAY BOARD (Y)BEARING (Y)BEARING (Y)BEARING V-BELT (Y)V-BELT (Y)V-BELT (Y)V-BELT BELT (C-33) (Y)RADLE MOVER BELT (Y)BREAKER (Y)BREAK/CRUTCH (Y)CONTROL BOX MAIN SHIFT METALFOR (Y)AIR CYLINDER (Y)PEN CYLINDER (Y)CRADLE (Y)SPICONSPEED CONTR (Y)SPEED CONTROLLER LOCATION C-2-6 J-2-3-1 J-2-3-1 N-6-5-1 L-2-4-2 L-2-2-4 J-2-3-1 D-8-2-3 L-3-5-3 D-8-2-1 B-1-3-2 J-2-3-1 I-3-3 K-10-4-1 L-5-4-3 L-5-4-3 L-5-4-3 L-5-4-3 J-5-4 L-5-4-3 VENDOR PART NO 610X60X50 16767-01 16730-01 73082 17438-03 121R0001-01 121R0001-501 09234 PT-501 SS-300 16818-527 12020-01 11007-077 050-41E1-01-D02 02G-53106 61591 10892-505 3V-250 33207 14(RIGHT) 14(LEFT) UCP-205 DA20X250-CS4D2 37PJ K-5-5-2 4GH-80K VHL15-8025 122-10-20-DC24V 4RK-25RGN-C AN-072 M-6-4-1 M-6-4-1 M-6-4-1 N-5-5 N-5-5 N-5-5 N-5-5 N-5-5 REB-2 51309 6206Z 6207Z B-32 MITSUBOSHI B-26 MITSUBOSHI B-29 A-26 C-33 H-1-3 L-6-4-3 DG-33 20A/30MA 122-10-20 MIKI E-2-4 D-14-4 N-2-3-3 H-8-3 L-10-6-1 L-10-6-1 SD-505S SCA2-CB-80B-200 SCPS-CB-15-60 SC2-8 SC3G-8-6 수량 8 1 1 2 9 10 10 6 4 5 2 1 2 4 2 1 5 3 6 1 4 5 4 5 5 1 2 2 1 3 2 1 7 10 3 10 10 20 10 5 1 3 10 6 2 1 1 1 5 5 1 3 2 LOC VENDOR W24 A41 T22 A41 B61 B61 B61 Q52 T22 A103 A41 A41 C55 A82 C5 B55 A41 B84 T22 A83 A83 A83 A83 A83 A83 C101 A83 A83 A83 A83 A83 A83 A93 A83 T22 B33 C114 B34 B75 B75 B75 B75 B75 B74 C113 C116 Y21 B34 R44.C101 R42.

STOP (Y)5"NEST R.03 (Y)5"SHAFT 1/2" X 19 (Y)5"VACUUM TRAY (Y)5"LIFTCOMB OF WAF (Y)5"MOTOR PC BOARD (Y)5"TEE FITTING 1/1 (Y)5"ORIFICED HOSE B (Y)MANUAL DOOR LOCK (Y)5"FRONT RETAINER (Y)5"REAR RETAINER 5 (Y)5"SHUTTLE RELAY 3 LOCATION N-3-2-2 N-1-4-2 K-5-1-3. STAGE (Y)5"JAW PAD R.I " Q.5KW/TFO-K4P 4RK25GK-C2M 4RK-25GM-CM 4RK-25RGK-C2/4G MBM425-412 OPR-2-DTM LEFT ESX24-2R5 SS32-MAJ V3000-8A-WEG TH-OH/3 9-11A 505S 505S-YUKI AD40727 A3PA/LED SCA2-80-RO DTM 6010 5040 4031-02 5007-05 4027 4026-01 5018-01 5018-04 5018-03 5030 5027-01 5033-02 5033-04 5069-25 5027 5033-08 5026 6037 3007 PWS-BL-TM-13 082-115 082-124 082-153 076121 076122 D2OSOKOO 수량 18 1 2 8 2 2 3 1 2 2 2 2 2 3 2 3 1 4 3 1 4 3 4 5 3 3 2 7 2 3 1 1 3 3 1 1 4 1 1 2 10 1 1 2 1 1 1 10 4 1 2 4 3 LOC VENDOR R41 D40 L44 B35 C114 C114 Y21 P14 P11 P14 P13 C112 C114 C113 P25 R43 R43 C114 T22 C114 C114 R22 R42 B35 T22 A92 A92 V21 A92 V21 A92 A92 A92 A92 A92 A92 A92 A92 A92 A92 A92 A92 A92 A92 A92 A92 V21 A92 A92 A92 A92 A92 D83 " " " " " " " " " " " " " " " " YUKI " " " " " " " " Q. D-1-3-2 K-5-5-2 K-5-6-3 D-8-1 K-5-6-3 D-8-1 K-5-5-2 K-5-5-2 K-5-6-3 K-5-5-2 K-5-5-2 K-5-5-2 K-5-6-3 K-5-5-2 K-5-6-3 K-5-5-2 K-5-5-2 K-5-5-2 K-5-5-2 K-5-6-3 K-5-6-3 D-8-1 K-5-5-2 K-5-5-2 K-5-6-3 K-5-5-2 K-5-5-2 K-10-2-3 VENDOR PART NO VP-10LR U-600 2BA-610.V.I MGI " " MGI " " " .80 VFD-110-2-A02 VM1-22-C04 1.F (X)Q'TZ TOP PLATE 5"150MM PUSHERS(0.610.H.No Item no 장비명 1411 1412 1413 1414 1415 1416 1417 1418 1419 1420 1421 1422 1423 1424 1425 1426 1427 1428 1429 1430 1431 1432 1433 1434 1435 1436 1437 1438 1439 1440 1441 1442 1443 1444 1445 1446 1447 1448 1449 1450 1451 1452 1453 1454 1455 1456 1457 1458 1459 1460 1461 1462 1463 3174C-041 3174F-001 3174F-002 3174H-001 3174I-001 3174I-003 3174M-001 3174M-002 3174M-005 3174M-006 3174M-007 3174O-001 3174O-002 3174P-001 3174P-021 3174R-001 3174R-021 3174R-041 3174R-091 3174S-001 3174S-002 3174S-021 3174S-042 3174S-103 3174T-001 3182B-003 3182B-062 3182D-002 3182F-002 3182F-003 3182H-001 3182H-022 3182H-024 3182H-025 3182M-031 3182P-009 3182P-012 3182P-014 3182P-019 3182P-024 3182P-026 3182P-082 3182P-085 3182S-007 3182T-001 3182T-002 3183B-003 3183F-001 3183H-002 3183L-002 3183R-006 3183R-007 3183R-051 SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER SPIN DRYER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER DESCRIPTION (Y)CONVAM (Y)PRE-FILTER (L)HEPA FILTER (Y)T-HANDLE INVERTOR INVERTER (Y)MOTOR (Y)MOTOR(CRADLE) (Y)MOTOR FOR GRADLE (Y)INDEX MOTOR (Y)525 CRADLEMOTOR & (Y)OPERATION UNIT (Y)OPERATION PANEL (Y)POWER SUPPLY (Y)MOTOR CONTROL PAC (Y)REGULATOR (Y)RUBBER PACKING (Y)THERMAL RELAY (Y)ROM (Y)OIL SEAL BEARING BLOCK-SEAL (Y)SWITCH (Y)SENSOR/CYLINDER (Y)OPEN SPAMER (Y)TACHOMETER (C)5"BEARING & ARM S (Y)5"MOTOR SHAFT BUS (Y)5"PHOTO DETECTOR (Y)5"LENS REDUCER&FI (Y)5"AC LINE FILTER (Y)5"MAIN WIRING HAR (Y)5"SHAFT HOLDER "A" (Y)5"SHAFT HOLDERC (Y)5"SHAFT HOLDERD (Y)5"Q'TZ ADJ.H.I Q. K-5-4-4 M-4-3 K-3-4-2 K-5-3-2 L-6-4-3 K-3-1-4 N-3-3-4 K-5-3-2 K-5-3-2 K-5-3-2 G-2-4-4 L-10-6-1 N-1-4-2 K-10-4-1.H.D.I " " " " " " " " " " " " " " " " Q. ST (Y)5"JAW PAD R. ST (Y)5"CARDLE PVDF SH (Y)5"DIFFUSION BOAT (Y)5"JAW PAD P.

C.No Item no 장비명 1464 1465 1466 1467 1468 1469 1470 1471 1472 1473 1474 1475 1476 1477 1478 1479 1480 1481 1482 1483 1484 1485 1486 1487 1488 1489 1490 1491 1492 1493 1494 1495 1496 1497 1498 1499 1500 1501 1502 1503 1504 1505 1506 1507 1508 1509 1510 1511 1512 1513 1514 1515 1516 3183S-002 3183S-011 3183S-021 3183S-022 3183V-001 3183V-021 3184B-003 3184B-004 3184B-006 3184B-007 3184B-008 3184B-009 3184B-010 3184B-011 3184B-013 3184B-014 3184B-051 3184B-052 3184B-071 3184B-081 3184B-082 3184B-083 3184B-084 3184B-085 3184H-001 3184H-004 3184H-005 3184L-003 3184M-001 3184M-001 3184M-002 3184M-002 3184M-004 3184M-007 3184M-021 3184M-021 3184M-022 3184M-022 3184M-023 3184M-024 3184M-026 3184M-027 3184M-031 3184P-021 3184P-022 3184P-023 3184P-024 3184P-025 3184P-026 3184P-027 3184R-001 3184T-001 3184T-002 WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER WAFER TRANSFER DESCRIPTION (Y)5"RETAINER SENSOR (Y)5"CARRIER SENSOR (Y)5"THUMEWHEEL SWIT (Y)5"POWER SWITCH (Y)5"SOLENOID VALVE (Y)5"CEMTER VANES (Y)5"P.SIDE U (Y)5"UP-DOWN PULLEY (Y)5"SIDE MOTION PUL (Y)5"PULLEY (STEPPIN (Y)5"RAIL(QUARTZ) (Y)5"TIP(QUARTZ SWIT (Y)5"BOAT DETECT TIP LOCATION D-8-1 D-8-1 D-8-1 K-10-2-3 K-5-5-2 N-1-1-1 N-1-1-1 N-1-1-1 N-1-1-1 N-1-1-1 N-1-1-1 N-1-1-1 N-1-1-1 D-2-3-1 N-1-1-1 I-4-2 I-4-2 L-5-2-2 I-4-2 L-5-2-2 L-5-2-2 L-5-2-2 L-5-2-2 J-4-1-2 J-4-1-2 N-2-3-4 J-4-1-2 VENDOR PART NO 082-069 080-068 082-070 082-074 082-123 45114 EPCBZ0222A EPCBZ0450A EPGC3I256A EPCBZ0440A EPCBZ0530A EPCBZ0M13A EPCBZ0M23A EPCBZ0M33A EPCB3I255A ESWH3I259 RQUTQ0300A RQUTQ0030A RDELQ0130A MBLTL0010A MBLTL0030A DWG#.111 DWG#.100 RQUTQ0335 RDELH0550B REDL2I070A RDEL3I112A RDELL-P2 EMTRL0400A EMTRL0400A EMTRH0800A EMTRH0800A DWG#.C.SIDE UP/ (Y)5"BELT(STEPPING M (Y)5"UP-DOWN BELT (Y)5"SIDE MOTION BEL (Y)5"BAR (BOAT STOP) (Y)5"HEAD COMB(DELRI (Y)5"UP-DOWN COMBS (Y)5"UP-DOWN COMBS (Y)5"LIFT COMB(P2)(U (Y)5"MOTOR (Y)5"MOTOR (Y)5"MOTOR(HEAD COMB (Y)5"MOTOR(HEAD COMB (Y)5"UP-DOWN MOTOR (Y)5"WAFER TRANSFER (Y)5"MODULE(INPUT) (Y)5"MODULE(INPUT) (Y)5"MODULE(OUTPUT) (Y)5"MODULE(OUTPUT) (Y)5"MICROPROCESSOR( 5"MICROPROCESSOR(DIS 5"MICROPROCESSOR (DI (Y)5"CPU W/OROGRAMME (Y)5"SIDE MOTION STE (Y)5"PULLEY (Y)5"PULLEY(60) (Y)5"PULLEY(12) (Y)5"PULLEY(Q. K-6-1-1 K-6-1-1 I-4-2 I-4-2 I-4-2 DWG#.109 EPGCC0040A EPGCC0040A EPGCC0050A EPGCC0050A EMCP87492AI EMCP87492AD EMCP87493AD K-6-1-1 K-6-1-1 K-6-1-2 K-6-1-1 K-6-1-1 L-4-3-3.C.B (DC MOTOR (Y)5"MAIN PC BOARD (Y)5"LIMIT SWITCH PC (Y)5"QUARTZ BAR(BOAT (Y)5"QUARTZ REFERENC (Y)5"BOAT ALIGN (Y)5"BELT(P.110 DWG#.C.B(UP/DOWN S (Y)5"PROGRAMMED CPU (Y)5"PCB (25/50 LIMI 5"P.B (Y)5"P.101 MPLYS0010A RQUTQ0380A RQUT0100A RQUT3I133A 수량 9 3 4 8 5 8 2 4 1 3 1 2 2 3 2 3 4 3 1 3 3 6 6 2 1 1 1 1 3 2 2 2 2 1 2 2 2 2 1 1 2 1 1 1 3 2 3 1 3 3 3 3 1 LOC VENDOR V21 V21 V21 V21 D31 A92 V22 V22 V22 V22 V22 V22 V22 V22 V22 V22 A92 A92 A92 A92 A92 A92 A92 A92 A92 A92 A92 A92 P52 P55 V12 V12 P52 V12 V23 V23 V23 V23 V23 V23 V23 V23 P52 A92 A92 A92 A92 A92 A92 A92 A92 A92 A92 " " " " " " ASQ " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .B(UP/DOWN MOTO (Y)5"P.C.B (DISPLAY CNT (Y)5"PCB(STEPPER MOT 5"P.104 MPLY00010A EPLYL0020A MPLYL0010A MPLYL0030A DWG#.

SI) (X) BRUSH AND LUG (X) 10" 12" 2.No Item no 장비명 1517 1518 1519 1520 1521 1522 1523 1524 1525 1526 1527 1528 1529 1530 1531 1532 1533 1534 1535 1536 1537 1538 1539 1540 1541 1542 1543 1544 1545 1546 1547 1548 1549 1550 1551 1552 1553 1554 1555 1556 1557 1558 1559 1560 1561 1562 1563 1564 1565 1566 1567 1568 1569 3191A-001 3191A-002 3191A-004 3191A-005 3191B-007 3191B-010 3191B-032 3191B-033 3191B-034 3191B-035 3191B-038 3191B-039 3191B-040 3191B-044 3191C-002 3191C-003 3191C-005 3191C-006 3191C-007 3191C-008 3191C-010 3191C-011 3191C-012 3191C-013 3191C-016 3191C-018 3191C-021 3191C-022 3191D-001 3191D-002 3191E-001 3191E-002 3191E-003 3191E-005 3191E-006 3191E-009 3191E-010 3191E-012 3191F-003 3191F-006 3191F-008 3191F-011 3191F-012 3191F-013 3191F-014 3191F-016 3191F-017 3191F-020 3191F-021 3191F-041 3191G-001 3191G-002 3191G-003 AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER DESCRIPTION (X) SOL ACTUATOR (X) RIGHT ANGLE HEADR SAT (X) RIGHT ANGLE HEADER S (X) ASPIRATOR RETROFIT KIT (X) COVER CLOSED PCB CON (X) ASS'Y CST I/F CON B/D (X) BELT (X) BELT (X) BUTTON EM (X) ASS'Y BEARING CAST (X) BEARING SEALED (X) CARBON BRUSH (F.5AMP (X) DIODE BRIDGE (X) TEMP SNAP DISC (X) HEAT ELEMENT. HOT (X) ELBOW UNION 1/4" (X) ELBOW UNION 8MM (X) ELBOW UNION 12MM (X) ELBOW POMALE PIPE1/4" (X)HEAT EXCHANGER (X) ELBOW UNION 6MM (X) ELBOW UNION 10MM (X) FEMALE SUB-BODY (X) FEMALE SUB BODY (X) HOLDER FUSE (X) TIME DELAY FUSE FNQ2 (X) TIME DELAY DELAY FUSE FNQ3 (X) TIME DELAYE FUSE FNQ5 (X) TIME DELAY FUSE FNQ25 (X) TIME DELAY FUSE FNQ1 (X) TIME DELAY FUSE FNQ 1A (X) TIME DELAY FUSE (X) 1/8 NPT FITTING METAL (X) HEAT EXCHANGER FITTING (X) END CAP GASKET BOTTOM (X) END CAP GASKET TOP (X) GAUGE 100PSI LOCATION C-3-5 C-3-5 C-3-5 M-7-2-4 C-3-5 C-3-5 C-3-5 C-3-5 C-3-5 N-1-2-1 C-3-5 C-3-5 C-3-2 C-4-3-2 C-4-3-2 C-4-3-2 M-7-2-4 N-3-1-2.5 901066-001 290040-400 290027-400 300328-004 230047-001 901101-001 300010-006 230240-001 119-37-1A-0215 300888-001 300555-001 300482-008 403037-001 300527-001 290030-400 30466-001 BC4-2 600VAC 5AMP 900763-001 901735-001 300893-001 230063-001 230062-001 300511-001 230066-001 300414-002 UE4N UE8MN UE12MM PUE4 301975-001 UE6MN UE10MN 300897-001 300603-001 230067-001 FNQ 30A 300528-001 300379-006 401600-003 401601-003 300322-001 수량 6 20 10 2 4 1 1 3 2 1 4 8 10 1 5 6 1 3 7 2 2 21 2 1 16 2 1 2 13 7 2 9 5 10 7 1 10 10 13 10 8 2 5 2 7 1 2 2 1 6 4 4 2 LOC VENDOR AA33 AA33 AA33 AA33 AA33 AA33 AA33 AA33 AA33 AA33 AA33 AA33 AA33 AA43 AA33 AA33 AA33 AA33 AA33 T33 AA33 AA33 AA33 BB43 AA33 AA33 AA33 AA33 T31. D-3-1-2 C-4-3-2 C-2-5 M-7-4-1 M-7-2-3 M-7-4-1 M-7-2-3 C-2-4 M-7-4-1 M-7-2-3 L-10-7-1 L-10-5-2 L-10-4-1 L-10-5-2 L-10-5-2 L-10-5-2 L-10-5-2 L-10-5-2 L-10-5-2 L-10-5-2 L-10-5-2 L-10-5-2 M-2-2-1 M-2-2-1 VENDOR PART NO 300457-001 HIF3BA-50PA-2.75" PFA BILLET (X) DYLINDER AIR (X) CYLINDER COVER INTL (X) DP END CAP 1 1/2" (X) CAP HUV(NEW) (X) CYLINDER COVER (X) ASS'Y PC COVER OPEN CON (X) LOCK SGL BIT CAN (X) CNNECTOR BARD1/8" (X) FUSE (X) ASSY COVER (NEW)_ (X) CANISTER CAP SSEMBLY (X) COUPSING ACETAL 8 PORT (X) CIRCULT BREAKER 50 AMP (X) CIRCULT BREAKER 0. F-5-5 D-1-2-2 C-4-3-2 C-4-3-2 C-4-3-2 F-2-1 H-9-2 C-4-3-2 C-4-3-2.5 HIF3BA-34PA-2.AA33 AA33 AA43 AA34 AA34 AA34 AA34 AA43 AA34 AA34 AA34 AA34 AA34 AA34 AA34 AA34 AA34 AA34 AA34 AA34 AA34 AA34 AA32 AA32 AA32 FSI " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .

D 75 (3.54D (X) HIF 3BA-34PA-2.54DS (X) HANDLE CONCEALED (X) S/W WITH LAMP (HOT CON) (X) MAKE SUB-BODY (X) TEMP METR.8) (X) O-RING O.5) (X) O-RING O. COLD (X) MOTOR SPEED CONTROL (X) FLOW METER FOR H2 SO4 (X) FLOW METER FOR H202 HCL (X) FET MOTOR (X) FET MOTOR (X) ASSY PC TACH MOTOR (X) MOTOR 1 PPM 12V DC (X) MOTOR 1 PPM 12V DC (X) MOTOR (X) MOTOR SPEED CONTRO 10V (X) NUP PP (X) NIPPLE 1/2"-1/2" MNPT(SS H (X) NIPPLE 1/2"-1/2" MNPT(SS H (X) NIPPLE PIPE 1/4"X1/4 (X) NIPPLE PIPE 3/8"X3/8" (X) NIPLE PIPE 1/2"X3/8" (X) NIPPLE PIPE 1/2"X1/2" (X) O-RING O.D 65 (1.5) (X) O-RING O.5) (X) O-RING O.D 75 (3.D 40 (3.D 33 (3.No Item no 장비명 1570 1571 1572 1573 1574 1575 1576 1577 1578 1579 1580 1581 1582 1583 1584 1585 1586 1587 1588 1589 1590 1591 1592 1593 1594 1595 1596 1597 1598 1599 1600 1601 1602 1603 1604 1605 1606 1607 1608 1609 1610 1611 1612 1613 1614 1615 1616 1617 1618 1619 1620 1621 1622 3191G-004 3191G-005 3191G-006 3191G-009 3191H-006 3191H-007 3191H-008 3191H-009 3191H-012 3191L-001 3191M-001 3191M-004 3191M-005 3191M-006 3191M-007 3191M-009 3191M-010 3191M-011 3191M-012 3191M-012 3191M-013 3191M-014 3191N-004 3191N-005 3191N-005 3191N-006 3191N-008 3191N-009 3191N-010 3191O-004 3191O-005 3191O-006 3191O-009 3191O-010 3191O-011 3191O-012 3191O-013 3191O-014 3191O-018 3191P-003 3191P-004 3191P-005 3191P-007 3191P-009 3191P-011 3191P-013 3191P-014 3191P-015 3191P-017 3191P-019 3191P-022 3191P-023 3191P-025 AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER AUTO CLEANER DESCRIPTION (X) GAUGE 30 PSI (X) GAUGE CONT PLATE (X) SPRAY GUN (X) GAUGE 60 PSI (X) HIF 3BA-20PA-2.D 100 (3) (X) O-RING L365 (5) (X) O-RING L95 (1.8) (X) O-RING (X) PLASTICS CONNECTOR (X) PC CAN I/F CON (X) PUMP IMPELLER (X) PUMP BOASTER (X) COVER OPEN/CLOSE PANEL (X) PANEL START/STOP (X) UNION PIPE 1/2" (X) PLUG PIPE 1/4" (X) PLUG PIPE 1/2" (X) PHOTO COUPLER 4N37 (X) PIPE FITTING (X) TEMP PROBE (X) FRONT LOCATION VENDOR PART NO M-2-2-1 M-2-2-1 M-2-2-1 M-2-2-1 M-2-2-1 M-2-2-1 M-2-2-1 M-2-2-1 M-2-2-1 D-3-5-2 D-3-5-2 J-2-1-2 C-2-6 D-3-5-2 D-3-5-2 M-6-1-2 300562-001 280016-002 300514-001 WGP8-2 SY-CAT SY-CAT-3BA-20PA SY-CAT-3BA-34PA 300698-001 M-6-1-2 D-3-5-2 D-3-5-2 J-4-3-4 D-3-5-2 D-3-5-2 D-3-5-2 M-7-2-3 M-7-2-3 M-7-2-3 230058-001 FSI300893-001 2593 900180-001G 301178-001 300765-001 MGP20 N 45 9303309TN 902828-001 280010-001 280010-001 2368 230488-001 400815-001 300643-004 300643-004 N4-4 N6-6 N8-6 N8-8 300038-219 300038-226 300838-036 300038-241 300038-335 300038-261 300038-373 300038-034 M-6-1-2 H-9-2 H-9-2 H-9-2 1480-01-03 290033-400 300749-001 300647-001 401021-001 401022-001 PUB P4 P8 H-9-2 300429-001 402134-001 수량 1 1 1 2 10 25 10 10 1 1 1 1 1 1 1 5 1 17 1 1 1 1 10 5 20 20 8 2 3 2 2 2 4 2 1 3 2 3 10 10 1 3 1 6 6 1 2 2 1 38 28 2 1 LOC VENDOR AA32 AA32 AA32 AA32 AA32 AA32 AA32 AA32 AA32 AA35 AA35 T32 T24 AA35 AA35 T32 P32 T32 AA35 AA35 P32 T32 AA35 AA35 AA35 AA35 AA35 AA35 AA35 AA35 AA35 AA35 AA35 AA35 AA35 AA35 AA35 AA35 AA35 AA34 T32 AA34 BB15 AA34 AA34 AA34 AA34 AA34 AA34 T32 AA34 AA34 AA34 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " FSI " " " " " " " " " " " " .54DSA (X) HIF 3BA-20PA-2.5) (X) O-RING O.

G-2-4-4 E-3-3-2 E-3-3-2 H-9-2 H-9-2 H-9-2 E-3-2-2 E-3-3-2 E-3-3-2 L-12-3-2 L-4-5-1 L-12-3-2 L-12-3-2 K-3-4-2 K-3-4-2 K-3-4-2 B-4-2-3 VENDOR PART NO 300815-001 2197 2199 900497-001 300820-001 280026-003 280026-001 402460-003 300435-001 300837-001 SU6-4N SU8-6N SU12M-6MN SU12M-10MN 280012-002 230029-006 2747 230023-002 230130-001 230101-011 300541-001 400156-001 400157-001 401891-002 300783-001 900864-002 400961-001 230029-005 402461-001 402544-001 300712-001 500VAC 10AMP SU10MN LM6MN PM10MN PM12MN 901880-001 300667-009 400764-002 70913 73004-01 61104 10168-01 61510-03 6154004 3011280 23020001 4401030 240-L-075-U 4RK 25GN-A ABV162061 수량 10 12 12 2 1 4 1 15 1 1 25 8 4 10 30 2 17 5 10 1 1 10 7 6 15 30 5 3 4 2 2 15 2 25 22 20 30 8 1 10 2 1 2 1 8 1 2 3 1 1 2 1 5 LOC VENDOR AA35 AA35 AA35 AA34 AA35 T32 T32 AA35 AA35 AA35 AA34 AA35 B42 AA35 AA35 AA34 AA35 AA34 AA34 AA35 AA35 AA34 AA34 AA35 AA42 AA34 AA34 AA34 AA34 AA35 AA44 AA35 AA35 AA35 AA35 AA35 AA33 AA34 AA35 AA35 AA35 A94 A73 P33 A94 A94 Y16 C12 C12 C12 B74 P11 Q61 " " " " " " " " " " " " " " " " " " " " " " " " " " " " FSI " " " " " " " " " " " " SEMITOOL SEMITOOL " " " LOMONICS LUMONICS LOMONICS " NISSO SUMITOMO SUMITOMO . SPEED SENSOR 1646 3191S-010 AUTO CLEANER (X) POST-SPEED SENSOR 1647 3191S-012 AUTO CLEANER (X) SPRAY POST OLD 1648 3191S-016 AUTO CLEANER (X) SEAL SHAFT 1649 3191S-019 AUTO CLEANER (X) ASS'Y SHAFT REPL LABY 1650 3191S-020 AUTO CLEANER (X) MOUNT SENSOR 1651 3191S-023 AUTO CLEANER SWITCH PRESSURE 1652 3191T-001 AUTO CLEANER (X) PVC OPEN TOOL 1653 3191T-002 AUTO CLEANER (X) SHAFT REMOVE TOOL 1654 3191T-004 AUTO CLEANER (X) MINI CASSENTTE TAPE 1655 3191T-012 AUTO CLEANER (X) FUSE 1656 3191U-011 AUTO CLEANER (X) UNION STRALGHT 10MM 1657 3191U-013 AUTO CLEANER (X) UNION STRALGHT PANEL 6MM 1658 3191U-015 AUTO CLEANER (X) UNION STRALGHT PANEL 10 M 1659 3191U-016 AUTO CLEANER (X) UNION STRALGHT PANEL 12 M 1660 3191U-020 AUTO CLEANER (X) ASSY ROTARY UNION 1661 3191V-007 AUTO CLEANER (X) CHECK VALVE 1662 3191V-028 AUTO CLEANER (X) BRKT VALVE MOUNT 1663 3191W-005 AUTO CLEANER (X) HIF SOKET 20P REBON WIRE 1664 3192A-001 SPIN DRYER (Y)SWITCH PNEU W/ROLLER ARM 1665 3192H-001 SPIN DRYER HTR IMRSN 2000W 1666 3192M-001 SPIN DRYER (Y)MOTOR 1/3HP 3000RPM WXP PR 1667 3192N-001 SPIN DRYER (Y)NOZZLE WATER MODIFIED SS 1668 3192S-002 SPIN DRYER (Y)SWTCH PRESS ADJ 1669 4111A-003 LASER MARKER (Y)COOLING ASSEMBLY 1670 4111C-004 LASER MARKER (Y)REFLECTOR CYLINDE 1671 4111S-001 LASER MARKER (Y)VACUUM SOLENOID SWITCH 1672 4111V-001 LASER MARKER (Y)SOLENOID VALVE.040.I 1626 3191R-004 AUTO CLEANER (X) ROTARY UNION OLD 1627 3191R-006 AUTO CLEANER (X) REGULATOR CAN PR 1628 3191R-007 AUTO CLEANER (X) RELAY AC 24V 1629 3191R-008 AUTO CLEANER (X) RELAY AC 100V 1630 3191R-009 AUTO CLEANER (X) WELD RET ROD 1631 3191R-010 AUTO CLEANER (X) PROBE RESISTIVITY 1632 3191R-011 AUTO CLEANER (X) REGULATOR 0-100 PSI 1633 3191R-013 AUTO CLEANER (X) UNION STRAOGJT REDIC 1634 3191R-015 AUTO CLEANER (X) UNION STRALGHT REDUC 1635 3191R-016 AUTO CLEANER 1636 3191R-018 AUTO CLEANER (X) UNION STRALGHT REDUC 1637 3191R-019 AUTO CLEANER (X) UNION STRALGHT REDUC 1638 3191R-020 AUTO CLEANER (X) RELAY MARCURY 60AMP 1639 3191S-002 AUTO CLEANER (X) PRESSURE S/W 1640 3191S-003 AUTO CLEANER (X) PRESSURE S/W HOT SQ 1641 3191S-004 AUTO CLEANER (X) DOOR INTL S/W HOT 1642 3191S-006 AUTO CLEANER (X) BRACKER SWITCH 1643 3191S-007 AUTO CLEANER (X) PRESSURE S/W HOT SQ 1644 3191S-008 AUTO CLEANER (X) SWITCH INTERLOCK COVER 1645 3191S-009 AUTO CLEANER (X) BRKT. 1624 3191R-002 AUTO CLEANER (X) RUBBER SEAL 53.030.030 I 1625 3191R-003 AUTO CLEANER (X) ARUBBER SEAL T3.24V 1673 4121B-002 CASSETTE CLEANER (Y)TIMMING BELT 1674 4122M-005 CASSETTE CLEANER (Y)REVERIBLE MOTOR 1675 4122S-015 CASSETTE CLEANER (Y)LIMIT SENSOR LOCATION J-2-3-2 L-11-4-3 H-9-2 M-7-2-3 M-7-2-1 M-7-2-3 M-7-2-3 G-2-4-3 D-3-5-2 G-2-4-3 G-2-4-3 E-3-3-2 G-2-4-3 G-2-4-3 E-3-3-2 C-2-4.No Item no 장비명 DESCRIPTION 1623 3191R-001 AUTO CLEANER (X) RUBBER SEAL T3.3-WAY.

No 1676 1677 1678 1679 1680 1681 1682 1683 1684 1685 1686 1687 1688 1689 1690 1691 1692 1693 1694 1695 1696 1697 1698 1699 1700 1701 1702 1703 1704 1705 1706 1707 1708 1709 1710 1711 1712 1713 1714 1715 1716 1717 1718 1719 1720 1721 1722 1723 1724 1725 1726 1727 1728 Item no 장비명 DESCRIPTION 4141B-011 CASSETTE CLEANER (Y)BAFFLE PLATE 1 4142A-002 WET STATION (X)FIBER AMP 4142A-004 WET STATION (Y)AIR VALVE(1/2)(PV (Y)(C)ALARMER 4142A-009 WET STATION 4142A-023 WET STATION (X)ROTARY ACTUATOR 4142B-009 WET STATION (Y)BUSHING PLUNGER 4142B-021 WET STATION (Y)BEARING POSITIONE 4142B-031 WET STATION (Y)(R)LEVEL BOARD 4142B-032 WET STATION (Y)OVER SPEED BOARD 4142B-055 WET STATION (Y)TIMING BELT 4142B-056 WET STATION (Y)TIMING BELT 4142C-005 WET STATION (Y)CYLINDER DOOR AIR 4142C-006 WET STATION (Y)SPEED CONTROLLER 4142C-013 WET STATION (Y)(C)TEMP CONTROLLE 4142C-019 WET STATION (Y)FLOW CHECKER 4142C-024 WET STATION (Y)(C)TEMPERATURE CO 4142C-025 WET STATION (Y)(C)TEMPERATURE CO 4142C-071 WET STATION (X)CABLE KEY PAD 6M 4142C-072 WET STATION (X)CABLE R102-R105 3 4142C-073 WET STATION (X)CABLE POWER R111 4142C-074 WET STATION (Y)CABLE AUX3 3. H-8-3 H-10-2 L-6-1-1 M-7-2-1 C-3-3 J-5-3 J-5-2 D-11-1 L-4-4-3 L-4-4-3 L-6-1-1 L-6-1-1 J-2-2-2 L-6-1-1 L-6-1-1 L-6-1-1 L-12-3-2 L-12-3-2 수량 2 1 2 1 4 8 2 2 2 1 1 1 2 1 2 1 2 1 1 1 1 4 4 4 1 3 1 3 3 2 3 3 1 4 1 1 1 2 4 1 3 2 4 1 1 1 4 1 3 3 3 3 1 LOC VENDOR B92 C33 A34 R22 A34 A94 A94 A43 A34 A34 A34 A34 A34 A34 A34 A43 A34 A34 B71 B71 A34 B43 B43 B43 A42 A36 A35 B74 Y14 B43 A35 A35 B43 W23 A42 B41 Y14 A43 A43 A35 A35 C34 A35 A35 A35 A41 A94 A43 A94 A94 A94 A94 A94 " SANKYO " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " SANKYO " " " " " " " " SANKYO " " " " " .5) CZ41710-B4 K2CU-F40A-E.HEXAGON 4142O-001 WET STATION (Y)O-RING 4142O-003 WET STATION (Y)O-RING 4142O-004 WET STATION (Y)O-RING 4142O-006 WET STATION (Y)O-RING VITON LOCATION VENDOR PART NO I-2-2 K-4-1-1 L-3-1-3 B-2-4 L-3-1-3 L-12-3-2 L-12-3-2 I-4-2 L-4-5-2 L-4-5-2 L-4-5-2 L-4-5-2 L-4-5-2 B-2-3 L-4-5-2 B-2-1 Q'TZ 1 FIR(FA4.5m 4142D-001 WET STATION (Y)SAME P/N 4142G-00 4142D-002 WET STATION (Y)DISK OUTER N2 SEAL 4142D-003 WET STATION (Y)DISK INNER N2 SEAL 4142D-009 WET STATION (Y)(N)DOOR DRIVE ASS 4142D-011 WET STATION (Y)SAME P/N 4142S-00 4142E-001 WET STATION (Y)CAP DRAIN CORE EL 4142F-015 WET STATION (X)FUSE 4142F-016 WET STATION (Y)FAN 4142F-018 WET STATION (Y)FILTER(N2) 4142F-019 WET STATION (Y)FILTER 4142G-001 WET STATION (Y)GEAR HEAD 4142G-002 WET STATION (Y)GASKET MANIFOLD 4142G-006 WET STATION (Y)ROBOT LM GUIDE 4142H-004 WET STATION (Y)HEATER N2 ASSY 4142H-013 WET STATION (X)HOOK(L=357) 4142H-019 WET STATION HEATER ELEMENT 4142H-020 WET STATION (Y)RUBBER HEATER 4142H-021 WET STATION (Y)RUBBER HEATER 4142I-002 WET STATION (Y)INVERTOR 4142K-001 WET STATION (Y)KEY MOTOR SUS316 4142L-011 WET STATION (Y)PILOT LAMP 4142M-001 WET STATION (Y)RESISTIBLE MONITO 4142M-004 WET STATION (Y)VALVE MANIFOLD N2 4142M-011 WET STATION (Y)FLOW METER 4142M-022 WET STATION (Y)SERVO MOTOR 4142M-023 WET STATION (Y)FITTING AIR MOTOR 4142M-024 WET STATION (Y)AC SERVO MOTOR 4142N-031 WET STATION (Y)NUT. RAP20-115-44 PA4-2023-000 1073457-1 H-Q-P-1 PA4-0640-000 R1032030101 RN640170161 4119924 SS-21M E5C2-R20K(TC5) FE-SD70-TR E5ZD-4A02KJ E5C3-WR20K AC100 1067763-529 1072134-144 1072144-144 1072143-144 1072001-1 1072001-2 1072002-1 1072301-1 SUV 24E 1072033-1(PA4-20 PA4-9001-000 BF-19 DTC RT9-0032-000 CWUZOS0S3 3GN15K 1072587-1 ABFT045615 1073259-1 DTZ210115-2 AEHT144301-2 #ACCT-162102 #ACCT-162103 FR-U120-0.7K 1063664-1 UPQS 1B 26N-W 871CCA2 4120786(PG4-0614 P-500-20A HA-SC(HEADLESS) 4120213 R0851330301 4119500 4120203 4119932 4119937 4119927 N-2-3-2. N-7-1 N-2-1-4 N-2-1-4 L-4-2-2 L-6-1-1 I-8-1.

FLAT HEAD (Y)METAL SUPPORTER (Y)FIBER SENSOR (Y)HEAT SENSOR (Y)(C)PRESSURE SWITC (Y)MANOSTER SWITCH (Y)ROBOT SHAFT (Y)SHAFT DRIVEDOOR (Y)MANOSTAR SWITCH (Y)OPERATOR PUSHBUTT (Y)PUSH SWITCH (Y)PUSH SWITCH (Y)PUSH SWITCH (Y)SEAL 8200 SILICON (Y)POWER SUPPLY ( DC (Y)COLLAR TUBE PIVOT IPA QUARTZ TRAY (Y)TIMER 0.5-10S (Y)SAME P/N 4142T-02 (Y)4 TRANSFORMER (Y)JOINT UNIT(MITSUB (Y)A/D UNIT(MITSUBIS (Y)SOLENOIDE VALVE (Y)SOLENOIDE VALVE (Y)STOP VALVE (Y)STOP VALVE (Y)BALL VALVE LOCATION K-3-1-1 L-7-2 G-1-4 K-4-1-1 K-5-3-3 K-4-1-1 K-4-1-1 K-4-1-1 K-4-1-1 K-3-4-3 L-6-1-1 K-3-1-1 L-12-3-2 K-3-1-1 L-12-3-2 K-3-1-1 K-4-1-1 N-2-1-2 L-12-3-2 K-3-1-1 N-8-2-2 K-3-1-1 L-12-3-2 N-8-2-2 B-2-5-2 L-12-3-2 L-12-3-2 K-3-1-1 K-4-1-1 B-2-3 K-3-1-1 E-2-1 N-2-5-2.No Item no 장비명 1729 1730 1731 1732 1733 1734 1735 1736 1737 1738 1739 1740 1741 1742 1743 1744 1745 1746 1747 1748 1749 1750 1751 1752 1753 1754 1755 1756 1757 1758 1759 1760 1761 1762 1763 1764 1765 1766 1767 1768 1769 1770 1771 1772 1773 1774 1775 1776 1777 1778 1779 1780 1781 4142P-005 4142P-012 4142P-021 4142R-001 4142R-002 4142R-003 4142R-004 4142R-005 4142R-006 4142R-007 4142R-021 4142S-013 4142S-014 4142S-016 4142S-018 4142S-019 4142S-020 4142S-023 4142S-026 4142S-027 4142S-028 4142S-029 4142S-034 4142S-036 4142S-037 4142S-044 4142S-045 4142S-048 4142S-050 4142S-055 4142S-060 4142S-061 4142S-071 4142S-073 4142S-074 4142S-082 4142S-084 4142S-085 4142S-086 4142S-096 4142S-100 4142T-010 4142T-017 4142T-024 4142T-026 4142T-027 4142U-004 4142U-005 4142V-001 4142V-005 4142V-016 4142V-017 4142V-018 WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION DESCRIPTION (Y)POWER SUPPLY.7A PG4-0162-000 1072416-1 1072281-1 KML50-2C-A 1072292-1 1074583-1 1004783 FR-20 4119945(PA4-2025 PA4-0978-000 PA4-0977-000 PA4-0979-000 1069144-3(PA4-20 SCL-1(SC1) A3PJ-703 4119389 PA4-1537-000 FU715BC FFH-1EV E8BW-10C MS-61L-VT RS-8527 1072011-3 SM65L-VRL 1072766-1 A3PJ5736-24E(G/G A3PJ5703-24E(G) A3PJ5706-24E(O) PA4-2153-000 EWS-300-24 1072304-1(PA4-20 P-AN0501-24-3 AD 6052(T1) 14748 CAP. CYLINDER UNI (Y)SENSOR MAGNET (Y)PLATE DOOR SENSOR (Y)SENSOR(CKD) (X)SCREW ACTUATOR (Y)SENSOR DOOR (Y)SWITCH PRESSURE (Y)(C)FIBER SENSOR ( (X)SPRING (X)C ROTOR SCREW PIL (X)C ROTOR SCREW PIL (X)SCREW ROTOR PILOT (Y)SCREW ROTOR ALLON (Y)SPEED CONTROLLER (Y)(C)PUSH SWITCH(10 (X)SCREW (X)SCREW.300VA UA-HZ12 A68ADN 10-4E1-PLL-DC24V 110-4E1-J42-PLL DC24V PSSP-M19A PSSP-M6A 32(1 1/4) 1 1 1 1 1 5 5 5 5 3 2 6 8 3 2 3 1 3 2 4 4 4 3 1 1 2 2 4 6 4 1 2 2 2 2 1 5 5 3 2 1 3 1 1 1 1 3 2 1 1 1 1 1 LOC VENDOR A35 A33 A36 C33 C34 C33 C33 C33 C33 C33 A35 A35 A94 A35 A94 A35 C33 W15 A94 A35 B36 A35 A94 B36 R21 A94 A94 A35 W15 C33 A35 A35. M-5-1-3 B-2-3 B-2-3 B-2-3 N-7-1 K-5-3-3 I-1-2 K-4-1-1 K-5-3-3 K-5-3-3 L-4-2-2 K-4-3-3 K-4-3-3 K-4-3-3 K-4-3-3 N-2-3-2 VENDOR PART NO 수량 EWS25-5 1072418-1(PG41072015-1 USK30 DDTE AP3125K(R1) AP3124K(R2) AP3242 AP3222K(R3) TH-K12AB-1.W15 B15 B33 W24 C43 R21 R21 R21 B61 W24 C34 B103 C33 C34 C33 C34 A36 A33 A33 A33 A33 B43 " SANKYO " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .DC 5 (Y)(N)BOX AC POWER (Y)HOT PLATE (X)RETAINER ROTATOR (Y)SOLID STAY RELAY (Y)RELAY AC200V-2C (Y)RELAY AC100V-2C (Y)RELAY DC24V-4C (Y)RELAY DC24V-2C (Y)RELAY (Y)ROD.

Y13 3 C53.Y14 3 P15 1 C52 2 Y26 2 Y25 2 P13 2 P12 4 C52 3 A94.5KW ORK1GK-A3 3RK15GN-AM FTF-1/2V F7-03E 106923-8 MY2N AC200V MLPS-11110 MLPS-11111 VV5F3-50-024-02 VV5F3-50-024-02 SBR501 H-9-3 I-1-3 I-1-2 L-5-1-1 L-5-1-1 S5M-20MM-2800MM S5M-20MM-2300MM 270XL025U 114XL025U T5-10-88 325P5M10 440P5M10 MHP00070 MHP00071 STC-40FP11-8 PEX-F400 E5C3-WR20K 수량 LOC 2 B36 1 A33 1 B43 1 B43 2 R31 2 R31 1 C33 1 A33 3 B36 3 C46 1 Y13 4 A94 6 A94 2 A94 1 B91 2 B74 2 C52 1 W15 13 B95 1 B95 1 B93 9 Y13 1 Y15 8 B104.BOE BATH(PTFE) (Y)SOLID SLEEV BEARING (Y)SOLID SLEEV BEARI (Y)SOLID SLEEV BEARI (Y)N2 BUBBLER (Y)S/D BELT (Y)AIR CYLINDER (Y)AIR CYLINDER (R)Q'TZ ROBOT CHUCK (R)Q'TZ ROBOT CHUCK (Y) ROBOT CHUCK(PEEK) S/D HEAP FILTER (Y)WAFER GUIDE (S/D) GEAR HEAD (Y)IONIZER (Y)MOTOR CONTROLLER (Y)S/D MOTOR (Y)REVERSIBLE MOTOR (Y)REVERSIBLE MOTOR (Y)CHECK VALVE (Y)WAFER HOLDING PIP (Y)ROBOT CHUCK SPEEK (Y)MINI POWER RELAY( LEVEL SENSOR LEVEL SENSOR (Y)FIRE SWITCH (Y)SOLENOIDE VALVE (Y)SOLENOIDE VALVE (Y)BREAK PACK (Y)HF BOE BATH (Y)TIMING BELT (Y)TIMING BELT (Y)TIMING BELT (Y)TIMING BELT (Y)TIMING BELT (Y)TIMING BELT (Y)TIMING BELT (Y)Q'TZ ROBOT CHUCK( (R)Q'TZ ROBOT CHUCK( (Y)TEMP.No Item no 1782 4142V-026 1783 4142V-029 1784 4142V-032 1785 4142V-033 1786 4142V-034 1787 4142V-036 1788 4142V-045 1789 4142V-047 1790 4142W-001 1791 4142W-002 1792 4143B-006 1793 4143B-042 1794 4143B-043 1795 4143B-044 1796 4143B-046 1797 4143B-048 1798 4143C-004 1799 4143C-005 1800 4143C-011 1801 4143C-011 1802 4143C-013 1803 4143C-015 1804 4143F-001 1805 4143G-002 1806 4143G-010 1807 4143I-001 1808 4143M-006 1809 4143M-007 1810 4143M-011 1811 4143M-012 1812 4143P-008 1813 4143P-017 1814 4143R-005 1815 4143R-011 1816 4143S-048 1817 4143S-049 1818 4143S-050 1819 4143V-018 1820 4143V-018 1821 4144B-008 1822 4144B-012 1823 4144B-015 1824 4144B-016 1825 4144B-017 1826 4144B-018 1827 4144B-019 1828 4144B-021 1829 4144B-022 1830 4144C-001 1831 4144C-002 1832 4144C-005 1833 4144C-007 1834 4144C-008 장비명 WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION DESCRIPTION (Y)VALVE FLOW CONTRO (Y)AIR VALVE (Y)SAME P/N 4142V-03 (Y)VALVE (Y)(C)VALVE(4996V-28 (Y)(C)VALVE(4996V-28 (Y)SOLENOID VALVE (Y)NON-RETURN VALVE (X)WELDMENT GUIDE CA (Y)HALOGEN LAMP HEAT (Y)HF.CONTROLLER LOCATION VENDOR PART NO N-8-2-2 K-4-3-3 N-2-3-2 4120204 AV-7. H-10-1 K-4-4-1 K-4-4-1 H-5-3 K-7-2 N-2-5-1 K-4-4-1 K-4-4-1 L-6-2-1 L-3-2-2 IL 600LP 106956-A 4GN25K 9375010 SC3000 MAL 6133A4P 5. D-12-3 N-2-5-1 I-1-2 I-1-2 I-1-2 D-10-1 I-1-1.Z19 4 W15 1 C52 1 C52 6 C42 5 B81 3 B81 2 P14 1 Y13 4 B74 4 B74 3 B74 3 B74 3 B74 5 B74 5 B74 5 B93 2 B93 1 C53 1 C53 1 R21 VENDOR " " " " " " " " " " KAIJO KAIJO " " " " " " " " " " " " " " " " KAIJO " " " " " " " " " " SUGAI " " " " " " " " " " " " " .8.CONTROLLER (Y)TEMP.CONTROLLER (C)TEMP.9 15(1/2) TS15(1/2) AMD53-25US-22 AMD53-25US-22-Y BMF6-50-1 A-058122 1072303-1(PA-202 01RZ 208-2125 107O97 AR1715-LD ARF1720LD R-ARF0910 F7-01E 395L9 MDA20 100-140W TDA6 20 106923-A 106923-A K-3-4-3 K-4-3-3 N-8-2-2 H-9-3 L-12-3-2 L-12-3-2 L-12-3-2 I-4-2 K-2-2.Z19.

C ASSY BOARD ASS'Y GOLD EVAPORATOR (X) PCB REGULATOR GOLD EVAPORATOR (X) ASS'Y PCB TG & PC OPTION GOLD EVAPORATOR (X) PCB TRANSDUCTOR AMP GOLD EVAPORATOR (X) REGULATOR PCB GOLD EVAPORATOR (X) POTS HV CONTROL PCB GOLD EVAPORATOR (X) POTS LAT SWEEP PCB GOLD EVAPORATOR (X) CHA HV PANEL PCB GOLD EVAPORATOR (X) POWER PANEL ASSY PCB GOLD EVAPORATOR (X) POTS LONG SWEEP CONTRO PC GOLD EVAPORATOR (X) POTS GUN CONTROL PCB GOLD EVAPORATOR (X) CIRCUIT BREAKER (15A 250V GOLD EVAPORATOR (X) IRCUIT BREAKER (10A 250V) GOLD EVAPORATOR (X) CIRCUIT BREAKER 5A 250V GOLD EVAPORATOR (X) CIRCUIT BREAKER 3A 250V GOLD EVAPORATOR (X) MOUNTING BAR GOLD EVAPORATOR (X) CIRCUIT BEAKER (DIFF PUMP GOLD EVAPORATOR (X) BEARING FOR PLANEAR GOLD EVAPORATOR (X) BEARING RETAINING SNAP RI GOLD EVAPORATOR (X) BEARING INNER RACE OFFSET LOCATION N-7-2-3 I-2-2 B-4-3-3 H-1-1 I-3-3 B-2-3 B-2-3 M-6-2-4 M-6-2-4 N-2-5-1 J-5-2 L-5-1-1 L-5-1-1 K-7-3-2 K-5-1-4 H-9-2 J-2-2-1 K-7-3-2 L-6-1-3 L-11-3-3 C-4-1-4.No Item no 1835 1836 1837 1838 1839 1840 1841 1842 1843 1844 1845 1846 1847 1848 1849 1850 1851 1852 1853 1854 1855 1856 1857 1858 1859 1860 1861 1862 1863 1864 1865 1866 1867 1868 1869 1870 1871 1872 1873 1874 1875 1876 1877 1878 1879 1880 1881 1882 1883 1884 1885 1886 1887 4144C-011 4144C-022 4144G-006 4144G-007 4144L-001 4144M-001 4144M-002 4144P-013 4144R-011 4144R-012 4144S-003 4144S-004 4144S-019 4144V-010 4144V-013 4144V-014 4146C-001 4146C-002 4146F-002 4146F-003 4146P-001 4146T-002 3201B-032 3201B-042 3201B-108 3201B-111 3201B-112 3201B-124 3211A-003 3211B-001 3211B-002 3211B-002 3211B-005 3211B-006 3211B-007 3211B-008 3211B-010 3211B-013 3211B-014 3211B-016 3211B-017 3211B-018 3211B-020 3211B-021 3211B-031 3211B-032 3211B-033 3211B-034 3211B-035 3211B-036 3211B-051 3211B-052 3211B-054 장비명 DESCRIPTION WET STATION (Y)AIR CYLINDER WET STATION (Y)COOLING COIL WET STATION (Y)FR BATH GUIDE WET STATION (Y)QDR BATH BUBBLE G WET STATION (Y)LAMP WET STATION AC SERVO MOTOR WET STATION R88M-U20030L-BS1 WET STATION (Y)PUNCHING PLATE (C)REMOTE TERMINAL WET STATION WET STATION REMOTE TERMINAL WET STATION PHOTO SENSOR WET STATION (C)SENSOR AMP WET STATION PHOTO SENSOR WET STATION (Y)VALVE WET STATION (Y)SOLENOID VALVE WET STATION (Y)SOLENOID VALVE WET STATION (Y)VACUUM PRESSURECO WET STATION (Y)OUTLET PRESSURECO WET STATION (Y)LIQUID FILTER ELE WET STATION (Y)LIQUID FILTER ELE WET STATION (Y)VACUUM PUMP WET STATION (Y)CONTROL THERMOMET WET STATION (Y)5"OUTPUT CONTROL WET STATION (Y)5"PCB FRONT PANEL WET STATION 5"BELLOWS ASSY SST WET STATION 5"BRACKET X-FER PLAT WET STATION 5"BRACKET X-FER PLAT WET STATION 5"BEARING GOLD EVAPORATOR (X) MOTOR DRIVEN RIGHT ANGLE GOLD EVAPORATOR (X) PCB LONGTUDNAL FOCUS GOLD EVAPORATOR (X) REPLACEMENT P.C. M-1-3-2 C-4-1-4.B GOLD EVAPORATOR REPLACEMENT P. M-1-3-2 C-4-1-4 M-1-3-2 C-4-1-4 M-1-3-2 M-1-3-2 M-1-3-2 G-2-6-1 G-2-6-1 G-2-6-1. GOLD EVAPORATOR (X) PCB E/GUN CONTROL GOLD EVAPORATOR (X) P.Y12 C47 U11 U11 U11 U11 U11 U11 AA61 T52 T52 AA61 T52 T52 T52 T52 T43 T52 T43 T52 T52 T52 T52 T52 AA61 AA61 T52 T52 AA61 T52 AA61 AA61 AA61 " " " " " " " " " " " SUGAI " " " " MITSUBISHI " " " " " " " " " " " CHA CHA CHA CHA CHA CHA CHA CHA CHA CHA " CHA CHA CHA CHA CHA " " CHA CHA " CHA " " " . M-1-3-2 M-1-3-2 M-1-3-2 M-1-3-2 M-1-3-2 C-4-1-4.C.5KW R88M-U10030L-G11BJ RK-10P004 G71 G72C-VID16 FD-P40 PS2-61 FD-P40 AV-350-21V5D VQ1301Y-5 VVQ1000-10A-1 KD41 KJ15-634 AB04F00023H1 CS09YF VP-SVJ-A-310A EB3A-27303 00-666291-00 00-680749-00 953-0118 00-674488-00 00-674668-00 21-109605-00 FT58-026 0407-3870-0 SN-2-5-K SN-2-5-K 0408-0840-0 0407-3980-0 0305-7684-0 6101-003 0307-1300-2 C9772 C9788 C9780 C9768 C9776 C9784 C9792 6157-1571 6157-8700 6157-1574-0 6157-1576 0204-0312-0 6157-7199-0 VBDD375875281B N5100-37H IR68 수량 2 1 1 1 7 1 1 1 1 2 3 2 2 2 5 5 1 1 5 10 2 1 1 1 3 1 1 20 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 10 3 3 1 50 10 2 LOC VENDOR R52 B94 B94 B94 C44 P53 P53 B94 R11 R11 R63 R63 W15 C72 C53 C53 C45 C45 B55 B55 C45. M-1-3-2 M-1-3-2 M-1-3-2 M-6-4-1 M-6-4-1 VENDOR PART NO MGQL50-75-Z73 Z-AQ0590-101-3 6H206AGB 6H206AGA 1Q 200V 1.

005 MFD.No Item no 1888 1889 1890 1891 1892 1893 1894 1895 1896 1897 1898 1899 1900 1901 1902 1903 1904 1905 1906 1907 1908 1909 1910 1911 1912 1913 1914 1915 1916 1917 1918 1919 1920 1921 1922 1923 1924 1925 1926 1927 1928 1929 1930 1931 1932 1933 1934 1935 1936 1937 1938 1939 1940 3211B-055 3211B-056 3211B-058 3211B-059 3211B-060 3211B-064 3211B-065 3211B-068 3211B-069 3211B-070 3211B-073 3211C-002 3211C-005 3211C-006 3211C-007 3211C-008 3211C-009 3211C-010 3211C-012 3211C-013 3211C-014 3211C-016 3211C-018 3211C-020 3211C-021 3211C-022 3211C-022 3211C-024 3211C-025 3211C-030 3211C-032 3211C-034 3211C-034 3211C-039 3211C-046 3211C-050 3211C-052 3211D-002 3211D-005 3211D-006 3211D-007 3211D-008 3211D-009 3211D-011 3211D-012 3211D-018 3211D-019 3211D-021 3211D-022 3211D-024 3211D-025 3211D-028 3211D-035 장비명 DESCRIPTION GOLD EVAPORATOR (X) BEARING NEEDLE OFFSET DRI GOLD EVAPORATOR (X) BEARING PLANETARY HUB ASSY GOLD EVAPORATOR (X) BEARING HOUSING GOLD EVAPORATOR (X) BEARING RETAINER GOLD EVAPORATOR (X) BEARING SHIM GOLD EVAPORATOR (X) TEFLON BUSHING GOLD EVAPORATOR (X) BESTIBULE BLOCK GOLD EVAPORATOR (X) MOUNTING BAR GOLD EVAPORATOR (X) T.R (2N3055) GOLD EVAPORATOR (X) 120XL037 BROWNING BELT GOLD EVAPORATOR (X) MINIATURE LAMP BULBS GOLD EVAPORATOR (X) COMPLETE FILL SYSTEMS GOLD EVAPORATOR (X) CLOCK CARD GOLD EVAPORATOR (X) END ZONE JPRE-AMP CARD GOLD EVAPORATOR (X) END ZONE PRE-AMP CARD GOLD EVAPORATOR (X) POWER SUPPLY CARD GOLD EVAPORATOR (X) OP-AM CARD GOLD EVAPORATOR (X) ZERO CROSSOVER FIRING CAR GOLD EVAPORATOR (X) GAUGE CABLE ASSY GOLD EVAPORATOR (X) THERMO GAUGE CABLE ASSY GOLD EVAPORATOR (X) PCB CPMMECTOR GOLD EVAPORATOR (X) COAXLAL CABLE ASSY GOLD EVAPORATOR (X) CAPACITOR.25K GOLD EVAPORATOR (X) FILAMENT CLAMP GOLD EVAPORATOR (X) COIL ASSY GOLD EVAPORATOR (X) R.H BLOCK CATHODE GOLD EVAPORATOR (X) R.H BLOCK CATHODE GOLD EVAPORATOR (X) CRYSTAL LABER GOLD EVAPORATOR (X) U-CLIPS HOLDS DOMES TOSUP GOLD EVAPORATOR (X) CAPACITOR (CS4107) GOLD EVAPORATOR (X) BOREMAN CLIP LEFT GOLD EVAPORATOR (X) TEMP CONTROLLER GOLD EVAPORATOR (X) TEMP CONTROLLER GOLD EVAPORATOR (X) SPACE CRUCIBLE & COVER GOLD EVAPORATOR (X) TEMPERATURE CONTROLLER GOLD EVAPORATOR (X) RETAINING RING (SPRING CL GOLD EVAPORATOR (X) CRUCIBLE CBAIN GOLD EVAPORATOR (X) SCR (IN2974) GOLD EVAPORATOR (X) DIODE BRIDGE GOLD EVAPORATOR (X) DIODE (IN 4722) GOLD EVAPORATOR (X) DIODE (IN 47040) GOLD EVAPORATOR (X) DIODE (IN 4735) GOLD EVAPORATOR (X) DIODE (IN750) GOLD EVAPORATOR (X) DIODE (IN5341) GOLD EVAPORATOR (X) DIODE (IN4741) GOLD EVAPORATOR (X) DIODE GOLD EVAPORATOR (X) DIODE GOLD EVAPORATOR (X) U-CLIP GOLD EVAPORATOR OFFSET DRIVE GOLD EVAPORATOR (X) DETENT SCREWS OFFSET DRIV GOLD EVAPORATOR (X) SUBSTRATE DOME 5" GOLD EVAPORATOR (X) DIFFUER COPPER GOLD EVAPORATOR (X) DIODE LOCATION M-6-4-1 M-6-4-1 M-6-4-1 M-6-4-1 J-3-3 D-1-4-1 C-4-1-4 D-1-4-1 C-4-1-4 C-4-1-4 D-1-4-1 D-1-4-1 D-1-5-2 VENDOR PART NO B98 VB-DD-1062 6311-6 6311-17 6311-9 6150 113781-001 0204-0322-0 6823-0550-0 SR10-353250 LC-2/6175 06-262-12 06-262-09 06-262-08 06-262-05 06-262-06 06-262-42 4987-004 260040-100 KEELCC 06-099 007-044 6505-9381-0 0303-9382-0 0312-6923-0 0303-9372-0 0303-9372-0 6475 0307-7293-0 2L 523C-40110-030 523C-40110-030 598A-0110-310-2 5108-106H M-5-2-2 M-5-2-2 M-1-3-2 6812-9742-0 6842-8193-0 6814-7220-0 6814-7400-0 6847-0062-0 6810-7500-0 6815-3411-0 6814-7411-0 SR10-1N750A SR10-1N5341 6709 EF75-024 ADB-50785 M-5-2-2 M-5-2-2 ASP-2 SR10-1N5340 M-5-2-2 M-5-2-2 M-5-2-2 M-5-2-2 M-5-2-2 M-5-2-2 M-5-2-2 M-5-2-2 수량 2 3 2 1 2 4 2 4 1 2 30 1 2 2 2 2 2 2 1 1 5 2 6 9 1 1 1 1 5 2 10 1 1 2 1 10 1 5 1 1 1 1 1 1 1 1 1 100 1 8 3 2 1 LOC VENDOR AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 T43 T43 T43 T43 T43 T43 T43 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA62 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 T52 AA61 AA61 AA61 " " " " " " " " " " " CHA CHA CHA CHA CHA CHA CHA " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " CHA CHA " " " . 0.

POLE GOLD EVAPORATOR (X) SPARE EMITTER ASSY GOLD EVAPORATOR (X) EXTENDED THUMB NUTS EMITT GOLD EVAPORATOR (X) SIEVE TRAP HEATER CARTRIDE GOLD EVAPORATOR (X) SIEVE TRAP HEATER CARTRIDE GOLD EVAPORATOR GOLD EVAPORATOR (X) BUIB 6V 0.B ASSY GOLD EVAPORATOR (X) LATCH ASS'Y GOLD EVAPORATOR (X) MOTOR CONTROL GOLD EVAPORATOR (X) ROTATOR MOTER GOLD EVAPORATOR (X) METER THERMOGAUGE GOLD EVAPORATOR (X) METER ION CURRENT GOLD EVAPORATOR (X) HEX NUT GOLD EVAPORATOR (X)O-RING(3997O-206) GOLD EVAPORATOR (X) O-RING GOLD EVAPORATOR (X) O-RING LOCATION D-1-5-2 M-5-2-2 M-5-2-2 M-5-2-2 M-5-2-2 M-5-2-2 M-5-2-2 M-5-2-2 VENDOR PART NO 5935-004 0412-1471-0 0412-1471-0 7638-3 SC373 SC373 M-5-2-2 4490-100 M-5-2-2 4491-100 M-5-2-2 4492-100 G-2-6-1 17-7011 M-1-3-2 G-2-6-1. LOCATINS GOLD EVAPORATOR (X) INSULATOR H.C.08A GOLD EVAPORATOR (X) BUIB 28V 0.04A GOLD EVAPORATOR (X) 12T HI-SPEED FUSE GOLD EVAPORATOR (X) FUSE KIT GOLD EVAPORATOR (X) FUSE 100A/250VAC GOLD EVAPORATOR GOLD EVAPORATOR (X) LEAD FILAMENT GOLD EVAPORATOR (X) LEAD FILAMENT GOLD EVAPORATOR (X) SOURCE FILAMENTS GOLD EVAPORATOR (X) FEEDTHROUGH MULTIPURPOSE GOLD EVAPORATOR (X) FEEDTHROUGH SHIELD GOLD EVAPORATOR (X) FEEDTHROUGH SHIELD GOLD EVAPORATOR (X) OIL CASEGEGASKET GOLD EVAPORATOR (X) GATE GOLD EVAPORATOR (X) GATE GOLD EVAPORATOR (X) COMPLETE GASKET GOLD EVAPORATOR (X) CERAMIC STANDOFF GOLD EVAPORATOR (X) LN2 HEATER CARTRIDGE GOLD EVAPORATOR (X) LN2 HEATER CARTRIDGE GOLD EVAPORATOR (X) BAKE OUT HEATER (100V.20A GOLD EVAPORATOR (X) BUIB 14V 0. FLANGE GOLD EVAPORATOR (X) INSTALLATION FOR CLAROSTA GOLD EVAPORATOR (X) INSUATOR.No Item no 1941 1942 1943 1944 1945 1946 1947 1948 1949 1950 1951 1952 1953 1954 1955 1956 1957 1958 1959 1960 1961 1962 1963 1964 1965 1966 1967 1968 1969 1970 1971 1972 1973 1974 1975 1976 1977 1978 1979 1980 1981 1982 1983 1984 1985 1986 1987 1988 1989 1990 1991 1992 1993 3211D-052 3211E-001 3211E-003 3211E-003 3211E-005 3211E-006 3211F-001 3211F-001 3211F-006 3211F-017 3211F-018 3211F-019 3211F-020 3211F-025 3211F-026 3211F-042 3211F-045 3211F-045 3211F-046 3211F-051 3211F-052 3211F-052 3211G-002 3211G-003 3211G-004 3211G-011 3211H-001 3211H-003 3211H-003 3211H-004 3211H-006 3211H-007 3211H-011 3211H-016 3211I-002 3211I-003 3211I-006 3211I-007 3211I-008 3211I-009 3211I-010 3211I-011 3211J-001 3211L-001 3211L-003 3211M-001 3211M-005 3211M-021 3211M-022 3211N-001 3211O-002 3211O-003 3211O-004 장비명 DESCRIPTION GOLD EVAPORATOR (X) DOME HANGER INDIVIDUAL LO GOLD EVAPORATOR (X) ASS'Y ELECTROMENTER GOLD EVAPORATOR (X) EXTENSION.100 GOLD EVAPORATOR (X) SENSOR HOLDER GOLD EVAPORATOR (X) STAND/DUAL XTL HOLDER GOLD EVAPORATOR (X) HYDRAULIC FLUID GALLON GOLD EVAPORATOR (X) Q'TZ TUBE HOLODER GOLD EVAPORATOR (X) 8 PIN INSTRUMENT GOLD EVAPORATOR (X) INDICATOR LIGHT (120)RED GOLD EVAPORATOR (X) INSULATOR. POLE GOLD EVAPORATOR (X) EXTENSION. M-5-2-2 M-5-2-2 M-5-2-2 0303-3292-0 M-5-2-2 0303-3292-0 M-5-2-2 0303-9351-0 M-5-2-2 FT58-003 M-5-2-2 5037 M-5-2-2 5037 N-5-2 41-1496 M-5-2-2 5288-4 5212-7 C-3-1 5-V-50 L-11-3-2 2608 02X2 02X2 M-5-2-2 SC-373 6411-2 L-11-3-2 007-083 C-2-6 28051 L-11-4-4 6537-3 FT58-008 M-5-2-2 900030-005 L-11-3-2 0303-3131-0 L-11-3-2 6990-0017-0 L-11-3-2 0303-6721-0 G-2-5-2 0418-4631-0 1PN-013-094 SQ-10A D-2-1-1 EF75-047SFL G-2-6-1 0409-4560-0 L-11-3-2 5810-10 L-11-4-4 EF-75-018 H-1-1 L-11-3-2 6092-004 L-11-3-2 4973-001 L-11-3-2 B-32NC 2-278 6227-19 6230-6 수량 6 1 5 4 1 2 1 5 1 10 8 5 1 1 5 1 2 2 4 3 2 3 1 2 1 1 10 5 5 1 2 2 1 3 1 2 50 1 20 7 1 1 1 3 3 1 1 1 1 10 10 10 1 LOC VENDOR AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA61 T52 T52 T52 AA61 AA61 AA61 AA61 AA61 AA61 AA61 AA63 AA61 AA63 AA63 AA62 AA61 AA62 AA61 AA61 AA62 AA63 AA62 AA61 AA61 AA62 AA62 AA62 AA62 AA62 AA61 AA63 T52 AA62 AA62 P41 AA62 AA62 AA62 AA62 AA62 AA61 " " " " " " " " " " " " CHA CHA CHA " " " " " " " " " " " " " " " " " " " " " " " " " " " " CHA " " " " " " " " " . V SPACING GOLD EVAPORATOR (X) INSICON WANDHELD CONT'R GOLD EVAPORATOR (X) AMP IC GOLD EVAPORATOR (X) FULL LENGTH BELL JAR LINE GOLD EVAPORATOR (X) LAT/LONG SWEEP P.

