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  • Hong Xiao, Ph. D.: Author of

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    Qiushi Zhu
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    #CMOS-flow

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    27 views922 pages

    Hong Xiao, Ph. D.: Author of

    Uploaded by

    Qiushi Zhu

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PPT, PDF, TXT or read online from Scribd
    Flag for inappropriate content
    of 922

    Hong Xiao, Ph. D.

    Author of Introduction of Semiconductor Manufacturing Technology http://www2.austin.cc.tx.us/HongXiao/Book.htm


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm 1

    CMOS PROCESS FLOW

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    CMOS PROCESS FLOW


    Deposit p-type epitaxial silicon

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    CMOS PROCESS FLOW


    Deposit p-type epitaxial silicon

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    CMOS PROCESS FLOW


    Deposit p-type epitaxial silicon

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    CMOS PROCESS FLOW


    Deposit p-type epitaxial silicon

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    CMOS PROCESS FLOW


    Deposit p-type epitaxial silicon

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    CMOS PROCESS FLOW


    Deposit p-type epitaxial silicon

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    CMOS PROCESS FLOW


    Deposit p-type epitaxial silicon

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    CMOS Process Flow: Well Formation


    Wafer clean

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    10

    CMOS Process Flow: Well Formation


    Grow screen oxide

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    11

    CMOS Process Flow: Well Formation


    Grow screen oxide

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    12

    CMOS Process Flow: Well Formation


    Wafer clean

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    13

    CMOS Process Flow: Well Formation


    Pre-bake, apply primer

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    14

    CMOS Process Flow: Well Formation


    Spin-on photoresist

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    15

    CMOS Process Flow: Well Formation


    Spin-on photoresist

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    16

    CMOS Process Flow: Well Formation


    Spin-on photoresist

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    17

    CMOS Process Flow: Well Formation


    Spin-on photoresist

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    18

    CMOS Process Flow: Well Formation


    Spin-on photoresist

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    19

    CMOS Process Flow: Well Formation


    Spin-on photoresist

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    20

    CMOS Process Flow: Well Formation


    Spin-on photoresist

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    21

    CMOS Process Flow: Well Formation


    Soft bake

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    22

    CMOS Process Flow: Well Formation


    Soft bake

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    23

    CMOS Process Flow: Well Formation


    Soft bake

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    24

    Mask 1: N-well

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    25

    Mask 1: N-well

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    26

    Mask 1: N-well

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    27

    Mask 1: N-well

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    28

    Mask 1: N-well

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    29

    Mask 1: N-well

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    30

    Mask 1: N-well

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    31

    Mask 1: N-well

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    32

    Mask 1: N-well

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    33

    Mask 1: N-well

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    34

    CMOS Process Flow: Well Formation


    N-well mask expose

    UV or DUV light

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    35

    CMOS Process Flow: Well Formation


    N-well mask expose

    UV or DUV light

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    36

    CMOS Process Flow: Well Formation


    N-well mask expose

    UV or DUV light

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    37

    CMOS Process Flow: Well Formation


    N-well mask expose

    UV or DUV light

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    38

    CMOS Process Flow: Well Formation


    N-well mask expose

    UV or DUV light

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    39

    CMOS Process Flow: Well Formation


    N-well mask expose

    UV or DUV light

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    40

    CMOS Process Flow: Well Formation


    N-well mask expose

    UV or DUV light

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    41

    CMOS Process Flow: Well Formation


    N-well mask expose Post exposure bake

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    42

    CMOS Process Flow: Well Formation


    Develop

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    43

    CMOS Process Flow: Well Formation


    Develop

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    44

    CMOS Process Flow: Well Formation


    Develop

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    45

    CMOS Process Flow: Well Formation


    Develop

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    46

    CMOS Process Flow: Well Formation


    Develop

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    47

    CMOS Process Flow: Well Formation


    Develop

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    48

    CMOS Process Flow: Well Formation


    Hard bake Pattern check

    Photoresist

    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    49

    CMOS Process Flow: Well Formation


    N-well ion implantation, phosphorus
    P+ P+

    Photoresist

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    50

    CMOS Process Flow: Well Formation


    N-well ion implantation, phosphorus

    P+

    P+

    Photoresist

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    51

    CMOS Process Flow: Well Formation


    N-well ion implantation, phosphorus

    P+

    P+

    Photoresist

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    52

    CMOS Process Flow: Well Formation


    N-well ion implantation, phosphorus

    P+

    P+

    Photoresist

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    53

    CMOS Process Flow: Well Formation


    N-well ion implantation, phosphorus

    P+

    P+

    Photoresist

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    54

    CMOS Process Flow: Well Formation


    N-well ion implantation, phosphorus

    P+

    P+

    Photoresist

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    55

    CMOS Process Flow: Well Formation


    N-well ion implantation, phosphorus

    P+

    P+

    Photoresist

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    56

    CMOS Process Flow: Well Formation


    N-well ion implantation, phosphorus

    P+ Photoresist

    P+

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    57

    CMOS Process Flow: Well Formation


    N-well ion implantation, phosphorus

    P+
    Photoresist

    P+

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    58

    CMOS Process Flow: Well Formation


    N-well ion implantation, phosphorus

    P+ Photoresist

    P+

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    59

    CMOS Process Flow: Well Formation


    N-well ion implantation, phosphorus

    P+ Photoresist

    P+

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    60

    CMOS Process Flow: Well Formation


    N-well ion implantation, phosphorus

    P+

    Photoresist

    P+

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    61

    CMOS Process Flow: Well Formation


    N-well ion implantation, phosphorus

    P+

    Photoresist

    P+

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    62

    CMOS Process Flow: Well Formation


    N-well ion implantation, phosphorus

    Photoresist P+ P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well

    P+

    P-Wafer

    63

    CMOS Process Flow: Well Formation


    N-well ion implantation, phosphorus

    Photoresist

    P+
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P+

    P-Wafer

    64

    CMOS Process Flow: Well Formation


    N-well ion implantation, phosphorus

    Photoresist

    P+
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P+

    P-Wafer

    65

    CMOS Process Flow: Well Formation


    Strip photoresist

    Photoresist

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    66

    CMOS Process Flow: Well Formation


    Strip photoresist

    Photoresist

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    67

    CMOS Process Flow: Well Formation


    Strip photoresist

    Photoresist

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    68

    CMOS Process Flow: Well Formation


    Strip photoresist

    Photoresist

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    69

    CMOS Process Flow: Well Formation


    Strip photoresist

    Photoresist

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    70

    CMOS Process Flow: Well Formation


    Strip photoresist

    Photoresist

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    71

    CMOS Process Flow: Well Formation


    Strip photoresist Wafer clean

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    72

    CMOS Process Flow: Well Formation


    Anneal and drive-in

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    73

    CMOS Process Flow: Well Formation


    Anneal and drive-in

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    74

    CMOS Process Flow: Well Formation


    Anneal and drive-in

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    75

    CMOS Process Flow: Well Formation


    Anneal and drive-in

    N-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    76

    CMOS Process Flow: Well Formation


    Anneal and drive-in

    N-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    77

    CMOS Process Flow: Well Formation


    Clean

    N-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    78

    CMOS Process Flow: Well Formation


    Pre-bake, apply primer

    N-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    79

    CMOS Process Flow: Well Formation


    Spin-on photoresist

    N-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    80

    CMOS Process Flow: Well Formation


    Soft bake

    N-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    81

    Mask 2: P-well

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    82

    Mask 2: P-well

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    83

    Mask 2: P-well

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    84

    Mask 2: P-well

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    85

    Mask 2: P-well

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    86

    Mask 2: P-well

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    87

    Mask 2: P-well

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    88

    Mask 2: P-well

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    89

    Mask 2: P-well

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    90

    Mask 2: P-well

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    91

    Mask 2: P-well

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    92

    CMOS Process Flow: Well Formation


    P-well mask expose
    UV light

