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Chuyn

Tnh ton cc loi dn ng trong MEMS MEMS


Nguyn Nguyn Tun Khoa

- Lc tnh in php tuyn

- Lc tnh in tip tuyn

Fn : Lc tnh in php tuyn Ft : Lc tnh in tip tuyn A: din tch phn rng lc trng nhau; A = h.y0 , 0: cc hng s in mi; h: b rng rng lc (bn t) V: in p t; y0 : phn rng lc trng nhau g0: khe h gia cc in cc (theo phng x);

B kch hot c cu trc rng lc (Comb-drive actuator)


x y V (a) k g0 g0 (b) Ft

- Lc tnh in tip tuyn Ft

- Phng trnh xc nh dch chuyn

Cu to ca b kch hot kiu rng lc

- dch chuyn cn bng ca bn t di ng

h: Chiu rng cc bn t theo phng z g0: Khe h gia bn t di ng v bn t c nh. llc (b n t t ) di n: S l ng rng (b ) di ng. k: cng ca kt cu rng .

Cc b kch hot nhi a) B kch hot dng s t


dn n ca kh, cht lng
Lp mng Cht kh (lng) Nhit in tr

b) B kch hot cp nhit


Lp vt liu 1

Lp vt liu 2

c) B kch hot hot arm cold arm

d) B kch hot dm ch V

Nguyn l hot ng ca dm nhit ch V


V
V0 0

t dm y dm V

ngm

V
Hnh 2.3 M hnh dm ch V dn n nhit
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Theo [1], phng trnh truyn nhit trong cc dm V l: 2 d T 2 J =0 k + 2 dx


T l nhit ti v tr x,

Phn b nhit trong cc dm V


y x

k l h s dn nhit ca vt liu, l in tr sut ca dm, J l mt dng in.

L Tmax

Gii ra ta c:
T( x)= + T r B A2 B A e
AL 2

e
AL

-AL

-1
-

Ax

B
2

AL

-1

Ax

+e

-2

AU e AL + e -AL - 2

T = 200 C - nhit
phng r

B=

U2 L20 k

, A = B

T(0C)

Vi: L = 750m; U = 15V; = 4.106 , = 5,0.103/0C, 0 = 2.103m, k = 1,5.104 W/mK

x( m) x(m)

Tmax = T (L=750) = 425 C

Phn b nhit trong cc dm V


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Coi h s dn di l hng s, ta c dn di L ca dm V l:

S dn n nhit dm V v chuyn v ca dm y
L = [T ( x) Tr ]dx
0 L

L = [
Vi:

B A
2

L+

C1 A

e AL

C2 A

AL

C1 A

C2 A

L+L F F E L G D

B e -1 B e C1 = - - 1 , C 2= AL -AL 2 e AL + e-AL - 2 A e2 + e - 2 A

-AL

AL

L = 0,75m
Chuyn v D dm y:
D = FF ' = GF ' GF '2 = EF EG EF sin
2 2 2 2 = ( L + L ) L cos L sin

Vi : L=750, = 20

S dn n nhit dm V v chuyn v ca dm D = 16,4m y


7

C =

C =

FF

GF

GF

Chuyn v ca thanh trt


Trc Sau

g1

A A

Chuyn v S ca thanh trt:


S = d 2 ( d ' sin ) 2 d ' cos

S B1 B B g1 D

g1 d ' = A ' B = D + sin d


Vi: d = AB1 =130, g1 = 2, = 450

S = 18,3 m

Chuyn v ca thanh trt

Lc sinh ra do bin dng nhit trn dm V l:


L Fb = EA = EA L
R2

Lc trn dm V v dm y
Fb Ft R 1 Fb Fb Fb

E: moun n hi ca vt liu silicon

Fbsin

Fb Fbcos A

b h

Lc y ti nh cp dm V - Tnh cho mt cp dm:

F =2 F
t b

sin = 2 E A L L
nF

sin

- Tnh cho n cp dm F = nF = 2
n

sin =

2 nE A

Lc trn dm V v dm y t sin b
L
L
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di t h

t t

Lc y thanh trt
B qua s trt ca dm y v thanh hp ca cc lc y ti nh dm y Ftt v lc ma st ca thanh trt vi nn Fms : L L F c F = 2 t os Fm s = E 2nA L sin cos F ms Chuyn v S [m] v lc y thanh trt F [mN] vi cc b kch hot loi 3 ,6 v 10 cp dm theo Bng 2.1
Bng 2.1 Lc y v chuyn v thanh trt

Ft Ft Ft Fms Fms

Ft F Ft 6 S = 18,3 F = 5,4

S cp dm =2
0

3 S = 18,3 F = 2,7

10 S = 18,3 F =9,0
10

Lc y thanh trt