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Advanced Semiconductor Devices Lecture 7

Lecture outline
Review Approximations for regions of operation Surface potential model in moderate inversion MOS Capacitor MOS Capacitor in moderate inversion Accurate capacitance model in all regions of operation Surface potential and inversion charge Three-terminal MOS structure Quasi-Fermi potential

V. Ariel 2013 Advanced Semiconductor Devices

Lecture 7

Voltage and charge balance


Total charge in semiconductor body

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Regions of operation
Flatband

Accumulation

Depletion and inversion

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Solution for gate voltage

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Accumulation
Condition for charge accumulation

Approximate solution for charge accumulation

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Depletion

Condition for depletion Approximation for gate voltage in depletion

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Inversion

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Gate voltage and surface potential in inversion

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Weak inversion

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Weak inversion

On the border of moderate inversion

In weak inversion

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Weak inversion

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Strong inversion

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Moderate inversion

Need a simple solution for semiconductor charges and potentials in moderate inversion !!!

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Moderate and strong inversion

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Moderate inversion

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Approximation for surface potential in moderate and strong inversion

Obtained explicit approximation for the surface potential as a function of gate voltage in moderate and strong inversion regions!!!

V. Ariel 2013 Advanced Semiconductor Devices

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Moderate and strong inversion

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MOS Capacitor

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MOS Capacitor

V. Ariel 2013 Advanced Semiconductor Devices

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MOS Capacitor

Need to differentiate a complex expression Instead, consider different regions of operation

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MOS Capacitor in accumulation

Semiconductor charge capacitance exponentially increasing for large negative surface potential Therefore, in accumulation

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MOS Capacitor in depletion

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MOS Capacitor in depletion

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MOS Capacitor in moderate and strong inversion

Use surface potential as a function of gate voltage in moderate and strong inversion regions

V. Ariel 2013 Advanced Semiconductor Devices

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MOS Capacitor in moderate and strong inversion


Match with moderate and strong inversion

Match with depletion capacitance

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MOS Capacitor in all regions of operation

At high frequency measurements observe depletion capacitance At low frequencies observe both depletion and inversion charges
V. Ariel 2013 Advanced Semiconductor Devices Lecture 7

MOS Capacitor approximation in depletion and inversion

There seems to be a problem on the border with weak inversion

V. Ariel 2013 Advanced Semiconductor Devices

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MOS Capacitor in weak inversion


Need to account for both depletion charge and inversion charge in weak inversion

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MOS Capacitor approximation in all regions of inversion


Obtained approximation that seems to work in all regions of depletion and inversion Problem: surface potential as explicit function of gate voltage

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Surface potential

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Inversion Charge

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Three-terminal MOS structure

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Three-terminal MOS structure energy bands

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Three-terminal MOS structure - charges

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