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Piezo • Nano • Positioning

Linear Actuators & Motors
Piezo Step Motors, Ultrasonic Motors, Servo Motors & Flexure Actuators

Piezo • Nano • Positioning

Piezoelectric & Motorized Drive Solutions
Actuators for Automation and High-Precision Motion Control
PI is the leading manufacturer of piezo ceramic actuators for nanopositioning and micropositioning applications in indusDifferent Types of Linear Actuators
Max. Travel Range PiezoWalk Actuators p. 1-3 ff
®

tries such as: Semiconductors; Biotechnology and Medicine; Lasers, Optics, Microscopy; Aerospace Engineering; Preci-

sion Machining; Astronomy and Microsystems Technology.

Max. Push/Pull Force 600 N

Max. Velocity 15 mm/s

Drive Type NEXLINE or NEXACT®
®

Special Features Non magnetic, UHV compatible drive principle, self-locking at rest

20 mm for integrated drive, basically unlimited

Ultrasonic Linear Actuators / Motors p. 1-23 ff

150 mm for integrated drive, basically unlimited

30 N

0.6 m/s

PILine® motors

Non magnetic, UHV compatible drive principle, self-locking at rest

Motorized Actuators p. 1-39 ff

50 mm

400 N

30 mm/s

Stepper or DC servo motors

Manual versions available, piezo-tip option for nanometer resolution

Preloaded / FlexureAmplified Actuators p. 1-61 ff

500 μm

30,000 N (push force), 3500 N (pull force)

<millisecond response time

PICMA® multilayer or PICA™ stack actuators

Non magnetic, UHV compatible drive principle

Unpacked Piezo Actuators p. 1-82 ff
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. Cat120E Inspirations2009 08/10.18

180 μm

100,000 N (push force only)

<millisecond response time

PICMA® multilayer or PICA™ stack actuators

Non magnetic, UHV compatible drive principle

All linear drives and motors are intended for integration into a customer’s system and feature no guidance. If off-axis motion cannot be tolerated external guidance is required.

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Piezo • Nano • Positioning

Linear Actuators & Motors

PiezoWalk® Motors / Actuators

closed-loop option. Travel [mm] 5 20 20 20 20 1.18 N-510 Tripod Z-tip/tilt nanopositioning platform N-515KNPH: non-magnetic 6-axis Hexapod N-510KHFS high-load Z/tip/tilt E-755 NEXLINE® piezo motor NEXLINE® stage controller E-861 NEXACT® piezo motor controller More ceramic actuators: See p. lower force). subnanometer resolution. 1-22 1-4 . 1-39 ff Notes on specifications see p. If offaxis motion cannot be tolerated external guidance is required. 10 mrad to 10 mm / 6° 0. Subject to change without notice. lower speed) and the ultra-compact NEXACT® motors (higher speed.Piezo • Nano • Positioning Selection Guide: PiezoWalk® Actuators Piezo Linear Motor Solutions: Actuators to 6-Axis Stages PiezoWalk® non-resonant piezo stepping motors can provide much higher resolution (to Picometers) and forces (to 600 N) than other types of piezo motors. Cat120E Inspirations2009 08/10. 1-23 ff & 1-61 ff Classical motorized linear actuators: See p. PI offers two basic types: the high-force NEXLINE® drives (higher forces. sub-nm resolution N-214. KG 2008. Models N-111 N-214. NEXACT® ultra-compact nanopositioning motor.4 plus 40 μm Push/Pull Force [N] 80 to 600 10 10 10 200 500 25 Page 1-8 1-10 1-12 1-14 1-16 1-17 1-17 1-17 Controllers for PiezoWalk® Actuators Models E-755 E-861 Description Piezo controller for NEXLINE® linear motors and positioners Networkable controller for NEXACT® linear motors and positioners Channels 1 1 Voltage [V] ±250 -10 to +45 Power [W] 15 40 Interface RS-232 USB. subnanometer resolution. subnanometer resolution. NEXACT® compact nanopositioning actuator NEXACT® miniature linear slide. N-215 NEXLINE® high-load motor N-661 NEXACT® miniature slide © Physik Instrumente (PI) GmbH & Co. N-215 N-310 N-380 N-661 N-510 N-515KNPH N-510KHFS Description NEXLINE® PiezoWalk® nanopositioning motor. High force NEXLINE® nanopositioning motor.3. All linear drives and motors are intended for integra- tion into a customer’s system and feature no guidance. subnanometer resolution Tripod Z-Tip/Tilt nanopositioning platform with NEXLINE® piezo motor actuators Nonmagnetic 6-axis piezo Hexapod precision positioning system with NEXLINE® piezo motor actuators Tripod Z-Tip/Tilt nanopositioning platform with additional fine positioning They generate motion through succession of coordinated clamp/unclamp of several actuators. RS-232 Page 1-18 1-20 N-310 NEXACT® compact nanopositioning motor. sub-nm resolution N-380 NEXACT® compact nanopositioning actuator N-111 NEXLINE® PiezoWalk® motor.

and a step mode with virtually unlimited travel range.. NEXACT® to 15 N. PiezoWalk® piezo stepping drives usually consist of several individual piezo actuators and generate motion through succession of coordinated clamp / unclamp and shearmotion cycles (steps). ࡯ Very high resolution. Nanopositioning / Piezoelectrics Nanometrology Micropositioning 50 picometer steps with a NEXLINE® drive. packaged actuators and integrated into complex positioning systems such as multi-axis translation stages or 6-DOF Hexapods. ࡯ NEXLINE® drives can survive shock loads of several g during transportation. the drive achieves continuous motion in the mm/second range. Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. limited typically only by the sensor. Due to the actuator design. but running at hundreds of hertz. resolution of 30 picometers has been demonstrated.Piezo • Nano • Positioning PiezoWalk® Precision Drives Millimeter Travel. They offer a basically unlimited travel range and still provide the characteristic features of a piezoelectric actuator: an open-loop resolution down to 30 picometers and a very high stiffness for dynamic operation and force generation. In fine-adjustment. Both provide specific advantages depending on the application. high dynamics analog mode within a single step. the maximum clamping force is applied at rest. The operation is possible in two different modes: a highresolution. ࡯ PiezoWalk® drives hold a stable position to nanometer level in power-off mode. measured with external ultrahigh-resolution capacitive sensor. ࡯ High force generation and stiffness. ࡯ Because a position can be held with zero operating voltage. leakage currents cannot affect the integrity of the piezo drive. They do not create magnetic fields nor are they influenced by them. analog mode. These properties are typi® cally better for piezo stepping actuators compared to inertia drives or ultrasonic motors. ࡯ The active parts in PiezoWalk® drives are made of vacuum-compatible ceramics. Nanometer Resolution. 6-axis parallel-kinematic nanopositioning system (Hexapod) with N-215 based NEXLINE® high-load actuators for use in strong magnetic fields NEXLINE® linear actuator principle 1-5 . The drives also work in UV-light environments. This performance provides a big safety margin for next generation nanotechnology applications Index Custom PiezoWalk® linear actuator Features and Advantages of PiezoWalk® Drives ࡯ PiezoWalk® drives are available for non-magnetic applications such as super-conductivity experiments. High Forces PiezoWalk® drives break away from the limitations of conventional Nanopositioning actuators. resolution and repeatability. Each cycle provides only a few microns of motion. PI offers two product lines based on different versions of the PiezoWalk® principle: NEXLINE® and NEXACT®. The PiezoWalk working principle provides high force capabilities. ࡯ PiezoWalk® drives are available in three levels of integration to provide flexibility for OEMs: OEM drives. NEXLINE® drives can hold and generate forces to 600 N.

They provide push/pull forces to 15 N with maximum velocities of more than 10 mm/s at low operating voltages of 40 V. The rigid design with resonant frequencies of hundreds of hertz allows the construction of very stiff structures and helps to suppress vibration. KG 2008. high-efficiency shear and clamping actuators and incorporate a preloading mechanism to provide pushing and holding forces up to 600 N with high lifetime. N-215 high-load NEXLINE® linear drive provides holding forces to 600 N and 20 mm travel Compact NEXACT® Drives for Moderate Forces NEXACT® drives use bending actuators which combine the feed forward and the clamping cycles. Cat120E Inspirations2009 08/10.Piezo • Nano • Positioning NEXLINE® High-Force Drives for Nanopositioning NEXLINE® systems are based on very rugged. closed-loop linear translation stages. Subject to change without notice.18 N-310 actuartor with E-861 servo-controller (integrated drive electronics) 1-6 . ranging from costeffective OEM drives for openloop operation in stepping mode to the sophisticated E-861 servo-controller for highresolution. The analog operating mode can be used for dithering and active vibration cancellation. © Physik Instrumente (PI) GmbH & Co. The compact and cost-effective NEXACT® drives are available with various drive electronics.

