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NSE 506E Fabrication Techniques in Nanotechnology 2012 Spring Semester Introduction to Nanosystems and Nanodevices: Fabrication from micro- to nanotechnology; Scaling issues in miniaturized world! Basic Thin Film Growth and Processes (PVD, CVD): surfaces and interfaces Advanced Thin Film Growth and Processes: Atomic Layer Film Growth (ALD), Molecular Beam Epitaxy (MBE), MOCVD, Pulsed Laser Deposition for nanofabrication Diffusion processes, Ion implantation and oxidation Optical and e-beam lithography, LIGA and X-Ray lithography and photomask technology Nano-Templates by plasma-based etching, dry-etching processes Nano-templates by wet etching and stamping techniques Nano-templates by charged beams, by scanning beams electrochemical, nanoimprinting Nano-wires, CNT and controlled growth of columns Nano-fabrication by Self-Assembly Processing on polymers and ceramics and materials issues in fabrication Principles on process integration Student presentations Student presentations Student presentations

REFERENCES 1. Cui, Z., Nanofabrication: Principles, Capabilites and Limits, Springer, ISBN: 978-0-38775576-2, 2008. 2. Andrady, A.L., Science and Technology of Polymer Nanofibers, John Wiley & Sons, Inc, ISBN 978-0-471-79059-4, 2008. 3. Bhusban, B., Springer Handbook of Nanotechnology, Springer, ISBN: 978-3-540-29855-7, 2007. 4. Jackson, M.J., Microfabrication and Nanomanufacturing, CRC Press, ISBN: 0-8247-2431-3, 2006. 5. Gogotsi, Y., Nanotubes and Nanofibers, Taylor & Francis, ISBN 0-8493-9387-6, 2006. 6. Franssila, S., Introduction to Microfabrication, John Wiley & Sons Ltd, ISBN: 0470851058, 2004. Emails: kizilh@itu.edu.tr , levent.trabzon@itu.edu.tr Grading: Midterm 30 % Final 40 % Term Project &Presentations 30%