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Applicant: Name of Organization: Tool Owner: Tool Identification Tool ID Code: Tool Name: Supplier: Model:
Form Number/Rev # EHS-00017-F1 R17
Date of Commissioning:
New - anticipated arrival date - / / Relocated (equipment must be decontaminated) - from other location from within CNSE Facilities Change to Existing Installation (only complete sections that apply) Description of Change(s):
Responsible Parties Installation Coordinator Tool Owner Tool Engineer/ Equipment Engineer CNSE Environmental, Health & Safety CNSE Facilities Tool Hook-up Manager
Code (R) IC TO
This checklist is for use in approving the completed installation of tools using Hazardous Production Materials (HPM) and equipment for commissioning to be used in the CNSE Facilities. The checklist is divided into two (2) parts. Part 1 covers the electrical, mechanical, non-HPM chemicals and facilities release. Part 2 covers the release of all Hazardous Production Materials and Physical Hazards for tool/equipment operation. This checklist must be completed prior to releasing the tool/equipment to the tool owner for process transition and operational use.
Printed copies are considered uncontrolled. Verify revision prior to use.
CNSE Confidential When Completed
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Equipment Commissioning Checklist
PART 1 EQUIPMENT COMMISSIONING CHECKLIST
Electrical & Mechanical Activation, Non-HPM Chemicals and Facilities Release
In some cases electrical energy must be supplied to execute portions of the Part 1 Checklist. Necessary electrical power circuits may be released from LOTO, following approval from CNSE Facilities EHS, in order to check proper operation of these subsystems. The circuits must then be returned to a LOTO state until Part 1 is approved. When the Part 1 Checklist is fully and successfully completed, all electrical power, vacuum, non-HPM chemical and water facilities may be activated. All other systems associated with the tool/equipment (i.e. physical, HPM chemical, radiation, or other hazards) must remain completely locked out until installation is complete and the Part 2 Checklist is approved. NA Name of Panel / Feeder N A A. Electrical Matrix List all sources of electricity to the tool/equipment (IC) Voltage (V) Breaker Current Size Phase List Tested & (A) (A) Voltage Verified? B. Electrical Safety Requirements IC X X X X X X X X
Lockable Disconnect? TE/EE
Has ground continuity been verified? (Ground/bond straps installed & verified where applicable) 2. Has the facility power network from the distribution or branch panel to the tool main disconnect been verified for correct connections and labeling? 3. Are there lockable main power disconnects readily accessible, properly labeled, and capable of disconnecting all electrical power sources to the machine? 4. Is electrical wiring/ equipment protected from probable liquid leak sources?
X X X
Is a Ground Fault Circuit Interrupt (GFCI) system installed & operating per design, where applicable? N/A 6. If installed in hazardous classified locations or exposed to flammable vapors, are all electrical components rated for hazardous locations in accordance with ICC Electrical Code class, group & division per design? 7. Is the tool connected to an Uninterruptible Power Supply (UPS unit & tool labeled accordingly)? N/A 8. Are all support systems (i.e. vacuum pumps, chillers, etc.) fed from the tool or sub-panel properly connected and labeled? 9. Are the following items labeled correctly and clearly? (labeling requirements in parentheses) a. Main power disconnect (On/Off, tool ID(s) that it supplies, voltage, phase, current, supply circuit #, location / ID of supply sub-panel) b. Supply electrical sub-panel (tool identification that it supplies) c.All tool disconnects (On/Off, tool ID(s) that it supplies, voltage, phase, current, supply circuit #, location / ID of supply sub-panel, type of power (e.g.
Printed copies are considered uncontrolled. Verify revision prior to use.