No Item no 1994 1995 1996 1997 1998 1999 2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010 2011 2012 2013 2014 2015 2016 2017 2018 2019 2020 2021 2022 2023 2024 2025 2026 2027 2028 2029 2030 2031 2032 2033 2034 2035 2036 2037 2038 2039 2040 2041 2042 2043 2044 2045 2046 3211O-005 3211O-006 3211O-007 3211O-007 3211O-008 3211O-012 3211O-013 3211O-014 3211P-002 3211P-002 3211P-002 3211P-007 3211P-008 3211P-010 3211R-002 3211R-003 3211R-008 3211S-002 3211S-002 3211S-004 3211S-005 3211S-021 3211S-021 3211S-022 3211S-023 3211S-024 3211S-025 3211S-026 3211S-027 3211S-029 3211S-030 3211S-041 3211S-042 3211S-045 3211S-046 3211S-047 3211S-049 3211S-063 3211S-064 3211S-066 3211S-067 3211S-067 3211S-071 3211S-075 3211S-081 3211T-001 3211T-002 3211T-003 3211T-011 3211T-012 3211T-013 3211T-016 3211T-042 장비명 DESCRIPTION GOLD EVAPORATOR (X) O-RING GOLD EVAPORATOR (X) O-RING GOLD EVAPORATOR (X) O-RING GOLD EVAPORATOR (X) O-RING GOLD EVAPORATOR (X) O-RING GOLD EVAPORATOR (X) O-RING VIEWPORT GOLD EVAPORATOR (X) FRONT DOOR O-RING GOLD EVAPORATOR (X) O-RING GOLD EVAPORATOR (X) BLANK JOFF PLUG GOLD EVAPORATOR (X) BLANK JOFF PLUG GOLD EVAPORATOR (X) BLANK JOFF PLUG GOLD EVAPORATOR (X) BALL PLUNGER GOLD EVAPORATOR (X) RS-10 POWER SUPPLY KIT GOLD EVAPORATOR (X) POWER SUPPLY GOLD EVAPORATOR GOLD EVAPORATOR GOLD EVAPORATOR (X) RELAY 24V 700 OHM 4PDT 2A GOLD EVAPORATOR (X) LN2 SENSOR SET GOLD EVAPORATOR (X) LN2 SENSOR SET GOLD EVAPORATOR (X) INFICON IC-6000 SOURCE SE GOLD EVAPORATOR (X) STAND CRYSTAL SENSOR BODY GOLD EVAPORATOR (X) PRESSURE SWITCH GOLD EVAPORATOR (X) PRESSURE SWITCH GOLD EVAPORATOR (X) HOIST UPPEB & LOWER LIMIT GOLD EVAPORATOR (X) FLUID FLOW SWITCH GOLD EVAPORATOR (X) SWITCH POWER LIGHTED BUTT GOLD EVAPORATOR (X) SWITCH FILAMENT GOLD EVAPORATOR (X) SWITCH AUTO LIGHTED BUTTO GOLD EVAPORATOR (X) SWITCH DEGAS LIGHTED BUTT GOLD EVAPORATOR (X) 10(A) SWITCH GOLD EVAPORATOR (X) 15(A) SWITCH GOLD EVAPORATOR (X) CAP SCREW (3/8-16+5/8) GOLD EVAPORATOR (X) CAP SCREW (1/4-20*3/4 LON GOLD EVAPORATOR (X) VENTED CAP SCREW (8-32*3/ GOLD EVAPORATOR (X) VENT CAP SCREW (1/4+20/4) GOLD EVAPORATOR (X) SCREW 6-32 NC 2Ax1/ GOLD EVAPORATOR (X) ALLON HOAD SCREW 3/8 GOLD EVAPORATOR (X) SLEEVE GOLD EVAPORATOR (X) 8 PIN SOCKET GOLD EVAPORATOR (X) MONO BEAM SHIELD GOLD EVAPORATOR (X) SCR DEVICE FLAG TYPE GOLD EVAPORATOR (X) SCR DEVICE FLAG TYPE GOLD EVAPORATOR SCR (IN2973) GOLD EVAPORATOR (X) ELECTRON BEAM GUN SHIELD GOLD EVAPORATOR (X) CONTACT POINT SCREW GOLD EVAPORATOR (X) TRANSDCTOR AMPLIFIER GOLD EVAPORATOR (X) TRANSISTOR DTS-423 GOLD EVAPORATOR (X) TEMPERATIURE GOLD EVAPORATOR (X) DOUBLE T/C GOLD EVAPORATOR (X) SINGLE T/C GOLD EVAPORATOR (X) HIGH VOLTAGE 12KV GOLD EVAPORATOR (X) TRANSDUCTOR GOLD EVAPORATOR (X) T. L-11-4-4 007-088 L-10-5-3 J40-218 L-10-5-3 J40-218 L-10-5-3 BA-2RV-A2 L-10-2 Q-1/3/A M-1-3-2 0-04-005783 0-04-005786 G-2-6-1 0-04-005808 L-10-5-3 0-04-005784 L-10-5-3 SR10-S10DD-10A L-10-5-3 SR10-S10DD-15A L-10-5-3 L-10-5-3 L-10-5-3 L-10-5-3 L-10-5-3 1321-1252-0 L-10-5-3 6-32X3/8 L-10-5-3 5805-7 L-10-5-3 7107 6998 K-4-3-1 900020-001 K-4-3-1 900020-001 L-10-5-3 6821-8471-0 5896 L-10-5-3 6363-5 G-2-5-2 302-1304 G-2-6-1 6840-9423-0 G-2-5-5 5980110-310-200 G-2-5-2 01-415-175 G-2-5-2 01-415-194 G-2-5-2 FT58-009 G-2-6-1 G-2-6-1 6823-9040-0 수량 10 5 6 10 10 5 10 5 5 4 5 10 2 1 4 1 1 2 2 1 1 1 2 2 2 2 1 2 3 1 1 6 10 10 10 20 30 10 4 1 1 1 1 1 50 1 11 1 2 1 2 1 3 LOC VENDOR AA62 AA62 AA62 AA62 AA62 AA62 AA62 AA62 AA62 AA62 AA62 AA62 AA62 AA61 AA62 AA61 AA61 AA62 AA62 T52 AA62 AA62 AA62 AA62 AA62 T52 T52 T52 AA62 AA62 AA62 AA62 AA62 AA62 AA62 AA62 AA62 AA62 AA62 AA63 AA62 AA62 AA62 AA62 AA62 AA62 T52 AA62 AA62 AA62 AA62 T52 T52 " " " " " " " " " " " " " " " " " " " CHA " " " " " CHA CHA CHA " " " " " " " " " " " " " " CHA " " " CHA " " " " CHA CHA .R (2N304) LOCATION VENDOR PART NO 2627-15 6230-4 6227-10 6227-10 6230-16 6230-21 C-2-5 L-11-3-2 L-11-3-2 L-11-3-2 L-11-3-2 L-11-3-2 6227-8 FT58-041 FT58-041 FT58-041 ADB-50225 SR10-8851 L-11-3-2 2024-102 L-10-5-3 S-1 L-10-5-3 S-1 G-2-6-1 013-0420 B-3-4-4.

S GRINDER (Y)PCB B.S GRINDER PCB(B) B.S GRINDER (Y)PRINT ASS'Y BOARD B.S GRINDER (Y)(C)BALL BEARING B.R (2N2646) GOLD EVAPORATOR (X) T.R (2N2925) GOLD EVAPORATOR (X) T.S GRINDER (Y)PCB B.S GRINDER PCB B.R (2N3741) GOLD EVAPORATOR (X) TRANSISTOR GOLD EVAPORATOR (X) TRANSISTOR GOLD EVAPORATOR (X) TRANSISTOR GOLD EVAPORATOR (X) TRANSISTOR GOLD EVAPORATOR (X) TRANSISTOR GOLD EVAPORATOR (X) TRANSISTOR GOLD EVAPORATOR (X) TRANSISTOR GOLD EVAPORATOR (X) TRANSISTOR GOLD EVAPORATOR (X) TRANSISTOR GOLD EVAPORATOR (X) TRANS GOLD EVAPORATOR (X) SOLENOID VALVE 8342B1 GOLD EVAPORATOR (X) CHAMBER VENT VALVE GOLD EVAPORATOR (X) SOLENOID VALVE GOLD EVAPORATOR (X) VALVE GOLD EVAPORATOR G/A FURNACE (X) VESTIBULE BLOCK (2/SET) G/A FURNACE (X) OP AMP CARD G/A FURNACE (X) PREAMP END ZONE CARD TYPE G/A FURNACE (X) PRE AMP CENTOR ZONE CARD B.R (40373) GOLD EVAPORATOR (X) T.S GRINDER (Y)PCB B.S GRINDER (Y)PCB B.S GRINDER (Y)PRINT ASS'Y BOARD B.R (2N2646) GOLD EVAPORATOR (X) T.No Item no 2047 2048 2049 2050 2051 2052 2053 2054 2055 2056 2057 2058 2059 2060 2061 2062 2063 2064 2065 2066 2067 2068 2069 2070 2071 2072 2073 2074 2075 2076 2077 2078 2079 2080 2081 2082 2083 2084 2085 2086 2087 2088 2089 2090 2091 2092 2093 2094 2095 2096 2097 2098 2099 3211T-043 3211T-044 3211T-045 3211T-046 3211T-047 3211T-048 3211T-050 3211T-051 3211T-052 3211T-053 3211T-054 3211T-055 3211T-056 3211T-057 3211T-059 3211T-060 3211T-061 3211T-062 3211T-065 3211T-066 3211T-101 3211V-001 3211V-003 3211V-004 3211V-005 3211V-006 3212B-001 3212C-004 3212C-005 3212C-006 3221B-001 3221B-002 3221B-005 3221B-006 3221B-009 3221B-010 3221B-011 3221B-012 3221B-013 3221B-013 3221B-015 3221B-016 3221B-017 3221B-019 3221B-020 3221B-022 3221B-023 3221B-025 3221B-027 3221B-028 3221B-030 3221B-031 3221B-032 장비명 DESCRIPTION GOLD EVAPORATOR (X) T.S GRINDER (Y)PCB B.S GRINDER PRINT ASS'Y BOARD B.S GRINDER (Y)PCB B.S GRINDER (Y)PRINT ASS'Y BOARD B.R (2N697) GOLD EVAPORATOR (X) T.S GRINDER PCB B.S GRINDER (Y)PRINT ASS'Y BOARD B.S GRINDER (Y)PRINT ASS'Y BOARD B.R (2N4402) GOLD EVAPORATOR (X) T.S GRINDER PRINT ASS'Y BOARD B.S GRINDER (Y)PRINT ASS'Y BOARD B.S GRINDER (Y)PRINT ASS'Y BOARD LOCATION L-10-6-3 G-2-6-1 G-2-6-1 G-2-6-1 G-2-6-1 G-2-6-1 G-2-5-2 G-2-6-1 G-2-6-1 M-1-3-2 G-2-6-1 G-2-6-1 G-2-6-1 G-2-6-1 G-2-6-1 G-2-6-1 G-2-6-1 G-2-6-1 G-2-4-4 C-2-5 G-2-5-2 G-2-5-2 G-2-5-2 J-3-2 D-2-1-3 D-2-1-3 D-2-1-3 L-12-1-2 L-12-1-2 L-12-1-2 L-12-1-2 L-12-1-2 L-12-1-2 J-4-1-3 J-4-1-3 J-4-2-1.S GRINDER (Y)PRINT ASS'Y BOARD B.S GRINDER PCB B.R (2N6260) GOLD EVAPORATOR (X) T.R (2N3703) GOLD EVAPORATOR (X) T.R (2N3906) GOLD EVAPORATOR (X) T.S GRINDER (Y)PCB B. D-2-1-3 J-4-2-1 J-4-1-3 J-4-2-1 J-4-1-3 D-2-1-3 D-2-1-3 M-3-4 N-5-2 J-4-1-3 J-4-2-1 L-12-1-2 J-4-1-3 D-2-1-3 D-2-1-3 VENDOR PART NO 6822-9250-0 6823-7030-0 6823-09030-0 6823-0540-0 6820-6970-0 6842-7126-0 6824-4020-0 6822-6460-0 SR10-40373 SR10-2N2646 SR10-2N3741 SR10-2N1671 SR10-2N2925 SR10-2N3906 SR10-2N3904 SR10-2K3620 SR10-2N3055 SR10-2N3494 SR10-2N3441 SR10-2N697 SR10-STT-105 8342B1 8262B-226 83453 113781-001 06-262-06 06-262-09 06-262-08 EAUA003000 EAUA003100 EAUA004000 EAUA004100 EAUA004900 MSSSR830ZZM EAUA075400 EAUA001700 EAUA001801 EAUA001801 EAUA001901 EAUA002000 EAUA002100 EAUA026000 EAUA002301 EAUA002401 EAUA002900 EAUA082300 EAUA007600 EAUA004800 EAUA002302 EAUA001500 EAUA001600 수량 1 1 2 1 1 1 1 1 2 1 2 1 3 4 2 1 2 2 2 2 1 2 1 1 1 2 2 3 2 1 2 1 1 1 6 1 5 3 6 1 1 1 1 2 1 5 1 1 1 2 1 1 1 LOC VENDOR Q11 Q11 T52 T52 T52 T52 Q11 T52 AA62 T52 T52 T52 T52 T52 T52 T52 T52 T52 T52 T52 T52 AA62 AA63 AA62 AA62 AA62 DD42 T11 T11 T11 F74 F74 F74 F74 F74 F74 T11 T11 T15 T15 T11 T15 T11 T11 T11 T15 T33 T11 T15 F74 T11 T11 T11 " " CHA CHA CHA CHA " CHA " CHA CHA CHA CHA CHA CHA CHA CHA CHA CHA CHA CHA " " " " " THERMCO " " " DISCO " " " " " " " " " " " " " " " " " " " " " " .S GRINDER (Y)PRINT ASS'Y BOARD B.R (2N3054) GOLD EVAPORATOR (X) T.

S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.M.S GRINDER B.S GRINDER B.No Item no 장비명 2100 2101 2102 2103 2104 2105 2106 2107 2108 2109 2110 2111 2112 2113 2114 2115 2116 2117 2118 2119 2120 2121 2122 2123 2124 2125 2126 2127 2128 2129 2130 2131 2132 2133 2134 2135 2136 2137 2138 2139 2140 2141 2142 2143 2144 2145 2146 2147 2148 2149 2150 2151 2152 3221B-033 3221B-034 3221B-035 3221B-036 3221B-037 3221B-039 3221B-041 3221B-049 3221B-052 3221B-054 3221B-059 3221B-061 3221B-061 3221B-068 3221B-069 3221B-072 3221B-076 3221B-077 3221B-078 3221B-080 3221B-081 3221B-083 3221B-086 3221B-093 3221B-096 3221B-097 3221B-098 3221B-100 3221B-101 3221B-102 3221B-103 3221B-104 3221B-105 3221B-106 3221B-107 3221B-108 3221B-109 3221B-112 3221B-113 3221B-114 3221B-115 3221B-116 3221B-117 3221B-122 3221C-004 3221C-014 3221C-023 3221C-024 3221C-029 3221C-030 3221C-035 3221C-063 3221D-009 B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.C.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B. D-2-1-3 M-7-1-1 L-12-1-2 N-1-2-3 N-7-4-2 C-4-3-1 B-1-4-4 L-12-1-2 C-4-3-1 VENDOR PART NO EAUA001400 EAUA002303 EAUA092300 MODR060050 EAUA083900 MODV015050 MSSSL1040ZZM MSSLF1470ZZ MOGAH 18402 MOGARA19 MOGAL282 MOGALA43 MOGALA43 MOGAR13302 MOGAL097-A MSLF850ZZ-M EAUA384881 EAUA685888 EAUA3407988 MOGAH184018 MOGAH184025 MSCF8508ZZM MOGARA17 MOGAZ223 MOGAL169 MOGALB52 MOGAL119 MOGAL139 MOGAL5201A EAUA002400 MOGCH057 MOGCH434 MOGCR028 MOGCS183 MOGCT132 MOGCT111 MOGCN506 MOGCR016 MSRF2280ZZ MSSSRF1030ZZ MSSSRF1960ZZ EAUA-002300 MOGAL228 MOGAL058 MOGARA19-A MOGALA91 MOGAR347 MOGALA03 MOGAL061 MOGCH106-Y 수량 1 1 1 360 2 5 6 4 4 1 2 3 2 2 5 2 1 1 1 3 3 1 4 6 1 2 2 2 2 2 1 2 1 2 2 1 3 8 1 1 4 2 2 4 1 1 2 2 1 1 3 2 3 LOC VENDOR T11 T11 T11 F62 T15 F25 F74 E71 F74 F74 E93 F74 F74 F74 F74 E71 T15 T11 T11 F74 F74 E71 F74 F74 BB24 BB24 F74 F74 E71 T14 F74 F74 F72 F74 F74 F72 E82 F74 F74 E71 E71 E71 E71 T15 F73 F74 F24 F74 E31 F72 F74 E31 BB24 " " " " " " " " " " " " " " " " " " " DISCO " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER DESCRIPTION (Y)PRINT ASS'Y BOARD PCB (Y)PRINT ASS'Y BOARD (Y)DRESSER BOARD (Y)PRINT ASS'Y BOARD (Y)DRESSER BOARD 5 I (C)BEARING (3997B-05 (Y)(C)BEARING (3997B (Y)BRUSH BRUSH COVER(6") (Y)ROUND BELT(5) (Y)WAFER CLEANING BR (Y)WAFER CLEANING BR (Y)CHANNEL BRUSH BUSHING (C)MINIATURE BALL BE (Y)PCB (Y)PCB (Y)PCB (Y)BRUSH (Y)BRUSH (Y)(C)BALL BEARING WASHING BRUSH(6") (Y)REMER BOLT (X)TIMING BELT (X)SENSOR BRACKET(4) (Y)LINEAR BALL BEARI (Y)BEARING SHAFT (Y)SENSOR BRACKET D2 P.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.B-A (Y)MINI CYLINDER (Y)COLLAR (2) (Y)BRUSH COVER(6") (Y)CUSHION (Y)COVER (Y)SPINNER COVER (Y)SPRING CAP CYLINDER(SPINNER) LOCATION D-2-1-3 D-2-1-3 J-4-1-3 B-4-5-3 J-4-2-1 N-7-3-1 L-12-1-2 N-2-4-2 L-12-1-2 L-12-1-2 L-12-1-2 L-12-1-2 L-12-1-2 L-12-1-2 N-2-4-2 J-4-2-1 J-4-1-3 J-4-1-3 N-7-4-2 N-7-4-2 N-2-4-2 L-12-1-2 L-12-1-2 N-2-4-2 L-12-1-2 N-2-4-2 J-4-2-1 L-12-1-2 N-7-4-2 B-1-4-4 N-7-4-2 N-7-4-2 B-1-4-4 N-3-4-1 N-7-4-2 N-7-4-2 N-2-4-2 N-1-2-1 N-2-4-2 N-2-4-2 J-4-2-1.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.M DRIVE BD(A) (Y)SAME P/N 3221B-00 (Y)BRUSH (Y)BRUSH (Y)BRUSH (Y)BRUSH (Y)BRUSH (Y)BRUSH (Y)MOTOR BRUSH (Y)OILLESS BUSHING (C)MINIATURE BALL BEARING (Y)MINIATURE BALL BEARING (Y)MINIATURE BALL BEARING (Y)MINIATURE BALL BEARING (Y)D1 P.S GRINDER B.S GRINDER B.

S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.90-3000 MOGAR205 MOGAZ061 MOGAH192 MOGAL112 MOGAL158 MOGAL114-B MOGAL038 MOGAZ227-H MOGAL099 MOGAL057 MOGAZ132 MSC0007AN MSCO0015AN MSCO0032AN MSC00220AN MSC00015AN MSC00519AN MSC00533AN MSCO0542AN MSC00549AN MOGAL175 MOGAL176 MOGAL223 MOGAL121 MSC00052AN 수량 1 1 1 1 1 1 3 1 222 1 1 1 7 2 2 2 1 1 1 1 3 4 10 2 2 1 4 1 2 1 3 1 3 2 3 1 2 2 1 6 1 4 2 8 1 5 1 10 3 2 3 20 1 LOC VENDOR BB24 BB24 BB24 BB24 BB24 BB24 F23 P53 I11 F74 F74 F74 F74 F74 F74 F74 X43 E82 E82 F74 F74 E71 F74 F74 E71 E71 E82 P53 P43 BB24 P12 P43 P53 P53 E71 F74 E71 E71 E71 BB24 BB24 BB24 BB24 BB24 BB24 BB24 BB24 BB24 BB24 BB24 BB24 E71 BB24 " " " " " " " " " " " " " " " " DISCO " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.No Item no 장비명 2153 2154 2155 2156 2157 2158 2159 2160 2161 2162 2163 2164 2165 2166 2167 2168 2169 2170 2171 2172 2173 2174 2175 2176 2177 2178 2179 2180 2181 2182 2183 2184 2185 2186 2187 2188 2189 2190 2191 2192 2193 2194 2195 2196 2197 2198 2199 2200 2201 2202 2203 2204 2205 3221D-010 3221D-011 3221D-012 3221D-014 3221D-015 3221D-019 3221D-021 3221E-021 3221F-006 3221F-009 3221F-018 3221F-019 3221F-021 3221F-023 3221F-024 3221G-001 3221G-002 3221G-005 3221G-006 3221G-009 3221H-005 3221H-006 3221L-002 3221L-002 3221L-012 3221L-014 3221L-015 3221M-002 3221M-005 3221M-006 3221M-009 3221M-010 3221M-013 3221M-015 3221N-001 3221N-002 3221N-004 3221N-005 3221N-006 3221O-001 3221O-002 3221O-003 3221O-004 3221O-005 3221O-006 3221O-009 3221O-010 3221O-011 3221O-012 3221O-013 3221O-014 3221O-015 3221O-016 B.S GRINDER B.S GRINDER B.S GRINDER DESCRIPTION (Y)MOUNT DISK (Y)ROTARY ENCODER (Y)FIRST FILTER B (Y)FILTER (Y)FILTER (Y)FILTER (Y)BAMBOO FITTING (Y)FELT(1) (Y)FELT(2) CHUCK WITH VACUUM GA (Y)FRONT SPLASH GAUR (Y)UNLOADING GUIDE(2 (Y)UNLOADING GUIDE(2 TENSION GAUGE (Y)SPRING HOLDER (Y)HOLDER (Y)LAMP(PUSH BUTTON (Y)LAMP(PUSH BUTTON (Y)LEVER(FOR 5".S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B. 6") (Y)LEVER SET (Y)LEVER MODFA013 DC MOTOR (Y)STEPPING MOTOR (X)MAGNET (Y)REVERSABLE MOTOR (Y)STEPPING MOTOR (Y)INDUCTION MOTOR (Y)STEPPING MOTOR (Y)LOCK NUT (X)LOCK NUT (X)LOCK NUT (Y)LOCK NUT LOCK NUT (X)O-RING (X)O-RING (X)O-RING (X)O-RING (X)O-RING (X)O-RING (X)O-RING (X)O-RING (X)O-RING (X)O-RING (X)O-RING (X)SPECIAL O-RING OIL SEAL (X)O-RING LOCATION B-4-4-2 J-1-1-1 H-10-3 H-10-2 B-4-1-2 L-12-1-2 L-12-1-2 B-4-1-2 I-1-3 N-3-4-1 N-3-4-1 B-4-1-2 B-4-1-2 N-2-4-2 J-2-2-2 J-2-2-2 B-1-5-2 N-2-4-2 N-3-4-1 N-2-4-3 N-2-4-2 N-7-4-2 N-2-4-2 N-2-4-2 N-2-4-2 N-2-4-2 VENDOR PART NO MAGAZ905-B MOGAR237 MOGAH17453 MOGCN023 MOGCN035 MOGCN036 MSBF6 MOGAH387 MOGAH388 MOGANA04 MOGAH210 MOGAL28001C MOGAL280020 MOGAN044 MOGAL060 MOGCR176 AG31-963-24 AG31-963-24 MOGAH365-A MAGAR901 8479.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.

No Item no 장비명 2206 2207 2208 2209 2210 2211 2212 2213 2214 2215 2216 2217 2218 2219 2220 2221 2222 2223 2224 2225 2226 2227 2228 2229 2230 2231 2232 2233 2234 2235 2236 2237 2238 2239 2240 2241 2242 2243 2244 2245 2246 2247 2248 2249 2250 2251 2252 2253 2254 2255 2256 2257 2258 3221O-017 3221O-018 3221O-019 3221O-020 3221O-021 3221O-023 3221O-024 3221O-025 3221O-026 3221O-027 3221O-028 3221O-029 3221P-002 3221P-008 3221P-009 3221P-010 3221P-011 3221P-012 3221P-016 3221P-017 3221P-019 3221P-021 3221P-022 3221P-023 3221P-024 3221R-001 3221R-005 3221R-006 3221R-041 3221S-001 3221S-002 3221S-006 3221S-008 3221S-009 3221S-010 3221S-013 3221S-017 3221S-020 3221S-022 3221S-024 3221S-026 3221S-027 3221S-029 3221S-033 3221S-035 3221S-036 3221S-036 3221S-039 3221S-045 3221S-046 3221S-047 3221S-048 3221S-054 B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.B-4-5-1 N-8-1-2 B-2-4 B-2-3 C-4-2-2 B-1-3-3 C-4-2-2 C-4-2-2 C-4-2-2 C-4-2-2 C-4-2-2 C-4-2-2 N-1-2-4 C-4-2-2 C-4-2-2 K-10-6-1 B-4-1-2 A-2-1 A-2-1 N-2-4-2 B-4-1-2 B-4-1-2 N-4-4-1 N-7-4-2 VENDOR PART NO MSC00543AN MSCO0545AN MSC00022AN MSC00000AN MSCO0002AN MSCO0005AN MSCO0013AN MSCO0222AN MSCO0224AN MSCO0507AN MSCO0526AN MSCO0538AN MOGAL096 MOGAH201-E MOGAL268 MSPF MOGAL332 MOGAL311 MOGCL336 MOGCS185 MOGCT113 MOGAH080 MOGCH435 MOGCZ209 MOGCZ215 MOGAR047 ACTDV-1161G AB61F11A3 MOGAL216 MOGAZ146 MODBX068 YEAUJ-GA1501 AHM-2042M MOGAH090 MOGAH190 MOGAZ901 MOGAL094 MOGAL102 MOGAZ121 MESSM10040U MOGAH350-B AH31-21 MOGAH076 YEAUL-GA29 AJK2 MAGAZA05-B MAGAZA05-B MAGAL905-C MOGAH033 AH31-121 MOGAL122 MOGAL311--C SBEE-SG3M 수량 4 1 1 2 5 1 1 1 1 1 1 1 4 1 5 2 4 4 2 2 1 1 1 1 2 1 1 4 4 1 2 3 2 3 1 1 2 3 1 30 1 2 1 1 4 1 2 1 1 2 10 1 2 LOC VENDOR BB24 BB24 BB24 BB24 BB24 BB24 BB24 BB24 BB24 BB24 BB24 BB24 F74 BB24 E93 E71 F74 F74 F74 F74 F74 BB24 E93 F72 F72 F74 R22 E27 E27 BB24 E27 E27 E27 E27 E27 F24 E27 E93 W50 E27 E27 E27 F24 F74 BB24 Z18 Z18 E71 F74 F74 BB24 F74 E27 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .S GRINDER B. B-4-2-2 N-7-4-2 B-4-2-2 B-4-1-2 C-2-2 B-1-4-4.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER DESCRIPTION (X)O-RING (X)O-RING (X)O-RING (X)O-RING (X)O-RING (X)O-RING (X)O-RING (X)O-RING (X)O-RING (X)O-RING (X)O-RING (X)O-RING (Y)AIR PORT (X)PIPING SPARE PART SET VACUUM PAD (Y)PLUG (Y)SLITTING PLATE(FO (Y)PHOTO SW (Y)PULLEY PAD PAD (X)BACK PLATE (Y)PLATE(RUBBER) (Y)RUBBER PLATE (Y)RUBBER PLATE (X)ROTARY JOINT (Y)RELAY (Y)RELAY UNIT COOLAN (Y)GUIDE RAIL (X)MAGNETIC SWITCH LEAD SWITCH(S) (Y)PRESSURE SWITCH A (Y)SWITCH (Y)PRESSURE SWITCH LEAD S/W COVER STATOR UNIT (Y)HEAD SCEREW (Y)SEAL SPINNER SHAF (Y)AIR SPINDLE ASSY( (Y)SOC HD SCREW M10X (Y)VACUUM SWITCH (Y)PUSH BUTTON SWITC (Y)SLIDE (Y)CUTTING WATER FLO (X)SENSOR SET(MAGNETIC) (Y)STATOR ASSY (Y)STATOR ASSY SPINNER TABLE SET(4" (Y)SLIDER (Y)SWITCH (PUSH BUTT (X)OIL SEAL(2) (Y)PHOTO SWITCH PHOTO SWITCH LOCATION B-4-2-2 N-2-4-2 B-4-1-2 B-4-1-2.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.

S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.No Item no 2259 3221S-056 2260 3221S-057 2261 3221S-059 2262 3221S-060 2263 3221S-062 2264 3221S-065 2265 3221S-067 2266 3221S-068 2267 3221S-084 2268 3221S-085 2269 3221S-086 2270 3221S-087 2271 3221S-088 2272 3221S-089 2273 3221S-123 2274 3221S-155 2275 3221T-005 2276 3221T-025 2277 3221T-026 2278 3221T-029 2279 3221T-030 2280 3221U-003 2281 3221V-008 2282 3221V-012 2283 3221V-020 2284 3222W-004 2285 3222W-062 2286 3222W-063 2287 3271B-005 2288 3271B-006 2289 3271B-014 2290 3271B-015 2291 3271B-016 2292 3271B-016 2293 3271B-017 2294 3271B-019 2295 3271B-031 2296 3271B-051 2297 3271B-054 2298 3271C-011 2299 3271C-016 2300 3271C-018 2301 3271C-019 2302 3271C-019 2303 3271C-020 2304 3271C-024 2305 3271E-001 2306 3271F-007 2307 3271F-010 2308 3271F-021 2309 3271F-022 2310 3271H-001 2311 3271J-002 장비명 B.1 (Y)SPINNER DRIVE UNI SPONGE HOLDER(6") (X)CHUCK TABLE (5") (Y)SPINNER TABLE SET (Y)THERMISTOR STR-48 CHUCK TABLE ASS'Y (Y)TRANSISTOR (Y)DRIVER UNIT SERVO (Y)VENTURI VALVE (Y)ELECTRO MAGNETIC VALVE (Y)SOLENOID VALVE COMPOUND.C INTERFA (Y)5"ANALOG I/O BD (Y)5"BREAKER (C)5"BEARING (Y)5"UBUSHING SPFGIAL (X) CONTACTOR (Y)5"CLAMP SPLIT (Y)5"CHAIN DUAL 70 PCH (Y)5"CHAIN DUAL 80 PCH (Y)5"CHAIN DUAL 80 PCH (Y)5"CHAIN DUAL 56 PCH (Y)5"COUPLING VACUUM (Y)5"ENCODER (Y)5"FUSE 100 AMP (Y)5"FUSE 100A (Y)5"FITTING (Y)5"FILTER DI ELEMENT (Y)5"ACE HEATER (Y)5"WATER JACKET LOCATION B-4-4-3 C-4-2-2 C-4-2-2 N-7-4-2 B-1-3-3 VENDOR PART NO MOGAR290 MAD-4200 MOGAR255 BDJ100-24V MOGCN 005-Y MOGAL062 N-7-3-1 MOGAL093 N-2-4-2 MOGAL186-B N-3-4-1 MOGALA04 N-2-4-2 MOGAL136 N-2-4-2 MOGAH010 N-2-4-2 MOGAH009 A-1-4 MOGAH06401 N-8-3-2 EAUE-002700 B-4-1-2 MOGAR303 B-1-3-3 MOGTC500 N-2-4-2 MOGAL905 B-4-1-2 RGSTR-4870 B-3-4-3 MOGAR962-A B-4-1-2 TU280906 EAUE266700 NSVAE-10AL-2 N-8-1-2 MOGAH082-B N-4-1-1 MOGCH611-AY M-6-3-4 GC #240 C #240 CG #320 M-6-1-1 091904-01 M-6-1-1 091914-01 M-6-1-1 740753-01 M-6-1-1 740754-01 M-6-1-1 740801-01 M-6-1-1 740801-01 M-6-1-1 661945-03 M-6-1-1 740802-01 B-1-4-4 510431-05 N-1-2-1 570291-01 B-1-4-4 820158-01 4501-0030 N-2-4-2 571900-01 860176-01 860176-04 860176-04 860176-05 B-1-4-4 642033-01 B-1-4-4 642039-01 B-4-5-1 360478-02 B-4-5-1.S GRINDER B. M-6-1-1 510746-01 B-1-4-4 601931-01 N-3-4-1 860478-02 B-4-5-1 641990-01 B-4-5-1 481925-02 수량 20 1 1 3 1 1 3 2 5 1 1 1 1 1 1 1 6 1 7 10 2 1 4 1 10 2 1 1 2 1 3 3 1 2 1 1 5 16 6 1 9 4 4 3 3 2 1 6 2 12 1 1 1 LOC VENDOR Q11 W50 E27 E27 F74 BB24 E93 F21 E71 E82 E71 E71 E71 F24 F62 F74 BB24 E71 F74 F23 F74 T15 F74 F74 F64.S GRINDER B.HOLDER (Y)SWITCHING POWER S (X)SOCKET (Y)COMPRESSION SPRIN SINNER SUPPORT (Y)SHAFT(3) (Y)SPINNER DUCT (Y)PAD SHAFT (Y)COVER SUPPORT.R52 F47 F47 F47 V35 V35 V35 V35 V35 V35 V35 V35 F72 E71 F72 F73 E71 F72 F72 F72 F72 F72 F72 F73 F73 F72 F11 F73 F73 " " " " " " " " " " " " " " " " " " " " " " " " " SHIBAYAMA " " PEAK PEAK PEAK PEAK PEAK PEAK PEAK PEAK PEAK " " " " " " " " PEAK " " " " " " " .S GRINDER B.S GRINDER BACK GRINDER BACK GRINDER BACK GRINDER RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP DESCRIPTION SILENCER (SL-01) (N)AIR SPINDLE ASSY (Y)SAME P/N 3221B-00 (Y)SENSOR. DRESS WHEE (Y)5"PCB MOD SERIAL (Y)5"PCB MOD ROBOTRO (Y)5"PCB ZIATECH 880 (Y)5"PCB ZIATECH ZT8 (Y)5"PCB I/O PROLOG (Y)5"PCB I/O PROLOG (Y)5"PCB T.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.L (Y)COVER SUPPORT.S GRINDER B.S GRINDER B.DRESS WHEEL COMPOUND.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.R (Y)COVER SUPPORT.S GRINDER B.S GRINDER B.S GRINDER B. DRESS WHEE COMPOUND.S GRINDER B.S GRINDER B.S GRINDER B.S GRINDER B.

No Item no 2312 3271L-003 2313 3271M-002 2314 3271M-005 2315 3271O-004 2316 3271O-005 2317 3271O-006 2318 3271O-007 2319 3271O-009 2320 3271O-011 2321 3271O-012 2322 3271O-013 2323 3271O-014 2324 3271O-015 2325 3271O-015 2326 3271O-017 2327 3271O-019 2328 3271O-020 2329 3271O-021 2330 3271O-022 2331 3271O-024 2332 3271O-025 2333 3271P-001 2334 3271P-002 2335 3271P-016 2336 3271P-017 2337 3271R-012 2338 3271R-013 2339 3271R-014 2340 3271R-015 2341 3271R-016 2342 3271R-018 2343 3271S-003 2344 3271S-006 2345 3271S-007 2346 3271S-012 2347 3271S-013 2348 3271S-023 2349 3271S-024 2350 3271S-025 2351 3271S-026 2352 3271S-030 2353 3271S-041 2354 3271T-001 2355 3271T-006 2356 3271T-008 2357 3271T-014 2358 3271W-004 2359 3271W-005 2360 3271W-007 2361 3271W-009 2362 3271X-001 2363 3271X-001 2364 3271X-002 장비명 RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP DESCRIPTION LOCATION VENDOR PART NO 5"LAMP HV ARC 35KW (Y)5"ELEVATOR STEPPER MOTOR (Y)5"MOTOR STEPPER 200 STEPS (Y)5"O-RING (DOOR) (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING 520487-05 3500-0030 551904-01 2504-0220 861339-01 861339-02 861339-03 861339-09 861339-07 861339-08 861338-02 861339-10 860828-01 860828-01 860828-04 860828-07 (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING BUNA-N (Y)5"O-RING.SILICONE (Y)5"DC POWER SUPPLY (Y)5"DC POWER SUPPLY (Y)5"GLAND PURGE (Y)5"PIN QUARTZ SUPP (Y)5"QUARTZ ROD (COO (Y)5"QUARTZ ROD (COOLING) (Y)5"QUARTZ ROD (COOLING) (Y)5"QUARTZ ROD (COOLING) (Y)5"RETAINING RING (Y)5"RAFLD THERMAL C (Y)POWER OFF SWITCH (Y)5"SWITCH (Y)5"SWITCH LEVER (Y)5"RCV ELEVATOR SE (Y)5"SEND ELEVATOR S (C)5"SCREW (Y)5"ASM X-AXIS SCRE (C)5"SCREW (C)5"SCREW (Y)5"LEADSCREW/NUT (Y)5"STNF.004 THK (Y)TRIAC (Y)5"QTZ ISOLATION TUBE (Y)5"QUARTZ TIP ASSY (Y)5"ERP QTZ ISOLATI (Y)5"WINDOW PYROMETER (Y)5"PRELOAD WASHER (Y)5"QTZ WINDOW/SCR (Y)5"QUARTZ WINDOW (Y)5"XISTOR SIN DARL (Y)5"XISTOR SIN DARL (Y)5"XISTOR DUAL DAR 860228-01 860228-02 860828-02 861338-01 4004-0020 4004-0060 480415-01 481901-01 7400-0024-01 7400-0024-02 7400-0024-03 7400-0024-04 590227-01 1908-00 5103-0030 500219-04 501202-01 9830-0560-01 9830-0560-02 581737-03 731857-01 580690-05 580863-03 731858-01 400180-02 4803-0010 7400-0066-01 731561-01 7400-0068-03 481236-01 571462-01 481235-06 481235-05 310732-03 310732-03 311361-01 M-7-3-2 M-7-3-2 B-4-5-1 B-1-4-4 B-1-4-4 B-1-4-4 N-2-4-2 B-1-4-4 B-1-4-4 B-1-4-4 B-1-4-4 K-10-6-1 N-2-4-2 N-2-4-2 D-3-3-2 N-2-4-2 B-1-4-4 H-8-1 B-4-5-1 I-4-1 B-1-4-4 N-2-4-2 K-11-3 K-11-3 B-1-4-4 수량 5 1 2 13 20 3 3 2 4 4 10 7 30 22 11 10 8 4 6 22 2 1 1 4 4 5 5 5 5 12 1 1 7 1 3 3 11 4 2 6 1 9 1 1 2 1 1 12 1 1 1 2 4 LOC VENDOR F11 P51 P51 E93 E93 E93 E93 E93 E93 E93 E93 E93 E93 E93 E93 E93 E93 E93 E93 E93 E93 F11 F11 F73 F72 F72 E93 F72 F72 E71 G91 F72 F72 F72 F72 F72 F72 F13 E71 E71 W21 E71 F72 Z16 F73 H42 F72 E71 F11 F11 F72 F72 F72 " PEAK PEAK " " " " " " " " " " " " " PEAK " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .SHAFT SPACER.

B (Y)5"A/I UNIT (8CH)P (Y)5"A/I UNIT (4CH)P (Y)5"A/O UNIT (8CH)P (Y)5"A/O UNIT (4CH)P (Y)5"BIT BUS LIGHT I (Y)5"I/O CONTROL (Y)5"GLAND VCR COUPL (Y)5"COVERING (Y)5"COVERRING (Y)5"BIT BUS LIGHT F (Y)5"COUPLING (Y)5"CYLINDER ]Y)5"CYLINDER (Y)5"DISPLAY UNIT (Y)5"FILTER ELEMENT (Y)5"GASKER METAL (Y)5"ION GAUGE SENSO (Y)5"OIL LEVEL GAUGE (Y)5"OILEVEL GAUGE (Y)5"GAUGE PORT (Y)5"LACK GEAR (Y)5"PINION GEAR (Y)5"LAMP INFRARED LOCATION B-3-1-1 B-3-1-1 B-3-1-1 B-3-1-1 B-3-1-1 B-3-1-1 B-3-1-1 M-5-2-3. L-12-1-1 C-1-4 L-3-5-1 L-3-5-1 L-3-5-1 L-3-5-1 L-3-5-1 K-11-4-3 K-11-4-3 K-11-4-3 K-11-4-3 K-11-4-3 VENDOR PART NO 4718-0122-01 1117540 4200118 6000171 AH107114-503 Y1704 3500253 3500280 4400409 400044 4400225 5000541 0515020 18-003617-02 18-003617-03 18-003617-01 59-002742 59-002743 SSL-1260 SSR-1560 3-24-24/16 3-24-22/26 3-24-1-6/6 3-24-17/26 3-24-18/26 IS0148WH J-2-1-2 C-2-2 I-2-2 C-2-2 J-2-1-2 J-2-1-2 B-3-1-1.C.LC.BO (Y)5"D/O UNIT P.C.BO (Y)5"D/I UNIT P.2K 1W (X) LIFTING LOAD SOCKET ASSY (X) BEARING TEFLON V15-3 (X) ENTENDER BOARD (X) CATHODE VH107108-5010 (X) ANODE (X) LM10 (X)O-RING(3997O-531) (X) O-RING SILICONE 175 (X) 5-32X7/8 HD CAR SCR (X) 6-32X3/8 SOCK HCS SS (X) 4-40X1/4 FLAT HD SS (X) STABISIL VH107110-501 (Y)XT-1085 DRIVE (Y)GREASE.LUBRICATING STAGE (Y)DAMPER FLUID SCC (Y)HOSE BARG (Y)QUICK DISCONNECT INSERT (C)BEARING (C)BEARING (C)BEARING (Y)5"LINER BALL BEARING (Y)5"RING LIFTER BEL (Y)5"BELT TIMING (Y)5"BELT TIMING (Y)5"BELT SILICONRUB (Y)5"CPU UNIT P. F-5-1 M-7-1-3 M-7-1-3 K-11-4-3 G-2-5-1 B-4-2-3.No Item no 장비명 2365 2366 2367 2368 2369 2370 2371 2372 2373 2374 2375 2376 2377 2378 2379 2380 2381 2382 2383 2384 2385 2386 2387 2388 2389 2390 2391 2392 2393 2394 2395 2396 2397 2398 2399 2400 2401 2402 2403 2404 2405 2406 2407 2408 2409 2410 2411 2412 2413 2414 2415 2416 2417 3272R-002 3281A-011 3281B-001 3281B-023 3281C-001 3281C-002 3281L-001 3281O-011 3281O-012 3281S-001 3281S-002 3281S-003 3281S-011 3282D-003 3282G-001 3282G-002 3282G-003 3282H-001 3282I-001 3291B-001 3291B-002 3291B-004 3291B-005 3291B-023 3291B-041 3291B-042 3291B-043 3291B-061 3291B-062 3291B-063 3291B-064 3291B-065 3291B-066 3291B-067 3291B-070 3291B-072 3291C-001 3291C-002 3291C-003 3291C-011 3291C-041 3291C-071 3291C-072 3291D-001 3291F-002 3291G-001 3291G-021 3291G-024 3291G-025 3291G-028 3291G-041 3291G-042 3291L-001 RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP THERMA WAVE THERMA WAVE THERMA WAVE THERMA WAVE THERMA WAVE THERMA WAVE METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD DESCRIPTION (Y)REGISTOR 1.WHITE LITHIUM (Y)GREASE. N-4-1-1 E-2-3 H-10-1 K-11-4-3 I-3-1 K-11-4-3 K-11-4-3 K-11-4-3 K-11-4-3 K-11-4-3 FR-1MP 301814-001 1-6-3/4 1-6-4/4 APE-200H SED-1004-011-09 CDQIB50-40DC-A7 SMC-CQ2A-45DC GFE-DP TM-80 3-24-20/26 WI-B EC-801 D330-D BPTG 349A SED-1004-014-12 SED1004-014-13 3-23-10/10 수량 20 11 4 1 2 2 4 2 9 5 6 6 2 1 1 1 1 1 1 12 4 4 6 4 3 3 1 1 1 1 1 1 1 1 1 1 1 1 1 1 2 1 2 1 3 15 2 2 2 1 2 2 2 LOC VENDOR T41 G91 G91 T22 G91 G91 T21 G91 G91 G91 G91 G91 G92 Q25 Q43 Q43 Q43 Q43 Q43 I42 I42 I42 I42 I42 H21 H21 G32 G31 G31 T62 G31 G31 G31 G31 T62 T62 X24 H31 H31 G12 I42 R53 R52 G67 G67 I42 H21 I42 I42 I42 I42 I42 H24 AG ASSOCIATE EATON " EATON " " " " " " " " " THERMA WAVE " " " " " ULVAC " " ULVAC " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .

No Item no 장비명 2418 2419 2420 2421 2422 2423 2424 2425 2426 2427 2428 2429 2430 2431 2432 2433 2434 2435 2436 2437 2438 2439 2440 2441 2442 2443 2444 2445 2446 2447 2448 2449 2450 2451 2452 2453 2454 2455 2456 2457 2458 2459 2460 2461 2462 2463 2464 2465 2466 2467 2468 2469 2470 3291M-021 3291M-022 3291M-031 3291O-001 3291O-002 3291O-003 3291O-004 3291O-005 3291O-006 3291O-007 3291O-008 3291O-009 3291O-010 3291O-011 3291O-012 3291O-013 3291O-014 3291O-015 3291O-016 3291O-017 3291O-019 3291O-020 3291O-021 3291O-024 3291O-025 3291O-026 3291O-027 3291O-028 3291O-029 3291O-030 3291O-031 3291O-032 3291O-033 3291O-034 3291P-002 3291P-021 3291P-022 3291P-023 3291P-024 3291P-025 3291R-001 3291S-001 3291S-002 3291S-003 3291S-004 3291S-032 3291S-034 3291S-042 3291S-043 3291S-044 3291S-061 3291S-071 3291S-072 METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD DESCRIPTION (Y)5"REVERSIBLE MOTO (Y)5"MOTOR & GEAR HE (Y)5"OIL MIST TREP (Y)5"O-RING FOR ROTA (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (C)O-RING(3996O-101) (C)O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (C)O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (C)O-RING(3996O-105) (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"O-RING (Y)5"GASKET (Y)5"POWER LOCK (Y)5"PULLY (Y)5"PULLY (Y)5"PULLY (Y)5"PULLY (Y)5"PULLY (Y)5"GLASS. FERROFIUI (Y)5"SEAL FERROFLUID (Y)5"HERMETIC SEALPO (Y)5"PHOTO SENSOR (Y)5"SENSOR MAGNET (Y)5"FLOW SWITCH (Y)5"ATM PRESSURE SW (Y)5"PRESSURE SWITCH (Y)5"SCR UNIT (Y)5"BESPEL SHAFT (Y)5"BESPEL SHAFT LOCATION K-3-4-1 K-11-4-3 K-11-4-3 K-3-4-1 K-11-4-3 B-1-4-3 K-11-4-3 K-11-4-3 B-3-1-1 B-3-1-1 K-11-4-3 B-3-1-1 B-3-1-1 K-11-4-3 K-11-4-3 VENDOR PART NO ZRK6GN-AM/ZGN ZIK6GM-A/KGM TMX-1 P-38(V) G-210(V) P-21(V) P-24(V) P-40(V) P-60(V) G-200(V) AS-568A-384(V) V-55(V) P-30(V) P-34(V) AS-568A-268(V) P-155(V) P-25(V) AS-568A-369(V) P-29(V) P-15(V) AS-568A-260(V) P-16(V) V-40(V) P-49(V) V-70(V) G-260(V) AS-568A-148(S) G-165(V) P-52(V) V-100(V) V-120(V) P-14(V) G-110(V) 6DX1530L/E PL012x015E SED-1004-011-12 SED-1004-011-13 SED-1004-011-14 SED-1003-061-06 SED-1003-061-04 3-23-1/10 3-24-11/26 3-24-13/26 3-24-14/26 BPTS306A PM-K50/CNO3 6132/6001 DTA-002 PS4-102V PAC30C SP-1 수량 1 1 1 4 4 2 2 2 2 3 2 4 10 10 4 2 2 2 3 6 2 6 2 2 2 10 16 6 2 4 2 20 2 2 1 1 1 2 1 1 1 4 1 1 1 2 6 1 1 1 1 1 1 LOC VENDOR P23 P11 G64 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 I42 H72 I42 I42 H72 I42 H32 H21 I35 I42 I42 G12 G12 I42 G12 G12 G44 I42 I42 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .WINDOW RE (Y)5"SEAL WILSON (Y)5"SEAL.

SIGNAL 100V 0.TIMING 62 GROVE (Y)BELT.FLEXURAL (Y)RING FEEDER.ROTATION (Y)RING.THRUST (Y)BEARING.01A (Y)MOTOR.TIMING (Y)BEARING.RETAINING SWITCH.TIMING (Y)BELT.LINEAR ACTUATOR KIT (Y)O-RING 2-331 BROWN VITION (Y)PIN FINGER RELEASE (Y)PIVOT.ORIENT LOGIC (Y)CYLINDER (Y)DIODE.SEAL (Y)BEARING.No Item no 2471 3291T-001 2472 3291V-003 2473 3291V-004 2474 3291V-005 2475 3291V-006 2476 3291W-001 2477 3291W-002 2478 3291W-021 2479 3292B-002 2480 3292B-006 2481 4211B-012 2482 4211B-014 2483 4211B-031 2484 4211B-031 2485 4211B-032 2486 4211B-034 2487 4211C-005 2488 4211D-002 2489 4211O-001 2490 4211R-001 2491 4211R-001 2492 4211R-003 2493 4211S-002 2494 4211S-002 2495 4211S-008 2496 4211V-010 2497 4211V-010 2498 4242B-033 2499 4242B-035 2500 4242B-039 2501 4242B-063 2502 4242B-065 2503 4242B-067 2504 4242B-069 2505 4242B-070 2506 4242B-071 2507 4242B-081 2508 4242C-051 2509 4242D-001 2510 4242M-011 2511 4242O-088 2512 4242P-042 2513 4242P-061 2514 4242R-001 2515 4242R-003 2516 4242R-004 2517 4242R-006 2518 4242S-061 2519 4242S-062 2520 4242S-064 2521 4242S-101 2555 4271A-032 2556 4271A-033 장비명 METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD METAL CVD WAFER MARK WAFER MARK SOG COATER SOG COATER SOG COATER SOG COATER SOG COATER SOG COATER SOG COATER SOG COATER SOG COATER SOG COATER SOG COATER SOG COATER SOG COATER SOG COATER SOG COATER SOG COATER SOG COATER HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP HIGH ENERGY IMP RTP RTP DESCRIPTION (Y)5"THERMOCOUPLE SH (Y)5"SOLENOID VLAVE (Y)5"VARORIABLE COND (Y)5"TIMING VALVE (Y)5"VACUUM VALVE (1 (Y)5"LIFTER WAFER (Y)5"INCH WAFER PICK (Y)5"HEATER WINDOW ( (X)PCB SUPPORT SYS WMSC (Y)PCB HANDLER P.REED (Y)SWITCH.SLEEVE (Y)BOARD.INDUCTIVE PROXIMITY (Y)SWITCH.SPHERICAL (Y)BEARING.C BOARD I/O WALKING BEAM (Y)TIMING BELT (Y)TIMING BELT (Y)TIMING BELT (Y)TIMING BELT (Y)PRESSURIZING CAP (Y)PULSE DRIVER (2-P (Y)O-RING (Y)NOZZLE RECEIVER (Y)NOZZLE RECEIVER (Y)REGULATOR (Y)WAFER SERCH SENSO (Y)WAFER SERCH SENSO (Y)VACUUM SEAL (Y)VACUUM SEAL (Y)VACUUM SEAL (Y)BELT.RETAINING (Y)RING.PROXIMITY (Y)SPRING EXTENSION (Y)THERMOCOUPLE AMPL (Y)SAME P/N (4271A-0 LOCATION B-3-1-1 G-2-5-1 B-1-4-3 N-7-4-3 K-11-4-3 K-10-3-2 K-4-5-1 L-1-4 J-4-2-3 B-1-3-4 N-2-2-2 N-2-2-2 N-2-2-2 N-2-2-2 B-1-1 N-2-2-2 N-2-2-2 K-5-2-3 L-5-2-1 L-5-2-1 B-3-3-2 N-2-2-2 N-2-2-2 N-1-4-4 N-1-4-4 N-1-4-4 N-1-4-4 N-1-4-4 N-1-4-4 N-1-4-4 N-1-4-4 N-1-4-4 N-1-4-4 N-1-4-4 N-1-4-4 B-3-4-3 N-1-4-4 N-1-4-4 N-1-4-4 N-1-4-2 N-1-4-4 N-1-4-4 N-1-4-4 N-1-4-4 N-1-4-4 N-1-4-4 N-8-1-1 N-8-1-1 VENDOR PART NO 1-4-1/2 BVV304 253A-3-80-2S BN-109 BVVJ324A 3-23-6/10 SED1003-071-01 A5056 6100425 2015015 EOR05-2023A TR8171UD-TM(E-3) K6101003 K6101003 K6102001 K6101040 1E D7101004 K6201006 TOCK0003 TOCK0003 K8107311 K9136002 K9136002 MR4-0026-1 EMR4-026 EMR4-026 P129218-17 60897-00 P129225-73 40617-00 60186-00 60719-00 60194-00 P127132-02 60718-00 60718-00 50755-00 P12541 P129623 P12008-31 40364-00 P127992-10 P129008-03 P12030-16 P12030-15 P127229-253 50915-02 P129010 60420-02 P12051-355 9812-0010-02 수량 2 1 1 1 1 4 1 2 1 1 1 1 1 3 1 2 2 1 10 3 1 1 2 2 9 1 3 3 1 2 3 4 3 2 6 3 1 1 20 1 5 2 2 1 5 2 3 3 3 1 2 1 1 LOC VENDOR G12 R42 I35 I33 I42 H31 H52 I33 T62 T12 K22 Z18 K22 J22 K22 J22 K36 J45 J51 K22 K22 J42 J22 J22 J52 K22 K22 Q61 Q61 Q61 Q61 Q61 Q61 Q61 Q61 Q61 Q61 Q61 Q61 F71 Q61 Q61 Q61 Q61 E75 Q61 Q61 Q61 Q61 Q61 Q61 F61 F61 " " " " " " " " LOMONICS LOMONICS TOK TOK TOK " " " " " " " " " " " " " " GENUS GENUS GENUS GENUS GENUS GENUS GENUS GENUS GENUS GENUS GENUS GENUS " GENUS GENUS GENUS GENUS " GENUS GENUS GENUS GENUS GENUS GENUS AG " .FLUROLOY-G (Y)BEARING (Y)BEARING.RETAINING (Y)RING.

ELEMENT. MDA. 250V.CENTERING 125MM (Y)FORK.HEATING BOTT (Y)ELEM.I) (Y)FORK.1SR-20 (Y)ASSY BACK PROSE C (Y)ASSY BACK PROSE C (Y)DIAPHRAM.FLARED 1/4" TUBE (Y)ASSY HF CALIBRATION (Y)ASSY.RINSE BO (Y)DFTR.TEMPERATURE (Y)PROBE. AGC.TC FE (Y)VALVE 1/2 FPT SOL (Y)VALVE PNEUMATIC (Y)TEFLON BLOCK (Y)STANDOFF.FILTER MO (Y)TRAY SUPPORT PIN (Y)TRAY SUPPORT PIN (Y)POWER SUPPLY LAMD (Y)POWER SUPPLY LAMD (Y)PROBE QUICK DISCO (Y)RELAY.CENTERING 150MM (Y)JUMPER CABLE (Y)CABLE.CHUCK.AIR (Y)BRACKET.AC (Y)RELAY RH4B-U-12VD (Y)SILCON SEAL. (Y)FITTING 9P FEMALE (Y)FITTING FEMALE BA (Y)FITTING MALE BARB (Y)HEATER.24V.ISR-200.4PDT.PRESSURE 70PSI LOCATION N-1-4-1 N-1-4-1 N-1-4-1 N-1-4-1 L-9-1 B-4-5-1 B-3-3-4 B-3-3-4 N-1-4-1 N-8-1-1 N-1-4-1 N-1-4-1 N-1-4-1 N-8-1-1 N-8-1-1 N-8-1-1 B-4-3-2 K-10-3-2 K-10-3-2 E-2-1 B-4-3-2 B-4-3-2 B-4-3-2 K-10-3-2 M-6-1-1 M-6-1-1 B-4-3-2 N-7-1 N-7-4-1 N-7-4-1 N-7-4-1 N-7-4-1 I-1-2 B-3-2-3 N-7-4-1 N-7-4-1 N-7-4-1 N-7-4-1 K-10-3-2 N-7-4-1 K-10-3-2 N-7-4-1 B-4-3-2 L-11-1-2 c-4-2-1 B-3-3-1 B-3-3-1 N-7-4-1 N-7-4-1 VENDOR PART NO 7100-2586-02 7100-5202-03 2100-0307-02 7100-5209-01 2706-0001-01 7310-0551-01 7200-0616-01 7200-0616-01 4000-0012-01 4000-0007-01 2103-0005-01 4502-0008-01 4502-0224-01 7200-0258-02 4502-9063-01 4502-9042-01 415386-001 409333-002 409291-001 409290-001 409334-001 408238-001 408237-001 408211-001 302369-001 230627-004 902474-001 301704-001 904344-001 905100-211 902819-001 902819-001 408249-001 412488-001 301414-001 301417-001 303005-001 230054-032 230088-007 301013-001 301013-007 301012-007 303301-001 411225-001 301816-002 301816-002 303956-001 301776-001 300038-350 301416-001 301416-001 230029-005 230029-006 수량 1 1 1 1 3 3 1 1 1 1 2 3 1 1 1 1 1 3 1 1 1 4 4 4 2 1 1 2 1 2 9 2 1 1 2 2 1 5 5 5 5 5 1 1 1 1 6 5 4 1 3 2 2 LOC VENDOR E13 E13 E13 E13 Y13 E72 E74 E82 E13 F61 E13 E13 E13 F61 F61 F61 F62 E82 E82 E82 E81 F62 F62 F62 E82 E92 E92 F62 F61 F61 F61 F61 F61 E81 F33 F61 F61 F61 F61 E82 F61 E82 F61 F62 P23 P23 R63 T41 E92 F61 F61 F61 F61 " " " " AG " AG AG " " " " " " " " EXCALIBUR FSI " " " " " " " " " " " " EXCALIBUR FSI " " " " " " " " " " " " " " " " " " " " " " " .CHAMBER BLOCK (Y)CENTERING DISC 120MM (Y)CENTERING DISC 100MM (Y)6" CENTERING KIT (D.ALLIGATOR CLIP (Y)SENSOR CABLE (Y)CAP.5 (Y)FUSE.SILICON 36 MEMBRANE 8" (Y)MOTOR DC STEPPER (Y)MOTOR DC STEPPER (Y)MANIFOLD (Y)CNTL.MOTOR (Y)O-RING VITON TO D (Y)PROBE. 250V.TEMPERATURE (Y)SW.SERVO.No Item no 장비명 2557 2558 2559 2560 2561 2562 2563 2564 2565 2566 2567 2568 2569 2570 2571 2572 2573 2574 2575 2576 2577 2578 2579 2580 2581 2582 2583 2584 2585 2586 2587 2588 2589 2590 2591 2592 2593 2594 2595 2596 2597 2598 2599 2600 2601 2602 2603 2604 2605 2606 2607 2608 2609 4271B-003 4271B-004 4271B-006 4271B-009 4271F-001 4271F-006 4271P-002 4271P-002 4271P-041 4271P-042 4271P-104 4271R-006 4271R-007 4271T-003 4271V-004 4271V-005 4272B-031 4272B-032 4272C-003 4272C-004 4272C-005 4272C-007 4272C-008 4272C-009 4272C-021 4272C-022 4272C-023 4272C-041 4272C-061 4272C-071 4272C-082 4272C-082 4272D-001 4272D-002 4272E-001 4272E-002 4272E-003 4272F-001 4272F-002 4272F-007 4272F-008 4272F-009 4272H-001 4272M-002 4272M-003 4272M-003 4272M-021 4272M-081 4272O-008 4272P-001 4272P-001 4272S-003 4272S-004 RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP RTP HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS HF VAPOR SYS DESCRIPTION (Y)ATP BOARD (Y)SIX-GAS INTERLOCK (Y)CPU MODULE.CENTERING 100MM (Y)FORK.STD (Y)PCA RMS ANALOGE 8 (Y)FLTR.200M (Y)ELEM.PRESSURE 20PSI (Y)SW.HEATING PLAT (Y)ELEMENT HEATING (Y)FUSE.

AM100 MODIFIDE OXIDE ETCHER (X) BELLOWS MOLDED GANBAL AS OXIDE ETCHER (X) CAPACITOR (1000PF) OXIDE ETCHER (X) CONNECTOR (6 PIN) OXIDE ETCHER (X) CONNECTOR OXIDE ETCHER (X) PLATEN SHAFT VAC CHAMBER OXIDE ETCHER (X) RF COUPLER OXIDE ETCHER (X) DISTRIBUTION BOARD COMPUT OXIDE ETCHER (X) COIL AUTOMATCH OXIDE ETCHER (X) HOT ELECTRODE 5" CAP OXIDE ETCHER (X) ELECTRODE CHUCK OXIDE ETCHER (X) CABLE ASSEMBLY E80/COOLER OXIDE ETCHER (X) CHUCK WAFER DIP OXIDE ETCHER (X) DOOR SHAFT OXIDE ETCHER (X) FILTER OPTICAL OXIDE ETCHER (X) FILTER RF/UV VACUUM CHAM LOCATION N-7-4-1 N-7-4-1 N-7-4-1 N-7-4-1 N-7-4-1 N-7-4-1 N-7-4-1 N-1-3-4 N-1-3-4 L-9-4 N-1-3-4 B-3-4-1 B-3-4-1 B-3-4-1 H-7-3 F-4-5-1 K-3-4-2 N-6-4-3 J-3-4 K-3-4-2 N-2-2-1 N-6-4-3 N-6-4-3 N-6-4-3 L-1-4 E-3-3-3 C-4-1-1 D-1-4-3 D-1-4-3 B-1-1 N-6-4-2 J-4-2-3 N-6-4-2 N-6-4-2 M-7-1-2 B-1-1 K-11-4-2 K-11-4-2 VENDOR PART NO 301333-001 302564-001 230023-001 230023-001 230155-001 230232-001 301778-001 304073-001 238781 248281 099402 069661 F-AVP125-C F-SV100-C 4-813670-A 3-817406-6 2-818273-B 1-811130 3-820392-A 2-813358-A 3-821952-5 3-821946-A 3-823132-4 3-820476-6 2-809561-A 3-823394-A 3-827895 3-821945-1 4-814231-1 3-820397-Q 412509-002 09918 07164 09675 11020 07095 07660 30050 09671 70087-01 2180-0192 2130-0102 09948 3260 71417-01 12765-01 10296-01 06731 08615 8300-0007 09974 수량 2 4 2 2 3 3 2 2 1 1 1 3 2 2 1 1 1 1 1 1 1 1 5 4 1 1 1 1 1 2 1 1 1 1 1 1 1 1 1 2 1 6 2 1 1 2 7 3 1 2 4 1 1 LOC VENDOR F61 F61 F61 F61 F61 F61 F61 F61 F61 F61 Q62 F61 G15 G15 H21 G15 X43 X43 X42 I31 H71 I41 H21 H21 G24 H71 I32 I41 I41 I41 H23 G93 T13 T41 T41 T42 T41 T42 G93 G93 G93 G93 G93 G93 T41 G93 G93 G93 G93 G93 G93 G93 G93 " " " " " " " " FUSION " FUSION FUSION HITACHI " HITACHI " " HITACHI " HITACHI " " " " HITACHI " " " " " FSI B/IPC " " " " " " " " " " " " " " " " " " " " " .ETCHER(ECR-308) SLEEVE BEARING ETCHER PIPE.ETCHER(ECR-308) O-RING G135 M.ETCHER(ECR-308) WASHER M.SPDT HF VAPOR SYS (Y)SWITCH.ETCHER(ECR-308) (Y)AIR CYLINDER M.ETCHER(ECR-308) (X)BELLOW FLANGE M.TAPPER EXHAUST OXIDE ETCHER (X)ARM PLATEN SUPPORT HSG5" OXIDE ETCHER (X) PCB KEYBOARD DISPLAY OXIDE ETCHER (X) PCB VOARD ASS'Y ARM MOTOR OXIDE ETCHER (X) PCB PRESSURE CONTROLLER OXIDE ETCHER (X) PCB (RS 232) OXIDE ETCHER (X) S/R 3PC BOARD ASS'Y OXIDE ETCHER (X) PCB ASSY.V BAKE (Y)TRANSMETER THERMO ETCHER (Y)F-AVP125-C ETCHER (Y)F-SV100-C ETCHER (Y)TIMING BELT ETCHER BOLT ETCHER (Y)TEMPERATURE CONTROL M.ETCHER(ECR-308) HANDLE M.WATCH DOG HF VAPOR SYS (Y)TANDUCER UV BAKE (Y)SIGNAL TOWER CONT UV BAKE (Y)GRAPHIC FIEXIBLE UV BAKE (A)RF SCREEN U.No Item no 2610 2611 2612 2613 2614 2615 2616 2617 2618 2619 2620 2621 2622 2623 2624 2625 2626 2627 2628 2629 2630 2631 2632 2633 2634 2635 2636 2637 2638 2639 2640 2641 2642 2643 2644 2645 2646 2647 2648 2649 2650 2651 2652 2653 2654 2655 2656 2657 2658 2659 2660 2661 2662 4272S-006 4272S-007 4272S-008 4272S-008 4272S-011 4272S-012 4272T-002 4272T-005 4276B-007 4276B-009 4276S-001 4276T-001 3302A-009 3302A-010 3302B-051 3302B-092 3302C-007 3302C-008 3302C-026 3302F-032 3302H-054 3302H-055 3302O-035 3302O-043 3302S-002 3302S-111 3302S-127 3302S-153 3302S-154 3302S-155 3304P-003 3311A-001 3311B-016 3311B-019 3311B-025 3311B-031 3311B-032 3311B-037 3311B-064 3311C-009 3311C-021 3311C-042 3311C-051 3311C-052 3311C-055 3311C-058 3311C-060 3311C-061 3311C-063 3311C-064 3311D-022 3311F-003 3311F-005 장비명 DESCRIPTION HF VAPOR SYS (Y)SWITCH.ETCHER(ECR-308) SHAFT M.ETCHER(ECR-308) HOUSING M.ETCHER(ECR-308) (Y)LEAF SPRING M.ETCHER(ECR-308) (Y)SUPPORT M.MICRO.ETCHER(ECR-308) (Y)DRY PUMP CONTROLL M.ETCHER(ECR-308) (Y)VACUUM SWITCH M.PRXMTY HF VAPOR SYS (Y)SWITCH DOOR INTER HF VAPOR SYS (Y)SWITCH DOOR INTER HF VAPOR SYS (Y)SWITCH MICR6 SPST HF VAPOR SYS (Y)PHOTO SWITCH RETR HF VAPOR SYS (Y)TIMMER.ETCHER(ECR-308) SHAFT M.

06 (X) O-RING (SEAL306-321) (X) O-RING 3/16 VITON 2.SET B/D 5"BELLOWS (1" SS) (Y)5"BELLOWS (3/8" S (Y)5"OPERATOR ILLUMI (Y)5"S/W CONTACT BLO (Y)5"S/W CONTACT BLO (Y)5"BUBBER QUARTZ (Y)5"PWA MASS FLOW C (Y)5"PC ASS'Y EGA (Y)5"PC ASS'Y VIDEO INTERFACE (Y)5"CAPICTOR (Y)5"CAPICTOR (Y)5"CAPACITOR 130 P (Y)5"CAPACITOR 180 P LOCATION H-10-1 K-11-4-2 K-11-4-2 K-11-4-2 K-11-4-2 K-11-4-2 K-11-4-2 K-11-4-2 K-11-4-2 K-11-4-2 K-11-4-2 K-10-5-2 K-10-5-2 K-11-4-2 K-10-5-2 K-11-4-2 K-10-5-2 K-10-5-2 B-1-2-3 B-3-2-4 B-3-2-4 B-3-2-4 B-3-2-4 B-3-2-4 B-3-2-4 B-3-2-4 B-3-2-4 B-3-2-4 L-11-4-1 L-11-4-1 L-11-4-1 L-11-4-1 VENDOR PART NO 72537-01 71773-03 71773-05 52555 52630 06803 5975-0071 71015-01 71005-21 08658 71582-38 09946 09875 10166 10144 10147 10148 08776 10201 72860-03 5930-0099 13284-01 13284-01 15451-01 02892 C-4-3-3 C-4-3-3 L-11-4-1 L-11-4-1 L-11-4-1 C-4-3-3 N-6-4-3 B-4-3-1 B-4-3-1 B-4-3-1 M-7-1-3 L-11-4-1 L-11-4-1 L-11-4-1 B-4-1-1 L-2-4-4 B-4-1-1 B-4-1-1 B-4-3-1 10550 10570 13564-02 B02912A B02916A 04616 04599 71214-01 71216-01 71216-02 14738-01 13214-01 73221-01 73221-01 70067-05 70065-01 73030-06 73030-07 수량 1 9 2 2 1 1 4 2 2 8 1 3 3 2 3 6 1 7 1 4 10 4 4 5 4 1 1 1 1 1 1 1 5 5 1 2 1 2 1 4 2 4 2 2 1 1 1 1 3 3 1 1 3 LOC VENDOR G93 G93 G93 G93 G93 G93 G93 G93 G93 G93 G93 G93 G93 G93 G93 G93 G93 G93 T22 G93 G93 G93 G93 G93 G93 G93 G93 G93 T63 T63 T63 T63 T63 T63 T63 T63 T63 T63 T63 I41 I41 G12 G12 G12 H31 T63 T63 T63 G16 G16 G16 G16 G12 " " " " " " " " " " " " " " " " " " " " " " " " " " " " B/IPC " " " " " " " " " " " " " " " B/IPC " " " " " " " " . STRIP MATC (X) FITTING TUBE (X) SOLENOID VALVE (24VDC) (X) SOLENOID VALVE (Y)5"PWA AUTOMATCH (Y)5"MOTHER BOARD 3000C PCB (Y)5"PWA EOP/CON PRE (Y)5"PWA MASS FLOW C (Y)5"PCB ASSY DISPLA (Y)5"PCB ASSY DISPLAY 906U (Y)5"PCB ASS'Y DATEL (Y)5"PCB VACUUM TRIG (Y)5"PCB ASS'Y FR CO (Y)5"TEMP.No Item no 장비명 2663 2664 2665 2666 2667 2668 2669 2670 2671 2672 2673 2674 2675 2676 2677 2678 2679 2680 2681 2682 2683 2684 2685 2686 2687 2688 2689 2690 2691 2692 2693 2694 2695 2696 2697 2698 2699 2700 2701 2702 2703 2704 2705 2706 2707 2708 2709 2710 2711 2712 2713 2714 2715 3311F-006 3311F-008 3311F-009 3311F-010 3311F-032 3311F-033 3311J-001 3311N-001 3311O-024 3311O-025 3311O-027 3311P-007 3311P-008 3311P-009 3311P-010 3311P-011 3311P-014 3311P-020 3311R-004 3311R-018 3311R-019 3311S-035 3311S-036 3311S-040 3311S-054 3311T-035 3311V-004 3311V-005 3312A-041 3312B-004 3312B-006 3312B-009 3312B-012 3312B-012 3312B-015 3312B-016 3312B-017 3312B-021 3312B-022 3312B-052 3312B-053 3312B-062 3312B-063 3312B-064 3312B-066 3312B-067 3312B-069 3312B-072 3312C-003 3312C-004 3312C-005 3312C-006 3312C-032 OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER OXIDE ETCHER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER DESCRIPTION (X) VACUUM PUMP FILTER (X) GASKET FILTER 5" (X) FILTER 520MM OPTICAL (X) FILTER 700 NN LOTUCAK (X) FAN FLATE (X) FAN FLATE (X) CASSETTE RECORD JACK (X) NIPPLE SS 1/8 NPT/M*1.329 (X) PLATE DIFFUSION HOT ELE (X) STRIP PLATEN (X) LOAD COCK PUMP (X) PLATEN ASS'Y (X) PLATE DIFFUSION HOT ELEC (X) SOCKET RELAY (X) HOUSING SENSOR (X) CLAMP NUT SENSOR (X) LIGHT PIPE SENSOR (X) HOT ELECTRODE.DISPLAY B/ (Y)5"TEMP.