    Photoresist N-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    93

    CMOS Process Flow: Well Formation


    P-well mask expose
    UV light

    Photoresist N-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    94

    CMOS Process Flow: Well Formation


    P-well mask expose
    UV light

    Photoresist N-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    95

    CMOS Process Flow: Well Formation


    P-well mask expose
    UV light

    Photoresist N-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    96

    CMOS Process Flow: Well Formation


    P-well mask expose
    UV light

    Photoresist N-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    97

    CMOS Process Flow: Well Formation


    P-well mask expose
    UV light

    Photoresist N-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    98

    CMOS Process Flow: Well Formation


    Post exposure bake

    Photoresist N-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    99

    CMOS Process Flow: Well Formation


    Develop

    Photoresist N-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    100

    CMOS Process Flow: Well Formation


    Develop

    Photoresist N-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    101

    CMOS Process Flow: Well Formation


    Develop

    Photoresist N-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    102

    CMOS Process Flow: Well Formation


    Develop

    Photoresist N-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    103

    CMOS Process Flow: Well Formation


    Develop

    Photoresist N-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    104

    CMOS Process Flow: Well Formation


    Hard bake

    Photoresist N-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    105

    CMOS Process Flow: Well Formation


    Pattern check

    Photoresist N-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    106

    CMOS Process Flow: Well Formation


    P-well ion implantation, Boron

    B+

    Photoresist

    P-Well
    N-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    107

    CMOS Process Flow: Well Formation


    P-well ion implantation, Boron

    B+
    Photoresist

    P-Well
    N-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    108

    CMOS Process Flow: Well Formation


    P-well ion implantation, Boron

    B+
    Photoresist

    P-Well
    N-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    109

    CMOS Process Flow: Well Formation


    P-well ion implantation, Boron

    B+ Photoresist

    P-Well
    N-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    110

    CMOS Process Flow: Well Formation


    P-well ion implantation, Boron

    B+ Photoresist

    P-Well
    N-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    111

    CMOS Process Flow: Well Formation


    P-well ion implantation, Boron

    B+ Photoresist

    P-Well
    N-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    112

    CMOS Process Flow: Well Formation


    P-well ion implantation, Boron

    B+

    Photoresist

    P-Well
    N-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    113

    CMOS Process Flow: Well Formation


    P-well ion implantation, Boron

    B+

    Photoresist

    P-Well
    N-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    114

    CMOS Process Flow: Well Formation


    P-well ion implantation, Boron

    B+

    Photoresist

    P-Well
    N-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    115

    CMOS Process Flow: Well Formation


    P-well ion implantation, Boron

    Photoresist B+

    P-Well
    N-Well P-Epi

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    116

    CMOS Process Flow: Well Formation


    P-well ion implantation, Boron

    Photoresist B+

    P-Well
    N-Well P-Epi

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    117

    CMOS Process Flow: Well Formation


    Strip photoresist

    Photoresist B+

    P-Well
    N-Well P-Epi

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    118

    CMOS Process Flow: Well Formation


    Strip photoresist

    Photoresist B+

    P-Well
    N-Well P-Epi

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    119

    CMOS Process Flow: Well Formation


    Strip photoresist

    Photoresist B+

    P-Well
    N-Well P-Epi

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    120

    CMOS Process Flow: Well Formation


    Strip photoresist

    Photoresist B+

    P-Well
    N-Well P-Epi

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    121

    CMOS Process Flow: Well Formation


    Strip photoresist

    Photoresist B+

    P-Well
    N-Well P-Epi

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    122

    CMOS Process Flow: Well Formation


    Strip photoresist

    B+

    P-Well
    N-Well P-Epi

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    123

    CMOS Process Flow: Well Formation


    Strip photoresist

    P-Well
    N-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    124

    CMOS Process Flow: Well Formation


    Anneal and drive-in

    P-Well
    N-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    125

    CMOS Process Flow: Well Formation


    Anneal and drive-in

    P-Well
    N-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    126

    CMOS Process Flow: Well Formation


    Anneal and drive-in

    P-Well
    N-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    127

    CMOS Process Flow: Well Formation


    Anneal and drive-in

    P-Well
    P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    128

    CMOS Process Flow: Well Formation


    Anneal and drive-in

    P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    129

    CMOS Process Flow: Well Formation


    Anneal and drive-in

    P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    130

    CMOS Process Flow: Well Formation


    Anneal and drive-in

    P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    131

    CMOS Process Flow: Well Formation


    Anneal and drive-in

    P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    132

    CMOS Process Flow: Well Formation


    Anneal and drive-in

    P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    133

    CMOS Process Flow: Well Formation


    Strip screen oxide

    P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    134

    CMOS Process Flow: STI Formation


    Wafer clean Grow pad oxide

    P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    135

    CMOS Process Flow: STI Formation


    Deposit silicon nitride

    Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    136

    CMOS Process Flow: STI Formation


    Deposit silicon nitride

    Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    137

    CMOS Process Flow: STI Formation


    Deposit silicon nitride

    Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    138

    CMOS Process Flow: STI Formation


    Deposit silicon nitride

    Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    139

    CMOS Process Flow: STI Formation


    Deposit silicon nitride

    Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    140

    CMOS Process Flow: STI Formation


    Deposit silicon nitride

    Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    141

    CMOS Process Flow: STI Formation


    Clean

    Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    142

    CMOS Process Flow: STI Formation


    Pre-bake, apply primer

    Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    143

    CMOS Process Flow: STI Formation


    Spin-on photoresist

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    144

    CMOS Process Flow: STI Formation


    Soft bake

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    145

    CMOS Process Flow: STI Formation


    Soft bake

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    146

    CMOS Process Flow: STI Formation


    Soft bake

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    147

    CMOS Process Flow: STI Formation


    Soft bake

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    148

    CMOS Process Flow: STI Formation


    Soft bake

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    149

    CMOS Process Flow: STI Formation


    Soft bake

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    150

    CMOS Process Flow: STI Formation


    Soft bake

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    151

    CMOS Process Flow: STI Formation


    Soft bake

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    152

    Mask 3: Shallow Trench Isolation

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    153

    Mask 3: Shallow Trench Isolation

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    154

    Mask 3: Shallow Trench Isolation

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    155

    Mask 3: Shallow Trench Isolation

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    156

    Mask 3: Shallow Trench Isolation

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    157

    Mask 3: Shallow Trench Isolation

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    158

    Mask 3: Shallow Trench Isolation

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    159

    Mask 3: Shallow Trench Isolation

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    160

    Mask 3: Shallow Trench Isolation

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    161

    Mask 3: Shallow Trench Isolation

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    162

    Mask 3: Shallow Trench Isolation

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    163

    CMOS Process Flow: STI Formation


    Shallow trench isolation mask expose
    UV light

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    164

    CMOS Process Flow: STI Formation


    Shallow trench isolation mask expose
    UV light

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    165

    CMOS Process Flow: STI Formation


    Shallow trench isolation mask expose
    UV light

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    166

    CMOS Process Flow: STI Formation


    Shallow trench isolation mask expose
    UV light

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    167

    CMOS Process Flow: STI Formation


    Shallow trench isolation mask expose
    UV light

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    168

    CMOS Process Flow: STI Formation


    Shallow trench isolation mask expose
    UV light

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    169

    CMOS Process Flow: STI Formation


    Shallow trench isolation mask expose
    UV light

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    170

    CMOS Process Flow: STI Formation


    Post exposure bake

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    171

    CMOS Process Flow: STI Formation


    Develop

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    172

    CMOS Process Flow: STI Formation


    Develop

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    173

    CMOS Process Flow: STI Formation


    Develop

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    174

    CMOS Process Flow: STI Formation


    Develop

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    175

    CMOS Process Flow: STI Formation


    Develop

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    176

    CMOS Process Flow: STI Formation


    Develop

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    177

    CMOS Process Flow: STI Formation


    Develop

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    178

    CMOS Process Flow: STI Formation


    Hard bake

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    179

    CMOS Process Flow: STI Formation


    Hard bake

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    180

    CMOS Process Flow: STI Formation


    Pattern check
    Plasma, CF4, CHF3, Ar, ...

