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TO MNG BNG PHNG PHP

SOL-GEL

I. Gii thiu, nh ngha v lch s pht trin phng php Solgel.

1, Gii thiu v lch s pht trin.
2, nh ngha qu trnh Sol gel .
II. Nhng khi nim c bn:
1, Precursor.
2, Sol.
3, Gel :
III. Din bin qu trnh Sol gel v s nh hng ca cc thng s.
1, Phn ng thy phn.
a, nh hng pH
b, nh hng ca dung mi
c, nh hng bi t s r ( H2O/M)
d, nh hng bi cht xc tc:
:

2, Phn ng ngng t.
a, nh hng ca pH
b, nh hng ca xc tc
c, nh hng ca dung mi
IV. Qu trnh ng hc v s pht trin cu trc.
1, Chuyn ng ngu nhin Brown.
2, Qu trnh ng hc v cc thng s:

3. S pht trin cu trc

4. Cc lai pht trin cu trc:
a, S pht trin monomer-cluster
b, S pht trin cluster-cluster.
c, S pht trin monomer monomer.
V. Cc phng php ph mng Sol gel.
1, Phng php ph nhng (dip coating).
2, Phng php ph quay (spin coating).
3, Phng php ph phun v ph dng chy.
4, Qu trnh x l nhit.

VI. To mng bng phng php solgel c tng cng plasma

VII. ng dng phng php Sol gel.
VIII. u v nhc im phng php Sol gel.

I. Gii thiu v lch s pht trin phng php solgel

1, Gii thiu v lch s pht trin:
Phng php ha hc Sol-gel l mt k thut to ra mt s sn phm c
hnh dng mong mun cp nano . Qu trnh Sol-gel thng lin quan n
nhng phn t alkoxit kim loi m chng s b thy phn di nhng iu kin
c kim sot v ngay sau nhng cht ny phn ng vi nhau to ngng t
hnh thnh lin kt cu kim loi-oxi-kim loi.
Phn ng sol-gel c quan tm t nm 1800 to gm s v c
nghin cu rng ri vo u nm 1970, ngy nay Solgel c ng dng rng ri
trong khoa hc i sng

2. nh ngha qu trnh Sol gel:

Mt cch tng qut, qu trnh Sol gel l 1 qu trnh lin quan n ha l
ca s chuyn i ca mt h thng t precursor th nh pha lng dng Sol sau
to thnh pha rn dng Gel theo m hnh precursor Sol Gel nh trn hnh 1

Hnh 1. K thut Sol gel v cc sn phm ca n.

II. Nhng khi nim c bn:

1, Precursor.
Precursor L nhng phn t ban u to nhng ht keo. N c to
thnh t cc thnh t kim loi hay kim, c bao quanh bi nhng ligand khc
nhau. Cc precursor c th l cht v c kim loi hay hu c kim loi.
Cng thc chung ca precursor: M(OR) x
Vi: M: kim loi, R: nhm ankyl c cng thc C nH2n+1
Ty theo vt liu cn nghin cu m M c th l Si, Ti, Al ... hay kim loi hu c
nh Tetramethoxysilan(TMOS),Tetraethoxysilan(TEOS)

2, Sol.
Mt h sol l s phn tn ca cc ht rn c kch t hc khong 0.1 n
1m trong cht lng, trong ch c chuyn ng Brown l m l lng cc ht.
Kch thc ht nh nn lc ht l khng ng k.

 Lc tng tc gia cc ht l lc Van der Waals.

Cc ht chuyn ng ngu nhi n Brown do trong dung d ch cc ht
va chm ln nhau.
Sol c thi gian bo qun gii hn v cc ht Sol ht nhau dn n ng t cc ht
keo. Cc ht Sol n mt thi im nht nh th ht ln nhau tr thnh nhng
phn t ln hn, n kch thc c 1 100 nm v tuy theo xc tc c m t trong
dung dch m pht trin theo nhng hng khc nhau. Trn hnh 2 l hai qu trnh
pht trin khc nhau vi xc tc l acid v baz