C BOARD EOP DETCETOR (X) P.C L8013 CCTZ (Y)5"LAMP RED 115V 5 (Y)5"LAMP AMBER 115V (Y)5"WEDGE BASE LAMP (Y)5"GAS MODULE (Y)5"WETT METER (0-1 (Y)5"WATTMETER MODUTEC 2-1/2"0 (Y)5"FLOWMETER LAUM (Y)5"MATCHING NETWOR (Y)5"POWER ONE 5V @6 (Y)5"POWER ONE 5V @6A 12-14 (Y)5"WELD HEATED PLA (Y)5"METER DIGITAL P (Y)5"WELD CHAMBER UP (X)5"TEFLON PLATE (Y)5"Q'TZ VAC CAP (Y)5"STANDOFF. COOLI 5"TUNNEL (Y)5"Q'TZ LATTICE TR (Y)5"SOLENOID VALVE (Y)5"MANIFOLD SOLENO (Y)5"PWA THYUMBWHEEL (Y)5"WASHER SPHER. 73164-01 02888-02 71552-06 71552-02 B-09835 수량 2 2 1 6 5 30 4 2 12 3 34 2 2 2 1 2 10 10 9 10 10 8 10 6 2 2 2 2 2 2 1 1 1 2 2 1 1 1 1 1 1 5 2 2 1 1 4 1 12 1 6 3 4 LOC VENDOR R62 G16 X42 G16 G16 I41 G16 G12 I41 G12 T44 G16 G16 T44 I41 I41 T62 T44 T44 T62 T44 T44 T44 T44 T44 T62 T62 G16 G16 H24 I24 G12 G12 G12 X13 T63 T63 I24 G12 I24 X24 G68 I41 X12 H32 I41 I41 T63 I41 T22 T22 T22 T22 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " B/IPC " " " .C BOARD WAFER SENSOR VENDOR PART NO 05361 70056-41 70058-01 70058-07 72991-41 73003-01 70088-02 10429 23220-01 70109-03 70122-11 06534 (5784-01 70716-01 70716-01 70412-01 70412-01 J-2-1-2 J-2-1-2 J-2-1-2 J-5-4 B-4-3-1 B-4-3-1 A-2-2. (Y)5"METER DIGITAL D (Y)5"DIODE (Y)5"DIODE IN 5231 M (Y)5"HEAD ASSY DETEC 3Y)5"RF FILTER ASSY (Y)5"IC 40106 LOCATION 04441 B-4-1-1 B-3-3-3 B-4-1-1 B-4-3-1 B-3-3-3 B-4-3-1 J-1-2-2 B-4-1-1 B-4-1-1 J-1-2-2 B-3-3-3 B-3-3-3 (Y)5"IC AD 7503 (Y)5"I.001UF (Y)5"CAP TUBULAR 25P (Y)5"CAP TUBULAR 1000PF 5 KVDC (Y)5"CAP CER 001UF 6 (Y)5"CAP TUBULAR 100 (Y)5"CAP FEED THRU .C LM725 (Y)5"I. D-1-1 I-4-2 B-3-3-3 N-6-4-3 L-11-4-1 N-6-4-3 N-1-1-4 N-1-1-4 N-1-1-4 N-1-1-4 70889-01 70889-01 71303-01 71303-03 72957-06 15147-01 02714 02888-02 72761-01 MW-10D 71255-02 73077-06 16092-99 71321-01 15312-01 02973-002 15372-01 04713 05887 5935-0027 73316-03 02888-02.C LM725 (Y)5"I. S (X) PADDLE BOARD (50 PIN) (X) PADDLE BOARD(20 PIN) (X) P. I-8-1 L-11-3-4 L-11-3-4 J-1-1-2 B-4-3-1 I-7-3 D-3-1 N-6-4-3 I-4-1.No Item no 2716 3312C-051 2717 3312C-052 2718 3312C-058 2719 3312C-060 2720 3312C-061 2721 3312C-062 2722 3312C-063 2723 3312C-064 2724 3312C-067 2725 3312C-068 2726 3312D-002 2727 3312D-004 2728 3312D-005 2729 3312D-006 2730 3312D-052 2731 3312F-001 2732 3312I-002 2733 3312I-004 2734 3312I-005 2735 3312I-006 2736 3312I-007 2737 3312I-009 2738 3312I-010 2739 3312I-011 2740 3312I-012 2741 3312I-012 2742 3312I-013 2743 3312L-001 2744 3312L-002 2745 3312L-004 2746 3312M-002 2747 3312M-032 2748 3312M-033 2749 3312M-035 2750 3312N-001 2751 3312P-001 2752 3312P-001 2753 3312P-022 2754 3312P-025 2755 3312P-026 2756 3312P-028 2757 3312P-029 2758 3312S-006 2759 3312T-051 2760 3312T-054 2761 3312V-002 2762 3312V-010 2763 3312W-002 2764 3312W-003 2765 3313B-001 2766 3313B-002 2767 3313B-003 2768 3313B-004 장비명 PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER DESCRIPTION 5"COUPLER ASSY EXHAUST BRASS (X)5" (L)5"QTZ CHAMBER (Y)5"CAP CER .

CIRCUIT BOARD (X) SENSOR.O.C BOARD SWITCH (X) BOARD STRIP LOCK PRESSURE (X) P.C BOARD REAR PANAL (FLOW (X)DRIVE BELT S/R ELEVATOR (X) SHIELD RF GEN B/D (X) BULKHEAD FEED THRU (X) BUSHING HOT ELECTRODE (X) SENSOR.No Item no 2769 3313B-005 2770 3313B-006 2771 3313B-013 2772 3313B-014 2773 3313B-020 2774 3313B-021 2775 3313B-024 2776 3313B-027 2777 3313B-029 2778 3313B-052 2779 3313B-056 2780 3313B-057 2781 3313B-059 2782 3313B-060 2783 3313B-060 2784 3313C-028 2785 3313C-029 2786 3313C-031 2787 3313C-032 2788 3313C-033 2789 3313C-050 2790 3313C-054 2791 3313C-055 2792 3313C-057 2793 3313C-058 2794 3313C-059 2795 3313C-060 2796 3313C-062 2797 3313C-064 2798 3313C-065 2799 3313D-012 2800 3313E-003 2801 3313F-016 2802 3313G-002 2803 3313H-002 2804 3313L-004 2805 3313M-004 2806 3313O-051 2807 3313Q-002 2808 3313Q-006 2809 3313S-013 2810 3313S-019 2811 3313S-020 2812 3313S-037 2813 3313S-043 2814 3313S-045 2815 3313S-046 2816 3313S-051 2817 3313T-017 2818 3313T-042 2819 3313T-043 2820 3313V-003 2821 3313W-001 장비명 METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER METAL ETCHER DESCRIPTION (X) BOARD STRIT ROCK S/W (X) PC BOARD LOAD LOCK S/W (X) P.C BOARD MOTHER BOARD (F (X) P.CIRCUIT BOARD (X) CONNECTOR (6 PIN) (X) CONNECTOR (3/8"MALE) (X) CONNECTOR (1/4"MALE) (X) CONNECTOR (FEMALE QUICK) (X) CONNECTOR (QUICK) (X) NUT CLAMP (X) COVER (PM132) (X) COOLER ASSY (X) CLAMP CAP HOT ELECTODE (X) CLAMP PLATE INNER (X) CLAMP PLATE INNER (X) PLATEN SHAFT VAC CHAMBER (X) CLAMP HOT ELECTRODE (X) CHUCK WAFER DIP BRAZE (X) ELECTRODE CLAMP PLATE (X) LIGHT PIPE E.C BOARD POWER SUPPLY (2 (X) P.220) (X) LIGHT PIPE ENTRAN SOURCE (X) SENSOR BLOCK ASSY (X) DISC SPRING AM147235 (X) SENSOR FILTE (X) HEAT SINK TR (X)OUTSIDE PORCE TRACK (X)OUTSIDE PORCE TRACK (X) SOLENOID VALVE (4-WAY24V) (X) TEFLON WASHER LOCATION VENDOR PART NO B-3-2-2 B-08630 B-09105 B-06805 D-09570 B-09845 B-09345 C-08710 C-07105 C-08770 7900-0010 11856 09532 08916-01 BM-2522-1 R-2175 71415-07 5975-0172 72551-03 72546-02 72551-04 10147 11859 C-09385 08919-01 09529 09531 09948 08918-01 08615 B-09314 B-09842 M-630 71774-01 A 09450 B-3-2-2 71314-02 72979-04 N-1-1-4 N-1-1-4 N-1-1-4 N-1-1-4 N-1-1-4 N-1-1-4 N-1-1-4 N-1-1-4 K-11-7-3 K-11-7-3 N-7-2-2 N-7-2-2 N-7-2-2 N-7-2-2 B-3-2-2 H-1-2 B-3-2-2 B-3-2-2 B-3-2-2 B-3-2-2 B-3-2-2 B-3-2-2 I-3-3 I-3-3 B-4-1-3 B-4-1-3 B-4-1-3 I-3-3 B-4-1-3 B-4-1-3 B-4-1-3 B-4-1-3 B-4-1-3 B-4-1-3 B-4-1-3 B-08561 08576 71582-12 10198 07067 A 08528 B-08694 09770 71747-01 A402 A 04485 A-4391-1 A-4395-2 72795-01 71582-06 수량 1 1 1 3 3 2 1 1 3 6 1 2 4 12 13 3 10 10 4 10 8 1 1 3 12 12 1 3 3 1 1 1 3 4 1 6 2 2 4 4 1 2 2 2 14 8 36 13 5 4 4 2 30 LOC VENDOR T22 T22 T22 T22 T22 T22 T22 T22 T22 G94 G94 G94 G94 G94 G94 G94 I43 I43 I43 I43 G94 G94 G82 G94 G94 G94 G82 G94 G94 G94 G94 G94 G94 G94 G94 G94 G94 G83 B83 B83 G94 G94 G94 B83 B83 G94 G94 G94 G94 G94 G94 G94 G94 " " " " " " " " " B/IPC " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .C BOARD ANALOG I/O (X) COMPUTER BOARD (X) P.P DETECTOR (X) ELEMENT OF MOTOR GUARD (X) OPTICAL FILTER (430 mm) (X) GROUND START ASS'Y (X) HARD ANODIZED REF 4654-1H (X) SOCKET LAMP (X) METER DIGITAL DISPLAY (X) PRESS OIL ASS'Y (X) COLLAR QUARTZ (X) QUARTZ COLD RING (X) REFLECTIVE S/W (X) BRACKET MICRO S/W (X) FLANGE SWITCH ACTUATOR CAM (X) LIGHT PIPE SOURCE (0.

No Item no 2822 3313W-002 2823 3313Z-999 2824 3315P-051 2825 3321A-001 2826 3321B-001 2827 3321B-002 2828 3321B-003 2829 3321B-004 2830 3321B-008 2831 3321B-009 2832 3321B-010 2833 3321B-011 2834 3321B-013 2835 3321B-014 2836 3321B-015 2837 3321B-031 2838 3321B-033 2839 3321B-034 2840 3321B-038 2841 3321B-041 2842 3321B-042 2843 3321B-043 2844 3321B-044 2845 3321B-046 2846 3321B-048 2847 3321B-049 2848 3321B-051 2849 3321B-052 2850 3321B-054 2851 3321C-001 2852 3321C-004 2853 3321C-014 2854 3321C-015 2855 3321C-016 2856 3321C-017 2857 3321C-020 2858 3321C-021 2859 3321C-022 2860 3321C-023 2861 3321C-024 2862 3321C-025 2863 3321C-032 2864 3321D-002 2865 3321D-003 2866 3321D-004 2867 3321D-006 2868 3321D-007 2869 3321D-008 2870 3321E-001 2871 3321F-004 2872 3321F-021 2873 3321F-022 2874 3321F-023 장비명 METAL ETCHER METAL ETCHER PR STRIPPER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER DESCRIPTION (X) WINDOW VIEW PORT (X) PLATE LOCATION B-4-1-3 B-4-1-3 F-5-2 E-2-3 J-1-2-2 J-2-3-2 J-2-3-2 J-1-2-2 C-4-1-1 D-1-4-3 J-2-3-2 C-4-1-1 J-2-3-2 J-1-2-2 J-1-2-2 C-4-4-4 M-6-4-1 C-4-4-4 C-4-4-4 C-4-4-4 C-4-4-4 J-1-2-2 C-4-4-4 J-2-3-2 C-4-4-4 C-4-4-4 C-4-4-4 C-4-4-4 J-2-3-2 J-2-3-2 J-2-3-2 C-4-1-1. C-4-2-1 C-4-4-4 C-4-4-4 J-2-3-2 C-4-4-4 J-2-3-2 J-2-3-2 C-4-4-4 E-3-3-3 N-1-2-1 C-4-4-4 C-4-4-4 VENDOR PART NO 71582-03 70843-01 수량 1 2 1 23 3 2 14 2 1 1 1 1 1 1 1 6 2 1 1 2 1 8 15 3 6 4 6 1 4 3 4 2 3 4 2 9 13 9 6 2 7 10 8 1 13 10 9 5 1 2 1 8 60 LOC VENDOR G94 G94 DD11 G82 T44 T44 T44 T44 T41 T42 T44 T41 T44 T22 T44 G95 T44 W15 G95 G95 G95 W15 G95 G95 W15 G95 G95 G81 T44 G95 T44 G95 G95 G95 G95 T44 T44 T44 T44 T41 G81 G94 T44 G95 T44 T44 G95 T13 X11 G95 G95 G95 G95 " " B/IPC DRYTEK DRYTEK " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .

L-7-1 C-4-4-4 C-4-4-4 C-4-4-4 B-3-1-4 M-7-1-2 M-7-1-2 J-1-2-2 J-1-2-2 J-1-2-2 J-1-2-2 J-1-2-2 J-1-2-2 J-1-2-2 J-1-2-2 J-1-2-2 J-1-2-2 J-1-2-2 J-1-2-2 J-1-2-2 J-1-2-2 M-7-1-2 M-7-1-2 M-7-1-2 K-8-4 J-1-2-2 D-1-3-2 M-7-1-2 D-1-3-2 M-7-1-2 C-4-4-4 L-9-7 M-7-1-2 K-11-7-3 M-7-1-2 M-7-1-2 VENDOR PART NO 수량 10 2 1 1 4 10 2 2 3 1 10 13 2 4 2 5 5 5 1 5 7 4 4 5 5 5 3 5 5 10 6 10 10 5 5 5 1 1 1 4 5 2 140 9 1 4 1 1 1 4 1 6 9 LOC VENDOR G95 G95 G82 G82 G82 G95 G95 G94 G95 G95 G95 G95 G83 G81 G81 T44 T44 T44 G95 T44 T44 T44 T44 T44 T44 T44 T44 T44 T44 T44 T44 T44 T44 T44 T44 T44 G95 G95 G95 G81 T44 T22 G95 T22 G95 G95 P43 P33 P43 G95 G95 G95 G95 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " . L-7-1 C-4-4-4.No Item no 장비명 2875 2876 2877 2878 2879 2880 2881 2882 2883 2884 2885 2886 2887 2888 2889 2890 2891 2892 2893 2894 2895 2896 2897 2898 2899 2900 2901 2902 2903 2904 2905 2906 2907 2908 2909 2910 2911 2912 2913 2914 2915 2916 2917 2918 2919 2920 2921 2922 2923 2924 2925 2926 2927 3321F-024 3321F-026 3321F-030 3321G-001 3321G-001 3321G-002 3321G-002 3321G-003 3321G-006 3321G-007 3321G-009 3321G-009 3321G-011 3321H-002 3321H-002 3321I-001 3321I-002 3321I-003 3321I-004 3321I-005 3321I-006 3321I-007 3321I-008 3321I-009 3321I-010 3321I-011 3321I-012 3321I-013 3321I-014 3321I-016 3321I-016 3321I-017 3321I-018 3321I-019 3321I-020 3321I-021 3321I-041 3321I-042 3321I-043 3321I-044 3321L-003 3321L-004 3321L-007 3321L-022 3321M-006 3321M-007 3321M-011 3321M-012 3321M-012 3321M-013 3321M-022 3321M-037 3321N-001 ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER DESCRIPTION LOCATION C-4-4-4 C-4-4-4 E-2-3 E-2-3 C-4-4-4.

D-1-4-3 J-2-3-2 J-2-3-2 B-3-4-4 B-3-4-4 B-3-4-4 H-9-3 B-3-4-4 B-3-4-4 B-3-4-4 J-1-2-2 J-1-2-2 B-3-4-4 E-3-1 J-1-2-2 J-1-2-2 J-1-2-2 B-1-2-3 B-3-4-4 B-3-4-4 B-3-4-4 B-3-4-4 B-3-4-4 B-3-4-4 J-1-2-2 B-3-4-4 B-3-4-4 B-3-4-4 B-3-4-4 B-3-4-4 B-3-4-4 B-3-4-4 B-3-4-4 B-3-4-4 VENDOR PART NO 수량 3 4 6 1 30 30 20 2 1 1 5 3 18 17 2 2 1 10 6 10 10 16 4 18 2 7 5 1 9 1 6 4 5 25 59 6 5 1 2 1 1 2 1 12 2 5 4 14 4 1 1 1 1 LOC VENDOR G95 G95 G95 G95 G95 G95 G95 G83 T44 T44 G82 T44 G95 G95 G95 G82 G95 G95 T42 T44 T44 G95 G95 G95 X23 G95 G95 G95 G95 G95 T44 G95 G96 T44 T44 T44 T22 G96 G96 G96 G96 G96 G96 T44 G96 G96 G96 G96 G96 G96 T21 G96 G95 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .No Item no 장비명 2928 2929 2930 2931 2932 2933 2934 2935 2936 2937 2938 2939 2940 2941 2942 2943 2944 2945 2946 2947 2948 2949 2950 2951 2952 2953 2954 2955 2956 2957 2958 2959 2960 2961 2962 2963 2964 2965 2966 2967 2968 2969 2970 2971 2972 2973 2974 2975 2976 2977 2978 2979 2980 3321N-002 3321O-001 3321O-005 3321O-006 3321O-007 3321O-008 3321O-009 3321P-001 3321P-002 3321P-003 3321P-004 3321P-005 3321P-024 3321P-025 3321P-026 3321P-033 3321P-034 3321P-036 3321R-001 3321R-003 3321R-012 3321R-016 3321R-018 3321R-019 3321R-021 3321R-022 3321R-024 3321S-001 3321S-004 3321S-005 3321S-005 3321S-006 3321S-007 3321S-008 3321S-008 3321S-009 3321S-010 3321S-012 3321S-013 3321S-021 3321S-021 3321S-022 3321S-023 3321S-025 3321S-027 3321S-029 3321S-030 3321S-030 3321S-031 3321S-031 3321S-032 3321S-032 3321S-032 ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER DESCRIPTION LOCATION M-7-1-2 J-2-3-2 J-2-3-2 E-2-3 J-2-3-2 B-3-4-4 B-3-4-4 B-3-4-4 E-2-3 B-3-4-4 K-10-4-1.

3KW NSR-15TBA-1UU-2 MH23C LH50 DC12 수량 9 110 5 1 3 3 1 10 10 2 1 1 3 50 2 2 11 1 8 13 5 2 7 2 3 18 7 5 2 1 1 10 1 1 7 3 5 2 3 2 1 1 1 1 4 2 2 14 2 2 1 5 2 LOC VENDOR W15 G96 G96 G96 G96 G96 G96 T13 T13 G95 T44 T23 G95 W15 T44 T22 G95 G95 G95 G97 G95 G95 G95 G95 G95 T22 G95 H21 H12 H21 T14 H21 G62 G15 G15 G17 G17 G17 G15 G17 I31 DD14 DD14 G66 H23.Z19 P25 H23 H23 I41 I41 G91 G31.4 REX-P101F4C-RAN* MSC-2-C-3x6 MC24LSF MC24SM MC20SM MC16SF MC16LSM MC12SF AP3-16688 AT511-00VG2 A223-04-091 AP2-16759-C 2GK-25 AP2-10255-A AP2-10255-A AP3-24816 AP2-24817 200V 1.W15 P53 " " " " " " " " " " " " " " " " " " " " " " " " " " " PSC " " PSC " " PSC " " " " " " " " " " " " " " " " " " " .No Item no 2981 3321S-034 2982 3321S-035 2983 3321S-036 2984 3321S-037 2985 3321S-040 2986 3321S-041 2987 3321S-042 2988 3321T-002 2989 3321T-006 2990 3321T-011 2991 3321T-013 2992 3321T-014 2993 3321T-022 2994 3321T-024 2995 3321T-027 2996 3321T-028 2997 3321T-031 2998 3321T-033 2999 3321T-036 3000 3321U-002 3001 3321V-001 3002 3321V-004 3003 3321V-007 3004 3321V-008 3005 3321V-009 3006 3321V-032 3007 3321W-006 3008 3351B-012 3009 3351B-014 3010 3351B-019 3011 3351B-061 3012 3351B-068 3013 3351C-025 3014 3351C-041 3015 3351C-083 3016 3351C-084 3017 3351C-086 3018 3351C-087 3019 3351C-088 3020 3351C-089 3021 3351E-011 3022 3351F-010 3023 3351F-015 3024 3351F-018 3025 3351F-081 3026 3351G-001 3027 3351G-002 3028 3351G-002 3029 3351H-011 3030 3351H-012 3031 3351L-001 3032 3351L-021 3033 3351M-001 장비명 ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER ETCHER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER DESCRIPTION LOCATION VENDOR PART NO B-3-4-4 B-3-4-4 B-3-4-4 B-3-4-4 B-3-4-4 B-3-4-4 E-3-3-3 E-3-3-3 M-5-3-2 J-1-2-2 E-2-1 M-5-3-2 L-7-3 J-1-2-2 B-1-2-3 M-5-3-2 M-5-3-2 M-5-3-2 M-5-3-2 M-5-3-2 M-5-3-2 M-5-3-2 M-5-3-2 B-1-2-3 M-5-3-2 (Y)TIMING BELT (Y)TIMING BELT TIMING BELT (Y)PCB INPUT ROLLER TIMING BELT TEMP CONTROLLER SLIP CLATCH (Y)CN28 (LOADER-CHAR CN28 SENSE CABLE CN29 SENSE CABLE (Y)CN33A (LIFTER ) S CN33A SENSE CABLE (Y)CN33B (LIFTER) SE (Y)ELECTRODE (X)OIL FILTER ELEMENT (X)CON INED CHEMICAL (X)FILTER HOUSING CARTRIDGE CHAMBER FLANGE 1 GEAR HEAD (L)WAFER GUIDE(A)6" (L)WAFER GUIDE(A)6" HEATER BLOCKET 1 HEATER BLOCKET 2 HALOGEN LAMP LM GUIDE(PUSHER) (Y)DC MOTOR 130T-80-6.4K TID-15-145 T10-15-15-145 D-2-5-2 B-3-4-1 B-3-4-1 L-12-2-2 L-12-2-2 L-12-2-2 B-3-4-1 L-12-2-2 J-5-1 E-2-2 E-2-2 J-4-1-1 K-3-1-4 A-3-6 A-3-6 N-6-4-3 N-6-4-3 D-3-2-1 H-1-2 71-MxL-6.

5 MM32AH2L-12.ACATAL 8 (Y)COLLAR SPRAY POST (Y)DLAPHRAGM.W18 X11 G31 I41 T62 T63 T62 T63 G62 G14 H21 I41 I32 I41 X32 T63 I41 I41 G13 G13 G13 G12 I41 I32 G14 T63 T63 H23 G13 G12 G13 H23 H21 H23 H23 " " " " " " " " " " " " " " " " " PSC " " " " METRON METRON " " " " " " " " METRON " " " " " " " " " " " " " " " " " " " " . FUSAHOLD (Y)BREAKER. ASSY (Y)BRACKET. BEARING (Y)BREAKER. PYDF 3/32T LOCATION VENDOR PART NO M-2-1-3 H-1-2 H-1-2 MS-10 MW23E-H1-60 OPT-IN32 MW23E-H1-60 MM23E-LH-2. FUSE HOL (Y)BREAKER.DOOR LOCK CY (Y)MOTOR SPEED CONTR (Y)CARD (Y)CAP HUB (Y)CONTRACTOR (Y)COUPLING. 8 PORT (Y)COUPLING.5 MM23E-H1-60 DC24 PM2501A SS31MA-J PSC-304AVL3 AP3-30096 VTI48C O-400C O MM23E-LH-2.5 RS-520HI IFW-S10-03-00 FMP05-2RO AP4-16704 AP4-12229 AP3-11932 AP4-23438 PAV-40 TYPOE 3 CV 0.FUSAHOLDE (Y)CYLINDER (Y)CYLINDER (Y)ASSY. ROTATE (Y)RECTIFIER BRIDGE (Y)WELD BOWL (Y)PNEUMALODIC PCB (C)BEARING BALL (Y)SPECAR. QUICKD (Y)BURST DISK 42-47 (Y)ELBOW.No Item no 장비명 3034 3035 3036 3037 3038 3039 3040 3041 3042 3043 3044 3045 3046 3047 3048 3049 3050 3051 3052 3053 3054 3055 3056 3057 3058 3059 3060 3061 3062 3063 3064 3065 3066 3067 3068 3069 3070 3071 3072 3073 3074 3075 3076 3077 3078 3079 3080 3081 3082 3083 3084 3085 3086 3351M-002 3351M-006 3351M-006 3351M-007 3351M-016 3351M-019 3351M-022 3351P-002 3351P-011 3351P-061 3351R-007 3351S-007 3351S-013 3351S-019 3351S-023 3351S-031 3351S-033 3351S-054 3351S-066 3351T-043 3351V-002 3351V-015 3352A-001 3352A-003 3352A-004 3352A-005 3352A-006 3352B-001 3352B-002 3352B-003 3352B-004 3352B-006 3352B-007 3352B-008 3352B-009 3352B-031 3352B-051 3352B-052 3352B-053 3352B-054 3352C-001 3352C-002 3352C-004 3352C-006 3352C-011 3352C-013 3352C-014 3352C-015 3352C-016 3352C-021 3352D-001 3352D-002 3352E-001 PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER DESCRIPTION DC MOTOR CONTROLLER DC MOTOR DC MOTOR (Y)AC MOTOR DC MOTOR DC MOTOR DC MOTOR MM23E (Y)POWER SUPPLY PLAS (Y)CONTROL PACK PUSHER ASS'Y 6" (L)REFLECTING PLATE (Y)TEMP CONVERTER (Y)DIGITAL PRESSURE SENSOR BEAM SENSOR (Y)FLOM SWITCH POWER SUPPLY FRONT SEAL (Y)STOPPER SCREW SHAFT(PUSHER) (Y)AL TUNNEL SET PROMATIC VALVE (X)5"NEELDE VALVE (Y)ASSY PC HTC CONT (Y)ASSY DR VAL/INTLK (Y)ASSY SYSTEM 1/FACE (Y)ASSY FLOW CONTROL (Y)ASSY INLINA F/C L (Y)BURSH (Y)BELT POLYURETHANE (Y)BRUSH.FUSE HOLD (Y)BREAKER.03 ZT-18-123-3 290062-400 290025-400 900292-002 900662-001 230240-001 301740-006 230300-001 0992-80178 300511-001 402766-001 909-0563 301006-001 405049-001 230201-001 230201-010 230201-006 230201-002 300555-001 300527-001 901032-001 230488-001 300533-001 403037-001 230107-001 300893-002 300893-001 403905-001 302121-001 302898-001 301089-004 H-1-2 H-1-2 N-6-4-3 B-4-1-1 D-2-5-2 D-3-2-1 M-6-2-1 D-3-2-1 A-3-1 N-3-4-4 E-2-2 N-3-4-4 J-2-1-2 L-11-3-4 J-2-1-2 M-2-1-3 E-2-2 L-12-1-3 N-6-4-3 N-2-1-4 N-6-4-3 D-10-3 M-2-1-3 N-6-4-3 N-6-4-3 B-4-2-1 B-4-2-1 B-4-2-1 B-4-2-1 N-6-4-3 M-2-1-3 M-2-1-3 B-4-2-1 B-4-2-1 B-4-2-1 수량 2 2 2 1 2 1 2 1 1 1 4 1 1 3 1 1 4 3 3 3 2 1 1 1 1 1 1 13 2 8 1 2 1 1 2 1 2 3 3 1 1 1 2 1 2 3 1 1 1 1 2 1 5 LOC VENDOR T63 P54 P54 P12 P44 P53 P53 V11 G17 G34 I41 G16 T14 W15 R51 W15 H23 I41 G68.

DL2416MSP (X)MOTOR 1DDD/3 HP (Y)STARTER MOTOR (Y)MOTOR.HEX (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (C)O-RING (Y)O-RING LOCATION H-10-2 E-1-3 H-10-2 H-9-2 L-12-1-3 L-12-1-3 N-6-4-3 L-7-1 M-2-1-3 B-4-2-1 B-4-1-1 H-1-1 N-6-4-3 VENDOR PART NO 300523-001 301312-005 300834-004 300854-001 300525-001 300562-001 300322-001 402437-001 409165-002 300749-001 300414-002 250114-001 902101-001 0080 250106-001 230130-001 280010-001 909-1005 280030-001 900252-001 900252-002 900252-003 402218-001 302105-001 402008-001 300011-238 300038-010 300916-012 300038-230 300916-010 300038-115 300038-012 300038-117 300038-219 300038-008 300038-114 30038-030 300038-373 300038-241 300896-215 300038-118 300038-022 300038-337 300038-153 300038-108 300038-343 300038-036 300038-018 300916-008 300916-022 300917-008 300917-012 수량 5 3 6 3 3 1 1 4 1 2 1 2 1 1 2 2 1 1 2 2 10 10 10 10 7 1 10 10 10 10 10 6 4 2 5 9 1 4 5 3 4 6 7 6 8 4 2 1 1 3 1 3 1 LOC VENDOR G74 G32 H23 G74 G13 G14 G14 H23 H23 I41 I34 T63 G14 G13 G16 P32 T63 V11 P53 P55 H21 H21 H23 H23 H23 I41 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " . IRPM 12BDC (Y)ASSY.SPRAY 1/4P (Y)NUT. KYNAR 1/ (Y)FILTER HOUSING (Y)FILTER ELEMENT (Y)GAUGE (Y)GAUGE (Y)GASKET SPRAY POST (Y)GASKET.YITON (Y)FITTING.SPRAY (LO (Y)NOZZLE. TRAMSDUCE (Y)ELEMENT HEATER (Y)WTR IMMERSION 200 (Y)IC UA78540PC (Y)TACH/INDEX (Y)LIGHT RED 110V (Y)LED.AT MOTOR (Y)MOTOR 1/3 HP90VDC (Y)NOZZLE (Y)NOZZLE (Y)NOZZLE (Y)NOZZLE..No Item no 장비명 3087 3088 3089 3090 3091 3092 3093 3094 3095 3096 3097 3098 3099 3100 3101 3102 3103 3104 3105 3106 3107 3108 3109 3110 3111 3112 3113 3114 3115 3116 3117 3118 3119 3120 3121 3122 3123 3124 3125 3126 3127 3128 3129 3130 3131 3132 3133 3134 3135 3136 3137 3138 3139 3352F-002 3352F-003 3352F-021 3352F-031 3352F-032 3352G-001 3352G-002 3352G-011 3352G-012 3352H-002 3352I-001 3352I-003 3352I-004 3352L-001 3352L-002 3352M-001 3352M-002 3352M-003 3352M-004 3352M-006 3352N-001 3352N-002 3352N-003 3352N-004 3352N-005 3352N-021 3352O-002 3352O-003 3352O-004 3352O-005 3352O-006 3352O-007 3352O-008 3352O-009 3352O-010 3352O-011 3352O-013 3352O-014 3352O-015 3352O-016 3352O-017 3352O-018 3352O-019 3352O-020 3352O-021 3352O-022 3352O-023 3352O-024 3352O-025 3352O-026 3352O-027 3352O-028 3352O-029 STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER DESCRIPTION (Y)ELEMENT FILTER (Y)FILTER ELEM.

KALREZ (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING.No Item no 장비명 3140 3141 3142 3143 3144 3145 3146 3147 3148 3149 3150 3151 3152 3153 3154 3155 3156 3157 3158 3159 3160 3161 3162 3163 3164 3165 3166 3167 3168 3169 3170 3171 3172 3173 3174 3175 3176 3177 3178 3179 3180 3181 3182 3183 3184 3185 3186 3187 3188 3189 3190 3191 3192 3352O-030 3352O-031 3352O-032 3352O-033 3352O-034 3352O-035 3352O-036 3352O-037 3352O-038 3352O-039 3352O-040 3352O-041 3352O-042 3352O-043 3352O-044 3352O-045 3352O-046 3352O-047 3352O-048 3352O-049 3352O-101 3352O-102 3352P-005 3352P-011 3352P-012 3352P-013 3352P-015 3352R-001 3352R-002 3352R-003 3352R-004 3352S-007 3352S-008 3352S-011 3352S-012 3352S-014 3352S-015 3352S-016 3352S-019 3352S-020 3352S-032 3352S-035 3352S-037 3352S-041 3352S-061 3352T-001 3352T-002 3352T-003 3352T-004 3352T-005 3352T-006 3352T-007 3352T-021 STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER DESCRIPTION (C)O-RING.LIMITSWITCH (Y)ASSY. 5AMPS (Y)TRAMSISTOR. A (Y)ASSY.VITON-QUAD (Y)O-RING DOOR (Y)ORTFICE (Y)ORTFICE (Y)ASSY CONTROL PANE (Y)PLUG VINYL PORT (Y)PROBE TEMP (Y)POWER SUPPLY 5V (Y)PC ASSY 2800 POWE (Y)REGULATOR (X)REGULATOR (Y)REGULATOR (Y)STRAIN RELIEF (Y)SWITCH (Y)SWITCH (Y)SWITCH (Y)SWITCH (Y)SWITCH (Y)LINITED SWITCH.LIMITED SWIT (Y)TOGGLE SWITCH (15 (Y)PIN SHAFT (Y)SEAL BOOT (Y)BEARING SEALED (Y)ASSY. SLFHNYLN (Y)TIMER 120V (Y)INDICATOR DIGITAL (Y)52SY TRAMSDUER DOUBLE 6" (Y)TRAMSISTOR. RFPWR (Y)TEE FFMPFA 1/4PNPT1/4 (Y)ASSY TACG FIR IND (Y)TUBING TRAN LOCATION E-2-2 K-3-4-2 B-3-4-1 B-4-1-1 K-3-4-2 B-3-4-1 B-4-2-1 K-3-4-2 B-3-4-1 N-6-4-3 B-3-4-1 B-3-4-1 B-3-4-1 B-4-2-1 B-3-4-1 B-3-4-1 B-3-4-1 N-6-4-3 N-1-2-1 B-4-2-1 B-4-1-1 B-4-1-1 M-3-4 B-4-1-1 B-4-1-1 B-4-2-1 VENDOR PART NO 300917-010 300917-022 300896-335 301442-335 300777-241 300777-219 300777-030 300777-010 300777-022 300777-012 300777-008 300777-373 300917-030 300925-001 300919-231 300919-111 300919-342 300894-001 302120-001 403179-001 401562-002 401562-003 900928-001 300603-001 300429-001 2024 290019-400 300377-001 300837-001 300820-001 300202-019 300541-001 230023-002 230060-001 230082-002 2747 300982-002 900943-001 900943-004 230229-001 402160-001 402746-001 300010-006 989-0001 300842-015 280016-002 2593 909-1313 230696-001 230689-001 3000143-002 901020-001 2436 수량 5 1 1 1 1 1 1 1 1 1 3 1 1 12 5 3 6 2 1 2 7 7 1 7 2 1 1 1 1 1 2 2 2 1 1 1 1 2 2 1 2 1 2 2 10 1 1 1 1 1 20 1 1 LOC VENDOR H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H21 H23 H23 G15 H72 G15 V11 G16 H72 G15 G13 H72 G15 I41 G15 G15 G15 G13 G15 G15 G15 I41 H21 W15 G13 H23 G16 G16 T15 G16 G16 H23 G13 H23 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .CHAIN SENSOR (Y)SCR.

WAFER SUPPO (Y)5"CONN PINS FEMALE MOLEX (Y)5"ASSY PREFIRE-AU (Y)5"PLATE LIFTER (Y)5"RING EMISHIELD (Y)5"SCREW 2-56X1/8 (Y)5"DOOR SCREW (Y)5"SET SCREW FULL (Y)5"SCREW PAN HEAD (Y)5"SPRING COMPRESS (Y)5"SPRING COMPRESS (Y)5"SHOWER HEAD QUARTZ (Y)5"DOOR SPRING (Y)5"TUBE. WAFER SUPP (Y)5"PIN. QUARTZ PLASMA (Y)5"VALVE SOLENOID (Y)5"WINDOW (Y)5"WINDOW QUARTZ (Y)PCB TRANSPORT CON (Y)PROCESS INTERFACE (Y)PROCESS INTERFACE (Y)PCB TRANSPORT INTERFACE (Y)PCB PROCLSS CONTROLLER LOCATION B-4-2-1 B-3-4-1 K-3-4-2 N-6-4-3 N-3-4-4 N-3-4-4 N-3-4-4 N-3-4-4 B-4-1-1 N-3-3-2 N-3-4-4 N-6-4-3 M-7-1-3 N-6-4-3 K-3-4-2 L-12-2-2 N-3-4-4 K-3-4-2 N-3-4-4 N-3-4-4 L-12-2-2 N-6-4-3 N-6-4-3 N-3-4-4 N-6-4-3 N-3-4-4 N-3-4-4 N-3-4-4 N-3-4-4 M-7-1-3 L-12-2-2 M-7-1-3 M-7-1-3 J-4-3-4 J-3-5 N-3-4-4 J-3-5 VENDOR PART NO 901878-001 300457-001 300951-001 300743-009 400995-001 300313-001 A02-064-01 A02-082-01 A02-084-01 A02-084-04 A90-004-01 A07-006-01 A01-102-01 A96-018-01 A01-080-01 A93-022-01 A06-007-01 A01-076-01 A35-002-01 A95-031-01 A02-083-01 A39-001-01 A39-001-01 A39-005-01 A78-003-01 A78-006-01 A78-008-01 A78-015-01 A78-029-01 A78-030-01 A01-071-01 A01-071-02 34-0041-01 A95-027-01 A02-088-01 A01-003-01 18-0273-00 A16-1072-05 A18-006-01 A18-009-01 A17-001-01 A17-001-01 A06-005-01 A17-017-01 A06-004-01 A22-010-03 A06-002-01 A06-001-01 1000-000003 1000-000017 1000-000017 1000-000019 수량 1 1 1 2 1 8 1 8 1 1 7 1 2 1 4 4 3 1 2 1 1 1 6 5 1 3 3 1 1 2 3 1 15 2 2 2 3 15 4 4 6 10 1 11 3 3 1 1 1 1 1 1 1 LOC VENDOR G13 G15 H71 I41 H23 H21 I41 I41 I41 I41 G16 W21 I41 G17 I41 I41 H31 I41 H72 G17 I41 W15 W15 G17 H21 H21 H21 H21 H21 H21 H72 I41 I41 G17 I41 I41 I41 I41 I41 I41 I41 I41 H31 I41 H31 G17 H31 H31 V13 W11 W11 T34 T34 " " " " " " GESONIC " " " " GESONIC " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " MATRIX " " MATRIX " .No Item no 3193 3352U-005 3194 3352V-003 3195 3352V-011 3196 3352V-014 3197 3352V-019 3198 3352V-031 3199 3353A-011 3200 3353B-001 3201 3353B-002 3202 3353B-005 3203 3353B-006 3204 3353C-003 3205 3353C-004 3206 3353C-011 3207 3353C-021 3208 3353C-022 3209 3353D-001 3210 3353D-002 3211 3353D-003 3212 3353E-001 3213 3353F-021 3214 3353L-001 3215 3353L-001 3216 3353L-002 3217 3353O-002 3218 3353O-005 3219 3353O-007 3220 3353O-009 3221 3353O-014 3222 3353O-015 3223 3353P-002 3224 3353P-003 3225 3353P-005 3226 3353P-022 3227 3353P-024 3228 3353R-003 3229 3353S-012 3230 3353S-013 3231 3353S-018 3232 3353S-019 3233 3353S-021 3234 3353S-021 3235 3353S-022 3236 3353S-023 3237 3353T-002 3238 3353V-004 3239 3353W-001 3240 3353W-002 3241 3355B-001 3242 3355B-002 3243 3355B-002 3244 3355B-003 3245 3355B-004 장비명 STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER DESCRIPTION (Y)ASSY ROTARY UNION (Y)VALVE (Y)NEEDLE VALVE (Y)VALVE CHECK (Y)NEEDLE VALVE FOR (Y)GRAMMET VITON (Y)5"FLAG ARM ASSY (Y)5"BREAKET FRONT (Y)5"BRACKET REAR WA (Y)5"BRACKET REAR WF (Y)5"OPTICAL INTERRU (Y)5"CYLINDER AIR DBL ACT (Y)5"VACUUM CHUCK (Y)5"ASSY CABLE HIGH (Y)5"STOP CYLINDER (Y)5"AIR CYLINDER SI (Y)5"QUARTZ DEFFUSIO (Y)5"DOOR (Y)5"DIODE MICROWAVE (Y)5"ASSY AURA MOD E (Y)5"WAFER FRAME (Y)5"LAMP-1000W 120V (Y)5"LAMP-1000W 120V (Y)5"LAMP 24V (Y)5"O-RING SILICONE (Y)5"O-RING SILICONE (Y)5"O-RING SILICONE (C)O-RING(3997O-422) (Y)5"O-RING TEFLON COATED (Y)5"O-RING TEFLON COATED (Y)5"PIN.

BELLOWS (Y)ASS'Y BELLOWS CARTRIDGE ASSY. CARD (Y)DOOR CYLINDER (Y)STAND OFF PINS CY (Y)PLATE MOUNT PINS (Y)PLATE MOUNT PINS (Y)CYLINDER PANLAKE (Y)CYLINDER PANLAKE (Y)TEMP CONTROLLER (Y)CARD READER/ENCOD (R)CHAMBER CHUCK ASSY INDEXER CASSET (Y)CAP ASS'Y TUNE (Y)CAP ASS'Y SHUNT (Y)END POINT DETECTO (Y)PLASMA DOT DISPLA (Y)ASSY. 80 TEETH LOCATION J-3-5 J-3-5 N-3-4-4 N-3-4-4 A-5-2 J-3-5 N-3-4-4 N-3-4-4 B-4-2-1 B-4-2-1 B-4-2-1 N-3-4-4 N-3-4-4 K-3-4-2 B-4-2-1 B-4-2-1 B-4-2-1 N-3-4-4 N-2-2-1 B-4-2-1 B-4-2-1 B-4-2-1 B-4-2-1 N-3-4-4 N-3-4-4 N-3-4-4 N-3-4-4 N-3-4-4 N-3-4-4 B-4-2-1 B-4-2-1 M-7-1-3 N-3-4-4 N-3-4-4 N-3-4-4 B-4-1-1 D-1-3-2 B-4-1-1.07B ELECTRODE.T34 I41 I41 G14 G14.2 (Y)CASSETTE TABLE (Y)TCHAMBER INSULATE CABLE. 0.4P 18AWG DISPLAY (Y)CONN. N-7-2-1 J-2-2-1 N-3-1-4 B-4-2-1 K-3-4-2 B-4-1-1 N-4-4-2 B-4-1-1 VENDOR PART NO 1000-000027 1000-000049 0992-060125 0101-0484 1010-000691 0993-020158 0992-060148 0992-080178 0992-080179 0101-000339 0101-000226 0101-000484 0990-027004 0990-027010 0990-027010 0990-084028 0990-084029 0990-083006 0990-083008 0101-000322 0992-040266 1070-000123 0996-010031 0101-000067 0996-010007 0995-099777 0993-040086 0993-020191 0993-020191 0995-010597 0995-010597 0995-099733 0995-010507 0992-060147 0101-000247 0995-010512 0101-000208 0101-000207 0101-000032 0995-010505 0101-000401 0101-000755 0101-000842 0993-020179 0990-067143 0992-040375 0990-067159 0992-070051 0101-000510 0992-060252 0994-050038 0993-080007 0993-080008 수량 1 3 2 3 3 4 2 6 4 6 4 5 2 1 1 6 2 3 2 2 1 2 2 28 6 7 3 1 3 2 1 2 1 3 1 2 2 2 1 2 1 5 2 2 1 2 1 2 4 1 1 3 2 LOC VENDOR T34 W11.ASSY.HEATER THERM/P LAPTOP CABLE(RS232) PROGRAM CARD (Y)CLEANER.T34 H23 I41 I41 H31.No Item no 장비명 3246 3247 3248 3249 3250 3251 3252 3253 3254 3255 3256 3257 3258 3259 3260 3261 3262 3263 3264 3265 3266 3267 3268 3269 3270 3271 3272 3273 3274 3275 3276 3277 3278 3279 3280 3281 3282 3283 3284 3285 3286 3287 3288 3289 3290 3291 3292 3293 3294 3295 3296 3297 3298 3355B-007 3355B-009 3355B-010 3355B-012 3355B-014 3355B-041 3355B-042 3355B-051 3355B-052 3355B-081 3355B-083 3355B-084 3355C-001 3355C-002 3355C-002 3355C-005 3355C-006 3355C-007 3355C-008 3355C-009 3355C-012 3355C-014 3355C-015 3355C-021 3355C-022 3355C-031 3355C-032 3355C-033 3355C-033 3355C-034 3355C-034 3355C-041 3355C-051 3355C-061 3355C-101 3355C-102 3355C-103 3355C-104 3355D-001 3355D-002 3355D-003 3355D-004 3355D-007 3355D-008 3355E-002 3355E-003 3355E-005 3355E-006 3355F-003 3355F-031 3355F-061 3355G-001 3355G-002 PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER DESCRIPTION (Y)PCB OPERATOR INTERFACE (Y)PCB. OPERATOR INT (Y)3NSULATOR.37OU (Y)RECEPTACLE.DOOR EPRO.QUARTZ INSULATOR (Y)BAFFLE QZ 1/2" (Y)BRACKET ROTATE BRACKET RETPACT BELLOWS ASSY (Y)BELLOWS ASSY MOVA BELLOWS ASSY (Y)AIR CAP (Y)CAPACITOR AIR CAP (Y)CAPACITOR AIR CAP (Y)CONN.VERS 4.DOOR UPGRADE TTW KIT DOOR UPGRADE SA (Y)PLATE.06" DI (Y)GEAR.ENDPOINT DET (Y)KIT. F-2-1 G-1-4 N-4-4-2 J-2-2-1 B-4-1-1. RF (Y)ASSY.07 (Y)ELECTRODE GOUND EPROM SET.ASSY. EXT/RET (Y)FITTING. SET. 14 TEETH GEAR.I41 I41 G14 I41 I41 H72 G14 G14 G14 I41 I32 G14 G14 G14 G14 I41 I41 I41 I41 I41 I41 G14 G14 H31 I41 G44 I41 I41 G13 T22 G13 X52 G32 I41 T64 G13.G32 T64 I41 G14 H72 G13 I41 G13 " " MATRIX " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .RF FILTER (Y)FLEXTURE.BELLOWS 1/2 (Y)BAFFLE. VER 4.X21 W11.25P "D"RIBBO RECEPTACLE.

R STRIPPER P. OUTPUT (Y)LOCATOR PIRS (Y)MOTOR.CHUCK CENT (Y)TERMOCOUPLE ASSY (Y)ASSY CHUCK TEMP S (Y)TRANSISTOR 120 (Y)TRANSISTOR 125 LOCATION N-4-4-2 N-4-4-2 J-2-2-1 B-4-1-1 K-4-5-1 K-4-5-1 J-2-2-1 N-4-4-2 K-4-5-1 B-4-1-1 H-1-1 I-7-2 J-2-1-1 K-4-5-1 K-4-5-1 K-4-5-1 K-4-5-1 B-4-1-1 B-4-1-1 B-4-2-1 B-4-1-1 B-4-2-2 B-4-1-1 B-4-1-1 B-4-1-1 B-4-1-1 B-4-1-1 B-4-1-1 B-4-1-1 E-2-1 N-4-4-2 B-4-1-1 N-4-4-2 N-4-4-2 N-4-4-2 K-4-5-1 B-4-1-1 N-5-2 J-2-2-1 VENDOR PART NO 0993-080009 0995-099782 0990-067129 0101-0385 0992-060126 0992-060126 0990-066002 0992-030034 0992-600092 0995-010556 0995-010556 0995-010521 KBB00101-1816D 0995-099753 0996-010050 0994-060006 0994-060007 0994-060017 0994-060029 0994-060050 0994-060064 0994-060080 0994-060081 0994-060082 0992-060092 0995-010647-HD 0992-060135 0992-060111 0992-060137 0990-094003 0990-053005 0990-094012 0990-095010 0995-010532 1000-000016 1000-000016 0101-000450 0101-000450 0995-010519 0995-010520 0995-099781 0101-000754 0101-000575 0990-095042 0994-010223 0994-010201 0992-040211 0992-060121 0993-040108 0101-000250 0101-000443 0990-053002 0990-053003 수량 8 1 2 3 2 1 10 3 6 6 1 2 4 1 1 2 8 7 11 4 5 3 4 5 5 1 12 8 12 1 2 1 50 4 4 1 2 1 2 4 1 2 2 1 20 3 4 2 3 2 1 6 6 LOC VENDOR I41 I41 T64 G13 H51 H51 T64 I41 H51 V12 V12 G16 P53 X22 X32 H21 H21 H21 H21 H21 H21 H21 H21 H21 H51 G34 H51 H51 H51 G13 G13 G13 G13 G12 G16 G16 G13 G13 G16 G16 G13 G44 I41 G13 I41 I41 I41 H51 H23 G13 T21 T64 T64 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " MATRIX " " " " " " " " " " " .RED SILICO (Y)O-RING.R STRIPPER P.R STRIPPER P.R STRIPPER DESCRIPTION (Y)GEAR.AD7521/DAC1222 INDUCTOR.R STRIPPER P.R STRIPPER P.DOOR POSITTI ASSY.R STRIPPER P.R STRIPPER P. ORBITRON S (Y)ORBITRON LIFT MOT (Y)DC MOTOR(RATIO 17 MATCHING NETWORK.DOOR POSITTI (Y)ASSY.COOLING STAG (Y)ASSY.NOTE PC PIN WAFER SUPPORT (Y)PIN.01.RED SILICO (Y)O-RING.R STRIPPER P.2 ISOLATION VALVE.No Item no 장비명 3299 3300 3301 3302 3303 3304 3305 3306 3307 3308 3309 3310 3311 3312 3313 3314 3315 3316 3317 3318 3319 3320 3321 3322 3323 3324 3325 3326 3327 3328 3329 3330 3331 3332 3333 3334 3335 3336 3337 3338 3339 3340 3341 3342 3343 3344 3345 3346 3347 3348 3349 3350 3351 3355G-003 3355H-021 3355I-001 3355I-010 3355I-011 3355I-011 3355I-012 3355I-031 3355L-001 3355M-002 3355M-002 3355M-003 3355M-006 3355M-008 3355M-009 3355O-002 3355O-003 3355O-004 3355O-005 3355O-006 3355O-010 3355O-011 3355O-012 3355O-013 3355P-002 3355P-007 3355P-011 3355P-012 3355P-013 3355R-021 3355S-001 3355S-002 3355S-003 3355S-006 3355S-007 3355S-007 3355S-008 3355S-008 3355S-009 3355S-010 3355S-011 3355S-012 3355S-013 3355S-021 3355S-032 3355S-033 3355S-041 3355S-051 3355S-052 3355T-001 3355T-041 3355T-051 3355T-052 PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER P.WAFER POSITIO PIN.CE EPROM VERSION 4. HALL EFFECT (Y)SCREW (Y)SCREW (Y)STUD PIN WAFER SUPPORT (Y)SPACER. 9 TEETH PIN (Y)HEATER ELEMENT.SOLID STATE.DC POWER (Y)SENSOR ORBITRON UNIT (Y)FLOW SWITCH NYRON (Y)LAMP PUSH BUTTON (Y)PANEL DISPLAY S/W (Y)PCB AUTOTUNE SENS (Y)PCB AUTOTUNE SENS (Y)ASSY.ORBITRAN EX(Y)THERMOSWITCH SURF (Y)ASSY.VAC SPATULA (Y)SWITCH.ORBITRAN LIFT S (Y)ASSY.RED SILICO (Y)LOCATOR PINS LAPTOP.R STRIPPER P.RF MATCHING NET WORK (Y)O-RING CHAMBER BASE (Y)O-RING CHAMBER QU (Y)O-RING CHAMBER TO (Y)O-RING VAC VALVE (Y)O-RING SILICONE (Y)O-RING BALLOWS BO (Y)O-RING.R STRIPPER P. ORBITRON S (Y)MOTOR.WAFER LIFT SS BE (Y)RELAY.STRI (Y)INSULATOR LOWER R (Y)INSULATOR LOWER R (Y)IC.R STRIPPER P.

1 PHASE-2 SCR 120V (Y)COLLAR QTZ 1.15A (Y)IRCUIT BRKR30A-2P.SOC MNT (Y)KIT. AIR (Y)VALVE SLIT DOOR E (Y)ASSY.R STRIPPER P. I-4-1 수량 3 6 3 4 3 1 2 2 1 1 1 2 1 1 2 1 4 2 1 1 1 1 1 4 1 1 2 2 1 1 2 1 1 1 1 1 1 2 1 3 3 6 1 1 1 2 1 1 1 1 12 1 1 LOC VENDOR G13 G13 G13 G13 G13 I41 G13 G13 G13 T62 I41 I41 I41 I41 I41 I41 I41 I41 G14 P43 P54 P43 P54 H21 I41 G14 I41 I41 G14 G14 G14 H21 H21 H51 G14 R62 G13 T52 T52 X31 X12 X31 G14 G14 G14 G14 G14 G14 G14 T52 G16 G16 T63 " " " " " " " " " PRI PRI " " " " " " " " " " " " " " " " " " " " " " " " " G/IPC G/IPC " " " " " " " " " " " " GASONIC " G/IPC .R STRIPPER P. 20 AMP (Y)MODIFIED BRD.00" HOLE (Y)CIRCUIT BREAKER 2 POLE.R STRIPPER P. 20AMP (Y)CB.R STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER DESCRIPTION (Y)ISOLATION VALVE (Y)VALVE CLIPPARD (Y)BLEED VALVE (Y)DOOR VALVE (Y)DLIP VALVE 24V DC VALVE.GRAPHICS CONT (Y)DIODE (IN4007) (Y)FLOPPY DISC.3 PORT (Y)GASKET.1AMP (Y)CIRCUIT BREAKER 2 POLE.ISOLATION VAC (Y)VALVE.R STRIPPER P.5 AMP.5".R STRIPPER P.DOOR/PIN DRI LOCATION B-4-1-1 B-4-1-1 B-4-1-1 B-4-1-1 B-4-1-1 N-4-4-2 B-4-1-1 B-4-1-1 B-4-1-1 J-2-1-2 N-1-2-1 M-6-4-1 N-6-4-3 N-6-4-3 N-6-4-3 N-6-4-3 N-6-4-3 N-6-4-3 B-3-2-3 VENDOR PART NO 0101-000095 0995-016510 0995-016512 0995-016514 0995-016521 0995-016519 0995-016526 0995-016546 0101-000425 1000-000042 N-4-5-2 N-4-5-2 N-6-4-3 B-3-2-3 N-6-4-3 N-6-4-3 (Y)FILTER.DRIVE-MOD (Y)FILAMENT XFMER H-9-2 B-3-2-3 K-4-5-1 B-3-2-3 G-2-4-1 B-3-2-3 914-91003-00 932-22005-00 914-14012-00 914-14013-00 916-11002-00 933-11004-00 914-11017-00 71353-02 L-12-1-3 B-3-2-3 B-3-2-3 B-3-2-3 B-3-2-3 B-3-2-3 B-3-2-3 73797-05 16337-01 16359-01 16337-02 73185-39 73185-53 70980-01 73185-13 73185-14 73185-21 73797-07 B-4-1-1 B-4-1-1 L-11-3-4 70114-03 16321-01 60-1016 I-2-3.NUPRO REBUILD (Y)ALARM AVDIBLE SC-110 (Y)PWA SCR CONTROL (Y)PC ASSY. 2-POLE.R STRIPPER P.25 HOLE (Y)CHAMBER QTZ PLASMA (Y)COLLAR Q'TZ 1.R STRIPPER P.AC (Y)IRCUIT BREAKER 1POLE.24VAC. 5A (Y)CIRCUIT BREAKER 1POLE10A.5X20 MM (Y)GASKET. 1POLE.10AMP.3.R STRIPPER P.THERMOCOUPLE (Y)RELAY.120/240V (Y)CIRCUIT BREAKER.SHORT STACK (Y)FUSE.4 PORT (Y)INSULATOR.No Item no 장비명 3352 3353 3354 3355 3356 3357 3358 3359 3360 3361 3362 3363 3364 3365 3366 3367 3368 3369 3370 3371 3372 3373 3374 3375 3376 3377 3378 3379 3380 3381 3382 3383 3384 3385 3386 3387 3388 3389 3390 3391 3392 3393 3394 3395 3396 3397 3398 3399 3400 3401 3402 3403 3404 3355V-001 3355V-002 3355V-003 3355V-004 3355V-006 3355V-008 3355V-009 3355V-010 3355V-021 3356B-004 3356B-021 3356B-022 3356B-024 3356B-025 3356B-026 3356F-002 3356G-001 3356G-002 3356M-001 3356M-002 3356M-003 3356M-004 3356M-005 3356O-001 3356S-001 3356S-002 3356S-003 3356S-004 3356S-021 3357F-002 3357F-033 3357G-003 3357G-004 3357I-001 3357R-002 3357R-031 3358A-001 3358B-002 3358B-004 3358C-001 3358C-002 3358C-003 3358C-007 3358C-008 3358C-009 3358C-010 3358C-011 3358C-012 3358C-013 3358C-021 3358D-001 3358D-011 3358F-011 P.

CHAMBER UP/DOWN 3435 3391C-075 HF VAPOR ETCH.SPST.220 (Y)FORK.CENTERING.206 (Y)LOAD CALL 3439 3391M-002 HF VAPOR ETCH.5A 3456 3391S-001 HF VAPOR ETCH.R STRIPPER TEMP CONTROL 3422 3360C-001 PR STRIPPER HARNESS ASS'Y CASSETTE HAND 3423 3360C-002 PR STRIPPER HARNESS ASS'Y CASSET 3424 3360D-072 PR STRIPPER DISTRIBUTR PLATE 6" 3425 3360H-001 PR STRIPPER INSULATOR.DEEP PURGE.209 (Y)MOTOR.VACUUM PAN 2 3446 3391P-034 HF VAPOR ETCH. WIRE.No Item no 장비명 DESCRIPTION 3405 3358F-031 PR STRIPPER (Y)FILTER.213 (Y)ASSY. GAS VCR.202 (Y)CYL.CENTERING.100MM 3452 3391R-006 HF VAPOR ETCH.CENTERING.201 (Y)CONTROLLER.C STAPPER 3441 3391M-024 HF VAPOR ETCH.215 (Y)PIN CONTACT 3448 3391P-053 HF VAPOR ETCH.221 (Y)FORK.HEATER 3426 3360H-002 PR STRIPPER HEATER 3427 3360S-034 PR STRIPPER TEMP SENSOR AST-OZON 3428 3391A-001 HF VAPOR ETCH ASSY PC COVER PC 3429 3391B-082 HF VAPOR ETCH (Y)BOARD ANALOG OUTP 3430 3391B-084 HF VAPOR ETCH (Y)BOARD DRIVER 3431 3391B-099 HF VAPOR ETCH (Y)I/O INTERFACE BOARD 3432 3391C-016 HF VAPOR ETCH.217 (Y)HANDLER POWER SUPPLY 3450 3391R-004 HF VAPOR ETCH.225 (Y)HOTO SWITCH RETRO LOCATION B-3-2-3 L-12-1-3 B-3-2-3 B-3-2-3 B-3-2-3 K-10-3-2 N-6-4-3 B-3-2-3 L-12-1-3 I-3-2 B-2-1 A-2-1 B-4-2-2 L-12-1-3 L-12-1-3 N-1-2-4 N-1-2-4 N-6-1-2 C-4-2-1 N-6-1-1 N-7-3-1 N-6-1-1 N-6-1-1 N-6-1-1 H-1-1 H-1-1 L-11-1-2 N-6-1-1 N-1-2-4 N-1-2-4 N-6-1-1 N-6-1-1 B-3-3-4 B-3-3-4 B-3-3-4 N-6-1-1 C-4-2-1 N-6-1-1 N-6-1-1 VENDOR PART NO 73313-03 20-0219-01 73337-01 73797-01 16924-01 70964-03 73797-11 73797-03 16875-01 73340-02 16784-02 73526-01 73248-01 71805-01 73797-12 CA-0070 CE-0074 303211 303212 238481 098921 282191 247101 290040-400 230399-001 230584-001 73618-01 301127-002 302012-001 302495-001 901443-306 301913-001 300549-001 301415-001 230560-001 301822-001 301330-001 301330-001 302869-001 303956-001 902822-201 902822-201 230033-003 230037-003 301816-001 408211-001 408237-001 408238-001 408251-001 300377-001 230389-001 301496-001 230232-001 수량 2 1 1 1 1 2 6 11 1 1 1 1 1 3 1 2 1 1 1 4 3 2 2 3 1 2 1 1 1 2 1 1 1 1 3 1 1 1 1 1 2 1 5 5 1 1 1 1 1 1 2 1 1 LOC VENDOR G14 G14 H21 G14 T52 G14 G14 G14 G14 G14 H31 I41 G14 H31 G14 X23 R12 G14 G14 H31 G12 G14 G14 E11 E11 F83 T41 F83 R22 F83 Z15 F83 F83 F83 T41 P23 P53 P53 R63 F83 E11 E11 F83 F83 T34 E82 E82 E82 E82 F83 T41 F83 F83 " " " " " " " " " " " " " " " RAMCO RAMCO:85002 FUSION FUSION " " " " EXCALIBER " " EXCALIBER EXCALIBER " " " " " " " " " " " " " " " " " " " " " " " " " .VACUUM PAN 2 3447 3391P-052 HF VAPOR ETCH. 12W 3420 3359T-001 PR STRIPPER INNER ELECTRODE 3421 3359T-013 P. TILT 3443 3391M-051 HF VAPOR ETCH.207 (Y)DIGITAL RELAY 3440 3391M-021 HF VAPOR ETCH.PCMT.208 (Y)MOTOR D. 01M-INLINE 3406 3358G-002 PR STRIPPER (Y)GASKET 3407 3358G-003 PR STRIPPER (Y)GASKET. 10 OHM.125MM 3453 3391R-007 HF VAPOR ETCH. TILT 3442 3391M-024 HF VAPOR ETCH.CENTERING .203 (N)ASS'Y ISR200 CHAMBER 6" 3436 3391D-001 HF VAPOR ETCH.200 (Y)FLOW CONTROL 2503433 3391C-021 HF VAPOR ETCH.211 (Y)HF CGA 6 3444 3391M-052 HF VAPOR ETCH. HALL EFFECT 3415 3358S-031 PR STRIPPER (Y)SPOOL Q'TZ 3416 3358V-001 PR STRIPPER (Y)SELENOIDE VALVE 3417 3358V-002 PR STRIPPER (Y)VALVE SOLENOIDE 4PORT 3418 3358W-001 PR STRIPPER (Y)WINDOW Q'TZ 3419 3358W-011 PR STRIPPER (Y)REST.223 (Y)RELAY.1.216 (Y)PIN CONTACT TIN 3449 3391P-082 HF VAPOR ETCH.204 (Y)KIT GATECH HF DETECTOR 3437 3391E-001 HF VAPOR ETCH.219 (Y)FORK.TEMPERATURE 3434 3391C-073 HF VAPOR ETCH.200MM 3454 3391R-031 HF VAPOR ETCH. FLANGE-VITON 3408 3358L-004 PR STRIPPER (Y)INDICATOR LAMP 3409 3358P-011 PR STRIPPER (Y)POWER SUPPLY 175W 3410 3358R-001 PR STRIPPER (C)RELAY GP DPDT 240 3411 3358R-003 PR STRIPPER (Y)RELAY DPST 30A 24 3412 3358R-021 PR STRIPPER (Y)RECTIFIER HIGH VO 3413 3358S-003 PR STRIPPER (Y)AIR FLOW SENSOR 3414 3358S-011 PR STRIPPER (Y)SWITCH.205 (Y)ELBOW PFA EXTD 3438 3391L-021 HF VAPOR ETCH.218 (Y)FORK.FEMALE 3445 3391P-034 HF VAPOR ETCH.150MM 3451 3391R-005 HF VAPOR ETCH.212 (Y)MANIFOLD.214 (Y)ASSY.210 (Y)MOTOR.224 (Y)DI LEVEL SENSOR 3457 3391S-007 HF VAPOR ETCH.222 (Y)N2 REGULATOR 3455 3391R-036 HF VAPOR ETCH.

227 (Y)TUBING SILICONE 1 HF VAPOR ETCH.226 (Y)S/W.228 (X) ANALOG OUTPUT HF VAPOR ETCH.No Item no 3458 3459 3460 3461 3462 3463 3464 3465 3466 3467 3468 3469 3470 3471 3472 3473 3474 3475 3476 3477 3478 3479 3480 3481 3482 3483 3484 3485 3486 3487 3488 3489 3490 3491 3492 3493 3494 3495 3496 3497 3498 3499 3500 3501 3502 3503 3504 3505 3506 3507 3508 3509 3510 3391S-013 3391T-014 3392A-003 3392A-005 3392A-031 3392A-032 3392A-033 3392A-051 3392A-052 3392B-003 3392B-004 3392B-033 3392B-034 3392B-035 3392B-036 3392B-061 3392B-062 3392B-063 3392B-064 3392B-065 3392B-066 3392B-067 3392B-068 3392B-069 3392B-070 3392B-091 3392C-001 3392C-022 3392C-023 3392C-024 3392C-025 3392E-001 3392E-002 3392F-001 3392F-001 3392F-002 3392H-001 3392L-001 3392M-001 3392M-002 3392M-004 3392M-005 3392M-007 3392M-008 3392M-009 3392M-032 3392O-001 3392P-001 3392P-002 3392P-051 3392P-081 3392R-001 3392R-021 장비명 DESCRIPTION HF VAPOR ETCH.FLOW METER (FIBER OPTIC HF VAPOR ETCH.229 (X) ANALOG INPUT WAFER POLISHER (X) INOUT MODULE WAFER POLISHER (X) ENCODER ARM POSITION WAFER POLISHER (X) 125MM ARM ASSY WAFER POLISHER (X) SERVO AMPLIFIER WAFER POLISHER (X) IBM TO BUS ADAPTOR WAFER POLISHER (X) PRIMARY V-BELT WAFER POLISHER (X) FINAL V-BELT WAFER POLISHER (X) KEYPAD INTERFACE PWB WAFER POLISHER (X) DIODE BOARD ASSY WAFER POLISHER (X) RAIL #1 BRAIN BOARD WAFER POLISHER (X) RAIL #2 BRAIN BOARD WAFER POLISHER (X) SHUTTLE ROTATE BEARING WAFER POLISHER (X) BEARING WAFER POLISHER (X) BEARING WAFER POLISHER (X) BEARING WAFER POLISHER (X) BEARING WAFER POLISHER (X) BEARING WAFER POLISHER (X) ROLER BEARING WAFER POLISHER (X) BEARING WAFER POLISHER (X) BEARING WAFER POLISHER (X) BEARING WAFER POLISHER (X) SHUTTLE SLIDR BUSHING WAFER POLISHER (X) 125MM CARR BASE ASSY WAFER POLISHER (X) VOLTAGE CONNECTION WAFER POLISHER (X) SWITCH CONNECTOR WAFER POLISHER (X) PVC CONNECTOR WAFER POLISHER (X) PVC CONNECTOR WAFER POLISHER (X) OPTICAL ENCODER WAFER POLISHER (X) DISK EMULATOR ASSY WAFER POLISHER (X) AIR FILTER ELEMENT WAFER POLISHER (X) AIR FILTER ELEMENT WAFER POLISHER (X) AIR FILTER ELEMENT WAFER POLISHER (X) HEATER WAFER POLISHER (X) SIGNAL LAMP WAFER POLISHER (X) MOTOR CONTROL WAFER POLISHER (X) SLURRY DRIVE MOTOR WAFER POLISHER (X) STEPPER MTR CONTROL WAFER POLISHER (X) STEPPER MOTOR WAFER POLISHER (X) ARM DRIVE MOTOR WAFER POLISHER (X) INSERT CARRIER MTR WAFER POLISHER (X) MOTOR PART WAFER POLISHER (X) OUTPUT MODULE WAFER POLISHER (X) O-RING WAFER POLISHER (X) PUMP SLURRY WAFER POLISHER (X) POWER SUPPLY 5VDC WAFER POLISHER (X) PAD SUPORT WAFER POLISHER (X) IC PINSET WAFER POLISHER (X) REGULATOR WAFER POLISHER (X) RELAY LOCATION N-6-1-2 N-1-2-4 J-4-1-4 J-4-1-4 N-4-2-1 J-4-1-3 N-4-2-1 B-1-4-1 N-2-4-2 J-4-1-4 J-4-1-3 J-4-1-3 J-4-1-3 M-6-4-1 M-6-4-1 M-6-4-1 M-6-4-1 M-6-4-1 M-6-4-1 M-6-4-1 M-6-4-1 M-6-4-1 M-6-4-1 N-4-2-1 N-4-1-3 N-4-1-3 N-4-1-3 J-4-2-3 N-4-1-3 N-4-1-3 B-1-4-1 J-4-1-4 N-4-1-3 N-4-1-3 B-1-4-1 J-4-1-4 B-1-4-1 N-4-1-3 N-4-2-1 N-4-1-3 VENDOR PART NO 231559-002 301575-001 372-37069 TA230075 TN100013 TN100021 372-45134 372-36020 EJ010205 EJ010214 372-37067 VK440015 372-36005 372-37070 CN120175 CN071337 CL290213 CL290214 CH031081 CJ030100 CF020197 CN040037 CH030580 CN070325 372-67199 372-45126 PB020046 PA020023 JB036733 VF150220 372-37071 HG350373 HG350373 HG350377 QN040027 372-37066 QC060040 QU140123 372-44509 372-36125 QV420182 DS080042 HZ120002 372-72003 WESTEMS HP100072 TP100014 372-55136 PD020215 HD460125 QP070016 수량 1 2 1 2 1 1 1 1 2 2 2 1 1 1 1 2 1 2 2 3 3 2 2 4 1 2 1 7 3 2 1 1 1 2 2 2 3 1 1 1 1 1 1 2 2 4 4 1 1 1 2 1 2 LOC VENDOR F82 E11 T12 T12 AA72 T12 AA72 T13 T12 AA72 AA71 T12 T12 T12 T12 AA72 AA72 AA72 AA72 AA72 AA72 AA72 AA72 AA72 AA72 AA72 AA72 AA71 AA71 AA72 Z18 AA71 T13 AA72 AA71 AA71 T12 T13 " " " " WESTEMS " " " " " " " WESTEMS " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " WESTEMS " " " " " " P44 T12 P55 P55 AA71 AA71 T13 T11 AA72 T13 AA72 AA71 AA72 AA71 .