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    181

    CMOS Process Flow: STI Formation


    Etch nitride
    Plasma, CF4, CHF3, Ar, ...

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    182

    CMOS Process Flow: STI Formation


    Etch nitride
    Plasma, CF4, CHF3, Ar, ...

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    183

    CMOS Process Flow: STI Formation


    Etch nitride
    Plasma, CF4, CHF3, Ar, ...

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    184

    CMOS Process Flow: STI Formation


    Etch nitride
    Plasma, CF4, CHF3, Ar, ...

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    185

    CMOS Process Flow: STI Formation


    Etch nitride
    Plasma, CF4, CHF3, Ar, ...

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    186

    CMOS Process Flow: STI Formation


    Etch nitride
    Plasma, CF4, CHF3, Ar, ...

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    187

    CMOS Process Flow: STI Formation


    Etch pad oxide
    Plasma, CF4, CHF3, Ar, ...

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    188

    CMOS Process Flow: STI Formation


    Strip photoresist

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    189

    CMOS Process Flow: STI Formation


    Strip photoresist

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    190

    CMOS Process Flow: STI Formation


    Strip photoresist

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    191

    CMOS Process Flow: STI Formation


    Strip photoresist

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    192

    CMOS Process Flow: STI Formation


    Strip photoresist

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    193

    CMOS Process Flow: STI Formation


    Strip photoresist

    Photoresist Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    194

    CMOS Process Flow: STI Formation


    Strip photoresist

    Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    195

    CMOS Process Flow: STI Formation


    Clean

    Nitride P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    196

    CMOS Process Flow: STI Formation


    Etch silicon

    Plasma, HBr, NF3, O2 ...

    Nitride P-Well P-Epi


    hxiao89@hotmail.com

    Nitride N-Well P-Wafer


    197

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: STI Formation


    Etch silicon

    Plasma, HBr, NF3, O2 ...

    Nitride P-Well P-Epi


    hxiao89@hotmail.com

    Nitride N-Well P-Wafer


    198

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: STI Formation


    Etch silicon

    Plasma, HBr, NF3, O2 ...

    Nitride P-Well P-Epi


    hxiao89@hotmail.com

    Nitride N-Well P-Wafer


    199

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: STI Formation


    Etch silicon

    Plasma, HBr, NF3, O2 ...

    Nitride P-Well P-Epi


    hxiao89@hotmail.com

    Nitride N-Well P-Wafer


    200

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: STI Formation


    Etch silicon

    Plasma, HBr, NF3, O2 ...

    Nitride P-Well P-Epi


    hxiao89@hotmail.com

    Nitride N-Well P-Wafer


    201

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: STI Formation


    Etch silicon

    Plasma, HBr, NF3, O2 ...

    Nitride P-Well P-Epi


    hxiao89@hotmail.com

    Nitride N-Well P-Wafer


    202

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: STI Formation


    Wafer clean

    Nitride P-Well P-Epi


    hxiao89@hotmail.com

    Nitride N-Well P-Wafer


    203

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: STI Formation


    Grow barrier oxide

    Nitride P-Well P-Epi


    hxiao89@hotmail.com

    Nitride N-Well P-Wafer


    204

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: STI Formation


    HDP-CVD USG
    High Density Plasma, SH4, O2, Ar

    Nitride P-Well P-Epi


    hxiao89@hotmail.com

    Nitride N-Well P-Wafer


    205

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: STI Formation


    HDP-CVD USG
    High Density Plasma, SH4, O2, Ar

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    206

    CMOS Process Flow: STI Formation


    HDP-CVD USG
    High Density Plasma, SH4, O2, Ar

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    207

    CMOS Process Flow: STI Formation


    HDP-CVD USG
    High Density Plasma, SH4, O2, Ar

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    208

    CMOS Process Flow: STI Formation


    HDP-CVD USG
    High Density Plasma, SH4, O2, Ar

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    209

    CMOS Process Flow: STI Formation


    HDP-CVD USG
    High Density Plasma, SH4, O2, Ar

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    210

    CMOS Process Flow: STI Formation


    HDP-CVD USG
    High Density Plasma, SH4, O2, Ar

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    211

    CMOS Process Flow: STI Formation


    HDP-CVD USG
    High Density Plasma, SH4, O2, Ar

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    212

    CMOS Process Flow: STI Formation


    HDP-CVD USG
    High Density Plasma, SH4, O2, Ar

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    213

    CMOS Process Flow: STI Formation


    HDP-CVD USG
    High Density Plasma, SH4, O2, Ar

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    214

    CMOS Process Flow: STI Formation


    HDP-CVD USG
    High Density Plasma, SH4, O2, Ar

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    215

    CMOS Process Flow: STI Formation


    HDP-CVD USG
    High Density Plasma, SH4, O2, Ar

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    216

    CMOS Process Flow: STI Formation


    HDP-CVD USG
    High Density Plasma, SH4, O2, Ar

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    217

    CMOS Process Flow: STI Formation


    HDP-CVD USG
    High Density Plasma, SH4, O2, Ar

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    218

    CMOS Process Flow: STI Formation


    HDP-CVD USG
    High Density Plasma, SH4, O2, Ar

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    219

    CMOS Process Flow: STI Formation


    HDP-CVD USG
    High Density Plasma, SH4, O2, Ar

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    220

    CMOS Process Flow: STI Formation


    HDP-CVD USG
    High Density Plasma, SH4, O2, Ar

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    221

    CMOS Process Flow: STI Formation


    HDP-CVD USG
    High Density Plasma, SH4, O2, Ar

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    222

    CMOS Process Flow: STI Formation


    Polish USG

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    223

    CMOS Process Flow: STI Formation


    Polish USG

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    224

    CMOS Process Flow: STI Formation


    Polish USG

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    225

    CMOS Process Flow: STI Formation


    Polish USG

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    226

    CMOS Process Flow: STI Formation


    Polish USG

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    227

    CMOS Process Flow: STI Formation


    Polish USG

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    228

    CMOS Process Flow: STI Formation


    Polish USG

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    229

    CMOS Process Flow: STI Formation


    Polish USG

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    230

    CMOS Process Flow: STI Formation


    Polish USG

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    231

    CMOS Process Flow: STI Formation


    Polish USG

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    232

    CMOS Process Flow: STI Formation


    Polish USG

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    233

    CMOS Process Flow: STI Formation


    Polish USG

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    234

    CMOS Process Flow: STI Formation


    Polish USG

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    235

    CMOS Process Flow: STI Formation


    Polish USG

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    236

    CMOS Process Flow: STI Formation


    Polish USG

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    237

    CMOS Process Flow: STI Formation


    Polish USG

    USG
    Nitride P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Nitride N-Well P-Wafer


    238

    CMOS Process Flow: STI Formation


    Polish oxide, stop on nitride

    Nitride USG P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    239

    CMOS Process Flow: STI Formation


    Anneal oxide

    Nitride USG P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    240

    CMOS Process Flow: STI Formation


    Strip nitride

    Nitride USG P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    241

    CMOS Process Flow: STI Formation


    Strip nitride

    Nitride USG P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    242

    CMOS Process Flow: STI Formation


    Strip nitride

    Nitride USG P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    243

    CMOS Process Flow: STI Formation


    Strip nitride

    Nitride USG P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    244

    CMOS Process Flow: STI Formation


    Strip nitride

    Nitride USG P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    245

    CMOS Process Flow: STI Formation


    Strip nitride

    Nitride USG P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    246

    CMOS Process Flow: STI Formation


    Strip nitride

    Nitride USG P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    247

    CMOS Process Flow: STI Formation


    Strip pad oxide

    Nitride USG P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    248

    CMOS Process Flow: STI Formation


    Strip pad oxide

    Nitride USG P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    249

    CMOS Process Flow: STI Formation


    Strip pad oxide

    Nitride USG P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    N-Well P-Wafer
    250