X X X
X X X X
X X X
X X X
X X X
CNSE Confidential When Completed
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10? 3. are all hazardous energies completely locked and tagged out? 4. panel #). Prior to Part 1 sign-off. Is there a 36" horizontal servicing clearance for HPM workstations (per NYSFC 1805. Have Lockout / Tagout (LOTO) procedures been developed specific to this equipment and submitted to EHS? 2. servicing. adjustment. Is equipment containing lasers labeled per ANSI Z136. certifying compliance with FDA -CDRH requirements (21 CFR 1010. X X Page 3 of X X DCN0778 CNSE Confidential When Completed 20 . Lockout/Tagout and Hazardous Energy Control NA 1. 10. whichever is greater (NEC)? 3. Is there a protective housing around the laser? Printed copies are considered uncontrolled.g. Is a label visibly present on the outside of the tool. and chemical.1 & per 21 CFR 1010 & 21 CFR 1040. UPS)). d. Is there a minimum of 80" clear headroom in electrical workspace per NEC? IC TE/EE EHS 1. radiation. light trees) labeled appropriately? Are all unused openings in electrical panels or enclosures properly closed? IC TE/EE EHS X X X X X X X X NA Cord & Plug C. Are tool status indictors (i. Lasers A List Type & Quantity: Class 1 Class 1M Class 2 Class 2M Class 3R Class 3B Class 4 N/A TE/EE EHS X X X X 1. electrical) been verified to ensure that installation personnel will NOT be exposed to hazardous conditions during remaining installation activities? If not. ↙ N/A Notes and Comments: IC TE/EE EHS X X X X X X X D. hydraulic. Electrical Safety Requirements A Normal.) & are all isolation points identified and documented? 3. Is the width of the working space in front of electrical equipment the width of the equipment or 30 inches. 2. Convenience outlets (circuit breaker #.e.3)? 5. Access and Clearance Requirements Is the minimum work space clearance in front of electrical equipment that is likely to require examination. Are means provided for isolation (LOTO) of all hazardous energy sources (mechanical. etc. pneumatic. depending on NEC conditions). N/A e.2. Are all laser interlocks functional and is the Activation Warning System operational as required? 4. X X X X X X X X X X X X X X 4. (36" for < 150 V or 42-48" for 150-600 V.2)? 2.2. Has the activation of any Part 1 (non-HPM) utility (e. Do all exterior doors and access panels warn of the hazards located behind them? N E. please describe. Verify revision prior to use. or maintenance while energized compliant with NEC.Equipment Commissioning Checklist EHS-00017-F1 R17 N B.
are the sources enclosed. Are all non-HPM gas &/or liquid. Have all RF & microwave sources been identified and properly labeled? 4. Is the power supply to all radiation sources (ionizing and non-ionizing) locked / tagged out and is all shielding in place? (NOTE: Radiation sources will not be energized prior to Part 2 sign-off. Radiation Requirements 1. and at regular intervals Printed copies are considered uncontrolled. Chiller. before & after every structural penetration. CDA. Have all sources of ionizing radiation been added to the CNSE EHS Radiation Device Inventory (EHS-00016-F2)? 9. clearly labeled (contents & direction of flow) at every change of direction. List All Utilities (Non-HPM Gas &/or Liquid. Water. are the sources enclosed. interlocked and properly labeled? 2. Process Vacuum. Facility Lines. 7. complete the form: EHS-00048-F1. Are all removable service access panels either interlocked or require a tool for removal? 6. Have all sources of ionizing radiation been reviewed by CNSE EHS and the CNSE Radiation Safety Officer? 8.) Needed For Part 1 Sign-off Utility Needed Labeled? Leak Checked? Comments: Yes No Yes No Yes No Yes No Yes No Yes No Yes No Yes No Yes No Yes No Yes No Yes No Yes No Yes No Yes No Yes No Yes No Yes No Yes No Yes No IC TE/EE EHS 1. etc. Do all viewing portals attenuate to class 1 or less? X X X 7. water. Requirements for a Class 3B or 4 Laser. field strength and hazard distance? 3. Have all sources of non-ionizing radiation been reviewed by CNSE Radiation Safety Officer? 5. Are sources of strong magnetic fields (>5 gauss) properly labeled with pacemaker hazard. X X X DCN0778 CNSE Confidential When Completed Page 4 of 20 . Verify revision prior to use. If X-ray sources are present. chiller. 8. Are all sources of ionizing radiation registered with the NY State Department of Health? Radiation Sources (TE) Check all that apply Frequency and/or Wavelength Maximum Power RF / Microwave Ultraviolet Infrared X-Ray X X X X X X X X N/A TE/EE EHS X X X X X X X X X X X X X X X X X X X X X X X Properly Labeled? Yes No Yes No Yes No Yes No NA G.Equipment Commissioning Checklist EHS-00017-F1 R17 5. interlocked and properly labeled? 6. Have all Lasers been added to the CNSE Facilities Laser Inventory (EHS00016-F5) and reviewed by the CNSE Radiation Safety Officer? NA F. or Natural Gas Lines. CDA. PVAC. If hazardous UV light sources are present. facility lines or natural gas lines. Is there open beam exposure potential to class 3B or 4 Lasers? If so. etc.
facility lines or natural gas lines. CDA. supplying non-HPM materials.Equipment Commissioning Checklist according to CNSE Facilities guidelines? 2. been pressure/leak checked and documented (if applicable)? EHS-00017-F1 R17 X X X Printed copies are considered uncontrolled. etc. DCN0778 CNSE Confidential When Completed Page 5 of 20 . chiller. Have all non-HPM gas &/or liquid.. water. Verify revision prior to use. PVAC.
