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MEMS+ 2.0: Enabling System-level Design with Matlab, Simulink and Cadence Virtuoso
Introduction
MEMSaremicro ornanoscaled devices TypicallycompriseaMEMS sensingoractuationdeviceand integratedelectronics DisconnectbetweenMEMSandIC designflowsleadstolong developmentcyclesandhighcosts Minimaldesignreuse
MEMSProductDesignRequires Collaboration
ICandlayoutdesignersrequireaMEMScomponentfortheirICdesign environment
MEMSDesignandSimulationTools ICDesignandSimulationTools
TheCollaborationChallenge
Howcananaccuratecircuitorsystemmodelbecreatedconsideringthe complexityofstateoftheartMEMSdevices?
ReducedOrderModeling
ReducedOrderModelingyieldsasystemorcircuitmodelstarting witha classicFEelementmodel:
Whyparametricmodelsare needed
RequestsleadingMEMSmanufacturers forparametricmodels EverytimemyMEMSteamchangesthedevicegeometry,theynotonly havetoreextract,butalsorevalidatethemodel,whichlimitsourabilityto quicklycodesignwithourcircuitteam Itsimportanttogivethecircuitteamafewgeometricparameterstovary sotheycanoptimizethesystemcharacteristics. Toimproveyieldoftheentiresystem,weneedtheentiremodeltobe sensitivetomanufacturingvariationsinthegeometry.
BehavioralModelingApproach
Circuitsimulatorcompatiblelumpedmodelsofnonelectricalcomponents suchasplates,beams,electrodesetc:
kz k z kz k z
FMR
FE
CoventorWareArchitect
Ourfirstanswer:CoventorWareArchitect,aschematicbasedapproachto MEMS+IC/Systemsimulation:
SchematicModel Parameterization
Everyschematicmodelhadarichsetofparametersinordertoenableamaximumof designflexibility:
3DModelwithScene3D
Schematiccreationwasoftenperceivedaslaboriousandnonintuitive Scene3Dbroughtsomerelief
Simulation Speed
Userswereoftenimpressedbythesimulationspeedbuthadahardtimeto appreciatethecomplexityofArchitectsimulations
soweadded3Dresultvisualization
Architect Examples
Withcontinuingimprovementstoourcomponentlibrary,ARCHITECT could handleanincreasingvarietyofdesigns
DLPMirrors Accelerometer RingGyros
Resonators
RFSwitches
andArchitectwasnolongerjustaboutMEMS+ICdesign.FullMEMSdevice designcouldbedoneinminutes
Remaining Caveats
Schematicbasedmodelcreationwasstillunnaturalformostmechanical engineerswhopreferCADtoolsoratleastlayouteditorsfordesigninput MostICandsystemdesignerspreferMATLABSimulink,Cadence,Mentor Graphics,Synopsys(ratherthanSABER!)
Ourmostvaluableasset,ourmodellibrary wastrappedinsideSABER
OurNewApproach MEMS+
SEMulator3D
AlgorithmLevelDesign
ProcessEmulation
FEMDampingandStressAnalysis
StructuralLevelDesignandPCellGeneration
CoventorMEMS+ forMatlabSimulink
+ 1 CoventorMEMS Assembledesignin3D
2 ImportMEMSModel
3 InsertMEMSmodelinschematic
Symbol
4 Simulate
SFunctionInterface
5 Visualizesimulationsin3D
CoventorMEMS+ forCadenceVirtuoso
+ 1 CoventorMEMS Assembledesignin3D
2 ImportMEMSModel
3 CadenceVirtuoso InsertMEMSmodelinschematic
6 Visualizesimulationsin3D
5 PlaceMEMSpCellinlayout
MEMS+ PDKand3Ddesignentry
FoundryDataPDK
Allfoundryrelevantdataisstoredintwodatabases,whichareeither providedbyanexternalfoundryorbythetechnologygroupwithinthe company
VariableAssignment
Materialpropertiescanbedefinedasvalues,variablesoralgebraicequations
ProcessEditor
TheProcessEditordetailsthesequenceofMEMSfabricationsteps Itholdslayernames,thicknessesandsidewallangles
LayerMaterialSelection
EachlayerisassociatedtooneofthematerialsfromtheMaterialDatabase
ExposingVariables
VariablesdefinedintheMaterialDatabaseorProcessEditorcan beexposed totheMEMSdesigner
Innovator
TheMEMSdesignerstartswithablank,3DcanvasontheInnovatortab
PDKVariableImport
ExposedvariablesfromtheProcessEditororMaterialDatabaseare automaticallyimportedintoInnovator
ParametricComponentLibrary
MEMSdevicemodelsarecreatedwithalibraryofparametriccomponent generatorsforsuspensions,plates,combsandelectricalpads
AddingComponents
TheMEMSdesignerpickscomponentsfromthelibrarytoassemblethe desiredstructure
LayerAssignment
Eachcomponentcanbeassignedtooneormultiplelayersofthe correspondingprocessfile
ComponentParameters
Componentparameterscanbedefinedasvalues,variablesoralgebraic equations
ComponentTree
Thecomponenttreehighlightsthecomponentnamesandthehierarchical structureofthe3Ddeviceschematic
MechanicalConnectorView
Themechanicalconnectortreeandviewingmodehighlightswhich componentsarelinkedtogether