Nanopositioning / Piezoelectrics Nanometrology Micropositioning Index 1-7 . Life Science. Manipulators Aeronautics. Patch Clamp Intra-Cell Metrology Cell Penetration Microdosing Handling OCT. Cryogenic & Vacuum Environments Microwave Antenna Precision Alignment Precision Linear Actuators Beamline Experiments Angular Alignment Sample Positioning Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. Medical Technology Flow Cytometry Cell Sorting Electrophysiology.Piezo • Nano • Positioning Typical Applications for PiezoWalk® Motors / Actuators Semiconductor Technology Nanoalignment Systems with Long Travel Ranges Nanoimprint CD Testing Mask and Wafer Alignment Objective Precision Positioning Lithography Optics Testing Biotechnology.. Nanofabrication. NanoAutomation® Nanoimprint Nanoassembly Nanofabrication Nanojoining Nanomechanics Nanomaterials Testing Microgrippers. Medical Design. WLI Diagnostics Dermatology Ophthalmology Nanotechnology. Image Processing.

40 N. the step size. 6.3A NEXLINE® OEM Nanopositioning Drive.984 Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Semiconductor technology Semiconductor testing Wafer inspection Nano lithography Nano imprint Nanometrology Active vibration damping Motion in strong magnetic fields Z / tip / tilt platform with NEXLINE® drives and position sensors.30 NEXLINE® OEM Nanopositioning Drive. Both can be operated with the sophisticated E-755 NEXLINE® motion controller. as for active vibration control. Two versions are available. analog operation over a distance of less than one step enables high-dynamics positioning with resolutions far below one nanometer.18 Resolution ࡯ To 40 N Pull / Push Force and 60 N Holding Force ࡯ Self Locking at Rest. While the runner can be moved larger distances in step mode. By varying the combination of longitudinal and shear piezo elements.3 mm travel range. 10 mrad tilt range 1-8 .800.ws. 10148267 US Patent No. All data are superseded by any new release. dynamic operating range (analog travel). 1. the E-755 controller can provide picometer level resolution in the highly-dynamic short-range / dithering mode. Cat120E Inspirations2009 08/10. NEXLINE PiezoWalk Piezoceramic clamping and shear elements act directly on a moving runner that is coupled to the moved object. KG 2008. 40 N N-111. clamping force. The newest release for data sheets is available for download at www. Closed-Loop. which prohibit usage of magnetic drives Notes The products described in this document are in part protected by the following patents: German Patent No.pi. ࡯ Non-magnetic and vacuum compatible operating principle NEXLINE® Actuators are Distinguished by a Number of Unique Outstanding Features: down. no Heat Generation ࡯ Non-Magnetic and Vacuum-Compatible Working Principle The innovative N-111 NEXLINE® OEM drives are compact actuators for nanopositioning with travel ranges to 5 mm. high resolution. 5 nm Resolution Ask about custom designs ࡯ Self-locking when powered ࡯ Zero backlash.30 open-loop model. Subject to change without notice. 5 mm. The patented PiezoWalk® overcomes the limitations of conventional nanopositioning actuators and combines long travel ranges with high resolution and stiffness. The N-111.Piezo • Nano • Positioning N-111 NEXLINE® OEM Linear Motor/Actuator PiezoWalk® Drive for Long-Range Nanopositioning all be optimized for a particular application.3A is equipped with a 5 nm resolution linear encoder for long-range position control.025 nm Open-Loop Resolution and 5 nm Closed-Loop © Physik Instrumente (PI) GmbH & Co. no mechanical components like gears or leadscrews. ® ® Ordering Information N-111. Due to its low-noise. the N-111. 200 N load capacity. no wear or maintenance. 5 mm. NEXLINE® Working Principle for Application Flexibility NEXLINE® PiezoWalk® drives can be used wherever high loads must be positioned very precisely over long distances and then perhaps subjected to small-amplitude dynamic adjustment.3A closed-loop model and N-111. 24 bit D/A converters. no holding current N-111 compact high-load OEM nanopositioning actuator ࡯ 5 mm Travel ࡯ 0. 300 mm (12”) diameter. speed and stiffness can Advantages of PiezoWalk® Piezo Stepping Drives NEXLINE® and NEXACT® drives offer several advantages over traditional drive technologies: ࡯ Resolution in the picometer ࡯ Compact dimensions ࡯ High drive forces from ten newtons (NEXACT®) up to several hundred newtons (NEXLINE®) ࡯ High dynamic performance with sub-microsecond response range ࡯ Cleanroom compatibility ࡯ Vacuum compatibility ࡯ Operation under conditions. and generated forces to 40 N.

Min.025 nm 5 nm 100 Hz* 0. with no speed fluctuations while steps are being performed.025 nm – 100 Hz* 0.5 m Sub-D NEXLINE® connector. steel 135 g 1. steel 115 g 1.8 6 82 1 Guided / Preloaded Actuators Unpackaged Stack Actuators M3 8 g6 6. 1-18) ±5 % ±10 mm ±20 % Max.30 X 5 mm 10 nm to 5 μm – – 2. single-channel. single-channel E-755.1A1 (see p.5 μm 0. 1-18) N-111. Nanopositioning / Piezoelectrics Nanometrology 72 4 Micropositioning Index 38 46 N-111 dimensions in mm 1-9 .5x45¡ 8 61 2 3 Patches /Benders/Tubes /Shear. Max.2 mm/s 0. Typ. Tolerance *Depends on control electronics **Depends on control electronics.5 3.5 m Sub-D NEXLINE® connector. sensor connector E-755..Piezo • Nano • Positioning Linear Actuators & Motors 5.2 mm/s – 15 N/μm 40 N 60 N NEXLINE® linear drive ±250 V -40 to 80 °C Al (anodized).101 (see p.5 μm 0. The maximum speed in step mode is set so as to ensure the highest possible velocity constancy. 4 30 2.4 Technical Data Model Active axes Motion and positioning Travel range Step size (in step mode) Integrated sensor Sensor resolution Analog mode travel range Open-loop resolution Closed-loop resolution Step frequency Open-loop velocity** Closed-loop velocity** Mechanical properties Stiffness in motion direction Push / Pull force (active) Holding force (passive) Drive properties Drive type Operating voltage Miscellaneous Operating temperature range Material Mass Cable length Connector Recommended controller / driver N-111.3A X 5 mm 10 nm to 5 μm Linear encoder 5 nm 2.4 3.1 mm/s 15 N/μm 40 N 60 N NEXLINE® linear drive ±250 V -40 to 80 °C Al (anodized).5 PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors 64 DC-Servo & Stepper Actuators Piezo Actuators & Components 57.