R/C 3559 4311C-027 ETCHER DEPOSITION COVER. M-5-2-1 N-4-2-1 N-4-2-1 N-4-2-1 372-72270 372-72271 372-72272 372-72274 QT200264 PU280123 QT370187 PU320258 PC020002 PE010032 372-50054 PE010673 PL100110 372-67095 FJ033506 372-55115 JG130059 PD020218 ED090167 ED090086 HE170121 HD120020 HE430065 CJ030103 J-2-2-2 PJ180067 N-4-2-1 N-4-2-1 J-4-1-4 N-4-1-3 N-4-2-1 N-4-1-3 N-4-2-1 J-4-1-3 J-4-1-4 J-4-1-4 M-5-2-1 M-5-2-1 B-2-4 M-5-2-1 M-5-2-1 M-5-2-1 L-12-2-3 D-8-2-3 N-2-3-2 D-8-2-3 D-8-2-3 N-6-1-1 I-2-1 A-5-3 N-6-1-1 N-6-1-1 N-2-3-2 L-2-5-2 L-2-5-2 K-10-4-2 M-4-3.EXHAUST PO LOCATION N-4-1-3 N-4-1-3 VENDOR PART NO N-4-1-3 L-7-3 N-4-1-3 N-4-2-1 N-4-2-1 N-4-2-1.PRE-EXHAUS 3563 4311C-033 OXIDE ETCHER(VIA/PAD) (Y)DEPOSITION COVER.PIG PORT 3556 4311C-023 ETCHER DEPOSITION COVER.GATE VALVE 3558 4311C-026 ETCHER DEPOSITION COVER.No Item no 장비명 DESCRIPTION 3511 3392R-041 WAFER POLISHER (X) RING 1 3512 3392R-042 WAFER POLISHER (X) RING 2 3513 3392R-043 WAFER POLISHER (X) RING 3 3514 3392R-045 WAFER POLISHER (X) RING 5 3515 3392S-002 WAFER POLISHER (X) AMP LOAD CUP SENSOR 3516 3392S-003 WAFER POLISHER (X) SENSOR LOAD CUP 3517 3392S-004 WAFER POLISHER (X) SENSOR MOUDLE PRS/VAC 3518 3392S-005 WAFER POLISHER (X) SENSOR 3519 3392S-043 WAFER POLISHER (X) LAMP SWITCH 3520 3392S-044 WAFER POLISHER (X) POSITION SWITCH 3521 3392S-045 WAFER POLISHER (X) MAICRO SWITCH 3522 3392S-046 WAFER POLISHER (X) SWITCH 3523 3392S-047 WAFER POLISHER (X) TOGGEL SWITCH 3524 3392S-061 WAFER POLISHER (X) SHUTTLE ROTATE SPRING 3525 3392S-083 WAFER POLISHER (X) SEAL 3526 3392S-101 WAFER POLISHER (X) 45 SUPORT 3527 3392T-001 WAFER POLISHER (X) FEET OF TUBING 3528 3392T-003 WAFER POLISHER (X) MINI TUBE 3529 3392U-001 WAFER POLISHER (X) ROTARY UNION 3530 3392U-002 WAFER POLISHER (X) ROTARY UNION 3531 3392V-002 WAFER POLISHER (X) FLOW CONTROL VALVE 3532 3392V-004 WAFER POLISHER (X) FLOW CONTROL 3533 3392V-005 WAFER POLISHER (X) SOLENOID 3534 3392W-001 WAFER POLISHER (X) THRUST WASHER 3535 3399L-001 WAFER POLISHER (X)LAMP 3536 3399L-002 ETCHER (X)LAMP (12V) 3537 3399L-003 ETCHER (X)LAMP (6V) 3538 3399M-001 ETCHER (X)WATER FLOW METER 3539 3399M-002 ETCHER (X)N2 FLOW METER 3540 3399O-001 ETCHER (X)OMRON (EZK-C25MYI) 3541 3399P-001 ETCHER (X)MAGNET PUMP 3542 3399V-001 ETCHER (X)VALVE 3543 3399V-002 ETCHER (X)SHUT / OFF VALVE 3544 4310P-035 ETCHER SHIELD LOCK PIN 3545 4310P-036 ETCHER LIFT PIN 3546 4310P-037 ETCHER SEGMENT PIN 3547 4310R-028 ETCHER 8" LIFT RING 3548 4310S-025 ETCHER 8" JEIDA SEGMENT 3549 4311B-001 ETCHER (Y)BUSH 3550 4311B-011 ETCHER (Y)BELLJAR 3551 4311B-013 ETCHER INNER BELLJAR 3552 4311C-001 ETCHER CLAMPER 3553 4311C-002 ETCHER CLAMPER 3554 4311C-004 ETCHER HOLE COVER (PTFE) 3555 4311C-022 ETCHER DEPOSITION COVER.UPPER-R/C 3560 4311C-030 ETCHER (Y)DEPOSITION COVER. I-2-1 I-1-1 N-5-4 L-2-5-2 L-2-5-2 N-5-4 MD-20 103836 103092 103835 103827 103834 731-S70612-001 715-S073041-001-00 715-S070212-001-E1 713-S70761-001 713-S70170-001 713-S70670-001 714-S070331-001-02 714-S070333-001-02 714-S073205-001-02 714-S073235-002-00 714-S070476-002-00 714-S070328-001-03 714-S070330-001-02 714-S070332-001-02 714-S070326-001-01 수량 1 1 1 1 1 1 1 1 3 6 2 2 2 1 2 3 1 3 2 1 2 2 2 2 3 6 4 2 1 1 1 4 1 8 8 4 1 1 1 1 1 1 1 26 1 3 3 3 1 1 1 1 1 LOC VENDOR AA71 AA71 AA72 AA72 AA72 AA72 T12 AA71 AA72 AA71 AA72 T12 T12 T12 AA72 AA71 AA71 AA71 AA72 AA72 AA72 AA72 AA72 AA72 AA84 T12 T12 AA73 AA73 R23 AA73 AA73 AA73 G17 H62 H24 H62 H62 H74 I83 I82 H74 H74 H24 I81 I81 I45 I82 H42 I81 I81 I81 I81 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " PMT " " " " SUMITOMO SUMITOMO " " " " " " " " " " " " SUMITOMO .PRE-EXHAUST P 3557 4311C-025 ETCHER DEPOSITION COVER.LIGHT PORT 3561 4311C-031 ETCHER (Y)DEPOSITION COVER.PIG PORT 3562 4311C-032 ETCHER (Y)DEPOSITION COVER.

GAS RING 3598 4311S-061 OXIDE ETCHER(VIA/PAD) (Y)SEAL KIT 3599 4311T-001 OXIDE ETCHER(VIA/PAD) (Y)THERMOCOUPLE 3600 4311W-002 OXIDE ETCHER(VIA/PAD) (Y)QUARTZ MICRO WAVE 3601 4321G-002 PR STRIPPER IN FITTING (1) 3602 4321T-012 PR STRIPPER (Y)FLEXIBLE TUBE 3603 4321T-012 PR STRIPPER (Y)FLEXIBLE TUBE 3604 4322B-001 PR STRIPPER (Y)TIMING BELT (140XL037U) 3605 4322B-002 PR STRIPPER (Y)TIMING BELT (110XL037U) 3606 4322B-003 PR STRIPPER (Y)TIMING BELT (240L075U) 3607 4322B-004 PR STRIPPER (Y)TIMING BELT (120XL037) 3608 4322B-005 PR STRIPPER (Y)TIMING BELT (80XL037) 3609 4322C-033 PR STRIPPER (Y)CONTROLLER.286445) 3613 4322R-003 PR STRIPPER SAFETY RING 3614 4322V-001 PR STRIPPER (Y)PILOT VALVE (040-4E1-E1) 3615 4322V-007 PR STRIPPER (Y)V/V.286441) 3612 4322R-002 PR STRIPPER (Y)AL-RING (D/N.TEMP 3610 4322P-002 PR STRIPPER (Y)Q'TZ PIPE(OUTLET) 3611 4322R-001 PR STRIPPER (Y)L-RING (D/N.BELLJAR 3570 4311L-001 OXIDE ETCHER(VIA/PAD) (Y)LIGHT HALOGEN LAMP 3571 4311O-001 OXIDE ETCHER(VIA/PAD) (Y)O-RING 3572 4311O-002 OXIDE ETCHER(VIA/PAD) (Y)O-RING 3573 4311O-003 OXIDE ETCHER(VIA/PAD) (Y)O-RING 3574 4311O-004 OXIDE ETCHER(VIA/PAD) (Y)O-RING 3575 4311O-005 OXIDE ETCHER(VIA/PAD) (Y)O-RING 3576 4311O-006 OXIDE ETCHER(VIA/PAD) (Y)O-RING 3577 4311O-009 OXIDE ETCHER(VIA/PAD) (Y)O-RING 3578 4311O-014 OXIDE ETCHER(VIA/PAD) (Y)O-RING 3579 4311O-015 OXIDE ETCHER(VIA/PAD) (Y)O-RING 3580 4311O-018 OXIDE ETCHER(VIA/PAD) (Y)O-RING 3581 4311O-019 OXIDE ETCHER(VIA/PAD) (Y)O-RING 3582 4311O-022 OXIDE ETCHER(VIA/PAD) (Y)O-RING 3583 4311O-026 OXIDE ETCHER(VIA/PAD) (Y)O-RING 3584 4311O-027 OXIDE ETCHER(VIA/PAD) O-RING 3585 4311O-030 OXIDE ETCHER(VIA/PAD) (Y)O-RING 3586 4311O-031 OXIDE ETCHER(VIA/PAD) (Y)O-RING 3587 4311O-032 OXIDE ETCHER(VIA/PAD) (Y)O-RING 3588 4311O-036 OXIDE ETCHER(VIA/PAD) (Y)O-RING 3589 4311O-037 OXIDE ETCHER(VIA/PAD) (Y)O-RING 3590 4311O-039 OXIDE ETCHER(VIA/PAD) (Y)O-RING 3591 4311O-040 OXIDE ETCHER(VIA/PAD) (Y)O-RING 3592 4311P-021 OXIDE ETCHER(VIA/PAD) (Y)CLAMPER PIN 3593 4311P-041 OXIDE ETCHER(VIA/PAD) (Y)QUARTZ.SOLENOID 3616 4322V-007 PR STRIPPER (Y)V/V.MONOCHRO PORT 3594 4311P-042 OXIDE ETCHER(VIA/PAD) (Y)QUARTZ LIGHT PORT 3595 4311S-001 OXIDE ETCHER(VIA/PAD) (Y)SHIEAD LINE2 3596 4311S-003 OXIDE ETCHER(VIA/PAD) (Y)SCREW T/C PLATE 3597 4311S-022 OXIDE ETCHER(VIA/PAD) (Y)SCREW.SOLENOID LOCATION VENDOR PART NO K-10-4-2 I-1-1 B-3-1-1 K-10-3-2 N-2-3-2 C-4-2-4 J-2-2-2 714-S073257-001-01 716-S073258-001-00 716-S073256-001-01 716-S073269-001-00 713-S70611-001 715-S073040-001-00 661-S007056-014-00 733-S1002-004 734-S243-002 734-S243-263 734-S243-278 734-S243-280 734-S243-281 734-S243-508 734-S243-227 734-S243-244 734-S243-376 734-S243-380 734-S9003-028 733-S223-016 733-S29002-003 733-S000223-009-00 733-S000223-008-00 734-S000243-383-00 734-S009002-064-00 734-S009002-054-00 734-S009002-070-00 734-S009002-063-00 716-S070855-001-00 716-S070203-001-02 716-S070389-001-01 739-S9053-001 724-S73037-001 715-S070161-001-00 796-S002951-006-00 666-S009039-015-00 716-S070193-001-00 AP4-42997 VF4009 L=200M VF4009 L=200M CA-0052 CA-0053 CA-0054 CA-0055 CA-0056 ZCP-2011 ZCP-1016 PA-0015 PA-0012 ZCP-1012 GC-0029 ZSP-2008 ZSP-2008 E-3-2-1 E-3-2-1 D-8-2-3 M-7-1-3 M-7-1-3 L-12-2-3 K-10-4-2 K-10-4-2 K-4-4-2 L-3-5-2 M-7-1-3 K-10-4-2 K-10-4-2 K-10-4-2 B-2-1.No Item no 장비명 DESCRIPTION 3564 4311C-038 OXIDE ETCHER(VIA/PAD) (Y)GATE VALVE DEPO COVER 3565 4311C-039 OXIDE ETCHER(VIA/PAD) (Y)DEPOSITION COVER UPPER R/C 3566 4311C-041 OXIDE ETCHER(VIA/PAD) (Y)Q'TZ GATE V/V DEPO COVER 3567 4311C-042 OXIDE ETCHER(VIA/PAD) (Y)Q'TZ C/M PORT 3568 4311G-001 OXIDE ETCHER(VIA/PAD) (Y)GUIDE PIN 3569 4311H-001 OXIDE ETCHER(VIA/PAD) HOLDER. M-7-2-2 K-11-1 A-3-1 A-3-1 L-12-2-1 L-12-2-1 L-12-2-1 수량 2 2 2 2 2 1 3 1 1 1 2 4 4 5 1 1 6 3 5 4 6 3 2 4 4 4 2 4 6 2 2 1 6 32 3 2 1 1 1 5 2 2 2 4 4 6 2 5 1 1 1 5 1 LOC VENDOR I45 H42 G91 H31 H24 H42 H24 H22 H22 H22 H22 H22 H22 H22 H22 H22 H22 H22 H22 H22 H22 H22 H22 H22 H22 H22 H22 H22 H62 H31 H31 G17 I45 I45 I82 I82 H31 I45 I45 I45 H22 H22 H22 H22 H22 G83 H44 H22 I81 I81 G17 G17 G17 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " PSC PSC " RAMCO " " " " RAMCO " " " " " " " .

WDG (Y)INDICATOR.W15 Y12 G17 I45 I45 H44 H44 G71 H31 I45 H22 I45 G17 H24 H24 H24 H24 H22 H22 H22 H22 " " " " FUSION " " " " " " " " " " " " " " " " FUSION " " " " " " " " USHIO USHIO " " " " USHIO " " " PMT " " " " " " " " " " " " . 250V D (Y)QUARTZ PLATE GASK (Y)BULB.SYS 286 CONT (Y)STEPPING MOTOR DR (Y)FILTER (Y)LINK MASTER(RORZE N SHUTTER A A SHUTTER B (Y)GLASS PANEL (Y)GLASS PANEL (Y)ALIGNER BELL JAR (Y)BELL JAR CLAMP (Y)TIMING BELT (Y)FILTER (Y)2A FUSE (Y)2-1/2A FUSE (Y)3. MIDGET. K-10-4-2 212081 J-4-3-2 265221 K-10-4-2 239821 J-4-3-2 238441 J-4-3-2 238441 E-3-2-1 204274 L-12-2-1 064745 K-10-4-2 209512 L-12-2-1 025045S L-12-2-3 069661 023812 N-2-3-2 026261 J-2-2-2 026243 081055 E-2-2 240910 I-1-3 240371 K-10-4-2 202111 G-1-5. LAMP (Y)RING-RRETAINING.SOLENOID (Y)V/V.7 237131 L-12-2-1 026066 L-12-2-1 087144 L-12-2-1 218762 L-7-3 201251 L-12-2-1 203142 E-2-2 RA101A-006 E-2-3 SYS286CONT L-12-2-1.3WAY DELAY (Y)ALIGNER (Y)PCB. 058033.SOLENOID (Y)V/V. END (Y)CHAMBER CONTROLL (Y)CHAMBER CONTROLL (Y)THERMOCHUCK ASY-8 (Y)CYLINDER-1. WED (Y)BULB. AIR-PRESS (Y)SWITCH-VACUUM (Y)EXHAUST SWITCH (Y)CHAMBER SEAL (Y)V/V. MIDGET.15A FUSE (Y)24V LAMP (Y)24V LAMP (Y)O-RING O-RING (Y)O-RING (Y)O-RING LOCATION L-12-2-1 L-12-2-1 L-12-2-1 L-12-2-1 VENDOR PART NO ZSP-2009 ZSP-2009 ZSP-2010 ZSP-2010 058032.6. 15A.SOLENOID (Y)SAME P/N 4323B-00 (Y)SAME P/N 4323B-00 (Y)SAME P/N 4323B-00 (Y)BUSHING PLASTIC T (Y)PWB ASS'Y GAS MON (Y)CELL-SAMPLE.No Item no 장비명 3617 3618 3619 3620 3621 3622 3623 3624 3625 3626 3627 3628 3629 3630 3631 3632 3633 3634 3635 3636 3637 3638 3639 3640 3641 3642 3643 3644 3645 3646 3647 3648 3649 3650 3651 3652 3653 3654 3655 3656 3657 3658 3659 3660 3661 3662 3663 3664 3665 3666 3667 3668 3669 4322V-008 4322V-008 4322V-009 4322V-009 4323B-001 4323B-002 4323B-002 4323B-003 4323B-011 4323C-001 4323C-005 4323C-005 4323C-008 4323C-009 4323E-001 4323F-003 4323G-082 4323L-001 4323L-002 4323L-005 4323N-001 4323N-002 4323P-008 4323P-014 4323R-002 4323S-003 4323S-004 4323S-006 4323S-008 4323V-001 4331A-071 4331B-009 4331D-027 4331F-002 4331L-002 4331N-001 4331N-002 4331P-001 4331P-001 4331P-003 4341B-001 4341B-002 4341B-003 4341F-001 4341F-004 4341F-006 4341F-007 4341L-001 4341L-003 4341O-001 4341O-003 4341O-004 4341O-005 PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER PR STRIPPER UV BAKE UV BAKE UV BAKE UV BAKE UV BAKE UV BAKE UV BAKE UV BAKE UV BAKE UV BAKE METALLIZATION METALLIZATION METALLIZATION METALLIZATION METALLIZATION METALLIZATION METALLIZATION METALLIZATION METALLIZATION METALLIZATION METALLIZATION METALLIZATION METALLIZATION DESCRIPTION (Y)V/V.SOLENOID (Y)V/V.00STRO (Y)EXHAUST EJECTOR (Y)FUSE. D-3-2-1 RD-232MS ATMMG-Z-Q-E L-12-2-1 RC-002N K-10-4-2 2300-3809 K-10-4-2 2300-3818 K-9-6-2 2848-4202 K-9-6-2 2848-4202 D-1-3-1 RA101A-006 I-3-1 100228-1 K-10-4-2 100229-1 900-0041 K-10-4-2 420-0004 L-12-2-3 320-0001 N-2-3-2 320-0008 N-2-3-2 320-0007 120-0009 120-0015 470-0018 100854-1 470-0037 470-0016 수량 5 1 5 1 2 4 2 1 1 2 2 1 1 1 2 4 10 7 5 1 2 1 8 4 10 1 1 1 23 2 3 2 3 5 2 2 2 2 7 1 1 2 2 1 1 1 2 3 3 4 1 2 1 LOC VENDOR G17 G17 G17 G17 H22 H22 H22 I45 W15 I45 W15 W15 G71 G17 I45 G17 G17 H24 G17 G17 I45 G71 H21 I45 G72 G17 G17 G17 H22 G17 G71 G73 G17. N2O CELL (Y)Q'TZ PLATE (Y)PIN WAFER LIFT 8" (Y)REFLECT REPLACEME (Y)SWITCH. 058033.

T62 V14 V14 T32 V14.T32 T32 V14 V12 V12 V12 V12 V12 V12 V12 V14 T52 V14 T32 V14 V14 V14.No Item no 장비명 3670 3671 3672 3673 3674 3675 3676 3677 3678 3679 3680 3681 3682 3683 3684 3685 3686 3687 3688 3689 3690 3691 3692 3693 3694 3695 3696 3697 3698 3699 3700 3701 3702 3703 3704 3705 3706 3707 3708 3709 3710 3711 3712 3713 3714 3715 3716 3717 3718 3719 3720 3721 3722 4341O-006 4341O-007 4341O-008 4341O-009 4341O-010 4341O-011 4341O-013 4341O-019 4341S-001 4342L-001 3401A-004 3401A-005 3401A-006 3401A-041 3401B-001 3401B-002 3401B-003 3401B-007 3401B-008 3401B-009 3401B-012 3401B-013 3401B-014 3401B-016 3401B-017 3401B-018 3401B-019 3401B-021 3401B-022 3401B-022 3401B-023 3401B-024 3401B-025 3401B-026 3401B-028 3401B-030 3401B-031 3401B-032 3401B-034 3401B-034 3401B-035 3401B-036 3401B-036 3401B-037 3401B-038 3401B-039 3401B-040 3401B-041 3401B-042 3401B-044 3401B-046 3401B-047 3401B-048 METALLIZATION METALLIZATION METALLIZATION METALLIZATION METALLIZATION METALLIZATION METALLIZATION METALLIZATION METALLIZATION TEGAL WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER DESCRIPTION (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (Y)O-RING (C)O-RING(CHAMBER TO O-RING (Y)RETRO REFLECTOR S QUARTZ LINER (Y)5"AHM UNIT (Y)5"ALIGN ASSY #1 SENSOR (Y)5"ALIGN ASS'Y #2 (Y)5"HARD DISK CONT (Y)5"VERTICAL SWEEP BOARD (Y)5"OUTPUT VIDEO BO (Y)5"INPUT VIDEO BOA (Y)5"AU43 BOARD (Y)5"AW26 BOARD (Y)5"AU53 BOARD (Y)5"3W 21 PC ASS'Y( (Y)5"AW28 BOARD (Y)5"AU54 BOARD (Y)5"AW27 BOARD (Y)5"AU40 BOARD (Y)5"AU2 BOARD (Y)5"AX4 BOARD (X)SAME P/N 3401B-08 (Y)5"AX5 BOARD (Y)5"AX5 BOARD (Y)5"AX13 BOARD (Y)5"AU11 BOARD (Y)5"AU41 BOARD (Y)5"AU58 BOARD (Y)5"AU6 CARD (Y)5"AU59 LASER COND (Y)5"AU60 REPLACES A (Y)5"AW 30 PC ASS'Y (Y)5"AU57 REPLACES A (Y)5"AU57 REPLACES A (Y)5"FORK CONTROL BD (Y)5"COMP ASS'YAX6 (Y)5"COMP ASS'YAX6 (Y)5"AW17 BOARD (Y)5"PC ASS'Y AX14 H (Y)5"PCB ALIGNER PRE (Y)5"AU 63 PC ASS'Y (Y)5"AU66 BOARD (Y)5"PC ASS'Y BAR-CO (Y)5"PC ASS'Y X-X CR (Y)5"PC ASS'Y Y-Y CR (Y)5"ASSY AX7 LOCATION L-12-2-3 VENDOR PART NO 470-0031 470-011 470-0010 470-0012 470-0013 470-0014 AS-384(K) PT3-0264-000 310-0006 40-606-009 035396G1 L-11-1-4 F-5-2 J-4-2-4 J-4-2-4 J-4-1-3 J-4-1-3 J-4-1-3 J-4-1-3 J-4-1-2 J-4-1-2 J-4-1-2 J-4-1-2 L-10-4-3 J-4-2-4 J-4-1-2 M-7-1-4 M-7-1-4 M-7-1-4 M-7-1-4 M-7-1-4 M-7-1-4 M-7-1-4 J-4-1-2 J-4-3-4 M-6-1-3 M-5-3-1 M-6-1-3 M-6-1-3 J-4-1-2 J-4-1-2 M-5-3-1 M-5-3-1 M-5-3-1 M-5-3-1 M-5-3-1 M-5-3-1 M-5-3-1 M-5-3-1 M-5-3-1 028676G1 038257 028675G1 002621 002622 002618 005631G1 005866G1 005568G1 005648G1 005869G1 077791G1 9262173G1 9262-08G1 002991G1 002967G1 002967G1 035610G1 926244G1 9262177G1 035986G1 926224G1 036041G1 005908G1 039437G1 005878G1 005878G1 028884G1 002970G1 002970G1 002789G1 035543G1 005897G1 037339G1 028564G 028753G1 028755G1 005399G1 수량 1 2 1 1 2 2 1 4 1 24 1 3 2 1 4 7 4 4 4 1 2 2 5 4 5 5 11 2 7 1 3 9 5 6 8 9 3 3 9 1 3 2 4 2 6 8 1 3 2 1 2 2 2 LOC VENDOR H22 H22 H22 H22 H22 H22 H22 H22 G17 Y11 CC12 T32 T32 V21 T32 T32 V14 V14 V14 V14 V14 V14 V14 V14 V14.T32 T32 V14 T32 T32 T32 T32 T32 T32 " " " " " " " " " GCA GCA GCA " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .

J-6-1 028881G1 J-4-2-3 028802G1 J-4-2-4 002973G2 J-4-3-3 046433G1 J-4-3-3 028803G1 J-4-3-3 005568G1. J-4-3-3 9262247G1 J-4-3-3 9262247G1 J-4-3-3 9262240G1 J-4-3-3 9262-16G1 J-4-3-3 00755601 J-4-3-3 00681801 J-4-3-3 538492 J-4-3-3 9262193G1 J-4-3-3 037186G1 J-4-3-3 9262250G2 J-4-3-3 035543G3 J-4-3-3 035543G4 J-4-3-3 043150G1 J-4-3-3 J-4-3-3 J-4-2-2 J-4-2-3 J-4-2-3.T31 T33 T33 T31 T31 T31 T31 T31 T31 T31 T31 T31 T31 T31 T31 T31 T31 T31 T31 T24 T31 T31 T31 T31 T31 T31 T31 T31 V21 T62 T63 V12 " " " " " " " " " " " " " " " " " " " " " " " GCA " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .C-4-3-4 J-4-1-1 L-6-3 002970G2 005969G1 035664 9262205G1 9262244G1 9262244G1 002623 044609G1 044915G3 039751G1 035132G2 036517 수량 7 2 3 1 1 6 2 1 1 2 1 1 2 1 5 5 2 2 5 1 4 4 4 4 4 4 4 1 1 1 2 1 2 2 2 3 1 2 1 2 2 2 3 3 5 2 3 3 2 1 3 4 5 LOC VENDOR T32 T32 V12 T33 T33 V12 V12 V21. J-4-3-3 J-4-2-3 J-4-2-3 J-4-2-3 J-6-1 C-4-2-4. L-11-1-4 005905G2 J-4-2-3. J-6-1 028881G1 J-4-2-3.T31 T33 T33 T31 T33 T33 T33 T33 T33 V21.T52 T52 T33 T32 V21.No Item no 3723 3724 3725 3726 3727 3728 3729 3730 3731 3732 3733 3734 3735 3736 3737 3738 3739 3740 3741 3742 3743 3744 3745 3746 3747 3748 3749 3750 3751 3752 3753 3754 3755 3756 3757 3758 3759 3760 3761 3762 3763 3764 3765 3766 3767 3768 3769 3770 3771 3772 3773 3774 3775 3401B-049 3401B-050 3401B-051 3401B-052 3401B-052 3401B-053 3401B-055 3401B-056 3401B-057 3401B-058 3401B-059 3401B-065 3401B-066 3401B-067 3401B-068 3401B-069 3401B-070 3401B-070 3401B-071 3401B-072 3401B-073 3401B-073 3401B-074 3401B-075 3401B-076 3401B-077 3401B-078 3401B-079 3401B-079 3401B-080 3401B-081 3401B-082 3401B-083 3401B-084 3401B-087 3401B-088 3401B-090 3401B-091 3401B-092 3401B-095 3401B-098 3401B-099 3401B-100 3401B-101 3401B-102 3401B-103 3401B-103 3401B-104 3401B-105 3401B-106 3401B-108 3401B-109 3401B-110 장비명 DESCRIPTION WAFER STEPPER (Y)5"AXII PC ASS'Y V WAFER STEPPER (Y)5"PC ASS'Y AX12 P WAFER STEPPER (Y)5"PC ASS'Y AX14 H WAFER STEPPER (Y)5"PC ASS'Y AX15 A WAFER STEPPER (Y)5"PC ASS'Y AX15 A WAFER STEPPER (Y)5"PC ASS'Y AX16 W WAFER STEPPER (Y)5"PC ASS'Y AW18 P WAFER STEPPER (Y)5"PC ASSY BLADE C WAFER STEPPER (Y)5"PC ASS'Y BAR CO WAFER STEPPER (Y)5"PC ASS'Y BLADE WAFER STEPPER (Y)5"AZ9 PC ASS'Y CO WAFER STEPPER (Y)5"PC ASS'Y AW9(STD) WAFER STEPPER (Y)5"PC ASS'Y AW27(R WAFER STEPPER (Y)5"PC ASS'Y AW28(R WAFER STEPPER (Y)5"PC ASS'Y AU42 S WAFER STEPPER (Y)5"AW 31 PC ASS'Y WAFER STEPPER (Y)5"PC ASSY ELEVTOR WAFER STEPPER (Y)5"PC ASSY ELEVTOR WAFER STEPPER (Y)5"AU65 BOARD WAFER STEPPER (Y)5"PC ASS'Y FORK & WAFER STEPPER (Y)5"PC ASS'Y ALIGNE WAFER STEPPER (Y)5"PC ASS'Y ALIGNE WAFER STEPPER (Y)5"AZ10 BLC519 I/O WAFER STEPPER (Y)5"COMPONENT ASSY AX3 WAFER STEPPER (Y)5"AZ11 80/25 REWORKED WAFER STEPPER (Y)5"SAME P/N 3401B-012(BOARD) WAFER STEPPER (Y)5"AU 46 BOARD WAFER STEPPER (Y)5"AU48 BOARD(THET WAFER STEPPER (Y)5"AU48 BOARD(THET WAFER STEPPER (Y)5"AU-4 BOARD WAFER STEPPER (Y)5"33DEO DRIVE BOARD WAFER STEPPER (Y)5"PC ASS'Y PRIM T WAFER STEPPER (Y)5"PC ASS'Y TEMP C WAFER STEPPER (Y)5"PC ASS'Y TEMP C WAFER STEPPER (Y)5"AU 45 PC ASS'Y WAFER STEPPER (X)5"AW 11 PCB WAFER STEPPER (Y)5"AU 49 PC ASS'Y WAFER STEPPER (Y)5"AX 14 PC ASS'Y WAFER STEPPER (Y)5"AX 14 PC ASS'Y WAFER STEPPER (Y)5"PC ASS'Y THETA WAFER STEPPER (Y)5"CHANGE P/N 3401 WAFER STEPPER (Y)5"COMP ASS'Y AX6 WAFER STEPPER (Y)5"PC ASS'Y AX10 WAFER STEPPER (Y)5"VALVE BOARD WAFER STEPPER (Y)5"LVOT POSITION S WAFER STEPPER (Y)5"AU47 BOARD WAFER STEPPER (Y)5"AU47 BOARD WAFER STEPPER (Y)5"QBUS PARALLER INTERFACE WAFER STEPPER (Y)5"RSX Q-BUS PARAL WAFER STEPPER (Y)5"MULTIPLEXER PCB WAFER STEPPER (Y)5"AW34 PC ASSY WAFER STEPPER (Y)5"COMPUTER MEMORY BD WAFER STEPPER (Y)5"KEYBOARD PC ASS LOCATION VENDOR PART NO J-4-2-4 J-4-2-4 M-7-1-4 32 J-4-2-4 M-7-1-4 M-7-1-4 J-4-1-3 J-4-2-4 J-4-2-4 J-4-2-3 J-4-2-4 K-10-4-1 J-4-2-4 J-4-2-4 J-4-2-4 005953G1 005958G1 035543G2 035553G1 035553G1 035707G1 002865G1 028887G1 028890G1 028893G1 028530G1 046366G2 005645G2 005648G2 9262181G1 005708G1 028533G1 028533G1 J-4-2-4 002761G1 N-7-5-1.T31 V21.

C-4-3-4 C-4-2-4.No Item no 장비명 3776 3777 3778 3779 3780 3781 3782 3783 3784 3785 3786 3787 3788 3789 3790 3791 3792 3793 3794 3795 3796 3797 3798 3799 3800 3801 3802 3803 3804 3805 3806 3807 3808 3809 3810 3811 3812 3813 3814 3815 3816 3817 3818 3819 3820 3821 3822 3823 3824 3825 3826 3827 3828 3401B-112 3401B-113 3401B-114 3401B-114 3401B-115 3401B-118 3401B-119 3401B-120 3401B-121 3401B-121 3401B-122 3401B-122 3401B-123 3401B-124 3401B-124 3401B-125 3401B-126 3401B-129 3401B-130 3401B-131 3401B-132 3401B-133 3401B-133 3401B-134 3401B-135 3401B-136 3401B-137 3401B-150 3401B-151 3401B-153 3401B-153 3401B-155 3401B-156 3401B-157 3401B-158 3401B-160 3401B-161 3401B-161 3401B-163 3401C-002 3401C-005 3401C-008 3401C-010 3401C-011 3401C-012 3401C-015 3401C-017 3401C-018 3401C-019 3401C-019 3401C-022 3401C-023 3401C-025 WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER DESCRIPTION (Y)5"QUAD SERIAL POR (Y)5"RMS POWER SUPPL (Y)5"COMPUTER CPU B' (Y)5"COMPUTER CPU B' (Y)5"FORK PCB (Y)5"PC ASSY VT-100 (Y)5"ALIGNER CONTROL (Y)5"PC ASSY ELEV CO (Y)5"PC ASSY ELEV CO (Y)5"PC ASS'Y BAR CO (Y)5"PC ASS'Y BAR CO (Y)5"AW 32 BOARD(THE (Y)5"PC ASSY TURNATA (Y)5"PC ASSY TURNATA (Y)5"SYNC. C-4-3-4 C-4-2-4. L-11-1-4 F-1-1 F-5-2 J-4-3-3 C-4-2-4. L-11-1-4 C-4-3-3 C-4-3-3 C-4-3-4 J-2-1-1 L-6-3 J-4-3-4 M-2-1-3 M-2-1-3 J-4-3-3 J-2-1-1 J-4-3-4 J-4-3-4 G-2-3-1 VENDOR PART NO 035131G2 028522G1 038255 038255 028542G1 036702G1 038256 028878G1 028964G1 028964G1 028525G1 028525G1 038090G1 028875G1 028875G1 002620 038087G1 044048G1 045854G1 002979G2 005863G1 005863G1 005908G3 02103813 039718G1 9262-40G2 036107 006108G4 010608 010608 014721G1 028643 028159 003670 J-4-3-4 046939G1 046939G1 045924 L-11-2-4 N-6-2 L-11-2-4 L-2-1 N-6-2 D-2-2-1 D-2-2-1 D-2-2-1 L-11-2-4 L-11-2-4 005576G1 035458 028494G1 005577G1 035743G1 028590 9262113G1 028497G1 028495G1 028495G1 037157G1 037158G1 037161G1 수량 2 1 4 3 1 2 1 5 4 1 1 1 2 2 3 1 2 2 1 3 1 1 3 1 1 1 1 2 5 8 10 3 7 3 1 1 2 2 4 1 4 2 3 2 9 1 1 2 2 1 1 1 1 LOC VENDOR T32 DD23 T62 T62 V21 T24 V21 T62 T62 T62 T62 T62 T62 T63 T63 T62 T24 V12 T24 T24 T24 T24 T24 T24 T24 T24 T24 T31 CC13 CC13 CC13 CC13 CC13 CC22 CC13 T24 CC13 CC13 CC13 CC12 CC14 CC21 CC14 CC13 CC13 T34 CC24 T32 T32 T32 CC14 CC14 CC13 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " . FORMER (Y)5"AW33 PC ASSY (Y)5"KEY BOARD PC AS (Y)5"PCB AU75 (Y)5"AX6 PC ASSY (Y)5"AU52 BOARD (Y)5"AU52 BOARD (Y)5"AU 60 PCB LASER (Y)5"TEMP CTL BD (Y)5"AU4B PCB (Y)5"AU10 PCB (Y)5"IGNITER BOX (MA (Y)5"FLAT FINDER BLO (Y)5"BELLOWS HUB (Y)5"BELLOWS HUB (Y)5"FINE STAGE BUMP (Y)5"TURNTABLE BELT (Y)5"FORK BELT (Y)5"T A STOP BLADE (Y)5"S/W BOX ASS'Y OF CONTROL (Y)5"FINE STAGE BUMP (Y)5"FINE STAGE BUMP (Y)5"SHUTTER BLADE ( (Y)5"REV2 CABLE (Y)5"CAMERA HEAD NEW (Y)5"CABLE ASSY RMS (Y)5"CABLE (Y)5"CABLE (Y)5"CHAMBER PANNEL (Y)5"COMPUTER CABLE(TO MONITOR (Y)5"ELEVATOR MOTOR (Y)5"MOTOR CABLE ASS (Y)5"MOTOR CABLE ASS (Y)5"CABLE ASS'Y AU6 (Y)5"CABLE ASS'Y AU6 (Y)5"CABLE ASS'Y AU5 LOCATION M-5-3-1.

4LE6. D-3-4-1 L-11-2-4 L-11-1-3 C-4-1-2 N-7-5-1 L-11-1-3 L-11-1-3 L-11-1-3 D-3-4-1 VENDOR PART NO 037164G1 037166G1 037159G1 028920G1 028813G1 028731G1 005982G1 028931G2 028931G2 028931G1 028931G4 028934G1 028942 045197G1 028574 028933G1 002818G6 002818G7 005686G1 002858G1 005661G1 357-0096-436 028870 028961 035741G1 028664G1 045965G1 045964G1 045199G1 00102770 00102771 028603 002876G2 005064G1 00312503 035400G1 035678G1 035678G1 043982 044479G1 036939G1 SN106136 035131G1 002875G1 006096G2 039889 028112G1 044143G1 006193G1 수량 1 1 1 1 1 2 3 8 1 6 5 2 10 2 2 4 1 1 2 1 2 2 1 2 2 2 2 1 1 2 1 1 2 7 1 1 2 2 2 3 6 1 6 2 3 2 2 5 4 1 1 2 1 LOC VENDOR CC14 CC14 CC14 CC14 CC14 CC13 CC14 CC14 CC14 CC14 CC14 CC14 CC13 CC12 CC14 CC14 CC14 CC13 CC13 CC13 CC11 CC11 CC14 CC14 CC13 CC13 CC13 CC13 CC13 CC13 CC14 CC13 CC13 CC13 CC13 CC13 CC13 CC13 CC13 CC13 CC13 DD12 CC15 T53 CC14 CC15 T53 CC22 CC15 CC24 CC15 CC15 T21 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " . CABLE (Y)5"CABLE ASSY (Y)5"CABLE TV CAMERA (Y)5"MAXIMUS MICRO S (Y)5"CALLE (LAMP TO (Y)5"CALLE (LAMP TO (Y)5"COUPLING (THETA (Y)5"PADDLE CHUCK (N)5"AUTO STEP 200 C (Y)5"SIGNAL DETECTOR (Y)5"DLV11-JA QUAD SER (Y)5"SIGNAL DETECTOR (Y)5"DIAPHRAM (Y)5"HARD DISK DRIVE (Y)5"WAFER DETECTOR (Y)5"ELEVATOR INDICATOR (Y)5"ELIPSOIDAL (Y)5"RMS EMITTER ASS (Y)5"DOUGLET FILTER (Y)5"F/F DRIVE ASS'Y LOCATION L-11-2-4 L-11-2-4 L-11-2-4 L-11-2-4 L-11-2-4 L-11-2-4 B-3-1-3. SENS (Y)5"COUPLING (T/T) (Y)5"CHUCK VACUUM 150MM (Y)5"CABLE ASSY FORK MICROSWIT (Y)5"CABLE ASS'Y COMPUTER INT (Y)5"CABLE (AWH-CO4P (Y)5"CABLE ASS'Y (Y)5"CABLE (AWH-CHASSIS P31) (Y)5"CABLE (P33/P32) (Y)5"CABLE ASS'Y (Y)5"CABLE ASSY (Y)5"COUPLING (AP) (Y)5"CABLE ASSY P2 C (Y)5"CABLE (P21) (Y)5"CABLE ASS'Y4T/C (Y)5"CABLE T/C ASS'Y (Y)5"CABLE ASSY (Y)5"LIGHT GOURCT CR (Y)5"PHOTODETECTOR C (Y)5"COUPLING (ELEV) (Y)5"WFR SNSR. N-7-6-2 B-3-1-3. N-7-6-2 L-11-2-4 L-11-2-4 B-3-1-3 B-3-1-3 B-3-1-3 B-3-1-3 L-10-7-1 B-3-1-3 L-10-7-1 H-3-1 L-11-1-3 C-4-1-2.No Item no 장비명 3829 3830 3831 3832 3833 3834 3835 3836 3837 3838 3839 3840 3841 3842 3843 3844 3845 3846 3847 3848 3849 3850 3851 3852 3853 3854 3855 3856 3857 3858 3859 3860 3861 3862 3863 3864 3865 3866 3867 3868 3869 3870 3871 3872 3873 3874 3875 3876 3877 3878 3879 3880 3881 3401C-027 3401C-029 3401C-030 3401C-031 3401C-033 3401C-036 3401C-037 3401C-038 3401C-038 3401C-039 3401C-040 3401C-041 3401C-043 3401C-044 3401C-045 3401C-046 3401C-048 3401C-049 3401C-050 3401C-051 3401C-052 3401C-053 3401C-054 3401C-056 3401C-057 3401C-058 3401C-059 3401C-060 3401C-061 3401C-062 3401C-064 3401C-065 3401C-066 3401C-068 3401C-069 3401C-071 3401C-072 3401C-073 3401C-073 3401C-074 3401C-075 3401C-079 3401D-003 3401D-004 3401D-007 3401D-011 3401D-014 3401D-015 3401E-002 3401E-003 3401E-004 3401F-001 3401F-002 WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER DESCRIPTION (Y)5"CABLE ASS'Y AU58(J4) (Y)5"CABLE ASS'Y AU5 (Y)5"CABLE ASS'Y AU6 (Y)5"CABLE ASS'Y(COM (Y)5"TRANSFOMER ASS' (Y)5"GRAY CODE ASSY (Y)5"TURN TABLE UP/DOWN CABLE (Y)5"CABLE ASS'Y A F (Y)5"CABLE ASS'Y A F (Y)5"CABLE ASS'Y A&B (Y)5"CALBE ASS'Y B FORK EXTEND (Y)5"FORK VACUUM CAB (Y)5"CONNECTOR ASS'Y (Y)5"CABLE ASSY.

160 (Y)5"GAUGE 0-60 (Y)5"GAUGE VAC 0-30 PCB (Y)5"ANTI BACKLASH G (Y)5"GEAR SPUR (Y)5"GEAR SPUR (Y)5"Y GEAR DRIVE AS (Y)5"NYILON GEAR ASS (Y)5"GASKET(THETA II) (Y)5"JOY STICK ASS'Y (Y)5"OPER MOD KEY (Y)5"OPER MOD KEY (Y)5"MAIN LASER ASS' (Y)5"LASER RECEVER (Y)5"PICK UP LENS #1 (Y)5"LASER EMITTER A (Y)5"PICK UP LENS #2 (Y)5"LIGHT PIPE (N)5"X AXIS LASER (Y)5"HALOGEN LAMP (Y)5"LAMP MOUNT ASS' (Y)5"PICK UPLENS #3G (Y)5"PICK UP LENS #4 (Y)5"PICK UPLENS #5 (Y)5"LENS POS MENISC (Y)5"AWH ELEVATOR MO (Y)5"Y-AXIS MOTOR DR (Y)5"ALIGN MOTOR DRI (Y)5"THETA MOTOR (Y)5"X-AXIS MOTOR DR (Y)5"SCANNER MOTOR A (Y)5"ALIGN MOTOR DRI (Y)5"TRANSFER MOTOR (Y)5"APERTURE BLADE MOTOR (Y)5"POTENTIOMETERT (Y)5"FORK MOTOR (Y)5"TT MOTOR (Y)5"X GEAR DRIVE AS (Y)5"KIT CRT/PCB 102 (Y)5"FLAFINDERMOTOR (Y)5"RADIO METER (Y)5"ACCELORO METER (Y)5"STAGE MOTOR (Y)5"O-RING(BTM OF C (Y)5"THETA STAGE BELT LOCATION L-11-1-3 H-1-2.T31 T64 P53 T63 P53 P52 T31 P53 P53 T63 T63 P42.No Item no 장비명 3882 3883 3884 3885 3886 3887 3888 3889 3890 3891 3892 3893 3894 3895 3896 3897 3898 3899 3900 3901 3902 3903 3904 3905 3906 3907 3908 3909 3910 3911 3912 3913 3914 3915 3916 3917 3918 3919 3920 3921 3922 3923 3924 3925 3926 3927 3928 3929 3930 3931 3932 3933 3934 3401F-004 3401F-007 3401F-008 3401F-016 3401F-017 3401F-019 3401F-020 3401F-021 3401G-001 3401G-002 3401G-003 3401G-004 3401G-005 3401G-006 3401G-008 3401G-011 3401G-012 3401J-001 3401K-001 3401K-001 3401L-001 3401L-002 3401L-004 3401L-005 3401L-009 3401L-011 3401L-012 3401L-013 3401L-017 3401L-018 3401L-019 3401L-020 3401L-041 3401M-005 3401M-006 3401M-009 3401M-011 3401M-012 3401M-013 3401M-014 3401M-016 3401M-017 3401M-019 3401M-020 3401M-025 3401M-027 3401M-030 3401M-032 3401M-033 3401M-035 3401M-037 3401O-002 3401O-004 WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER DESCRIPTION (Y)5"PINCHER POSITION FIXTURE (Y)5"MUFFIN FAN (Y)5"DICHROIC FILTER (Y)5"FILTER WAVELENG (Y)5" FLAT FINDER (Y)5"FLAT FINDER BLOCK ASSY (Y)5"COOLING FAN (Y)5"4:J FIBER (G1.H-1-2 H-1-1.H-1-2 N-3-2-3 B-4-3-3 M-5-1-1 B-4-3-3 B-4-3-3 E-3-2-1 L-9-3 I-6-1 G-2-3-1 G-2-3-1 H-1-1 VENDOR PART NO SI-12401 001652 100307 100303 036653 035932G1 115V 60HZ 14W 006531G2 010970 035344 035345 013053 010256 010254 035282G2 0061199G1 K10120 037311G1 037285G1 037285G1 045889G1 02105101 037514 037058G1 014675 068528 004048G1S 014864 014767G3 014676 014677 014678 014674 006143G1 035282G1 005527G1 004021 035281G1 037198G1 010713G1 002887G1 002905G1 028566 028123G1 039575 035281G2 028672 003046 028944G1 014725 004099G1 K10121 SN103190 수량 1 5 13 16 1 1 18 1 5 6 7 1 15 15 3 4 1 4 2 1 7 2 11 2 7 2 1 11 1 11 9 9 10 2 2 2 2 3 1 2 1 5 1 5 3 3 2 3 1 3 1 24 2 LOC VENDOR CC15 CC22 CC15 CC15 CC15 CC15 CC22 CC15 CC22 CC22 CC22 CC15 CC15 CC15 T21 CC15 CC15 T53 T21 T21 CC14 CC22 CC15 CC15 CC15 CC15 CC15 T21 CC24 CC15 CC15 CC15 CC15 T63 P53.T32 CC10 T31 BB15 T31 P53 CC15 CC15 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .3 (Y)5"GAUGE 0. L-11-2-1 L-11-1-3 L-11-1-3 L-11-1-3 H-1-1 L-11-1-3 L-11-1-3 L-11-1-3 L-11-1-3 D-3-4-1 L-11-1-3 L-11-1-3 C-4-1-2 D-3-4-1 D-3-4-1 L-11-2-4 N-7-5-1 L-11-1-3 L-11-1-3 L-11-1-3 L-10-4-3 J-2-2-2 L-11-1-3 L-11-1-3 L-11-1-3 C-4-3-3. M-5-1-1 B-4-3-3 C-4-3-4.

N-7-5-1 L-11-2-4 L-11-2-4 N-6-4-1 D-3-5-3 D-3-5-3 VENDOR PART NO 003917 K10122 005318G2 34791193-E 003822G1 066540G1 005318G1 006185G1 036709 036902G1 036904G1 005017G1 002879G1 028895G1 004828 004828 004827 004827 010841 00159120 00159120 038310 03805461 XXXX 013283 039011G1 00134102 028117G1 036958G1 SN10056 002935G1 012433 011470 005054G1 006551G1 037545G1 34790306 004063G1 010264G1 028180G1 011228 00102779 SN10160 028139G1 028139G1 028170G1 028170G2 028744G1 002873G1 028240G1 SN10745 003050G1 수량 3 34 1 2 2 2 5 3 1 1 2 2 3 1 7 16 3 14 12 1 3 3 1 1 1 5 14 1 2 2 3 1 10 2 1 1 2 1 1 1 4 4 6 3 3 3 3 2 1 5 5 2 1 LOC VENDOR CC15 CC15 T21 CC15 CC15 T54 T54 CC15 T32 T32 V14 V14 T64 T21 CC15 CC15 CC15 CC15 CC15 T32 T64 T64 CC15 CC15 CC14 T43 CC13 CC15 CC15 CC15 CC22 CC22 CC15 CC13 CC15 T43 CC15 CC15 CC13 CC15 CC15 T43 CC14 CC15 CC14 CC14 CC15 CC13 T43 CC15 T43 CC15 CC15 " " " " " " " " " GCA " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " GCA " " " " " " " " " " " .12 PLATE WAFER STEPPER (Y)5"PHOTO DETECTOR WAFER STEPPER (Y)5"ILLUMINATOR POW WAFER STEPPER (Y)5"15VOLT POWER SU WAFER STEPPER (Y)5"125MM PADDLE CH WAFER STEPPER (Y)5"POWER SUPPLY MO WAFER STEPPER WAFER STEPPER (Y)5"5V POWER SUPPLY WAFER STEPPER (Y)5"15V POWER SUPPL WAFER STEPPER (Y)5"AWA POWER SUPPL WAFER STEPPER (Y)5"5V POWER SYPPLY WAFER STEPPER (Y)5"BAR 4ODE PHOTOD WAFER STEPPER (Y)5"PINCHER PRIMARY WAFER STEPPER (Y)5"PINCHER PRIMARY WAFER STEPPER (Y)5"PINCHER SECONDA WAFER STEPPER (Y)5"PINCHER SECONDA WAFER STEPPER (Y)5"CAMERA CONTROL WAFER STEPPER (Y)5"POWER SUPPLY 5V WAFER STEPPER (Y)5"POWER SUPPLY 5V WAFER STEPPER (Y)5"BACK ALIGNMENT WAFER STEPPER (Y)5"PRISM MOUNT WAFER STEPPER (Y)5"FIBER BUNDLE WAFER STEPPER (Y)5"Q-BUSS PARALLEL INTERFACE WAFER STEPPER (Y)5"RETRO KIT WAFER STEPPER (Y)5"LIMIT RELAY WAFER STEPPER (Y)5"RETICLE KIKER A WAFER STEPPER (Y)5"REF SIGNAL ASS' WAFER STEPPER (Y)5"RECEIVER WAFER STEPPER (Y)5"LASER RECEIVER WAFER STEPPER (Y)5"PNEUMTIC SENSOR WAFER STEPPER (Y)5"AIR PROBE WAFER STEPPER (Y)5"SYSTEM POW SWIT WAFER STEPPER (Y)5"Z-AXIS SENSOR A WAFER STEPPER (Y)5"AWA ALIGN BUTTO WAFER STEPPER (Y)5"SPRING ROLLER WAFER STEPPER (Y)5"PRE-ALIGN APIND WAFER STEPPER (Y)5"THATA X-SENSOR WAFER STEPPER (Y)5"SENSOR GRAY COD WAFER STEPPER (Y)5"FORK VACUUM MICRO SWITCH WAFER STEPPER (Y)5"PTURE BLADE OPT WAFER STEPPER (Y)5"ACTUATOR MICRO WAFER STEPPER (Y)5"ELE6ATOR ALIGN WAFER STEPPER (Y)5"ELE6ATOR ALIGN WAFER STEPPER (Y)5"FORK CCW SENSOR WAFER STEPPER (Y)5"FORK CW SENSOR WAFER STEPPER (Y)5"RMS TT ALIGN SE WAFER STEPPER (Y)5"SEND T/A 6ECEIV WAFER STEPPER (Y)5"RMS DOOR SENSOR WAFER STEPPER (Y)5"TI MATERIAL SES WAFER STEPPER (Y)5"STD THETA STAGE LOCATION D-3-4-1 D-2-1-1 M-5-1-2 L-11-1-3 K-9-2-4 N-2-4-1 N-2-4-1 D-3-4-1 L-11-1-3 L-11-1-3 N-2-4-1 N-2-4-1 L-11-1-3 L-11-2-4 D-3-5-3 N-6-4-1 L-11-1-3 L-11-2-1 N-7-5-1 N-6-4-1 D-3-5-3 N-6-4-1 B-3-1-3.No Item no 3935 3936 3937 3938 3939 3940 3941 3942 3943 3944 3945 3946 3947 3948 3949 3950 3951 3952 3953 3954 3955 3956 3957 3958 3959 3960 3961 3962 3963 3964 3965 3966 3967 3968 3969 3970 3971 3972 3973 3974 3975 3976 3977 3978 3979 3980 3981 3982 3983 3984 3985 3986 3987 3401O-005 3401O-006 3401P-002 3401P-005 3401P-008 3401P-009 3401P-010 3401P-011 3401P-012 3401P-013 3401P-014 3401P-015 3401P-016 3401P-017 3401P-018 3401P-019 3401P-019 3401P-020 3401P-020 3401P-024 3401P-025 3401P-025 3401P-030 3401P-035 3401P-038 3401Q-002 3401R-001 3401R-002 3401R-003 3401R-006 3401R-009 3401R-011 3401S-002 3401S-003 3401S-007 3401S-008 3401S-012 3401S-013 3401S-014 3401S-015 3401S-017 3401S-018 3401S-019 3401S-020 3401S-021 3401S-021 3401S-024 3401S-025 3401S-026 3401S-028 3401S-029 3401S-030 3401S-031 장비명 DESCRIPTION WAFER STEPPER (Y)5"O-RING BOTTOM OF CHUCK WAFER STEPPER (Y)5"O-RING(BOTTOM O WAFER STEPPER (Y)5"15V POWER SUPPL WAFER STEPPER (Y)5"0.

No Item no 3988 3401S-032 3989 3401S-032 3990 3401S-033 3991 3401S-035 3992 3401S-036 3993 3401S-037 3994 3401S-039 3995 3401S-040 3996 3401S-041 3997 3401S-043 3998 3401S-051 3999 3401T-004 4000 3401T-012 4001 3401T-031 4002 3401V-005 4003 3401V-006 4004 3401W-001 4005 3401W-003 4006 3404A-001 4007 3404A-002 4008 3404B-001 4009 3404B-002 4010 3404B-003 4011 3404B-005 4012 3404B-006 4013 3404B-010 4014 3404B-011 4015 3404B-014 4016 3404B-016 4017 3404B-017 4018 3404B-018 4019 3404B-019 4020 3404B-020 4021 3404B-081 4022 3404B-082 4023 3404B-083 4024 3404B-086 4025 3404B-087 4026 3404B-088 4119 3414B-013 4120 3414B-052 4121 3414B-054 4122 3414B-055 4123 3414C-005 4124 3414C-061 4125 3414D-001 4126 3414D-006 4127 3414H-004 4128 3414M-005 4129 3414M-102 4130 3414S-009 4131 3414S-102 4132 3414T-002 장비명 WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER WAFER STEPPER TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK DESCRIPTION (Y)5"RMS ELEVATOR SC (Y)5"RMS ELEVATOR SC (Y)5"RMS CASSETTE CH (Y)5"MAX. 043845G2 028124G1 029515G1 00132050 035459 049529 00166825 006199G1 2522-035002 5107-000002 XXX 0513-496700 BD3-2678-000 0523-58580 03-06-00038 03-06-00035 0553-700340 0553-628000 0563-700427 03-08-00311 0523-701008 0553-678500 0553-700567 0556-594300 0556-594400 2502-000025 0535-577200 0535-577400 0525-358900 1381-664009-11 02017103 S009647 02017100 031429G1 S008390 032425 031405G1 032010 수량 2 1 6 1 2 2 1 1 3 2 1 2 1 2 11 2 6 1 1 1 2 1 1 1 1 2 1 1 1 1 1 2 2 1 1 2 1 5 1 1 1 1 3 1 1 2 2 15 2 4 2 2 1 LOC VENDOR CC13 CC13 CC13 CC15 T43 CC15 T43 CC13 T43 T43 CC15 CC13 CC13 T21 CC14 CC13 CC15 CC15 J52 J11 V34 V33 W11 T64 W13 W11 V33 V35 V34 V34 V34 V34 V34 W13 J11 J74 J11 J11 J11 V14 K32 K32 K32 K32 K32 K32 K01 K36 P33 K32 K32 K32 K32 " " " " " " " " " " " " " " " " " " UT " UT " UT " " " " " " " " " " " " " " " " GCA " " " " " " " " " " " " " . H-7-1 C-3-1. F-5-4 K-3-1-3 K-3-1-3 K-3-1-3 VENDOR PART NO 028116G1 028116G1 028506G15 043667G2 010265G1 028943G1 004063G1. 1000 PHOTO (Y)5"RMS ALIGN LIMIT (Y)5"CABLE ASSY MICR (Y)5"SAME P/N 3401S(Y)5"SENSOR ASS'Y (Y)5"FORK POSITIM SE (Y)5"FORK POSITION S (Y)5"TRANSFER ARM (Y)5"THERMOSTANT (Y)5"CAMERA TUBE NVC (Y)5"TABLE VALVE ASS (Y)5"VALVE ASSY (Y)5"WORM WHEEL ASSY (Y)5"WEBER SGUARE (Y)HOSE FITTING ADAPTER (Y)ACTUATOR (Y)XXXX (Y)BOARD HP 10746A (Y)BOARD SYS DRIVER BOARD STAGE DRIVER (Y)BOARD AIR GAUGE CONTROL (Y)BOARD FOCUS CONTROL DRIVER (Y)BOARD 32 BIT UNIV (Y)AUTO LOADER MAIN PCB (Y)LEFT WINDOW HOME (Y)RIGHT WINDOW HOME (Y)WAS MOTOR RELAY B (Y)UPPER FLAT FIND B (Y)LOWER FLAT FIND B (Y)ENOID RETICLE AIR (Y)SOLENOID RETICLE (Y)BALL BEARING (Y)SHORT AIR BEARING (Y)LONG AIR BEARING (Y)FIXED GUIDE BEARI (X)SHUTULE DR PCB (X)CIRCUIT BREAKER1 I/O (X)CKT BREAKER (X)5"CKT BREAKER (X)MOTOR CABLE POWER (X)CUP CYLINDER 3/4-16MT (X)HOUSING CUP LOWER (X)150MM MOTOR (X)BOLCK MONTING DI MONTING LOCATION N-6-3 N-6-3 N-6-4-1 D-3-5-3 G-2-3-2 N-6-4-1 D-3-5-3 D-3-5-3 N-6-4-1 N-6-4-1 N-6-4-1 L-11-2-4 N-6-4-1 N-4-5-1 N-4-4-3 J-4-3-1 J-2-2-1 N-4-3-1 J-4-3-1 N-4-4-3 N-4-5-1 N-4-5-1 N-4-5-1 N-4-5-1 N-4-5-1 N-4-5-1 K-4-5-3 K-6-4-3 K-4-5-3 K-4-5-3 D-8-1 K-3-1-3 K-3-1-3 K-3-1-3 K-3-1-3 K-3-1-3 K-3-1-3 H-6-1.

FLOPPY & IDE HD (Y)CLAMP.88PITCH (Y)BUMPER BUTTON BLK BATTERY 2.88PI (Y)CABLE CHAIN .30A. LOCATION L-6-1-4..CENTERING DEV PCB MICROSTEP DRIVE (Y)ASSY XSISTOR PCB8 PCB HCIU TRK INTFC M (Y)ASSY HANDLER ELCT PCB INTERFACE BOARD (88D (R)PCB HCIU TRK ASSY CPU PCB (8838VP (X)BUSHING BALL 1/2" (X)5"PC BOARD FRONT PANEL DISPLAY PCB (Y)ASSY PCB 2 SONV S (Y)HEATER/CONTROLLER (C)BEARING. K-5-2-2 D-3-2-2 J-4-3-2 D-3-2-2 L-4-1-4 K-5-2-2 F-5-5 F-5-5 L-4-1-4 L-6-1-4 L-6-1-4.GFI.TIMING SHUTTLE TIMING BELT PCB SYS 90 RS422 COMMUNICATION (Y)CABLE CHAIN .SPUTTER 3 CENTERING DEVICE 230V TEMP CONTROL.SPLIT 3/16 (Y)CLAMP SPLIT (Y)AIR CYLINDER (Y)AIR CYLINDER (Y)CONNECTOR ASSY (Y)AIR CYLINDER (Y)CLAMP.1/4 PCB. ENCLOSN COUPLING TORQUE (Y)COUPLING ASSY ELEC CLUTCH COU (X)QUICK COUPLING INSERT CKT BRKR.SP.No Item no 장비명 4133 4134 4135 4136 4137 4138 4139 4140 4141 4142 4143 4144 4145 4146 4147 4148 4149 4150 4151 4152 4153 4154 4155 4156 4157 4158 4159 4160 4161 4162 4163 4164 4165 4166 4167 4168 4169 4170 4171 4172 4173 4174 4175 4176 4177 4178 4179 4180 4181 4182 4183 4184 4185 3415A-001 3415B-001 3415B-003 3415B-004 3415B-005 3415B-007 3415B-010 3415B-012 3415B-023 3415B-030 3415B-035 3415B-039 3415B-040 3415B-050 3415B-060 3415B-063 3415B-071 3415B-075 3415B-077 3415B-083 3415B-084 3415B-087 3415B-088 3415B-091 3415B-093 3415B-094 3415B-099 3415B-099 3415B-101 3415B-102 3415B-131 3415B-181 3415B-223 3415B-230 3415C-009 3415C-014 3415C-015 3415C-016 3415C-017 3415C-018 3415C-019 3415C-025 3415C-027 3415C-028 3415C-029 3415C-031 3415C-032 3415C-033 3415C-043 3415C-044 3415C-045 3415C-049 3415C-050 TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK DESCRIPTION (Y)ARM. POP-IN 1/4ID (Y)BELT.2500IDX (Y)PCB ASSY PHOTOTRA (Y)BELT TIMING (C)BELT (NEW) (Y)PCB EMITTER (Y)PCB ASSY (X)5"LIGHT BULB (C)BELLOWS UNIT (Y)BELLOWS BEARING. .4VOLT (C)BEARING BEARING BELT.08P TEETH. K-5-2-2 L-3-2-3 J-4-3-2 L-6-1-4 L-4-1-4 L-4-1-4 L-4-1-4 L-5-2-3 K-5-2-2 L-6-1-4 L-10-3-1 K-5-2-2 L-6-4-4 K-5-2-2 L-6-1-4 L-6-1-4 L-6-1-4 L-6-1-4 B-3-3-2 J-6-5 L-4-1-4 L-4-1-4 L-6-4-4 L-6-1-4 L-4-1-4 VENDOR PART NO 20768-01 99-14089-02 99-80092-03 99-80122-02 02092201 99-80122-03 99-80122-01 88-18888-06 201-004 99-80125-03 096-00792 99-80089-06 99-80082 201-082 99-80192-01 202-256 202-364 91-80191-01 99-80187-01 99-80073 85-16202-01 208-093 201-198 202-304 202-329 110-002 204-021 204-021 205-252 121-104 201-002 201-156 202-373 130-065 215-067 216-110 203-082 203-097 206-889 203-076 216-096 06769-01 99-20067-02 99-20067-03 202-323 39926-01 38464-01 99-38534-01 215-021 215-156 99-14416-01 206-701 111-139 수량 4 2 1 1 1 1 1 1 2 4 3 2 1 2 1 10 1 2 1 2 1 3 5 2 1 1 2 2 15 1 2 2 6 1 5 2 1 1 1 3 2 1 5 6 1 1 9 1 13 4 24(3ea불출 1 1 LOC VENDOR K32 V32 V24 V24 W15 V31 V24 K11 K32 T24 T24 V24 V24 K11 V24 K11 K11 V24 V24 T24 K32 K32 K33 K32 J25 W15 K32 J25 K32 K11 K11 K11 K11 J25 K32 K32 J25 K32 J25 J24 K32 K32 K32 K32 K32 K32 J53 J21 K11 K11 J25 K32 K11 SVG " " " SVG " " " SVG " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .HUB (X)CABLE (Y)CABLE 40" ENCODER (Y)CABLE 55" ENCODER (Y)CABLE CHAIN (Y)E CHAIN.

SERVICE EPR O (Y)O-RING (Y)O-RING.90 SERIES C (Y)PC DRIVER INTERFA ASSY.MHP 115 CST ELEM HTR.99 (Y)ELBOW 10-32X1/8T BARB NYLON (X)5"GASKET (X)5"GASKET (X)5"GASKET (Y)GAUGE (Y)GAUGE(0-35kg/cm) (Y)GAUGE (-750mmhg-1 (Y)GAUGE (0-10KG/CM) (X)5"ASSY PCB HEATER (Y)H/C HEATER ASSY CST ELEM HTR.W/J (X)5"HEPA FILTER (X)FILTER (3996F-014) (Y)ULPA FILTER 99.8 INPUR DATA S (Y)KNOB (X)5"LAMP (X)5"LAMP 28VOLT (Y)LENS CONVEX (C)GEAR MOTOR 15V MOTOR HIGH SPEED ASSY ROTATION MTR TO (Y)STEPPER MOTOR 883 (Y)KIT.E-CHAIN/2 STATION.No Item no 장비명 4186 4187 4188 4189 4190 4191 4192 4193 4194 4195 4196 4197 4198 4199 4200 4201 4202 4203 4204 4205 4206 4207 4208 4209 4210 4211 4212 4213 4214 4215 4216 4217 4218 4219 4220 4221 4222 4223 4224 4225 4226 4227 4228 4229 4230 4231 4232 4233 4234 4235 4236 4237 4238 3415C-070 3415C-073 3415C-096 3415C-104 3415C-109 3415C-174 3415D-021 3415E-018 3415F-030 3415F-049 3415F-056 3415F-106 3415G-001 3415G-002 3415G-003 3415G-004 3415G-008 3415G-009 3415G-010 3415H-001 3415H-007 3415H-008 3415H-009 3415H-020 3415H-021 3415H-051 3415H-053 3415H-054 3415I-022 3415K-005 3415L-001 3415L-003 3415L-012 3415M-001 3415M-006 3415M-013 3415M-019 3415M-020 3415M-031 3415M-034 3415M-041 3415N-002 3415N-005 3415N-007 3415N-011 3415N-013 3415N-015 3415O-004 3415O-007 3415O-011 3415O-012 3415O-013 3415O-028 TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK DESCRIPTION (Y)ASSY HI-ACCEL CONTROL (Y)ASSY HIGH-ACC SPI (X)5"CHEM.HEX 10-320STD (Y)DEV SPRAY NOZZLE (Y)NOZZLE CHISELPOIN (Y)ASSY SPRAY NOZZLE (Y)LEAD NUT (X)5"O-RING (X)5"O-RING (Y)O-RING FOR ABOVE (Y)KIT.3475IDX275 LOCATION I-7-1 I-6-3 L-6-1-4 B-3-3-2 J-4-1-2 H-9-1 K-5-2-2 L-6-1-4 K-5-2-2 K-5-2-2 K-4-4-3 K-4-4-3 K-4-4-3 K-4-4-3 D-1-2-2 L-2-3-4 L-5-5-4 K-5-2-3 L-6-1-4 L-2-3-3 L-2-3-4 J-6-4 L-6-1-4 L-6-1-4 N-7-3-3 N-2-3-4 N-7-4-4 N-7-4-4 L-3-4-1 K-4-4-3 L-6-1-4 L-4-1-4 L-6-1-4 L-6-1-4 K-5-2-2 K-5-2-2 K-5-2-2 L-6-1-4 N-8-2-2 VENDOR PART NO 3401M-03001 99-16920-01 200-362 99-42367-10 20384-01 99-80212-01 99-45762-15 GP UNIT CWF2010S1 303-016 206-666 207-004 207-005 210-020 209-032 P3 P4 P1 203-065 200V 30 3KW 99-15742-03 99-15742-01 99-14394-01 214-016 121-125-01 EH-1 EH-2 104-8409 17276-01 110-004 99-20082 200-225 112-012 112-067 99-11918-02 99-16587-01 17-40492-01 06-20842-02 213-178 209-056 22571-01 205-239-235 207-026 17530-02 99-22600-01 205-644 202-253 202-260 306-010 202-347 202-067 수량 LOC VENDOR 1 1 1 2 1 1 1 1 2 1 1 10 4 4 4 3 1 1 5 1 2 3 1 7 13 1 2 1 5 1 4 4 1 4 9(4ea불출 3 1 1 2 2 2 1 18 30 1 1 2 4 7 20 1 1 10 J41 J41 K32 K32 K33 J53 V24 K33 J31 K32 J22 K32 K32 K32 K32 J42 J42 J42 J42 T33 K33 J25 J25 J42 K32 K31 K33 J32 V24 K32 T24 T24 K32 P51 P52 P22 P22 P22 P41 K33 J42 K32 K11 K32 K32 K32 K32 K32 K32 K42 K32 K42 K42 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " SVG " " " " " " " " " " " " " " " " " " " " " " .RESIST DSPLY COVER HARN SHUTTLE E-CHAIN (Y)CHUCK.MHP 115 (Y)HARN SPDL DR 2 MT (Y)STANDOFF HEX 4-40 (Y)HEATER(HMDS) (Y)WATER PIPE HATER (Y)AIR HEATER (Y)IC.RETRO DISPENS (Y)SPINDLE MOTOR MANIFOLD 4 STA (C)FLOWMETER 5 GAL (Y)NOZZLE (Y)NUT.

REED SW 3/4" (Y)SPACE (X)5" (Y)S/W KEYLOCK SO (X)5"SWITCH PRESSURE SWITCH PRESSURE (Y)LINEAR BRG SEAL (X)5"SPRING COMP (Y)SPRING EXTENSION (Y)SPRING ASSY PCB SINGLE SENS (Y)SEAL 1/4 IDX1/2 O (Y)SEAL.10"HG (X)5"TRANSISTOR PNP DARLINGT (X)5"SOCKET TRANSISTOR TO3 (X)5"TRANSISTER.3 (Y)SEAL. K-5-4-2 99-16113-03 L-3-4-1 01-11706-01 E-3-1 13-0037-04 K-5-2-3 99-18266-02 K-5-2-3 99-06660-02 K-5-2-2 209-003 L-6-1-4 18253-01 L-6-1-4 109-227 F-5-5 99-80194-01 F-5-5 103-6051 F-5-5 116-025 K-5-5-1 THL 212-014 N-3-3-2 99-18415-01 N-3-3-2 99-19960-01 N-3-3-2 121-100 14503-01 수량 10 10 1 3 4 12 10 1 5 11 1 1 1 1 3 2 2 8 2 2 3 2 1 4 3 3 2 2 2 10 1 2 4 3 10 10 12 1 2 1 4 2 1 2 1 4 10 2 1 2 4 3 2 LOC VENDOR K42 K32 V32 J53 K32 K32 K33 K33 K33 K32 J25 K42 K42 K32 K32 K11 J25 K32 J54 K32 K32 J25 K32 K33 K42 K42 J42 K33 K32 K42 K32 K32 K32 J25.375OD X 12.VAC.N-CH MOSFET (Y)CHILL CORTROL THE TUBING TEFLON 3/16"OD*1/8"ID ASSY SPINDLE TUBE (8 SPINDLE TUBE HI-VAC (Y)THERMOCOUPLE UNGN (X)5"TUBE RTNR LOCATION D-3-2-2 B-3-3-2 L-6-1-4.4 LEVEL. K-5-2-2 L-6-1-4. K-5-5-1 100-046 L-6-1-4 06719-01 J-5-5 215-153 L-10-3-1.O-RING CHEMR (Y)SENSOR CTR (Y)SPRING (Y)VITON O-RING (Y)VACUUM SENSOR (Y)TOP SEAL (Y)SHAFT .SS S (Y)HARN COND OPT SEN ENCODER SENSOR (X)5"EXH.FACE.FLOW SENSOR (X)5"SLEEVE.5LG 303 (Y)SPIN TUBE(88 DEV) (Y)SHAFT (Y)5GAL.475ID X SYSTEM POWER SUPPLY (Y)PIN SUPPORTING (Y)PIN CENTERING DEV (Y)PIN CENTERING DEV PIN WAFER LIFT HPO/V PLATE MTG.J42 K33 K42 J42 J42 K32 K32 K32 T24 T24 T24 J42 K32 W21 W21 J25 K32 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " SVG " " " " " " " " " " " " .475ID X (Y)O-RING.GFI B (Y)QUICK DISCO PNL (X)5"RING RETAINING 3/8" (Y)AIR CYLINDER DBL END ROD (C)SWITCH (C)SWITCH (X)5"SWITCH 5 AMP 25 (Y)SWITCH TEMPERATUR (C)MICRO SWITCH (Y)MAG.No Item no 장비명 4239 4240 4241 4242 4243 4244 4245 4246 4247 4248 4249 4250 4251 4252 4253 4254 4255 4256 4257 4258 4259 4260 4261 4262 4263 4264 4265 4266 4267 4268 4269 4270 4271 4272 4273 4274 4275 4276 4277 4278 4279 4280 4281 4282 4283 4284 4285 4286 4287 4288 4289 4290 4291 3415O-029 3415O-030 3415P-009 3415P-014 3415P-015 3415P-016 3415P-017 3415P-024 3415Q-004 3415R-008 3415R-021 3415S-001 3415S-001 3415S-003 3415S-005 3415S-008 3415S-010 3415S-012 3415S-013 3415S-014 3415S-015 3415S-016 3415S-021 3415S-022 3415S-026 3415S-030 3415S-033 3415S-034 3415S-035 3415S-036 3415S-038 3415S-039 3415S-048 3415S-049 3415S-050 3415S-053 3415S-055 3415S-057 3415S-064 3415S-081 3415S-085 3415S-086 3415S-106 3415S-115 3415T-001 3415T-005 3415T-007 3415T-011 3415T-023 3415T-031 3415T-040 3415T-041 3415T-061 WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK DESCRIPTION (Y)O-RING. K-5-2-2 L-3-4-1 L-3-4-1 L-3-4-1 L-6-1-4 N-3-1-2 N-8-2-2 N-8-2-2 L-6-1-4 L-6-1-4 L-4-1-4 L-6-4-4 L-6-1-4 C-3-3 L-10-3-1 K-5-2-2 L-6-4-4 N-3-1-4 L-3-4-1 N-8-2-2 VENDOR PART NO 202-066 202-280 102-0020 20770-01 20769-02 20769-01 43211-01 111-140 206-740 205-097 203-092 109-001 109-001 109-043 109-095 109-108 109-148 214-269 109-855 109-055 201-085 211-030 211-065 211-061 99-80158-01 L-3-4-1 210-026 L-6-1-4 201-179 N-8-2-2 202-303 K-5-2-2 303-046 K-5-2-2 211-095 202-305 L-6-4-4.3.8826 EBR (Y)SWITCH.3.J42 K32 J31 J25.8750 OD X .

