The principle, working and future scope of development of MEMS deformable mirror for Adaptive Optics is presented here. We have always dreamt about things beyond sky. Lights coming from far and farthest stars are one of the most popular tools to know about deep universe. This light comes to Earth bound telescopes through thick layer of Earth’s atmosphere which obviously distort the wavefront of the light. To extract the information from the signal it is necessary to eliminate the noise in it. There are many technologies to do that. Adaptive Optics is one of the latest one. It has three main modules: a wavefront sensor, a control system and corrective elements (often implemented as Deformable Mirrors). Today Deformble Mirrors are the main constitute of any telescope. With the development of MEMS technology, AO has found new dimensions. Use of MEMS technology facilitates us with greater reliability, lower power consumption, lower actuation voltage, better aspect ratio, faster, compact and more economical system. Fabrication of MEMS deformable mirror is done by micromaching technique. DM system has array of tiny mirrors which under the influence of actuation voltage produces some deflection. These individual deflections corresponding to every mirror collectively produces an effect that corrects the wavefront of incident light. In this thesis design and demonstration of MEMS Piezoelectric Deformable Mirror is done by using PZT-5A material. Simulation part is done in COMSOL 4.2a. A novel spring structure attached to a square plate is designed to get maximum plate stroke. Maximum deflection (stroke in Z-direction) of 1.9 µm is achieved with 200V. The deflection shows linear graph with voltage which is also desirable thing.


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