NEXLINE® PiezoWalk® Piezoceramic clamping and shear elements act directly on a moving runner that is coupled to the moved object. By varying the combination of longitudinal and shear piezo elements. Due to its low-noise. The newest release for data sheets is available for download at www. Basically Unlimited Travel Range Step mode involves a sequence of coordinated shear and Ordering Information N-214. the controller can reduce the operating voltage on all the piezo elements to zero at any position and still maintain the full holding force. All data are superseded by any new release. Long lifetime is therefore a basic requirement for NEXLINE® actuators. high-dynamics short range (analog) mode and a stepping mode with virtually unlimited travel range. Both can be operated with the sophisticated E-755 NEXLINE® motion controller.984 The innovative N-214 / N-215 NEXLINE® OEM linear drives are ultra-precision nanopositioning actuators with travel ranges to 20 mm and push / pull forces to 400 N. Subject to change without notice. the N-214 closed-loop model and N-215 open-loop model. The N-214 is equipped with a 5 nm resolution linear encoder for longrange position control. clamping force. 400 N. KG 2008. as for active vibration control. The patented PiezoWalk® overcomes the limitations of conventional nanopositioning actuators and combines long travel ranges with high resolution and stiffness. NEXLINE® Working Principle for Application Flexibility NEXLINE® PiezoWalk® drives can be used wherever high loads must be positioned very precisely over long distances and then perhaps subjected to small-amplitude dynamic ad- Application example ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Semiconductor technology Semiconductor testing Wafer inspection Nano lithography Nano imprint Nanometrology Active vibration damping Motion in strong magnetic fields Train of 1 nm steps in open-loop analog mode with an N-215 NEXLINE® actuator 1-10 . The motion resolution here is limited only by the stability of the drive electronics. providing a resonant frequency in the direction of motion of several kilohertz. No Heat Generation Non-Magnetic and Vacuum-Compatible Working Principle clamping moves. Unlimited Lifetime The application area of NEXLINE® drives often lies in the difficult-to-access internals of machines.18 ࡯ ࡯ ࡯ ࡯ ࡯ 20 mm Travel Range 0.03 nm Resolution Open-Loop and 5 nm Closed-Loop To 400 N Push / Pull Force and 600 N Holding Force Self Locking when Power down. It allows velocities up to 1 mm/s. Cat120E Inspirations2009 08/10. speed and stiffness can all be optimized for a particular application. 10148267 US Patent No.00 NEXLINE® High-Load Actuator. Note The products described in this document are in part protected by the following patents: German Patent No. linear encoder. High-Resolution Dynamic Operation In analog mode the motion is effectuated exclusively by the very stiff shear elements. the E-755 controller can provide picometer level resolution in the highly-dynamic short-range / dithering mode. 20 mm.pi. 20 mm. Two versions are available. depending on the step size and / or analog range. 6.00 NEXLINE® High-Load Actuator.1 nm. patented NEXLINE® PiezoWalk® drive design combines long travel ranges with high mechanical stiffness and piezoclass resolution of better than 0. dynamic operating range (analog travel). 5 nm resolution N-215. or. 200 N. While the runner can be moved larger distances in step mode. The max.800. open-loop N-215 NEXLINE® high-load actuator © Physik Instrumente (PI) GmbH & Co. To promote long lifetime.ws. That is why piezo stepping drives have no intrinsic travel limitation and can be used flexibly. analog operation over a distance of less than one step enables high-dynamics positioning with resolutions far below one nanometer. The novel. the step size. in closed-loop operation. PiezoWalk® supports two different motion modes: a high-resolution. by the sensor. 24 bit D/A conver ters.Piezo • Nano • Positioning N-214. N-215 NEXLINE® Linear Motor/Actuator High-Force PiezoWalk® Drive for Long-Range Nanopositioning justment. where nanometerrealm adjustment and vibration cancellation are required. step frequency of 100 Hz and is determined by the controller.

The maximum speed in step mode is set so as to ensure the highest possible velocity constancy.101 (see p. Nanometrology Model Active Axes Motion and positioning Travel range Step size in stepping mode Integrated sensor Sensor resolution Travel range in analog mode Open-loop resolution Closed-loop resolution Step frequency Open-loop velocity** Closed-loop velocity** Mechanical properties Stiffness in motion direction Drive force (active) Holding force (passive) Drive properties Drive type Operating voltage Miscellaneous Operating temperature range Material Mass Cable length Connector N-214.Piezo • Nano • Positioning Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear.03 nm – 100 Hz* 0.3 mm/s – 150 N/μm 400 N 600 N NEXLINE® linear drive ±250 V -40 to 80 °C Al (anodized).00 X Micropositioning Index 20 mm 10 nm to 6 μm – – 3 μm 0.15 mm/s 75 N/μm 200 N 300 N NEXLINE® linear drive ±250 V -40 to 80 °C Al (anodized). 1-18) N-215.3 mm/s 0.00 X 20 mm 10 nm to 6 μm Linear encoder 5 nm 3 μm 0. NEXLINE® linear actuator principle Nanopositioning / Piezoelectrics Six-axis parallel-kinematics Hexapod with N-215-based NEXLINE® high-load actuators for use in strong magnetic fields.03 nm 5 nm 100 Hz* 0. 1-18) Recommended controller / driver *Depends on control electronics **Depends on control electronics.1A1 (see p. plus separate sensor connector E-755.0 m D-sub single-channel NEXLINE® connector. steel 1150 g 2. with no speed fluctuations while steps are being performed..0 m D-sub single-channel NEXLINE® connector E-755. 1-11 . steel 1050 g 4.

High-Speed PiezoWalk® Drive ࡯ Self-locking when powered down. Furthermore. with no heat dissipation or servo-dither. NEXACT® actuators provide piezo-class resolution (far below one nanometer) and millisecond responsiveness.01 NEXACT® OEM linear drive. The E-860 series NEXACT® controllers are a vailable in different open-and closed-loop versions. can be ordered. To move the runner over longer distances the stepping mode is used.and Maintenance-Free In contrast to ordinary DC or stepper motor drives. The special drive design reduces the operating voltage to 45 V and below.03 nm Resolution** To 10 N Push/Pull Force Low Operating Voltage Self Locking at Rest. resolution and velocity are determined by the piezo geometry and drive electronics and are scalable. the E-861 includes a complete NEXACT® servo-controller with low-noise.0 Ordering Information N-310. no holding current ࡯ Zero backlash. KG 2008. This entails nanometer position stability at rest. mechanical limitations such as backlash and wear are eliminated and the drive is maintenance-free. whereas for distances smaller than one step. The products described in this document are in part protected by the following patents: German Patent No. No Head Dissipation. Force capacity. The length of the runner determines the travel range. It also comes with ample software for easy integration and highly effective computer control. Wear. All data are superseded by any new release. Flexible Choice of the ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Runner Length Compact and Cost-Effective Design 0. no wear or maintenance. the PiezoWalk® drives effect linear motion directly. are ideal for high-precision positioning over long travel ranges. For example. For applications which do not require the highest resolution lower-priced drive electronics. The newest release for data sheets is available for download at www.Piezo • Nano • Positioning N-310 NEXACT® OEM Miniature Linear Motor/Actuator Compact. piezoceramic bending elements act on the runner. A variety of NEXACT® controllers facilitates the integration into microor nanopositioning applications. 10 N Ask about custom designs N-310 Actuator with E-861 Servo-Controller (integrated drive electronics) ࡯ 20 mm Standard Travel Range. leadscrews and nuts.18 N-310 NEXACT® PiezoWalk® linear drives feature travel ranges of 20 mm and push/pull force capacities to 10 N in a compact package of only 25 x 25 x 12 mm. P4408618. Therefore. NEXACT® drives.ws. Cat120E Inspirations2009 08/10. Controller and Drive Electronics Optimized for the Application NEXACT® actuators require special drive electronics to control the complex stepping sequences. no mechanical components like gears or leadscrews. In operation. Self-Locking PiezoWalk® Piezo Stepping Drive NEXLINE® and NEXACT® exhibit high stiffness and are selflocking even when powered down due to the clamping action of the piezo actuators in the mechanics. the linear (analog) mode enables high-dynamics positioning with resolutions far below one nanometer. 20 mm. Advantages of PiezoWalk® Piezo Stepping Drives NEXLINE® and NEXACT® drives offer several advantages over traditional drive technologies: ࡯ Resolution in the picometer range ࡯ Compact dimensions ࡯ High drive forces from ten newtons (NEXACT®) up to several hundred newtons (NEXLINE®) ࡯ High-dynamics performance with sub-microsecond response Semiconductor technology Wafer inspection Nano lithography Surface Measurement Technique Profilometry Microscopy Motion in strong magnetic fields 1-12 .pi. Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ The N-310 can be operated in open-loop and closed-loop mode (with the addition of an external position sensor). Subject to change without notice. Nanometer Stability Non-Magnetic and Vacuum-Compatible Working Principle © Physik Instrumente (PI) GmbH & Co. 24-bit drivers and a powerful DSP. ranging all the way to OEM boards. which is connected to the moving part of the application. without the need to transform rotation with mechanical elements such as gears. ࡯ Non-Magnetic and Vacuum Compatible Operating Principle Working Principle for Application Flexibility NEXACT® PiezoWalk® technology overcomes the limitations of conventional nanopositioning drives and combines virtually unlimited travel ranges with high stiffness in a very small package. With their high resolution.

dimensions in mm 54. typ.5 60 25 18. Tolerance *Depending on the control electronics.Piezo • Nano • Positioning Linear Actuators & Motors 3 6. max. non-magnetic 50 g 1. speed Mechanical properties Push/Pull force (active) Drive properties Drive type Operating voltage Miscellaneous Operating temperature range Body material Mass Cable length Connector Recommended controller/driver N-310.71 3 Technical Data Model Active axes Motion and positioning Travel range Step size (in step mode) Travel range in analog operation Open-loop resolution Step frequency Max. **Depending on the drive electronics. 21 6 8.01 Actuator.01 X 20 mm 5 nm to 5 μm 7 μm 0.1M 8 PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. single channel E-860-series (see p.0 4 2. max. 1-20) ±5 % ±10 mm max.5 m HD Sub-D connector 15 pin.. max.5 52.7 5 52 Nanopositioning / Piezoelectrics Translation stage with N-310 NEXACT® drive.03 nm** 1. The positioner offers 20 mm travel range with an encoder resolution of 25 nm N-310. 5 nm with E-861. 5.5 61 Nanometrology Micropositioning Index 1-13 .5 kHz* 10 mm/s* 10 N NEXACT® linear drive -10 V to +45 V 0 to 50 °C Stainless steel.