4/ (X)VALVE SUCKBACK LOW VOLUME (Y)EXPANSION V/V VALVE.No Item no 4292 3415T-063 4293 3415T-067 4294 3415T-068 4295 3415V-051 4296 3415V-055 4297 3415V-066 4298 3415V-069 4299 3415V-080 4300 3415W-014 4301 3415W-015 4302 3415W-015 4352 3418B-001 4353 3418B-005 4354 3418B-006 4355 3418B-010 4356 3418C-001 4357 3418C-020 4358 3418H-001 4359 3418M-001 4360 3418M-002 4361 3418P-001 4362 3418S-001 4363 3418S-002 4364 3418V-003 4365 3421A-022 4366 3421B-002 4367 3421B-025 4368 3421C-023 4369 3421C-032 4370 3421F-001 4371 3421G-004 4372 3421G-051 4373 3421O-028 4374 3421P-011 4375 3421P-042 4376 3421P-043 4377 3421P-044 4378 3421P-045 4379 3421R-001 4380 3421S-001 4381 3421S-011 4382 3421S-015 4383 3421S-017 4384 3421S-021 4385 3421S-035 4386 3421S-041 4387 3421S-051 4388 3421S-062 4389 3421T-047 4390 3421V-014 4391 3422L-001 4392 3422L-002 4393 3422L-003 장비명 WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK WAFER TRACK TRACK TRACK TRACK TRACK TRACK TRACK WAFER TRACK WAFER TRACK WAFER TRACK TRACK TRACK TRACK TRACK CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM DESCRIPTION (Y)TABLE FWD (Y)TEMP CONTROL PID (Y)TEMP TRANS.RTD. K-5-2-2 L-6-1-4. K-5-2-2 B-3-3-2 B-3-3-2 B-3-3-2 D-3-2-2 L-5-2-3 H-1-1 N-2-3-4 N-4-5-1 D-8-2-1 D-8-2-1 L-5-2-3 A-3-5 L-10-5-2 VENDOR PART NO 16279-01 103-6390 303-043 213-116 EXPV 213-216 213-201 114-073 205-453 205-452 205-452 201-008 201-027 201-177 99-80170-01 215-171 41766-01 121-141 112-093 99-20066-01 USAHEM-01AB2 201-085 109-186 114-046 545-0128 533-1337 545-5117 L-2-1. D-11-2 545-5443 A-3-5 777-0179 L536232-4" 580-5546 L456802 L-10-5-2 G370009 L-10-5-2 545-1042 545-1418 545-1458 L-10-5-2 545-1056 A-3-5 531-6070 L-10-5-2 580-5573 A-3-5 545-1003 545-1443 545-1553 A-3-5 533-0286 A-3-5 545-0716 A-3-5 G559004 L-10-5-2 545-1433 A-3-5 HIS2043 580-4655 A-3-5 545-0846 D-2-1-3 1380-000500-11 D-2-1-3 D-2-1-3 수량 LOC 2 K32 1 W15 1 J42 1 K32 2 J42 1 J51 2 J25 2 J25 9 K33 10 K32 10 K32 2 J53 1 J53 4 J53 2 V24.1500W.N/C (X)SOL VALVE.2500IN OZ (Y)TOP COATER CATCH (Y)HEATER 230V.90 (Y)MOTOR 24DC 30IN 5 (Y)HARNESS GEAR MOTO (Y)PCB POWER SUPPLY (Y)LINEAR ERG SEAL.CHECK 3/4 FNPT TRUE UN P VALVE 2WAY NC 3/8 FNPT TFE CONVERTER ELEC 2PNU. K-9-1.3WAY 24 5"BEAM MONITOR AMP A (Y)MOLYBDENUN BOARD 5"KEY BORAD ASSY (Y)CAP (X)BOARD CASE ASSY THERMAL FILM (X)METAL GASKET 4" (Y)5"GUIDE (X)5"O-RING (Y)SILVER PASTE CNX(Y)WINDOW PLATE (Y)PAKING (Y)PAKING (Y)WINDOW PLATE (Y)LEAD RELAY (Y)5"LEAF SPRING (Y)5"MAGNETIC SEAL U (Y)LEAF SPRING (Y)5"LEAF SPRING (Y)SCINTILATOR (Y)5"VACUUM SWITCH A (Y)5"FREON GAS SPRAY (Y)SHAFT (X)FREON GAS SPRAY (X)TMP ASSY (STP 300 MAGNETIC VALVE ASSY LOCATION L-6-1-4 J-4-3-2 K-5-5-1 L-6-1-4 K-4-3-1 B-1-1 L-10-3-1 L-6-4-4 L-3-4-1 L-6-1-4.W13 1 K33 1 K33 1 J42 2 P51 1 P52 1 V34 4 K33 2 K33 7 J42 1 Q13 3(1ea불출 Q43 3 Q10 1 B16 5 DD31 10 Q13 4 DD31 3 B16 3 DD33 2 Q43 1 Q43 2 B63 2 B63 1 Q43 2 Q13 2 Q43 2 Q13 4 B16 2 B16 4 Q13 1 Q13 1 Q13 10 Q43 2 Q13 1 Q13 1 Q13 2 T11 2 T11 2 T11 VENDOR " " " " " " " " " " " SVG " " SVG " " SVG " " SVG " " " HITACHI " " " " HITACHI " " " " " HITACHI " " " " " " " " " " " " " " JEOL " " .VACUUM SENSO (Y)COUPLING BEL.4SIGNAL V/ (X)WASHER (X)WASHER (X)WASHER (Y)BEARING 3/SIDX7/80D FLG DBL (Y)BEARING 3/16X1/2OD (Y)BEARING 3/16IDX3/8OD (Y)ASSY.1/4 DIA (Y)SENSOR.

No Item no 장비명 4394 4395 4396 4397 4398 4399 4400 4401 4402 4403 4404 4405 4406 4407 4408 4409 4410 4411 4412 4413 4414 4415 4416 4417 4418 4419 4420 4421 4422 4423 4424 4425 4426 4427 4428 4429 4430 4431 4432 4433 4434 4435 4436 4437 4438 4439 4440 4441 4442 4443 4444 4445 4446 3422L-051 3422M-001 3422M-052 3422O-001 3422O-002 3422O-003 3422O-004 3422O-005 3422O-006 3422O-007 3422O-008 3422O-009 3422O-010 3422O-011 3422O-012 3422O-013 3422O-014 3422O-015 3422O-016 3422O-017 3422O-018 3422O-019 3422O-020 3422O-021 3422O-022 3422O-023 3422R-001 3422R-002 3422R-051 3422R-052 3422R-053 3442B-001 3442B-002 3442B-006 3442B-009 3442B-011 3442B-012 3442B-014 3442B-017 3442B-023 3442B-035 3442B-037 3442B-038 3442B-040 3442B-041 3442B-051 3442B-055 3442B-081 3442B-133 3442B-151 3442B-152 3442B-155 3442C-008 CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER DESCRIPTION LOCATION VENDOR PART NO H-1-1 H-1-1 K-5-3-3 K-5-3-3 K-5-3-3 5"DOUBLE SENSOR PCB (Y)5"WAFER SENSOR PCB 5"INTERFACE PCB (Y)5"PCW.T11 BB13 J43 V23 V24 V23 V23 V32 V24 V23 J43 K34 V23 K34 V23 V23 K34 K34 K34 W21 K42 V24.V32 V23 K34 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " SVG SVG " " " " " " " " " SVG " " " " " " " " " " .PRESSURE EL (Y)5"INDEX SPEED CON (Y)5"O-RING SPEED CO 5"CPU BOARD (8132) 5"TRANSISTER BOARD(8 5"ENCODER SENSOR (Y)5"PCB INTECONNECT (Y)5"WAFER SENSOR PCB (Y)5"FRONT PANEL.KEYBOARD 5"MOTHER BOARD AS 5"CONNECTOR IN6ER PC 5"BELT(MOTOR) (Y)5"INDEX UP-DOWN P (Y)5"BUSHING 1/4 * 3/8 (X)BRUSH 5"FUSE HOLDER 5"MOTHER PCB (SVG 86 5"CARRIAGE SPEED CON 5"CYLINDER(CENTERING K-5-6-2 J-4-2-2 J-4-2-2 J-4-2-2 D-3-3-1 J-4-2-2 K-5-1-4 K-3-3-2 J-4-2-2 B-3-3-4 J-4-2-2 J-4-2-2 K-3-3-2 K-3-3-2 N-3-3-2 B-3-3-4 D-3-2-2 J-4-2-2 K-3-3-2 99-80001-02 2-VC-04295-1 99-80072 109-003 99-80068 99-8006S 99-80103-02 99-80054-05 99-06660-02 99-01991-01 99-080074 99-80075 99-80076 202-010 220-029 201-028 21-00712-01 111-005 99-80075B 99-80090 203-045 수량 4 1 2 1 1 1 2 1 1 2 2 1 1 1 1 1 2 1 1 1 1 1 1 2 5 5 2 2 1 2 2 3 2 1 4 2 1 2 1 4 4 4 2 1 5 5 5 2 10 3 2 1 1 LOC VENDOR BB13 P53 P53 BB13 BB13 BB13 BB13 BB13 BB13 BB13 BB13 BB13 BB13 BB13 BB13 BB13 BB13 BB13 BB13 BB13 BB13 BB13 BB13 BB13 BB13 BB13 BB13 BB13 BB13 K34.

MAGNETI (Y)5"SWITCH LIQUID 5"SWITCH DOME 3/8" 5"SWITCH DOME 1/2" (Y)5"AIR SENSOR S/W LOCATION K-3-3-2 K-3-3-2 K-5-6-1 B-3-3-4 K-3-3-2 K-5-6-2 L-5-3-2 H-9-1 H-9-1 K-3-3-2 K-3-3-2 K-3-3-2 K-3-3-2 K-3-3-2 B-3-3-4 B-3-3-4 B-3-3-4 B-3-3-4 B-3-3-4 K-3-3-2 L-2-5-1 H-6-1 H-1-1 K-3-3-2 H-1-2 B-3-3-4 K-3-3-2 B-3-3-4 B-3-3-4 B-3-3-4 B-3-3-4 B-3-3-4 K-3-3-2 L-2-5-1 K-3-3-2 D-2-1-3 L-2-5-1 L-2-5-1 K-3-3-2 K-3-3-2 K-3-3-2 B-3-3-4 B-3-3-4 K-5-6-2 VENDOR PART NO 113-003 06739-01 121-067 215-013 215-021 222-001 99-08370-01 99-14416-01 99-05697-02A 217-005 201-014 121-042-01 98-06629-01 01098 201-051 99-03234 99-06660-02(A) 99-01603 99-01563 99-05680 99-06625-01 99-14394-01 104-0002-3 103-5884 200-050 01-00051 99-80065 112-036 112-005M 109-043 219-010 04155-01 04155-04 06871-01 06871-04 99-01993-01 99-80074C-01 18810-11 18810-07 M-10-402460-1 205-190 112-005 201-043 109-093 109-025 109-102 109-051 109-052 109-0003 수량 4 3 3 5 6불출 1 1 1 3불출 1 3 1 2 3 3 5 2 1 3 3 2 2 4 3 2 7 6 5 3 1 3확인 4 1 3 5 3 3 1 1 1 2 4 3 2 2 1 5 3 1 4 5 5 4 LOC VENDOR K34 K34 J43 K42 K42 K34 J43 BB13 J43 J25 K34 K34 K34 K34 K34 K34 K34 K42 K42 K42 K42 K42 K34 K34 V24 V24 DD13 K34 P51 V11 P51 K34 BB14 K42 K34 K42 K42 K34 K42 K42 K42 K34 K34 K34 T11 K34 K34 K34 K34 K34 K42 K42 J43 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " SVG " " " " " " " " " " " " " " " " " " " " .SPDL(88DV) (C)5"I.L 8632 (Y)5"CONTROL PANEL I (Y)5"FRONT PANEL.C (3996I-167) (Y)5"POWER SUPPLY TR (X)P.No Item no 장비명 4447 4448 4449 4450 4451 4452 4453 4454 4455 4456 4457 4458 4459 4460 4461 4462 4463 4464 4465 4466 4467 4468 4469 4470 4471 4472 4473 4474 4475 4476 4477 4478 4479 4480 4481 4482 4483 4484 4485 4486 4487 4488 4489 4490 4491 4492 4493 4494 4495 4496 4497 4498 4499 3442C-031 3442C-037 3442C-051 3442C-054 3442C-055 3442C-059 3442C-060 3442C-068 3442C-083 3442C-155 3442F-036 3442F-038 3442H-001 3442H-002 3442H-003 3442H-004 3442H-005 3442H-007 3442H-008 3442H-009 3442H-010 3442H-011 3442H-012 3442H-014 3442I-001 3442I-002 3442J-001 3442M-010 3442M-012 3442M-020 3442M-022 3442P-008 3442P-014 3442P-016 3442P-041 3442P-042 3442P-043 3442P-045 3442P-050 3442P-052 3442P-053 3442R-001 3442R-002 3442R-021 3442R-033 3442R-051 3442R-055 3442S-001 3442S-008 3442S-011 3442S-014 3442S-015 3442S-032 WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER DESCRIPTION (Y)5"CARRIAGE CABLE (Y)5"CABLE 5"TEMPERATURE CONTRO 5"COUPLING SHAFT 5"COUPLING TORQUE 5"HOLD DOWN CABLE 5"IMMERSION CIRCLATO (X)UPER COVER 5"ASSY ELEC CLUTCH C (X)CARRIAGE ASSY (X)DI FILTER (Y)5"CLUTCH HOUSHING (Y)5"HEATER ELEMENT (115V) 5"SVG 86 CARRIAGE HA 5"ENCODER HUB 5"CLUTCH HOUSING 5"6" INDEXER HARNESS 5"SPINDLE HARNES 5"SPINDLE PLATE HARN 5"INDEXER HARNESS(5" 5"CARRIAGE HARNESS(8 5"CARRIAGE HARNESS(8 (X)5"HARN.PUMP MAGNETIC PUMP 150 5"OVER-LAY CONTROL P 5"CON.PANEL O.PANEL O.KEY 5"OVERLAY.L 8132 5"CON.CNTL PNL 8 (X)5"AIR RING (X)RETAINING RING (Y)5"CABLE(INDEX) (X)REGULATOR.CNTL PNL 8 5"OVERLAY.PANEL O.R JAR (Y)5"MOTOR MOUNT 5"HIGH MOTOR 5"STEPPING MOTOR 5"NEW HIGH SPEED MOT (Y)5"LIMIT S/W . -12 VOLTS (X)BUSHING FLANGED (Y)5"SWITCH TEMPERTU (Y)5"SWITCH.L 8626 5"CON.

5/145X6MM (Y)STAGE CONTROL BAO (Y)STAGE CONTROL BOARD(MEMSP) (Y)STAGE VACUUM CONT (Y)STAGE VACUUM CONT (Y)FIBRE OPTIC INPUT FILTER 4A (Y)LAMP HOLDER (Y)LINER X/Y PCB (Y)LINER X/Y PCB LENS 85MM SAV1000 (Y)MOTOR (Y)MOTOR STEPPER MOTOR L163 STEPPER MOTOR A179 (C)OPTIC FIBRE AMPLI (Y)MOTOR STEPPER L16 (Y)TRACK BALL (Y)MIRROR TRACK BALL MOTOR TILT SERVO MOTOR X/Y PCB PCB LOCATION K-3-3-2 K-5-6-2 D-3-2-2 K-3-3-2 L-2-5-1 B-3-3-4 K-3-3-2 L-2-5-1 K-3-3-2 L-2-5-1 B-3-3-4 K-3-3-2 K-5-6-2 K-5-6-2 K-3-3-2 L-10-6-3 B-1-2-1 B-1-2-1 N-7-3-2 N-7-3-2 B-1-2-1 B-1-2-1 B-1-2-1 B-1-2-1 N-7-3-2 N-7-3-2 B-1-2-1 B-1-2-1 B-1-2-1 N-7-3-2 N-7-3-2 B-1-2-2 N-7-3-2 M-6-2-4 B-1-2-1 B-1-2-1 L-10-6-3 VENDOR PART NO 100-011 99-04014-02 99-80089-02 99-80089-01 219-009 219-007 103-6501 01-03325 02-01556 99-00771 01550 206-011. 213-015 206-011 213-042 213-020 114-024 213-049 AA8604-MH B/INDIFIV10 B/INDIFIV10 B/1STS2001L B/1STS2001S 184015-003 B/INDIFIV10 BB/NCALAMP1V0 BB/NCAPED1V0 BB/VACD1V1 FP-S5/02 B/1STS2201S 183150-061 73000500 73000500 B/INTMSIVO B/INTMSIVO 184420-001 184610-004 KODEC2 B/LINTOPIVO B/LINTOPIVO K085 A078 A179 184400-012 184400-020 184015-002 184400-013 178556 385055-003 184400-014 184400-009 184400-014 B/VAC3 수량 4 1 1 2 2 3 2 2 2 6 1 6 4 5 1 1 8 2 2 1 1 2 2 3 1 1 1 1 1 2 5 3 3 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 2 LOC VENDOR K34 J43 V32 V24 K34 K34 K42 K34 K34 W21 K34 K34 K42 K34 J43 K34 J43 K34 Q11 T13 T13 Q41 Q41 R63 T13 T13 T13 T13 T13 Q41 Q41 T13 T13 T13 T13 Q41 Q41 Q41 T13 T13 Q41 P55 P14 P14 P55 R63 P14 T13 Q41 P14 T13 T13 Q11 " " " " " " " " " " " " " " " " " " WED ORBISS WED ORBISS " WED ORBIS6 " " " " " " " " " " " " " " " WED ORBIS6 " " WED ORBIS7 " " " " " " " " " " " " .R 2N6501 (X)SUS TUBE (3/16") (X)HIGH PRESSURE TUBE 5"SPIN TUBE ASSY (81 C (Y)5"TUBE SUPPORT UP (X)NEEDLE VALVE 5"METERING VALVE (X)5"SAME P/N 3442V(Y)5"CUT OFF VALVE (Y)5"VALVE SPEED CON (Y)5"SOLENOID V/V(SP (Y)5"VALVE FLOW CONT (Y)8604 ARM ASS'Y (Y)PCB (Y)PCB (Y)OPTO BUILT FLE X 1 OPTO BUILT FLE X 1 (C)AMPLIFIER FIBRE O (Y)PCB BUILT (Y)PCB BUILT (Y)PCB BUILT (Y)PCB BUILT (Y)SERVO MOTOR BUILT OPTO SHORT (Y)BELT T2. DISTANT SEPARATOR (X)KIT. SEAL FLUID SECTION (C)5"T.No Item no 장비명 4500 4501 4502 4503 4504 4505 4506 4507 4508 4509 4510 4511 4512 4513 4514 4515 4516 4517 4518 4519 4520 4521 4522 4523 4524 4525 4526 4527 4528 4529 4530 4531 4532 4533 4534 4535 4536 4537 4538 4539 4540 4541 4542 4543 4544 4545 4546 4547 4548 4549 4550 4551 4552 3442S-033 3442S-035 3442S-038 3442S-043 3442S-053 3442S-056 3442T-002 3442T-034 3442T-035 3442T-041 3442U-001 3442V-004 3442V-006 3442V-012 3442V-021 3442V-028 3442V-032 3442V-035 3453A-002 3453B-004 3453B-004 3453B-011 3453B-012 3453B-018 3453B-025 3453B-028 3453B-029 3453B-033 3453B-037 3453B-038 3453B-040 3453C-001 3453C-002 3453C-003 3453C-003 3453F-002 3453F-041 3453L-004 3453L-005 3453L-005 3453L-007 3453M-001 3453M-003 3453M-005 3453M-008 3453M-010 3453M-011 3453M-012 3453M-013 3453M-014 3453M-015 3453P-004 3453P-007 WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER WAFER SCRUBBER INSPECTION INSPECTION INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION DESCRIPTION (Y)5"OPTICAL WAFER S (Y)5"HPOWAFER CARRIE (Y)5"DUAL INTERRUPTI (Y)5"SINGLE REFLECTI (X)SEAL.

HENE #05LHR111 (Y)STEPPER MOTOR(FOC (Y)HELIUM NEON LASER POWER SUP (Y)CASSETTE EMITTER (Y)SEAL SET FOR HP75 (Y)5"ASPIRATOR(A1-TF (X)5"MEMORY (Y)5"INPUT(AX41) (Y)5"INPUT(AX42) (Y)5"OUTPUT(AX13) (Y)5"OUTPUT(AY42) (Y)5"P.P(A7PU) (Y)5"TEMP. CONTROLLE (Y)5"TEMP. K-5-2-4 T55H-300 SUS L-3-1-2 L-5-3-2 K-5-6-1 L-6-5-1 L-6-5-1 K-5-6-1 L-5-1-4 KS-20-3S-122L MKCM30-4T7/MIN PCS-244 13H2181 수량 1 1 1 2 1 5 20 20 1 1 2 2 2 1 6 1 1 1 1 3 2 7 4 10 1 1 1 2 2 2 1 1 1 1 1 1 1 2 5 3 35 5 5 2 2 2 10 3 2 2 1 4 1 LOC VENDOR T13 T13 T13 T13 T13 Q41 Q41 Q41 Q41 Q41 Q41 T13 Q41 Q41 R63 Q41 Q41 Q41 T12 Q41 J43 T33 T33 T33 Q12 P23 Q11 T33 K35 K35 J25 J45 J45 J45 J45 J44 J44 J44 J25 K35 K35 K35 K35 P14 J25. CONTROLLE (Y)5"QUARTZ HEATER (Y)5"SPONGE WITH OUT (Y)5"INDICATOR(AL6H(Y)5"INDICATOR(AL6H(Y)5"SPEED CONTROL M (Y)5"RELAY(3810) (Y)5"SENSOR FOR OVER (Y)5"V-RING SEAL(V-1 (Y)5"LEVEL SWITCH (Y)5"WATER SIGNAL CO (Y)5"AIR VALVE(AV-72 (Y)5"AIR VALVE(AV-7260-414) (Y)5"SOLENOID VALVE (X) OPTIC ASSEMBLY LOCATION B-1-2-1 B-1-2-1 B-1-2-1 N-7-3-2 N-7-3-2 N-7-3-2 N-7-3-2 N-7-3-2 B-1-2-2 B-1-2-1 N-7-3-2 N-7-3-2 N-4-4-1 N-7-3-2 N-7-3-2 N-7-3-2 C-3-3 N-7-3-2 K-4-4-3 D-1-2-2 D-1-2-2 D-1-2-2 G-1-7 L-10-6-3 D-1-2-2 L-3-4-2 L-3-1-2 L-5-3-2 K-5-2-4 K-5-4-1 K-5-4-1 K-5-4-1 L-6-5-1 L-6-5-1 L-5-3-2 L-6-1-4 L-3-1-2 L-3-1-2 L-3-1-2 L-3-1-2 VENDOR PART NO B/ORI1C 73000200 73000200 184075-001 184465-008 183450-016 183400-002 332-660 VZ110-5MM-M5 VZ110-5MM-M5 184455-003 184310-055 184515-004 184515-004 184515-005 183050-001 183050-001 184615-001 73015 183880-102 2403153 6201010 137264 184310-055 3001005 2401208 3001006 14F502 HP75SS A3MCA-2 CN-602-PX SR10-21P-00011 HR05-151/4 CF 51K40RA-A2 L-5-3-2. CONTROLLE (Y)5"TEMP.No Item no 장비명 4553 4554 4555 4556 4557 4558 4559 4560 4561 4562 4563 4564 4565 4566 4567 4568 4569 4570 4571 4572 4573 4574 4575 4576 4577 4578 4579 4580 4581 4582 4583 4584 4585 4586 4587 4588 4589 4590 4591 4592 4593 4594 4595 4596 4597 4598 4599 4600 4601 4602 4603 4604 4605 3453P-008 3453P-011 3453P-011 3453P-012 3453P-013 3453P-014 3453R-002 3453S-008 3453S-009 3453S-009 3453S-011 3453S-031 3453S-041 3453S-041 3453S-042 3453S-061 3453S-061 3453T-001 3453T-002 3453V-001 3461A-011 3461F-041 3461I-002 3461I-003 3461L-013 3461M-014 3461P-001 3461S-043 3461S-065 3472A-001 3472B-001 3472B-002 3472B-003 3472B-004 3472B-005 3472B-006 3472C-002 3472C-003 3472C-004 3472H-001 3472H-053 3472I-001 3472I-003 3472M-001 3472R-007 3472S-003 3472S-032 3472S-051 3472S-101 3472V-001 3472V-002 3472V-005 3473A-001 AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION AUIO INSPECTION LASER MARKING LASER MARKING LASER MARKING LASER MARKING LASER MARKING LASER MARKING LASER MARKING LASER MARKING LASER MARKING RETICLE CLEANER RETICLE CLEANER RETICLE CLEANER RETICLE CLEANER RETICLE CLEANER RETICLE CLEANER RETICLE CLEANER RETICLE CLEANER RETICLE CLEANER RETICLE CLEANER RETICLE CLEANER RETICLE CLEANER RETICLE CLEANER RETICLE CLEANER RETICLE CLEANER RETICLE CLEANER RETICLE CLEANER RETICLE CLEANER RETICLE CLEANER RETICLE CLEANER RETICLE CLEANER RETICLE CLEANER RETICLE CLEANER MASK CLEANER DESCRIPTION PCB BUILT (Y)STAGER POWER SUPP (Y)STAGER POWER SUPP POWER OFF BREAK (Y)PSU CCTV 115VAC 9 PULLEY (Y)RING 0 200-005-44 (Y)YELLOW SWITCH LEN (X)SOLENOLD VALVE (X)SOLENOLD VALVE (Y)PSU 24V SWITCH MO PHOTO DIODE SENSOR SENSOR-POLARISING FI SENSOR-POLARISING FI SENSOR-THROUGH BEAM (Y)BALL SCREW(SKF) (Y)BALL SCREW(SKF) TRACK BALL TRANSFORMER (Y)VF COUPLING (Y)AMMETER EMK1 (Y)FUSE KIT (Y)IC INTEL 2764 200 (X)IC H2181 LASER.J45 J25 K35 J25 J42 J44 J44 J43 K35 " " " " " " " " " " " " " " " " " " " " LIS " " LIS LIS " LIS " " WATANABE " " " " " " " " " " " " " " " " " " " " WATANABE " SSEC .

수량 2 1 1 1 1 1 4 2 2 1 4 1 1 2 1 1 1 1 1 2 1 1 4 1 1 1 1 1 2 1 1 3 1 2 2 2 2 3 2 2 2 3 1 2 1 2 1 1 1 2 2 20 1 LOC VENDOR K35 Q43 T33 T54 T54 T33 K35 K35 K35 K35 K35 K35 J25 K34 J45 K35 K35 K35 K35 K15 K15 K15 V31 K15 V31 V31 K15 K15 K15 K15 K15 K15 K15 Q12 T61 J53 T61 J12 P54 J74 J74 T54 R53 J15 C72 V35 V35 V35 V35 R21 V35 B16 V35 " " " " " " " " " " " " " " " " " " " " " " USHIO " " " " " " " " " " U.RECTANGU 4405D-001 WAFER STEPPER (Y)BOARD FOCUS DRIVE 4405F-001 WAFER STEPPER (Y)RETICLE FINGER AS 4405M-004 WAFER STEPPER (Y)WTC DRIVE MOTOR A 4405O-010 WAFER STEPPER (Y)O-RING.2-007 4405O-011 WAFER STEPPER (Y)O-RING.No 4606 4607 4608 4609 4610 4611 4612 4613 4614 4615 4616 4617 4618 4619 4620 4621 4622 4623 4624 4625 4626 4627 4628 4629 4630 4631 4632 4633 4634 4635 4636 4637 4638 4639 4640 4641 4642 4643 4644 4645 4646 4647 4648 4649 4650 4651 4652 4653 4654 4655 4656 4657 4658 Item no 장비명 DESCRIPTION 3473A-002 MASK CLEANER (X) SPRAY NOZZLE ASSEMBLY 3473A-003 MASK CLEANER (X) ASS'Y CHECK PIN 6" 3473B-001 MASK CLEANER (X) DRIVER BOARD 3473B-002 MASK CLEANER (X) SPIN MOTOR BOARD 3473B-003 MASK CLEANER (X) POWER SUPPLY BOARD 3473B-004 MASK CLEANER (X) POWER SUPPLY BOARD(SECONDA 3473B-011 MASK CLEANER (X) BURSH KIT FOR SPIN MOTOR 3473B-021 MASK CLEANER (X) NYLON BUSHING 3473B-031 MASK CLEANER (X) BRUSH 3473C-001 MASK CLEANER (X) SPLIT CLAMP 3473D-001 MASK CLEANER (X) SPIN MOTOR POWER SUPPLY DI 3473D-011 MASK CLEANER (X) VACUUM DETECTOR 3473G-001 MASK CLEANER (X) PRESSURE GAUGE 3473P-001 MASK CLEANER (X) SUCKBACK PUMP DIAPH 3473P-002 MASK CLEANER (X) SIPHON PUMPDIAPHRAGM KIT 3473R-001 MASK CLEANER (X) SOLID STATE RELAY 3473R-011 MASK CLEANER (X) PRESSURE REGULATOR 3473S-001 MASK CLEANER (X) TEFLON SHAFT VACUUM SEAL 3473V-001 MASK CLEANER (X) HPC AIR SOLENOID VALVE 3473V-002 MASK CLEANER (X) VACUUM SOLENOID VALVESPETE 3475B-003 MASK CLEANER (Y)MAIN MEMORY CARD 3475B-004 MASK CLEANER (Y)MAIN-PTO-CARD 3475B-005 PERIPHERAL EXPOSURE 3475B-006 PERIPHERAL EXPOSURE (Y)SUB-PIO CARD 3475B-007 PERIPHERAL EXPOSURE 3475B-008 PERIPHERAL EXPOSURE 3475B-009 PERIPHERAL EXPOSURE (Y)POWER CONTROL CAR 3475B-010 PERIPHERAL EXPOSURE (Y)GRAPHIC DISPLAY C 3475B-011 PERIPHERAL EXPOSURE (Y)SPINDLE CONTROL C 3475B-012 PERIPHERAL EXPOSURE (Y)DEVICE NUMBER SIN 3475B-014 PERIPHERAL EXPOSURE (Y)ERROR DISPLAY CAR 3475B-017 PERIPHERAL EXPOSURE (Y)SPEED CONTROL CAR 3475M-007 PERIPHERAL EXPOSURE (Y)MOTOR 3490H-001 PERIPHERAL EXPOSURE HCT 4405B-001 WAFER STEPPER (Y)STEPPER MOTOR DRI 4405C-001 WAFER STEPPER (Y)CYLINDER.T " " " " " " " " " KOYO " " " " " " KOYO " . HNSU2482A0101 HMSU2480A01 E5EX BEMT-103-7555-51 MS 15mm OD HMSU2721A01.2-003 4405S-001 WAFER STEPPER (Y)SWITCH MICRO 4405S-002 WAFER STEPPER (Y)SWITCH VACUUM 4405V-002 WAFER STEPPER (Y)REGULATOR R/T STA 4421B-004 CURING FURNACE (Y)POWER BOARD 4421B-005 CURING FURNACE (Y)DI/DO-1 BOARD 4421B-017 CURING FURNACE (Y)CPU BOARD 4421B-018 CURING FURNACE (Y)CAO HEATER POWER 4421B-019 CURING FURNACE (Y)PAI TEMP CONTROL 4421C-002 CURING FURNACE (Y)TEMP CONTROLLER 4421M-008 CURING FURNACE MOTOR PULSE 4421N-001 CURING FURNACE (Y)ROLET NUT 4421P-005 CURING FURNACE (Y)SAME P/N 4421B-00 LOCATION L-5-1-4 L-1-2 J-4-1-1 D-2-1-1 D-2-1-1 J-4-1-1 L-5-1-4 L-5-1-4 K-3-2-4 L-5-1-4 K-4-3-1 L-5-1-4 L-5-3-2 L-2-5-1 L-5-1-4 L-5-1-4 L-5-1-4 L-5-1-4 L-4-4-4 J-4-3-1 J-4-3-1 N-4-3-1 J-4-3-1 N-4-3-1 N-4-3-1 J-4-3-1 J-4-3-1 J-4-3-1 J-4-3-1 J-4-3-1 J-4-3-1 J-4-3-1 G-2-1 B-3-3-2 K-3-2-4 N-4-5-2 L-6-1-3 D-2-1-1 G-2-5-1 L-6-1-2 L-5-2-1 N-4-4-3 N-4-4-3 N-4-4-3 N-4-4-3 H-1-2 N-1-3-2 N-4-4-3 VENDOR PART NO 44901545A 356120007 3560004E1 1000110B1 3560007A1 040436016 052346300 56001007A 056013000 00136800M 063214215 066156203 12701015A 12801008A 01302180C 061611000 44901271A 060722018 060310324 USB-M86 USB-P72 1000170A1 USB-PA48 USB-PCT USB-GDC USB-SPC DEV-01 DSP-12 SP-CONT-2 RA3BA112S384-D5 0490003251 03-20-00933-02 10-20-03669 03-20-01989 01-20-02645 01-20-03651 52-20-02761 52-20-02762 5107-000001 61-20-03563 57-15-02790 HMSU2721A01 HMSU2601A07 HMSU2478A01.

No 4659 4660 4661 4662 4663 4664 4665 4666 4667 4668 4669 4670 4671 4672 4673 4674 4675 4676 4677 4678 4679 4680 4681 4682 4683 4684 4685 4686 4687 4688 4689 4690 4691 4692 4693 4694 4695 4696 4697 4698 4699 4700 4701 4702 4703 4704 4705 4706 4707 4708 4709 4710 4711 Item no 장비명 DESCRIPTION 4421R-004 CURING FURNACE (L)TEFLON RING 4421R-011 CURING FURNACE SUPER RING (BOTTOM) 4421R-012 CURING FURNACE (Y)SUPER RING 4421R-013 CURING FURNACE (Y)SUPER RING 4421S-004 CURING FURNACE (Y)PRESSURE SWITCH 4421S-009 CURING FURNACE (Y)SCR(BOTTOM) 4421S-010 CURING FURNACE (Y)SCR(CENTER) 4421S-011 CURING FURNACE (Y)SCR(TOP) 4421S-014 CURING FURNACE (Y)SPRING 4421S-015 CURING FURNACE (Y)SPRING 4421S-016 CURING FURNACE (Y)STAINLESS SPRING 4421S-017 CURING FURNACE (Y)SWITCH 4421S-018 CURING FURNACE (Y)SWITCH GUARD 4421S-019 CURING FURNACE (Y)SWITCH 4421V-006 CURING FURNACE (Y)SOLENOID VALVE 4431C-001 POLIMIDE STRIPPER (Y)CAM ROTOR SHAFT 2400 4431C-002 POLIMIDE STRIPPER (Y)CAM ROTOR SHAFT 4431F-002 POLIMIDE STRIPPER (Y)FUSE 1.GAS CAST 4431R-003 POLIMIDE STRIPPER (Y)REGULATOR.GAS SS 4431S-001 POLIMIDE STRIPPER (Y)SWITCH PRESS ADJ SS 4431S-003 POLIMIDE STRIPPER (Y)SWITCH PHEU W/ROLLER ARM 4431S-005 POLIMIDE STRIPPER (Y)SWITCH 1PL MOM RND PML MNT 4431S-006 POLIMIDE STRIPPER (Y)SWITCH KEYLCX FPDT 4431S-007 POLIMIDE STRIPPER (Y)SWITCH P5HBTH DPDT LGTD SO 4431S-031 POLIMIDE STRIPPER (Y)SEAL NOZZLE TFE 4451B-002 NANO PATTERNING SYS' BELT RECIRE FAN-A45 4451C-001 NANO PATTERNING SYS' CUP ASSY 4451C-002 NANO PATTERNING SYS' CUP WAFER LIFTER 4451C-003 NANO PATTERNING SYS' CIRCUIT BR.5A SLW BLW 3AG 4431F-004 POLIMIDE STRIPPER (Y)FUSE 4A SLW BLW 3AG 4431I-001 POLIMIDE STRIPPER (Y)USER INTERFACE EMERALD SBC 4431R-001 POLIMIDE STRIPPER (Y)RSP 280/309 SLOW ACT 4431R-002 POLIMIDE STRIPPER (Y)REGULATOR.5A SLW BLW 3AG 4431F-003 POLIMIDE STRIPPER (Y)FUSE 0.3" PITCH 3512B-027 WAFER PROBER SYSTEM MEMORY OR CON 3516B-002 WAFER PROBER 3516B-003 WAFER PROBER 3516B-003 WAFER PROBER 3516B-005 WAFER PROBER 3516B-005 WAFER PROBER 3516B-007 WAFER PROBER 3516B-008 WAFER PROBER 3516B-010 WAFER PROBER 3516B-011 WAFER PROBER 3516B-012 WAFER PROBER 3516B-013 WAFER PROBER 3516C-002 WAFER PROBER 3516C-004 WAFER PROBER 3516C-005 WAFER PROBER 3516C-006 WAFER PROBER 3516C-008 WAFER PROBER LOCATION L-6-4-1 L-6-4-1 L-2-4-2 L-2-4-2 K-4-5-2 B-2-3 K-4-5-2 K-4-5-2 L-5-3-3 L-10-7-3 N-1-3-2 L-10-7-3 L-10-6-3 L-10-6-3 L-10-7-3 L-10-7-3 L-10-7-3 L-10-7-3 L-10-7-3 L-10-7-3 L-10-7-3 L-10-7-3 N-1-2-3 L-10-6-2 N-1-2-3 L-10-6-2 N-1-2-3 J-4-2-1 J-4-2-2 J-4-2-2 D-1-2-3 D-1-2-3 J-4-2-2 J-4-2-3 M-3-4 M-3-4 J-4-2-2 J-4-2-2 J-2-3-2 D-1-2-3 D-1-2-3 G-2-3-2 G-2-6-1 VENDOR PART NO JS-36-1729 JS26-378-483 JS-35-441A-001 JS-35-441A-002 MS61L VSCZ-60-N(PK40FVSCZ-100-N(TM90D VSCZ-30-N AUS8-30 SASPO 4-20 SA 065-04 A3BJ-90D1-24EW A3BJ-5050 JS-42-04308 B7P5136-MID 17219-03 17357-01 73165-31 73165-35 73165-51 73300-11 17143-501 70905 70905-01 61518-01 70913 73029 73093-01 43152 18311-01 682-0033-702 879-0089-001 859-2861-001 6810057921 859-2859-001 682-0033-701 247483-001 수량 2 2 4 4 2 1 1 1 4 4 4 3 3 3 1 1 1 5 5 5 1 1 1 1 1 1 1 1 1 16 1 1 1 1 3 1 1 2 2 1 3 2 1 1 1 2 1 1 1 1 1 1 1 LOC VENDOR B41 A102 D62 D62 C15 C73 C73 C15 A103 A103 A102 R21 A102 A102 D14 Q11 B16 Q11 Q11 Q11 Q42 Q11 Q11 Q11 Q11 Q11 Q11 Q11 Q11 B25 B63 Q15 B53 Q15 B53 B63 V34 T15 T32 T15 T21 T32 T15 T15 T15 T15 T32 T15 T32 T15 T15 T33 T32 " " " " " " " " " " " " " " " SEMITOOL SEMITOOL SEMITOOL SEMITOOL SEMITOOL SEMITOOL SEMITOOL SEMITOOL SEMITOOL SEMITOOL SEMITOOL SEMITOOL SEMITOOL SEMITOOL SEMITOOL SVGL " " " " " EG ANDO " " " " " " " " " " " " " " " . 45. 40A-PLUG 4451S-001 NANO PATTERNING SYS' SEAL WAFER CHUCK 4451V-001 NANO PATTERNING SYS' V-BELT.

V PANEL PCB B/D 3651B-005 EVAPORATOR (X)POTS LAT SWOEP CONTROL PCB 3651B-006 EVAPORATOR (X)POWER PANEL PCB B/D 3651B-007 EVAPORATOR (X)POTS LONG SWEEP CONTROL PCB 3651B-008 EVAPORATOR (X)LAT SWEEP CONTROL PCB B/D 3651B-009 EVAPORATOR (X)GUN CONTROL PCB B/D 3651B-010 EVAPORATOR (X)CONG CONTROL CAREL PCB B/D 3651B-031E-BEAM EVAPORATOR(C)DOME BEARING 3651B-032E-BEAM EVAPORATOR(X)NEEDLE BEARING OFFSET DRIVE 3651B-033E-BEAM EVAPORATOR(X)INNER RACE BEARING OFFSET 3651B-034E-BEAM EVAPORATOR(X)BEARING(VBDD-1062-1500-281 3651B-061E-BEAM EVAPORATOR(X)SINGLE PHASE AIROUIT BREAKE 3651B-062E-BEAM EVAPORATOR(X)PRINTED AIROUIT BOARD 3651B-063E-BEAM EVAPORATOR(X)CIRCUIT BREAKER.No 4712 4713 4714 4715 4716 4717 4718 4719 4720 4721 4722 4723 4724 4725 4726 4727 4728 4729 4730 4731 4732 4733 4734 4735 4736 4737 4738 4739 4740 4741 4742 4743 4744 4745 4746 4747 4748 4749 4750 4751 4752 4753 4754 4755 4756 4757 4758 4759 4760 4761 4762 4763 4764 Item no 장비명 DESCRIPTION 3516C-011 WAFER PROBER 3516C-012 WAFER PROBER 3516C-013 WAFER PROBER 3516N-001 WAFER PROBER 3516P-001 WAFER PROBER 3516P-002 WAFER PROBER 3516P-003 WAFER PROBER 3516P-003 WAFER PROBER 3516P-004 WAFER PROBER 3516P-005 WAFER PROBER 3516P-006 WAFER PROBER 3516P-007 WAFER PROBER 3516P-008 WAFER PROBER 3516P-009 WAFER PROBER 3516P-010 WAFER PROBER 3516P-011 WAFER PROBER 3516P-012 WAFER PROBER 3520R-001 WAFER PROBER (Y)AIR BACK 3651B-001 EVAPORATOR (X)REGULATOR PCB B/D 3651B-002 EVAPORATOR (X)POTS GUN CONTROL PCB B/D 3651B-003 EVAPORATOR (X)POTS HV CONTROL PCB B/D 3651B-004 EVAPORATOR (X)H.64MP 3651C-001E-BEAM EVAPORATOR(X)CLUTCH ASSEMBLY OFFSET DRIV 3651C-012E-BEAM EVAPORATOR(X)10K E-BEAM POWER 3651C-013E-BEAM EVAPORATOR(X)GP-260 CONTROLLER & CABLE 3651D-001E-BEAM EVAPORATOR(X)BRIDGE DIODE 3651D-002E-BEAM EVAPORATOR(X)BRIDGE DIODE 3651D-003E-BEAM EVAPORATOR(X)DIODE 3651D-004E-BEAM EVAPORATOR(X)DIODE 3651D-005E-BEAM EVAPORATOR(X)DIODE 3651D-005E-BEAM EVAPORATOR(X)DIODE 3651D-006E-BEAM EVAPORATOR(X)DIODE 3651D-007E-BEAM EVAPORATOR(X)DIODE 3651D-008E-BEAM EVAPORATOR(X)DIODE 3651D-009E-BEAM EVAPORATOR(X)DIODE 3651D-011E-BEAM EVAPORATOR(X)DIODE 3651D-012E-BEAM EVAPORATOR(X)DIODE 3651D-013E-BEAM EVAPORATOR(X)DIODE 3651D-014E-BEAM EVAPORATOR(X)DIODE 3651D-021E-BEAM EVAPORATOR(X)DETENT KIT(TEFLON WASHER SC LOCATION VENDOR PART NO D-1-2-3 M-6-1-2 J-4-3-4 H-5-3 L-12-7 L-12-6 L-12-6 L-12-5 L-12-7 L-12-5 L-12-5 L-12-5 D-2-5-2 L-12-5 B-1-4-1 C-4-4-3 C-4-4-3 C-4-4-3 C-4-4-3 C-4-4-3 C-4-4-3 C-4-4-3 E-2-4 L-7-1 B-1-2-1 C-4-4-3 C-4-4-3 C-4-4-3 C-4-4-3 C-4-4-3 148-005 10-7 OF 59 10-1 OF 59 10-2 OF 59 10-3 OF 59 10-4 OF 59 10-5 OF 59 10-6 OF 59 10-8 OF 59 10-9 OF 59 VB-DD-375-875-2 B-98 IR-68 UPL11166F203 10-10 OF 59 45-700-IGI-SIO11337 SR-10-11 GP-260 SN2-5K 250JB10L 1N 2979B BR 810D 10D10 1N 4749 1N 4749 1N 2974 16R1A40 1N 2972 1N 750A 1N 3322 1N 4740 1N 5341 수량 1 1 1 1 1 1 1 1 2 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 12 2 1 1 2 1 8 2 1 1 2 1 1 2 2 1 1 1 2 1 1 1 1 1 16 LOC VENDOR T32 T32 T32 T33 T22 T23 T23 T23 T23 T23 T23 T23 T14 T23 T23 T14 T23 T13 T12 T12 T12 T12 T12 T12 T12 T12 T12 T12 Q42 Q42 Q42 Q42 Q42 T12 Q42 Q42 W22 Q46 T12 T13 Q42 T12 T12 T12 T12 Q42 Q42 T12 T12 Q42 T12 T12 Q42 " " " " ANDO " " " " " " " " " " " " XRL .

No
4765
4766
4767
4768
4769
4770
4771
4772
4773
4774
4775
4776
4777
4778
4779
4780
4781
4782
4783
4784
4785
4786
4787
4788
4789
4790
4791
4792
4793
4794
4795
4796
4797
4798
4799
4800
4801
4802
4803
4804
4805
4806
4807
4808
4809
4810
4811
4812
4813
4814
4815
4816
4817

Item no

장비명

DESCRIPTION

3651F-031E-BEAM EVAPORATOR(X)EB GUN FILAMENTS
3651H-001E-BEAM EVAPORATOR(X)FUSE HOIDER
3651I-001 E-BEAM EVAPORATOR(X)IC8936
3651L-001E-BEAM EVAPORATOR(X)LAMP (125V.1/3W.RED)
3651L-002E-BEAM EVAPORATOR(X)LAMP (125V.1/3W.WHITE)
3651M-001E-BEAM EVAPORATOR(X)METER ASSEMBLY
3651O-005E-BEAM EVAPORATOR(X)O-RING
3651O-010E-BEAM EVAPORATOR(X)O-RING
3651O-025E-BEAM EVAPORATOR(X)COMPLETE O-RING KIT
3651P-001E-BEAM EVAPORATOR(X)MALE CONNECTOR PIN
3651P-002E-BEAM EVAPORATOR(X)FEMALE CONNECTOR PIN
3651P-004E-BEAM EVAPORATOR(X)8-PIN FEEDTHROUGH
3651P-011E-BEAM EVAPORATOR(X)10K E-BEAM POWER SUPPLY WIR
3651R-003E-BEAM EVAPORATOR(X)SOILD STATE RELAY
3651R-007E-BEAM EVAPORATOR(X)RELAY AUTO TECH
3651R-021E-BEAM EVAPORATOR(X)RESISTOR (10M)
3651R-022E-BEAM EVAPORATOR(X)CURRENT LIMIT RESISTOR
3651R-023E-BEAM EVAPORATOR(X)RESISTOR
3651R-031E-BEAM EVAPORATOR(X)WALL RECEPTACLE
3651S-002E-BEAM EVAPORATOR(X)MICRO SWITCH
3651S-003E-BEAM EVAPORATOR(X)SWITCH (5A)
3651S-004E-BEAM EVAPORATOR(X)SWITCH (10A)
3651S-005E-BEAM EVAPORATOR(X)SWITCH (15A)
3651S-007E-BEAM EVAPORATOR(X)PRESSURE SWITCH
3651S-008E-BEAM EVAPORATOR(X)VACUUM SENSOR TUBE
3651S-031E-BEAM EVAPORATOR(X)LN2 SENSOR SET
3651S-061E-BEAM EVAPORATOR(X)FUSE & JAK,FOR EB SOURCE
3651S-062E-BEAM EVAPORATOR(X)ION GAUGE SPARD PARTS KIT
3651S-063E-BEAM EVAPORATOR(X)LENCH & BOLT SET FOR EB SOU
3651S-064E-BEAM EVAPORATOR(Y)O-RING KIT FOR EB SOURCE
3651S-065E-BEAM EVAPORATOR(X)PLATE FOR EB SOURCE
3651S-066E-BEAM EVAPORATOR(X)CERAMIC INSULATOR & SPRING
3651S-067E-BEAM EVAPORATOR(X)JAK FOR EB SOURCE
3651S-068E-BEAM EVAPORATOR(X)CABLE CONNECTOR FOR EB SOU
3651S-069E-BEAM EVAPORATOR(X)CABLE FEMALE CONNECTOR FOR
3651S-070E-BEAM EVAPORATOR(X)SAFTY LINE & GROUND C
3651S-072E-BEAM EVAPORATOR(X)SPARE EB DEPOSITION SHIELD
3651S-073E-BEAM EVAPORATOR(X)QUICK CHANGE GUN TURRET & C
3651S-074E-BEAM EVAPORATOR(X)ELECTRON BEAM GUN SOURCE SH
3651S-101E-BEAM EVAPORATOR(X)DETENT SCREWS,DHA EB GUN
3651S-102E-BEAM EVAPORATOR(Y)NYLON SCREWS EB GUN
3651T-001E-BEAM EVAPORATOR(X)TRANSFORMER
3651T-002E-BEAM EVAPORATOR(X)10K E-BEAM POWER SUPPLY TRA
3651T-023E-BEAM EVAPORATOR(X)TRANSISTOR
3651T-029E-BEAM EVAPORATOR(X)TRANSISTOR
3651T-054E-BEAM EVAPORATOR(X)SPARE TRIODE TUBE
3651V-001E-BEAM EVAPORATOR(X)CHAMBER VENT VALVE
3651V-011E-BEAM EVAPORATOR(X)VENT LINE MAINFOLD
3653A-001E-BEAM EVAPORATOR(X)ADAPTER LG26 (DEEP UV)
3653B-011E-BEAM EVAPORATOR(X)PUSH BUTTON WITH LED
3653C-001
MASK ALINER
(X)CABLE NEGATIVE
3653F-001
MASK ALINER
(X)MEDIUM BLOW FUSE 2.5A
3653F-002
MASK ALINER
(X)SLOW BLOW FUSE 6.3A

LOCATION
C-4-4-3
C-4-4-3

VENDOR PART NO

C-1-3
C-4-4-3
C-4-4-3
C-4-4-3

5PER BOX
5PER BOX
1N 5340
342012
972-970A-02-WRN
SQ-10A
6230-20-0105
6230-45-0210
5-V-6
745229-7
745230-7
FT58-008

C-4-4-3
N-7-5-2
N-7-5-2
N-7-5-2
N-7-5-2
N-7-5-2

8525-0390
DO 4A
MAR-115-1Y-20
ROX-6
825F-IRO
5262
BE-2RD-A2
45-700-IGI-SIOD
45-700-IGI SIOD
45-700 IGI SIOD
J40-218

J-2-2-2

N-7-5-2
C-4-4-3
N-7-5-2
N-7-5-2

S-1

C-4-4-3
C-4-4-3
N-7-5-2
M-6-3-1
N-7-5-2
N-7-2-3
N-7-3-4
N-7-3-4
N-7-5-2
C-4-4-3
L-2-1

H-5-3
N-7-5-2
C-4-4-3
N-2-1-1
N-2-1-1
B-4-4-3
B-4-4-3

L50J250K
STT-105
40373
3CX-10000-AT

301-031-93
610-105-96
260-010-55
610-044-05
610-044-99

수량
20
1
1
1
2
1
1
2
2
5
5
2
1
1
1
1
2
2
6
1
2
1
1
1
9
2
2
1
2
1
2
1
4
2
2
2
3
2
2
4
4
1
1
2
1
1
2
2
1
2
2
7
7

LOC
Q42
Q42
T12
Q42
Q42
T12
Q42
Q42
Q51
Q42
Q42
Q42
Q64
T12
T12
T12
T12
T12
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q51
Q42
Q42
Q42
Q42
Q42
T12
Q51
T12
T12
X23
Q42
Q42
Q53
Q53
Q11
Q53
Q11

VENDOR

No

Item no

장비명

DESCRIPTION

4818 3653F-003
MASK ALINER
(X)SLOW BLOW FUSE 8.0A
4819 3653F-004
MASK ALINER
(X)SLOW BLOW FUSE 0.5A
4820 3653G-001
MASK ALINER
(X)GEAR DRIVE
4821 3653G-011
MASK ALINER
(X)SUSS GREASE 410
4822 3653L-001
MASK ALINER
(X)LAMP CABLE (CD-XE LAMP)
4823 3653L-002
MASK ALINER
(X)350W/S HG-LAMP/LM350
4824 3653L-004
MASK ALINER
(X)NUT FOR HBO LAMP
4825 3653L-006
MASK ALINER
(X)PANEL LAMP 24V 50MA
4826 3653L-007
MASK ALINER
(X)LAMP 24V (PUSH BUTTON)
4827 3653S-011
MASK ALINER
(X)SWITCH BLACK STEP1
4828 3653S-012
MASK ALINER
(X)SWITCH BLACK STEP2
4829 3654C-001
RAPID THERMAL PROCESSOR
(X)SILICONE HEATSINK COMPOUND
4830 3654C-002
RAPID THERMAL PROCESSOR
(X)CONL,AUXILIARY N/O
4831 3654L-001
RAPID THERMAL PROCESSOR
(X)LAMPHOLDER TUNG-HALOGEN 10A
4832 3654L-002
RAPID THERMAL PROCESSOR
(X)LAMP TUNGSTEN-HALOGEN
4833 3654R-001
RAPID THERMAL PROCESSOR
(X)RELAY,DPDT,24VAC
4834 3654S-001
RAPID THERMAL PROCESSOR
(X)REPLACEMENT KIT,FLOW SW
4835 3654S-002
RAPID
(X)SWITCH SPDT INTERLOCK 5A
4836 3654T-002
RAPID
(X)THERMOSTAT OPEN=150F,CLOS=1
4837 3655C-001TOXIC GAS SCRUBBER(X)CONTROL THERMO COUPLE
4838 3655C-002TOXIC GAS SCRUBBER(X)FLAME CHECK CANISTER
4839 3655G-001TOXIC GAS SCRUBBER(X)FLANGE GASKET
4840 3655G-002TOXIC GAS SCRUBBER(X)INCONEL FLANGE GASKET
4841 3655H-001TOXIC GAS SCRUBBER(X)HEATER POWER FEED TROUGH
4842 3655P-001
SCRUBBER
(X)PRIMARY UMBRELLA JET (JET:2
4843 3655S-001
SCRUBBER
(X)EXHAUST SECTION TEMP.SENSOR
4844 3655S-002
SCRUBBER
(X)LIQUID LEVEL SENSOR
4845 3656L-001 WAFER SCRUBBER (X)LAMP,6V12W
4846 3656P-001 WAFER SCRUBBER (X)VACUUM LINE PIPING
4847 3656S-001
SCRUBBER
(X)VACUUM SWITCH
4848 3656T-001
SCRUBBER
(X)WAFER TABLE
4849 3657A-001
ALPHA STEP
4850 3657A-002
ALPHA STEP
4851 3657L-001
ALPHA STEP
4852 3658C-001 LD CHIP TESTER (X)CABLE
4853 3658C-002
BAR TESTER
(X)CONNECTOR KIT
4854 3660A-001
LAPPING & POLISHING M/C
(X)0.45KG B-ALUMINIUM OXIDE
4855 3660B-001
LAPPING & POLISHING M/C
(X)DRIVE BELT
4856 3660B-002
LAPPING & POLISHING M/C
(X)REFILLABLE AEROSOL BOTTLE
4857 3660D-002
LAPPING & POLISHING M/C
(X)LIQUID DIAMOND 500ML
4858 3660F-001
LAPPING & POLISHING M/C
(X)65MM DIA GLASS FACING
4859 3660P-002
LAPPING & POLISHING M/C
(X)SPECIMEN MOUNTING PLATE
4860 3660P-004
LAPPING & POLISHING M/C
(X)491004 ELECTRONIC PROBE
4861 3660P-005
LAPPING & POLISHING M/C
(X)POLISHING PLATE
4862 3660P-006
LAPPING & POLISHING M/C
(X)DIAMETER LAPPING POLISHING
4863 3660P-007
LAPPING & POLISHING M/C
(X)PRESSURE PLATE
4864 3660S-002
LAPPING & POLISHING M/C
(X)ON/OFF SWITCH
4865 3660S-003
LAPPING & POLISHING M/C
(X)ETCHANTS AND SLURRIAS
4866 3660W-001
LAPPING & POLISHING M/C
(X)0.25KG LOW TEMP. WAX
4867 3660W-002
LAPPING & POLISHING M/C
(X)4CC GLYCOLPHTHALATE WAX
4868 3901B-021
C-V PLOTTER
(Y)5"SET OF BELT
4869 3901M-003
C-V PLOTTER
(Y)5"MICROPOSITIONER
4870 3901M-004
C-V PLOTTER
(Y)5"BASE MANIPULATO

LOCATION
N-2-1-1
B-4-4-3
N-2-1-1
N-2-1-1
N-2-1-1
N-2-1-1

N-2-1-1
N-2-1-1
B-4-4-3
B-4-4-3
B-4-4-3
B-4-4-3
B-4-4-3
N-2-1-1
N-2-1-1
B-4-4-3
B-4-4-3
B-4-4-3
B-4-4-3
N-2-1-1
B-4-4-3
B-4-4-3

VENDOR PART NO
610-088-85
610-089-76
610-044-05
625-000-15
260-026-20
260-068-47
300-213-40
610-057-03
610-068-07
610-024-37
610-024-61
1612-0040
4501-0040
2109-0080
2451-0010-02
4502-0011-01
0641-0133-01
5107-0020
5300-0091-01
800-132
800-214
855-063
855-063F
857-010
857-1UJ
800-004
857-220

B-4-4-3
N-2-1-1
B-4-4-3
B-4-4-3
B-1-3-4
B-4-4-3
B-4-4-3
N-2-1-1
N-7-2-4
MI 220
N-7-2-4
N-6-5-4
N-2-1-4
N-6-5-4
N-6-5-4
N-6-5-4
N-6-5-4
N-6-5-4
N-6-5-4
N-6-5-4
N-1-2-2

MI 171
MI 247
HT2.5 TP ANVIL
MI 195
M191
MI229
MI 232
MI1558
MI 1041
MI 181
6200-B
MODEL.8-725BRM
550-360MT-6

수량
7
8
1
1
4
10
5
4
4
1
1
1
1
4
1
2
1
2
1
1
4
1
2
2
2
1
1
5
1
1
1
1
1
1
1
1
4
2
3
5
1
3
1
1
1
2
2
1
3
1
1
2
1

LOC

VENDOR

Q53
Q11
Q53
Q53
Q53
Q11
Q53
Q53
Q53
Q53
Q53
Q11
Q11
Q11
Q11
Q11
Q11
Q53
Q53
Q11
Q11
Q11
Q11
Q11
Q53
Q11
Q11
Q11
Q11
Q53
Q11
Q11
T12
Q11
Q11
Q53
Q55
Q55
Q55
Q55
B102
Q55
Q55
Q55
Q55
Q55
Q55
Q55
Q55
Q55
B63
B16
W15

MDC
"
"

No

Item no

장비명

DESCRIPTION

4871 3901S-031
C-V PLOTTER
(Y)5"SHIELDED PROBE
4872 3901S-032
C-V PLOTTER
(Y)5"S/PART KINT
4873 3901T-002
C-V PLOTTER
(Y)5"THERMCCOUPLE WI
4874 3902A-001 WAFER INSPECTION (Y)ADJUSTING FOOT
4875 3902A-002 WAFER INSPECTION (Y)ARM
4876 3903A-001
ELLOSOMETER
(Y)LASER ASS'Y
4877 3903A-006
ELLOSOMETER
(Y)ORBITRAN PC BOARD
4878 3903A-014
ELLOSOMETER
(Y)MICROSWITCH ASSY
4879 3903A-018
ELLOSOMETER
(Y)DRUM ANALYZER (WI
4880 3903B-004
ELLOSOMETER
(Y)PHOTO DIODE
4881 3903B-006
ELLOSOMETER
(Y)PHOTO DIODE BOARD
4882 3903B-006
ELLOSOMETER
(Y)PHOTO DIODE BOARD
4883 3903B-022
ELLOSOMETER
(Y)FROG-LEG GEAR BOX
4884 3903C-003
ELLOSOMETER
(Y)C-SLIDE ASSY AUTO
4885 3903C-005
ELLOSOMETER
(Y)INTERFACE CARD &
4886 3903C-006
ELLOSOMETER
(Y)COMPENSATOR,AUTO
4887 3903D-002
ELLOSOMETER
(Y)PHOTODETECTOR
4888 3903F-001
ELLOSOMETER
(Y)FUSE STEPPER BOAR
4889 3903L-003
ELLOSOMETER
(Y)HOUSING FOR INDIC
4890 3903M-006
ELLOSOMETER
(Y)STEPPING MOTOR
4891 3903M-007
ELLOSOMETER
(Y)ROTATING ANALYZER
4892 3903M-008
ELLOSOMETER
(Y)BRUSHES, MOTOR, O
4893 3903P-004
ELLOSOMETER
(Y)KEY TOOK, PRISM
4894 3903P-005
ELLOSOMETER
(Y)PRISM ASSY
4895 3903P-006
ELLOSOMETER
(Y)PIMHOLE
4896 3903S-004
ELLOSOMETER
(Y)A/D ADJUSTMENT SW
4897 3903S-014
ELLOSOMETER
(Y)BEAM SHUTTER
4898 3903W-001
ELLOSOMETER
(Y)CHCEK SAMPLE WAFE
4899 3904B-002
4-POINT PROBE
(Y)5"PCB ASS'Y VIDEO
4900 3904B-004
4-POINT PROBE
(Y)PCB ROM-EROM MODE
4901 3904B-005
5-POINT PROBE
(Y)5"KEY BOARD ASS'Y
4902 3904C-001
6-POINT PROBE
(Y)5"POWER CORD 3FT
4903 3904D-012
7-POINT PROBE
(Y)5"DISC-VACUUM-AFP
4904 3904I-004
PROBE
(C)I.C (3996I-308)
4905 3904M-002
PROBE
(Y)5"MOTOR GEAR
4906 3904M-011
PROBE
(Y)5"MONITOR 12"
4907 3904P-003
PROBE
(Y)5"LOW NOISE BITET
4908 3904P-013
PROBE
(Y)5"WAFER HOLDER PL
4909 3904R-021
PROBE
(Y)5"VOLTAGE REGULATOR 5V, 3A
4910 3904S-004
PROBE
(Y)5"I.C S/W LF 13202D
4911 3904S-005
PROBE
(Y)5"ANALOG S/W SW02 FQ
4912 3904S-011
PROBE
(Y)5"OPTO ELECTRONICAL SENSOR
4913 3904V-002
PROBE
(Y)5"VOLATAGE REE FEF 02EZ
4914 3905C-004
PROBE
(Y)5"CHAMBER
4915 3905F-001
HMDS
(Y)5"FLEXLINE,SS 4"
4916 3905G-001
HMDS
5"CONSISTING 6 DOOR
4917 3905G-002
HMDS
(Y)5"GASKET FLASK ST
4918 3905G-004
HMDS
5"GASKET,DOOR,2020
4919 3905K-001
HMDS
(Y)5"KEY PAD
4920 3905L-001
HMDS
(Y)5"LED DISPALY BACKLITE
4921 3905M-001
HMDS
(Y)5"MICROPROCESSOR
4922 3905O-001
HMDS
(Y)5"O-RING
4923 3905R-002
HMDS
(Y)5"RELAY 24V DC CO

LOCATION
A-3-5

N-1-2-2
N-1-2-3
L-10-6-2
G-2-4-2
L-10-6-2
L-10-6-2
G-2-4-2
G-2-4-2
B-1-1
N-6-1-4
G-2-4-2
N-6-1-4
B-1-1
C-1-1, L-10-6-2
C-1-1
L-10-6-2
L-10-6-2
N-1-3-2
C-1-1
L-10-6-2
N-6-1-4
C-1-1
B-1-1
G-2-4-2
G-2-4-2
L-6-3
B-3-1-2
B-3-1-2
C-4-3-3
D-3-3-2
L-10-7-2
B-3-1-2
C-4-3-3
C-4-3-3
C-4-3-3
C-4-3-3
C-4-3-3

VENDOR PART NO
MODEL.U-S-1-CD
6200-SPK
1260010
2K630-347
MGV13100A1
10026-20EN
0005180-04
7660
16161-A30
10161-D25B
10257-10
10257-10
10161-BA
10161-45G
1061-B5
P7851
P7923
10026-J4A-RE19
UE30PP1000
10161-A35
16161-A40M
10026-110
10026-A10026
9682-15
10026-120
10026-21
L119SW-460
03-110630D01
03-110887D01
02-109891D01
32-106655A11
16-109095C01
912803
30-106660A02
45-107147A02
950101
8295-825-05
9514051
913202
950201
77-106768A02
950202
01-710-010-4389
3005017

B-1-1

K-5-2-4
K-5-1-2
B-1-1
K-5-2-4

3092
3004700
50003007
50003006
3216
4102-15
3006052

수량
1
1
1
3
2
2
1
3
1
2
1
1
1
1
1
1
1
4
9
1
1
1
1
1
1
1
1
1
1
1
1
1
3
2
1
1
1
2
1
2
3
1
2
1
1
11
9
4
1
1
3
1
1

LOC

VENDOR

Q13
B63
B63
B16
B53
Q15
Q15
Q15
Q15
Q15
Q15
Q15
Q14
Q14
Q15
Q14
Q14
Q15
Q14
Q15
Q15
Q14
B16
Q14
Q15
Q14
Q14
Q14
Q15
Q15
Q22
Q44
Q44
T61
W21
Q33
Q14
B53,Q44
T61
T61
T61
T61
T61
X54
J53
J51
J51
J51
J45
J45
J22
J51
J45

"
"
"
NIKON
"
GENERATOR
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
ASM
ASM
"
"
"
ASM
"
"
"
"
ASM
ASM
ASM
ASM
ASM
"
YES
"
"
"
"
YES
"
"
"

C.B PRE-AMP PCB I/O DIGITAL COUNT (Y)POWER SUPPLY CS2 (Y)UPOWER SUPPLY(UV) (Y)DIGITAL PANEL INS (Y)PRINTER HEAD ASSY (Y)COUPLING INSERT1/4"COMPRESS (Y)CABLE ASSY (Y)CABLE ASSY (Y)CABLE ASSY (Y)CABLE ASSY (Y)PCA DISK CONTROLL (Y)COUPLING INSERT (Y)COUPLING INSERT (Y)CYLINDER ODUBLE ACTING (Y)COUPLING BODY (Y)OVERLAY.BLAKC.J-T (Y)5"VARISTOR METAL (X)F-ARM (Y)HMX CONNECTION AD (Y)U-EPI ADAPTER FOR OPTIPHOT (Y)MPC99001 NI-CD BACK-UP BATT (X)MICROSCOPE FILTER (Y)GEAR (Y)EYEPIECE HEAD (Y)HOUSING (Y)LAMPHOUSE HMX (Y)KNOB (Y)LAMP MOUNT 307-14 (X)HBO 100W/2 BURNER (X)REFLECTOR HALOGEN (Y)STAGE LOCK 026-40 HALOGEN LAMP 6V 20W (Y)LAMP HOUS LENS (Y)MOTOR (Y)NOMARSKI PRISM NI TRANSFORMER & OTHERS (Y)MEMORY BOARD (Y)P.No Item no 장비명 4924 4925 4926 4927 4928 4929 4930 4931 4932 4933 4934 4935 4936 4937 4938 4939 4940 4941 4942 4943 4944 4945 4946 4947 4948 4949 4950 4951 4952 4953 4954 4955 4956 4957 4958 4959 4960 4961 4962 4963 4964 4965 4966 4967 4968 4969 4970 4971 4972 4973 4974 4975 4976 3905T-001 3905V-005 3907A-003 3907A-011 3907A-012 3907B-013 3907F-001 3907G-024 3907H-008 3907H-009 3907H-011 3907K-004 3907L-004 3907L-006 3907L-007 3907L-021 3907L-024 3907L-029 3907M-001 3907P-002 3907T-008 3908B-001 3908B-006 3908B-012 3908C-001 3908P-002 3908P-010 3908P-011 3908T-001 3909C-001 3909C-005 3909C-007 3909C-009 3909C-010 3909C-027 3909C-031 3909C-032 3909C-033 3909C-041 3909F-004 3909L-002 3909L-003 3909P-030 3909P-041 3909P-051 3909R-011 3909S-009 3909S-012 3916C-002 3916V-013 3919B-001 3919F-001 3921A-001 HMDS HMDS MICROSCOPE MICROSCOPE MICROSCOPE MICROSCOPE MICROSCOPE MICROSCOPE MICROSCOPE MICROSCOPE MICROSCOPE MICROSCOPE MICROSCOPE MICROSCOPE MICROSCOPE MICROSCOPE MICROSCOPE MICROSCOPE MICROSCOPE MICROSCOPE MICROSCOPE NANOSPEC NANOSPEC NANOSPEC NANOSPEC NANOSPEC NANOSPEC NANOSPEC NANOSPEC OMNI MAP OMNI MAP OMNI MAP OMNI MAP OMNI MAP OMNI MAP OMNI MAP OMNI MAP OMNI MAP OMNI MAP OMNI MAP OMNI MAP OMNI MAP OMNI MAP OMNI MAP OMNI MAP OMNI MAP OMNI MAP OMNI MAP AUTO SORT AUTO SORT MFC PART MFC PART PHILTEC DESCRIPTION (Y)5"THERMOCUPLE. D-3-5-4 860040 853-031 038-101 131-000 LP105400 DM047600 XVXX 8200-0149 8200-0001 8207-0142 9407-0012 7200-1043 9602-0164 7901-2326 9407-0190 91-0013 55-0111 55-0195 55-0197 55-0210 26-0021 91-0015 91-0016 96-0007 91-0011 77-0162-01 35-0021 SP309P 51-0027 22-0040 47-0169 96-0002 SP3104-1 96-0001 116615 B-100A B 수량 1 1 1 18 22 3 13 5 1 10 25 20 12 20(20EA반출 8 2 11 20 1 5 18 2 1 2 3 1 1 4 2 1 2 2 2 2 1 3 4 4 2 1 1 1 1 1 1 1 2 1 1 1 2 3 3 LOC VENDOR J45 " T33 " Q14 LEITZ Q15 LEITZ Q15 LEITZ Q14 LEITZ DD33 " B16 LEITZ Q21 " Q21 " Q21 " B16 " Q13 " DD34 " Q13 " B16 " Q13 " Q14 " S14 LEITZ B16 " Q21 " V33 NANOMETRIC V33 NANOMETRIC V33 NANOMETRIC Q13 " T53 " Q25 " Q13 " Q13 " Q13 PROMETRICS Q13 " Q13 " Q13 " Q13 " V33 PROMETRICS B53 " B53 " B16 " Q13 " B53 " Q13 " Q32 PROMETRICS Q32 " Q32 " B53 " Q13 " Q13 " Q13 " Q13 GCA Q13 GCA Q15 B16 AA72 JUNCTION DEPTH .ONE (Y)LED SQUARE AMBER LIGHT BOX ASS'Y (Y)ASSY POWER SUPPLY PRINTER EPSON FIX-870 (Y)PLUG. CLR (Y)SWITCH VACUUM (Y)5"MINI AIR CYLIND (Y)SPOT BULB (Y)5"FILTERS (X) 4-A2-80-60 TIMER ASS'Y 80 LOCATION VENDOR PART NO K-5-4-1 D-1-2-2 3004008 3010067 C-1-2 C-1-2. N-6-1-4 L-10-7-2 MXA20216 MBF29900 UFX-II N-1-3-2 G-1-4 G-1-5.406 DIA (Y)REGULATOR PRESET (Y)OPT SENSER.M-3-1 N-6-1-4 C-4-1-2 J-2-1-1 N-6-1-4 N-6-1-4 N-6-1-4 N-6-1-4 N-6-1-4 N-6-1-4 N-6-1-4 N-1-2-3 N-1-2-3 N-1-2-2 N-6-1-4 N-6-1-4 E-1-1 L-9-2 N-6-1-4 N-6-1-4 N-6-1-4 N-6-1-4 L-10-6-2 N-1-2-2 D-2-1-2. D-14-5 C-1-1 N-1-3-2 N-8-1-4 AB287700 ER TYPE DL053800 MAE15001 AA781300 002-000 N-1-2-2 B-1-1 N-1-3-2 G-2-2. L-9-6. VACUUM FINGER.