    CMOS Process Flow: STI Formation


    Strip pad oxide

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    251

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Wafer clean

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    252

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Grow sacrificial oxide

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    253

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Wafer clean

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    254

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Prebake

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    255

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    256

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    257

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    258

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    259

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    260

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    261

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    262

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    263

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    264

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    265

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    266

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    267

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    268

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    269

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    270

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    271

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    272

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    273

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG N-Well P-Wafer


    274

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Mask 4: P-well VT Adjust

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    275

    Mask 4: P-well VT Adjust

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    276

    Mask 4: P-well VT Adjust

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    277

    Mask 4: P-well VT Adjust

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    278

    Mask 4: P-well VT Adjust

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    279

    Mask 4: P-well VT Adjust

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    280

    Mask 4: P-well VT Adjust

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    281

    CMOS Process Flow: Making Transistor


    P-well VT mask expose
    UV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    282

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P-well VT mask expose
    UV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    283

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P-well VT mask expose
    UV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    284

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P-well VT mask expose
    UV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    285

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P-well VT mask expose
    UV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    286

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P-well VT mask expose
    UV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    287

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P-well VT mask expose
    UV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    288

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P-well VT mask expose
    UV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    289

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Post exposure bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    290

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    291

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    292

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    293

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    294

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    295

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    296

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    297

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Hard bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    298

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Pattern check

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    299

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P-well VT adjust implantation, Phosphorus

    P+

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    300

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P-well VT adjust implantation, Phosphorus

    P+
    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    301

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P-well VT adjust implantation, Phosphorus

    P+
    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    302

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P-well VT adjust implantation, Phosphorus

    P+ Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    303

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P-well VT adjust implantation, Phosphorus

    P+ Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    304

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P-well VT adjust implantation, Phosphorus

    P+

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    305

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P-well VT adjust implantation, Phosphorus

    P+

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    306

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P-well VT adjust implantation, Phosphorus

    Photoresist

    STI

    P+ P-Well P-Epi

    USG
    N-Well P-Wafer
    307

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    308

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Clean

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    309

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Prebake

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    310

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    311

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    312

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    313

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    314

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    315

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    316

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    317

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    318

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    319

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    320

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    321

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    322

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    323

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    324

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Mask 5: N-well VT Adjust

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    325

    Mask 5: N-well VT Adjust

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    326

    Mask 5: N-well VT Adjust

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    327

    Mask 5: N-well VT Adjust

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    328

    Mask 5: N-well VT Adjust

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    329

    Mask 5: N-well VT Adjust

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    330

    Mask 5: N-well VT Adjust

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    331

    Mask 5: N-well VT Adjust

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    332

    Mask 5: N-well VT Adjust

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    333

    CMOS Process Flow: Making Transistor


    N-well VT mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    334

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-well VT mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    335

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-well VT mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    336

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-well VT mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    337

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-well VT mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    338

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-well VT mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    339

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-well VT mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    340

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-well VT mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    341

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Post exposure bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    342

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    343

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    344

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    345

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    346

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    347

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    348

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    349

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    350

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Hard bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    351

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Pattern Check

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    352

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-well VT adjust implantation, Boron

    B+ Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    353

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-well VT adjust implantation, Boron

    B+ Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    354

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-well VT adjust implantation, Boron

    Photoresist

    B+

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    355

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-well VT adjust implantation, Boron

    Photoresist

    B+

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    356

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-well VT adjust implantation, Boron

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG

    B+ N-Well

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    357

    CMOS Process Flow: Making Transistor


    N-well VT adjust implantation, Boron

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG

    B+ N-Well

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    358

    CMOS Process Flow: Making Transistor


    Strip Photoresist

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    359

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip Photoresist

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    360

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip Photoresist

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    361

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip Photoresist

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    362

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip Photoresist

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    363

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip Photoresist

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    364

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip Photoresist

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    365

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    366

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Wafer clean

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    367

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip sacrificial oxide

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    368

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip sacrificial oxide

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    369

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Wafer clean

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    370

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Grow gate oxide

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    371

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Grow gate oxide

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    372

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Grow gate oxide

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    373

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Grow gate oxide

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    374

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Grow gate oxide

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    375

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Deposit polysilicon

    Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    376

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Deposit polysilicon

    Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    377

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Deposit polysilicon

    Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    378

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Deposit polysilicon

    Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    379

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Deposit polysilicon

    Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    380

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Deposit polysilicon

    Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    381

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Clean

    Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    382

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Prebake

    Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    383

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    384

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    385

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    386

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    387

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    388

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    389

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    390

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    391

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    392

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    393

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    394

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    395

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    396

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    397

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    398

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    399

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    400

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    401

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Mask 6: Gate & Local Interconnection

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    402

    Mask 6: Gate & Local Interconnection

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    403

    Mask 6: Gate & Local Interconnection

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    404

    Mask 6: Gate & Local Interconnection

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    405

    Mask 6: Gate & Local Interconnection

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    406

    Mask 6: Gate & Local Interconnection

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    407

    Mask 6: Gate & Local Interconnection

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    408

    Mask 6: Gate & Local Interconnection

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    409

    Mask 6: Gate & Local Interconnection

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    410

    Mask 6: Gate & Local Interconnection

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    411

    CMOS Process Flow: Making Transistor


    Gate mask expose

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    412

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Gate mask expose
    UV or DUV light UV or DUV light

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    413

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Gate mask expose
    UV or DUV light UV or DUV light

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    414

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Gate mask expose
    UV or DUV light UV or DUV light

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    415

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Gate mask expose
    UV or DUV light UV or DUV light

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    416

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Gate mask expose
    UV or DUV light UV or DUV light

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    417

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Gate mask expose
    UV or DUV light UV or DUV light

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    418

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Post exposure bake

    Photoresist Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    419

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    420

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    421

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    422

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Polysilicon Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    423

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    424

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Hard bake

    Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    425

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Pattern check

    Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    426

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Etch polysilicon

    Plasma, Cl2, HBr, O2 ...

    Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    427

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Etch polysilicon

    Plasma, Cl2, HBr, O2 ...

    Polysilicon

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    428

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Etch polysilicon

    Plasma, Cl2, HBr, O2 ...

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    429

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Etch polysilicon

    Plasma, Cl2, HBr, O2 ...

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    430

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Etch polysilicon

    Plasma, Cl2, HBr, O2 ...

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    431

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Etch polysilicon, stop on oxide

    Plasma, Cl2, HBr, O2 ...

    Polysilicon gate

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    432

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Polysilicon gate

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    433

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Polysilicon gate

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    434

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Polysilicon gate

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    435

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Polysilicon gate

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    436

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Clean

    Polysilicon gate

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    437

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Polysilicon anneal/oxidation

    Polysilicon gate

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    438

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Clean

    Polysilicon gate

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    439

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Prebake

    Polysilicon gate

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    440

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    441

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    442

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    443

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    444

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    445

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    446

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    447

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    448

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    449

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    450

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Mask 7: N-channel LDD

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    451

    Mask 7: N-channel LDD

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    452

    Mask 7: N-channel LDD

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    453

    Mask 7: N-channel LDD

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    454

    Mask 7: N-channel LDD

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    455

    Mask 7: N-channel LDD

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    456

    Mask 7: N-channel LDD

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    457

    Mask 7: N-channel LDD

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    458

    Mask 7: N-channel LDD

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    459

    Mask 7: N-channel LDD

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    460

    CMOS Process Flow: Making Transistor


    N-LDD mask expose

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    461

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-LDD mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    462

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-LDD mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    463

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-LDD mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    464

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-LDD mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    465

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-LDD mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    466

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-LDD mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    467

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-LDD mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    468

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-LDD mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    469

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-LDD mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    470

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-LDD mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    471

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-LDD mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    472

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-LDD mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    473

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-LDD mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    474

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-LDD mask expose

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    475

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Post exposure bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    476

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    477

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    478

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    479

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    480

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    481

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    482

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    483

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    484

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    485

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    486

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    487

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    488

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    489

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Hard bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    490

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Pattern check

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    491

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-type LDD implantation, Arsenic

    As+

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    492

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-type LDD implantation, Arsenic

    As+
    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    493

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-type LDD implantation, Arsenic

    As+ Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    494

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-type LDD implantation, Arsenic