This autolocking feature also completely eliminates servoOrdering Information N-380 Open-Loop NEXACT® Linear Actuator. The PiezoWalk® drive principle allows long travel ranges and fast oscillations of 7 μm amplitude with frequencies up to several 100 Hz.18 jitter as it occurs with other closed-loop motors. no Closed-Loop Jitter Vacuum-Compatible and Non-Magnetic Versions 10 mm/s and forces up to 10 N enable high-dynamics and throughput for automation tasks. both very compact. Piezo Stepper High-Resolution PiezoWalk® Linear Actuator with Optional Position Sensor sion applications where the absolute position is not important or is controlled by an external loop (video.g. laser. in cell penetration applications.g. nanometer stability. The newest release for data sheets is available for download at www. measuring only 122 mm in length: The N-381 model is equipped with a highresolution position sensor. such as high resolution.Piezo • Nano • Positioning N-380. 20 nm Encoder Resolution Available on request Ask about custom designs! N-381 piezo stepper linear actuator for sample positioning and manipulation provides long travel. for biotechnology and nanotechnology applications. for Cell Penetration ࡯ Two Operating Modes: Continuous Stepping Mode and ࡯ ࡯ ࡯ ࡯ Continuously Variable. Manipulator. biohandling Micromanipulation Life science Photonics Laser tuning Motion in strong magnetic fields N-380/N-381 dimensions in mm 1-14 . Rapid accelerations. Piezo Stepping Drive—the Multi-Functional Piezo Linear Motor A great advantage characteristic of the NEXACT® piezo stepping drive is its dual-mode operating principle combining the best features of other piezo motor designs. allowing sub-micrometer re peatability in closed-loop operation.g. Subject to change without notice. High-Dynamics Analog Mode for 30 pm Resolution** Up to 10 N Force Generation Self Locking at Rest. Since motion is not based on dynamic friction as with piezo inertial drives (stick-slip-motors) but solely caused by the nanometer precise motion of clamped piezo actuators. quadcell. no Heat Generation Smooth Motion. e. high force and high speed into one compact unit. etc.pi.ws. Zero-Wear Piezo Stepping Drive. excellent velocity control is achieved. or smooth motion for dynamic laser tuning or even for active damping of oscillations. Ideal for Micro. N-381 NEXACT® Linear Actuator. Cat120E Inspirations2009 08/10. there is no wear to limit the lifetime. 30 mm. The N-380 open-loop version is intended for high preci- The compact N-380/N-381 linear actuators are ideal drives and micro manipulators e. e. 20 nm Resolution ࡯ Very High Acceleration. high speed and very high resolution ࡯ Travel Range 30 mm ࡯ Novel. velocities of Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Drive unit for scanning stage Cell manipulation. KG 2008. When operated in closed-loop. Two models are available.). At the target position the drive requires no current and generates no heat while providing long-term. This “analog mode” can be used to provide rapid acceleration. 30 mm N-381 Closed-Loop NEXACT® Linear Actuator.and Nano-Manipulation ࡯ Integrated Linear Encoder Option for Highest Accuracy with © Physik Instrumente (PI) GmbH & Co. All data are superseded by any new release.

P4408618. The length of the runner determines the travel range and can be chosen as required.4 N/μm 10 N 15 N 10 N NEXACT® linear drive -10 V to +45 V 0 to 50 °C Stainless steel 250 g 1. one channel E-861. Furthermore. 1-20) N-381 Closed-Loop X 30 mm To 5 μm Incremental linear encoder 20 nm* 7 μm 0. one channel E-860 series (see p.5 m 15-pin sub-HDD connector. piezoceramic bending elements act on the runner. In operation.4 N/μm 10 N 15 N 10 N NEXACT® linear drive -10 V to +45 V 0 to 50 °C Stainless steel 255 g 1. whereas for distances smaller than one step.5 kHz 10 mm/s* 2.5 m 15-pin sub-HDD connector. Force capacity. The E-860 series NEXACT® controllers are available in different open-and closed-loop versions. the E-861 includes a complete NEXACT® servo-controller with low-noise drivers and a powerful DSP. Depending on drive electronics.1A1 (see p. resolution and Technical Data (Preliminary) Model Active axes Motion and positioning Travel range Step size (in step mode) Integrated sensor Sensor resolution Travel range in analog mode Open-loop resolution Closed-loop resolution Step frequency Max. **Depending on the drive electronics. The products described in this document are in part protected by the following patents: German Patent No.5 kHz 10 mm/s* 2.Piezo • Nano • Positioning Working Principle for Application Flexibility NEXACT® PiezoWalk® technology overcomes the limitations of conventional nanopositioning drives and combines virtually unlimited travel ranges with high stiffness in a very small package. ranging all the way to OEM boards. 1-15 .03 nm** – 1. NEXACT® actuators provide piezo-class resolution (far below one nanometer) and millisecond responsiveness. Controllers and Drivers Optimized for the Application NEXACT® actuators require special drive electronics to control the complex stepping sequences. holding force (passive) Lateral force Drive properties Drive type Operating voltage Miscellaneous Operating temperature range Material Mass Cable length Connector Recommended controller/driver velocity are determined by the piezo geometry and drive electronics and are scalable.03 nm** 20 nm* 1. It also comes with ample software for easy integration and highly effective computer control. push / pull force (active) Max. velocity Mechanical properties Stiffness in motion direction Max. the linear (analog) mode enables high-dynamics positioning with resolutions far below one nanometer. For applications which do not require the highest resolution lower-priced drive electronics. 1-20) *With E-861. The special drive design reduces the operating voltage to 45 V and below. can be ordered.0 Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. For example.. To move the runner over longer distances the stepping mode is used. Nanopositioning / Piezoelectrics Nanometrology Micropositioning Index N-380 Open-Loop X 30 mm To 5 μm – – 7 μm 0. which is connected to the moving part of the application.