C (X) NUT (X) PHOTORANSISTOR-SIL MT8020 (X) REGULATOR (O-60 PSI) (X) REGULATOR (0-60 PSI) (X) VACUUM SWITCH (X) SPACE SHAFT (X) SPRING COMPRESION (X) SPRING PLUNGER (X) SPRING COMPRESION (X) SCREW (X) WASHER (X) WIRE (Y)5"PHOTO INTERRUPT (Y)5"CPU/MEMORY BOAR (Y)5"CONTROL BOARD (Y)5"POWER SIGNAL BO (Y)5"CONNECTING BOAR (Y)5"CONNECTING BOAR (Y)5"INTERFACE BOARD (Y)5"INTERFACE BOARD D-2-1-2 D-2-1-2 D-2-1-2 D-2-1-2 D-2-1-2 M-7-3-1 M-7-3-1 D-2-1-2 M-7-3-1 M-7-3-1 M-7-3-1 M-7-3-1 J-4-1-4 J-4-1-4 J-4-1-4 J-4-1-4 J-4-1-4 D-3-5-4 D-3-5-4 D-3-5-4 D-3-5-4 D-3-5-4 D-3-5-4 D-3-5-4 D-3-5-4 D-3-5-4 J-4-1-4 J-4-1-4 J-4-1-4 D-3-5-4 J-4-1-4 J-4-1-4 D-3-5-4 D-3-5-4 D-3-5-4 E-2-2 D-3-5-4 E-2-2 D-3-5-4 J-4-1-3 E/F 1-A13 79733 ASMM 1-KK 03-04504-00 03-07871-X2 03-05800-A 03-07797-Y1 03-05984-00 01-04640-00 01-05075-00 27-01119-00 17-00349-00 15-07673-27 15-04520-0C 17-00369-X1 23-00710-00 15-04809-02 42-02606-00 42-02603-00 21-00119-00 54-04102-00 32-01610-A 17-00358-00 17-00352-00 21-00109-00 28-01226-00 28-01230-00 28-01239-00 20-00004-05 21-00138-00 F45-02910-00 2S017-010 2S015-008-2 2S014-008-2 2S003-003-2 2S017-025 2S017-026 2S013-013-2 2S013-014-2 수량 3 8 2 2 1 1 1 2 2 1 2 4 3 2 2 1 1 2 2 2 4 5 4 1 1 3 6 1 2 12 6 5 2 1 5 1 1 1 10 4 2 2 4 5 2 1 1 1 1 1 1 1 1 LOC VENDOR T22 AA72 AA72 AA72 AA72 AA72 AA72 AA74 AA74 AA74 AA72 AA74 AA74 AA74 AA74 T11 T11 T11 T11 T11 T11 AA72 AA72 AA72 AA72 AA72 AA72 AA72 AA72 AA72 T11 T11 T11 AA72 T12 T11 AA72 AA72 DD14 DD14 AA72 DD14 AA72 DD14 AA72 DD33 DD33 DD33 DD33 DD33 DD33 DD33 DD33 PHILTEC " " " " " " " " " " " " " " OSI " " " " " OSI " " " " " " " " " " " " " " " " " " " " " " " MACTRONIX " " " " " " " .No Item no 4977 3921B-001 4978 3921B-021 4979 3921B-031 4980 3921B-051 4981 3921C-001 4982 3921C-002 4983 3921C-011 4984 3921L-001 4985 3921L-021 4986 3921M-011 4987 3921M-021 4988 3921P-001 4989 3921P-002 4990 3921T-001 4991 3921V-001 4992 3923A-001 4993 3923B-002 4994 3923B-003 4995 3923B-004 4996 3923B-005 4997 3923B-008 4998 3923B-053 4999 3923B-054 5000 3923B-055 5001 3923C-002 5002 3923C-003 5003 3923C-004 5004 3923C-005 5005 3923F-001 5006 3923F-005 5007 3923F-022 5008 3923F-023 5009 3923I-001 5010 3923N-001 5011 3923P-001 5012 3923R-003 5013 3923R-004 5014 3923S-031 5015 3923S-033 5016 3923S-034 5017 3923S-035 5018 3923S-036 5019 3923S-038 5020 3923W-001 5021 3923W-002 5022 3924B-001 5023 3924B-002 5024 3924B-003 5025 3924B-004 5026 3924B-005 5027 3924B-006 5028 3924B-007 5029 3924B-008 장비명 JUNCTION DEPTH JUNCTION DEPTH JUNCTION DEPTH JUNCTION DEPTH JUNCTION DEPTH JUNCTION DEPTH JUNCTION DEPTH JUNCTION DEPTH JUNCTION DEPTH JUNCTION DEPTH JUNCTION DEPTH JUNCTION DEPTH JUNCTION DEPTH JUNCTION DEPTH JUNCTION DEPTH INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION DESCRIPTION LOCATION VENDOR PART NO M-5-2-2 (X) POLISHING SOLUTION 80Z BO (X) F SOLID VIPER BLADE FOR M (X) BOLT & 2 EA (X) 2"-6"BACK SURFACE CHUCK R (X) 4" FRONT SURFACE CHUCK E-4 (X) MAGNET COIL (X) LIVE CENTER (X) LANS (2BRACK X 2GREEN) (X) XM MICROPROCESSOR (X) STAGE MICROMETER (X) ROLL PAPER (X) THERMAL CALCULATOR PAPER (X) TYGON WATER LINE TUBING (X) MEASURING VIAL (X) AUTO FOCUS PRE-AMP REV M (X) COMMUNICATION MULTIPLEXER (X) SOLENOID DRIVE PCB (X) FOCUS PCB ASSY Y1 (X) MOTOR CONTROL PCB ASSY J (X) LOADER MODULE PCB ASSY (X) AIR BEARING ASS'Y (X) AIR BEARING ASS'Y (X) BARRYMOUNT (X) AIR CYLINDER (7 STROKE) (X) CASSETTE (X) SHUCK LEAF (X) AIR CYL 5/16 BORE SPR RTN (X) BEARING FLANGE (X) FING RSTRCTD RED (X) FUSE (3AG) (X) FUSE (5A) (X) I.

5 190-XL-037 220-XL-037 221-MXL-9.5 VBL-007SE AB4012-01 BB0371-01 PM-487-PE CS-DA20X350 L0000 33 TYPE 050-05-CQ 수량 1 1 1 1 1 1 5 1 1 1 1 1 1 1 2 1 4 3 1 1 1 1 1 1 1 2 1 1 2 1 2 1 1 9 2 49 4 4 12 12 10 1 5 3 2 1 2 2 1 2 2 6 10 LOC VENDOR DD33 DD33 DD33 DD33 DD33 DD33 DD33 DD33 DD33 DD33 DD33 DD33 DD33 DD33 DD33 DD33 AA73 AA73 AA73 AA73 AA73 AA73 AA73 AA73 AA73 AA73 AA73 AA73 AA73 AA73 AA73 AA73 T11 BB11 BB11 BB11 BB11 BB11 BB11 BB11 A92 X13 BB11 BB11 BB11 BB11 BB12 BB12 T11 BB12 A92 BB11 BB11 " " " " " " " " " " " " " " " " ATCOR " " " " " " " " " " " " " " " HUGLE " HUGLE " " " " " HUGLE HUGLE " " " " " " " " " " " . CHAIN (X)GASKET GATE CYLIN (X)SEAL SPRING LOADE (X)AIR CYLINDER(ELEV (X)AIR CYLINDER(GATE (Y)MAIN CONTROLLER (Y)AIR CYLINDER (Y)FILTER ELEMENT (X)FILTER ELEMENT (Y)FILTER ELEMENT LOCATION VENDOR PART NO 2S015-006-2 2S015-005-2 2S1013-011-2 2S050-010 2S020-020-G 2S020-021 L-8-3-4 D-2-4-1 D-2-4-1 D-2-4-1 2S020-007-2 A3 G207 G7826 G8181 2K640-448 2K640-332-2 X2110-131 A2(MGV13100) LD5030 098-DX MRS048DXPZ 60T40DP 250EI3102136 N373 B-1-3-1 L-11-4-4 L-11-3-1 L-11-3-1 L-11-3-1 L-11-3-1 L-11-3-1 F-3-1 N-6-3 B-1-3-1 L-5-2-2 L-11-4-4 N-6-1-3 30-125-PSI PN393N SWITCH DXXX 240-MXL-9.P.No Item no 장비명 5030 5031 5032 5033 5034 5035 5036 5037 5038 5039 5040 5041 5042 5043 5044 5045 5046 5047 5048 5049 5050 5051 5052 5053 5054 5055 5056 5057 5058 5059 5060 5061 5062 5063 5064 5065 5066 5067 5068 5069 5070 5071 5072 5073 5074 5075 5076 5077 5078 5079 5080 5081 5082 3924B-009 3924B-010 3924B-011 3924B-012 3924B-014 3924B-015 3924B-051 3924C-001 3924C-021 3924G-001 3924G-002 3924G-003 3924H-001 3924H-002 3924O-001 3924S-001 3925B-007 3925C-001 3925C-002 3925G-001 3925G-011 3925H-001 3925H-002 3925M-001 3925O-001 3925S-006 3925S-007 3925V-001 3925V-004 3925V-005 3925V-007 3925V-008 3926B-003 3926B-011 3926B-012 3926B-028 3926B-029 3926B-030 3926B-031 3926B-032 3926B-033 3926B-051 3926C-002 3926C-003 3926C-007 3926C-008 3926C-009 3926C-010 3926C-015 3926C-017 3926F-001 3926F-003 3926F-007 INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION INSPECTION BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER DESCRIPTION (Y)5"CPU/MEMEORY BOA (Y)5"CPU/MEMORY BOAR (Y)5"PERIPHERAL BOAR (Y)5"POWER SOURCE BO (Y)5"AF CONTROL BOAR (Y)5"SENSOR BOARD (S (Y)5"ENDLESS BELT (Y)5"REVOLVING NOSEP (Y)5"CASSETTE SENSOR (Y)5"GREASE (100G) (Y)5"GREASE (100G (Y)5"GREASSE (100G) (Y)5"WAFER HOLDER (Y)5"SYRINGE HEAD (Y)5"O-RING (Y)5"PHOTO SENSOR (X) SEX BOLT (X) CYLANDER (X) CYLANDER (X) GEAR (X) GUAGE (X) HEATH (X) HEATER (X) WATER METER (0-100) (X) O-RING (X) DOOR INTERAC S/W (X) PRESSURE S/W (X) AIR VALVE (120.P. CHAIN (X)P.50/60) (X) DIAPHRAM FOR VALVE (X) SOLENOID VALVE (X) SOLENOID VALVE FOR C.5 220-MXL-9.A (X) SOL VALVE (X)PC BOARD (X)ELEVATOR BEARING (X)BEARING BLOCK ASS (Y)TIMING BELT (Y)TIMING BELT (Y)TIMING BELT (C)T-BELT (3996B-293) (C)T-BELT (3996B-296) (Y)TIMING BELT BLOWER (X)P.D.5 235-MXL-9.

No Item no 장비명 5083 5084 5085 5086 5087 5088 5089 5090 5091 5092 5093 5094 5095 5096 5097 5098 5099 5100 5101 5102 5103 5104 5105 5106 5107 5108 5109 5110 5111 5112 5113 5114 5115 5116 5117 5118 5119 5120 5121 5122 5123 5124 5125 5126 5127 5128 5129 5130 5131 5132 5133 5134 5135 3926F-008 3926F-009 3926G-001 3926G-002 3926G-003 3926G-004 3926G-005 3926G-022 3926H-001 3926H-001 3926H-001 3926H-002 3926H-006 3926K-001 3926M-005 3926M-007 3926P-003 3926R-002 3926R-010 3926S-001 3926S-002 3926S-004 3926S-006 3926S-011 3926S-012 3926S-013 3926S-014 3926S-015 3926S-017 3926S-022 3926S-026 3926S-027 3926S-028 3926S-051 3926T-005 3926T-007 3926T-012 3926U-001 3926U-002 3926U-003 3926V-001 3926V-002 3926V-003 3926V-004 3926V-005 3926V-006 3926V-007 3926V-008 3926V-009 3926V-010 3926V-011 3926V-012 3926V-013 BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER BOX CLEANER DESCRIPTION (Y)FILTER ELEMENT ETC (Y)VANGUARD FILTER (X)GEAR HEAD (X)GEAR HEAD (X)GATE DOOR (X)GEAR HEAD (X)GEAR HEAD (Y)PULSE GENERATOR (X)HEATER (X)HEATER (X)HEATER (X)HEATER ELEMENT AS (Y)HEATER ELEMENT (Y)KEY (Y)FLOW METER (Y)REVERSIBLE MOTOR (Y)POLLER PIN (Y)ROLLER (Y)V-RING (X)CYLINDER SENSOR (X)PHOTO SENSOR (X)CYLINDER SENSOR (X)SENSOR PHOTORESCE (X)SPROKET (X)ELEVATOR SHAFT (X)CHAIN FEEER OR ST (X)SWITCH DI WATER P (X)S/W FLOW CHEMICAL (X)S/W N2 PRESSURE (X)PRESSURE SWITCH (Y)POWER SUPPLY (Y)POWER SUPPLY (Y)POWER SUPPLY (Y)SHELF (X)SEAL O-RING DI SU (X)LOT TUBING POLYPR (Y)DI TANK (Y)ROLLER UNIT FOR MAINFRAME (Y)ROLLER UNIT FOR MAINFRAME (Y)ROLLER UNIT FOR MAINFRAME (X)SOLENOID VALVE (X)SOLENOID VALVE (X)SOLENOID VALVE (X)SOLENOID VALVE (X)PVC VALVE (X)PVC VALVE (X)VALVE 2-WAY SURFA (X)VALVE 2-WAY N2 DI (X)VALVE SOLEVENT EX (X)VALVE PILOT SOLVE (X)VALVE SOLVENT DISPENSE(W/O) (X)VALVE EMERGENCY P (X)VALVE TANK PRESSU LOCATION VENDOR PART NO L-11-2-1 MN02-1DAS 3GK3OK 4GK3OK I-3-3 N-6-2 N-6-3 N-6-3 N-6-3 N-6-1-3 N-7-6-1 N-6-1-3 N-6-1-3 N-6-1-3 N-6-1-3 L-5-2-2 L-11-3-1 L-11-4-4 L-11-3-1 L-11-3-1 L-11-3-1 L-11-3-1 N-6-1-3 B-1-3-1 B-1-3-1 D-2-1-3 L-11-3-1 N-6-2 N-7-6-1 N-7-6-1 N-6-4-4 N-6-4-4 N-6-4-4 N-6-4-4 3GK30K 4GK30K 4G6100S HA0992-02 N8A22/NCC-0684 3-2001AV HA1428-01 V-20S A0000 CN1275-01 J0000 GXXX AC0507-01 BB0265-01 BB1929-01 BB0266-01 AIRM401060 5RK 40GN-A VAR12SD P15-5 BB0493-01 BB4107-01 PC-70 W-2 PULLY W-1 PULLY W/PENETRATION EXET CHEMICAL IONIZER MANIFOLD I-205 I-204 BB0150-01 BA1007-01 BB4307-01 BB4031-01 BB4342-01 BB0940-01 BB0134-01 수량 1 1 1 1 8 4 3 1 1 1 1 1 1 10 1 2 1 17 29 5 5 4 2 22 2 2 1 1 1 1 2 1 1 6 2 1 1 2 2 1 3 3 2 3 3 5 2 2 1 1 1 1 1 LOC VENDOR CC22 BB12 P22 P22 DD21 P22 P22 BB12 BB12 BB12 BB12 BB11 D31 BB11 BB11 P12 BB11 BB11 A92 BB11 BB11 BB11 BB11 BB11 BB11 BB11 BB11 BB11 BB11 BB11 T11 T11 T11 DD11 BB11 BB11 BB12 D31 D31 Z18 BB11 BB11 BB11 BB11 BB13 BB13 BB13 BB13 BB13 BB13 BB13 BB13 BB13 " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .

No Item no 장비명 DESCRIPTION 5136 3926V-014 BOX CLEANER (X)VLAVE 2-WAY PILOT 5137 3926V-015 BOX CLEANER (X)VALVE 2-WAY SOLENOID 5138 3926V-016 BOX CLEANER (X)MANIFOLD VALVE 5139 3926V-018 BOX CLEANER (Y)3-WAY VALVE 5140 3926V-025 BOX CLEANER (Y)SOLENOID VALVE 5141 3926V-026 BOX CLEANER (Y)AIR VALVE (FEMATE TYPE) 5142 3926V-027 BOX CLEANER (Y)3 WAY VALVE 5143 3926W-001 BOX CLEANER (Y)WIRE TRAY 5151 3928A-003 ELEMINATOR&LAMINATOR AIR SHOCK ABSOBER 5152 3928B-009 ELEMINATOR&LAMINATOR (Y)BELT 5153 3928B-011 ELEMINATOR&LAMINATOR (Y)TIMING BELT 5154 3928B-012 ELEMINATOR&LAMINATOR (Y)TIMING BELT 5155 3928B-021 ELEMINATOR&LAMINATOR (C)T-BELT (3996B-303 5156 3928B-022 ELEMINATOR&LAMINATOR (Y)TIMING BELT 5157 3928B-024 ELEMINATOR&LAMINATOR (Y)BELT PRESSER 5158 3928B-025 ELEMINATOR&LAMINATOR (Y)BELT PRESSOR (1) 5159 3928B-026 ELEMINATOR&LAMINATOR (Y)BELT PRESSOR (2) 5160 3928B-027 ELEMINATOR&LAMINATOR (Y)BELT BRACKET 5161 3928B-029 ELEMINATOR&LAMINATOR (Y)TIMING BELT (U-TY 5162 3928B-030 ELEMINATOR&LAMINATOR (Y)TIMING BELT (U-TY 5163 3928B-031 ELEMINATOR&LAMINATOR (Y)BELT (3X160) 5164 3928B-032 ELEMINATOR&LAMINATOR (Y)BELT (3X160) 5165 3928B-033 ELEMINATOR&LAMINATOR (Y)BELT (3X205) 5166 3928B-034 ELEMINATOR&LAMINATOR (Y)BELT (3X225) 5167 3928B-035 ELEMINATOR&LAMINATOR (Y)BELT (3X367) 5168 3928B-036 ELEMINATOR&LAMINATOR (Y)BELT (3X520) 5169 3928B-037 ELEMINATOR&LAMINATOR (Y)BELT (3X189) 5170 3928B-038 ELEMINATOR&LAMINATOR (Y)BELT (2X152) 5171 3928B-039 ELEMINATOR&LAMINATOR (Y)BELT (2X144) 5172 3928B-040 ELEMINATOR&LAMINATOR (Y)BELT (3X220) 5173 3928B-050 ELEMINATOR&LAMINATOR (Y)BEARING 5174 3928B-051 ELEMINATOR&LAMINATOR (Y)BELT (3X171) 5175 3928B-052 ELEMINATOR&LAMINATOR (Y)BELT (3X310) 5176 3928B-053 ELEMINATOR&LAMINATOR (Y)BELT (3X195) 5177 3928B-054 ELEMINATOR&LAMINATOR (Y)POTIMAR BELT 5178 3928B-055 ELEMINATOR&LAMINATOR (Y)TIMING BELT 5179 3928B-056 ELEMINATOR&LAMINATOR (Y)TIMING BELT 5180 3928B-057 ELEMINATOR&LAMINATOR (Y)TIMING BELT 5181 3928B-058 ELEMINATOR&LAMINATOR (Y)TIMING BELT 5182 3928B-102 ELEMINATOR&LAMINATOR (Y)BUSHING 5183 3928B-111 ELEMINATOR&LAMINATOR (Y)GUIDE BAR(1) 5184 3928B-112 ELEMINATOR&LAMINATOR (Y)GUIDE BAR(1) 5185 3928B-113 ELEMINATOR&LAMINATOR (Y)GUIDE BAR(2) 5186 3928B-114 ELEMINATOR&LAMINATOR (Y)GUIDE BAR(2) 5187 3928B-115 ELEMINATOR&LAMINATOR (Y)TERMINAL BOARD 5188 3928B-116 ELEMINATOR&LAMINATOR (Y)BEARING 5189 3928C-011 ELEMINATOR&LAMINATOR (Y)AIR CYLINDER 5190 3928C-023 ELEMINATOR&LAMINATOR (Y)TAPE GUIDE COLLAR 5191 3928C-024 ELEMINATOR&LAMINATOR (Y)TAPE GUIDE COLLAR 5192 3928C-063 ELEMINATOR CUTTER BLOCK 5193 3928C-071 ELEMINATOR (Y)ROLL CAP 5194 3928C-072 ELEMINATOR (Y)CURL CODE 5195 3928D-001 ELEMINATOR (Y)DIAPHRAGM LOCATION VENDOR PART NO BB0151-01 BB1398-01 N-6-4-4 N-4-4-1 N-6-4-4 N-7-5-3 B-1-2-4 N-3-1-4 N-3-1-4 N-3-1-4 N-3-1-4 B-1-2-4 B-1-2-4 B-1-2-4 B-1-2-4 B-1-2-4 B-1-2-4 N-3-1-4 N-3-1-4 N-3-1-4 N-3-1-4 N-3-1-4 N-3-1-4 N-3-1-4 N-3-1-4 A110-4E1-83-PL 15A FDBVT-158 MCC-344-2 RBC-1007 C213098 480-L-060 510-L-050 150-L-050 480-L-050 B321014 C213049 C313024 C213048 173-L-050 187-L-050 B121076 B121077 B121078 B121079 B121090 B121061 B121084 F121059 F121060 F121061 MF63ZZS F121062 F121063 F121064 5M-307 040S3M507 414XL 037 220XL 037 414XL J113023 B114016 B114017 B114018 B114019 T20C05 L-520ZZW52 7N-1-D6X5 C113006 C113009 J213007 B121056 CVF100 DA-60D-1 수량 1 1 2 3 1 1 1 1 1 2 2 2 2 5 3 4 4 4 2 2 2 2 2 2 2 2 1 2 2 2 2 2 2 2 2 2 1 1 2 2 2 2 2 2 2 4 2 1 1 1 2 1 3 LOC VENDOR BB13 BB11 BB11 R45 BB11 BB12 R31 DD10 Q45 Q45 Q45 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q45 Q45 Q45 Q45 Q45 Q45 Q45 Q45 Q45 Q45 Q45 Q45 Q45 Q45 Q45 Q45 Q45 Q44 Q44 Q44 Q44 Q45 Q45 Q45 Q45 Q45 Q45 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 " " " " " " " " TAKATORI " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " TAKATORI " " " .

No Item no 장비명 5196 5197 5198 5199 5200 5201 5202 5203 5204 5205 5206 5207 5208 5209 5210 5211 5212 5213 5214 5215 5216 5217 5218 5219 5220 5221 5222 5223 5224 5225 5226 5227 5228 5229 5230 5231 5232 5233 5234 5235 5236 5237 5238 5239 5240 5241 5242 5243 5244 5245 5246 5247 5248 3928D-001 3928G-002 3928G-003 3928G-005 3928G-025 3928G-032 3928G-034 3928G-036 3928G-043 3928G-046 3928G-061 3928G-062 3928G-063 3928G-065 3928G-066 3928G-067 3928H-001 3928H-002 3928H-003 3928H-011 3928H-012 3928J-001 3928K-001 3928M-005 3928M-009 3928M-046 3928O-001 3928P-042 3928P-043 3928P-044 3928P-072 3928P-073 3928R-005 3928R-006 3928R-008 3928R-009 3928R-041 3928R-042 3928R-043 3928S-013 3928S-014 3928S-016 3928S-017 3928S-018 3928S-019 3928S-020 3928S-024 3928S-025 3928S-026 3928S-027 3928S-028 3928S-030 3928S-031 ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR DESCRIPTION (Y)DIAPHRAGM (Y)SPUR GEAR LM GUIDE LM GUIDE (Y)GENERATOR LM GUIDE (Y)TAPE GUIDE (B) (Y)TAPE GUIDE (C) LM GUIDE (Y)LA GUIDE (Y)SPUR GEAR(1) (Y)SPUR GEAR(2) (Y)SPUR GEAR(A) (Y)BEVEL GEAR(A) (Y)BEVEL GEAR(B) (Y)BEVEL GEAR(C) (Y)HAND (A) (Y)HAND (B) (Y)HAND (Y)ROLLER HOLDER (Y)HEATER HOLDER (Y)ROTARY TUBE JOINT (Y)KEY (Y)STEPPING MOTOR ORIENTAL MOTOR PHOTO ELECTRIC SWITC (Y)O-RING (Y)SUCTION PAD (Y)SUCTION PIN (Y)SUCTION PIN TIP (Y)INDER PLUNGER (Y)SPRING PLUNGER RELAY (DC24) RELAY (AC100V) RELAY RELAY (Y)RAIL BASE (Y)GUIDE ROLLER(B) (Y)GUIDE ROLLER (C) (Y)TOGGLE SWITCH (Y)SHAFT METAL (B) (Y)PUSH BUTTON SWITC (Y)PUSH BUTTON SWITC (Y)PUSH BUTTON SWITC (X)PUSH BUTTON SWITC (Y)PUSH BUTTON SWITC SPRING SPRING (Y)SPRING (Y)SPRING (Y)SPRING (Y)MICRO SWITCH VACUUM SENSOR LOCATION N-3-1-4 N-3-1-4 N-3-1-4 N-3-1-4 L-3-5-1 N-3-1-4 B-1-2-4 N-3-1-4 N-3-1-4 N-3-1-4 N-3-1-4 N-3-1-4 N-3-1-4 N-3-1-4 L-3-5-1 L-3-5-1 N-3-1-4 N-3-1-4 N-3-1-4 N-3-1-4 N-3-1-4 B-4-4-1 L-3-5-1 B-1-2-4 B-1-2-4 N-3-2-3 N-3-2-3 B-1-2-4 L-3-5-1 N-3-1-4 L-3-5-1 B-1-1 B-1-1 B-1-1 B-1-1 B-1-1 B-1-1 B-1-1 B-1-1 B-1-1 VENDOR PART NO 수량 DA-60D-1 5 C113079 1 B121037 4 B121031 4 C-540S 1 J113017 2 C113012 2 C113072 1 D113050 5 D118039 2 C213028 50 C235010 1 C135033 2 C114083 1 C114084 1 C114087 1 D-009 1 D-016 1 F-007 1 C113075 2 D113042 2 TSR4 M5 1 DKW-050570S 2 PXD-34-B02A 1 2RK6GN-AM 1 E32-F7-200 3 CO-0507A 2 B221006 3 B-005 1 B-006 3 DX-10 1 PL-3 1 G2R-112S-V-NO-US 10 G5DN-22427 2 G2R-212S-V-ND-US 10 G2R-112S-V-ND-US 10 F121028 2 C114036 2 C114037 2 8C1049 2 C113077 3 AH164-SLO11E3 2불출 AH164-SLG11E3 2불출 AH164-TLR11E3 3불출 AH164-SFY11 3 AH165-2VLR11E3 1 B121015 2 B135003 2 C135004 1 C135014 1 C213034 1 D2MV-01L111 2 DPX-200 1 LOC VENDOR Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 P11 P11 R14 Q44 Q44 Q45 Q45 Q45 Q45 R14 R14 R14 R14 Q44 Q45 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 Q44 " " " " " " " " " " " TAKATORI " " " " " " " " TAKATORI " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " " .

I.T.I.R INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA DESCRIPTION (Y)SAME P/N 3928S-01 PHOTO MICRO SWITCH (Y)PULL SPRING SET SCREW SCREW (Y)MIST SEPARATER (Y)SIRENSOR (Y)6" STOPPER (Y)ROLLER SHAFT (Y)GUIDE SHAFT (Y)GUIDE SHAFT(A) (Y)SHAFT (Y)SHAFT (Y)TRANSFORMER SOLENOID VALVE SOLENOID VALVE SOLENOID V/V (Y)5"PCB 140 OVERTEM (Y)5"ASSY FUSE THERM (Y)5"GASKET DOOR (Y)5"GASKET VCR (Y)5"LAMP 24VAC SWIT (Y)5"POWER SUPPLY 24 (Y)5"RELAY SOLID STA (Y)5"SWITCH 2 POLE L (Y)5"SENSOR VACUUM (Y)5"VALVE AIR OPERA CROUZET AMPLIFER (Y)STAGE Z ASSY CARD STAGE X/Y ASSY CARD CAMERA MODULE DC SERVO CONTROL CAR FPAS POWER CABLE OPTICS DISTRIBUTION RS232 MAXIM DRIVE CAMERA MOTOR ENCODER ELEVATOR MODULE KEYCAT KEY BOARD (Y)POWER SUPPLY UNIT (Y)MERCURY LAMP POWE (Y)WAFER SENSOR CARD STAGE POWER TR X/Y/Z ELEVATOR MICRO SW (Y)AMPLIFIER (Y)PCB (Y)PCB (Y)PCB (Y)MAGNET BRAKE (Y)ARM S2 BRAKE (Y)BRAKE PACK (Y)BCR CONTROLLER (Y)BCR SOURCE (Y)I/O CONTROLLER LOCATION N-3-1-4 N-3-2-3 N-3-1-4 B-1-1 N-3-1-4 B-1-1 B-1-2-4 B-1-1 L-3-5-1 B-1-1 B-1-1 B-1-1 B-1-1 L-11-2-3 B-1-1 B-1-1 B-1-1 D-1-2-2 K-5-6-1 K-3-1-3 K-5-6-1 K-3-1-3 K-3-1-3 K-5-6-1 N-8-1-4 N-8-2-3 N-8-2-3 N-8-2-3 C-4-3-3 L-10-4-2 E-1-2 I-7-1 C-3-2 G-2-4-1 N-8-2-3 C-4-3-3 N-8-1-4 B-2-5-2 D-1-1 D-1-1 D-1-1 D-1-1 K-11-5-1 K-11-5-1 B-4-5-2 B-4-5-2 B-4-5-2 VENDOR PART NO AH164-SFY11.R F.I.T.KT63-0161 수량 1 3 10 20 20 1 2 2 4 2 2 2 2 1 2 2 1 1 2 3 10 8 1 1 1 1 1 3 1 1 1 1 1 2 1 1 2 3 1 1 1 6 5 1 1 1 1 1 1 1 1 1 1 LOC VENDOR Q44 R14 Q44 Q44 Q44 Q44 Q45 Q44 Q44 Q44 Q44 Q44 Q44 Q46 Q44 Q44 Q44 T33 J43 J51 K36 J53 J43 J43 K36 K36 J43 Q13 Q15 Q16 Q14 Q15 Q14 Q15 T61 Q14 Q16 Q16 Q16 Q16 Q15 T61 Q13 R21 T44 T44 T44 T44 D33 D33 D33 D33 D33 " " " " " " " " " " " " " " " " " GENESIS " TAKATORI " " " " " " " BIO-RAD " " " " " " BIO-RAD " " " " " " " FA FA " " " " " " " " .R F.R F.T.T.T.I.T.R F. EE-SPZ401Y-01 J113058 KS-0505S KDS-0415S AMF-2000-01B AN-101-01 J114004 C213092 C114004 C114028 F121053 F120083 F617Y1 VZ312-5GSC-M5 VZ3120-5GSC-M5 1170-2282 3004005 3002090 3004011 3005189 3006061 3006075 3006010 3006012 3006064 3005053 PMA52800 L42074 L42073 L42106 Y5304300 Y7600011 Y5304310 L45150 L42441 PMM3000 L42363 L42545 L42548 PER7AXXD L40845 PMA33100 E3C.I.T.R F.R F.I.T.No Item no 장비명 5249 5250 5251 5252 5253 5254 5255 5256 5257 5258 5259 5260 5261 5262 5263 5264 5265 5275 5276 5277 5278 5279 5280 5281 5282 5283 5284 5285 5286 5287 5288 5289 5290 5291 5292 5293 5294 5295 5296 5297 5298 5299 5300 5316 5317 5318 5319 5320 5321 5322 5323 5324 5325 3928S-037 3928S-045 3928S-050 3928S-067 3928S-068 3928S-072 3928S-073 3928S-074 3928S-080 3928S-081 3928S-082 3928S-083 3928S-084 3928T-011 3928V-016 3928V-017 3928V-018 3930B-001 3930F-001 3930G-001 3930G-002 3930L-001 3930P-001 3930R-001 3930S-001 3930S-051 3930V-001 3933A-002 3933B-002 3933B-003 3933C-002 3933C-003 3933C-004 3933C-021 3933D-001 3933E-001 3933E-002 3933K-001 3933P-001 3933P-002 3933S-002 3933S-003 3933S-004 3940A-001 3940B-043 3940B-044 3940B-047 3940B-071 3940B-074 3940B-077 3940C-003 3940C-004 3940C-005 ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR HMDS HMDS ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR ELEMINATOR FITR FITR FITR FITR FITR FITR FITR F.I.R F.I.I.T.JC4P 1SBC544A 1SBC221 3M2COA91526 1400092393800 SBR32-ZP BCC2600 BCV5056 AF12246CA.R F.

S2.Y22 D33 D23 D23 T44 R21 R21 R21 D33 D33 D33 D33 D33 D33 D33 D33 D33 D33 D33 D33 D23 D32 " " " " " " " " " " " " " " " " " " " " " " " FA FA FA " " " " " " " " " " " " " " " " " " " " " " " " " " " .POWER SUPPLY (Y)CONTACTLESS RELAY FOR STRAI (Y)CONTACTLESS RELAY FOR CURVE (Y)AUX.RELAY (Y)THERMAL RELAY (Y)THERMAL RELAY (Y)THERMAL RELAY (Y)THERMAL RELAY (Y)THERMAL RELAY (Y)LINE RECEIVER (Y)RECTIFIER (Y)SPEED SENSOR (Y)PROXIMITY DETECTOR FOR CUR LOCATION VENDOR PART NO 수량 B-4-5-2 B-4-5-2 B-4-5-2 B-4-5-2 B-4-5-2 FC-10N SC-4-1 COIL-AC100V SC-03 COIL-AC100V SC-0 COIL-AC100V SC-03 COIL AC200V L-2-4-2 K-10-2-1 1400095297501 MCCJ03 K-11-4-1 SPD-G FD1137C-002 AER14928 ATMC-Z-E6-FD-02438-19 CR2LS-30S F-7143 6A AC 250V BLA003 BLA015 FHC-15N-5A V CODE 726300400 5L-KS 5L-KS FY-17CWT MB10Z-D3 MU1225S-41 FBK-06A24H 1400092398300 K-11-4-1 K-11-4-1 D-1-1 K-11-4-1 K-11-4-1 D-1-1 K-11-4-1 K-11-5-3 K-11-5-3 H-8-1 K-11-5-3 K-11-4-1 K-11-4-1 K-11-5-1 J-2-2-2 K-11-6-3 K-11-6-3 D-1-1 B-2-5-1 B-2-5-2 B-2-5-1 K-11-5-1 K-10-1-4 K-10-1-4 K-10-1-4 K-10-1-4 K-10-1-4 K-10-1-4 K-10-1-4 K-10-1-4 K-10-1-4 K-10-1-4 K-10-1-4 K-10-2-1 K-11-6-2 FR-Z024-0.75K LC-3022F-6A LC-3022F-6A 1400092392500 S82H-3524 582K-0706 S82H-3024 A61P SF20DMZ-H3 US-K20SSTELMHZ MY4N-CR COIL-AC220V LY2N-D2 COIL-DC24V TK.S3 MOTOR (Y)DC POWER SUPPLY (Y)DC POWER SUPPLY (Y)DC POWER SUPPLY (Y)SEQ.ON 1.No Item no 장비명 5326 5327 5328 5329 5330 5331 5332 5333 5334 5335 5336 5337 5338 5339 5340 5341 5342 5343 5344 5345 5346 5347 5348 5349 5350 5351 5352 5353 5354 5355 5356 5357 5358 5359 5360 5361 5362 5363 5364 5365 5366 5367 5368 5369 5370 5371 5372 5373 5374 5375 5376 5377 5378 3940C-041 3940C-042 3940C-043 3940C-044 3940C-045 3940C-071 3940C-081 3940C-091 3940C-101 3940C-102 3940C-103 3940C-104 3940C-105 3940D-001 3940D-052 3940E-001 3940F-010 3940F-031 3940F-032 3940F-033 3940F-034 3940F-035 3940F-036 3940F-071 3940F-071 3940F-073 3940F-081 3940F-082 3940F-084 3940F-085 3940F-086 3940I-002 3940L-001 3940M-001 3940M-001 3940M-024 3940P-002 3940P-003 3940P-004 3940P-005 3940R-001 3940R-002 3940R-003 3940R-006 3940R-007 3940R-008 3940R-009 3940R-010 3940R-011 3940R-031 3940R-061 3940S-001 3940S-002 INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA DESCRIPTION (Y)ELECTRO-MAGNETIC CONTACTOR (Y)ELECTRO-MAGNETIC CONTACTOR (Y)ELECTRO-MAGNETIC CONTACTOR (Y)ELECTRO-MAGNETIC CONTACTOR (Y)ELECTRO MAGNETIC CONTACTOR (Y)SELCOS STATION (Y)ARM HAND SIDE COVER R IC CARD READ/WRIT (Y)RS 232C CABLE 10M (Y)RS 232C CABLE 5M (Y)AGV TO STC RS232C 15M (Y)ETHERNET AUI CABLE 10M (Y)SCSI CABLE 3M (Y)DISCONNECTION OF DETECTOR (Y)FDD (Y)REVOLVING ENCODER (Y)FILTER (Y)FUSE FOR SELIM (Y)FUSE FOR SELIM (Y)FUSE LINK (Y)FUSE LINK (Y)FUSE (Y)BF FUSE (BF100) AC AXIAL FLOW BLOWER AC AXIAL FLOW BLOWER (Y)BLOWER (Y)FAN (Y)FAN (Y)POWER SOURCE COOLING FAN (Y)PRINTED CIRCUIT COOLING FAN (Y)PRINTED CIRCUIT COOLING FAN (Y)INVERTER (Y)NEON LAMP (Y)LINEAR MOTOR (Y)LINEAR MOTOR (Y)ARM S1.RELAY (Y)AUX.7A TK-ON 0.48A G8B-4BND COIL DC24V FKT-10 ORE-C7L RBJ-12B-03 KH0239-01 E2E-X14MD1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 10 20 1 5 4 1 1 1 1 1 1 1 1 1 2 20 1 3 3 1 1 1 1 6 1 1 1 1 1 1 1 1 1 1 10 1 LOC VENDOR D33 D33 D33 D33 D33 D26 A103 D26 B73 B72 B73 B72 B73 D32 D32 D32 D25 D32 T44 D32 D32 T44 D32 Z11 D26 Y22 D26 W15 D32 D32 W15 D33.95A TK-ON 0.

Y DRIVER BOAR (Y)5"DRIVER BD X.RUBBER SPRING (Y)1-PORT TRANSCEIVER (Y)ULPA FILTER UNIT (Y)VACUUM PUMP (Y)RUBBER FOR VIBRAT (Y)FLOATING WHEEL (Y)ASS'Y CABLE PCAT (Y)CENTER STAGE BOAR (Y)REAR STAGE BOARD (Y)COUNTER NON RESET (Y)MOTOR Y-TROLLEY (Y)ASS'Y SHUTTERSOLE (Y)DESICCANT CARTRID JIG ALIGN FLAT ALIGER SENSOR (Y)5"X.No Item no 5379 3940S-005 5380 3940S-009 5381 3940S-010 5382 3940S-011 5383 3940S-013 5384 3940S-016 5385 3940S-042 5386 3940S-047 5387 3940S-050 5388 3940S-054 5389 3940S-082 5390 3940S-101 5391 3940T-021 5392 3940U-011 5393 3940V-001 5394 3940V-021 5395 3940W-001 5396 3941B-008 5397 3941B-022 5398 3941B-023 5399 3941C-003 5400 3941M-012 5401 3941S-013 5402 3944C-006 5403 3944S-006 5404 3945B-001 5405 3945D-002 5406 3945M-002 5407 3945M-003 5408 3945S-001 5409 3981A-001 5410 3981A-004 5411 3981A-005 5412 3981B-002 5413 3981B-006 5414 3981B-011 5415 3981B-059 5416 3981B-060 5417 3981B-061 5418 3981B-102 5419 3981B-103 5420 3981B-104 5421 3981B-105 5422 3981C-002 5423 3981C-004 5424 3981C-008 5425 3981C-010 5426 3981C-011 5427 3981C-012 5428 3981C-013 5429 3981C-014 5430 3981D-001 5431 3981D-004 장비명 INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA INTER & INTRA NANOSPEC NANOSPEC NANOSPEC NANOSPEC PROMETRIX PROMETRIX ELLIPSOMETER ELLIPSOMETER ELLIPSOMETER ELLIPSOMETER ELLIPSOMETER PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART DESCRIPTION (Y)PHOTO I/O DEVICE BEAM SENSOR (Y)PHOTO I/O (Y)PHOTO I/O (Y)MAGNETIC GUIDE SENSOR (Y)GREASE FOR HEIGHT CONTROL S (Y)PUSH BUTTON SWITCH (Y)PHOTO ELECTRIC SWITCH (Y)PHOTO ELECTRIX SWITCH (Y)EMERGENCY BUTTON (Y)ARM S2 STARTING POINT LS (Y)SUSPEN SPRING.Z F (Y)5"ANALYZER MOTOR (Y)5"STEPPING MOTOR FAST STAGE 5"VACUUM SENSOR (X) ASB LEVER CHEMICAL (X) AMELLER (X) ARTICLE (X) ROTATIONAL LOCK BEARING (X) ROLLER BEARING (X) BEARING (X) OIL PUMP BLADE (X) BLADE HV (X) BLADE HV (X) SPACER BAR (X) SIGHT GLASS BEZEL (X) INT PLATE BUSH (X) REAR PLATE BUSH 2008AC-12 (X) CIRCSI-SALTERFIX CODE MAINTENANCE KIT (X) CAST IRON CAM (X) STEEL CAM 61606416 OIL CASE (X) S.55/2 AOLS-22611DN-W PJ7-T3 PJ7-T7 K-11-7-2 K-11-6-2 L-2-4-2 TYPE-I VP0625 MN-10 1400095819700 8400-0897 8200-0360 8200-0363 9407-0012 9072-0117 7200-1805 28-0086 07-0049 E9A281 E90170 E9A170 E9A291 E9A400 52700 52721 054401 99-104-0045 A204-04-016 61605306 14-A204-02-098 A20402152 A20102091 231-92-160 A20416002 52651 52649 A224-26-004 L-10-7-2 N-1-2-2 L-3-5-1 L-3-5-1 N-8-2-3 N-8-2-3 A-3-5 B-4-4-1 N-8-2-3 M-6-4-1 M-6-4-1 E-1-4 M-3-3 1400092393700 E68 M-24706 14-A365-01-800 61606415 61606416 A52546 C105-14-285 231-05-108 14-A271-59-416 수량 1 3 2 2 2 1 2 1 10 2 1 4 1 2 1 8 2 1 2 3 3 1 1 2 1 1 1 1 1 3 10 5 4 10 5 1 5 20 8 6 2 9 19 8 1 2 1 1 1 3 12 15 1 LOC VENDOR D32 D32 D32 D32 D32 D32 D32 D32 D32 D32 D32 D32 D32 D25 D31 A103 W15 Q14 V33 V33 Q14 P55 B16 Q43 Q43 Q15 Q15 Q13 P24 Q15 AA73 AA73 AA73 AA73 AA73 AA73 AA73 AA73 AA73 AA73 AA73 AA73 AA73 AA73 AA84 AA71 AA84 AA84 AA84 AA73 AA73 AA73 AA73 " " " FA " " " " " " " " " " " FA " " " M-21 " " " SM300 " PLASMOS " " PLASMOS " . FLEXIBLE CONNECXION (X) KE25 CLAMP (X) RETINER DISK (X) DISAPHRAGN LOCATION VENDOR PART NO K-10-5-1 K-10-5-1 K-10-5-1 K-10-5-1 K-10-5-1 K-10-5-1 K-10-5-1 K-10-5-1 K-10-5-1 K-10-5-1 K-10-5-1 K-10-5-1 DM-HB1 1400092398100 DM-MB1 1400092398600 AVS-M-1 1.

No Item no 장비명 5432 5433 5434 5435 5436 5437 5438 5439 5440 5441 5442 5443 5444 5445 5446 5447 5448 5449 5450 5451 5452 5453 5454 5455 5456 5457 5458 5459 5460 5461 5462 5463 5464 5465 5466 5467 5468 5469 5470 5471 5472 5473 5474 5475 5476 5477 5478 5479 5480 5481 5482 5483 5484 3981D-005 3981D-007 3981D-008 3981D-009 3981F-003 3981F-004 3981F-006 3981F-008 3981F-009 3981F-012 3981G-001 3981G-002 3981G-002 3981G-006 3981G-007 3981G-008 3981G-009 3981G-010 3981G-012 3981G-013 3981G-014 3981G-015 3981G-017 3981G-018 3981G-019 3981G-020 3981G-021 3981G-022 3981G-023 3981G-025 3981G-026 3981G-027 3981G-028 3981G-029 3981G-030 3981G-031 3981G-033 3981G-034 3981G-035 3981G-037 3981G-038 3981G-054 3981G-055 3981G-057 3981G-058 3981G-059 3981G-104 3981G-104 3981G-106 3981G-107 3981G-109 3981H-001 3981H-002 PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART DESCRIPTION (X) DISTRIBUTOR WEIGHT (X) VALVE DISK (X) VACUUM SEALING DISK (X) VALVE DISK (X)FILTER ASS'Y (INLET) (X)FELT BALLAST FILTER (X)FLTER ELEMENT (X)FILTER (X)FILTER (X)SPRING FILTER (X) OIL GASING GASKET (X) GASKET SET (X) GASKET SET (X) KNITMESH GASKET (X) END PLATE GASKET (X) DISTRIBUTOR GASKET (X) FLAT GASKET (X) FLAT GASKET (X) GASKET (X) GASKET (X) GASKET (X) GASKET (X) BALLAST GASKET (X) FLAT GASKET (X) BODY GASKET (X) LID GASKET (X) FLAT GASKET (X) BODY GASKET (X) DISCHARGE GASKET (X) RESERVOIR GASKET (X) FLAT GASKET (X) FLAT GASKET (X) GASKET (X) GASKET (X) GASKET (X) GASKET 23955172 (X) CASE GASKET (X) CASE GASKET (X) CASE GASKET (X) CASE GASKET (X) CASE GASKET (X) SIGHT GLASS (X) SHAFT GLASS (X) SIGHT GLASS ASSY (X) SIGHT GLASS (X) SIGHT GLASS (X) SIGHT GLASS (X) SIGHT GLASS (X) OIL LEVEL SIGHT GLASS (X) SIGHT GLASS (LEBYOLD) (X) PRESSURE GUAGE (X) PISTON RING HOLDER (X) PISTON RING HOUSING LOCATION J-4-3-2 M-3-3 J-4-3-2 J-4-3-2 J-4-3-2 J-4-3-2 J-4-3-2 J-4-3-2 J-4-3-2 J-4-3-2 J-4-3-2 J-4-3-2 J-4-3-2 J-4-3-2 J-4-3-2 J-4-3-2 J-4-3-2 J-4-3-2 J-4-3-2 J-4-3-2 J-4-3-2 J-4-3-2 VENDOR PART NO A34301037 40050139 882-56-B1 40050137 A223-05-035 A223-05-41 140-A223-04-032 22302016 14-A223-02-006 22162142 52755 19371S 19371S 14-A271-59-627 14-A271-59-621 14-A271-39-413 239-55-165 23375135 61400534 23955174 61608409 61200640 A27159614 23925225 14-A271-59-423 14-A271-59-624 23973137 A27159428 A27159620 427-749-1 23820156 23925226 239-55-174 616-08-409 616-00-640 23955172 54128 23820158 23955420 72590000 72590001 22680139 226-80-140 2001003 29201004 A01601089 085-38-008 085-38-008 83546 LH720 00 115 H01900016 431-31-293 331-88-122 수량 10 12 1 19 1 14 1 28 5 19 30 1 1 5 4 1 7 1 5 1 1 6 5 25 15 3 2 5 5 2 10 2 2 1 5 3 10 1 1 20 10 1 4 4 14 5 5 1 5 3 5 2 2 LOC AA74 AA73 AA73 AA73 AA73 AA73 AA84 AA73 AA73 AA73 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 VENDOR .

3 (X) O-RING(LEYBOLD) VITON 122 (X) O-RING (LEYBOLD) (X) O-RING KE25 (X) RETAINING PLATE (X) VALVE PLATE (X) VALVE PLATE (X) VALVE PLATE (X) VALVE PLATE (X) VALVE PLATE (X) VALVE PLATE (X) VALVE PLATE (X) VALVE PLATE LOCATION M-6-2-1 N-1-3-3 N-1-3-3 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 VENDOR PART NO 71161 53474 627-03-425 616-06-409 14-A204-02-091 627-03-411 28153102 52750 28153101 424-077-1 424-078-1 58550 99215133M 82033 82056 82056 H021-20-097 14-H021-20-033 14-H021-20-037 08-H021-20-067 08-H021-25-050 08-H021-25-055 H021-26-047 02120112 14-H021-20-011 23963111 H02130101 J-4-3-2 D-2-2-2 D-2-2-2 N-1-3-3 N-1-3-3 N-1-3-3 N-1-3-3 N-1-3-3 N-1-3-3 085-38-990 23970506 23970117 72591000 239-70-415 239-70-403 H02125260 H02120165 79030 82122 LH239 70 411 LH239 70 147 14-A223-08-004 40164114 40164114 40164125 40164125 40164125 40164124 40050135 40164116 수량 22 2 1 2 5 2 2 35 9 1 1 3 2 1 15 2 10 57 15 15 12 9 5 8 16 8 1 30 5 15 10 23 20 14 2 7 4 25 15 25 29 90 8 11 1 19 15 10 30 20 16 12 2 LOC AA73 AA73 AA74 AA73 AA73 AA74 AA73 AA73 AA73 AA84 AA84 AA73 AA73 BB34 AA75 AA73 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA74 AA73 AA75 AA75 AA75 AA75 AA73 AA73 AA73 AA75 AA75 AA75 AA75 AA75 AA73 AA73 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 VENDOR .6-D29.No Item no 장비명 5485 5486 5487 5488 5489 5490 5491 5492 5493 5494 5495 5496 5497 5498 5499 5500 5501 5502 5503 5504 5505 5506 5507 5508 5509 5510 5511 5512 5513 5514 5515 5516 5517 5518 5519 5520 5521 5522 5523 5524 5525 5526 5527 5528 5529 5530 5531 5532 5533 5534 5535 5536 5537 3981I-001 3981J-002 3981K-001 3981K-002 3981L-002 3981L-004 3981L-005 3981L-007 3981L-008 3981M-004 3981M-005 3981M-007 3981M-011 3981M-108 3981O-001 3981O-002 3981O-002 3981O-020 3981O-021 3981O-023 3981O-024 3981O-032 3981O-033 3981O-035 3981O-039 3981O-044 3981O-057 3981O-059 3981O-060 3981O-062 3981O-072 3981O-074 3981O-075 3981O-077 3981O-082 3981O-086 3981O-090 3981O-092 3981O-096 3981O-100 3981O-103 3981O-105 3981O-110 3981O-119 3981P-003 3981P-008 3981P-008 3981P-009 3981P-009 3981P-009 3981P-010 3981P-011 3981P-012 PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART DESCRIPTION (X) STOP NUT (X) OIL JET (X) KEY (X) KEY (X) HV LADE (X) OIL LEVEL EQUALIZATION (X) LEVER (X) EQUIPPED LEVER (X) LEVER MAJOR KIT MINOR PARTS KIT (X) MAJOR MAINTENANCE KIT (X) MOTOR FOR 60AC VACUUM PUM (X) O-RING VITON (X) O-RING (X) O-RING (X) O-RING 1395-30 (X) O-RING (X) O-RING (X) O-RING (X) O-RING (X) O-RING (X) O-RING (X) O-RING (X) O-RING (X) O-RING 23963111 (X) O-RING (X) O-RING (X) O-RING (X) O-RING (X) O-RING (X) O-RING (X) O-RING (X) O-RING (X) O-RING (X) O-RING (X) O-RING H02125260 (X) O-RING H02120165 (X) O-RING (X) O-RING C3.

No Item no 장비명 5538 5539 5540 5541 5542 5543 5544 5545 5546 5547 5548 5549 5550 5551 5552 5553 5554 5555 5556 5557 5558 5559 5560 5561 5562 5563 5564 5565 5566 5567 5568 5569 5570 5571 5572 5573 5574 5575 5576 5577 5578 5579 5580 5581 5582 5583 5584 5585 5586 5587 5588 5589 5590 3981P-012 3981P-014 3981P-071 3981P-072 3981P-074 3981P-075 3981P-076 3981P-082 3981P-101 3981P-102 3981P-103 3981P-104 3981P-108 3981R-003 3981R-006 3981R-007 3981R-053 3981R-054 3981R-056 3981R-057 3981R-058 3981R-060 3981R-061 3981R-062 3981R-063 3981R-064 3981R-101 3981R-104 3981R-110 3981R-111 3981R-111 3981S-001 3981S-002 3981S-003 3981S-006 3981S-007 3981S-008 3981S-009 3981S-010 3981S-011 3981S-013 3981S-014 3981S-015 3981S-016 3981S-017 3981S-051 3981S-052 3981S-054 3981S-055 3981S-056 3981S-058 3981S-059 3981S-060 PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART DESCRIPTION (X) VALVE PLATE (X) VALVE PLATE (X) VALVE PIN (X) PIN (X) TAPERED DOWEL PIN (X) TAPER PIN 14 212 19 2026 (X) PIN LEYBOLD S60AC (X) GAS BALLAST PISTON (X) LOW PRESSURE POTR (X) EXHAUST PORT (X) PISTON (X) PISTON (X) EXHAUST VALVE RUBBER (X) DISCHARGE VALVE RUBBER (X) EXHAUST VALVE RUBBER (HV) (X) COMPRESSION RING (X) CENTERING RING (X) SPLASH RING (X) PISTON RING (X) RETAINER RING (X) RETAINER RING (X) RING (X) RETAINER RING (X) SPACER RING (X) SPACER RING (X) SEAL RETAINER (X) PISTON RING DIA (X) HIGH PRESSURE ROTOR (X) NW40/25 REDUCING PIECE S (X) NW40/25 REDUCING PIECE S (X) VALVE SPRING (X) GAS BALLAST SPRING (X) SPRING (X) SPRING (X) OIL PUMP SPRING (X) SPRING (X) EXHAUST VALVE SPRING (X) SPRING (X) ADJUSTMENT SPRING (X) SPRING (VANES) (X) SPRING (X) VANE SPRING (X) SPRING OIL FEED (X) SHAFE SEAL (VITON) (X) VALVE PLATE (X) SHAFT SEAL (X) RADIAL SHAFT SEAL (X) FILTER SEAL (X) DOWTY S4AL 1/8" BSP (X) DOWTY SEAL 1" BSP (X) DOWTY SEAL 11/4" BSP LOCATION N-1-3-3 N-1-3-3 N-1-3-3 N-1-3-3 N-1-3-3 H-1-3 N-1-3-3 N-1-3-3 N-1-3-3 N-1-3-3 N-1-3-3 N-1-3-3 N-1-3-3 N-1-3-3 N-1-3-3 N-1-3-3 N-1-3-3 N-1-3-3 N-1-3-3 N-1-3-3 N-1-3-3 N-1-3-3 N-1-3-3 N-1-3-3 N-1-3-3 N-3-2-4 N-3-2-4 J-4-3-2 J-4-3-2 D-2-2-2 N-4-2-3 VENDOR PART NO 40164116 A52422 52641 71040 241-30-107 14 212 19 2026 52583 10165 52644 52509 52752 32106104 32106131 A271-59-514 14-A271-59-505 A27159503 627-03-426 18322 231-52-110 231-79-259 231-04-145 23103104 23970156 23103111 231-921-60 231-521-10 14-A259-71-002 23179256 A52715 C105-16-449 C105-16-449 52541 52563 A27-02-012 A271-02-013 A271-02-024 A271-02-027 14-A271-02-033 22161236 614-00-750 085-39-480 22162141 53040 085-39-8 82063 54340 23953142 23953110 A014-03-030 H021-04-001 H021-04-008 H021-04-009 수량 11 2 2 8 6 7 10 1 2 1 2 8 10 59 13 2 4 2 4 38 4 4 2 14 2 4 10 47 7 1 1 10 4 1 6 6 2 6 5 1 2 31 10 35 3 49 2 19 13 26 12 6 6 LOC AA74 AA74 AA74 AA74 AA74 AA74 AA74 BB44 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA74 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA74 AA74 A75 A75 A75 A75 A75 A75 A75 A75 VENDOR .

62 THK (X) ARBOR SHIM . LIPSEAL-72X55X 10M (X) DUAL SEAL 22302009 (X) DUAL SEAL 22302009 (X) OIL SEAL 14 H021 09 064 DUST SEAL 14 A22 (X) SHAFT SEAL (X) SHAFT SEAL (X) T.E.E LIP SEAL (X) SPIRO SEAL (X) OIL SEAL (X) EXHAUST VLVE SPACER (X) SHIM 0.15 THK LOCATION D-2-2-2 N-4-2-3 VENDOR PART NO H021-04-012 14-H021-09-069 14-H021-09-070 22302005 14-H021-04-004 J-4-3-2 23811142 02109052 22302008 40527 H02109076 23973131 23953423 23953423 H02104022 085-39-187 085-37-861 J-4-3-2 J-4-3-2 J-4-3-2 23953420 H02109050 H02109050 H02109050 J-4-3-2 N-4-2-3 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 22302009 22302009 14 H021 09 064 14 A223 02 005 83645 79101 H02109054 02109048 H02109607 A278-04-004 14-A271-65-008 14-A271-65-010 14-A271-65-009 14-A271-65-011 14-A271-65-001 14-A271-65-002 20013080 27027105 16745 22105147 22105148 22105149 98-264-002 373658107 427-607-4 427-608-1 425-390-1 085-38-843 085-38-844 수량 12 10 11 2 15 2 14 15 12 4 10 40 12 4 5 8 4 30 8 25 4 4 2 1 7 4 15 1 40 29 8 11 15 55 10 10 10 10 5 5 1 1 1 10 5 5 2 4 4 2 6 12 10 LOC A75 A75 A75 A75 A75 A75 AA74 A75 A75 A75 A75 A75 A75 A75 AA74 AA75 AA74 AA75 AA75 AA75 AA74 AA75 AA75 AA75 AA75 AA75 AA75 AA84 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 VENDOR .2MM THICK (X) SNIM (X) SNIM (X) SNIM (X) SNIM (X) SNIM (X) ELASTIC SHIMPS (X) SLEEVE DU (X) VACUUM SEALING DISK DN50 (X) SHIM DIA (X) SHIM DIA (X) SHIM DIA (X) SHIM SET (X) VALVE STOP (X) 1ST STAGE VANES (X) 2ND STAGE VANES (X) SEAL ASSM REPLACES (X) ARBOR SHIM .F.No Item no 장비명 5591 5592 5593 5594 5595 5596 5597 5598 5599 5600 5601 5602 5603 5604 5605 5606 5607 5608 5609 5610 5611 5612 5613 5614 5615 5616 5617 5618 5619 5620 5621 5622 5623 5624 5625 5626 5627 5628 5629 5630 5631 5632 5633 5634 5635 5636 5637 5638 5639 5640 5641 5642 5643 3981S-061 3981S-067 3981S-068 3981S-069 3981S-071 3981S-073 3981S-077 3981S-078 3981S-082 3981S-084 3981S-085 3981S-086 3981S-087 3981S-087 3981S-088 3981S-090 3981S-091 3981S-093 3981S-094 3981S-095 3981S-096 3981S-096 3981S-096 3981S-097 3981S-098 3981S-098 3981S-099 3981S-102 3981S-103 3981S-110 3981S-111 3981S-112 3981S-113 3981S-151 3981S-153 3981S-154 3981S-155 3981S-156 3981S-157 3981S-158 3981S-162 3981S-163 3981S-164 3981S-165 3981S-166 3981S-167 3981S-168 3981S-177 3981S-183 3981S-184 3981S-185 3981S-186 3981S-187 PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART DESCRIPTION (X) DOWTY SEAL 2BA (X) OIL SEAL (X) OIL SEAL (X) DUST SEAL (X) SEAL (X) SEALEND (X) SEAL (X) OIL SEAL (X) DUST SEAL (X) SPIRO SEAL DPSM (X) SPIRO SEAL (X) SEAL (LEVER) (X) SHAFT SEAL (X) SHAFT SEAL (X) SEAL (X) OIL SEAL (FRONT PLATE) (X) OIL SEAL (X) RADIAL SHAFT SEAL (X) SPIRO SEAL-DPSM40527 (X) SPIRO SEAL-DPSM40527 (X) SPIRO SEAL-DPSM40527 (X) T.F.

D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 E-1-4 VENDOR PART NO 085-38-845 085-38-846 085-38-847 085-38-831 50036128 50036128 50036147 16406 (WS) 627314841 62733509 218985237 70100196 98264002 410-70-116 627-02-412 189-27-112 43131177 43131174 70100259 52655 52655 350-20-158 A259-04-601 52557 52562 53443 83945 41155116 41155154 53106 A83945 87941 87996 54451 83106 221-49-207 221-82-211 218984728 085-37-653 H02109049 H02109051 C4-2GN-1 C4-4GN-1 FC4-2GN-1 FC4-4GN-1 E4-2GN-1 E4-4GN-1 FE4-2GN-1 FE6-4GN-1 UE4GN-1 UE6GN-1 UE6-4GN-1 UE8-4GN-1 수량 10 10 10 10 7 1 5 1 1 1 30 4 10 2 4 1 5 5 1 20 13 8 2 10 20 20 16 6 18 58 2 13 12 8 10 10 8 28 8 7 8 15 10 9 15 25 4 15 15 5 7 10 10 LOC AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA84 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA71 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 AA75 O71 O71 O71 O71 O71 O71 O71 O71 O71 O72 O72 O72 VENDOR .003 THK (X) ARBOR SHIM .No Item no 5644 3981S-188 5645 3981S-189 5646 3981S-190 5647 3981S-191 5648 3981S-192 5649 3981S-192 5650 3981S-193 5651 3981S-194 5652 3981S-195 5653 3981S-196 5654 3981S-197 5655 3981S-198 5656 3981S-200 5657 3981T-001 5658 3981T-002 5659 3981T-003 5660 3981T-004 5661 3981T-005 5662 3981T-006 5663 3981V-002 5664 3981V-002 5665 3981V-005 5666 3981V-006 5667 3981V-009 5668 3981V-010 5669 3981V-011 5670 3981V-051 5671 3981V-054 5672 3981V-055 5673 3981V-057 5674 3981V-058 5675 3981V-059 5676 3981V-060 5677 3981V-061 5678 3981V-062 5679 3981W-001 5680 3981W-002 5681 3981W-003 5682 3981W-004 5683 3981W-005 5684 3981W-006 5685 3986F-001 5686 3986F-002 5687 3986F-003 5688 3986F-004 5689 3986F-005 5690 3986F-006 5691 3986F-009 5692 3986F-010 5693 3986F-011 5694 3986F-012 5695 3986F-014 5696 3986F-015 장비명 PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART PUMP PART WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION DESCRIPTION (X) ARBOR SHIM . D-2-2-2 J-4-3-2.032 THK (X) CENTRIFUGAL S/W (X) CENTRIFUGAL S/W (X) CENTRIFUGAL S/W SM-42 DIAPHRAGM (X) SHIELD RETAINER (X) SHAFT BUSHING SLEEVE (X) DISC SPRING TYPE K6013 (X) SAPCER (X) SHIM SET (X) DIRT TRAP (X) OIL LEVEL EQUALIZATION TU (X) RUBBER TRIM (X) AIR INLET TUBE (X) AIR INLET TUBE SLEEVE TOOL (X) VALVE (X) VALVE (X) VALVE (X) BALLAST VALVE (X) EXHAUST VALVE (X) GAS BALLAST VALVE (X) VALVE (X) LOW PRESSURE VANE (X) VANE (X) VANE (X) LOW PRESSURE VANE (X) LOW PRESSURE VANE (X) LOW PRESSURE VANE (X) HIGH PRESSURE VANE (X) OIL PUMP VANE (X) LOW PRESSURE VANE (X) RETAINER WASHER (X) SPRING WASHER (X) PRELOAD WHVED WASHER (X) WAVE WASHER (X) BACK UP WASHER (X) 3401 AUP WASHER (Y)1/4 1/8 MALE CONECTORS 1/4 1/4 MALE CONECTORS 1/4 1/4 FEMALE CONECTOR (Y)1/4 1/4 FEMALE CONECTOR (Y)1/4 1/8 MALE ELBOW 1/4 1/4 MALE ELBOW (Y)1/4 1/8 FEMALE ELBOW (Y)3/8 1/8 FEMALE ELBOW (Y)1/4 UNION ELBOW (Y)3/8 UNION ELBOW (Y)3/8 1/4 UNION (Y)1/2 1/4 UNION ELBOW LOCATION D-2-2-2 D-2-2-2 D-2-2-2 D-2-2-2 J-4-3-2.005 THK (X) ARBOR SHIM .010 THK (X) ARBOR SHIM .