    As+ Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    495

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-type LDD implantation, Arsenic

    As+

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    496

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-type LDD implantation, Arsenic

    As+

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    497

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-type LDD implantation, Arsenic

    As+

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    498

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-type LDD implantation, Arsenic

    Photoresist As+

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    499

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-type LDD implantation, Arsenic

    Photoresist

    STI

    As+ P-Well P-Epi

    USG
    N-Well P-Wafer
    500

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    501

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    502

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    503

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    504

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    505

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    506

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    507

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    508

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    509

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    510

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    511

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    512

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    513

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Wafer clean

    n-, lightly doped drain (LDD)

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    514

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    CVD O3-TEOS USG (sidewall spacer)
    USG

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    515

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    USG etchback (sidewall spacer)

    USG Sidewall Spacer

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    516

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    USG etchback (sidewall spacer)

    USG Sidewall Spacer

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    517

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    USG etchback (sidewall spacer)

    USG Sidewall Spacer

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    518

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    CVD O3-TEOS USG (sidewall spacer)

    Polysilicon gate

    n- LDD

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    n- LDD

    hxiao89@hotmail.com

    519

    CMOS Process Flow: Making Transistor


    CVD O3-TEOS USG (sidewall spacer)

    Polysilicon gate

    n- LDD

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    n- LDD

    hxiao89@hotmail.com

    520

    CMOS Process Flow: Making Transistor


    CVD O3-TEOS USG (sidewall spacer)

    Polysilicon gate

    n- LDD

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    n- LDD

    hxiao89@hotmail.com

    521

    CMOS Process Flow: Making Transistor


    CVD O3-TEOS USG (sidewall spacer)

    Polysilicon gate

    n- LDD

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    n- LDD

    hxiao89@hotmail.com

    522

    CMOS Process Flow: Making Transistor


    CVD O3-TEOS USG (sidewall spacer)

    Polysilicon gate

    n- LDD

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    n- LDD

    hxiao89@hotmail.com

    523

    CMOS Process Flow: Making Transistor


    CVD O3-TEOS USG (sidewall spacer)

    Polysilicon gate

    n- LDD

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    n- LDD

    hxiao89@hotmail.com

    524

    CMOS Process Flow: Making Transistor


    CVD O3-TEOS USG (sidewall spacer)

    Polysilicon gate

    n- LDD

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    n- LDD

    hxiao89@hotmail.com

    525

    CMOS Process Flow: Making Transistor


    CVD O3-TEOS USG (sidewall spacer)

    Polysilicon gate

    n- LDD

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    n- LDD

    hxiao89@hotmail.com

    526

    CMOS Process Flow: Making Transistor


    USG etchback (sidewall spacer)

    Polysilicon gate

    n- LDD

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    n- LDD

    hxiao89@hotmail.com

    527

    CMOS Process Flow: Making Transistor


    USG etchback (sidewall spacer)

    Polysilicon gate

    n- LDD

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    n- LDD

    hxiao89@hotmail.com

    528

    CMOS Process Flow: Making Transistor


    USG etchback (sidewall spacer)

    Polysilicon gate

    n- LDD

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    n- LDD

    hxiao89@hotmail.com

    529

    CMOS Process Flow: Making Transistor


    USG etchback (sidewall spacer)

    Polysilicon gate

    n- LDD

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    n- LDD

    hxiao89@hotmail.com

    530

    CMOS Process Flow: Making Transistor


    USG etchback (sidewall spacer)

    Polysilicon gate

    n- LDD

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    n- LDD

    hxiao89@hotmail.com

    531

    CMOS Process Flow: Making Transistor


    USG etchback (sidewall spacer)

    Polysilicon gate

    n- LDD

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    n- LDD

    hxiao89@hotmail.com

    532

    CMOS Process Flow: Making Transistor


    USG etchback (sidewall spacer)

    Polysilicon gate

    n- LDD

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    n- LDD

    hxiao89@hotmail.com

    533

    CMOS Process Flow: Making Transistor


    USG etchback (sidewall spacer)

    Polysilicon gate

    n- LDD

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    n- LDD

    hxiao89@hotmail.com

    534

    CMOS Process Flow: Making Transistor


    USG etchback (sidewall spacer)

    Sidewall spacer

    Polysilicon gate

    Sidewall spacer

    n- LDD

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    n- LDD

    hxiao89@hotmail.com

    535

    CMOS Process Flow: Making Transistor


    Clean

    USG Sidewall Spacer

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    536

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Prebake

    USG Sidewall Spacer

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    537

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    538

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    539

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    540

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    541

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    542

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    543

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    544

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    545

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    546

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    547

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    548

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    549

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    550

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    551

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    552

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    553

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    554

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    555

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    556

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    557

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    558

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    559

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    560

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Mask 8: N-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    561

    Mask 8: N-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    562

    Mask 8: N-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    563

    Mask 8: N-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    564

    Mask 8: N-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    565

    Mask 8: N-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    566

    Mask 8: N-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    567

    Mask 8: N-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    568

    Mask 8: N-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    569

    Mask 8: N-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    570

    CMOS Process Flow: Making Transistor


    N-channel source/drain mask expose

    USG Sidewall Spacer Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    571

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-channel source/drain mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    572

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-channel source/drain mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    573

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-channel source/drain mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    574

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-channel source/drain mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    575

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-channel source/drain mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    576

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-channel source/drain mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    577

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-channel source/drain mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    578

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-channel source/drain mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    579

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-channel source/drain mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    580

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-channel source/drain mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    581

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-channel source/drain mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    582

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-channel source/drain mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    583

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-channel source/drain mask expose
    UV or DUV light

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    584

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Post exposure bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    585

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    586

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    587

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    588

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    589

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    590

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    591

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    592

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    593

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    594

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    595

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    596

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    597

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    598

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Hard bake

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    599

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Pattern check

    Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    600

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N-channel source/drain mask expose

    USG Sidewall Spacer Photoresist

    STI
    P-Well P-Epi
    hxiao89@hotmail.com

    USG
    N-Well P-Wafer
    601

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N+ source/drain implantation, phosphorus

    P+
    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    602

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N+ source/drain implantation, phosphorus

    P+ Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    603

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N+ source/drain implantation, phosphorus

    P+

    Photoresist n+ P-Well P-Epi

    STI

    n+

    USG
    N-Well P-Wafer
    604

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N+ source/drain implantation, phosphorus

    P+

    Photoresist n+ P-Well P-Epi

    STI

    n+

    USG
    N-Well P-Wafer
    605

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N+ source/drain implantation, phosphorus

    Photoresist

    STI

    P+ n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    606

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N+ source/drain implantation, phosphorus

    Photoresist

    STI

    n+

    P+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    607

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N+ source/drain implantation, phosphorus

    Photoresist

    STI

    n+ P+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    608

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    N+ source/drain implantation, phosphorus

    Photoresist

    STI

    n+ P+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    609

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Polysilicon gate

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    610

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Rapid thermal anneal

    Polysilicon gate

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    611

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Rapid thermal anneal

    Polysilicon gate

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    612

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Rapid thermal anneal

    Polysilicon gate

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    613

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Clean

    Polysilicon gate

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    614

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Prebake

    Polysilicon gate

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    615

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Spin-on primer and PR

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    616

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Soft bake

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    617

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    Mask 9: P-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    618

    Mask 9: P-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    619

    Mask 9: P-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    620

    Mask 9: P-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    621

    Mask 9: P-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    622

    Mask 9: P-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    623

    Mask 9: P-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    624

    Mask 9: P-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    625

    Mask 9: P-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    626

    Mask 9: P-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    627

    Mask 9: P-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    628

    Mask 9: P-channel Source/Drain

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    629

    CMOS Process Flow: Making Transistor


    P+ source/drain mask expose
    UV or DUV light

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    630

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P+ source/drain mask expose
    UV or DUV light

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    631

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P+ source/drain mask expose
    UV or DUV light

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    632

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P+ source/drain mask expose
    UV or DUV light

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    633

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P+ source/drain mask expose
    UV or DUV light

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    634

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P+ source/drain mask expose
    UV or DUV light