Hnh 2 : S pht trin ca Sol i vi xc tc khc nhau

3, Gel :
Mt h Gel l 1 trng thi m cht lng v rn phn tn vo nhau, trong
1 mng li cht rn cha cc thnh phn cht lng kt dnh li to th nh Gel. S
ngng t ca cc ht s to thnh mng li. Tng nng dung dch, thay i
pH hoc tng nhit nhm h h ng ro cn tnh in cho cc ht t ng tc cc

ht kt t vi nhau, to th nh Gel. Nu nung nhit bnh thng th sn phm

l Gel kh, nu nung iu kin si u ti hn sn phm l Gel kh

III. Din bin qu trnh Sol gel v s nh hng ca cc thng s:

Qu trnh ph mng bng phng php Solgel gm 4 bc
Bc 1 : Cc ht keo mong mun t cc phn t huyn ph precursor phn
tn vo mt cht lng to nn mt h Sol.
Bc 2 : S lng ng dung dch Sol to ra cc lp ph tr n bng cch
phun, nhng, quay.
Bc 3 : Cc ht trong h Sol c polymer ho thng qua s loi b cc
thnh phn n nh h v to ra h gel trng tha l mt mng li lin
tc.
Bc : Cui cng l qu trnh x l nhit nhit phn cc th nh phn hu
c, v c cn li v to nn mt mng tinh th hay v nh hnh.
Din bin qu trnh ph mng c th m t nh trn hnh 3

Hnh 3 : Din bin qu trnh Sol gel:

V c ch ho hc: Qu trnh Sol gel hnh thnh vi 2 dng phn ng
chnh l phn ng thy phn v phn ng ngng t bao gm phn ng ngng t
ru v phn ng ngng t nc.
1, Phn ng thy phn:

Phn ng thy phn thay th nhm alkoxide (OR) trong lin kt kim loi
alkoxide bng nhm hydroxyl (OH) to thnh lin kt kim loi hydroxyl.
Theo phng trnh phn ng sau
thy phn
M(OR)X + nH2O

(RO )x-n- M-(OH)n + nROH

Ho ester

M(OR)X +

xH2O

M(OH)x + xROH

x: ho tr kim loi
Trn hnh 4 l m hnh ph n ng thy phn.

Hnh 4: Qu trnh thy phn.

Cc thng s nh hng ch yu n qu trnh thy phn l pH, bn cht v

nng ca cht xc tc, nhit , dung mi, t s H 2O/M.
a, nh hng pH :
Trn hnh 5 l th s nh hng pH trong phn ng thy phn

Hnh 5 : M t s lc nh
hng ca pH ln tc phn
ng thu phn.

b, nh hng ca dung mi :
Dung mi ngn chn s tch pha lng ny n pha lng khc trong giai on u
ca phn ng thy phn. C hai loi dung mi
Dung mi phn cc gm nhng cht nh : H2O, ru ca cc lkal(CH 3OH,
C2H5OH), formamide dng ho tan nhng cht phn cc, ti este ho,
phn ng thu phn v ru phn v n tc ng to ra H +.
Dung mi khng phn cc c dng thay th alkyl khng thu phn ho n ton
do n tc ng to ra OH -. Loi dung mi ny khng tham gia vo ph n ng
nghch.
c, nh hng bi t s r ( H2O/M):
Phn ng thu phn c thc hin vi gi tr r trong phm vi nh t 1 cho
n ln hn 25, ph thuc vo sn phm polysilicat mong mu n. T phng trnh
2, gi tr r tng ln c hi vng xc tin phn ng thu phn. Mt khc khi gi tr
r tng ln gy ra phn ng thu phn monomer ho n ton hn trc khi phn ng
kt t ng k xut hin. Phm vi ca phn ng thu phn khc nhau gy nh
hng i vi tc tng i ca phn ng ngng t nc hoc phn ng ngng

t ru. Ni chung, khi r<<2 c ch phn ng ngng t ru chim u th hn,

tri li, phn ng ngng t nc c u th hn khi r = 2.28.
Gi tr ca r tng ln ni chung xc tin phn ng thu phn, khi r tng ln
trong khi duy tr mt dung mi khng thay i: t l silica v nng silica gim
xung. iu ny ln lt lm gim tc phn ng thu phn v phn ng ngng
t, kt qu l thi gian to h Gel di hn. Tc ng ny l hin nhin, nh thy
hnh 6 cho thy thi gian Gel ho theo h thng TEO S di xc tc acid. Nh l
mt hm ca TEOS v alcol ban u.
Cui cng, khi nc l sn phm ph ca phn ng ngng t, gi tr ln ca
r xc tin phn ng thu phn.