Seismic Restraints IC TE/EE EHS Seismic bracing and anchoring designed utilizing the following data: 1) Seismic Use Group: II. thermal. List all chemicals such as refrigerants.Equipment Commissioning Checklist EHS-00017-F1 R17 H. etc. 6) Design Base Shear: V = 2560 KIPS. has a new evacuation map been submitted to CNSE Facilities EHS? N/A NA 1. Loop / Tank (check Manual MSDS Received Approval box) Chemicals Used & Concentration Fill? Submitted from EHS? (full chemical name) Closed Volume Yes / No (mm/dd/yyyy) Yes / No Tank Loop (gal) NA NA I. Onboard Non-Process Chemical Inventory To be filled out by Tool Engineer. and mechanical hazards (i. HPM Delivery System (Liquids and Gases) IC TE/EE EHS How many output delivery lines/sticks exit from supply unit and/or components? (write in number) 2. X X X NA M. used in the tool or its peripherals.14 (%g). Are all robotics envelopes adequately defined and guarded? N/A N A J.e. pump lubricants. Personal Protective Equipment IC TE/EE EHS X X X X IC TE/EE EHS 1. etc. Sdl = 21. moving parts.85 (%g). Have Chemical/Gas Services applied process control locks to each of the output lines/sticks? (write in number of locks applied) 1. L. b. 2. DCN0778 CNSE Confidential When Completed Page 6 of 20 . pinch-points. Analysis Procedure: Equivalent Lateral Force Procedure. Verify revision prior to use.) properly guarded and labeled? 2. additives. Is the proper tool identification with primary and secondary tool owners listed and posted? Has the tool matrix been updated and submitted to CNSE EHS? X X X X X X 3. If the tool installation alters the layout of the cleanroom space. 3) Spectral Response Coefficients: a. Is the proper PPE available for all operations & maintenance tasks associated with this equipment? Please list: Is proper PPE storage available? X X X X N A K. Are all electrical. X X X X Printed copies are considered uncontrolled. Tool Identification IC TE/EE EHS 1. 2) Seismic Design Category: D. 2. Sds = 43. Guarding 1. 5) Basic Seismic Force Resisting System: Dual System Special Reinforced Moment Frame With Special Reinforce Concrete Shear Walls. 4) Site Class: E. coolants.
DCN0778 CNSE Confidential When Completed Page 7 of 20 . 6. 1. Punch List items must be completed prior to Part 2 sign-off. 3. 4. Has the approved TGMS matrix been submitted and been signed by all of the appropriate parties? X X X IC TE/EE EHS X X X X X X X X X 3. Have EHS applied process control locks to each of the output lines/sticks? (write in number of locks applied) NA N. Electrical Power N/A Signature Print Name Date Printed copies are considered uncontrolled. 9. Have TGMS/AAC interlock signals been provided by the tool engineer to the TGMS contractor? 2. Notes and Comments Issue Responsibility Completion Date Part 1 Interim Sign-offs 1a) EHS: Electrical Power: Debug 1b) EHS: Non-HPMs 2a) System Owner: Process Vacuum 2b) System Owner: Compressed Dry Air 3a) System Owner: Ultra Pure Water 3b) System Owner: Process Cooling Water 4a) System Owner: Bulk Gases/Non-HPMs 5a) System Owner: Bldg. Verify revision prior to use. A Punch List item may not compromise safety. 5. 10. 8. Is a copy of the approved signed TGMS matrix included in this greenbook? Part 1 Punch List List all deficiencies that do not affect the safety of the installation.Equipment Commissioning Checklist EHS-00017-F1 R17 3. 2. TGMS Controls & Matrix 1. Have Tool Installation applied process control locks to each of the output lines/sticks? (write in number of locks applied) 4. 7.