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    635

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P+ source/drain mask expose
    UV or DUV light

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    636

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P+ source/drain mask expose
    UV or DUV light

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    637

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P+ source/drain mask expose
    UV or DUV light

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    638

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P+ source/drain mask expose
    UV or DUV light

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    639

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P+ source/drain mask expose
    UV or DUV light

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    640

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P+ source/drain mask expose
    UV or DUV light

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    641

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P+ source/drain mask expose
    UV or DUV light

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    642

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Post exposure bake

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    643

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Post exposure bake

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    644

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    645

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    646

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    647

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    648

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    649

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    650

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    651

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    652

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    653

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    654

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    655

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    656

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    657

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Develop

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    658

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Hard bake

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    659

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Hard bake

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    660

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Pattern check

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    661

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Pattern check

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    662

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    Pattern check

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG
    N-Well P-Wafer
    663

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P-channel Source/drain implantation, Boron

    B+

    B+

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    664

    CMOS Process Flow: Making Transistor


    P-channel Source/drain implantation, Boron

    B+ Photoresist

    B+

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    665

    CMOS Process Flow: Making Transistor


    P-channel Source/drain implantation, Boron

    B+ Photoresist

    B+

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    666

    CMOS Process Flow: Making Transistor


    P-channel Source/drain implantation, Boron

    B+
    Photoresist

    B+

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    667

    CMOS Process Flow: Making Transistor


    P-channel Source/drain implantation, Boron

    Photoresist

    B+

    B+

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    668

    CMOS Process Flow: Making Transistor


    P-channel Source/drain implantation, Boron

    Photoresist

    B+ p+ N-Well

    B+ p+

    STI

    n+

    n+ P-Well P-Epi

    USG

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    669

    CMOS Process Flow: Making Transistor


    P-channel Source/drain implantation, Boron

    Photoresist

    B+ p+ N-Well

    B+ p+

    STI

    n+

    n+ P-Well P-Epi

    USG

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    670

    CMOS Process Flow: Making Transistor


    P-channel Source/drain implantation, Boron

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG

    B+ p+ N-Well

    B+ p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    671

    CMOS Process Flow: Making Transistor


    P-channel Source/drain implantation, Boron

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG

    + +B p

    B+ p+

    N-Well P-Wafer
    672

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    CMOS Process Flow: Making Transistor


    P-channel Source/drain implantation, Boron

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ B+ N-Well

    B+ p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    673

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ B+ N-Well

    B+ p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    674

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ B+ N-Well

    B+ p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    675

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ B+ N-Well

    B+ p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    676

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ B+ N-Well

    B+ p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    677

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ B+ N-Well

    B+ p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    678

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ B+ N-Well

    B+ p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    679

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ B+ N-Well

    B+ p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    680

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ B+ N-Well

    B+ p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    681

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ B+ N-Well

    B+ p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    682

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ B+ N-Well

    B+ p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    683

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ B+ N-Well

    B+ p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    684

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ B+ N-Well

    B+ p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    685

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ B+ N-Well

    B+ p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    686

    CMOS Process Flow: Making Transistor


    Strip photoresist

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ B+ N-Well

    B+ p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    687

    CMOS Process Flow: Making Transistor


    Strip photoresist

    Polysilicon gate

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    688

    CMOS Process Flow: Making Transistor


    Clean

    Polysilicon gate

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    689

    CMOS Process Flow: Making Transistor


    Clean

    Polysilicon gate

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    690

    CMOS Process Flow: Making Transistor


    Clean

    Polysilicon gate

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    691

    CMOS Process Flow: Making Transistor


    Rapid thermal annealing

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    692

    CMOS Process Flow: Making Transistor


    Rapid thermal annealing

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    693

    CMOS Process Flow: Making Transistor


    Rapid thermal annealing

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    694

    CMOS Process Flow: Making Transistor


    Rapid thermal annealing

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    695

    CMOS Process Flow: Interconnection


    Strip gate oxide

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    696

    CMOS Process Flow: Interconnection


    Deposit Titanium

    Titanium

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    697

    CMOS Process Flow: Interconnection


    Deposit Titanium

    Titanium

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    698

    CMOS Process Flow: Interconnection


    Rapid thermal alloy

    Titanium

    Titanium silicide

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    699

    CMOS Process Flow: Interconnection


    Strip Titanium

    Titanium silicide

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    700

    CMOS Process Flow: Interconnection


    Deposit nitride

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    701

    CMOS Process Flow: Making Transistor


    Strip gate oxide

    Sidewall spacer

    Polysilicon gate

    Sidewall spacer

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    702

    CMOS Process Flow: Making Transistor


    Strip gate oxide

    Sidewall spacer

    Polysilicon gate

    Sidewall spacer

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    703

    CMOS Process Flow: Making Transistor


    Strip gate oxide

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    704

    CMOS Process Flow: Making Transistor


    Deposit titanium

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    705

    CMOS Process Flow: Making Transistor


    Deposit titanium

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    706

    CMOS Process Flow: Making Transistor


    Deposit titanium

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    707

    CMOS Process Flow: Making Transistor


    Deposit titanium

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    708

    CMOS Process Flow: Making Transistor


    Deposit titanium

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    709

    CMOS Process Flow: Making Transistor


    Rapid thermal alloy

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    710

    CMOS Process Flow: Making Transistor


    Rapid thermal alloy

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    711

    CMOS Process Flow: Making Transistor


    Rapid thermal alloy

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    712

    CMOS Process Flow: Making Transistor


    Rapid thermal alloy

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    713

    CMOS Process Flow: Making Transistor


    Strip titanium

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    714

    CMOS Process Flow: Making Transistor


    Strip titanium

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    715

    CMOS Process Flow: Making Transistor


    Strip titanium

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    716

    CMOS Process Flow: Making Transistor


    Strip titanium

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    717

    CMOS Process Flow: Making Transistor


    Strip titanium

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    718

    CMOS Process Flow: Making Transistor


    Deposit silicon nitride

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    719

    CMOS Process Flow: Making Transistor


    Deposit silicon nitride

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    720

    CMOS Process Flow: Making Transistor


    Deposit silicon nitride

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    721

    CMOS Process Flow: Making Transistor


    Deposit silicon nitride

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    722

    CMOS Process Flow: Making Transistor


    Deposit silicon nitride

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    723

    CMOS Process Flow: Making Transistor


    Deposit silicon nitride

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    724

    CMOS Process Flow: Making Transistor


    Deposit BPSG

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    725

    CMOS Process Flow: Making Transistor


    Deposit BPSG

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    726

    CMOS Process Flow: Making Transistor


    Deposit BPSG

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    727

    CMOS Process Flow: Making Transistor


    Deposit BPSG

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    728

    CMOS Process Flow: Making Transistor


    Deposit BPSG

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    729

    CMOS Process Flow: Making Transistor


    Deposit BPSG

    Polysilicon gate

    nn+
    hxiao89@hotmail.com

    Gate oxide
    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    nn+
    730