Linear Encoder. **Depending on the drive electronics. along with very rapid response. high-performance piezo stepping linear motor can provide sub-nanometer resolution and high force. This dual-mode.0 N-661 X 20 mm To 5 μm Linear encoder 20 nm* 7 μm 0.4 N/μm 20 N 10 N 15 N 50 N NEXACT® linear drive -10 to +45 V 0 to 50 °C Aluminum 150 g 1. no Heat Generation.5 m 15-pin sub-HDD connector. The stage is equipped with a precision guiding system and an optical linear encoder to enable highly repeatable positioning.pi. no Servo Dither Compact Design: 70 x 50 x 20 mm Zero-Wear Piezo Stepping Drive. load capacity Max. fast oscillations with amplitudes up to 7 microns and resolutions down to 30 pm can be achieved. Subject to change without notice. 20 mm.ws. velocity Mechanical properties Stiffness in motion direction Max. Depending on drive electronics. 1-16 .5 kHz 10 mm/s* 2. Technical Data (Preliminary) Model Active axes Motion and positioning Travel range Step size in stepping mode (open-loop) Integrated sensor Sensor resolution Travel range in analog mode Open-loop resolution Closed-loop resolution Bidirectional repeatability Pitch Yaw Step frequency Max.03 nm** 20 nm* 40 nm 50 μrad 50 μrad 1. High-Dynamics Analog Mode for 30 pm Resolution** ࡯ Up to 10 N Force Generation The products described in this document are in part protected by the following patents: German Patent No. ࡯ ࡯ ࡯ ࡯ © Physik Instrumente (PI) GmbH & Co. or even for active vibration damping.Piezo • Nano • Positioning N-661 Miniature Linear Stage with NEXACT® Drive PiezoWalk® Drive Provides Nanometer Precision and Smooth Motion The compact N-661 nanopositioning stage is based on the NEXACT® PiezoWalk® drive. This mode is of great value in highthroughput applications as well as in dynamic laser tuning.18 Travel Range 20 mm Self Locking at Rest. Ideal for Micro. When run in its analog mode. cell penetration applications. push / pull force (active) Max. The newest release for data sheets is available for download at www. 20 nm Resolution Available on request Ask about custom designs Application Examples ࡯ ࡯ ࡯ ࡯ Life science Photonics Laser tuning Motion in strong magnetic fields The N-661 miniature linear stage integrates a PiezoWalk® NEXACT® linear motor combined with a high-resolution linear encoder. KG 2008.1A1 Controller for NEXACT® Linear Drives and Positioners (see p. It provides 20 mm travel and resolution down to the nanometer range. one channel E-861. Cat120E Inspirations2009 08/10. All data are superseded by any new release. P4408618. 1-20) *With E-861. holding force (passive) Lateral Force Drive properties Drive type Operating voltage Miscellaneous Operating temperature range Material Mass Cable length Connector Recommended controller/driver Dimensions of N-661 Ordering Information N-661 Miniature NEXACT® Translation Stage.and NanoManipulation ࡯ Integrated Linear Encoder Option for Highest Accuracy with 20 nm Resolution ࡯ Two Operating Modes: Continuous Stepping Mode and Continuously Variable.

The newest release for data sheets is available for download at www. with Capacitive Sensors ࡯ ࡯ ࡯ ࡯ ࡯ Self Locking at Rest. θZ: 6° Load capacity 50 kg Dimensions Outer Ø baseplate.2 mm/s Dimensions Ø 300 mm (12´´) clear aperture Ø 250 mm N-510K High-Stiffness NEXLINE® Z Stage High-Precision Positioning. Wafer Alignment ࡯ Self Locking at Rest. tip. No Heat Generation ࡯ Vacuum Compatible and Non-Magnetic Designs Feasible ࡯ Parallel Kinematics for Enhanced Dynamics and Better Multi-Axis Accuracy Index © Physik Instrumente (PI) GmbH & Co.Piezo • Nano • Positioning N-515K Non-Magnetic Piezo Hexapod 6-Axis Precision Positioning System with NEXLINE® Linear Drives ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Travel Ranges 10 mm Linear. tip. 6° Rotation Large Clear Aperture Ø 202 mm Non-Magnetic Nanometer Resolution Low-Profile: 140 mm Height Only Parallel Kinematics for Enhanced Dynamics and Better Multi-Axis Accuracy ࡯ Up to 500 N Force Generation ࡯ Self Locking at Rest.3 mm vertical range 10 mrad tilt angle Load capacity 200 N Linear velocity 0. tilt platform Travel 1. No Heat Generation Hybrid Drive: PiezoWalk® plus PICMA® Travel Range: 400 μm Coarse + 40 μm Fine 2 nm Closed-Loop Resolution Direct Metrology: One Single Control Loop with Capacitive Sensors ࡯ High Push and Holding Force to 25 N ࡯ Piezo Walking Drive w/o Wear and Tear & Outstanding Lifetime due to PICMA® Piezo Actuators The N-510KHFS hybrid-drive nanopositioner offers maximum accuracy for semiconductor inspection applications Model Vertical travel Velocity Bidirectional repeatability 50 nm (full travel) Load capacity 25 N Dimensions Ø 300 mm 68. All data are superseded by any new release. KG 2008. Z: 10 mm θX. Cat120E Inspirations2009 08/10.18 ࡯ NEXLINE® Piezo Walking Drive Free from Wear and Tear ࡯ Load Capacity 200 N ࡯ High Precision with Integrated 5 nm Incremental Sensors + Picometer Resolution Dithering Mode Model Z. tilt nanopositioning platform with 3 integrated drives (tripod design) N-510 NEXLINE® Z. θY.. Nanopositioning / Piezoelectrics Nanometrology N-510 High-Force NEXLINE Z/Tip/Tilt Platform ® Micropositioning Nanometer Precision for Semiconductor Industry.pi.ws. No Heat Generation 6-axis parallel kinematics (Hexapod) with integrated N-215 NEXLINE® high-load actuators.5 mm height N-510KHFS 400 μm coarse 1 mm/sec Hybrid40 μm fine Focus System 1-17 . Y. Subject to change without notice. suitable for applications in strong magnetic fields Model N-515KNPH NEXLINE® Piezo Hexapod Travel Range X. 380 mm Ø moved platform (top) 300 mm 140 mm height Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear.

the E-755 can work with linear encoders with sub-nanometer resolution 1-18 . atomic fusion and superconductivity research Steps of 5 nm performed by a system consisting of an N-214 NEXLINE® nanopositioner and an E-755. NEXLINE® Working Principle for Application Flexibility NEXLINE® PiezoWalk® drives are ideal wherever high loads must be positioned very precisely over long distances and then perhaps subjected to small-amplitude dynamic adjustment. In this case the closed-loop resolution is limited by the linear encoder in the N-214 (5 nm / increment). By varying the characteristics of the longitudinal and shear piezo elements. Coordinated action of shearing and clamping piezo elements is what allows NEXLINE® to Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ High-Resolution ServoControl E-755 controllers are based on powerful 32-bit DSPs and come in open. high dynamics direct piezo mode.101 Digital Controller for NEXLINE® Nanopositioning Linear Drives E-755 digital NEXLINE® controller with N-214 nanopositioner. high-dynamics positioning over distances of less than one step is possible with resolutions far below one nanometer in analog mode. as in particle physics. A power-down routine in the E-755 firmware saves the current position.pi. clamping force. 20 mm travel range. and a long-range stepping mode with theoretically unlimited travel range. measured by a high-resolution interferometer. NEXLINE® nanoposition- © Physik Instrumente (PI) GmbH & Co. The patented PiezoWalk® thus overcomes the limitations of conventional nanopositioning actuators and combines long travel ranges with high resolution and stiffness. ࡯ Special Control Algorithms for NEXLINE® Nanopositioning ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Linear-Motor Actuators 32-Bit Digital Filters 24-Bit DAC Resolution Fully Programmable Low-Pass and Notch Filters Non-Volatile User Settings and Last-Position Data Daisy-Chain Networking for up to 16 Axes PI GCS (General Command Set) Compatible break through the barriers of conventional nanopositioning actuators. the E-755 can provide precision motion control over hundreds of millimeters with picometer-range resolution. KG 2008. Semiconductor technology Quality assurance testing in semiconductor industry Astronomical telescopes Truss structures Active vibration control Alignment in high magnetic fields.Piezo • Nano • Positioning E-755 Digital NEXLINE® Controller Controller for Picometer-Precision PiezoWalk® Linear Actuators / Positioners The sensors supported may provide better than nanometer resolution. can bemoved large distances in step mode. zero-voltage condition. Both versions feature four high-resolution (24-bit) linear amplifiers with the output range of ±250 V required to control a singleaxis NEXLINE® drive. Note the excellent system response to consecutive 5 nm step commands.18 E-755 digital single-axis nanopositioning controllers are designed to drive the patented NEXLINE® nanopositioning linear drives. dynamic operating range (analog travel). the step size. high-resolution incremental position sensors are supported by special excitation and read-out electronics. as for active vibration control. allowing a closed-loop system to be ready for operation without referencing next time it is powered up.ws. Cat120E Inspirations2009 08/10. The newest release for data sheets is available for download at www. For the closed-loop models. Incremental Sensors E-755. The E-755 offers two different control modes for the NEXLINE® walking drives: a highresolution. NEXLINE® PiezoWalk® piezoceramic clamping and shearing elements act directly on a moving runner that is coupled to the moved part in the application. no matter where it may be along its travel range. the E-755 controller uses a special procedure to bring the actuator to a fullholding-force. speed and stiffness can all be optimized for a particular application. which limit the lifetime of conventional piezo drives.and closedloop versions. Due to the resulting long lifetime. While the runner Ordering Information E-755.1A1 controller. Subject to change without notice. with basically unlimited resolution (analog mode). All data are superseded by any new release. Extreme Actuator Lifetime To eliminate long-term offset voltages. Combining advanced control technology and sensor signal processing with special drive algorithms.1A1 Digital Controller for NEXLINE® Nanopositioning Linear Drives.