Verify revision prior to use. DCN0778 CNSE Confidential When Completed Page 8 of 20 .Equipment Commissioning Checklist EHS-00017-F1 R17 Printed copies are considered uncontrolled.
please describe. heat solvent. Are there any additional hazards. Flow Monitoring Devices Type and Location CNSE Confidential When Completed Set Points Labeled Yes Yes Yes Yes Yes Page 9 of No No No No No Printed copies are considered uncontrolled. has a field survey been completed to determine impact to the area? 6. equipment or conditions that the ERT need to be trained on? a. Has the S2 noise survey verified that the equipment operates at <80 dBA? If not. Interlocks. Are there any specially negotiated working conditions? If so. If applicable has a SOP been developed to cover this training? b. X X X X X X Day 1 ERT Leader: Day 2 ERT Leader: Night 1 ERT Leader: Night 2 ERT Leader: 3. If yes has such training taken place for each shift? D1 Yes No N1 Yes No D2 Yes No N2 Yes No 4. General Has the ERT Coordinator been informed of the equipment installation and become familiar with its emergency shutdown procedures? 2. etc. Notes and Comments: X X NA Location List all exhaust outlets DCN0778 B. Verify revision prior to use. 20 . Final Approval / Sign Off of the Part 2 Inspection by EHS is contingent upon the completion of the following two steps: a. Fire Suppression Systems…) N/A TE/EE EHS 1. Smoke Detection. Gas Detector Locations. This tour must include an overview of emergency features (EMO’s. An ERT Leader or Alternate Leader from each shift must acknowledge (through their signature below) that they have been provided with a physical tour of the newly installed equipment. Is the work area adequately illuminated? X X X X X X X X X 7.Equipment Commissioning Checklist EHS-00017-F1 R17 Part 2 Equipment Commissioning Checklist Release of all Hazardous Production Materials & Physical Hazards for Engineering Use A. Exhaust Ventilation (IC) Type: scrubbed. Are there confined space hazards associated with the tool's operation or maintenance? Has a process been developed for entering such a confined space? 5. Procedures concerning new or unusual hazardous processes or materials have been documented and training provided to an ERT Leader or Alternate Leader on all four shifts b.
DCN0778 CNSE Confidential When Completed Page 10 of 20 . Verify revision prior to use.Equipment Commissioning Checklist EHS-00017-F1 R17 Printed copies are considered uncontrolled.
Have appropriate measures been taken to prevent back streaming into the house nitrogen system? 9. X X X N A D. lab hoods. secured. 2. N/A Notes and Comments: X X X X X X 6. Where applicable.Equipment Commissioning Checklist EHS-00017-F1 R17 NA 1. wet stations. Are all vacuum Pump EMOs and interlocks functional (e. magnehelic. Exhaust Ventilation Requirements Heat exhaust only? IC TE/EE EHS X X X X X X X X X X X X X X 2. Is the pump oil compatible with the process materials? Printed copies are considered uncontrolled. Are local exhaust systems provided for maintenance activities? If so.)? N/A 8. Are all vacuum pumps that convey toxic gases contained within an exhausted enclosure? N/A 5.) installed? N/A a. Have Industrial Hygiene Ventilation Assessments (capture velocity) been completed for all areas where hazardous chemicals may be exposed to the open environment (i. list oil type: a. Vacuum Pumps IC TE/EE EHS 1. Are blast gates on all ventilation systems locked? Has a loss of exhaust test been performed to verify that the tool is placed in a safe condition upon loss of exhaust ventilation flow? N/A 7. back-pressure. Verify revision prior to use. Are all monitoring devices at the tool functional. Is exhaust piping routed to prevent pooling of liquids? (no visible low spots or sagging). temperature.e. 8. Are all exhaust ducts labeled with contents and direction of flow at every change of direction. wet chemical dispense cabinets. before & after every structural penetration and at regular intervals according to CNSE Facilities labeling guidelines? 3. cooling water flow) and documented? 4. etc. Are all monitoring devices in the plenum functional. properly set & labeled with set points? 5.g. C. etc. Do all ventilation systems that handle HPMs have continuous monitoring devices (i.e. please describe. N/A DCN0778 CNSE Confidential When Completed Page 11 of 20 . secured. properly set & labeled with set points? b. photohelic. Are all inputs and outputs labeled with direction of flow and are all lines adequately secured? Has the vacuum pump rotation been verified? 3. Are all Nitrogen and water flow indication devices functional? X X X X X X X X X X X X X X X X X 6. Has a ventilation test and balance been completed and submitted to EHS and are all dampers marked and locked? 4. are the shaft seal nitrogen purges operational? N/A 7. For oil sealed pumps. nitrogen purge.