Hnh 6 :nh hng ca t s r n thi gian ha Gel ca silica

d, nh hng bi cht xc tc:
Xc tc l axit lm tc phn ng tng ln hn so vi xc tc baz, cc
axit mnh thng s lm tc tng nhanh hn. Cc axit thng dng thng dng
l : HCl, CH 3COOH,HF,HNO 3

C ch xc tc ca Baz:
Phn ng thu phn trong xc tc Baz xut pht chm hn nhiu so vi
phn ng thu phn xc tc acid ti c ng mt nng cht xc tc tng ng.
Nhng oxi alkoxy c bn c khuynh hng y -OH. Tuy nhin mt khi phn ng
thu phn ban u xut hin, nhng phn ng tip theo xy ra nh bc thang, vi
mi nhm alkoxy tip theo loi b mt cch d d ng hn t Monomer v cng l
nhm u tin. Qu trnh thu phn ca nhng polymer to th nh th b gy cn tr
khng gian nhiu hn i vi qu trnh thu phn ca mt monomer. Mc d qu
trnh thu phn trong cc mi trng kim xy ra chm, nh ng n vn c khuynh
hng xy ra mt cch hon ton theo chiu thun.

C ch xc tc acid:
Trong iu kin acid, c kh nng mt nhm Alkoxide b proton ho trong
bc u tin rt nhanh. Mt Electron b rt ra khi nguy n t kim loi, lm
cho n c i lc vi in t nhiu hn v d b nh hng hn bi s tn cng
ca nc. V iu ny dn n s to thnh trng thi trung gian. Trng thi
chuyn i ph v bi s tch ra mt alcohol v s o ngc ca khi t
din silicon.

Trong iu kin bnh thng, phn ng thu phn c pht hin l bc

nht trong mi trng Baz. Tuy nhin khi nng Prescusor tng ln th phn
ng chuyn t phn ng bc nht n gin sang phn ng bc hai phc tp hn.
Vi nhng Baz yu hn ammonium hydroxide v pyridine t c d c th o
lng ca phn ng oc sinh ra ch khi tn ti nng ln. V vy so snh vi
iu kin acid, ng lc phn ng thu phn xc tc baz chu nh hng mnh
m hn bi bn cht dung mi.
2, Phn ng ngng t:
Phn ng ngng t to nn lin kt kim loi oxide kim loi, l c s cu
trc cho cc mng oxide kim lo i. Hin tng ngng t din ra lin tc lm cho
lin kt kim loi oxide kim loi khng ngng tng ln cho n khi to ra mt
mng li kim loi oxide kim loi trong khp dung dch. Phn ng ngng t
c thc hin theo m hnh hnh 7 v phng trnh phn ng sau

Hnh 7: Qu trnh ngng t.

MOR + MOH
MOH + MOH

M -O-M + ROH
M-O-M + H2O

Trong iu kin thch hp, s ng ng t xy ra lin tc v ph hu polimer,

ti to thnh nhng ht keo ln, t to th nh cc polime ln hn.
Cc thng s nh hng ch yu n qu trnh ngng t: pH, bn cht
v nng ca cht xc tc, nhit , dung mi, t s H 2O/M
Cc thng s nh hng n phn ng ngng t
a, nh hng ca pH
Qu trnh trng hp to nn cc ni Siloxan sinh ra hoc do phn ng
ngng t hnh thnh nc hoc do phn ng ngng t to ru. Mt chui cc sn
phm in hnh ca phn ng ngng t l monomer, dimer, trimer m ch thng, cc
tetramer tun hon, cc vng c bc cao hn. Chui ngng t ny ph thuc vo
c Depolymerization v s c mt ca cc monome, ci m trong dung dch cn
bng vi dng oligomeric c sinh ra bi qu trnh Depolymerization.

Tc ca qu trnh trng hp m vng ny v cc phn ng thm vo

monomer ph thuc vo pH ca mi trng. Trong nhng phn ng tr ng hp m
pH<2 th tc ngng t t l vi nng [H+]. Bi v tnh tan ca Silica yu cu
pH<2. S to thnh v s kt khi ca nhng ht silicat c bn xut hin cung
nhau v ng gp phn no i vi pht trin sau khi cc ht c ung knh
vt qu 2 nm. Thm vo s pht trin ca mng li Gel bao gm nhng ht
c bn nh qu mc.
Vi 2< pH<6 th tc phn ng ngng t t l vi nng [ -OH]. Tnh
tan ca cc silicat gim tr li v s pht trin ca cc ht dng li khi cc ht tin
ti ng knh 2-4 nm.
Khi pH>7 th qu trnh trng hp xut hin ging nh 2<pH <6. Tuy
nhin, trong phm vi pH ny kiu c c b ion ho v kt qu l gy lc y ln
nhau. S pht trin xut hin c bn thng qua s thm vo ca monomers c
c nhng ht ng c cao h n. Cc ht pht trin v kch thc v gim v s
lng. Trn hnh 8 l tc ha tan v thi gian gel ha theo s thay i pH

