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**A low-noise, single-photon avalanche diode in standard 0.13 complementary metal-oxide-semiconductor process
**

Ryan M. Field,1 Jenifer Lary,2 John Cohn,2 Liam Paninski,3 and Kenneth L. Shepard1,a

1 2

m

Department of Electrical Engineering, Columbia University, New York, New York 10027, USA IBM STG, Essex Junction, Vermont 05452, USA 3 Department of Statistics, Columbia University, New York, New York 10027, USA

Received 10 September 2010; accepted 29 October 2010; published online 24 November 2010 We present the design and characterization of a single-photon avalanche diode SPAD fabricated with a standard 0.13 m complementary metal-oxide-semiconductor process. We have developed a ﬁgure of merit for SPADs when these detectors are employed in high frame-rate ﬂuorescent lifetime imaging microscopy, which allows us to specify an optimal bias point for the diode and compare our diode with other published devices. At its optimum bias point at room temperature, our SPAD achieves a photon detection probability of 29% while exhibiting a dark count rate of only 231 Hz and an impulse response of 198 ps. © 2010 American Institute of Physics. doi:10.1063/1.3518473 Fluorescent dyes have become essential markers for observing and quantifying biological processes. Traditionally, ﬂuorescence microscopy has been performed using spectrally discriminated intensity measurements. Recently, ﬂuorescence lifetime imaging microscopy FLIM , which measures the rate of decay of ﬂuorophore emission after a pulsed excitation, has become a new imaging modality,1 exploiting the sensitivity of a dye’s lifetime to chemical and physical environment, including the proximity of secondary dyes through ﬂuorescence resonance energy transfer.2 The most common sensors in FLIM are the photomultiplier tube or discrete single-photon avalanche diodes SPADs . These devices are used in a time-correlated single-photon counting TCSPC mode in which arrival time histograms are recorded through time-to-digital conversion of photonactivated pulses from the detectors. Recently, there has been work to integrate SPADs into a complementary metal-oxide semiconductor CMOS processing to create arrays of detectors that would allow for higher frame rates with wide-ﬁeld imaging.3–7 SPAD detection limits are determined by noise in the form of the device’s dark count rate DCR . DCR is dominated by avalanche events that are triggered by the thermal generation of carriers from recombination-generation RG centers within a diffusion length of the multiplication region of the SPAD. SPADs fabricated in high-voltage processes with local-oxidation-of-silicon-based LOCOS-based isolation have achieved DCRs as low as a few hundred hertz.4,8 At technology nodes below 0.35 m, the shallow trench isolation STI that is used to separate devices creates a relatively defect-rich interface and a signiﬁcant source of RG traps. SPAD designs in which the STI impinges the detector junction have high DCRs.9,10 This can be mitigated somewhat by hydrogen passivation, as is done to reduce dark current in imager processes.11,12 In our design, we instead isolate the STI from the junction while maintaining the desired structure for a SPAD. We accomplish this without any process modiﬁcations, carefully repurposing design layers of an established process. The pria

mary design masks used to create our device are drawn in Fig. 1 a . Our designed SPAD is illustrated in Fig. 1 b along with a process simulation using Synopsys’ Sentaurus in Fig. 1 c . The active layer RX limits the presence of STI around the multiplication region. Because typical ﬁeld-effect transistor FET devices deﬁne the active area to be a source, drain, or gate, it is necessary to use the BN and BP layers to control the n+ and p+ implants. BN deﬁnes the p+ implant region and BP blocks the n+ implants. The PI layer, used to deﬁne a triple well for isolated p-type FETs, instead has been used here to generate a p-type guard ring that prevents edge breakdown. The fabricated device has an octagonal photosensitive area with a diagonal of 5 m. The measured reverse bias breakdown voltage Vbr is 12.13 V and the multiplication region has a simulated width of 115 nm at this bias. A micrograph of the fabricated device structure is shown in Fig. 2 a . For photon counting, the diode is operated in Geiger mode, biased beyond Vbr by an overvoltage, Vov, but drawing no current until a free carrier in the multiplication region

(a) BN PI BP NW RX (b) STI N P (c) STI N P P+ P+

Electronic mail: shepard@ee.columbia.edu.