984 Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Six-axis nonmagnetic Hexapod with N-215-based NEXLINE® high-load actuators for use in high magnetic fields.2 ms P-I.5 W 3 W. limited by temperature sensor 44 mA 25 mA. 10148267 US Patent No.3 kg 24 V (power supply included) 48 W. Index Axes Processor Sensor Sensor channels Servo update time Sensor sampling time Dynamic cycle time Servo characteristics Sensor type A mplif ier Amplifier channels Output voltage Peak output power per channel Average output power per channel Peak current Average current per channel Current limitation Resolution DAC Int erf ac es and operation Communication interfaces Piezo connector Sensor connector Controller network Command set User software Software drivers Supported functionality Display Linearization Miscellaneous Operating temperature range Overtemp protection Dimensions Mass Operating voltage Power consumption 1-19 .1A1 Digital controller for NEXLINE® nanopositioning linear drives with incremental encoder 1 DSP 32-bit floating point. 50 MHz – – – 0.3 kg 24 V (power supply included) 48 W. ultra-high-resolution. 2 A max. 50 MHz 1 0. where nanometer-precise alignment and vibration cancellation are required. limited by temperature sensor Short-circuit-proof 24 bit RS-232 Sub-D Special 15-pin sub-D connector Daisy-chain. achieved by digital polynomial linearization.Piezo • Nano • Positioning ing actuators are ideal for installation in inaccessible locations deep inside complex equipment.101 Digital controller for NEXLINE® nanopositioning linear drives 1 DSP 32-bit floating point.1 ms 0.1 ms – – 4 -250 to +250 V 5. Nanopositioning / Piezoelectrics Nanometrology Steps of 50 picometers with a NEXLINE® drive in open-loop mode measured with external.. PITerminal LabVIEW drivers. limited by temperature sensor 44 mA 25 mA. The linearization can improve linearity to 0. capacitive sensor Micropositioning Technical Data Model Funktion E-755. The system is driven by six E-755 controllers and additional hardware/firmware to automatically perform the necessary parallelkinematics coordinate transformation Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear.001 % over the full travel range. E-755. data recorder. data recorder Status LEDs 4th order polynomial 5 to 50 °C Deactivation at 70 °C 264 x 260 x 47 mm 2.5 W 3 W.800.2 ms 0. NanoCapture™ . DLLs NEXLINE® Control algorithms (closed-loop). position storage Status LEDs 4th order polynomial 5 to 50 °C Deactivation at 70 °C 264 x 260 x 47 mm 2. 2 A max. Linearization E-755-controlled nanopositioning systems provide outstanding linearity. up to 16 units GCS PIMikroMove™. up to 16 units GCS PIMikroMove™. DLLs NEXLINE® Control algorithms (open-loop). NanoCapture™ . 6. notch filter Incremental sensor 4 -250 to +250 V 5. PITerminal LabVIEW drivers. The products described in this datasheet are in part protected by the following patents: German Patent No. limited by temperature sensor Short-circuit-proof 24 bit RS-232 Sub-D Special – Daisy-chain.

can be extended at any time and are compatible with other PI controllers (e. Multi-Axis Operation Up to 16 E-861 controllers can be networked and controlled over a single PC interface. The newest release for data sheets is available for download at www. In perfect harmony with the mechanics. The NEXACT® drive design minimizes piezo operating voltages to 45 V and below. suitable for installation in stage with linear encoder ࡯ For NEXACT® Drives and Positioning Systems ࡯ Complete System with Controller. Interfacing to custom software is facilitated with included LabView drivers and DLLs. or Closed-Loop with Linear Encoder High Performance at Low Cost Daisy-Chain Networking for Multi-Axis Operation Non-Volatile Macro Storage for Stand-Alone Functionality with Autostart Macro ࡯ I/O for Automation. Upon powerup. and for moves shorter than typically 7 μm. Such daisy chain networks are flexible.18 Integrated Power Amplifiers and Software Open-Loop Operation. Cat120E Inspirations2009 08/10.Piezo • Nano • Positioning E-861 PiezoWalk® NEXACT® Controller/Driver Networkable Controller for NEXACT® Linear Drives and Positioners Ordering Information E-861. With the PI General Command Set (GCS). © Physik Instrumente (PI) GmbH & Co. so controlling a system with a variety of different controllers is possible without difficulty. For easy synchronization of motion with internal or external trigger signals. DC servo-motor and stepper motor controllers).1A1 NEXACT® Controller. the stepping mode.1A1 NEXACT® Controller with open-loop N-310. System setup and configuration is done with the included PIMikroMove™ user-interface software. All data are superseded by any new release. compact E-861 controller is designed to operate NEXACT® linear drives and closed-loop positioning systems using them. simply and precisely.ws. system programming is the same with all PI controllers. . the analog mode. the E-861 supports both motion modes of the PiezoWalk® stepping drive: for longer moves. Subject to change without notice. which provides high-dynamics positioning with resolutions of less than 1 nm. PiezoWalk® System: E-861. macros can be stored in non-volatile memory.pi. KG 2008. four input and four output lines are provided. Comprehensive Software All parameters can be set and checked by software. Linear Encoder Easy System Setup.01 NEXACT® linear drive. 1 Channel.g. Joystick for Manual Operation ࡯ Parameter Changes On-the-Fly ࡯ ࡯ ࡯ ࡯ The new. Flexible Automation E-861 controllers offer a number of features to support automation and handling. For example. the macro with its internal command sequence is executed automatically. 1-20 A programmable autostart macro allows stand-alone operation without external communication.

internal safety circuitry: watchdog timer Joystick. Y-cable for 2D motion. 2 Vpp amplitude and 2. data recorder for categories like current position or velocity.5 A 0 to +50 °C 1.0. 40 W -10 to +45 V max.01 NEXACT® linear drive 1 Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators P-I-D servo control.27 V offset of the encoder signal Servo off. 2 A USB 1. pushbutton box 24 V included: external power supply.Piezo • Nano • Positioning Technical Data Model Function Drive type Channels Motion and control Servo characteristics Trajectory profile modes Encoder input E-861. Stall detection Input limit switch Input reference switch Electrical properties Output power Output voltage Current consumption Interfaces and operation Communication interfaces Motor connector Sensor connector Controller network I/O ports Command set User software Software drivers Supported functionality Manual control (optional) Miscellaneous Operating voltage Operating temperature range Mass Dimensions Nanopositioning / Piezoelectrics Nanometrology Micropositioning 1-21 . 4 digital out (TTL) PI General Command Set (GCS) PIMikroMove™.1 kg 206 x 130 x 66 mm (with mounting rails) Index Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. interpolation circuit preset for differential transmission. parameter change on-the-fly Trapezoidal Analog encoder input sine-cosine.. PI Terminal GCS-DLL. programmable) 1 x TTL max. 2. triggered by programmable position error 2 x TTL (pull-up/pull-down. LabVIEW drivers Start-up macro. RS-232 (9-pin (m) D-Sub) D-Sub 15-pin (f) High Density D-Sub 15-pin (m) High Density Up to 16 units on single interface 4 analog/digital in. 24 V.1A1 Controller for NEXACT® drives / systems N-310.