Hnh 8 : Tc ha tan v thi gian gel ha trong iu kin pH

b, nh hng ca xc tc
Phn ng ngng t thng th ng vi cht xc tc l HCl, HNO 3, CH3COOH
C ch xc tc acid:
C ch phn ng ngng t di xc tc acid lin quan n mt silano c
thm proton. S c thm proton ca silanol lm cho silicon c i lc vi in t
nhiu hn v thm vo d b tn cng bi i nhn. Kiu silanol c bn nht
c ch i nht c c thm mt proton. Kt qu l, cc phn ng ngng t
c th xy ra mt cch u tin gia nhng loi trung tnh v nhng silanol nhn
thm mt proton nm trn cc monomer, cc nhm u mt ca chui.
C ch xc tc baz:
C ch c chp nhn mt cch rng r i nht i vi phn ng ngng t
xc tc baz lin quan n s tn cng ca mt silanol i nhn l n mt acid sililic
trung tnh

c, nh hng ca dung mi :
i vi dung mi phn cc vi xc tc l baz s lm cho phn ng xy ra
chm, nu xc tc l axit th lm phn ng xy ra nhanh h n
Thm mt s cht ph gia lm gel kh nhanh m khng b t gy, ph gia
thng l cc loi axit hu c axit oxalic, axit acetic, axit polycrylic, axit stearic
IV. Qu trnh ng hc v s pht trin cu trc
1, Chuyn ng ngu nhin Brown:

L s chuyn ng hn lon c a cc ht keo c kch th c nh ( nm) trong

dung dch v cng chuyn ng khng b suy gim theo thi gian, l tng hp
kt qu ca s va chm theo cc h ng ca cc phn t mi trng phn tn vi
ht keo. Chuyn ng ca ht keo n y c biu hin ca chuyn ng nhit v v
th cng c cc tnh cht ng hc nh : thm thu, khuch tn .
1. Ht keo hnh cu c kch thc ln hn phn t nn dung dch n b cc
phn t nc do chuyn ng nhit va p t khp cc h ng khc nhau.
2. Cc ht c kch thc > 5m coi nh ng im: do cc va p ng thi t
cc hng c th b tr ht cho nhau (v thnh phn lc).
3. Cc ht c kch thc nh hn 5 m chuyn ng ngu nhin Brown: do s
va p t cc pha l t hn nn c kh nng khng b tr ht cho nhau lm
ht b y v 1 hng .V cc phn t nc chuyn ng hn lon n n
chng lun thay i hng va p, do cc ht keo cng b thay i
hng chuyn ng.
2, Qu trnh ng hc v cc thng s:
Trong phn ng thu phn v ngng t, cc thng s nh hng n ng
hc Sol-Gel l cc hng s tc phn ng:
Kh : hng s tc thu phn
Kcw : hng s tc ngng t nc
Kca : hng s tc ngng t ru

M-O-R + H2O M-OH + R-OH (hydrolysis)

M-OH + HO-M M-O-M + H2O (water condensation)

M-O-R + HO-M M-O-M + R-OH (alcohol condensation)

(M = Si, Zr, Ti )
Trong thc t,s thu phn v ngng t xy ra song song nhng nhm chc gn
nht.
Nu Kh>> K wc v Kh>> Kac : thu phn hon ton, khng ngng t nn mt
nhm OR gim nhanh.
Khi tc gim OR nh hn tc ngng t th thu phn v ngng t cng xy
ra.
Tc ngng t:
d [ MOM ]
= Kwc[M(OH)] 2 + Kac[M(OH)][M(OR)]
dt

Kwc> Kac : tc ngng t nc t l vi [M(OH)] 2

Kwc< Kac : tc ngng t ru t l vi [M(OH)][M(OR)]
Hai phn ng ngng t ru v nc xc nh chnh xc ng hc ca phn ng.
3. S pht trin cu trc
nh hng ca axit v baz n s pht trin cu trc:
Sol tn ti trong dung dch n mt thi im nht nh th cc ht ht ln
nhau tr thnh nhng phn t ln hn. Cc phn t ny tip tc pht trin n
kch thc c 1 nm th tu theo xc tc c mt trong ung dch m pht trin theo
nhng hng khc nhau. Nh vy, vi cc loi xc tc khc nhau, chiu h ng
pht trin ca ht Sol cng c phn khc bit. S pht trin ca cc ht trong dung
dch l s ngng t, lm tng s lin kt Kim loi- Oxide- Kim loi to thnh mt
mng li trong khp dung dch.