Are all appropriate locations (tool. before & after every structural penetration. Verify revision prior to use. Are leak detection systems adequately installed for the equipment and in all chemical valve boxes? a. all support equipment.Have all liquid leak detection systems been tested and verified to be operational and documented as such? b. X X X X X X X X X X X X X X X X X X X X DCN0778 CNSE Confidential When Completed Page 12 of 20 . Are all chemical supply lines and containment piping clearly labeled (contents & direction of flow) at every change of direction. Manual Bath or Tank (check one) Pour? Volume Bath Tank Yes / No (gal) Date MSDS Approved MSDS submitted? Yes / No Chemicals Used & Concentration (full chemical name) N/A Chemical Dispense Unit Name (MDU ) Chemical Distribution Matrix (to be completed by Tool Engineer) Chemical Dispensed Comments N A F. Are the pump-case purge and or pump ballast purge interlocked? (oil sealed pumps) NA E. c. Local Dispense Chemical Delivery Systems Requirements IC TE/EE EHS 1. D.Have all exhaust pressure detectors been tested and verified to be operational and documented as such? Printed copies are considered uncontrolled. Vacuum Pumps Has an oil drip pan been installed under the entire pump package? IC TE/EE EHS X X X Is an oil demister or separator installed if required? d.Equipment Commissioning Checklist EHS-00017-F1 R17 N A b. and chemical enclosures) labeled with point-of-use chemical labels and/or HAZCOM labels? 3. Have all chemical (HPM or otherwise) supply lines been pressure and leak tested and documentation of such submitted to EHS? Are they double contained where required? 4. and at regular intervals according to CNSE Facilities labeling guidelines? 2. List all aqueous or solvent chemicals supplied to the tool. Are all valves and fittings for HPM liquid delivery systems contained within a ventilated enclosure? N/A 5. Local Dispense and Bulk Chemical Inventory To be filled out by Tool Engineer.
Have all leak detection systems been tested and verified to be operational and documented as such? 6. are they ASME rated and provided with overpressure protection? b.2. Are all valves and fittings for HPM liquid delivery systems contained within a ventilated enclosure? N/A 5. if applicable. Have all HPM delivery lines been verified to have secondary containment? N/A 7. Have all chemical valve boxes been leak tested. X X X X X X X X X X X X X X X X X X X X X X X X X X DCN0778 CNSE Confidential When Completed Page 13 of 20 .1-1990) N/A N A G. are containers equipped with pressure relief devices set to a maximum of 15 psig? c. Are all pressurized chemical containers equipped with the following: N/A a. Are safety showers / eye wash stations located within 10 seconds travel or 50 feet of chemical use or closer depending on the degree of hazard associated with the chemical(s) used? (ANSI Z358.If non-rated. and chemical enclosures) labeled with point-of-use chemical labels and / or HAZCOM labels? 3. before & after every structural penetration. Local Dispense Chemical Delivery Systems Requirements A c.Bonding / grounding & provided with an inert pressurizing agent (for flammable chemical containers)? 7. Are all access areas to pressurized lines shielded / interlocked to prevent potential exposure to chemistries? 8. been tested and verified to be operational and documented as such? 6.Vented to the system exhaust? d.4) N/A 11.1. Bulk Chemical Delivery Systems Requirements IC TE/EE EHS X X X X X X X X X X X X X X X X X X IC TE/EE EHS 1. Are all emergency HPM shutoff valves clearly visible and indicated by means of a sign? (NYSFC 2703. reviewed and accepted? N/A 8. Have all HPM delivery lines been leak tested or pressure tested.If pressurized to >15 psig. reviewed and accepted? 9. Verify revision prior to use.2. documented. Are all chemical supply lines and containment piping clearly labeled (contents & direction of flow) at every change of direction.Equipped with functional liquid level detection and overfill protection? e.Equipment Commissioning Checklist EHS-00017-F1 R17 N F. documented. Does the chemical valve box supply to the tool close upon EMO activation from the tool? 10. all support equipment. Is liquid leak detection properly installed in all chemical valve boxes? a. Are all appropriate locations (tools. and at regular intervals according to CNSE Facilities labeling guidelines? 2. Are all bulk chemical delivery lines and containment piping attached to the correct point of use and terminated at the tool? (no fittings within the double contained piping) 4. Are all flammable and combustible materials sealed from electrical equipment or ignition sources? Printed copies are considered uncontrolled.Have all heat detectors.