    CMOS Process Flow: Interconnection


    Deposit nitride

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    731

    CMOS Process Flow: Interconnection


    Deposit BPSG

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    732

    CMOS Process Flow: Interconnection


    Deposit BPSG

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    733

    CMOS Process Flow: Interconnection


    Deposit BPSG, O3,TEOS,TEB, TEPO

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    734

    CMOS Process Flow: Interconnection


    Deposit BPSG, O3,TEOS,TEB, TEPO

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    735

    CMOS Process Flow: Interconnection


    Deposit BPSG, O3,TEOS,TEB, TEPO

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    736

    CMOS Process Flow: Interconnection


    Deposit BPSG, O3,TEOS,TEB, TEPO

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    737

    CMOS Process Flow: Interconnection


    Deposit BPSG

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    738

    CMOS Process Flow: Interconnection


    Deposit BPSG

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    739

    CMOS Process Flow: Interconnection


    Deposit BPSG

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    740

    CMOS Process Flow: Interconnection


    Deposit BPSG

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    741

    CMOS Process Flow: Interconnection


    Deposit BPSG

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    742

    CMOS Process Flow: Interconnection


    Deposit BPSG

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    743

    CMOS Process Flow: Interconnection


    Reflow BPSG

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    744

    CMOS Process Flow: Interconnection


    Polish BPSG

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    745

    CMOS Process Flow: Interconnection


    Polish BPSG

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    746

    CMOS Process Flow: Interconnection


    Polish BPSG

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    747

    CMOS Process Flow: Interconnection


    Polish BPSG

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    748

    CMOS Process Flow: Interconnection


    Polish BPSG

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    749

    CMOS Process Flow: Interconnection


    Polish BPSG

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    750

    CMOS Process Flow: Interconnection


    Polish BPSG

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    751

    CMOS Process Flow: Interconnection


    Polish BPSG

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    752

    CMOS Process Flow: Interconnection


    Wafer clean Prebake/Spin-on primer and PR/Soft bake

    Photoresist BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    753

    Mask 10: Contact Holes

    Photoresist

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    754

    CMOS Process Flow: Interconnection


    Contact mask expose Post exposure bake/Develop/hard bake Pattern check
    Photoresist BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    755

    CMOS Process Flow: Interconnection


    Etch BPSG

    Photoresist BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    756

    CMOS Process Flow: Interconnection


    Etch BPSG

    Photoresist BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    757

    CMOS Process Flow: Interconnection


    Etch BPSG

    Photoresist BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    758

    CMOS Process Flow: Interconnection


    Etch BPSG

    Photoresist BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    759

    CMOS Process Flow: Interconnection


    Etch BPSG

    Photoresist BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    760

    CMOS Process Flow: Interconnection


    Etch BPSG

    Photoresist BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    761

    CMOS Process Flow: Interconnection


    Etch BPSG

    Photoresist BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    762

    CMOS Process Flow: Interconnection


    Etch BPSG

    Photoresist BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    763

    CMOS Process Flow: Interconnection


    Etch BPSG

    Photoresist BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    764

    CMOS Process Flow: Interconnection


    Etch BPSG

    Photoresist BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    765

    CMOS Process Flow: Interconnection


    Etch BPSG

    Photoresist BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    766

    CMOS Process Flow: Interconnection


    Etch BPSG

    Photoresist BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    767

    CMOS Process Flow: Interconnection


    Etch BPSG

    Photoresist BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    768

    CMOS Process Flow: Interconnection


    Etch BPSG, Stop on silicide surface

    Photoresist BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    769

    CMOS Process Flow: Interconnection


    Strip photoresist Wafer clean

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    770

    CMOS Process Flow: Interconnection


    Deposit Ti/TiN

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    771

    CMOS Process Flow: Interconnection


    Deposit Ti/TiN

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    772

    Deposit Ti, PVD

    BPSG

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    773

    Deposit Ti, PVD

    BPSG

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    774

    Deposit Ti, PVD

    BPSG

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    775

    Deposit TiN, PVD

    BPSG

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    776

    Deposit TiN, PVD

    BPSG

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    777

    Deposit TiN, CVD

    BPSG

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    778

    Deposit TiN, CVD

    BPSG

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    779

    N2-H2 plasma treatment

    BPSG

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    780

    N2-H2 plasma treatment

    BPSG

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    781

    Deposit TiN, CVD

    BPSG

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    782

    Deposit TiN, CVD

    BPSG

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    783

    N2-H2 plasma treatment

    BPSG

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    784

    N2-H2 plasma treatment

    BPSG

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    785

    CMOS Process Flow: Interconnection


    Deposit Ti/TiN

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    786

    CMOS Process Flow: Interconnection


    Deposit tungsten

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    787

    CMOS Process Flow: Interconnection


    Deposit tungsten

    BPSG

    STI

    n+

    n+ P-Well P-Epi

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    788

    CMOS Process Flow: Interconnection


    Deposit tungsten

    BPSG n+ P-Well P-Epi

    STI

    n+

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    789

    CMOS Process Flow: Interconnection


    Deposit tungsten

    BPSG n+ P-Well P-Epi

    STI

    n+

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    790

    CMOS Process Flow: Interconnection


    Polish tungsten

    BPSG n+ P-Well P-Epi

    STI

    n+

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    791

    CMOS Process Flow: Interconnection


    Polish tungsten

    BPSG n+ P-Well P-Epi

    STI

    n+

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    792

    CMOS Process Flow: Interconnection


    Polish tungsten

    BPSG n+ P-Well P-Epi

    STI

    n+

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    793

    CMOS Process Flow: Interconnection


    Polish tungsten

    BPSG n+ P-Well P-Epi

    STI

    n+

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    794

    CMOS Process Flow: Interconnection


    Polish tungsten

    BPSG n+ P-Well P-Epi

    STI

    n+

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    795

    CMOS Process Flow: Interconnection


    Polish tungsten

    BPSG n+ P-Well P-Epi

    STI

    n+

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    796

    CMOS Process Flow: Interconnection


    Polish TiN/Ti, stop on BPSG Wafer clean

    BPSG n+ P-Well P-Epi

    STI

    n+

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    797

    CMOS Process Flow: Interconnection


    Pre-clean Deposit Ti (PVD)

    BPSG n+ P-Well P-Epi

    STI

    n+

    USG

    p+ N-Well

    p+

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    P-Wafer

    798

    CMOS Process Flow: Interconnection


    Deposit AlCu (PVD)

    Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    799

    CMOS Process Flow: Interconnection


    Deposit AlCu (PVD)

    Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    800

    CMOS Process Flow: Interconnection


    Deposit AlCu (PVD)

    Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    801

    CMOS Process Flow: Interconnection


    Deposit AlCu (PVD)

    Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    802

    CMOS Process Flow: Interconnection


    Deposit AlCu (PVD)

    Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    803

    CMOS Process Flow: Interconnection


    Deposit AlCu (PVD)

    Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    804

    CMOS Process Flow: Interconnection


    Deposit TiN ARC (PVD)

    Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    805

    CMOS Process Flow: Interconnection


    Wafer clean Prebake/Spin-on primer and PR/Soft bake
    Photoresist Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    806

    Mask 11: Metal 1 Interconnects

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    807

    CMOS Process Flow: Interconnection


    Metal 1 mask expose Post exposure bake/Develop/hard bake Pattern check
    Photoresist Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    808