Hnh 9 : S pht trin cu trc mng trong qu tr nh sol-gel

4. Cc lai pht trin cu trc:

C 3 loi pht trin cu trc : monomer -monomer, monomer-cluster,
cluster-cluster, tuy nhin cu trc monomer-monomer l khng ng k .
a, S pht trin monomer-cluster
Cc monomer lin kt vi nhau to thnh cc oligomer, bn cnh , cc
monomer cng lin kt vi oligomer va to th nh, nhng v tr tu gn u
mch hay nhnh. Cc nhnh ca oligomer to khng gian cn tr s li n kt ca
monomer v cc gc bn trong ca oligomer, lm cho phn ng to lin kt ngng
li. y chnh l iu kin gii hn phn ng hay kh nng khuch tn monomer
lp y l trng trong mng, khin cho cu trc m ng kt cht hn. Tuy nhin

vn cn nhng v tr alkoxide khng b thu phn hay thy phn khng ho n ton
nn khng th ngng t.
b, S pht trin cluster-cluster
Vi xc tc acide v t s r (H 2O:M) thp (r<2), phn ng thu phn cha
hon ton th xy ra ngng t. Cc monomer va b thu phn tng phn va
ngng t pht trin cu trc, to ra oligomer c khi l ng phn t thp cho
n khi ht nc v M(OH) x th ngng li.
Khi chm thm nc, nhng v tr alkoxide c n li tip tc thy phn v
ngng t xy ra lin tip gia nhng oligomer va to th nh.Vi xc tc acide v
t s r ln , giai on u phn ng thu phn xy ra ho n ton, cc monomer
nhanh chng lin kt thnh cc dimer v oligomer (cluster) lm pht tri n cu trc
cluster-cluster.
c, S pht trin monomer monomer.
Qu trnh ny xy ra rt t, khng ng k

V. Cc phng php ph mng Sol gel:

iu kin tin quyt i vi qu trnh ph mng Solgel l: phng th nghim phi
sch, dung dch ph mng c lc v thu tinh cng mt s thit b phi c
ra sch. Mt s phng php ph mng Sol gel l: ph nhng (dip coating),
ph quay (spin coating), ph phun (spray coating), ph cun (roll coating),
capillary coating
Hnh 10 l 3 phng php ph thng dng cc phng th nghim.

Hnh 1. 1: Mt s phng php ph mng Solgel.

1, Phng php ph nhng (dip coating):

y l phng php c dng rt nhiu b mn Vt l ng dng tr ng
H KHTN. thu tinh dng ph mng c a xung v c nhng hon
ton trong cht lng vi 1 vn tc nht nh d i s iu khin ca nhit v p
sut kh quyn. Sau mng c ko ln vi cng 1 vn tc .

Hnh 11 : Qu trnh dipcoating.

Nhng vo bn trong dung dch ph.
Hnh thnh lp mng m khi ko ln.

 Qu trnh gel xy ra bi s bay hi dung mi.

dy mng: c tnh bng phng trnh LaudauLevich:

(.)2/ 3
h 0.94. 1/ 6
LV (.g)1/ 2

(1)

Vi:
h : dy mng.
: nht ca cht lng.
LV : p lc b mt cht lng kh.
: t trong, khi lng ring ca cht lng.
g : trng lng.
v : vn tc ko mng.
T ta c th thy d y ca mng ph thuc vo cc yu t nh: vn
tc ko mng ln, cht rn cha trong dung dch v nht ca cht lng. Vic
chn tc ko mng v nht 1 cch thch hp c kh nng tng d y t
20nm n 50m trong khi tnh cht quang ca mng khng thay i.
2, Phng php ph quay (spin coating):
c t trn mt b mt phng quay quanh 1 trc vung gc vi mt
t. Dung dch c a ln v tin hnh quay (ly tm), tn mng mng v bay
hi dung dch d.

Hnh 12 : Cc bc ca qu trnh spincoating.

Ph quay l phng php to mng kh n gin v t tn km, mng c
to kh ng nht v c dy tng i ln.
dy mng: Meyerhofer m t s ph thuc ca dy mng cui cng
ph thuc vo vn tc gc, nht v tc bay hi ca dung mi bng cng
thc bn thc nghim sau:
1/3

1A 3.m
h
.
2

Ao 2Ao.