No Item no 장비명 5697 5698 5699 5700 5701 5702 5703 5704 5705 5706 5707 5708 5709 5710 5711 5712 5713 5714 5715 5716 5717 5718 5719 5720 5721 5722 5723 5724 5725 5726 5727 5728 5729 5730 5731 5732 5733 5734 5735 5736 5737 5738 5739 5740 5741 5742 5743 5744 5745 5746 5747 5748 5749 3986F-016 3986F-020 3986F-021 3986F-022 3986F-025 3986F-026 3986F-027 3986F-028 3986F-029 3986F-030 3986F-031 3986F-034 3986F-035 3986F-037 3986S-001 3989B-001 3989B-003 3989B-021 3989C-002 3989C-003 3989C-021 3989F-001 3989F-003 3989F-004 3989F-004 3989F-005 3989G-003 3989G-004 3989G-006 3989G-007 3989G-010 3989G-011 3989G-012 3989G-013 3989P-004 3989S-002 3989S-021 3989S-022 3989S-061 3989V-001 3989V-004 3989V-005 3989V-006 3989V-007 3989V-009 3989V-010 3989V-011 3989V-020 3989V-021 3993B-011 3993D-012 3993I-004 3993L-001 WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION WET STATION GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET GAS CABINET FURNACE FURNACE FURNACE FURNACE DESCRIPTION 1/2 3/8 UNION ELBOW (Y)3/4 STRAIGHT UNION 3/8 1/4 STRAIGHTUNION 1/2 3/8 STRAIGHT UNION (Y)1/4 X UNION TEE (Y)3/8 UNION TEE (Y)1/2 UNION TEE (Y)1/2 1/2 3/8 BRANCH TEE (Y)1/2 1/2 1/2 BRANCH TEE (Y)1/2 1/2 1/2 BRANCH TEE (Y)1/4 NUT (Y)1/2 MANUAL D VALVE (Y)3/8 (N/C) PNEUMAT VALVE (Y)1/2 ORIFICE CHUCK VALVE (Y)CYLINDER SENSOR (Y)5"CKT BOARD (Y)5"CKT BOARD (Y)5"JCT BOX (Y)5"CNTLR GSM-5 (Y)5"CNTLR GSM-5 (Y)5"CORDSET (Y)5"FILTER MOD 4VI (Y)5"FILTER (Y)5"FILTER (Y)5"FILTER (X)FILTER ACID SCRUBBER (Y)5"GAUGE GRP (Y)5"GAUGE GRP (Y)5"GAUGE GRP (Y)5"GAUGE GRP (Y)5"GAUGE GRP PRESS (Y)5"GAUGE GRP PRESS (Y)5"GAUGE GRP (Y)5"GAUGE GRP (Y)5"PIGTAIL MANIFOL (Y)5"MNTR SCALE (Y)FLOW SENSOR (Y)5"FLOW SENSOR (Y)5"FLOW SENSOR (Y)5"VALVE BALL (Y)5"VALVE MOD (Y)5"RLF VALVE GRP (Y)5"CHK VALVE (Y)5"CHK VALVE (Y)5"CHK VALVE (Y)5"CHK VALVE (Y)5"CHK VALVE (Y)5"VALVE MOD (Y)5"SOLENOID VALVE BAFFLE SHELL DUST COVER(L. L-10-7-3 SLF-HV4-EP L-10-7-3 710235 C-4-4-1 1015-0053 C-4-4-1 1015-0054 L-10-7-3 1015-0032 C-4-4-1 1015-0033 C-4-4-1 1015-0051 C-4-4-1 1015-0052 L-10-7-3 1015-0029 C-4-4-1 1015-0030 C-3-1 CGA J1S 0081-0094 G-2-4-1 1030-0035 G-2-4-1 1030-0036 G-2-4-1 1030-0033 C-4-4-1 0401-0120 0032-0411 N-3-1-4 1011-0001 L-10-7-3 0401-0073 L-10-7-3 0401-0072 N-1-3-2 0401-0074 N-1-3-2 0401-0013 L-10-7-3 0032-0548 L-10-7-3 0032-0361 L-10-7-3 0701-0012 K-9-6-1 HSDF-3020 K-9-6-1 HSDF-2119 HSDF-3076 HSDF-3008 수량 10 7 5 8 5 4 10 20 20 20 9 5 7 5 4 1 1 1 2 1 1 1 2 1 1 6 1 1 1 2 1 1 1 2 2 1 2 1 2 2 1 3 1 2 1 2 1 2 4 1 2 10 1 LOC VENDOR O72 O72 O72 O74 O74 O74 O73 O73 O73 O73 O73 O73 O73 O74 O74 T12 T12 Q41 Q63 Q64 Q11 Q11 Q11 Q11 Q22 Q11 Q22 Q22 Q11 Q22 Q22 Q22 Q11 Q22 Q61 Q62 R62 R62 R62 Q22 Q22 Q44 Q11 Q11 B16 B16 Q11 Q11 Q11 H14 H14 Y11 Y11 BTU " " KOKUSAI .H) (B)POLY ON INJECTOR LINER(FCC) LOCATION VENDOR PART NO UE8-6GN-1 SU12GN-1 SU6-4GN-1 SU8-4GN-1 UT4GN-1 UT6GN-1 UT8GN-1 BT8-6GN-1 BT8-8GN-1 RT8-8GN-1 GN4-1 201-47 202-71 206-0855 M-6-2-1 CS3B B-1-3-4 0085-0021 B-1-3-4 0085-0042 D-13-4 0088-0010 L-10-1 0081-0243 J-3-3 0081-0277 L-10-7-3 0603-0009 L-10-7-3 0403-0001 L-10-7-3 SHF-V4 C-4-4-1. L-10-7-3 SLF-HV4-EP C-4-4-1.

N-3-2-1 N-2-5-3. N-3-2-1 N-2-5-3.No Item no 장비명 5750 5751 5752 5753 5754 5755 5756 5757 5758 5759 5760 5761 5762 5763 5764 5765 5766 5767 5768 5769 5770 5771 5772 5773 5774 5775 5776 5777 5778 5779 5780 5781 5782 5783 5784 5785 5786 5787 5788 5789 5790 5791 5792 5793 5794 5795 5796 5797 5798 5799 5800 5801 5802 3993S-025 3993S-061 3993T-002 3993T-005 3993T-019 3994E-002 3994T-020 3995E-102 3996A-901 3996A-902 3996A-907 3996B-001 3996B-002 3996B-006 3996B-008 3996B-013 3996B-015 3996B-022 3996B-025 3996B-027 3996B-031 3996B-032 3996B-034 3996B-037 3996B-038 3996B-039 3996B-041 3996B-042 3996B-044 3996B-044 3996B-050 3996B-051 3996B-052 3996B-053 3996B-057 3996B-058 3996B-065 3996B-066 3996B-067 3996B-068 3996B-069 3996B-070 3996B-071 3996B-075 3996B-076 3996B-081 3996B-083 3996B-101 3996B-181 3996B-193 3996B-194 3996B-195 3996B-199 FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE FURNACE COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON DESCRIPTION SENSOR(KOYO) SHUTTER(KOYO) PROCESS TUBE(KOYO) PROCESS TUBE(PYRO-R) (B)INNER TUBE Q'TZ ELBOW TORCH(B) TUBE(HI-TEMP) GAS EXHAUST(R. 16 RTV COATING (3 FL OZ PERMABOND (1 OZ) BEARING BEARING (Y)BEARING (Y)BEARING (Y)BEARING (Y)BEARING (Y)BEARING (Y)BEARING BEARING (Y)BEARING (Y)BEARING (Y)BEARING (Y)BEARING BEARING (Y)BEARING BEARING BEARING (Y)BEARING (Y)BEARING (Y)BEARING (Y)BEARING (Y)BEARING (Y)BEARING (Y)BEARING (Y)BEARING (Y)BEARING (Y)BEARING (Y)BEARING (Y)BEARING (Y)BEARING (Y)BEARING (Y)BEARING BEARING (Y)BEARING (Y)BEARING (Y)BEARING (Y)BEARING TIMING BELT TIMING BELT TIMING BELT TIMING BELT TIMING BELT LOCATION N-1-1-2 I-1-2 VENDOR PART NO HSDF-3044 HSDF-3043 HSDF-3047 HSDF-3055 HSDF-3031 I-1-3 I-1-3 I-5-1 N-2-4-4 N-2-4-4 N-3-2-1 N-3-2-1 N-3-2-1 N-3-2-1 N-1-2-1 N-3-2-1 N-2-5-3 N-3-2-1 N-3-2-1 N-1-2-1 N-3-2-1 M-6-4-1 M-6-4-1 M-6-4-1 M-6-4-1 N-2-5-3. N-3-2-1 N-2-4-4 N-2-4-4 N-1-2-1 N-3-1-1 N-1-2-1 N-1-2-1 N-2-5-3 N-3-2-1 N-3-2-1 N-1-2-1 N-2-5-3 N-1-2-1 L-9-2 N-3-1-1 L-6-4-3 N-3-2-1 N-3-2-1 HSDR-2002 HSDF-4038 1-2577 3140 RTV 910 ADHESIVE SFR-188 SR-166 B2-14 JJ-6 SA-4 SSRF-1560ZZ LR-6 R12H401 SSR-2ZZ SSR-2280HH 6007 ZZ/2AUI 6301Z 72028 7203DB 689ZZ(1790ZZ) A4812 A61014 A81420SS A81420SS SUPER-6 SUPER-8 SUPER-24 SUPER 16 R-12-ZZ R-20-ZZ B-47 B-59 B-85 GB-47 HJ122016 J-812 RA008RR+COL TRB411 NTA411 KAA10AGO KAA15XLO MF85ZZS(F850ZZ) 6B3-055037 6B6-081025 6B6-100025 6B6-214025 6B6-392025 수량 3 1 4 1 1 1 1 2 5 1 2 93 30 19 1 2 6 6 1 34 16 5 2 4 10 10 9 21 6 5 1 6 15 4 5 14 6 4 4 2 30 16 10 200 20 5 1 10 2 4 5 3 1 LOC VENDOR H14 H14 Y11 Y11 Y11 H15 Y11 H15 O57 N43 N43 N12 N12 N12 N12 N12 N12 N12 N13 N12 N12 N12 N12 N13 N12 N12 N13 N12 N12 N12 N43 N13 N11 N11 N12 N11 N12 N13 N12 N12 N11 N11 N11 N11 N11 N12 N12 N12 N21 N21 N21 N21 N21 " " " KOKUSAI " THERMCO " TEL .H:PYRO) (Y)COATING SPRAY.

O65 N12 N12 N12 N12 N12 N12.5 N-3-1-1 D-21839-A-2.75-4R-M N-3-1-1 MRS-023-DXDEZ N-3-1-1 MRS-041-D N-3-1-1 MRS-042-DXDEZ 수량 24 3 3 9 9 1 10 6 2 2 7 8 5 5 2 9 5 14 13 7 5 5 3 1 19 1 1 1 8 6 2 5 1 1 1 4 8 4 4 2 2 5 2 8 1 1 6 5 5 1 1 2 7 LOC N21 N21 N21 N21 N21 N21 N21 N21 N21 N21 N21 N21 N21 N21 N21 N21 N21 N21 N21 N21 N21 N21 N21 N21 N21 N21 N21 N21 N13 N12.5-DXDE 021.5-DP N-3-1-1.O65 N12 N12.O65 N12 N12 N12 N12 N12 N12 N12 N12 N12 VENDOR .O65 N12.No Item no 장비명 5803 5804 5805 5806 5807 5808 5809 5810 5811 5812 5813 5814 5815 5816 5817 5818 5819 5820 5821 5822 5823 5824 5825 5826 5827 5828 5829 5830 5831 5832 5833 5834 5835 5836 5837 5838 5839 5840 5841 5842 5843 5844 5845 5846 5847 5848 5849 5850 5851 5852 5853 5854 5855 3996B-203 3996B-204 3996B-206 3996B-208 3996B-209 3996B-210 3996B-213 3996B-214 3996B-215 3996B-216 3996B-217 3996B-218 3996B-219 3996B-220 3996B-226 3996B-230 3996B-233 3996B-236 3996B-236 3996B-240 3996B-243 3996B-246 3996B-248 3996B-253 3996B-282 3996B-286 3996B-287 3996B-288 3996B-502 3996C-130 3996C-133 3996C-135 3996C-137 3996C-137 3996C-139 3996C-139 3996C-140 3996C-141 3996C-145 3996C-147 3996C-148 3996C-149 3996C-150 3996C-151 3996C-152 3996C-152 3996C-154 3996C-155 3996C-156 3996C-157 3996C-160 3996C-161 3996C-162 COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON DESCRIPTION TIMING BELT (Y)TIMING BELT TIMING BELT TIMING BELT TIMING BELT TIMING BELT TIMING BELT TIMING BELT TIMING BELT TIMING BELT TIMING BELT TIMING BELT TIMING BELT (Y)TIMING BELT TIMING BELT TIMING BELT TIMING BELT (Y)TIMING BELT (Y)TIMING BELT TIMING BELT TIMING BELT TIMING BELT TIMING BELT TIMING BELT TIMING BELT TIMING BELT TIMING BELT TIMING BELT BELLOWS (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER LOCATION VENDOR PART NO 6B16-095025 6B16-102025 6B16-105037 6B16-145037 6B16-150037 6B16-165037 6B16-190037 6B16-205037 6B16-235025 6B16-270037 6B16-300037 6B16-315037 6B16-360025 6G3-083025 6G6-340031 6G16-085025 6G16-260025 6G16-300025 6G16-300025 6R3-043025 6R3-095037 6R4-040050 6R6-1150310 6Z16-155037 80XL037 120XL037U 130XL037 140XL037 100001687 N-3-1-1 021-D N-3-1-1 021-DXP N-3-2-1. N-3-2-1 092-DP N-3-1-1 D-16097-A-2 D-19556-A N-3-1-3 D-20310-A-11 N-3-1-1 D-21839-A-2. L-11-1-4 021-NR N-3-2-1 021.5-DXDE N-3-2-1 022-D-V N-3-2-1 022-D-V N-3-2-1 024-D N-3-1-1 040.5 C-3-3 FO-311-4RMT N-3-1-1 FOR-17-0.O65 N12 N12 N12 O65 N12.75 N-3-2-1 D-27722-A-3 N-3-2-1 D-27722-A-3 N-3-1-1 FCPI N-3-1-1 FO-04-0.

H-9-2 VENDOR PART NO MRS-041-DXPZ MRS-092-DXPZ BFH118X212 BHH34X1 Q86-1031-D RE5/9 FPS-386B D-721-XDR CN-5348 C5X 203-008 203-067 203-074 3G2A3-ID411 3G2A3-OC221 3G2S6-CPU11 C120-CPU78 C20-CPU12 C200H-BCO81-V1 C200H-OC222 C2OOH-ID215 C2OOH-ID215 C2OOH-OD213 C500-ASC04 C500-LK203 C500-OC224 C500-PR023 C500-RM201 C500-OD211 E5C2-R40K(100/11 E5C2-R40K(200/22 E5C3-WR20P(100/110) E5C2-R20P(100/11 CVDI 02T PE CVVI 01T PE CWFG 004 03 CWFG OS1 S3 CTFA 01T PE WDFG 40P SF WDFG 40W 0A WGFG 01D S0 WGFG 06W R1 WGFG 40D 01 WGFV 16D 01 WGFV 80P 01 WGGB 06S 02 WGGB 06S 02 수량 2 2 6 6 13 40 2 7 3 2 4 5 1 1 1 3 1 1 1 1 1 4 1 2 3 1 1 3 3 2 1 1 5 12 1 1 3 4 1 1 2 4 19 1 2 1 9 4 5 1 11 16 LOC N12 N12 N12. L-11-1-4 N-5-6 B-2-3.O11 N32 O34 N31 O32 O43 N31 N31 VENDOR .Q32 O12. H-9-1 H-9-1. N-3-1-1 N-3-1-1 N-3-1-1. H-9-2 H-9-1 H-9-1 H-9-1 H-9-1 H-9-1 H-9-1 H-9-2 H-9-1 H-9-2 H-9-1.O65 N33 N32 O12. L-11-1-4 N-3-1-1 N-3-1-1 N-3-1-2 N-3-1-3 B-2-3 B-2-3 B-2-1 M-6-3-2 B-2-3 B-2-3 B-2-2 B-2-4 B-2-2 B-2-2 B-2-2 B-2-2 B-2-2 B-2-3 B-2-3 B-2-4 B-2-3 J-6-2. H-9-2 H-10-2 H-9-1 E-3-1 H-9-1 H-9-1 H-9-1. B-1-5-1 N-2-4-4.O65 N12 N12.O44 N32 N31 O33 O43 O22 O13 O24.O65 O55 O43 N43 N12 N12 N12 N12 R13 R13 R12 O57 R12 R11 R13 R14 R14 R13 R13 R12 R12 R12 R12 R14 R13 R12 R12 R12 O12 F36.No Item no 장비명 5856 5857 5858 5859 5860 5861 5862 5863 5864 5865 5866 5867 5868 5869 5870 5871 5872 5873 5874 5875 5876 5877 5878 5879 5880 5881 5882 5883 5884 5885 5886 5887 5888 5889 5890 5891 5892 5893 5894 5895 5896 5897 5898 5899 5900 5901 5902 5903 5904 5905 5906 5907 3996C-163 3996C-164 3996C-172 3996C-174 3996C-179 3996C-181 3996C-183 3996C-187 3996C-189 3996C-192 3996C-195 3996C-196 3996C-806 3996C-808 3996C-816 3996C-828 3996C-832 3996C-837 3996C-838 3996C-843 3996C-843 3996C-847 3996C-853 3996C-858 3996C-868 3996C-872 3996C-878 3996C-883 3996C-892 3996C-893 3996C-894 3996C-899 3996F-006 3996F-007 3996F-009 3996F-010 3996F-015 3996F-016 3996F-018 3996F-022 3996F-050 3996F-056 3996F-059 3996F-069 3996F-071 3996F-078 3996F-090 3996F-097 3996F-098 3996F-101 3996F-103 3996F-103 COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON DESCRIPTION (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER (Y)CYLINDER CYLINDER (Y)CYLINDER (Y)CYLINDER CYLINDER CYLINDER CYLINDER CYLINDER (Y)PROGRAM CONTROLLE (Y)PROGRAM CONTROLLE (Y)PROGRAM CONTROLLE (Y)PROGRAM CONTROLLE (Y)PROGRAM CONTROLLER (Y)PROGRAM CONTROLLE (Y)PROGRAM CONTROLLE PROGRAM CONTROLLER PROGRAM CONTROLLER (Y)PROGRAM CONTROLLE PROGRAM CONTROLLER (Y)PROGRAM CONTROLLE (Y)PROGRAM CONTROLLER (Y)PROGRAM CONTROLLE PROGRAM CONTROLLER (Y)PROGRAM CONTROLLE (Y)PROGRAM CONTROLLE (Y)PROGRAM CONTROLLE (Y)PROGRAM CONTROLLER PROGRAM CONTROLLER CHEMICAL FILTER DI FILTER CHEMICAL FILTER(3EA/ (X)FILTER (3EA/PK) AT-FLUOROGARD II10"( CHEMICAL FILTER (R2)CHEMICAL FILTER N2 FILTER(10EA/PK) (Y)GAS FILTER CHEMICAL FILTER CHEMICAL FILTER (F2)CHEMICAL FILTER WAFERGARD FILTER (2E WAFERGARD FILTER (2E LOCATION B-2-3. H-9-2 H-9-1. L-11-1-4 N-3-1-1 N-3-2-1.

19.19.19.7: (Y)MOTOR(24VDC.19.19.C IC LAMP DEUTER1UM `OTOR(19.9:1) (Y)MOTOR(24VDC.1VDC.187:1) MOTOR(19.C (Y)I.1VDC.5.1VDC.187:1) (Y)MOTOR(19.19.5: (Y)MOTOR(24VDC. H-9-1 H-4-2 N-3-1-1.7: MOTOR(12VDC.1VDC.5: (Y)MOTOR(19.187:1) (Y)MOTOR(12VDC. (Y)MOTOR(24VDC.187:1) MOTOR(19.7: (Y)MOTOR(12VDC) (Y)MOTOR(24VDC.1VDC. A-2-2 G-2-4-1 N-3-1-1 N-3-1-1 H-9-1 K-10-3-4.No Item no 장비명 5908 5909 5910 5911 5912 5913 5914 5915 5916 5917 5918 5919 5920 5921 5922 5923 5924 5925 5926 5927 5928 5929 5930 5931 5932 5933 5934 5935 5936 5937 5938 5939 5940 5941 5942 5943 5944 5945 5946 5947 5948 5949 5950 5951 5952 5953 5954 5955 5956 5957 5958 5959 5960 3996F-106 3996F-122 3996F-125 3996F-203 3996F-237 3996F-300 3996F-301 3996F-302 3996F-304 3996F-311 3996F-321 3996F-321 3996F-368 3996F-374 3996F-391 3996F-394 3996F-401 3996F-435 3996F-441 3996F-451 3996F-452 3996F-458 3996F-461 3996F-465 3996F-470 3996F-471 3996F-610 3996F-865 3996F-884 3996F-889 3996F-911 3996F-925 3996G-816 3996I-004 3996I-013 3996I-041 3996I-150 3996L-039 3996M-001 3996M-002 3996M-002 3996M-003 3996M-004 3996M-005 3996M-006 3996M-006 3996M-008 3996M-009 3996M-010 3996M-011 3996M-013 3996M-013 3996M-015 COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON DESCRIPTION (Y)WAFER GARD FILTER DI FILTER (F4)GAS FILTER CHEMICAL FILTER FILTER POLY PRO 20 FILTER SST GAUGE POLYPRO FILTER 90 (Y)FILTER (Y)ILTER ELEMENT T-T (Y)ILTER ELEMENT T-T (Y)DEIONIZER FILTER DI CTRG FILTER CTRG FILTER (Y)CTRG FILTER (Y)FITTING (Y)FITTING CONNECTOR FITTING (X)REDUCING UNION UNION TEE REDUCING UNION FITTING (Y)CONNECTOR (Y)TEE INLET (Y)FUSE (Y)FUSE FUSE (Y)FUSE (Y)FUSE CONVECTRON GAUGE IC I.60. N-3-2-1 N-3-1-1 N-3-1-1 G-2-4-1 N-2-5-3 N-3-1-1 N-3-1-3 G-2-4-1 N-3-1-1 N-3-3-3 N-3-3-3 J-4-3-2 J-4-3-2 J-4-3-2 J-4-3-2 J-4-3-2 N-2-4-4 J-4-3-2 D-1-4-2 D-1-4-2 D-1-4-2 D-1-4-2 VENDOR PART NO WGGB 12S 02 AB3NI8EH4 DMNK2230FRVMM6/8 DS03B-N 400945 300915 400955 B-8TF2 SS-4F-K4-2 SS-4F-K4-2 D0832 D8951 AP205 AP210-1 304-4-XOA SS-600-6-1 SS-2-UT-1-2 SS-6-UT-6 SS-6-UT-6-4 SS-8-UT-3 SS-8-UT-6-4 SS-8-UT-A-10 SS-16-UT-A-20 SS-4-VCR-22 AGC-30 FNM-10 FNQ-2 MDA-15 MDL-3/10 275281 AD 521 KD AD 558 JN ADADC 8012 MC 3487 P L2196 GM 8712E826 GM 8712-41 GM 8712E826 GM 8712D784 GM 8712D784 GM 8714D610 GM 8714F700 GM 8714F700 GM 9413E145 GM 9413-2 GM 9413-3 GM 9413-3 GM 9413C292 GM 9413C292 GM 9513B775 수량 1 1 1 6 1 247 76 310 2 1 4 3 2 16 3 6 1 3 1 2 3 18 2 2 60 5 1 3 1 8 2 5 5 9 30 8 8 4 11 4 2 1 13 2 2 6 6 12 7 3 5 6 LOC N32 N13 O22 N51 N11 N32 O12 N51 N51 R62 N12 N12 O13 O23 O34 N31 N12 N12 N12 R62 N13 N12 N11 R62 N12 R61 R61 T14 T14 T14 T14 T14 N43 T14 T14 T14 T14 O45 S14 S14 S14 S14 S14 S12 S14 S14 S14 S14 S12 S14 S14 S14 S14 VENDOR .7:1) LOCATION M-7-4-1 N-2-5-3 N-3-3-1 H-10-1 M-7-4-1 K-9-1 F-1-2 A-1-5.5: (Y)MOTOR(24VDC) (Y)MOTOR(12VDC.19.

SILICON (C)O-RING.SILICON O-RING.5:1) MOTOR(24VDC.SILICON (F2)O-RING.5: MOTOR(19.SILICON(39 (C)O-RING.38.5X18(S) 197X2.SILICON (F2)O-RING.6T(S) 210X7(S) 212X7(S) P-12(S) V-325(S) P-23(S) AS-568A-460(S) P-45(S) P-48(S) P-60(S) G-55(S) G-254(S) AS-568A-442(S) G-210(S) 250X20X45T 247X271X10T 337X364X2 72542-02 수량 5 6 2 6 3 6 24 1 20 23 4 5 4 5 5 4 5 10 10 1 17 70 39 100 210 180 200 80 100 150 100 90 70 200 70 60 20 6 10 48 100 40 40 60 59 12 100 20 20 30 10 10 2 LOC S14 S12 S12 S14 S14 S12 S12 S14 S11 S11 S14 S14 S14 S14 S14 S14 S14 S14 S14 P13 N24 N24 N22 N22 N22 N22 N22 N22 N22 N23 N23 N22 N22 N22 N22 N23 N22 N24 N23 N22 N22 N22 N22 N22 N22 N22 N22 N22 N42 N22 N23 N24 Y27 VENDOR .5X1.512 CP MOTOR(19.65.218.SILICON (F2)O-RING.4:1) (Y)MOTOR(24VDC. (Y)MOTOR(24VDC.VITON(3997O-076) (F2)O-RING.31:1.SILICON(39 (F2)SILICON O-RING (R2)GASKET Q'TZ.SILICON O-RING.5.65.19.VITON(3997O-073) (C)O-RING.19.9:1) MOTOR(6VDC.5(S) 41.SILICON O-RING.SILICON(39 (F2)O-RING.512 MOTOR(24VDC.19.SILICON (F3)O-RING.5 MOTOR(24VDC.5:1 MOTOR(24VDC.3VDC.SILICON (F2)O-RING.2 (Y)MOTOR(24VDC.5:1.9:1) MOTOR(24VDC.7:1) (Y)MOTOR(30.60.SILICON (F2)O-RING.SILICON (F2)O-RING.SILI (F4)SILICON GASKET GASKET O-RING SAM OIL LOCATION D-2-4-2 D-2-4-2 D-2-4-2 D-1-4-2 D-1-4-2 D-1-4-2 I-5-2 VENDOR PART NO GMT 9413E348 GM 9413C315 GM 9513B775 GM 9413C555 GM 9413D109 GM 9413G421 GMT 9413F288 GM 9433G389 GM 9433G804 GM 9413H435 GM 9432E953 GM 8323F743 GM 8712-21 GM 8712F657 GM 8712F660 GM 8714F638 GM 8714F638 GM 8714F659 GM 8714F658 GM 8714F659 AS-568A-124(V) AS-568A-127(V) P-205(S) AS-568A-152(S) AS-568A-153(S) AS-568A-236(S) AS-568A-240(S) 66X59.SILICON (C)O-RING.19.SILICON (C)O-RING.SILICON O-RING.FRON (R2)TRAP GASKET.6X3.SILICON ( (F2)O-RING.96:1.65.60.5: MOTOR MOTOR(24VDC.SILICON(39 O-RING.5: MOTOR(24VDC.5:1.SILICON (Y)O-RING.512CPR) MOTOR MOTOR (C)O-RING.SILICON(39 (C)O-RING.SILICON(39 (C)O-RING.5(S) P-18(S) 210X12.SILICON O-RING.No Item no 장비명 5961 5962 5963 5964 5965 5966 5967 5968 5969 5970 5971 5972 5973 5974 5975 5976 5977 5978 5979 5980 5981 5982 5983 5984 5985 5986 5987 5988 5989 5990 5991 5992 5993 5994 5995 5996 5997 5998 5999 6000 6001 6002 6003 6004 6005 6006 6007 6008 6009 6010 6011 6012 6013 3996M-015 3996M-016 3996M-016 3996M-017 3996M-018 3996M-020 3996M-021 3996M-022 3996M-023 3996M-029 3996M-035 3996M-041 3996M-043 3996M-044 3996M-045 3996M-046 3996M-047 3996M-048 3996M-048 3996M-192 3996O-021 3996O-022 3996O-303 3996O-306 3996O-307 3996O-308 3996O-309 3996O-310 3996O-311 3996O-313 3996O-314 3996O-315 3996O-316 3996O-317 3996O-318 3996O-319 3996O-321 3996O-325 3996O-326 3996O-327 3996O-328 3996O-329 3996O-330 3996O-331 3996O-332 3996O-333 3996O-334 3996O-339 3996O-709 3996O-712 3996O-714 3996O-716 3996O-901 COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON DESCRIPTION MOTOR(12VDC.45(S) 220X7(S) 200X190X5(S) 208X9.1VDC.SILICON (F2)O-RING.SILICON (F2)O-RING.5.1VDC.7:1) MOTOR(6VDC.

3A.9KG) PFP-M CRISTAL KRPA-14DG-24 KRPA-14DG-24 ODC5.O63 R15 R21 R15 R13 O63 R13 O63 R13 R15 R15 R15 R15 R13 VENDOR .No Item no 장비명 6014 6015 6016 6017 6018 6019 6020 6021 6022 6023 6024 6025 6026 6027 6028 6029 6030 6031 6032 6033 6034 6035 6036 6037 6038 6039 6040 6041 6042 6043 6044 6045 6046 6047 6048 6049 6050 6051 6052 6053 6054 6055 6056 6057 6058 6059 6060 6061 6062 6063 6064 6065 3996O-902 3996O-903 3996P-810 3996R-001 3996R-105 3996R-105 3996R-113 3996R-116 3996R-121 3996R-127 3996R-131 3996R-153 3996R-173 3996R-173 3996R-186 3996R-220 3996R-222 3996R-226 3996R-227 3996R-230 3996R-308 3996R-323 3996R-324 3996R-325 3996R-356 3996S-001 3996S-101 3996S-102 3996S-103 3996S-104 3996S-105 3996S-106 3996S-107 3996S-108 3996S-112 3996S-114 3996S-117 3996S-118 3996S-119 3996S-123 3996S-124 3996S-127 3996S-130 3996S-131 3996S-132 3996S-134 3996S-137 3996S-141 3996S-142 3996S-143 3996S-144 3996S-148 COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON DESCRIPTION DIFF PUMP FLUID (Y)PUMP OIL (TW-400) (Y)END PLATE WAFER ALIGNER ROLLER (Y)RELAY (Y)RELAY RELAY RELAY RELAY (Y)RELAY RELAY(120VAC) (Y)RELAY (Y)RELAY (Y)RELAY RELAY (Y)SOLID STATE RELAY (Y)SOLID STATE RELAY (Y)SOLID STATE RELAY (Y)SOLID STATE RELAY (Y)SOLID STATE RELAY RELAY(5-24VDC) RELAY (Y)CONTACTOR RELAY RELAY (Y)RELAY DOOR SEAL 260D (Y)BASIC SWITCH (Y)LIGHTED PUSHBUTTO (Y)LIGHTED PUSHBUTTO (Y)LIGHTED PUSHBUTTO (Y)LIGHTED PUSHBUTTO (Y)LIGHTED PUSHBUTTON SWITCH (Y)LIGHTED PUSHBUTTO (Y)LIGHTED PUSHBUTTO LIGHTED PUSHBUTTON S LIGHTED PUSHBUTTON S (Y)LIGHTED PUSHBUTTO (Y)LIGHTED PUSHBUTTO (Y)LIGHTED PUSHBUTTO (Y)LIGHTED PUSHBUTTO (Y)LIGHTED PUSHBUTTO (Y)LIGHTED PUSHBUTTO (Y)LIGHTED PUSHBUTTO (Y)LIGHTED PUSHBUTTO (Y)LIGHTED PUSHBUTTO (Y)LIGHTED PUSHBUTTO (Y)FLOTAGE SWITCH (Y)LIGHTED PUSHBUTTO (Y)LIGHTED PUSHBUTTO (Y)LIGHTED PUSHBUTTO (Y)LIGHTED PUSHBUTTO CHANGE.P/N3996S-149 LOCATION I-5-1 N-3-2-1 M-6-2-3 M-6-2-3 M-6-2-3 M-6-2-3 M-6-2-3 M-6-2-3 M-6-2-3 M-6-2-3 M-6-2-3 M-6-2-3 M-6-2-3 M-6-2-3 M-6-2-3 M-6-2-3 M-6-2-3 B-2-2 B-2-2.O35 R13 R13 R13 R13 R13 R12 N31 N32 R12.60VDC R10-E1-X2-V700 R50-E2-X1-24VDC W67-X2Q12-15 CHB-38-70003 KAP-11AY-24 KUMP-14D18-24 KUMP-14D18-24 KUPA-14AN-24 OAC5 ODC5 ODC24 ODC5Q OAC5-12 G3NH-4075B LA1-001(12VDC) CJ7ARN-E9 LA2-002(12VDC) PFP-100N 10722-1 A3B-014 A3BJ-510A A3BJ-510G A3BJ-510R A3BJ-510W A3BJ-510Y A3BJ-5703-24E A3BJ-7031-3 A3CJ-90A1-24EG A3DT-90A1-00ER A3PA-4001 A3PA-4007 A3PA-5011 A3PA-5702-24E A3PA-5703-24E A3PA-5716-24E A3PA-701 A3PA-7010 A3PA-7010-1 A3PA-7020-1 61F-GP-N(100VAC) A3PJ-5701-24E A3PJ-5702-24E A3PJ-5703-24E A3PJ-5705-24E A3PJ-701 수량 LOC 4 7 100 20 1 6 2 2 5 1 5 1 1 2 3 3 3 5 4 2 2 2 5 1 9 5 26 10 10 15 20 10 8 22 5 20불출 5 4 12 5 10 5 10 4 18 3 1 4 10 10 9 6 O13 Y11 N12 O35 O35 O35 O35 O35 O35 O35 O35 O35 O35 O35 O35 O35 O35 O35 O35 O35 R23 Q53 R15 N43 N13 N23 R13 R13 R13 R13. N-2-1-1 B-2-3. B-2-4 N-2-4-4 B-2-3 B-2-4 B-2-4 B-2-4 B-2-4 B-2-4 B-2-4 B-2-4 B-2-4 M-7-4-1 M-7-4-1 K-9-3-2 B-2-3 B-2-4 B-2-3 K-9-3-2 B-2-4 B-2-4 B-2-4 B-2-4 B-2-4 B-2-4 VENDOR PART NO DC-705(3.

B-1-5-4 25357 B-1-5-1 55215 B-1-5-1 76141 L-9-2 500C M-2-2-1. M-6-2-4 FU-4F M-6-2-4 PS-201 PS-56 K-9-3-2 DS-A1 B-1-5-4.No Item no 장비명 6066 6067 6068 6069 6070 6071 6072 6073 6074 6075 6076 6077 6078 6079 6080 6081 6082 6083 6084 6085 6086 6087 6088 6089 6090 6091 6092 6093 6094 6095 6096 6097 6098 6099 6100 6101 6102 6103 6104 6105 6106 6107 6108 6109 6110 6111 6112 6113 6114 6115 6116 3996S-149 3996S-151 3996S-153 3996S-158 3996S-161 3996S-162 3996S-163 3996S-176 3996S-177 3996S-179 3996S-180 3996S-182 3996S-183 3996S-184 3996S-188 3996S-189 3996S-190 3996S-191 3996S-192 3996S-195 3996S-201 3996S-202 3996S-203 3996S-210 3996S-212 3996S-212 3996S-217 3996S-218 3996S-219 3996S-230 3996S-253 3996S-256 3996S-259 3996S-263 3996S-404 3996S-411 3996S-414 3996S-441 3996S-442 3996S-444 3996S-444 3996S-446 3996S-449 3996S-450 3996S-451 3996S-457 3996S-461 3996S-462 3996S-463 3996S-464 3996S-466 COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON DESCRIPTION LIGHTED PUSHBUTTON S FIBER UNIT SWITCH LIGHTED PUSHBUTTON S (Y)LIGHTED PUSHBUTTO PROXIMITY SENSOR CAPACITIVE PROXIMITY PHOTO SENSER (Y)PHOTOELECTRIC SW (Y)PHOTOELECTRIC SW (Y)PHOTOELECTRIC SWI (Y)PHOTOELECTRIC SW PHOTOELECTRIC SWITCH PHOTOELECTRIC SWITCH PHOTOELECTRIC SWITCH (Y)PHOTOELECTRIC SWI (Y)PHOTOELECTRIC SWI (Y)PHOTOELECTRIC SWI PHOTOELECTRIC SWITCH (Y)PHOTOELECTRIC SWI (Y)PHOTOELECTRIC SWI (Y)PROXIMITY SENSOR PROXIMITY SENSOR (Y)PHOTO SENSOR (Y)SWITCH (Y)SWITCH (Y)SWITCH (Y)PROXIMITY SWITCH (Y)PROXIMITY SWITCH (Y)PROXIMITY SWITCH (Y)FLOATLESS LEVEL SWITCH (Y)FLOAT SWITCH AIR FLOW SWITCH FLOW SWITCH FLOW SWITCH (Y)SENSOR SENSOR SENSOR SENSOR (Y)SENSOR SENSOR SENSOR SENSOR (Y)SENSOR (Y)SENSOR (Y)SENSOR (Y)SENSOR SENSOR (Y)SENSOR (Y)SENSOR (Y)SENSOR (Y)SENSOR LOCATION B-2-4 B-2-3 B-2-4 B-2-4 B-2-3 B-2-3 VENDOR PART NO A3PJ-7010-1 E32-TC200E A3PJ-90C22-28 A3PT-5011 E2K-C25ME1 E2K-C25ME2 E2E-X5ME1 B-2-3 E39-L2 B-2-3 E39-S1 E3C-S20LW B-2-4 E3C-GE4 B-2-4 E3H-1C23 B-2-5-1 E3HF-1E1 B-2-3 E3HF-1E2 B-2-3 E3S-5E41 B-2-3 E3S-GS1E4 B-2-3 E3S-GS3E4 B-2-3 E3S-LS20XE4 B-2-5-2 E3S-X3CE4 B-2-5-1 E3C-S20W B-2-4-1. N-3-4-3 RS-520L RS-520L-D N-3-4-3 RT-410-1 C-4-4-2 RT-410-1R-C5 수량 LOC 6 R13 12 R15 5 R13 5 R15 3 R13 4 R13 3 R15 10 R14 10 R14 1 R15 1 R15 4 R13 8 R21 10 R15 5 R14 3 R14 4 R15 2 R15 2 R21 1 R21 2 R21 8 R15 2 R21 10 R21 4 R15 4 R15 2 R13 2 R15 3 R15 10 R14. N-8-3-4 DS-L10H N-8-3-4 SS3-MIR N-8-3-4 SS3-MIR N-3-4-3 FX4-A3R N-3-4-3 GX-8MLB N-3-4-3 SS-A5 N-3-4-3 IS-T20L N-3-4-3 PM-K53 N-3-4-3 RS-520H-1 B-1-5-4.O41 5 O43 5 O43 3 O43 5 N12 10 R63 2 R63 9 R63 1 O63 14 O41 15(1ea불출 O41 1 O41 1 O31 19 O31 6 O31 O31 3(1EA불출 4 O31 1 O31 5(1EA불출 O31 4(3EA불출 O31 4 O31 10 O41 VENDOR . B-2-4 TL-W5E1 B-2-4 61F-GP-NH B-1-5-1.B-2-5-1 E2K-X15ME1 B-2-1 E2K-F10MC1 B-2-5-1 E3S-DS10E4 B-2-5-1 M2PA-7010-1 B-2-4 M2PJ-7010-1 M2PJ-7010-1 B-2-4 TL-H10ME2 B-2-4 TL-H20ME2 B-2-3.

N.FEMALE 1/2 NEEDLE V/V (Y)PILOT V/V SOL V/V.1/4 NPT MALE LOCATION B-1-5-1 M-2-2-2 C-4-4-2.3-WAY PNEUMATIC V/V (Y)V/V (Y)V/V (Y)V/V AIR V/V SOL V/V FAST PLUG V/V (Y)V/V (Y)V/V V/V (Y)CHECK V/V.N. N-2-5-2 C-4-4-2.2-WAY VALVE. N-2-5-2 C-4-4-2 N-8-3-4 M-2-2-2 G-2-4-1 B-2-4 B-2-4 B-2-3 B-2-3 K-9-3-2 K-9-3-2 K-9-3-2 B-2-4 B-2-3 B-2-4 B-2-2 B-2-4 B-2-4 M-7-3-4 M-7-3-4 M-7-3-4 M-7-3-4 M-7-3-4 M-7-3-4 M-7-4-1 M-7-4-1 M-7-4-1 M-7-4-1 M-7-4-1 M-7-4-1 M-7-4-1 M-7-4-1 M-7-4-1 M-7-4-1 M-7-4-1 M-7-4-1 M-7-4-1 K-9-3-2 N-4-2-2 M-7-4-1 VENDOR PART NO 수량 RT-410-4R 6(5EA불출 RT-410-4 2 LR400 8 PT400 7 SP100R 4 SP320D 1 KML50-0A-A 3 321-4-X-2 5 321-6-X-6-B2 2 321-16-X-3 4 H3BA-FA (24VDC) 1 H3DH (24VDC) 1 H5AN-4DM.No Item no 장비명 6117 6118 6119 6120 6121 6122 6123 6124 6125 6126 6127 6128 6129 6130 6131 6132 6133 6134 6135 6136 6137 6138 6139 6140 6141 6142 6143 6144 6145 6146 6147 6148 6149 6150 6151 6152 6153 6154 6155 6156 6157 6158 6159 6160 6161 6162 6163 6164 6165 6166 6167 6168 3996S-468 3996S-469 3996S-506 3996S-516 3996S-527 3996S-530 3996S-702 3996T-112 3996T-131 3996T-137 3996T-302 3996T-305 3996T-317 3996T-321 3996T-402 3996T-417 3996T-422 3996T-423 3996T-501 3996T-504 3996T-510 3996T-801 3996T-802 3996T-802 3996T-803 3996T-806 3996T-807 3996T-809 3996V-010 3996V-010 3996V-011 3996V-014 3996V-015 3996V-016 3996V-017 3996V-018 3996V-018 3996V-019 3996V-020 3996V-021 3996V-022 3996V-024 3996V-025 3996V-026 3996V-027 3996V-028 3996V-031 3996V-032 3996V-042 3996V-047 3996V-048 3996V-050 COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON DESCRIPTION (Y)SENSOR SENSOR (Y)SENSOR EMITTER SENSOR RECEIVER SENSOR RECEIVER SENSOR N2 LEVEL SWITCH (Y)FLEXIBLE TUBE FLEXIBLE TUBE (Y)FLEXIBLE TUBE (Y)TIMER (Y)TIMER (Y)TIMER TIMER (Y)TRANSISTOR (Y)TRANSISTOR (Y)TRANSISTOR (Y)TRANSISTOR TRANSISTOR (Y)TRANSISTOR (Y)TRANSISTOR (Y)REMOTE TERMINAL INPUT UNIT INPUT UNIT (Y)REMOTE TERMINAL REMOTE TERMINAL (Y)LINK TERMINAL (Y)OFF DELAY TIMER (Y)DIAPHRAGM V/V.O.C.100-24 1 H5CN-YBN.3-WAY (Y)VALVE.1/2 (Y)DIAPHRAGM V/V.1/4NPTx CHECK V/V.1/2 (X)PFA PILOT V/V.N.100-24 1 2N1671 1 2N3441 2 2N3741 3 2N3792 1불출완료 MJ 10007 14 MJ 4035 3 MJE 800 8 G71-OD16(24VDC) 3 G72C-ID16 1 G72C-ID16 1 G71C-ID16(24VDC) 1 G72C-OD16(24VDC) 3 B7A-T6B6 2 RD-2P 1 202-1 2 202-1 3 202-10 3 202-20 10 202-21 10 202-22 3 202-39 10 202-42 3 202-42 2 202-43 2 202-72 6 203-1414-225 3 204-20 3 206-0412-1 1 206-0421-2 2 206-0422-2 1 206-0424-2 5 206-0432-1 4 206-0442-4SN 2 206-0855-2 1 NVT4-T4-2 1불출 202-01 1 203-3314-215 6 PVA4-T4-2 1 LOC O41 O62 O41 O41 O41 O41 O62 R62 R62 R62 R13 R13 R12 R15 O63 O63 O63 O63 O63 O63 T14 R13 R13 R12 R12 R12 R13 R13 O11 O11 O11 O11 O11 O11 O11 O11 O11 O11 N31 O41 O41 N32 N32 N32 N32 R42 N32 N31 N32 O63 O21 N31 VENDOR .O.1/4NPTx1/4 (Y)V/V (X)CHECK V/V.2-W VALVE.3-WAY (X)STOPCOCK V/V.

6W) SOL V/V(24VDC.O62 O31 O21.3-WAY(7W. N-3-3-1 M401-37 H-1-1 M31E1.8.0 FUN-94M-6. L-10-6-1 AMG20-X20-FL-156 N-3-2-2 4F330-08-DC24V L-10-6-1 4KA210-06-DC24V L-10-6-1 4KB129-00-C5-DC2 L-10-6-1 4KB129-00-C5-DC2 N-2-3-3 A4FO10-06-DC24V AB41-02-5-03A-DC N-2-2-3 ADK11-08A-D3A-DC F-5-6.120 SOL V/V(24VDC.35L C-3-5 FTWA-6-2002-NWB K-9-3-2 ILVP-0752-NWB N-2-5-2 ET-3M-12 N-2-5-2 ET-3M-24 N-2-5-2 ETO-3M-24 N-2-5-2 EV-3-24 N-2-5-2 EV-3-24 N-2-5-2 EV-3M-24 N-5-1 EVO-3-24 N-2-5-3 MFC-2 N-2-5-3 MNV-1 N-2-5-3 MNV-1KP N-2-5-3 MQC-V3 N-4-1-1 R481-6 N-4-1-1 R481-24 N-4-1-1 R482-24 N-4-1-1 R482-24 N-2-2-3 AMD41-20-20-2 N-4-1-1 SA-20T N-2-3-3.7W) (Y)SOL V/V(12VDC.3-WAY(24VDC. N-2-2-2 A3113 N-2-2-2 A3113-BIM-BD-BB N-2-2-2 B2016-PF-S20 N-2-2-2 B2016-SH N-2-2-2 B2016-SH-BE 수량 8 2 1 2 8 11 17 2 5 10 29 12 3 1 14 4 6 1 3 1 1 2 6 1 1 3 2 4 2 9 1 2 1 4 1 2 11 3 12 17 13 2 15 4 1 1 1 1 1 2 1 3 3 LOC O21 R32 N13 O62 O43 O43 O43 O43 O43 O43 O55 N13 N13 N13 N13 O31 O31 O31 O31 R41 O31 R42 R41 R42 R42 R43 R42 R42 R41 R41 R42 R41 R43 R41 R41 O63 O31 O22.5W) SOL V/V(24VDC) SOL V/V.O31 O21.7. H-1-2 MC41E1 M-6-3-1 062-4E2-21 M-6-3-1 125E1 K-10-3-1 DV3-234 L-10-6-3 NV3-234 M-7-4-1 WB-2W8P-C K-10-3-1 A2016-S72 C-2-3. D-12-2 AMD31-15BUS-10-1 L-10-6-1 AMD41-20BU-16-3 G-2-5-1.6 SOL V/V(24VDC) SOL V/V(24VDC) SOL V/V (Y)SOL V/V (X)SOL V/V(24VDC) SOL V/V(24VDC) (Y)SOL V/V(120V) SOL V/V(24VDC) SOL V/V(24VDC) SOL V/V(24VDC) LOCATION K-11-5-2 VENDOR PART NO FUCL715-9.5W) SOL V/V(120V. N-2-2-3 AP11-8A-03A-DC24 G-2-5-1 AP12-10A-03A-DC2 N-3-3-3 M-04-2PV-3-AC100 N-2-2-3 M-04-2PV-3-AC100V K-9-3-2 31E1 H-1-2 31E1. SOL V/V(12VDC.No Item no 장비명 6169 6170 6171 6172 6173 6174 6175 6176 6177 6178 6179 6180 6181 6182 6183 6184 6185 6186 6187 6188 6189 6190 6191 6192 6193 6194 6195 6196 6197 6198 6199 6200 6201 6202 6203 6204 6205 6206 6207 6208 6209 6210 6211 6212 6213 6214 6215 6216 6217 6218 6219 6220 6221 3996V-064 3996V-091 3996V-115 3996V-116 3996V-131 3996V-132 3996V-134 3996V-137 3996V-137 3996V-139 3996V-140 3996V-147 3996V-150 3996V-152 3996V-153 3996V-160 3996V-161 3996V-162 3996V-162 3996V-164 3996V-200 3996V-201 3996V-207 3996V-211 3996V-212 3996V-212 3996V-214 3996V-218 3996V-226 3996V-247 3996V-251 3996V-255 3996V-256 3996V-266 3996V-266 3996V-304 3996V-305 3996V-308 3996V-311 3996V-313 3996V-315 3996V-317 3996V-321 3996V-322 3996V-354 3996V-365 3996V-368 3996V-372 3996V-373 3996V-374 3996V-375 3996V-377 3996V-378 COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON DESCRIPTION CHECK V/V NEEDLE V/V (Y)WATER COOLED TRAP (Y)SOFT START V/V SOL V/V SOL V/V SOL V/V (Y)AIR V/V (Y)AIR V/V (Y)SOL V/V SOL V/V (Y)ELETRIC V/V (Y)NEEDLE V/V (Y)METERING V/V (Y)V/V (Y)SOL V/V (Y)ISOLATION V/V PILOT V/V PILOT V/V QDR BATH V/V AIR V/V (Y)AIR V/V (Y)SOL V/V(24VDC) SOL V/V(24VDC) SOL V/V(24VDC) SOL V/V(24VDC) (Y)SOL V/V(24VDC) SOL V/V(24VDC) (Y)SOL V/V(24VDC) AIR V/V AIR V/V (Y)SOL V/V(24VDC) (Y)SOL V/V(24VDC) SOL V/V(100VAC) SOL V/V(100VAC) SOL V/V.7. B-1-5-4. N-4-2-2 M42E2 M-6-3-1 MC41E1.O63 O62 O21 O21 O62 Q11 N32 O62 O11 O11 O11 O11 O11 VENDOR .8.52-0.

3-WAY (Y)BALL V/V DIAMOND WHEEL (DRSA2029) DIAMOND WHEEL (DRSC2001) DIAMOND WHEEL (DRSA0049) DIAMOND WHEEL (DRSA2016) DIAMOND WHEEL (DRSA2017) DIAMOND WHEEL (DRSA2002) (Y)DIAMOND WHEEL (DRSA2003) (Y)DIAMOND WHEEL (DRSA2004) DIAMOND WHEEL (DRSA2026) (Y)DIAMOND WHEEL (DR (F3)DIAMOND WHEEL(#1 HEX NUT.O62 O22 O22. VITON (Y)O-RING. D-8-1 N-1-2-2 L-11-1-2 L-11-1-2 L-5-2-1 N-7-3-3 VENDOR PART NO B3215-BE D2017 D2017-LC D3415-S2 E3111-MM 2CD8SG 2CD8SYCS 4VS 4VSG 8030G13VM.218 1/4-20X0.NKL CHANGE P/N 4997N-169 CHANGE P/N 4996O-220 CHANGE P/N 4997O-018 (Y)O-RING.O62 O62 O21.No Item no 6222 3996V-380 6223 3996V-384 6224 3996V-385 6225 3996V-387 6226 3996V-390 6227 3996V-402 6228 3996V-404 6229 3996V-406 6230 3996V-407 6231 3996V-409 6232 3996V-551 6233 3996V-558 6234 3996V-560 6235 3996V-561 6236 3996V-562 6237 3996V-565 6238 3996V-604 6239 3996V-655 6240 3996V-681 6241 3996V-713 6242 3996V-776 6243 3996V-778 6244 3996V-782 6245 3996W-901 6246 3996W-902 6247 3996W-903 6248 3996W-904 6249 3996W-905 6250 3996W-906 6251 3996W-907 6252 3996W-908 6253 3996W-909 6254 3996W-910 6255 3996W-915 6256 3997N-069 6257 3997N-169 6258 3997O-016 6259 3997O-018 6260 3997O-177 6261 3997O-203 6262 3997O-229 6263 4501A-001 6264 4501B-001 6265 4501B-002 6266 4501C-002 6267 4501C-101 6268 4501O-001 6269 4501P-003 6270 4501T-021 6271 4501V-004 6272 4501V-004 6273 4507G-001 6274 4507M-009 장비명 COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON COMMON CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM CD SEM METRA-215 METRA-215 DESCRIPTION (Y)SOL V/V(24VDC) (Y)SOL V/V(24VDC) (Y)SOL V/V(24VDC) (Y)SOL V/V(24VDC) (Y)SOL V/V(24VDC) SOL V/V (Y)SOL V/V (Y)SOL V/V(24VDC) (Y)SOL V/V(12VDC) (Y)SOL V/V (Y)SOL VALVE(24VDC) (Y)SOL VALVE(24VDC) SOL VALVE(24VDC) SOL VALVE(110/120V) SOL VALVE(24VDC) SOL VALVE(120/60) SOLENOID VALVE BELLOWS VALVE (Y)VALVE FLOW (Y)CHECK VALVE BALL V/V.LOADER (Y)CLEAN POLAROID UN (Y)M/C LEVEL ADJUST TOOL (Y)LEAK VALVE(CKD) (Y)LEAK VALVE(CKD) (Y)LUBRICANT.625 AS-568A-016(V) AS-568A-018(V) AS-568A-249(V) AS-568A-275(V) AS-568A-325(V) 545-1675 533-1337 340-0429 AT247800 13162 L456906 567-6682 566-1742 545-0707 545-0707 01-16500-00 40-02425-00 수량 5 4 3 11 9 4 2 2 3 5 3 1 14 2 10 1 2 1 1 1 1 1 3 3 8 6 3 6 3 11 6 6 12 3 40 50 300 280 93 100 56 34 1 8 4 2 2 2 4 1 1 7 2 LOC VENDOR O11 O11 O11 O11 O11 O22 O62 O21.O62 O21. VITON (Y)ALIGNMENT SAMPLE MOLYBDENUM BOARD (Y)EXTENSION BOARD (Y)C-TO-C ARM (Y)PUMP COOLANT (Y)O-RING. VITON (Y)O-RING.O62 O22 O21 Q11 R63 O62 R62 N13 O21 O13 O32 F46 F41 F41 F41 F43 F44 F44 F44 F46 F37 O15 J52 N13 N23 N23 N23 N23 N23 B16 Q44 Q15 B16 Q44 B63 Q33 B16 R63 R63 J22 P51 HITACHI " " HITACHI " " " " " " OSI " . LEAD S (Y)TURRET MOTOR LOCATION N-2-2-2 L-2-3-1 H-1-2 L-2-3-1 N-1-3-4 H-1-2 N-4-2-2 N-4-2-2 N-3-3-1 N-3-3-1 H-1-2 N-4-2-2 N-3-3-1 K-11-5-2 L-10-6-3 L-11-2-1 K-10-3-1 G-2-4-1 N-3-1-3 K-11-5-2 N-1-3-4 F-4-1-1 A-1-1 A-1-1 A-1-1 A-1-2 A-1-2 A-1-2 A-1-2 A-1-3 A-1-3 A-1-3 B-3-3-2 N-3-1-3 N-8-2-3 N-1-2-2 B-3-2-1 E-2-2.3/8 VCR (Y)V/V. AFP42 A36-LB-2126 B2-DX-281 MB-D-002 MB-D-002-120V MB-D-005 V52-LB-2100 SS-4CA-NE-3 SS-4BKT-9AGAA SS-4MG-VCR SS-8C-VCR-10 SS-44VCR8 SS-45XF8-BKB SS-68TF32 RS-01-2-SG-M1 RS-03-2-2/4-P 01-2-40/60-NA RS-01-2-20/30-NM-B 01-2-20/30-NM-C 01-2-40/60-NA-B 01-2-40/60-NA-C 01-2-40/60-NA-D 01-2-40/60-NM-B 01-2-40/60-NM-C 254B-5W7X75BAX40S 1/4-20X0.

10V -5+10 4712B-238 WAFER PROBER STAGE DRIVER I/F BOA 4712B-248 WAFER PROBER TIMING BELT U-40T-80 4712B-249 WAFER PROBER TIMING BELT U-45T-80 4712E-206 WAFER PROBER CCD CAMERA 4712J-001 WAFER PROBER JOY STICK 4712P-002 WAFER PROBER VACUUM UPPER PINCETT 4712P-003 WAFER PROBER LOWER PINCETTE 4720B-002 REPAIR PHOTODIDE.700 4507S-001 METRA-215 (Y)PCA.5UM/60 4546I-001 ION DOS MONITOR (Y)ISOLATOR VIBRATIO 4546I-001 " (Y)ISOLATOR VIBRATIO 4571C-021 ELLISOMETER CABLE.803-052 90071003A 153850 014630 56-003022 56-003022 A13424 802488820 2-02-0017 ECA-53 MS1-441R MS1-441L MH2-L MH2-R 2-52-0001 BB/NCA 1V1 184515-001 184600-027 BB/ROBIF1VO 184200-027 184520-001 RS25NP 170LINK 829-413-00 BIR-015398*02 950-658-02 950-696-01 405-158-00 281-500347-A 023-100447-1 023-100561-1 042-000014-1 1287-002779-11 3280-000022-11 3280-000023-11 400-09301 490-06600 597-069 74555 수량 3 3 3 1 1 10 1 5 1 1 1 32(34EA반출 1 1 1 1 40(40EA반출 1 1 5 4 3 1 1 1 1 1 1 1 1 2 3 5 1 6 3 1 1 1 3 1 1 1 15 15 1 1 1 1 1 1 1 1 LOC VENDOR J51 T63 T63 J53 J33 Q23 B16 B16 Q13 Q13 Q14 Q13 Q14 W21 Q13 B16 Q33 S14 Q43 Q14 Q14 Q43 Q43 Q14 Q14 Q14 Q14 Q33 Q33 Q14 Q15 Q14 R13 Q15 B53 Q14 B16 T15 T15 T12 T15 Q12 Q15 B63 B63 Q15 Q14 Q15 Q15 Q11 Q11 Q11 T12 " " " " OSI INSPEX " " LEICA " " " " " " " LEICA THER/WAVE THER/WAVE THERMA WAVE " RUDOLPH JEOL ASSESSI " ASSESSI " " " " WED " " DAIFUKU " " " ADVANTEST " TERADYNE " " TSK " " " " " " XRL " " " .No 6275 6276 6277 6278 6279 6280 6281 6282 6283 6284 6285 6286 6287 6288 6289 6290 6291 6292 6293 6294 6295 6296 6297 6298 6299 6300 6301 6302 6303 6304 6305 6306 6307 6308 6309 6310 6311 6312 6313 6314 6315 6316 6317 6318 6319 6320 6321 6322 6323 6324 6325 6326 6327 Item no 장비명 DESCRIPTION 4507O-001 METRA-215 (Y)O-RING.5.109-243 500138 302-050.041-104 302-029.H62 COMP-U-MOI 4576G-002 IN LINE SEM (Y)VACUUM GAUGE(SPAC 4597M-002 PROB STATION (Y)MOTOR ASSEMBLY 4597M-003 PROB STATION (Y)MOTOR CARD 4597M-005 PROB STATION (Y)AUTO MICRO POSITONER 4597M-006 PROB STATION (Y)AUTO MICRO POSITONER 4597M-007 PROB STATION MICOR POSITIONER(LEF 4597M-008 PROB STATION MICRO POSITIONER(RIG 4597S-001 PROB STATION (Y)VACUUM SENSOR 4631B-022 WAFER VISUAL (Y)PCB BUILT(FLAT AL 4631S-003 WAFER VISUAL (Y)SENSOR PROXIMITY( 4631S-004 WAFER VISUAL (Y)PROXIMITY SWITCH( 4637B-013 CLEAN STOKER PCB BUILT 4637S-001 CLEAN STOKER (Y)CON PLUG MICROSWI 4637S-006 CLEAN STOKER SENSOR VACUUM 4641R-008 CLEAN STOKER ROLLER CHAIN 4701B-001 TESTER TERADYNE PIB BOARD 4701B-436 TESTER RATE 4702B-001 TESTER MCD DAUGHTER BOARD 4702B-223 TESTER VS BYPASS 4702P-208 TESTER PS MS 2.003-004 020-448.12-006 302-077.129-031 302-050.024-004 302-062. AIR PRESSURE 4507S-003 METRA-215 (Y)LEAD SCREW& NUT(M 4507U-001 METRA-215 ASURE (N)PRE ALIGNER CONTROLLER EQUI 4512B-001 WAFER INSPECTION EXTENDER CARD 4513B-002 WAFER INSPECTION (Y)ROBOT BELT 4513S-004 WAFER INSPECTION (Y)SPRING RETENSION 4514B-001 REVIEW STATION (Y)BATTERY 4514F-001 REVIEW STATION (Y)NEOZED-FUSE 10A 4514I-001 REVIEW STATION (Y)IC TCSS1110 4514L-002 REVIEW STATION HE-HOECHSTDR-LAMP 4514M-001 REVIEW STATION (Y)TRANSMISSION MOTOR 4514M-002 REVIEW STATION (Y)TRANSMISSION MOTOR 4514S-001 REVIEW STATION (Y)SENSOR 4514V-001 REVIEW STATION (Y)MAGNET VLAVE 4521L-001 MICRO SCOPE (C)HBO LAMP 4533M-001FILM THICKNESS MEAS(Y)MOTOR ASSEMBLY 4533S-001FILM THICKNESS MEASSTYLUS 12. L-10-6-2 L-10-6-2 L-10-6-2 L-10-6-3 L-10-6-3 L-10-6-3 B-1-3-4 VENDOR PART NO 26-08207-00 03-11433-00 03-11433-01 04-20514-00 04-17323-00 2K3818A 90420280A 345288 020-448.TURRET. CHUCK BOX 4720B-032 REPAIR EG PZ-5 ASS'Y SERVICE KIT 4720B-033 REPAIR (N)ZYGO RECEIVER 4720B-034 REPAIR MICRO COMPUTER ESD LOCATION L-11-4-1 L-11-4-1 J-6-5 D-8-1 N-1-2-2 N-1-2-2 N-8-1-4 N-8-1-4 L-10-7-2 L-10-4-2 D-3-3-2 N-8-1-4 N-1-2-2 E-1-1 N-2-5-2 L-10-7-2 L-10-7-2 L-3-5-1 L-10-4-2 L-10-4-2 L-10-4-2 J-1-1-1 D-8-1 L-10-7-2 N-8-2-3 L-10-7-2 B-2-4 N-8-2-3 N-1-2-3 L-10-7-2 N-1-3-2 J-4-2-1 H-5-2 B-1-3-4 J-4-2-1 I-7-2 G-2-4-2 L-10-6-2 B-1-1. VACUUM SENSO 4507S-002 METRA-215 (Y)PCA.

L-10-7-3 L-10-7-3 L-10-7-3 L-10-7-3 L-10-7-3 L-10-7-3 L-10-7-3 L-10-7-3 L-10-7-3 L-10-7-3 L-10-7-3 L-10-7-3 L-10-7-3 G-2-4-1 B-2-4 VENDOR PART NO 64390 73336 132-020 73463 908858-001 908928-006 908923-001 S-7000 908778-004 ELO-1-UC ELO-4-UC 909294-002 909294-004 909294-005 ESO-UC 7450UC(NO) 909294-003 HSDF-6055 HSDF-6056 DFA1NIEYNP64M SS-QC8-B-8PM 01000-VCR-N20-PF AS-568A-466(S) EE-SPY412 E3S-DS10E41 EE-SX473 수량 1 1 1 1 1 3 30 4 4 15 1 1 2 4 4 1 1 2 2 1 34 2 5 10 5 3 5 LOC VENDOR T12 T12 Q11 T12 Q11 Q11 Q11 Q11 Q11 Q11 Q11 Q11 Q11 Q11 Q11 Q11 Q11 Q11 Y11 Y11 O64 R62 N14 N24 T14 R13 T14 " " " " MFC " " " " " " " " " " " " " .F-SILICON (Y)PHOTO SENSOR (Y)PHOTO SENSOR (Y)PHOTO SENSOR LOCATION B-1-3-4 B-1-3-4 L-10-6-3 B-1-3-4 G-2-1 L-10-6-3.No Item no 장비명 6328 6329 6330 6331 6332 6333 6334 6335 6336 6337 6338 6339 6340 6341 6342 6343 6344 6345 6346 6347 6348 6349 6350 6351 6352 6353 6354 4720B-036 4720B-039 4720B-040 4720B-214 4920M-008 4920S-001 4920S-003 4920S-004 4920S-022 4920V-001 4920V-007 4920V-010 4920V-016 4920V-017 4920V-018 4920V-021 4920V-022 4920V-023 4993T-003 4993T-005 4996F-219 4996F-401 4996F-426 4996O-303 4996S-012 4996S-203 4996S-325 REPAIR REPAIR REPAIR REPAIR CORRECTION PART CORRECTION PART CORRECTION PART CORRECTION PART CORRECTION PART CORRECTION PART CORRECTION PART CORRECTION PART CORRECTION PART CORRECTION PART CORRECTION PART CORRECTION PART CORRECTION PART CORRECTION PART QUATRZ WARE QUATRZ WARE QUATRZ WARE QUATRZ WARE QUATRZ WARE QUATRZ WARE QUATRZ WARE QUATRZ WARE QUATRZ WARE DESCRIPTION CKA THETA CW INCIDENT DETECTOR BELT TIMING-BP RAISER CKA.PULSE DELETE SHUTTER SENSOR ASS'Y(10-499SCCM) SEAL NICKEL SENSOR ASS'Y SENSOR VALVE ASS'Y(10-499SCCM) VALVE 100<Q<500 SCCM VALVE 2000<Q<5000 SCCM VALVE VALVE VALVE VALVE VALVE VALVE ASSY (A)OUTER TUBE (A)INNER TUBE (F5)DI FILTER QUICK CONNECT(3300-91175) (Y)(F5)GAS PURIFIER (F5)O-RING.

M-2-3-2 K-7-1 1220-0003-0009 1220-0004-0004 5980-0019-0002 L-8-2 3232P-009 S2M20575 S2M20175 K-3-2-1 K-9-4 4053050 M-4-2-3 M-4-2-3 M-4-2-3 L-2-2-3 D-13-1 I-7-3 M-1-4-3 F-5-3 I-6-2 1100003-1 1100046 F3-T-001 F3-T-002 F3-T-003 F3-T-004 F3-T-005 F3-T-008 1102685400 DESKJET600C M-2-3-4 M-2-1-1 M-2-3-4 L-2-2-3 M-1-1. M-1-2 DESKJET660C 851-9547-006 SB-3SV-ML-S-T05 L-4-3-3 L-4-3-3 L-4-3-3 F-4-2-3 F-4-2-3 F-4-2-3 F-4-2-3 F-4-2-3 F-4-2-3 F-4-2-3 F-4-2-3 9ESA-001 X X 137901 14621 X X X X 82929 FM-123 FM-120 057320 032875 032840 032824 X X X LOCATION /SAP CODE/PART No. K-4-3-1 L-4-3-3 L-4-3-3 L-4-3-3 L-4-3-3 A-2-3.0 ㎛ RADIUS FSM 8800 PRECISION FLAT PROBE ARM MICRO MO社 DC MOTOR MOTHER PCB LEAD SCREW MOTOR DRIVER PCB ASS'Y X.Y DECODER RF PCB STANDARD DUAL INTERFACE PCB ANALOG PCB VACUUM SENSOR ASS'Y CHUCK ASS'Y LOCATION CODE/PART No.NO 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 29 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 NO 1 2 3 4 5 6 7 8 9 공정 T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO 번호 3TI-001 3TI-002 3TI-003 3TI-004 3TI-005 3TI-006 3TI-007 3TI-008 3TI-009 3TI-010 3TI-011 3TI-012 3TI-013 3TI-014 3TI-015 3TI-016 3TI-017 3TI-018 3TI-019 3TI-020 3TI-021 F3-T-001 F3-T-002 F3-T-003 F3-T-004 F3-T-005 F3-T-008 IF3-P-001 IF3-P-002 IF3-P-004 IF3-P-005 IF3-P-006 IF3-P-007 IF3-P-008 IF3-P-009 IF3-P-010 IF3-P-011 3-M-001 3-M-002 3-M-003 3-M-004 3-M-005 3-M-006 3-M-007 3-M-008 3-M-009 3-M-010 3-M-011 3-M-012 3-M-013 3-M-014 3-M-015 3-M-016 3-M-017 3-M-018 품 명 삼색등LAMP CTRL ASS`Y ADI CONTROL ASS`Y TDI CONTROL ASS`Y FOCUS DEFL PW SUPLY 공정 T/F T/F T/F PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO 번호 4-T-1-0001 4-T-1-1002 4-T-1-1003 4-P-1-1001 4-P-1-1002 4-P-1-1003 4-P-1-2001 4-P-1-2003 4-P-1-2004 품 명 EDWARD TWO STAGE MOTOR Preclean Chamber Lower Shield Car Rail Motor WAFER STAGE 6" CHUCK FAN ( EXHAUST ) 변압기( 220 -> 110 ) TEL I/F LM GUIDE ( Z ) TEL DEV CATCH CUP IWAKE AIR PUMP(P/R) SOURCE&ARC PW SPLY GSD READ SCREW GSD VACUUM CASSETTE GSD ROUGHING BELLOWS GSD HARD DRIVE ION GAUGE PORT ADPT KAISER SYSTEM CTRL KEY BOARD KEY BOARD GAS FLOW CONTROLLER C-DRIVE POWER SUPPLY HVV CONTROLLER TERMINAL DATA LINK HEAT FAN HI-VOLTAGE KAISER HI-VOLTAGE KAISER SEIKO SHA PRINTER ATP-4800 TOUCH SCREEN GAS STATUS PANEL NOVELLUS BACK MONITOR ROTARY PUMO (ALCATEL) PRINTER P/R FILTER HOUSING (DNS) VACUUM PUMP(NSR) PRINTER DUV RETICLE CASE(MS2용) LWAKI BELLOWS PUMP MONITOR(KLA5XXX) FLOPPY DISK(NSR) SERVO PACK(DNS629) DC MOTOR(CL4B24) EYEPIECE STYLUS ARM ASS'Y STYLUS 5. J-6-4 112612002 L-2-2-1 G-1-3 A-2-3 K-10-4-3 .

E-5500HP AMAT. K-7-3-4 K-7-3-4 K-7-3-4 K-7-3-4 N-5-1 J-6-5 K-7-3-4 K-7-3-4 K-7-3-4 GLFF4000VM4 K-3-5-2 K-3-5-2 LOCATION M-7-3-3 L-2-4-1. E-5500HP AMAT. PVD MODULE SELECT BLACK BOX RF CABLE PCW MOTOR REMOTE BOX MANUAL V/V EMO CABLE HARNESS. K-5-2-1 L-8-3-2. STOCKER E-1000HP NV-GSD/HE PI9500 PI9500 PI9500 NV-GSD/HE NV-GSD/HE NV-GSD/HE NV-GSD/HE NV-GSD/HE NV-GSD/HE NV-GSD/HE NV-GSD/HE AMAT. C-1 ALTUS WJ-1000 WJ-1000 K-3-3-3 K-3-3-3 K-3-3-3 K-3-3-3 L-8-4-2 L-8-4-2 . SENSOR LINE ULTRASONIC LEVEL SENSOR NUPRO V/V (DUAL) FLOW SWITCH PRESSURE REGULATOR VALVE SENSOR BARATRON GAUGE (10Torr) TIMING BELT SIGNAL CABLE류 LOCATION K-4-1-2 K-10-4-3 K-10-4-3 CODE/PART No. E-5500HP AMAT.NO 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 공정 PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO ETCH ETCH ETCH ETCH 번호 4-P-1-2005 4-P-1-2007 4-P-1-2008 4-P-1-2009 4-P-1-2010 4-P-1-2011 4-P-1-2012 4-P-1-2014 4-P-1-2015 4-P-1-2016 4-P-1-3001 4-P-1-3002 4-P-1-3003 4-E-1-0001 4-E-1-0002 4-E-1-0003 4-E-1-0004 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 공정 DIFF DIFF DIFF DIFF DIFF DIFF DIFF DIFF DIFF T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F 번호 5-D-1-0001 5-D-1-0002 5-D-1-0003 5-D-1-0004 5-D-1-0006 5-D-1-0007 5-D-1-0008 5-D-1-0009 5-D-1-0010 5-T-1-1001 5-T-1-1002 5-T-1-1003 5-T-1-1005 5-T-1-1006 5-T-1-1007 5-T-1-1008 5-T-1-1009 5-T-1-1010 5-T-1-1011 5-T-1-1012 5-T-1-1013 5-T-1-1015 5-T-1-1016 5-T-1-1017 5-T-1-1020 5-T-1-1021 5-T-1-1022 5-T-1-0003 5-T-1-0004 5-T-1-0005 5-T-1-0006 5-T-1-0007 5-T-1-0008 5-T-1-0009 5-T-1-0010 5-T-1-2001 5-T-1-2003 5-T-1-2004 5-T-1-2005 5-T-1-2007 5-T-1-2008 5-T-1-2009 5-T-1-2010 5-T-1-2011 5-T-1-2012 5-T-1-2013 5-T-1-2015 5-T-1-2016 5-T-1-2017 5-T-1-2018 5-T-1-2019 NO 품 명 TEL OVEN UP/DOWN CYLINDER TEL TRACK CABLE 보호 COVER E2 SCAN ARM CONNEC' B/D SIGNAL TOWER TEL TRACK M/A 방열판 TEL CATCH CUP UP/DOWN CYLINDER TEL TRACK REGULATOR DNS S/V ASS'Y MICRO VOLTAGE AMMETOR 신도리코 변압기 (100 ~ 150 ) LAMP CCD CAMERA DEVTERIUM LAMP GAS FILTER WALL KINER(국산화:금영) GAS INJECTION RING . E-5500HP NSK. C-5200 WJ-1000 NSK. M2000/8 AMK. L-8-4-3. AL Psc 소형 Vacuum Pump Motor 품명 고압 FUSW UNIT STOCKER PANEL 터미널 단자 써머 RELAY 통신 CABLE (4 CORE) 통신 CABLE (6-8 CORE) 통신 CABLE (15-20 CORE) 통신 CABLE (3 CORE) 통신 CABLE (2 CORE) AIR FILTER GAS REGULATOR SOLENOIDE V/V 4-WAY GAS BOTTLE PRESSURE GAUGE VCR TO CGA ADAPTOR ORIENT CONTROLLER FAN (100V) PURGE MANIFOLD ASSY OPEN/CLOSE ARGON PIPE STRIKE PLATE(1) STRIKE PLATE(2) STRIKE PLATE(4) APERTURE SUPPORT LINA 접지봉 POLE SHORT QUAD APERT QUAD EXIT VG QUICK CONNECTOR SOURCE GUIDE. PVD TiN PVD MAGNET ROTATION MOTOR LIFT BELLOWS ASSY. E-5500HP NSK. E-5500HP AMAT. M2i AMAT./SAP CODE/PART No. PVD CHAMBER SOURCE LIFT. PVD CHAMBER ACL & 부속품 CHAMBER PVD (STANDARD) LIFT HOOP. H-9-2 L-8-3-2 K-10-3-3 L-8-3-2 K-10-3-3 K-3-2-1 K-3-2-1 H-1-2 K-3-2-1 K-3-2-1 K-10-5-3 K-10-5-3 K-10-5-3 M-1-3-2 J-5-1 L-2-3-2 L-8-4-1 L-10-3-2 G-1-3 L-12-3-1 4305R-001 고정자산 No.