It is recommended to operate PiezoWalk® drives with PI controllers only. KG 2008. Resolution of PiezoWalk® drives is basically infinitesimal because it is not limited by stiction and friction.18 Drive properties Operating voltage Max. The analog travel mode allows for sub-nanometer motion resolution. © Physik Instrumente (PI) GmbH & Co. 1-22 . Mechanical properties Stiffness in motion direction The stiffness in motion direction has a typical tolerance of ±20 % Push/pull force (active) Active force limit in operating direction. The main parameters which influence the velocity are the step frequency and the step size. velocity The maximum velocity depends on the used controller. Closed-loop resolution Requires position feedback. 1 sigma). For linear encoders. the step size can be defined within the given range. 1 sigma). no damage to the drive. Instead of resolution. The maximum force depends on the velocity. Cat120E Inspirations2009 08/10. Step frequency Maximum operating frequency of the drive in step mode. Open-loop resolution Resolution of PiezoWalk® drives is basically infinitesimal because it is not limited by stiction and friction. Instead of resolution. If present. Holding force (passive) A main feature of piezomotor linear drives is the self-locking capability at rest without current consumption and heat generation. the distance between two limit switches defines the travel range. voltage range for the analog mode travel range. Step size (in step mode) In step mode. the noise equivalent motion in analog mode is specified. Subject to change without notice. resolution of the of the position feedback sensor system. Values are typical results (RMS. it is strongly recommended to use PI drive and control electronics only. All technical data specified in the data sheet refer to room temperature (22 °C ±3 °C) Mass Typical tolerance: ±5 % Cable length Typical tolerance: ±10 mm Recommended controller / driver To reach the specifications and to avoid damage. the noise equivalent motion in closed-loop analog mode is specified. Values are typical results (RMS. Bigger steps allow higher velocity while smaller steps are for fine adjustment tasks.Piezo • Nano • Positioning Notes on Specifications for PiezoWalk® Drives Motion and Positioning Travel Range The maximum allowed travel is limited by the length of the output shaft in a PiezoWalk® drive. Miscellaneous Operating temperature range Safe operation. The voltage is supplied by the PI drive electronics. the closedloop resolution describes the Max. Analog mode travel range The analog mode travel range describes approximately half of the maximum stepsize. The drive electronics supplies the operating voltage and supports the motion modes of a PiezoWalk® drive. The step frequency depends on the controller.

Piezo • Nano • Positioning Linear Actuators & Motors PILine® Ultrasonic Motors .

piezo linear motor M-663 Small. high speed piezo linear motor M-682KNMS Non-magnetic translation stage M-686 Linear motor-driven XY stage More Piezo Ceramic Linear Motors & Actuators: See PiezoWalk® Actuators. p. patented drive principle and provide extremely high speeds and accelerations in a very comModels P-661. p. Cat120E Inspirations2009 08/10. P-664 M-674 P-653 P-653K M-674KCPP M-664KCEP Description Compact PILine® piezo linear drives for OEMs RodDrive ultrasonic piezo linear motor pusher for OEMs PILine® miniature linear motor / slide: 8 mm length. fast. C-185 PILine® driver electronics C-867 High-speed. p. Push Force [N] 2. RS-232 Page 1-36 4-116 P-653 Miniature linear motor / M-674 RodDrive piezo linear slide motor pusher for OEMs P-661. fast M-682 Low-profile. linear motor & linear encoder M-664 Linear motor & linear encoder. 1-3 ff More Linear Actuators: See Classical Linear Actuators. for bio automation M-664KCEP Stackable vertical drive © Physik Instrumente (PI) GmbH & Co. Subject to change without notice. 4-19 ff M-661. All linear drives and motors are intended for integration into a customer’s system and feature no guidance. Actuators and Suitable Controllers PILine® ultrasonic ceramic motors are based on a novel. inherently non-magnetic and vacuum compatible. 1-38 1-24 .15 7 5 Travel [mm] Unlimited to 100 2 50 50 50 Page 1-28 1-30 1-32 1-34 1-35 1-35 Drivers / Controllers for PILine® Ultrasonic Piezo Linear Motors Models C-184. P-664 OEM piezo motors P-653K Miniature rotary and linear motors M-674KCPP High precision. PCB-mounted Miniature rotary and linear motors High Precision.15 0. closed-loop controller/driver for closed-loop PILine piezomotors ® Channels 1 1 Interfaces analog USB. If off-axis motion cannot be tolerated external guidance is required.18 C-184. for bio automation Stackable vertical drive pact package.Piezo • Nano • Positioning Selection Guide: PILine® Ultrasonic Motors High Speed Ceramic Linear Motors. closed-loop controller/driver For Translation Stages Driven by integrated PIline® Linear Motors. KG 2008. 5 7 0. C-185 C-867 Description Drivers for PILine® ultrasonic piezo linear motors High-speed. They are self-locking at rest. M-662 Very small & fast. 1-39 ff Notes on Specifications see p. see Section “Micropositioning / Linear Stages”.

With each oscillatory cycle. high-speed micro-positioning stages smaller than a matchbox ® Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. At the heart of the system is a monolithic piezoceramic plate. The drive electronics and controller can be chosen accordingly. etc. The piezomotor is integrated completely in a high-quality mechanical setup including the servo-loop with directmetrology linear encoders. patented ultrasonic drive developed by PI. PILine Levels of Integration ® PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators State-of-the-art PILine ultrasonic motors are based on a simple construction allowing for the design of low-cost drive units and extremely compact. the mechanics executes a step of a few nanometers. turntable. it provides micro-impulses that drive the moving part forward or backwards. Nanopositioning / Piezoelectrics PILine® ultrasonic drive products are offered in three different levels of integration. which is why their repeatability is limited to about 50 nm. 1-3 ff). Depending on the desired direction of motion.Piezo • Nano • Positioning High-Speed Precision Actuators PILine® Ultrasonic Piezomotors – Working Principle Linear Actuators & Motors PILine® linear piezomotors are based on a novel. RodDrive. Integration requires guiding and – if necessary – the servo-loop. An alumina friction tip (pusher) attached to the plate moves along an inclined linear path at the eigenmode frequency. The pusher is preloaded against the friction bar which is attached to the slider. Ultrasonic motors cannot provide the unlimited resolution of linear piezo actuators and flexure-guided piezo positioning stages. Operation requires preload of the motor against the friction bar. State-of-the-art ultrasonic motors can produce accelerations to 5 g and velocities to 500 mm/s. linear positioning stage 1-25 . the macroscopic result is smooth motion with a virtually unlimited travel range. Through its oscillations. Nanometrology Micropositioning ࡯ P-661 and P-664 OEM motors require the greatest amount of care at the customer’s site. Ultrasonic oscillations of a piezoceramic actuator are transferred to linear motion along a friction bar. segmented by two electrodes. if necessary. which is attached to the moving part of a mechanical setup. the left or right electrode of the piezoceramic plate is excited to produce high-frequency eigenmode oscillations at tens to hundreds of kilohertz. Index ࡯ M-674 RodDrives can replace classical drive elements like rotary motor / leadscrew assemblies. PILine® levels of integration: OEM motor. the servo-loop. Motor and friction bar – the length depends on the desired travel range – have to be integrated into a mechanical setup. guiding and. These motors transfer motion through friction. ࡯ Linear positioning stages represent the highest level of manufacturer integration. Much higher resolution and holding forces can be achieved with PiezoWalk® piezomotors / drives (see p. or magnetic linear drives integrated into a micropositioner or handling device..

The lack ࡯ Safe: The minimum inertia of the moving platform together with the “slip clutch” effect of the drive provide better protection of precision fixtures / devices than leadscrew-driven stages. They are also very stiff. Experience: Based on PI’s 4 decades of experience with piezo nanopositioning technology. Cat120E Inspirations2009 08/10. This gives us the flexibility to provide custom motors (size. Rotating components such as gears. are not part of the PILine® design. of a leadscrew means no lubricant flow or material relaxation to cause submicron creep. No comparable drive can offer the same combination of acceleration. shafts and moving cables that are prone to failure in conventional motion systems. Speed and Resolution: PILine® drives achieve velocities to 500 mm/s and accelerations to 5 g. ࡯ Negligible EMI: PILine® drives do not create magnetic fields nor are they influenced by them. 100 μm step. There is also no rotational inertia to limit acceleration and deceleration. This means users may not need interlocks.18 ࡯ Custom Solutions / Flexibility for OEMs: PILine® drives are available in open-loop and closed-loop translation stages and as OEM components. KG 2008. there is a much lower risk of pinching fingers or other injuries than with conventional drives. A stable position to within 0. Settling behavior of a PILine® M-663 linear stage.Piezo • Nano • Positioning Features and Advantages of PILine ® Ultrasonic Piezomotors ࡯ Compact Size: the directdrive principle allows the design of ultra-compact translation stages. The M-662. a prerequisite for their fast step-and-settle times – on the order of a few milliseconds – and provide resolution to 10 nm. © Physik Instrumente (PI) GmbH & Co. High Acceleration. speed and precision. Other benefits of the self-locking are the elimination of servo dither and steady-state heat dissipation. PILine® drives offer exceptional precision and reliability with an MTBF of >20. light curtains or other measures to keep them safe. Subject to change without notice. force. PI develops and manufactures all piezo ceramic components in-house. Despite the high speeds and accelerations.1 μm can be reached in only 10 ms ࡯ Self-Locking Feature: PILine® drives create a braking force when not energized without the position shift common with conventional mechanical brakes. Custom high-force ultrasonic piezo motors can provide forces to 50 N ࡯ Excellent Power-to-Weight Ratio: PILine® drives are optimized for high performance in a minimum package. provides 20 mm travel in a 28 x 28 x 8 mm package. Lifetime. for example. ࡯ Quality. Principle design of a PILine® ultrasonic piezomotor-driven translation stage 1-26 . a decisive advantage in many applications.000 hours. ࡯ Low Inertia. ࡯ Vacuum Compatibility: Vacuum compatible versions of PILine® drives are available. environmental conditions) for OEM and research applications.