wired and connected to the tool. For new bulk chemical installations. Have PLC communications systems been properly: a. Bulk Chemical Delivery Systems Requirements IC TE/EE EHS 12.wired and connected to the tool. Have all gas delivery systems external to the tool been leak checked and documented? 10. has the following information been submitted to the EHS department to calculate HPM allowances for each control area? Chemical type/name: # of cylinders: Size: pounds/container OR gallons/container 13. programmed & verified to send correct signals to the correct valves per design? X X X X X X N A 1. b. and at regular intervals according to CNSE Facilities labeling guidelines? 5. GIBs. Has leak detection checklist(s) been completed and submitted to EHS? 11. before & after every structural penetration. Are all enclosures (e. Are all leak points for HPMs exhausted and / or fitted with gas detection per the design? N/A 8. has the following information been submitted to the EHS department to calculate HPM allowances for each control area? Gas cylinder type: # of cylinders: Size: pounds/cylinder OR cubic feet/cylinder X X X Printed copies are considered uncontrolled. Are all gas-cabinets/VMBs properly labeled with "tool destination labels"? 6. tool gas boxes) properly labeled with approved HAZCOM labels? 7. on a lateral or at least five duct diameters downstream from a TGMS sensor? 13. with warning and alarm points set? 4.g. Are double contained lines (coaxial tubing) in place as required? N/A 3. Gas Delivery Systems Requirements Have all lines been traced to origin and verified? IC TE/EE EHS X X X X X X X X X X X X X X X X X X X X X X X X X X X X X 2. Are all gas cabinets vent lines located after the blast gate. Are all gas lines clearly labeled (contents & direction of flow) at every change in direction.programmed & verified to send correct signals to the correct valves per design? 14. tool chambers. gas cabinets. H. DCN0778 CNSE Confidential When Completed Page 14 of 20 .Equipment Commissioning Checklist EHS-00017-F1 R17 N A G. Have all gas delivery systems internal to the tool been leak checked and documented? 9. Are all valves and fittings on HPM gas systems contained within a ventilated enclosure per design? N/A 12. Have PLC communications systems been properly: a. Verify revision prior to use. For new gas cabinet installation. b. Have coaxial tubing been pressurized to 100 psig. VMBs.
Has the gas cabinet vent line been placed at least 5 duct diameters upstream from the gas detectors? 7.e. Verify revision prior to use. Is the completed and signed final TGMS matrix attached and has a copy been submitted to EHS? NA Gas N A Drain System (TE) NA Detection Points Detection/Monitoring Matrix (to be completed by IC and TE/EE) WARNING ALARM Sample Point Locations Set Point Set Point J. X X X X DCN0778 CNSE Confidential When Completed Page 15 of 20 . 5. Drain Matrix Material of Construction (TE) Leak Checked (if required) (IC) Functional Test Date Piping Labeled Properly (IC) IC TE/EE EHS K. Is a map of the new detector locations available and posted at the AAC? Has a TGMS matrix pre-test been scheduled and performed? Is the completed and signed TGMS matrix pre-test attached? 11. Has each monitoring point been checked to verify that upon activation. or dangerous by-products per design? Printed copies are considered uncontrolled. Detection/Monitoring Requirements IC TE/EE EHS 1.Equipment Commissioning Checklist EHS-00017-F1 R17 N A I. Has continuous detection been installed at appropriate monitoring points per design? (NYSFC 1803. an automatic. Is all workstation drainage piping connected to a compatible system so as to avoid chemical reactions generating heat. TGMS Matrix sign-off) 3. Have all detector points been installed so that they are accessible and visible? Are all detector points adequately labeled and easily read? Are the gas detectors positioned before the blast gate? X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X 6. fail-safe source shutdown occurs and a visible / audible area alarm is initiated and has documentation of such been submitted to EHS? (i. before & after every structural penetration and at regular intervals according to CNSE Facilities labeling guidelines? 2.13. Have newly added detection points been added to TGMS site summary and posted at the TGMS touch screens? 8. 9. Chemical Disposal Requirements 1. Is all drain piping clearly labeled (contents & direction of flow) at every change of direction. 4. 10.1) 2. gases.