FIG. 1. Color online a Illustration of the designed mask layers used to make our SPAD. b Illustration of the expected pn diode after fabrication. c Process simulation results showing the expected diode structure that was fabricated. The multiplication region is the top P+ − N junction in the center of the device. © 2010 American Institute of Physics

0003-6951/2010/97 21 /211111/3/$30.00

97, 211111-1

Author complimentary copy. Redistribution subject to AIP license or copyright, see http://apl.aip.org/apl/copyright.jsp

FIG. this can be explained by the shallow junction depths 300 nm that result from using the p+ mask for a PFET source and drain implant. the DCR is 6 Hz. While this peak is at a shorter wavelength than SPADs reported in other technologies. We then compute three characteristic probabilities for the device: the probability of detecting an actual photon arrival. These probabilities can be determined analytically.156 V. and the probability that a photon triggered an event given that an event has occurred. and a 2 in. we show the PDP as a function of Vov which has the functional form A0 Vov − Vc p. a quenching resistance of 423 k is employed yielding maximum avalanche current levels of 2. 2 d . As creases.217 s−1. We assume that the afterpulsing probability is negligible and that the detector electronics are able to quench and reset the device in time for the next laser repetition and are not a limiting factor. see http://apl. The PDP peaks at 425 nm at just below 30% at a Vov of 1. we plot the photon detection probability PDP of this same device as a function of photon wavelength for different values of Vov. B0 = 0. Phys. The data points are our measured values and the X’s indicate the optimum bias point for our device. to yield FOM = 1 + exp − DCR · T + − exp − DCR · T + 1 − exp − · PDP exp − DCR · T . the optimal bias point shifts to favor a low dark count. increasing to only 231 Hz at 1. 3. This mode of operation requires a quenching circuit. CM110 monochromator. In this work. we present a plot of DCR as a function of Vov at room temperature.50 V. The PDP measurements were made using a xenon arc lamp. The DCR has the functional form A0eVov/V0 + B0. we consider the case of a FLIM application in which a pulsed laser excites an ensemble of ﬂuorophores with a monoexponential lifetime. which selects the device with the highest probability of properly recording photon events while avoiding noise events.org/apl/copyright. Color online FOM for our device as a function of Vov using the deﬁtted functions in Fig. Color online a Micrograph of fabricated SPAD structure.36 A and a deadtime of 15 s with Vov of 1. 2 b .13 we describe the ﬂuorescence emission from a single ﬂuorophore as a nonhomogeneous Poisson point process. To establish a metric by which SPAD devices can be compared and optimized at a given set of experimental conditions. 97. b A plot of the DCR as a function of Vov. A0 = 23. with p = 0. 2 c . With this quenching circuit. We deﬁne a ﬁgure of merit FOM 14 as the product of these three probabilities.50 V. Redistribution subject to AIP license or copyright. For a Vov of 0. for our device at room temperature.0 V. the probability of afterpulsing—a noise event caused by charges that do not clear the multiplication region before the SPAD is reset and retriggers the device—is negligible. a current ﬂows through the resistor causing a voltage drop. Appl. consistent with the assumptions above. 2 for different ﬂuorescence intensities. We considered the PDP as constant in time and the DCR as a Poisson process with a rate constant given by the experimentally measured DCR.3 When an avalanche is triggered. and V0 = 0.211111-2 Field et al.759.347 V.06 s−1. the simplest form of which is a resistor in series with the diode.jsp .aip. . In Fig. integrating sphere. triggers an avalanche. d Plot of PDP as a function of Vov. 2 1 − exp − 1 − exp − − exp − − exp − · PDP 1 − exp − · 1 − PDP · PDP 1 − exp − · 1 − PDP + 1 − exp − DCR · T Author complimentary copy. 2. c The PDP for the SPAD over the range of visible wavelengths. In Fig. 211111 2010 (a) (b) 10 μm (c) (d) FIG. the probability of recording a miss when no photons are incident on the device. and Vc = 0. FOM = P detecting a hit P detecting a miss P photon hit 1 photon arrives 0 photons arrive 1 event occurred . Following some simulationbased models.8 V−0. which leads to the voltage across the diode rising above Vbr. the associated RC time constant to return to a reverse bias of Vbr − Vov deﬁnes the deadtime for the SPAD.25 V. where A0 = 3. The events were recorded using the Agilent 53132A and the incident power was measured using a Thorlabs PM130D energy meter.759. halting the current. In Fig. Lett.