ElectricalConnectorView
Theelectricalviewingmodehighlightselectricalconnectivitywithcolorsand transparencyinthecanvas
MatlabSimulinkModelImport
3DInnovatordesignscanbeimportedintoMatlabSimulinksmodeleditor usingtheMEMS+importtool
ModelParameters
TheMEMSdevicemodelinMatlabSimulinkfeaturesallparameters that wereexposedinMEMS+Innovator
ExposedPorts
Thesymbolviewfeaturesallexposedelectrical,mechanicalandcapacitance ports
Input/OutputPorts
Exposedelectricalportsappearasvoltageinputs Exposedmechanicalportsappearasforce/torqueinputsandposition/angle variationoutputs Exposedcapacitanceportsarepureoutputs
Reference Frame motion Inputs Force Inputs Position Outputs
Capacitance Outputs
Voltage Inputs
SystemSchematic
TheMEMSsystemdesignercompletesthefeedbackorpostprocessing circuitusingmodelsfromthestandardlibrary
MEMSDeviceSimulation
TheMEMSsystemdesignerconfirmsthedeviceperformancerunning simulationsintheMatlab/Simulinkenvironment
AdditionallySupportedAnalysis
AdditionalanalysisareaccessiblefromtheMEMS+menu
DCAnalysis
TheDCAnalysisisaconvenientwaytocreateoperatingpointsfortransient andfrequencyanalysis
ModalAnalysis
TheModalAnalysiscalculatesEigenmodesandEigenfrequenciesofthe completesystem
ACSmallSignalAnalysis
TheACAnalysisperformsfrequencysweepsofthecompletesystem
SimulationResults
AllsimulationresultscanbeloadedbackintoMEMS+andanimatedinthe3 Dcanvas
MEMS+Workflow forCadenceVirtuoso
+ 1 CoventorMEMS Assembledesignin3D
2 ImportMEMSModel
3 CadenceVirtuoso InsertMEMSmodelinschematic
6 Visualizesimulationsin3D
5 PlaceMEMSpCellinlayout
DLPMirror DesignExample
TexasInstrumentsdigitallightprocessing[DLP]projectionsystemisbuild aroundadigitalmicromirrordevice(DMD)ontopofaSRAMcell
2 DLPmirrorinMEMS+ 4 Schematicofthe combineddeviceand memorycellmodel 5 Hierarchicalsymbol ofaDLPmirrorwith memorycell
1 DLPmirrorwith memorycell
3 Memorycellschematic
CompleteDeviceDesign
ThepositionandorientationoftheDLPmirrorispartoftheexposed variables
CadenceVirtuoso CellGeneration
The3DInnovatordesignisimportedintotheCadenceLibraryManagerusing theMEMS+importtool
ParametricCellViews
TheMEMS+importtoolautomaticallycreatesaparametriclayout and schematicview
VirtuosoCellParameters
Thecreatedcellviewsfeaturesallparametersthatwereexposed inMEMS+
MEMSDeviceSchematic
TheMEMSdesigneraddssourcestotheexposedelectricalpinsandconfirms thedeviceperformancerunningDC,ACandtransientsimulations
MEMSDeviceSimulation
SimulationresultscanbeloadedbackintoMEMS+andanimatedin the3D canvas
SRAMMemoryCellDesign
TheICdesigner,meanwhile,createsaschematicoftheSRAMmemorycell underneatheachmirror
~Bit Line
Data
~Data
Data
~Data
CompletePixelCell
TheCMOSSRAMcellcaninturnbeconnectedtothemirrortoassemblethe completepixelcell
2 DLPmirrorinMEMS+ 4 Schematicofthe combineddeviceand memorycellmodel 5 Hierarchicalsymbol ofaDLPmirrorwith memorycell
1 DLPmirrorwith memorycell
3 Memorycellschematic
MirrorArraySchematic
Thepixelcellisreplicatedtoformanarrayandconnectedtothedriving electronics
Cadence Virtuoso schematic of memory cell
MirrorArraySimulation
ThecompletemirrorarraycannowbesimulatedwiththeVirtuoso simulators:Spectre,UltraSimorAPS
Visualization in MEMS+ Scene3D
Integration
MEMS+takesfulladvantageoftheCadenceVirtuosocustomICdesign environment
MEMSIC Simulation
Combined DRC
Signoff
LamModeResonator
LamModeFilter
BandpassfiltercanbebuildbycombiningmultipleLam resonators:
Microphone
Microphonewithperforatedbackplateusingcircularandarcshapedflexible plateswithpressureloadsandelectrodes
(Perforationarenotshownintheimage)
ResultsofaModalAnalysiswith Matlab/Simulink
PZEActuatedMirror
Mirrorwithcircularpzemembraneactuation:
VerticalMirrordisplacement[um]asa functionofvoltage
DiskGyro
DiskGyroscopebuildwithpieandarcshapedflexibleplatemodelswithside andtopelectrodes VerticalBeam
PiePlates
1.23MHz
1.22MHz
7.53MHz
MEMS+modeshapescomparedtoatraditionalparabolicbrickmesh
RingResonator
MEMS+ringresonatormadewithstraightbeams,arcplatesandside electrodes
ControlSignal
ThetransientsimulationwithSpectre completedinlessthen10seconds!
MEMS+ DesignExamples
MEMS+buildsonCoventorsparametricmodellibrarywhichhasbeen provenonrealworlddesigns
Accelerometers Gyros (Angular Rate Sensors)
Display Devices
Resonators
RF Switches
TheEnd