I-7-3 K-3-3-1 K-3-4-1 I-4-1 M-4-4 M-4-4 M-4-4 K-9-1-1 K-7-4 I-5-1 D-13-4.NO 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 공정 T/F T/F T/F PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH 번호 5-T-1-2020 5-T-1-2021 5-T-1-2022 5-P-1-0001 5-P-1-0201 5-P-1-0202 5-P-1-0301 5-P-1-0601 5-P-1-0602 5-P-1-1001 5-P-1-1002 5-P-1-1003 5-P-1-1004 5-P-1-1005 5-P-1-1006 5-P-1-1007 5-P-1-1008 5-P-1-1009 5-P-1-1010 5-P-1-1011 5-P-1-1012 5-P-1-1014 5-P-1-1016 5-P-1-1017 5-P-1-1018 5-P-1-1019 5-P-1-1020 5-P-1-2001 5-P-1-2002 5-P-1-2003 5-P-1-2004 5-P-1-2005 5-P-1-2006 5-P-1-2007 5-P-1-2008 5-P-1-2009 5-P-1-2010 5-P-1-2011 5-P-1-2012 5-P-1-2013 5-E-1-1 5-E-1-2 5-E-1-3 5-E-1-4 5-E-1-5 5-E-1-6 5-E-1-8 5-E-1-9 5-E-1-10 5-E-1-11 5-E-1-12 5-E-1-13 5-E-1-14 5-E-1-15 5-E-1-16 5-E-1-17 5-E-1-18 5-E-1-19 5-E-1-20 5-E-1-21 5-E-1-22 5-E-1-23 5-E-1-24 5-E-1-25 5-E-1-26 5-E-1-27 5-E-1-28 5-E-1-29 5-E-1-30 5-E-1-31 5-E-1-32 품 명 HOSE RF CABLE (LF) 단상 유도 전동기 VIDEO PRINT BASH PLATE FROSTY WAFER CPU COOLING FAN (A급) BALLSCREW (NEW PART) CASSETTE PLATE 판 SPRING NW40 TRAPPED CENTERING RING(VITON) AIR LINE(50m) SOG CHEMICAL LINE (10m) GAS FILTER (WGFG 10H S1*) MAIN N2용 GAS FILTER 5 MICRON FILTER CHART RECODER용 PAPER 1/2" SUS NUT 1/2" SUS LINE CAP CONNECTOR ARM-1 UP/DOWN CYLINDER CABLE 차단기 110V POWER CABLE AGV CASSETTE GUIDE EL CABLE DRAIN HOSE (L) DRAIN HOSE (S) (C)100W HBO BULB 240V SAFETY SWITCH DIAGNOSTIC KEYBOARD PC KEYBOARD 전해 콘덴서 20000UF/25V 전해 콘덴서 14500UF/50V 전해 콘덴서 10000UF/100WV LAMP HALOGEN 15V/150W ASS'Y BAR CODE READRE JIG CALIBRATION SENSOR UNIT SEND OPTICAL SPECIALTIES TOOL FINGER ALIGN CABLE KEBOARD INSERT AL BASE EXTERNAL CYLINDER LIFTER CYLINDER CURRENT DRIVE PROCESS MODULE ASS'Y CERAMIC INSULATOR ESC PROCESS KIT PID TEMP CONTROLLER 각종 R. CLAMP RING QUADSEAL PLATE DSQ PADDLE TEL CHART RECODE DSQ LEXAN COVER MINI MATCHER DSQ MATCHER DSQ DI TANK ASS'Y TEL EXHAUST RING DSQ FUNNEL & SPACER MIDDLE CHAMBER VAT V/V HEAT-JACKET LOWER FILTER RING ESC ESC ESC UPPER CHAMBER KIT PUMP VAC. D-11-4 L-1-2 I-7-3 M-4-1 J-3-5 K-8-3 NIKON I1OC UT 2244I UT 2244I OSI OVERLAY CANON I2 NIKON STEPPER CD-SEM DNS SOG COMMOM COMMOM COMMOM COMMOM COMMOM COMMOM COMMOM MARK-7 COMMOM COMMOM COMMOM MARK-7 SOG DNS DNS TPC85XX KLA21XX KLA21XX FT750 SORTER SORTER SORTER KLA21XX SORTER KLA21XX KLA21XX FT750 RS-35/C P-5000 P-5000 P-5000 C-5300 ALLIANCE C-5300 C-5200 P-5000 ALL M/C ALL M/C LAM TEL LAM LAM LAM TEL LAM LAM LAM LAM TEL LAM LAM LAM LAM LAM TEL LAM 공통 C-5200 PSC . NSK. L-8-3-1 L-6-3 L-2-4-4 L-2-5-3 L-2-5-3 L-5-1-4 L-5-1-4 L-5-1-4 L-5-1-4 L-5-1-4 K-1-3 K-1-2 K-2-4. GATE V/V ESC PROCESS KIT ASS'Y CASS.F CABLE BCL3 GAS LINE HEATER DSQ TOP PLATE UEL BODY UPPER ELECT. C-1 D-14-2 L-12-3-1 M-6-3-3 H-1-2 L-12-3-1 L-7-3 L-7-3 L-11-3-3 L-11-3-3 L-11-3-3 L-11-3-3 L-11-3-3 L-11-3-3 L-11-3-3 L-11-3-3 L-11-3-3 L-11-3-3 L-11-3-3 L-11-2-2 L-2-4-1. LOCK CYLINDER LOCATION CODE/PART No.

NO 공정 번호 NO 공정 PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO 번호 6-P-T-1 6-P-T-2 6-P-T-3 6-P-T-4 6-P-T-5 6-P-T-6 6-P-T-7 6-P-T-8 6-P-T-9 6-P-T-10 6-P-T-11 6-P-T-12 6-P-T-13 6-P-T-14 6-P-T-15 6-P-T-16 6-P-T-17 6-P-T-18 6-P-T-19 6-P-T-20 6-P-T-21 6-P-T-22 6-P-T-23 6-P-T-24 6-P-T-25 6-P-T-26 6-P-S-1 6-P-S-2 6-P-S-3 6-P-S-4 6-P-S-5 6-P-S-6 6-P-S-7 6-P-S-8 6-P-S-9 6-P-S-10 6-P-S-11 6-P-S-12 6-P-S-13 6-P-S-14 6-P-S-15 6-P-S-16 6-P-S-17 6-P-S-18 6-P-S-20 6-P-S-21 6-P-S-22 6-P-S-23 6-P-S-24 6-P-S-25 6-P-S-26 6-P-S-27 6-P-S-28 6-P-M-1 6-P-M-2 6-P-M-3 6-P-M-4 6-P-M-5 6-P-M-6 6-P-M-7 6-P-M-8 6-P-M-9 6-P-M-10 6-P-M-11 6-P-M-12 6-P-M-13 6-P-M-14 6-P-M-15 6-P-M-16 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 LOCATION FAB-6 LINE 반납 자재 LIST CODE/PART No.용 리모콘 NIKON STEPPER용 PRINTER(1) NIKON STEPPER용 PRINTER(2) NIKON STEPPER용 PRINTER(3) KLA P/W INSP.용 IMAGE PRINTER NIKON STEPPER용 COMPAC TAPE(1) NIKON STEPPER용 COMPAC TAPE(2) NIKON STEPPER용 COMPAC TAPE(3) NIKON STEPPER용 FILTER H-10-3 KEY BOARD KEY BOARD NIKON STEPPER 이설 공구 TOOL NIKON STEPPER 이설 공구 TOOL KLA OVERLAY용 PZT TOOL NIKON STEPPER용 RCS CONTROL BOX OSI OVERLAY용 SIGNAL TOWER NIKON STEPPER용 SIGNAL TOWER NIKON STEPPER용 R/T STAGE MOTOR UNIT NIKON STEPPER ILLUMINATION POWER SUPPLY NIKON STEPPER ILLUMINATION POWER SUPPLY SIGNAL TOWER SPEED SENSOR(1) SPEED SENSOR(2) SPEED SENSOR(3) SPEED SENSOR(4) SPEED SENSOR(5) LINER MOTOR(1) LINER MOTOR(2) ORIENTAL FAN STOCKER FAN 통신 CABLE SFS-7600 ARM ASS'Y PART TPC RORZE RD-021M8(1) TPC RORZE RD-021M8(2) TPC RORZE RD-021M8(3) TPC RORZE RD-021M8(4) CODE/PART No.用) AIR ON/OFF VALVE (SOG RINSE用) CLAMP RING SIGNAL TOWER RS231 통신 CABLE GLASE WAFER MARK-7 CATCH CUP MARK-8 CATCH CUP UPPER CUP MARK-7 DRAIN PIPE THINNER MANAL TANK NIKON STEPPER용 MONITOR KLA P/W INSP.용 DIGONOSTIC MONITOR LENS CLEANING용 IPA LOCAL PHONE SIGNAL TOWER ASML STEPPER용 LENS CLEANING용 전열기 ASML STEPPER용 LENS CLEANING용 받침대 KLA P/W INSP. 품 명 LOCATION CD SEM MONITOR CD SEM WORKSTATION CD SEM THERMAL PRINT(1) CD SEM THERMAL PRINT(2) CD SEM THERMAL PRINT(3) CD SEM HV CONTROLLER FILTER SUPPORT SCREEN TAPE SENSOR BOX SCRUBBER VACUUM SENSOR THINNER 탈기 SYSTEM TEL TRACK SIGNAL CABLE 1/4" AIR LINE TUBE SOG EXHAUST TRAP TOOL BOX CD SEM POLALOID AIR ON/OFF VALVE (SOG EBR用) AIR ON/OFF VALVE (SOG DISP. A4033C 715/33 품 명 2-39-00312 UPS-50 AMDS00-X0027 AMDS00-X0075 AMDSZ0-X0048 S5E70166 .

3X TPC ARM SCAN B'D(1) TPC ARM SCAN B'D(2) TPC ARM SCAN B'D(3) TPC ARM SCAN B'D(4) TPC ARM SCAN HOLDER CAP TPC ARM SCAN HOLDER CAP TPC ARM SCAN HOLDER CAP SFS-7600 G TOWER SENSOR CIRCUIT PROTECTOR HPO 100W/2 LAMP Stepping Motor Stepping Motor Ass'y Ozon DC Power Supply Gas Control Board 5V.15V Power Supply Oxide Exciter DC Power Supply Nitride Oxide Exciter DC Power Supply Gas Exciter Board Process Chamber Board CO2 Monitor Interface Board Interface Board Gas Control Board(3 Channel) Gas Monitor W/Catalyst Board Exciter Control Card Quartz Lid Heater Pad Hoop Corcom Emi Filter Chain Select Control Ass'y Mapping Cal Tool TMP Check Valve TMP Check Valve Alcatel Hi-Vac Sensor HDP Post Pin Set UV Probe Set DC 24V 10A Power Supply LED Cable Dome Lift Cable Remote Cable EMO Generator Cable LOCATION H-1-2 L-3-3-1 L-3-3-1 L-3-3-1 L-3-3-1 M-4-2-1 M-4-2-1 M-4-2-1 M-4-2-1 M-4-2-1 M-4-2-1 M-4-2-1 M-4-2-1 M-4-2-1 M-4-2-1 M-4-2-1 M-4-2-1 K-1-3 K-6-4-3 K-6-4-3 K-6-4-3 K-6-4-3 K-6-4-3 B-3-1-2 B-3-1-2 M-2-1-4 M-2-2-3 CODE/PART No. .305(1) 8" VLSI STD W/F 0.NO 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 공정 PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH 번호 6-P-M-17 6-P-M-18 6-P-M-19 6-P-M-20 6-P-M-21 6-P-M-22 6-P-M-23 6-P-M-24 6-P-M-25 6-P-M-26 6-P-M-27 6-P-M-28 6-P-M-29 6-P-M-30 6-P-M-31 6-P-M-32 6-P-M-33 6-P-M-34 6-P-M-35 6-P-M-36 6-P-M-37 6-P-M-38 6-P-M-39 6-P-M-40 6-P-M-41 6-P-M-42 6-P-M-43 6-P-M-44 6-P-M-45 6-P-M-46 6-P-M-47 6-P-M-48 6-P-M-49 6-P-M-50 6-P-M-51 6-P-M-52 6-P-M-53 6-P-M-54 6-P-M-55 6-P-M-56 6-P-M-57 6E001 6E002 6E003 6E004 6E005 6E006 6E007 6E008 6E009 6E010 6E011 6E012 6E013 6E014 6E015 6E016 6E017 6E018 6E020 6E021 6E022 6E023 6E024 6E025 6E026 6E027 6E028 6E029 6E030 6E031 6E032 품 명 TPC RORZE RD-023 FE-4D PULLY BELT FE-4D TIMING PULLY BELT M02 FE-4D TIMING PULLY BELT M01 8" VLSI STD W/F 0.305(2) 6" VLSI STD W/F (α-STEP) SORTER AUTONEST PORT(1) SORTER AUTONEST PORT(2) SORTER AUTONEST PORT(3) SORTER AUTONEST PORT(4) SORTER AUTONEST PORT(5) EX-520L PANNEL(1) EX-520L PANNEL(2) SFS-6200 15000INDEX(1) SFS-6200 15000INDEX(2) M SCOPE LENS FILTER M SCOPE TOOL(1) M SCOPE TOOL(2) M SCOPE TOOL(3) M SCOPE TOOL(4) M SCOPE TOOL(5) M SCOPE TOOL(6) M SCOPE TOOL(7) M SCOPE TOOL(8) M SCOPE TOOL(9) VACUUM PORT(1) VACUUM PORT(2) UV SECS SERIAL CABLE PC INTERCONNECTION CABLE M SCOPE LENS 6.

IMD用) PC HTHU(Hot Al) Shield LOCATION K-6-4-2 K-6-4-2 L-10-3-2 CODE/PART No./SAP CODE/PART No.10534-8b.4 0020-22982 0020-23042 0820-01040 0820-01022 15-028766-00 × S2S40168 . L-12-3-1 L-12-3-1 L-2-2-2 L-8-3-4 D-12-4 L-8-1 D-11-4 K-7-2. D-10-1 K-7-5 C-2-1 L-8-2 K-2-1 L-9-3 L-9-1 고정자산 No. VMM-40-104 VMM-40-101 VMM-40-201 LSC 8442 MODEL-900 PHOTOHELIC SENTRY 1510 LU 8206-A LU 8209-A TM-1200 CTL PJ.NO 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 공정 ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH ETCH 번호 6E033 6E034 6E036 6E037 6E038 6E039 6E040 6E041 6E042 6E043 6E044 6E045 6E046 6E047 6E048 6E049 6E050 6E051 6E052 6E053 6E054 6E055 6E056 6E058 6E059 6E060 6E061 6E062 6E063 6E065 6E066 6E067 6E068 6E069 6E070 6E071 6E072 6E073 6E074 6E075 6E076 6E077 6E078 6E079 NO 공정 DIFF DIFF DIFF DIFF DIFF DIFF DIFF DIFF DIFF DIFF DIFF DIFF DIFF DIFF DIFF DIFF T/F T/F T/F T/F T/F T/F T/F T/F 번호 7-D-001 7-D-002 7-D-003 7-D-004 7-D-005 7-D-006 7-D-007 7-D-008 7-D-009 7-D-010 7-D-011 7-D-012 7-D-013 7-D-014 7-D-015 7-D-016 7-T-1 7-T-2 7-T-3 7-T-4 7-T-5 7-T-7 7-T-8 7-T-9 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 품 명 Remote Video Cable RFPP Generator Source Ship Kit Mercury Lamp Signal Tower Orienter Cal Tool HDP Wall TC Generator Rack Supply Cable Signal Cable Signal Cable Printer Cable EMO Interconnect Cable Turbo Pump Interconnect Cable Chiller EMO Cable Target Power Cable Match 24V Cable Timming Belt AGV Interface Cable RS232 Cable HDP Wall Heater Ethernet Interconnector Cable Grounding Wire Poly AC Power Cable Harness EMO Interconnect Cable Interface Cable 24V AGV Interface Cable HDP Chamber Cable Halogen Lamp Cable DPS Poly RF 동축 Cable Slit Valve Body ISO Valve Cassette Stage Gas Box Video Printer Pump Power Cable Move Lift Power Supply Single Strip Qzone T-Match HOT Plate Loadlock Door Chiller Hose Poly Chamber Lid Buffer Chamber Lid Lift Manual TC 품 명 SIC LINER TUBE(TEL) TEL FURNACE HEATER TEL FURNACE HEATER TEL FURNACE HEATER KE FURNACE HEATER KE FURNACE HEATER LIQUID SORUCE CONT' IONIZER TIP CLEANER PRESSURE GAUGE EXH' CONTROLLER MULTI TRAP HOUSING TEOS CHARGE SYSTEM TEOS CHARGE SYSTEM 1 POINT T/C CALIBRATOR 변압기 Q'TZ WOOL 진공 Pump G12(TIN) Adaptor HTHU(Hot Al) Adaptor Det Calibration Kit Gasteck " Guard Ring(Speed.

C2 CVD ADCS L/S level monitor Microwave cavity Bellows 7x Gas Bottle Bracket Auto tilter Motor Auto tilter Damper Auto tilter Dummy CASS Auto tilter align Jig Auto tilter align Jig Blanket Pannel N2 Supply Gauge Auto tilter bracket Eprom Vaporizer Load buffer CASS exahust mount cryo local cont'r turbo battery bracket bracket damper spring affinity chiller ionizer ana-ch lnr brackt heat shield auto tilter ass'y rf power cleaner C/B 240VAC 50A C/B 240VAC 150A actr rtry aajustable antle comm mtom fley on-board cont sw fitting 3/4" quick conn 1" LOCATION CODE/PART No. S2S40112 S2S40236 S2S40116 S2S40114 S2S40153 × 0200-35529 0010-36476 0020-21664 0020-21664 3320-02241 0100-09225 × × 03-00254-00 0021-35989 0020-09680 × 0020-22509 0100-20004 × HP EPSON × × × × × × × × × × × × 0040-31980 × × × × × E17059931 × × × E18004811 E18005140 17059430 × × × 17033330 × × × × 17111480 E110890570 × × × E17028520 0040-38663 E11066630 0190-35867 0680-01476 0680-01877 0520-01052 500624 × E34000202 × .W/J 1000 Heater block .NO 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 공정 T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F 번호 7-T-10 7-T-11 7-T-12 7-T-13 7-T-14 7-T-15 7-T-16 7-T-17 7-T-20 7-T-21 7-T-22 7-T-23 7-T-24 7-T-25 7-T-26 7-T-29 7-T-30 7-T-31 7-T-32 7-T-33 7-T-34 7-T-35 7-T-36 7-T-C-1 7-T-C-2 7-T-C-3 7-T-C-4 7-T-C-5 7-T-C-6 7-T-C-7 7-T-C-8 7-T-C-9 7-T-C-10 7-T-C-11 7-T-C-12 7-T-C-13 7-T-C-14 7-T-C-15 7-T-C-16 7-T-C-17 7-T-C-18 7-T-I-1 7-T-I-2 7-T-I-3 7-T-I-4 7-T-I-5 7-T-I-6 7-T-I-7 7-T-I-8 7-T-I-9 7-T-I-10 7-T-I-11 7-T-I-12 7-T-I-13 7-T-I-14 7-T-I-15 7-T-I-16 7-T-I-17 7-T-I-18 7-T-I-20 7-T-I-21 7-T-I-22 7-T-I-23 7-T-I-24 7-T-I-26 7-T-I-27 7-T-I-28 7-T-I-29 7-T-I-30 7-T-I-31 7-T-I-32 7-T-I-33 품 명 HTHU(Hot Al) Clamp Ring IMP Ti Shield Coh-Ti Clamp Ring G12(TIN) Clamp Ring Coh-Ti Lower Shield Shield Treatment Controller Chamber Insert(Txz) Edge Ring(Txz) Lid Insulator(Al) Lid Insulator(TiN) Coper Gasket CVD Tin Interlock B/D Adaptorr Hastings Vacuum Gauge Spindle Motor(Altus) Clear Lid(Txz) Clear Lid(PC-2) Leveller(Txz) Clamp Ring(509) Ch# Interconnector B/D SBC Board(Old Version) PC Printer NW40 배관 PC Key booard WJ Orifice bellows Slit V/V plate(Producer) W/J Ozone cell Manipulator signal cable NUPRO V/V Sus plate 류 Stepper Motor for PE5000 Trszar variable capacitor PA Tube (HDP) Injection V/V Gas box for PE5000 Conveyor belt .

CO PURIFIER.CL2 PURIFIER.CH3F PURIFIER. D-14-4 M-3-1.CO PURIFIER.C2F6 PURIFIER.NO 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 공정 T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F T/F PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO 번호 7-T-I-34 7-T-I-35 7-T-I-36 7-T-I-37 7-T-I-38 7-T-I-39 7-T-I-40 7-T-I-41 7-T-I-42 7-T-I-43 7-T-I-44 7-T-I-45 7-T-I-46 7-T-I-47 7-T-I-48 7-T-I-49 7-P-S-1 7-P-S-2 7-P-S-3 7-P-S-4 7-P-S-5 7-P-S-6 7-P-S-7 7-P-S-8 7-P-S-10 7-P-S-11 7-P-S-12 7-P-S-13 7-P-S-14 7-P-S-15 7-P-S-16 7-P-S-17 7-P-S-18 7-P-S-19 7-P-S-20 7-P-S-21 7-P-T-1 7-P-T-2 7-P-T-3 7-P-T-8 7-P-T-10 7-P-T-14 7-P-T-15 7-P-T-16 7-P-T-19 7-P-M-1 7-P-M-2 7-P-M-3 7-P-M-4 7-P-M-5 7-P-M-6 7-P-M-7 7-P-M-8 7-P-M-9 7-P-M-10 7-P-M-11 7-P-M-12 7-P-M-13 7-P-M-14 7-P-M-15 7-P-M-16 E7-1 E7-2 E7-3 E7-4 E7-5 E7-6 E7-7 E7-8 E7-9 E7-10 E7-11 품 명 bracket lower sld e220 remote pwr rack EMO cable(100ft) alcatel pump EMO cable steag rtp cont'r vacuum feedthru ass'y harness w0613 harn autotilter bottom plt autotilter pcb ass'y WH control pcb ass'y WH control pcb ass'y CASS INF CASS BTTM PLT mount loadlock pcb motor mount plate hose for gsd CANON R/T CHANGER ASS'Y CANON RCS 작업용 KEYBOARD CANON CD80-CD B/D(OLD) EQ-111AD CANON用 PRINTER(BJ-30V) CANON用 PRINTER(star JT-144CL) NIKON PRINTER(VP-4500) CYMER TOOL BOX CANON CLEANING TOOL BOX ASML CHUCK COVER CYMER LNP (5000) OSI CASS. M-3-2 J-5-1 K-2-4 4571B-004 4571P-002 4513B-005 4571B-002 4146V-011 3934R-002 S5G80118 4551S-005 00200-VCR-CL2-PF-C22 RT-5RA 00200-VCR-AR-PF-VAR-RT-5Ra 00200-VCR-O2-PF-RT RA-VAR 00200-VCR-C3F3-PF-RT-3/8*1/4-5Ra-VAR 00200-VCR-CH3F-PF-SS-RT-3/8*1/4-5Ra 00200-VCR-CO-PF-RT-3/8*1/4-5Ra-VCR 00200-VCR-CO-PF-RT-3/8*1/4-5Ra-VCR 00200-VCR-CH3F-PF-RT-3/8*1/4-5Ra-VAR 00200-VCR-C2F6-PF-RT-3/8*1/4-5Ra-VAR 00200-VCR-O2-PF-RT-5Ra-VAR 00200-VCR-O2-PF-RT-5Ra-VAR . D-13-3 M-6-2-2 D-12-1 D-14-3.O2 PURIFIER.O2 LOCATION CODE/PART No.C3F3 PURIFIER. PLATE Thinwire Ethernet Multiport Repeater Local ethernet bridge 연장 B/D CANON ROBOT OSI 보조 COMPUTER R/T CHANGER REGULATOR BOX CANON MONITOR EXH DUCT EXH DUCT Φ75 THC 외부 DUCT ZIPO TUBE(빨간색) EXH DUCT STEPPER DUCT 각종 TUBE EXH CHECKER ZIPO TUBE LIFTER DRIVER BOARD LEP RACK POWER SUPPLY STAGE BELT OSRAM HBO LAMP 100W/2 FLAT-FINDER ASS'Y DI FILTER CHILLER PUMP (Y)TIMING PULLEY BELT SOLENOID VALVE PRECISION REGULATOR TP-500 REFERENCE BLOCK SEM LHV2N BOARD SORTER W/F SCAN SENSOR PCA EDGE SENSOR FLAT ALIGNER SORTER P-100 CPU BOARD MONITIR (CD-SEM用) PURIFIER. 0021-02966 E19004192 0150-10409 0150-10409 × E11066680 e16005500 e16065830 e11066650 E15004120 E15004150 e15004140 × e17062151 E17130710 × J-4-3-3 D-14-1.O2 PURIFIER.CH3F PURIFIER.AR PURIFIER.

TYLAN MFC.CH3F PURIFIER.MA9609363 FC-2902MEP.N2 500sccm.TYLAN MFC.AR PURIFIER.MA98093056 .5200 MCC IPS BOARD RS-232 TO RS-485 CONVERTOER 4단자 AC CABLE KIT.TYLAN MFC.C4F8 20sccm.CL2 200sccm.HY9608146 FC-2900MEP5.O2 1000sccm.N2 PURGE LOW TEMP CATH CHILLER TEMP READING CABLE HP LASERJET 4MP PRINTER MFC.Board CH# INTERCONNECT B-D.NO 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 공정 PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO 번호 E7-12 E7-13 E7-14 E7-15 E7-16 E7-17 E7-18 E7-19 E7-20 E7-21 E7-22 E7-23 E7-24 E7-25 E7-26 E7-27 E7-28 E7-29 E7-30 E7-31 E7-32 E7-33 E7-34 E7-35 E7-36 E7-37 E7-38 E7-39 E7-40 E7-42 E7-43 E7-45 E7-46 E7-47 E7-48 E7-49 E7-50 E7-51 E7-52 E7-53 E7-54 E7-55 E7-56 E7-57 E7-59 E7-60 E7-61 E7-62 E7-63 E7-64 E7-65 E7-66 E7-67 E7-68 E7-69 E7-70 E7-71 E7-72 E7-73 E7-74 E7-75 E7-76 E7-77 E7-78 E7-79 E7-80 E7-81 E7-82 E7-83 E7-86 E7-87 E7-88 품 명 PURIFIER.TYLAN LOCATION CODE/PART No.C4F6 50sccm.CHXINTERFACE BE AERO CHILLER RIBBON CABLE RIBBON CABLE RIBBON CABLE.C4F8 20sccm.C3F8 PURIFIER PURIFIER.IPS 5200 MCC TURBO INTERCONNECT BOARD STEPPER CONTROLLER BOARD CONTACTOR INTERLOCK BOARD BOARD AC DISTRIBUTION BOARD CH# INTERFACE BOARD.TYLAN MFC.O2 500sccm.TYLAN MFC.MA9509595 FC-2900M.CF4 50sccm.A99030519 MODEL:B1583-07120KBL 0010-20932 0680-01124 0100-35212 0100-35213 0100-20051 0100-20173 0110-20027 0090-76133 0090-76114 0100-35207 0660-01743 0242-00897 0150-75197 0150-20038 0150-76099 0150-75198 0140-20214 0140-76625 0150-10505 0150-20187 0100-38083 0100-35083 0100-09196 0100-35064 0660-01641 0150-76190 3860-01112 3860-01105 0680-01199 0242-00889 0150-00404 FC-2900MEP5.O2 1000sccm. 18Inch AIR TUBE.MM9804154 FC-2902MEP.120/208V.AERA AC POWER SERVO DIVER AC POWER 연장 CABLE(110V用) AC CONNECTOR(30V.MAG LAMP DRIVER CONTROL HARNESS ASSY.TYLAN MFC.CENTURA MSM PWB#2 MONTROSE/COT CABLE MONITOR CABLE.TYLAN MFC.O2 MT COOLDOWN CH#用 TOP COVER EMPTY LINE SMALL STORAGE BOX 110V 전원 연결 BOX(4구짜리) C-5200用 MAGNET COIL LAM 장비 VAT V/V HOUSING(2000) CHILLER HOSE(PVC) CHILLER HOSE(SUS) MFC.O2 3000sccm.MM9806015 FC-2902MEP.3상) 5-PHASE STEPPING MOTOR CIRCUIT BREAKER(20A) CH# A/C TRAY.AR PURIFIER.02 10sccm.HY9608136 FC-2950MEP5.C3F8 PURIFIER PURIFIER PURIFIER.N2 PURIFIER.MM9711213 10RaFC-D980C.CHF3 100sccm.MM9801030 FC-2902MEP.Board ESC CONTROLLER B/D ESC CONTROLLER POWER SUPPLY.TYLAN MFC.IPS 5200 MCC CH# B/D TRAY.AR PURIFIER.TYLAN MFC.4CH#用 AC DISTRIBUTION Board 5200 PERSONALITY Board MONITOR CABLE.MA9707317 FC-2902MEP.HDD RIBBON CABLE HARNESS ASSY.TYLAN MFC.N2 PURIFIER PURIFIER.15PIN KEYBOARD AIR TUBE. 00200-VCR-AR-PF-VAR-RT-5Ra 00600-VCR-N2-PF-SS-RT-5RA-LPD 00200-VCR-CH3F-PF-RT-3/8*1/4-5Ra-VAR 00600-VCR-N2-PF-SS-RT-5Ra-VAR 0224-40008 00200-VCR-AR-PF-SS-RT-(1/4*1/4) 00200-VCR-C3F8-PF-SS-RT-(3/8*1/4) 0225-40005 0225-40471 00200-VCR-C3F8-PF-RT-3/8*1/4-5Ra-VAR 0225-40772 00200-VCR-AR-PF-RT-5Ra-VAR 00200-VCR-O2-PF-SS-RT-5Re-VAR 0020-76181 0010-30533 0242-36143 FC-2902MEP.15PIN CH# INTERCONNECT A-C. 18Inch CBMAG 3P 240VAC 30A KIT.MM9603169 FC-2950MEP5.

TEL 장비用 LOCATION CODE/PART No.MA9602316 FC-2900MEP5.STEC Western Digital HDD.SERVO CONTROLLER B/D DUAL STEPPER DRIVER B/D SBC INTERCONNECT B/D FLAT ALIGNER INTERFACE B/D OPERATOR INTERFACE B/D H2 THETA INTERFACE B/D X.CL2 100sccm.TYLAN MFC.N2 50sccm.Y LIMIT B/D HANDLER SHUTTLE B/D SERVO MOTOR CONTROLLER DRIVE B/D LOAD WINDOW INTERFACE B/D PCA POS SENSOR TURRET STEPPER MOTOR B/D Penning Gauge Chuck PS ECPU Board BLK Amp LOCATION K-6-4-3 F-4-4-2 F-4-4-1 F-4-4-1 F-4-4-1 N-8-2-1 B-3-1-2 B-3-4-1 B-3-4-1 K-2-3 F-4-2-1 F-4-2-1 F-4-2-1 F-4-2-1 J-4-1-1 J-4-1-1 Vendor P/N 1985-411787-1* 1985-414069-1* ? 없슴 없슴 2910-446606-11 2910-405112-11 2910-304635-13 2910-305280-11 N-2-1-3 F-4-3-3 F-4-3-3 F-4-3-3 M-6-2-2 F-4-3-3 F-4-3-1 F-4-3-1 F-4-3-1 F-4-3-1 J-4-3-1 F-4-3-1 J-4-2-3 J-4-2-3 J-4-1-1 J-4-1-1 J-4-1-1 J-4-1-1 J-4-1-1 J-4-1-1 J-4-1-1 J-4-1-1 J-1-3-2 J-1-3-2 J-1-3-2 J-1-3-2 J-1-3-2 J-1-3-2 188859 54-0183 54-0287 54-0219 54-0283 54-0276 54-0216 54-0112 54-0095 54-0292 54-0148 54-0273 54-0220 54-0289 54-0221 54-0150 54-0277 54-0275 54-0265 568-5532 271-2860 568-5579 .TYLAN MFC.UNIT(BC-D01H1) BALL BUSH(SMK12GWUH) CLB-3375A(MEC-40V-0) MUX-CARD & 8T/C(8 X 4 MUX) COUPLING(E32-12-12) P.HBR 100sccm.TYLAN MFC.20D1883 SEC-7440MC.CF4 50sccm.AERA MFC.MA9608806 FC2950MEP5.O2 20sccm.C BOARD(SER-3388A) MULTI-TAB 4-CHAN MTR DRV B/D PCA MOTOR CONTROLLER B/D STAGE DRIVE B/D DIAGNOSTICS DRIVE B/D H2 MAIN INTERFACE B/D SYSTEM STATUS.A99040926 TC FC-980.UNIT(BC-D01H1) OPTICAL TRANS.STEC MFC.MA9703085 FC-2902MEP-T.LED B/D DOOR INTERCONNECT B/D F2 CPU B/D PCA.TYLAN MFC.AERA MFC.TEL 장비用 E7-99 E7-100 Unity-Ⅱ MAIN Board.TYLAN MFC.N2 400sccm.SF6 200sccm.MC99123032 10RaFC-D980C.CO 100sccm.2362314 SEC-7440MC.C BOARD(CLS-3261AA) P. FC-2900M.NO 241 242 243 244 245 246 247 248 249 250 251 252 253 254 공정 PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO PHOTO 번호 E7-89 E7-90 E7-91 E7-92 E7-93 E7-94 E7-95 E7-96 E7-97 E7-98 품 명 MFC.2368507 SVME/AT-486Ea V1 SVA004-1-S IFAB운영팀 불용자재 LIST NO 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 공정 Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo Photo 번호 RP-001 RP-002 RP-004 RP-005 RP-006 RP-007 RP-011 RP-012 RP-014 RP-015 RP-016 RP-018 RP-101 RP-102 RP-103 RP-104 RP-105 RP-106 RP-107 RP-108 RP-109 RP-110 RP-111 RP-112 RP-113 RP-114 RP-115 RP-116 RP-117 RP-119 RP-120 RP-121 RP-122 RP-123 RP-124 RP-125 RP-126 RP-127 RP-128 RP-129 RP-130 RP-131 RP-132 RP-133 RP-134 RP-135 RP-136 RP-137 RP-138 RP-139 RP-140 RP-141 RP-142 RP-143 Description F2 Trap(ELS-4000용) Canon W/F Chuck E2 Nozzle Arm Ass'y E2 Nozzle Ass'y DEV Nozzle Drain Bath (Stream용) Waste Evacuation System Interface Module Cybor Pump DEV Top Cover (ACT-8) Wafer Block (Act-8 IRA) Tweezers (Act-8 IRA) 8" Pincette (ACT-8 PRA) 5-PHASE DRIVER(A4509-048) OPC-2505A-4 OPC-2586A(MEC-M1) OPC-2503B-4 COV-3420B CLW-3327A(MEC-40V-0) Bay Networks(Model 800) LM GUIDE(HSR15R1UUF+640LF) Network Cable(DIASET-158IB) OPTICAL TRANS.N2 200sccm.MM9805099 FC-2900MEP5.

Valve.DIGI-4.375id*0. D-11-5 F-4-2-2 F-4-2-2 F-4-2-2 F-4-2-2 M-4-2-1 F-4-3-2 F-4-3-2 K-2-3 I-3-2 D-8-3 I-8-3 K-2-2-2 F-4-3-2 K-2-2-2 D-8-3 I-3-2 K-4-3-2 CODE/PART No. Conduction board Personality board dry pump interface module dry pump interface module dry pump interface cable Iqdp signal cable hose flex blws thin NW25 Cable.620 Cable assy 75ft dc source Cable assy lid left mtr ctrl Cable assy scr driver ctrl harn assy 24vdc n2 flow pvd cd target support shelf exhaust feedthroth pannel ch2 wtor cover rf generator cooling turbo controller support panel turbo controller panel controller cover brkt pcb turbo interconnect sus pannel (150*150) pannel blank turbo cntl blankoff mainframe elbow switch turbo support shelf assy power cable iqdp80/500 assy power cable iqdp80 70ft kit 75f intfl cbl iqdp80 hose hert exchange s/r hose hert exchange s/r 0224-44246 assy power cable iqdp80 Cable. system remote monitor Cable.C probe Gas feed through Base plate(HDP) Antenna dome ass'y Qt'z dome Qt'z collar(Rev.NO 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 공정 Photo Photo Photo Photo Etch Etch Etch Etch Etch Etch Etch Etch Etch Etch Etch Etch Etch Etch Etch Etch Etch Etch Etch Etch Etch Etch Etch Etch Etch Etch Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film 번호 RP-144 RP-145 RP-146 RP-147 RE-001 RE-002 RE-003 RE-004 RE-005 RE-006 RE-007 RE-008 RE-009 RE-010 RE-011 RE-012 RE-013 RE-014 RE-015 RE-016 RE-017 RE-018 RE-019 RE-020 RE-021 RE-022 RE-023 RE-024 RE-025 RE-026 RT-001 RT-002 RT-003 RT-004 RT-006 RT-007 RT-008 RT-009 RT-010 RT-012 RT-013 RT-014 RT-015 RT-016 RT-017 RT-018 RT-019 RT-020 RT-021 RT-022 RT-023 RT-024 RT-025 RT-026 RT-027 RT-028 RT-029 RT-030 RT-031 RT-032 RT-033 RT-034 RT-035 RT-036 RT-037 RT-038 RT-039 RT-040 RT-041 RT-042 RT-043 RT-044 품 명 Cassette Index ACL Unit Gun Chamber Assy PCA. D-9-3 D-9-3 D-9-3 D-9-3 D-9-3 N-6-5-3 D-9-3 D-9-3 F-4-2-2 F-4-2-2 F-4-2-2 L-9-1-3 N-8-1-3. 9pin signal RS485 cable cable harness (chamber signal) Cable. 18hole) L/L ISO valve(eMax) Cassette clamp ass'y Qt'z cover ring Focus ring Shadow ring Al GDP ISO valve(DSQ) Clamp(TCP-9400) ESC insulator Edge ring RF stepped window(TCP-9400) Sol. 64pin signal LOCATION N-6-5-3 N-6-5-3 L-7-4 J-4-1-1 N-6-5-3 N-6-5-3 I-4-1 K-3-5-1 D-9-2 I-4-2 N-6-5-3 K-2-4 B-3-4-3 K-3-5-1.0) Post pin(ZrO2) Grafoil Si slab(CGF. Sharoud RF dip board(DSQ) SS.CONFIGURED Wall T. N2 jet M-Chuck Ring. I-4-1 I-3-2 K-1-4. signal Cable. 53-0022 0190-40097 0050-40316 0200-40131 0010-40298 0200-40189 0200-40182 0020-41155 0020-40627 0020-35546 0190-13041 0010-20399 0020-36690 0020-09741 0200-10151 0200-10246 716-330915-001 716-011651-008 716-031635-002 853-015770-001 715-031752-208 810-017057-001 0240-38377 0240-38378 0240-39753 0620-02268 0021-21143 0150-20160 0140-20517 0140-21595 0150-20599 0150-20602 0150-22457 0140-21816 3400-01057 0150-20708 0150-20601 0150-00948 0140-20611 0270-20290 0040-76073 0040-21826 0040-23147 0040-22415 0240-20210 0020-20060 0040-00729 0020-70536 0020-20267 0020-20991 0020-75990 0020-21251 0227-04949 0224-44246 0227-04956 0010-13635 0010-13635 0227-04949 0150-21147 0140-76222 0150-76066 0150-36394 0150-20019 . EMO harness assy expansion B/D DC power harness assy system AC CVD option Cable assy mtr lid left pwr Cable assy buf/xfer lin in system ribbon cable cable harness cd inconnect hose cable gas/ 0.

I-8-3 K-1-2 D-8-3 L-1-3 L-10-1 CODE/PART No. 0020-20719 0040-20811 0020-20499 0240-20308 3700-01351 0240-76735 0020-76954 0150-20038 0150-20296 0140-20327 0020-76473 3400-01068 0150-20296 0050-20954 0020-21007 0040-20165 0020-76474 3860-01145 0150-20061 0140-76169 1410-01020 0150-09678 0150-20586 0150-09600 0150-20869 0150-20672 3400-01004 0150-20090 0150-76288 0150-21666 0010-20422 0220-21854 0020-26667 0220-20692 0040-20733 3400-01098 0020-23441 0020-23352 3300-02347 0020-20699 0020-20700 0160-20000 0021-21942 0020-28676 0020-20914 0020-20913 1310-01023 0150-35227 0150-20160 0150-20576 0150-20160 0150-35227 0150-20021 006654 3400-01074 0270-20086 0140-20205 1270-01290 0010-70403 0140-20208 0690-01036 3300-01347 0020-26312 0020-26311 0020-28288 0020-24914 0020-28754 0040-21762 0020-28251 0020-28208 .5 Cable ch chield side treatment Cable power dc Cable rf coil power supply roughing v/v clear cover pc2-cern g12 pvd ch clear cover rg ltr air press gas line 1/2 vcr hose air 1/4 id 200psi brkt plumbing motorized lift DISK HEATER conn strn-rlf clamp ar flex 8" gar v/v clamp end ar flex 8" gate v/v connecter coaxial b101 wtr 30x cover plate plate (50x200x10) panel sus 150x200x3 blank mac roughing line (nw40) Cable signal Cable emo Cable emo Cable emo Cable 15pin signal Cable 36pin signal ion gauge signal cable hose gas/lig 0.910 plate (Al) 200x450x10 72pin ribbon cable blanket g12 afs lid pvd ribbon cable clamp nw40 wing ftp flange blanket nw40 shield upper (IL) SHIELD LOWER 8" DURA TTN COVER RING SST 8" 101 COVERAGE pedestal chimney ( clean & spray) shield adaptor shield sus K-4-2-2 L-8-3-4 J-5-4 K-3-2-1 I-8-3 J-6-4 D-9-1 K-3-2-1 K-3-2-1 L-4-2-1 L-4-2-1 L-4-2-1 L-4-2-1 L-4-2-1 L-4-2-1 L-4-2-1 L-4-2-1 K-4-2-1 K-4-2-1 K-9-2-4 K-9-2-4 K-9-2-4 D-9-4 K-9-2-4 K-9-2-4 I-3-1 I-3-1 K-1-2.250id*0.NO 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 공정 Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film 번호 RT-045 RT-046 RT-047 RT-048 RT-049 RT-050 RT-051 RT-052 RT-053 RT-054 RT-055 RT-056 RT-057 RT-058 RT-059 RT-060 RT-061 RT-062 RT-063 RT-064 RT-065 RT-066 RT-067 RT-068 RT-069 RT-070 RT-071 RT-072 RT-073 RT-074 RT-075 RT-076 RT-077 RT-078 RT-079 RT-080 RT-081 RT-082 RT-083 RT-084 RT-085 RT-086 RT-087 RT-088 RT-089 RT-090 RT-091 RT-092 RT-093 RT-094 RT-095 RT-096 RT-097 RT-098 RT-099 RT-100 RT-101 RT-102 RT-103 RT-104 RT-105 RT-106 RT-107 RT-108 RT-109 RT-110 RT-111 RT-112 RT-113 RT-114 RT-115 RT-116 품 명 support bor generator rack adpter elbow with cryo buffer WINDOW PROTECTIVE kit elec terminal lugs SEAL CENTER RING ASSY kit floor mount generaor rack bracket clanp 1/2 ~ 2 1/2) Cable (di mtd*b/f) ribbon cable LOCATION D-8-3 I-8-3 K-4-3-2 K-4-3-2 K-5-5-2 L-8-3-4 K-4-2-2 cable pvd shutter signal K-4-2-1 brkt gen rack floor mount Cable gas line 1/4 vcr BLOCK WALL-CLAMP SCR 4way 1/4 gas line brkt gen rack plate 1/4용 보온용 tube Cable (5pin ribbon) cable heating cable Cable signal Cable signal Cable signal Cable chamber shield treatment cable K-4-2-2 hose gas/lig 0.625 x 0.

I-8-3 I-8-3 D-12-4 K-2-1 CODE/PART No.B 3700-01510 3700-01511 0020-35474 0200-35712 912747-001 912584-001-D MF4-137400-A .NO 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 공정 Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Thin Film Diffusion 번호 RT-117 RT-118 RT-119 RT-120 RT-121 RT-122 RT-123 RT-124 RT-125 RT-126 RT-127 RT-128 RT-129 RT-130 RT-131 RT-132 RT-133 RT-134 RT-135 RT-137 RT-138 RT-139 RT-140 RD-001 품 명 clamp ring 8"jmf 101 Ti plus (IL) SHIELD UPPER 8" HI PWR clamp ring collimator NSK stepping driver pedestal pedestal shield SAME 4302W-002(QUZ CLAMP) key board chamber (chamber e) gate v/v gas line (chamber e) cooling water line Wafer detector sensor CASSETTE SUPPORT O-ring upper clamp ring inner O-ring lower base ring Barrier Top Teflon O-ring Liquid line Liquid line Thermal TC Heater Lift Assy INJECTOR SLEEVE LOCATION I-8-3 K-2-3 L-1-3. 0020-27718 0020-28206 0020-27217 0020-21528 0020-24434/A 0020-22844 0020-10187 1(4EA반 K-10-1-2 K-10-1-2 K-2-1 K-10-1-2 L-9-3 J-6-5 0200-22691.

수량 1 3 1 3 비고 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 9 1 1 3 1 1 2 6 2 1 3 10 1 1 1 1 1 3 1 1 1 2 1 1 1 2 수량 1 1 1 1 2 1 1 1 1 비고 STEPPER TRACK .

수량 25 1 2 2 3 3 2 1 1 1 19 1 4 64 1 1 4 비고 수량 18 8 1 13 1 1 1 1 1 6 2 6 기타 측정 IMP 3 3 1 2 1 1 4 4 4 1 1 288 90 88 20(20EA반출) PVD 5(5EA반출) 12 3(3EA반출) 5(5EA반출) 4(4EA반출) 5(5EA반출) 1(1EA반출) 3 CVD 1 2 2 1 1 1 6 6 2 1 2 3 14 1 .

수량
5
2
1
3
4
2
7
1
20
2
3
5
1
1
1
10
12
17
1
5
1
1
4
20
1
1
1
45
5
1
1
32
34
11
7
2
4
1
1
1
5
5
12
4
2
3
1
2
1
3
17
3
2
1
3
6
3
2
2
1
2
1
1
2
2
2
2
3불출
3
1
3

비고

STEPPER

TRACK

측정

수량

비고

수량
1
1
1
1
1
1
3
10
5
7
1
100
3
1
3
2
10
4
1
7
1
13
3
6
2
1
1
1
1
2
4
10
8
2
1
1
1
1
18
18
17
32
1
1
1
1
1
1
8
4
7
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1

기타

수량
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
9
16
7
2
1
2
1
1
1
1
1
1
1
1
2
2
4
4
3
1
1
1
1
1
1
1
1
1
1
1
1
7

비고

Amat
Amat
Fusion
Fusion
Fusion
Fusion
Fusion
Fusion
Fusion
Fusion
Fusion
Fusion
Fusion
Fusion
Fusion
Fusion
Amat
Amat
Amat
Amat
Amat
Lam
Lam
Lam
Amat
Fusion
Amat
Amat
Amat
Amat
Amat

수량 2 1 1 2 1 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 4 2 1 1 1 1 2 1 4 2 1 6 2 2 1 1 1 2 2 2 1 1 1 7 비고 Amat Amat Amat Amat Amat Amat Amat Amat Amat Amat Amat Amat Amat Amat Amat Fusion Amat Amat Amat Amat Amat Amat Amat Amat Amat Amat Amat Amat Amat Lam Lam Amat Amat Lam Amat Amat Fusion Lam Ushio Amat Amat Amat Amat Amat 수량 기타 4 1 1 1 1 3 4 2 1 2 3 2 1 1 1 25 1 3(3EA반출) 9(9EA반출) 2 2 5 1 12 .

수량 6 2 10 2 9 3 1 2 3 5 56 4 1 2 1 2 3 3 9 2 1 1 2 5 6 22 14 1 8 8 1 1 1 2 1 1 4 3 1 1 2 3 9 9 3 5 3 2 1 1 15 2 1 5 1 3 1 1 4 1 1 1 4 11 4 3 2 3 2 1 5 1 비고 .

수량 4 1 1 3 1 11 9 2 12 2 2 6 3 12 30 1 4 5 7 5 5 3 4 3 5 16 2 9 1 6 1 2 2 1 1 3 4 2 10 19 3 4 1 1 3 1 2 1 11 1 1 1 1 2 1 1 1 1 1 2 1 1 1 1 1 1 1 1 1 1 1 1 비고 .

수량 1 1 1 1 1 1 1 1 2 1 1 1 1 4 20 1 36 3 2 2 1 1 1 1 1 1 1 1 1 14 3 1 2 1 1 3 1 1 1 3 3 1 1 1 2 4 1 1 2 1 1 1 1 1 1 1 1 3 2 2 1 1 1 1 1 1 1 1 1 1 1 비고 .

수량 1 1 1 1 1 1 1 1 1 7 비고 7 수량 1 3 2 4 2 1 3 2 1 2 1 2 2 1 1 1 2 1 1 1 3 1 13 4 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 2 2 2 1 기타 .

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GRAPHITE(Ta20 RTP TOBOT VACUUM SWITCH S/R-INNER-TAPER1 T7(CZ-240) 육각 SCREW BOLT (1 1INCH 12단) 4WAY MODULE S/V O-RING 57 O-RING 35 O-RING VITON 2-375 FEEDTHRU COUNET VALVE POPET SF01 SF01 SF01 S2K60019 S2K60020 S2K60023 REFLETOR ELECTRON CONTACTOR-MAGNET P/S D/T O-RING 1.Code Mat.Code Mat. Description 재고현황 LOCATION P-3-2-4 P-3-4 P-3-2-3 P-3-2-3 Vendor Part.2 0720-718327 EA EA EA EA EA EA EA EA EA EA EA 2 1 1 1 3 1 2 1 1 10 20 P-3-2-3 P-3-5 P-3-4 P-3-5 P-3-4 P-3-4 P-3-4 P-3-4 P-3-4 P-3-4 P-3-4 0020-10887 30172074 ZSE2-T1-15CN 1810-223992-1 11INCH 12단 4020021 2541006 109734001 E35000310 2520055 2560108 EA EA EA EA EA EA EA EA EA EA EA 8 1 5 2 1 4 1 1 2 1 2 A-ED-509 4500057 2542219 EA EA EA 1 1 1 P-3-3 P-3-3 P-3-2-3 P-3-2-3 P-3-1 P-3-2-3 P-3-2-3 P-3-2-3 P-3-4 P-3-4 P-3-4 LOCATION 포장수량 BIN-NO .C)SCR SLT SHLDR(SAME:S9Z631 SUSCEPTER UNIT.209 ID BUNA S/L Mat.품목정보 S/L Mat.No UOM DFA1FRESSW44 385-302389-7 90330018A D2H64J(HISCO) EA SET EA EA 10 1 1 1 P-3-4 110530000000 MLAKD154601 MLAKD154603 DMX431P-WA-F # H105290 H 220230 E7866 3900-100919 3900-100918 "CRIC1000-A1. Description SF01 SF01 FAB4 FAB4 S9Z62470 S4T20959 S5E20066 S5J10053 NEGA DEVELOPER FILTER 6" DEV CUP ASS'Y RING OF LIGHTS LAMP FILAMENT FAB5 FAB5 FAB5 FAB5 FAB5 FAB5 FAB5 SR01 SR01 SR01 SR01 S1QC0332 S3H40062 S3H40065 S3H40066 S3H40084 S3H40087 S3H40091 S1S40006 S1S40007 S1S40009 S1S40072 (CL)QTZ CAP PLATE(L) 110530086 STAGE SEAL BELLOWS(DMX421P/431P STAGE SEAL BELLOWS(DMX421P) DMX431P ISURATOR RING E/R CHECK STAGE SHIELD RING (QZ) BELLOWS(3) BRUSH(TOP) BRUSH(BOTTOM) PRIMARY PAD WEARING INSERT RING SR01 SF03 SF03 SF03 SF01 SF01 SF01 SF01 SF01 SF01 SF01 S2A60128 S1B70215 S1D20147 S3T40608 S2K60006 S2K60008 S2K60009 S2K60010 S2K60011 S2K60013 S2K60017 (C.

19LG ASS'Y VAC ARM MKII TAPED 5In BLOCKER PLATE(134DX) WAFERGARD F40 0.S HEATER 보호 COVER TEFLON SOLENOID ASSEMBLY P-3-2-1 P-3-2-1 P-3-2-2 P-3-2-1 P-3-2-1 P-3-2-1 P-3-2-1 P-3-2-1 P-3-2-1 P-3-2-1 P-3-2-1 1 1 1 1 1 2 1 1 2 2 1 A1-60-19 A2-07-19 A2-08-20 A2-12-19 A2-13-17 A2-16-02 A2-27-11 A2-28-14 A2-34-20 A2-41-16 A2-43-13 SF01 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SF02 SR01 S5D90004 S3H20533 S3M30237 S3M30219 S3M30195 S3H20568 S3H20414 S3B80080 S3M30024 S3M30167 S1S40079 ARGON LASER TUBE O-RING RETAINER SI HOT RING WALL COVER MARK IV *(IL)SAC ETCHER SI ROOF ELECTRON HEAD ELECTRON HEAD AL RING(5PK) COVER 200MM-E-CHUCK-M RING INSULATOT-DUAL TEF (CL)CETAMIC WEATING P-3-1 P-3-3 P-3-5 P-3-3 P-3-6 P-3-6 P-3-6 P-3-1 P-3-1 P-3-1 P-3-1 1 2 3 1 1 1 1 24 1 1 6 A3-02-04 A4-04-05 A4-05-01 A4-07-06 A4-09-02 A4-09-02 A4-10-04 A4-10-05 A4-10-06 A4-12-06 A8-05-02 .1UM FILTER (CL)FILTER UV LEXAN CLAMP GUIDE ASS'Y(AL) SOLENOID VALVE(CHILLER) SENSOR BRACKET VACUUM SWITCH(VAC)(SAME.SF02 S3H20504 VACUUM SWITCH(ATM) P-3-2-1 1 A1-09-02 SF02 SR01 SF02 SF03 SR01 SR01 SF02 SF02 SR01 SF02 SF02 S3H20591 S4T60089 S3H20063 S5A30526 S3H70063 S4T60091 S3H20442 S3M30240 S4T60007 S3H20612 S3M30070 LODE LINEAR ARM PLATE CABLE VACUUM SENSOR CAPACITANCE MANO (ASH) IT CARD ASSEMBLY VCE-4 PCB LASER ASS'Y(SENS PROCON PUMP (IMPELLER) FOCUS RING LAMP BULB 750W FILTER WAFER PUSHIER GROUND MESH P-3-3 P-3-2-1 P-3-2-2 P-3-2-1 P-3-2-1 P-3-2-1 P-3-3 P-3-1 P-3-1 P-3-2-1 P-3-2-1 1 1 2 1 1 2 2 22 1 1 5 A1-09-13 A1-10-15 A1-12-15 A1-33-18 A1-36-16 A1-38-11 A1-43-15 A1-56-05 A1-57-15 A1-57-17 A1-59-14 SR01 SR01 SR01 SR01 SF03 SF02 SF03 SF03 SF02 SF02 SR01 S4T60010 S4T60084 S2A60697 S4T60008 S2A90448 S3H20589 S5J10092 S4T41238 S3H20505 S3A20057 S4T60088 VAC ARM KIT-6Inch.

803V 2 4 S1A20110 4RK25RA-30RB 4RK25RA-30RB MOTOR KOKUSAI FURNACE DD-802V.Motor 매각품목 List(장부 재고) 현재고 Material No LOCATION Vendor Part No 1 S1A20070 I-6-2 - D1637-444 ENCODER (E) BOTTOM KOKUSAI FURNACE DD-802V.803V 1 2 S1A20071 - UPX534M-A-A15 ENCODER (E) BOTTOM KOKUSAI FURNACE DD-802V.803V 8 5 S1A70269 040-000294-1 A3549-9215HGE MOTOR TEL FURNACE ALPHA-605DN 1 6 S1A70277 040-395151-1 A3651-9015HGE MOTOR TEL FURNACE ALPHA-605DN 1 7 S1A70278 040-566106-1 UPH566-A MOTOR TEL FURNACE ALPHA-605DN 3 8 S1A70289 040-000266-1 S43h SYNCHRONOUS MOTOR TEL FURNACE ALPHA-605DN 2 9 S1B10004 NTN SARI-12 2GB 50K SPHERICAL BEARING KOYO FURNACE VF4000 3 10 S1B10055 2RJ4GB-A 2RJ4GB-A REVERSIBLE MOTOR KOYO FURNACE VF4000 3 11 S1B10057 PS5913-AM PS5913-AM PULSE MOTOR KOYO FURNACE VF4000 2 12 S1B10060 I-6-3 R88M-H30030-B R88M-H30030-B SERVO MOTOR KOYO FURNACE VF4000 1 13 S1B10061 I-6-3 R88M-H10030 R88M-H10030 SERVO MOTOR KOYO FURNACE VF4000 1 14 S1B40016 AP-0021 SS21M-SSSD MOTOR CONTROLLER ASM FURNACE ASM-100 1 15 S1B40024 MP-0003 KP56RN2-014 MOTOR ASM FURNACE ASM-100 1 16 S1B40026 MP-0001 KP56GM2-003 MOTOR ASM FURNACE ASM-100 1 17 S1B40027 MP-0002 KP56GM2-003 MOTOR ASM FURNACE ASM-100 1 18 S1B40029 I-6-3 2PK6RGN-A 2RR6RGN-A SPEED CONTROL MOTOR ASM FURNACE ASM-100 1 19 S1B40030 I-6-3 SS301 SS301 SPEED CONTROL MOTOR ASM FURNACE ASM-100 1 20 S1B40031 I-6-3 SS31-SSSD SS31-SSSD SPEED CONTROL MOTOR ASM FURNACE ASM-100 1 21 S1C60015 T4033-02 LA23GGKX-3B ACTUATOR MOTOR QI W/F TRANSFER A5225-150 2 22 S1L20068 I-6-3 4RK25GEN-AM 4RK25RGN-AM MOTOR MUSASHI WETSTATION M-6000 2 23 S1L50060 I-6-3 AMP5 AMP5 INDEX MOTOR SUGAI WETSTATION S-G-1.MOTOR GEAR 12C DC AME ETCHER P5000 MARK-2.M2i 1 30 S2S40082 H-1-2 K0043-M K0043-M MOTOR 24VAC AME SPUTTER E-5500HP 1 31 S3A50068 257611 PH264-01B-C80 STEPPER MOTOR ASSY EATON ASHER M200ACU 1 32 S3A60022 PK-0029 RM-5685D PULSE MOTOR ASE ASHER RAM 8500 I/Z 8 33 S3A60023 PK-0040 PH264M-31B-C22 PULSE MOTOR ASE ASHER RAM 8500 I/Z 3 34 S3A60090 PK-0027 RM-5640D PULSE MOTOR ASE ASHER RAM 8500 I/Z 5 35 S3M10525 I-6-2 1080-01056 RB-35GM-CA35-H114 MOTOR GEAR AME ETCHER P5000 MARK-2.MXP 2 38 S3T10120 886-432131-1 PH544-NB-C2 ROTATION MOTOR TEL ETCHER 5000 5 40 S3T30070 1886-425291-11 PX245-01A-C11 CHUCK UP/DOWN MOTOR TEL ETCHER UNITY I85TPATC 5 41 S3T30072 1886-45293-11 PX244M-01A-C4 EDGE SENSOR MOTOR TEL ETCHER UNITY I85TPATC 4 42 S3T30073 1886-455292-11 PX244M-01A-C4 PINSET MOTOR TEL ETCHER UNITY I85TPATC 4 43 S3T30074 1886-455162-13 UPH566-AM INDEX MOTOR ASS'Y TEL ETCHER UNITY I85TPATC 3 44 S3T30075 I-6-3 1886-455194-11 UPH566H-A H.MXP 5 36 S3M10526 I-6-2 1080-01057 RB-35GM-CA35-H114 CVD.C LIFT SENSOR MORTOR TEL ETCHER UNITY I85TPATC 3 46 S4A70038 2-39-36275 PH266-01GK-C5 STEPPING MOTOR DNS SCRUBBER SSW-80A/AVR 1 47 S4A70039 2-39-39645 2CSMGK-101 STEPPING MOTOR DNS SCRUBBER SSW-80A/AVR 1 48 S4R10081 01-06-0199 01-06-0199 SHUTTER MOTOR ASS'Y UT STEPPER 1100 49 S4R10082 01-08-00159 PX244-03AA LEFT WINDWOR MOTOR UT STEPPER 1100 1 50 S4R10083 01-08-00158 PX244-03AA RIGHT WINDOW MOTOR UT STEPPER 1100 1 51 S4R20030 01-15-02240-01 13D-04A MOTOR-W/CONN-XL UT STEPPER 2244i 2 52 S4R20031 01-15-02240-02 13D-04A MOTOR-W/CONN-XR UT STEPPER 2244i 2 53 S4R20032 01-15-02240-03 10-15-02044-H MOTOR-W/CONN-YL UT STEPPER 2244i 1 54 S4R20033 01-15-02240-04 BD-04A MOTOR-W/CONN-YR UT STEPPER 2244i 2 55 S4S30252 WL2-0021-000 USACEM-02AA2K AC SERVO MOTOR CANON STEPPER FPA-1550M3 1 I-6-3 I-6-3 Model MODEL NO 품 명 적용 장비 수량 1 1 .A MOTOR TEL ETCHER UNITY I85TPATC 3 45 S3T30119 I-6-3 1886-455158-11 USAREM-A5DTE12 P.MXP 2 37 S3M10536 0010-20339 PX245M-02AA MOTOR AME ETCHER P5000 MARK-2.803V 1 3 S1A20072 UPH596H-A UPH569H-A-A5 STEPPING MOTOR KOKUSAI FURNACE DD-802V.2 2 26 S1Q50054 2.2 2 24 S1L50099 5RK40RA-25RA 5RK40RA-25LA WARM GEAR MOTOR SUGAI WETSTATION S-G-1.M2i 1 29 S2S30133 I-6-3 00-01209-133 00-01209-133 MOTOR ASSY U12 NOVELLUS SPUTTER M2000.2 1 25 S1L50103 SGI-924 DME60 INDEX MOTOR SUGAI WETSTATION S-G-1.2KW TFO 3PHASE INDUCTANCE MOTOR SPW DRYER ALPHA SCIENCE ALS-7500 2 27 S1T30091 - RHT12S70 SOLENOID VALVE POLYFLOW TUBE WASHER S-413 28 S2S30129 00-S0669-011 00-S0669-011 CENTER MOTOR NOVELLUS SPUTTER M2000.

8 1 69 S4T50152 112-012 GM9413C316 GEAR MOTOR 15V SVG TRACK SVG-88 9 70 S4T50154 99-13273-01 PH264-01 RAIL MOTOR ASSY SVG TRACK SVG-88 3 71 S4T50157 112-053 PX244-02BA GEAR MOTOR SVG TRACK SVG-88 4 72 S4T50158 99-16098-01 PK245-02BA-C1 STEP MOTOR SVG TRACK SVG-88 2 73 S4T50162 112-098 GM8714F658 GEAR MOTOR SVG TRACK SVG-88 2 74 S4T50163 112-107 GM8714F638 GEAR MOTOR SVG TRACK SVG-88 4 75 S4T50168 112-088 CYHC-62976-35-1 MOTOR SVG TRACK SVG-88 1 76 S4T50171 112-110 GM8712F660 GEAR MOTOR SVG TRACK SVG-88 4 77 S4T50178 112-083 215033 ENCODER MOTOR SVG TRACK SVG-88 2 78 S4T50182 99-22488-02 CYHC-62976-35-1 ASSY MOTOR SVG TRACK SVG-88 4 79 S4T50382 D-2-2-3 112-085 R32SSNA-R2-NS-NV-05 SPINDLE MOTOR SVG TRACK SVG-88 3 80 S4T70042 I-6-2.55 3 85 S5E20075 20006580A 417-17-12 R-AXIS MOTOR INSPEX W/F INSPECTION TPC-9000.8 1 67 S4T40093 1386-443498-12 103H7522-70E3 M/A THETA MOTOR TEL TRACK MARK-7.8 2 68 S4T40189 1386-443509-12 103-7555-7043 3P MAS X MOTOR ASSY TEL TRACK MARK-7. I-6-3 2-39-45634 HA-FE23D AC MOTOR DNS TRACK SSW-80B 4 81 S4T70048 I-6-2 2-39-48727 A4552-9215KHGE STEPPING MOTOR DNS TRACK SSW-80B 2 82 S4T80413 I-6-2 2-39-38906 PH544-NA-C4 STEPPING MOTOR DNS TRACK SSW-80B 2 83 S5B70065 545-3727 545-3727 DC MOTOR ASSY HITACHI CD SEM S-6000 SERISE 1 84 S5D60191 52-0243 4232B471-R1 MOTOR ASSY KLA TENCOR OMNIMAP RS-35C.8604 1 87 S5H20030 7200-1815 ODV76 MOTOR LINEAR NANOMETRICS MEASUREMENT M8000XSE 1 88 S5H20034 7200-1720 7213C204 ASSY MOTOR NANOMETRICS MEASUREMENT M8000XSE 1 89 S5H30043 39-0061 42-95 MTR-STPR KLA TENCOR MEASUREMENT FT-750 1 90 S5H30072 52-0268 5112B446 MOTOR KLA TENCOR MEASUREMENT FT-750 1 1386-443510-13 I-6-3 I-6-2 Model 현재고 Material No D-2-2-3 Vendor Part No MODEL NO 품 명 적용 장비 수량 1 .8 2 66 S4T40092 040-000479-1 103H7522-70E3 THETA MOTOR TEL TRACK MARK-7.8525 4 86 S5G10051 FP-S5102 L163 SERVO MOTOR WED SORTER 8602.1505 G6E 1 62 S4T30097 4-4 PH266-01GK MOTOR STEPPING(PH266-01GK) TEL TRACK MARK-5 2 63 S4T30105 PX243M01A PX243M-01A STEPPING MOTOR TEL TRACK MARK-5 1 64 S4T30106 PX243M01A PX244M-01A STEPPING MOTOR TEL TRACK MARK-5 65 S4T40089 BG10DB13BAABN 3P MAS T MOTOR ASSY TEL TRACK MARK-7.1505 G6E 1 61 S4S70197 KBA00600-532 2251R012S DC MOTOR NIKON STEPPER 1505G4D.LOCATION 56 S4S30298 WL1-0079-000 PH569-A MOTOR STEPPING CANON STEPPER FPA-1550M3 3 57 S4S30306 WL1-5019-000 PH544-NA MOTOR STEPPING CANON STEPPER FPA-1550M3 2 58 S4S30307 WL1-5024-000 EM564-NA MOTOR STEPPING CANON STEPPER FPA-1550M3 3 59 S4S30308 WL1-5022-000 PH554-NB MOTOR STEPPING CANON STEPPER FPA-1550M3 1 60 S4S70194 KBB00650-502 541485 MOTOR NIKON STEPPER 1505G4D.

2 MICRON I-6-3 N2 FILTER MITSUIBISHI IPR D20S221 1 PALL S3A50018 206661 C6AM6925 I-6-3 FILTER-GF502 EATON ASHER M200ACU 13 MILIPORE 7 S3L20416 775-009688-001 X I-6-3 FILTER-DI LAM ETCHER RAINBOW/TCP 9400 6 X 8 S3M10387 0226-32398 X I-6-2 FILTER MOTT C.1UM DNS SCRUBBER SSW-80A/AVR 1 11 S4T20312 024-009250-1 X I-6-3 FILTER TEL TRACK MARK-2 2 MILIPORE 12 S4T40367 024-010422-1 2T-110 FILTER UNIT 2T-110-1 TEL TRACK MARK-8 5 CAMBRIDGE 13 S4T80151 305 X 305 X 75D NMPZ-24S HEPA FILTER DNS TRACK 629-BW/6 3 14 S9Z60238 DS03B-N E2A21 066 IPA FILTER COMMON 15 S9Z61535 WDFG 40PS WDFG 40PSF CHEMICAL FILTER COMMON 2 MILIPORE 16 S9Z61574 LDFN1F00113E1 TQ0341 SUPER CHEMICAL FILTER COMMON 1 PALL I-6-3 100 X PALL OSHITARI 14 CLEARSET .22 POU AME ETCHER P-5000 MARK2 1 MOTT PALL 9 S3M30067 APX-X015 X AIR FILTER AME ETCHER C-5300 HDP 10 S4A70084 2-39-06075 X I-6-3 FILTER PALL DFA DFA 0.820C 5 MILIPORE AB04F0103EH1 TQ0128 I-6-3 LIQUID FILTER MITSUIBISHI IPR D20S221 4 DSLK JFRPV 0.Filter類 매각품목 List(장부 재고) 단위:원 NO Material No Vendor Part No Model LOCATION 1 S1B10041 H610XW760XD78 X L-7-2 2 S1B10042 910X540X1.5T X 3 S1K10089 4 S1T20005 5 S1T20008 6 품 명 MODEL 적용 장비 현재고 MAKER 수량 HEPA FILTER KOYO FURNACE VF4000 1 PRE-FILTER KOYO FURNACE VF4000 1 X X WGFV80P01 H-9-1 FILTER DNS WETSTATION WSW-8200.

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