(2)

Vi:
h : dy cui cng.
A v Ao : khi lng v khi lng hiu dng ca
dung mi d bay hi trn 1 n v th tch.
: nht.
: vn tc gc.
m : tc bay hi ca dung mi.
Khi m c xc nh bng thc nghim, ph ng trnh c
n gin thnh:

h A
. B

(3)

Vi A v B l cc hnng s xc nh bng thc nghim. Lai,

Chen v Weill bng thc nghim s dng nhiu vn tc gc
khc nhau, v kt qu thu c l rt khp vi phng trnh
(3). H s B c xc nh trong khong 0.4 0.7.
3, Phng php ph phun v ph dng chy
Phng php ny thng c dng trong cng nghip sn du, vic kim sot
tnh ton dng phun suy ra dy mng tng i kh khn, v th phng
php ny t c dng trong cng ngh ch to mng mng nano
4, Qu trnh x l nhit
Tng nhit : cung cp nhit lng loi b dung mi c n st li trong
mng va to thnh, qu trinh tng nhit v x l nhit trong nhng mi tr ng
khc nhau nh hng ng k n cht lng mng. Nung kh bng cch bay hi
iu kin bnh thng ta thu c sn phm gi l gel kh, nung iu kin ti
hn th sn phm nhn c it b co hn v gi l gel kh

VI. To mng bng phng php solgel c tng cng plasma

Plasma l mt trong nhng k thut hin i c s dng lm bin i
tnh cht b mt vt liu nh : kim loi,hp kim, gm s,mng mng, polymer.
nhm phc v cho nhng mc dch s dng khc nhau ca cc loi vt liu n y.
Plasma to thnh khi mt cht kh hoc mt hn hp kh c t trong in
trng thch hp.Mi trng Plasma cha cc phn t b kch thch bi in
trng nh cc nguyn t, phn t, cc ion,in t, cc gc t do v c th pht ra
nh sng vi bc sng ngn nm trong v ng t ngoi.
Cc phn t kch thch ny c th tc ng vo vt liu (substrate) t
trong mi trng Plasma v lm bin i b mt ca n, cc tc ng n y c th l
cc tc ng vt l hay tc ng ho hc hoc ng thi c vt l v ho hc.

Thit k h thng c x l bng Plasma:

Mng c t ln b trong thit b Plasma sao cho b mt hot ng

ca mng tip xc vi mi trng Plasma. Thit b c rt chn khng ti p
sut nh hn 0.3 torr.Sau kh Argon c dn vo thit b vi tc dng thch
hp cho ti khi t ti p sut xc nh. ng mch in to ra mt in tr ng
gia hai in cc. Plasma xut hin v b mt mng b tc ng bi cc phn t
kch thch trong mi trng Plasma.

C ch tc ng ca Plasma c to ra trong mi trng kh Argon trong

cc iu kin thc nghim sau :
Trong vng Plasma, d i tc dng ca in tr ng, kh Argon b ion ho,
cc ion Ar + i v pha Catot v cc in t i v pha Anod. Va chm gia cc
in t v cc nguyn t Argon sinh ra cc ion Ar + ng thi to thnh cc in t
th cp c nng lng cao, cc in t ny s tc ng vo b mt mng v gy ra
nhng bin i v cu trc ca b mt.
Quan st qua knh hin vi in t qut (SEM) hoc qua php phn tch ph
hng ngoi bin i Furie (FTIR) pht hin s thay i v mt ho hc ca
mng. So snh vi lc u cha tng cng Plasma.

VII. ng dng phng php Sol gel:

 To mng bo v v mng c tnh cht quang hc.

To mng chng phn x.
B nh quang.
To knh giao thoa.
Mang a lp tao vi ien t
VIII. u v nhc im phng php Sol gel:
u im

Nhc im

- C th to ra mng ph lin kt mng - S lin kt trong mng yu.

mang n s dnh cht rt tt gia - chng mi mn yu.
vt kim loi v mng.
- Rt kh iu khin
- C th to mng dy cung cp cho qu xp.
trnh chng s n mn.
- D b rn nt khi x l nhit
- C th phun ph ln cc hnh dng cao.
phc tp.
- Chi ph cao i vi nhng vt
- C th sn xut c nhng sn phm liu th.
c tinh khit cao.
- Hao ht nhiu trong qu trnh
- L phng php hiu qu, kinh t, n to mng.
gin sn xut mng c cht lng
cao.
- C th to mng nhit bnh
thng.