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FloTron, PEM, OES, Reactive Gas Control, 2015

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Description: High-speed Process Monitoring and Control System for Reactive Physical Vapour Deposition. Plasma Emission Monitoring. PEM. Reactive Gas Control. Voltage Control. Reactive Magnetron Sputtering. P...
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High-speed Process Monitoring and Control System for Reactive Physical Vapour Deposition. Plasma Emission Monitoring. PEM. Reactive Gas Control. Voltage Control. Reactive Magnetron Sputtering. PVD. PECVD. PEALD. Vacuum Arc.
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