4. and are all interlocks functioning? 2. arsenic or lead waste) 8.2. Have post-process exhaust emission calculations been submitted and approved by EHS to ensure adequate exhaust treatment and posted on the treatment unit? NA M.g. Verify revision prior to use. Does the exhaust treatment system configuration allow access for inspection and cleaning? 5. quick response) installed downstream of the reaction chamber. J.2) NA L. at the transition to the main exhaust lateral per design? (Is water drainage adequate?) 6. Are appropriate waste receptacles/containers/units available in the work area and properly labeled? 7. does the system place the tool into a safe condition and send an alert via the TGMS or BMS? 4. Is the post-process exhaust treatment system labeled with HAZCOM labels or similar identifying the process gas and corresponding by-products? 7. Fire Protection Requirements Has annunciation been verified for all equipment-specific fire detection Printed copies are considered uncontrolled. e. Does the process gas flow shut down in the event of exhaust treatment system failure? 3. slope or other approved means of spill containment)? (NYSFC 1805. Is the post-process exhaust treatment system operational. Are segregated satellite collection locations present and labeled as needed? (e.2.Equipment Commissioning Checklist EHS-00017-F1 R17 N A Drain System (TE) 3. HSSD) Locations: Smoke Detection: UV / IR detection: Other: N A 1. IC TE/ EE EHS X X Page 16 of X CNSE Confidential When Completed 20 . Is the workstation provided with an approved means of containing or directing spills to a drainage system per design (i. Has all drain waste and vent piping been tested for proper performance via operation of the process equipment? 6. Fire Detection (TE/EE check all that apply) X X X X X X X X X X X X X X High sensitivity detection (Optical Air Sampling Smoke Detection. VESDA. Drain Matrix Material of Construction (TE) Leak Checked (if required) (IC) Piping Labeled Properly (IC) X X X X X X X X X X X X X X X Are HPM drain lines double contained where required? Are HPM drain lines leak checked and documented as such? 5. Upon activation of a trouble alarm. DCN0778 N. Is a fire sprinkler (wax coated. plastic bag.e. Post-Process Exhaust Treatment Systems (TE/EE Check all that apply) Dynamic Neutralization Chamber (DNC) Wet Chemical Reactors Other: IC TE/EE EHS Passive Dilution / Reaction Chamber Thermal Decomposition Unit (TDU) Dry Chemical Reactors Post-Process Exhaust Treatment Systems 1.g.
Has it been verified that fire sprinkler flow patterns within enclosed equipment are unobstructed? 9.1. Verify revision prior to use. Fire Protection Requirements IC TE/ EE EHS Has equipment-specific fire alarm annunciation been verified? X X X X X X X X X X X X X X X X X X X X 3. Are all sprinklers that service the area occupied by this equipment accessible for periodic inspections? N A 1. sprinkler. Has the Local Fire Suppression/Detection System Summary Sheet been updated? Printed copies are considered uncontrolled.1. Are lab hoods that use flammable / combustible liquids serviced internally by a fire sprinkler head and added to the CNSE laboratory hood inventory? 4.1) 6. are sprinklers installed on the bay ceiling in front and behind the tool. DCN0778 CNSE Confidential When Completed Page 17 of 20 . CO2.1) 7.) delivery piping leading into enclosed equipment been pressure tested? 8. providing coverage to all areas of the tool? 5. X X X O. For Wet Stations (all wet chemical processes). 2. etc.10. Are heat detectors/sprinklers installed in all combustible ducts & noncombustible ducts conveying vapors or gases in the flammable range (>10% LEL) that are ≥ 10" in diameter.e.Equipment Commissioning Checklist EHS-00017-F1 R17 N A devices? 2. Are fire suppression/detection systems installed within enclosed equipment where necessary and have they been tested and verified functional. (NYSFC 1803. Has all fire suppression agent (i. providing the required discharge density? 10.10. N. Do all workstations of combustible construction have a sprinkler head installed in the exhaust duct / plenum within 2 feet of the point of the duct connection or the connection to the plenum? (NYSFC 1803. Local Fire Suppression/Detection System Documentation Has the System been certified & documentation submitted to EHS? Have the System Manuals been submitted to EHS? IC TE/EE EHS X X X X X X X 3.