pp. C. 2005.5 V.00 10−6 m−2 s−1 with T = 20 ns and = 3 ns. R33-HG003089. CISS. and E.33 10−8. .211111-3 Field et al. IEEE Sens. 53. and I. 1084 2009 . 3 of 1. 74. Quantum Electron. For T / becomes = A · a · . Zappa.16. 094010 2008 . S. 16 S. we take the PDP and DCR for our device at the optimal Vov for a = 6. Finkelstein. P. E. We have highlighted the optimum bias point. J. limited by the period of laser repetition. J. 3. it must have a narrow impulse response. IEEE J. Andreou. Yoshizawa. and SPAD is 198 ps FWHM. Stoppa.13 m CMOS process without modiﬁcations. L. In order to utilize our device in an application that requires precise timing. L. Mosconi. 97. M. Charbon. Hayakawa. Aust. we use the PDP and DCR given at the bias point chosen by the authors in reporting their results. Charbon. J. Solid State Electrochem. 9. S. 2007. J. Instrum. L. 819 1978 . Kusumi. Pancheri and D. Chem. Hsu. Actuators. Dalla Betta. 17 L. S. 13. The appropriate reference is noted. Richardson. 211111 2010 FIG. Marwick and A. and R. 12 M. T is the time window over which counts are recorded. Lett. Gersbach. R. 1 In this expression. D. 863 2007 . M. Niclass. 24. Cova. nonetheless. laser. Ribordy. Tech. T. Repich.doi. F. this becomes FOM = PDP · · PDP .jsp . L. 10 H. In this work. 8 A. A. pp. This work was supported in part by the National Institutes of Health under Grant No. we plot the FOM as a function of Vov for our device for a = 3. and G. RMF was supported by the National Science Foundation Graduate Research Fellowship Program and National Defense Science and Engineering Graduate Fellowship. Stoppa. 2111 1979 . P. and S. 11 J. 32 10 . 6 D. Proc. Esener. Electron Devices Meet. M. 362–365. This device creates the opportunity to pair a low-noise. In Fig. Stoppa. A. highly sensitive SPAD with compact and fast timing circuits that will lead to more compact array-based imagers with short TCSPC image acquisition times. which shows Author complimentary copy. G. Top. we have provided a framework with which the device’s proper bias point can be established and SPADs from different fabrication processes can be compared. determined by the maximum FOM for each curve. E. Rev. F. In addition. IEEE Photon. L. Pancheri. 2 L. Zlatanovic. Grant. A. Gersbach. Dig. Labanca.1063/1. Instrum. Furrer. Charbon. then = A · a · · 1 − e−T/ . this ton ﬂux and A is the SPAD device area. forms a basis for comparison.aip. and N. where a is the maximum incident pho1. 4. 21. 13 M. Using the same representative T and values. 3 S. Sci.13 m technology. Appl. Technol. that devices in LOCOS technology nodes are capable of outperforming the STI based devices due to their lower DCRs. 78. 9 C. R. Ohnishi. Grant. Y. Selinger. D. M. Tsuji. Redistribution subject to AIP license or copyright.17 which may not be optimal for maximizing the FOM. Tisa. Gong. 383 2008 . which are representative of typical FLIM experiments. 7 M. Annu. SPIE 7355. Shepard. Zappa. Mazaleyrat. A 140. Besse. Stryer. see http://apl. 47. consistent with limiting pulse pile-up. J. Hardillier. Color online A comparison of the results of this work to other published results at both STI and LOCOS technology nodes based on our FOM. Pancheri. B. Schwartz. but that our device is one of the best performing designs in 0. 3. Richardson. Kagiwada. 2007. To compare our device with other published results. Rev. we present a sensitive low-noise SPAD designed in a 0. Phys. · PDP + DCR · T 3 If we write the incident photon rate as being determined by the monoexponential ﬂuorescence decay. Sel. A. and 6. 3263 2003 . S. Biochemistry 30. M.15 For other published results. In the limit that 1 and DCR· T 1. and L. we present the results of this analysis. Bioelectron. Rochas.org/10. and S. 4 E. 741–744. 4. R. Harris and B. K. Tosi. 103103 2007 . 14 See supplementary material at http://dx. Niclass. Gonzo. and S. IEEE ESSDERC. 15 C. Henderson. 803 2009 .3518473 for a detailed presentation of the FOM and its justiﬁcation. Biochem. C. A. Tisa. Biosens. A.33 10−7. Gisin. Phys. this value of a is the largest that can be used while assuring that no device in the comparison has a · PDP product that results in a photon being detected in more than 1% of measurement windows. Sens. We measure the impulse response by exciting the SPAD with a 408 nm laser having a 45 ps full width at half maximum FWHM pulse and histogramming the resulting detector response with a Tektronix TDS7404 oscilloscope. D 41. Grant. and is the integrated photon count over T as determined by the intensity of the ﬂuorescence being detected . In Fig.00 10−6 m−2 s−1 in Fig.8–12.5. 6517 1991 . 1020 2009 .Int. Murata. 73550O 2009 . and K.org/apl/copyright. Gani. Rev. 5 D. K. The impulse response of the entire measurement system including the oscilloscope. Sako. and E. but. A. 815. Henderson. 113 2007 . Henderson. L. Popovic. Lett. Sci.

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