    CMOS Process Flow: Interconnection


    Etch metal

    Photoresist Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    809

    CMOS Process Flow: Interconnection


    Etch metal

    Photoresist Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    810

    CMOS Process Flow: Interconnection


    Etch metal

    Photoresist Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    811

    CMOS Process Flow: Interconnection


    Etch metal

    Photoresist Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    812

    CMOS Process Flow: Interconnection


    Etch metal

    Photoresist Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    813

    CMOS Process Flow: Interconnection


    Etch metal

    Photoresist Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    814

    CMOS Process Flow: Interconnection


    Etch metal

    Photoresist Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    815

    CMOS Process Flow: Interconnection


    Strip photoresist Metal anneal

    Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    816

    CMOS Process Flow: Interconnection


    CVD USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    817

    CMOS Process Flow: Interconnection


    CVD USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    818

    CMOS Process Flow: Interconnection


    CVD USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    819

    CMOS Process Flow: Interconnection


    CVD USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    820

    CMOS Process Flow: Interconnection


    CVD USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    821

    CMOS Process Flow: Interconnection


    USG etchback

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    822

    CMOS Process Flow: Interconnection


    USG etchback

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    823

    CMOS Process Flow: Interconnection


    USG etchback

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    824

    CMOS Process Flow: Interconnection


    USG etchback

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    825

    CMOS Process Flow: Interconnection


    USG etchback

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    826

    CMOS Process Flow: Interconnection


    USG etchback

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    827

    CMOS Process Flow: Interconnection


    USG etchback

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    828

    CMOS Process Flow: Interconnection


    CVD USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    829

    CMOS Process Flow: Interconnection


    CVD USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    830

    CMOS Process Flow: Interconnection


    CVD USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    831

    CMOS Process Flow: Interconnection


    CVD USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    832

    CMOS Process Flow: Interconnection


    CVD USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    833

    CMOS Process Flow: Interconnection


    CVD USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    834

    CMOS Process Flow: Interconnection


    CVD USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    835

    CMOS Process Flow: Interconnection


    CVD USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    836

    CMOS Process Flow: Interconnection


    CVD USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    837

    CMOS Process Flow: Interconnection


    CVD USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    838

    CMOS Process Flow: Interconnection


    CMP USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    839

    CMOS Process Flow: Interconnection


    CMP USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    840

    CMOS Process Flow: Interconnection


    CMP USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    841

    CMOS Process Flow: Interconnection


    CMP USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    842

    CMOS Process Flow: Interconnection


    CMP USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    843

    CMOS Process Flow: Interconnection


    CMP USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    844

    CMOS Process Flow: Interconnection


    CMP USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    845

    CMOS Process Flow: Interconnection


    CMP USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    846

    CMOS Process Flow: Interconnection


    CMP USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    847

    CMOS Process Flow: Interconnection


    CMP USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    848

    CMOS Process Flow: Interconnection


    CMP USG

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    849

    CMOS Process Flow: Interconnection


    Wafer clean Prebake/Spin-on primer and PR/Soft bake
    Photoresist USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    850

    Mask 12: Via Holes

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    851

    CMOS Process Flow: Interconnection


    Via mask expose Post exposure bake/Develop/hard bake Pattern check
    Photoresist USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    852

    CMOS Process Flow: Interconnection


    Etch USG

    Photoresist USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    853

    CMOS Process Flow: Interconnection


    Etch USG

    Photoresist USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    854

    CMOS Process Flow: Interconnection


    Etch USG

    Photoresist USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    855

    CMOS Process Flow: Interconnection


    Etch USG

    Photoresist USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    856

    CMOS Process Flow: Interconnection


    Etch USG

    Photoresist USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    857

    CMOS Process Flow: Interconnection


    Etch USG

    Photoresist USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    858

    CMOS Process Flow: Interconnection


    Etch USG

    Photoresist USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    859

    CMOS Process Flow: Interconnection


    Strip photoresist

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    860

    CMOS Process Flow: Interconnection

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    861

    CMOS Process Flow: Interconnection


    Deposit tungsten

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    862

    CMOS Process Flow: Interconnection


    Deposit tungsten

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    863

    CMOS Process Flow: Interconnection


    Deposit tungsten

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    864

    CMOS Process Flow: Interconnection


    Deposit tungsten

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    865

    CMOS Process Flow: Interconnection


    Deposit tungsten

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    866

    CMOS Process Flow: Interconnection


    Deposit tungsten

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    867

    CMOS Process Flow: Interconnection


    Polish tungsten

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    868

    CMOS Process Flow: Interconnection


    Polish tungsten

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    869

    CMOS Process Flow: Interconnection


    Polish tungsten

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    870

    CMOS Process Flow: Interconnection


    Polish tungsten

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    871

    CMOS Process Flow: Interconnection


    Polish tungsten

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    872

    CMOS Process Flow: Interconnection


    Polish tungsten

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    873

    CMOS Process Flow: Interconnection


    Polish TiN/Ti

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    874

    CMOS Process Flow: Interconnection


    Deposit Ti

    USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    875

    CMOS Process Flow: Interconnection


    Deposit AlCu
    Metal 2, AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    876

    CMOS Process Flow: Interconnection


    Deposit AlCu
    Metal 2, AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    877

    CMOS Process Flow: Interconnection


    Deposit AlCu
    Metal 2, AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    878

    CMOS Process Flow: Interconnection


    Deposit AlCu
    Metal 2, AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    879

    CMOS Process Flow: Interconnection


    Deposit AlCu
    Metal 2, AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    880

    CMOS Process Flow: Interconnection


    Deposit AlCu
    Metal 2, AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    881

    CMOS Process Flow: Interconnection


    Deposit AlCu
    Metal 2, AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    882

    CMOS Process Flow: Interconnection


    Deposit AlCu
    Metal 2, AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    883

    CMOS Process Flow: Interconnection


    Deposit TiN Clean
    Metal 2, AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    884

    CMOS Process Flow: Interconnection


    Prebake/Spin-on primer and PR/Soft bake
    Photoresist Metal 2, AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    885

    Mask 13: Metal 2 Interconnects

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    886

    CMOS Process Flow: Interconnection


    Metal 2 mask/Develop/Hard bake/Check
    PR Metal 2, AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    887

    CMOS Process Flow: Interconnection


    Etch Metal 2
    PR Metal 2, AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    888

    CMOS Process Flow: Interconnection


    Etch Metal 2
    PR Metal 2, AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    889

    CMOS Process Flow: Interconnection


    Etch Metal 2
    PR Metal 2, AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    890

    CMOS Process Flow: Interconnection


    Etch Metal 2
    PR Metal 2, AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    891

    CMOS Process Flow: Interconnection


    Etch Metal 2
    PR Metal 2, AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    892

    CMOS Process Flow: Interconnection


    Etch Metal 2
    PR AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    893

    CMOS Process Flow: Interconnection


    Etch Metal 2
    PR AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    894

    CMOS Process Flow: Interconnection


    Etch Metal 2
    PR AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    895

    CMOS Process Flow: Interconnection


    Etch Metal 2
    PR AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    896

    CMOS Process Flow: Interconnection


    Etch Metal 2
    PR AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    897

    CMOS Process Flow: Interconnection


    Etch Metal 2
    PR AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    898

    CMOS Process Flow: Passivation


    Strip PR/Clean/Metal anneal

    AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi


    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    899

    CMOS Process Flow: Passivation


    Deposit oxide
    oxide AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    900

    CMOS Process Flow: Passivation


    Deposit oxide
    oxide AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    901

    CMOS Process Flow: Passivation


    Deposit oxide
    oxide AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    902

    CMOS Process Flow: Passivation


    Deposit nitride
    nitride oxide AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    903

    CMOS Process Flow: Passivation


    Deposit nitride
    nitride oxide AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    904

    CMOS Process Flow: Passivation


    Deposit nitride
    nitride oxide AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    905

    CMOS Process Flow: Passivation


    Deposit nitride
    nitride oxide AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    906

    CMOS Process Flow: Passivation


    Photoresist nitride oxide AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    907

    Mask 13: Bonding Pad

    Photoresist

    hxiao89@hotmail.com

    www2.austin.cc.tx.us/HongXiao/Boo k.htm

    908

    CMOS Process Flow: Passivation


    Photoresist nitride oxide AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    909

    CMOS Process Flow: Passivation


    Photoresist nitride oxide AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    910

    CMOS Process Flow: Passivation


    Photoresist nitride oxide AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    911

    CMOS Process Flow: Passivation


    Photoresist nitride oxide AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    912

    CMOS Process Flow: Passivation


    Photoresist nitride oxide AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    913

    CMOS Process Flow: Passivation


    Photoresist nitride oxide AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    914

    CMOS Process Flow: Passivation


    Photoresist nitride oxide AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    915

    CMOS Process Flow: Passivation


    Photoresist nitride oxide AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    916

    CMOS Process Flow: Passivation


    Photoresist nitride oxide AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    917

    CMOS Process Flow: Passivation


    Photoresist nitride oxide AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    918

    CMOS Process Flow: Passivation


    Photoresist nitride oxide AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    919

    CMOS Process Flow: Passivation


    Photoresist nitride oxide AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    920

    CMOS Process Flow: Passivation


    Photoresist nitride oxide AlCu USG Metal 1, AlCu W BPSG n+ P-Well P-Epi
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm

    STI

    n+

    USG

    p+ N-Well

    p+

    P-Wafer

    921

    End of CMOS process with mid 1990s technology

    Information of more advanced CMOS process flow with SOI, copper and low-k technologies can be found in Chapter 14 of
    Introduction of Semiconductor Manufacturing Technology

    publish by Prentice Hall, ISBN: 0130224049


    Table of content of the book can be found here.
    hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Boo k.htm 922

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