g.) separates work locations from the EMO button? N A Q.Robotics and/or Automation (e. Have all sources of non-ionizing radiation been surveyed by CNSE Radiation Safety Officer? 2.g. DCN0778 CNSE Confidential When Completed Page 18 of 20 .Temperature / Fire Detection (e. Does the EMO turn off all electrical power to the system including the UPS (except non-hazardous control voltage and power sources to safety related devices)? 2. have all interlocks been re-tested after every such change & verified to be operational? 4.Mechanical (e. UV Sensor)? c. Verify revision prior to use. light curtains. IR Sensors)? e. door panels)? X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X g. Radiation Requirements N/A TE/EE EHS 1. Upon resetting of the EMO. over temp. panel. Have any changes been made to the tool or operating system that may have affected the functioning of any interlocks? a.g. Have all interlocks been tested and verified to be operational as indicated on the interlock matrix and has such documentation been submitted to EHS? 3. Other? 2. photohelic)? b. etc. Interlocks Note: This section applies to all interlocks internal to the equipment. Are EMO buttons located within 10 feet of all operating & scheduled maintenance locations or where a physical barrier (wall.If so.g. Are other interlocks connections from the tool or process chamber/modules available for connection to an area alarm control panel? If yes. are these interlocks connected to the area alarm control panel? N A R. In case of alarm. does the local gas detection system have interlocks to stop the gas flow into a gas cabinet? 5. pinch points)? d. Have all sources of ionizing radiation been surveyed by CNSE Radiation Safety Officer? X X X X X X Printed copies are considered uncontrolled.g.Exhaust flow (e.. High Voltage. Emergency Machine Off (EMO) IC TE/EE EHS 1. does the equipment remain shutdown and require a manual re-start? 3. Electrical (e. Has an interlock matrix (indicating what is activated or shutdown when each interlock is activated) been provided for each of the following interlocks? a. X X X X N/A TE/EE EHS 1.Pneumatic / Hydraulic? f. floor.Equipment Commissioning Checklist EHS-00017-F1 R17 N A P.
2) Provides System Owners the opportunity to review and approve the parts of the project that they will own. 1d) EHS: TGMS 2a) System Owner: House Exhaust 3a) System Owner: House Drain: AWD 3b) System Owner: House Drain: HFD 3c) System Owner: House Drain: Solvent 3d) System Owner: House Drain: Slurry 4a) System Owner: Hydrogen DCN0778 CNSE Confidential When Completed Page 19 of 20 . How many remaining output delivery lines/sticks will remain locked out for process control? (fill in number and type) 3. Verify revision prior to use. Identify number and line/stick label for each Tool Installation lock to be removed? NA 4.Equipment Commissioning Checklist EHS-00017-F1 R17 S. Identify number and line/stick label for each Chemical/Gas Services process control lock to be removed? Notes and Comments IC TE/EE EHS X X X X X X X X X X X X X X X X X X X X Part 2 Interim Sign-offs This section serves two functions: 1) Allows EHS to provide partial approvals in phases as the tool is prepared for use. What output delivery lines/sticks are requested to be turned on? (fill in line information) 2. Phase N/A Signature Print Name Date 1a) EHS: Electrical Power: Laser 1b) EHS: 1c) EHS: Electrical Power: Radiation HPMs Printed copies are considered uncontrolled. HPM Delivery System (Liquids and Gases) Process Control Isolation Lock Removal 1.
4. 10. DCN0778 CNSE Confidential When Completed Page 20 of 20 . 14. A Punchlist item may not compromise safety. 12. Punchlist items as well as Deficient items must be completed prior to Part 2 approval. 2. 9. Equipment Commissioning Part 2 Approval Signatures I verify that all Part 1 and Part 2 checklist items (deficient or otherwise) are complete & I approve this equipment for Part 2 sign-off. 15. 11. 13. 5.Equipment Commissioning Checklist 5a) Gas and/ or Liquid Delivery and/ or Waste Collection Systems By Air Liquide EHS-00017-F1 R17 Part 2 Punchlist List all deficiencies that do not affect the safety of the installation. 7. 3. 6. 8. Verify revision prior to use. Title Signature Print Name Installation Coordinator (IC) Tool Owner (TO) Tool Engineer / Equipment Engineer (TE/EE) CNSE Environmental Health & Safety (EHS) CNSE Facilities Tool Hook-up Manager CNSE Code Compliance Manager CNSE Facilities Director CNSE ERT Coordinator Date Printed copies are considered uncontrolled. Issue Responsibility Completion Date 1.
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