Typical Applications for PILine® Ultrasonic Motors
Microscopy/Imaging Fast sample positioning XY-stages Long range scanning Biotechnology, Life Science Microdosing Dispensing Nano/microliter pumps Fast positioning Bio-handling Medical Design, Medical Technology Screening Fast positioning Cell penetration, microdosing Handling Non-magnetic actuators Nanotechnology, Nanofabrication, NanoAutomation® Precision positioning of components (linear and rotation) Precision actuation Microgrippers Manipulators Semiconductor Technology Long-range placement and positioning
Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components
Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear..

Nanopositioning / Piezoelectrics

Nanometrology

Micropositioning

Index

Variety of PILine® ultrasonic piezomotors, translation stages and motion controllers

1-27

Piezo • Nano • Positioning

P-661 · P-664 PILine® Piezo Linear Drive
High-Speed, Compact, Ultrasonic Piezo Drives for OEMs
the mechanics drives forward or backwards. With each oscillatory cycle, the mechanics executes a step of a few nanometers; the macroscopic result is smooth motion with a virtually unlimited travel range. High Speed and Acceleration PILine® piezomotor drives can provide accelerations of up to 5 g and speeds of up to 500 mm/s, together with high resolution and high holding force. Because the ceramic stator is pressed against the slider, holding forces are generated when the motor ist powered down. The result is very high position stability without the heat dissipation common in conventional linear motors. Accessories for Easy Integration PILine piezomotors require a drive electronics for exciting the ultrasonic oscillations. The drive electronics is available as OEM board, stand-alone device or integrated inside a controller and therefore not included in the delivery. PI offers friction bars with different lengths.
®

Ordering Information
P-661.P01 PILine® Miniature Linear Piezomotor, 2N P-664.P01 PILine® Miniature Linear Piezomotor, 4N Accessories: P-661.B01 Friction Bar for P-661 PILine® Miniature Linear Piezomotor, 15 mm P-661.B02 Friction Bar for P-661 PILine® Miniature Linear Piezomotor, 25 mm P-661.B05 Friction Bar for P-661 PILine® Miniature Linear Piezomotor, 55 mm P-664.B01 Friction Bar for P-664 PILine® Miniature Linear Piezomotor, 15 mm P-664.B02 Friction Bar for P-664 PILine® Miniature Linear Piezomotor, 25 mm P-664.B05 Friction Bar for P-664 PILine® Miniature Linear Piezomotor, 55 mm C-184.161 Analog OEM Driver Board for PILine® P-661 Motors C-185.161 Analog Stand-Alone Drive Electronics with Power Supply for PILine® P-661 Motors C-184.164 Analog OEM Driver Board for PILine® P-664 Motors C-185.164 Analog Stand-Alone Drive Electronics with Power Supply for PILine® P-664 Motors Controller for closed-loop operation are available as C-867 (see p. 4-116 ff )

PILine® P-661 and P-664 OEM piezo linear motors with C-184 drive electronics

࡯ Patented Principle Features Very Compact Dimensions and
High Force

© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18

࡯ Max. Velocity 500 mm/s ࡯ Acceleration to 5 g ࡯ Min. Incremental Motion to 0.05 μm ࡯ Self-Locking to 3 N ࡯ No Electromagnetic Fields ࡯ MTBF 20,000 h ࡯ Integrated Actuators & Positioning Systems Also Available

PILine® Linear Motors – Smaller, Faster, More Effective Despite their small size, PILine linear motors generate higher driving and holding forces than conventional ultrasonic piezomotors.
®

Application Examples
࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯

Biotechnology R&D Semiconductor testing Mass storage device testing Metrology Micromanipulation Microscopy Photonics packaging Quality assurance testing

PILine® motors have a new, patented, ultrasonic drive developed by PI. The core piece of the system is a piezoceramic plate, which is excited to produce high-frequency eigenmode oscillations. A friction tip attached to the plate moves along an inclined linear path at the eigenmode frequency. Through its contact with the friction bar, the moving part of

Long Lifetime PI has over 30 years experience with piezo technology and nanopositioning. PILine® drives offer high precision and reliability, with over 20,000 hours

Dimensions of the P-664 in mm

MTBF. This is because PILine® piezo linear motor drives have no mechanical components such as shafts and gears which can cause failures in conventional motors.

1-28

Piezo • Nano • Positioning

Note The products described in this document are in part protected by the following patents: US Pat. No. 6,765,335 German Patent No. 10154526

Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components
Guided / Preloaded Actuators
Dimensions of the P-661 in mm

Unpackaged Stack Actuators Patches /Benders/Tubes /Shear..

Nanopositioning / Piezoelectrics

Nanometrology

Micropositioning

Index

The powerful and compact M-674 RodDrives include 2 x P-664 motors. The C-185 bench-top drive electronics is shown in the background 0.3 μm steps performed by P-661 piezomotor integrated in an M-662 translation stage

Technical Data
Model Motion and positioning Travel range Minimum incremental motion, open-loop Max. velocity Mechanical properties Stiffness when powered down Holding force when powered down Push / pull force Preload on friction bar Drive properties Resonant frequency Motor voltage range Operating voltage drive electronics Electrical power drive electronics Miscellaneous Operating temperature range Body material Mass Cable length Connector Recommended controller/driver Dimensions MTBF -20 to +50 Al (black anodized) 0.01 1.6 Open leads C-184.161 OEM board C-185.161 in box 14 x 35 x 6 >20,000 -20 to +50 Al (black anodized) 0.02 1.6 Open leads C-184.164 OEM board C-185.164 in box (see p. 1-36) 22 x 42 x 7 mm >20,000 h kg m ±5 % ±10 mm °C 210 120 (peak-peak) 42 (RMS) 12 5 155 168 (peak-peak) 60 (RMS) 12 10 V W kHz V typ. 0.7 1.5 2 9 3 3 4 9 N/μm N N N ±10 % max. max. ±10 % No limit* 0.05** 500 No limit* 0.05** 500 mm μm mm/s2 typ. P-661.P01 P-664.P01 Units Tolerance

*The travel range of piezo linear motors is virtually unlimited and depends on the length of the friction bar, which is available separately. **The minimum incremental motion is a typical value that can be achieved in the open-loop mode of a piezomotor stage. To reach the specs it is important to follow the mounting guidelines of the OEM-motors.

1-29

The highly compact. 100 and 150 mm Ordering Information M-674. Customized adaptations in terms of operating and holding force are feasible by varying type and number of motors used. The result is very high position stability without the heat dissipation common with conventional linear motors. In this case. the C-185 (see p. Cat120E Inspirations2009 08/10. The newest release for data sheets is available for download at www. either the rod or the motor block is coupled to the moving platform. Closed-Loop Operation: Optimized for High Velocity and Rapid Step/Settling Together with a position sensor. Advantages of PILine® Micropositioning Systems The ultrasonic piezoceramic drives used in PILine® micropositioners have a number of advantages over classical drives: PILine® piezomotors require a drive electronics for exciting the ultrasonic oscillations. Variety of Drivers / Controllers M-674 PILine® RodDrives represent a level of integration between PILine® OEM piezo linear motors such as P-664 (see p. Gears or Other ࡯ Non-Magnetic and Vacuum Compatible Drive Principle Rotating Parts Constancy of closed-loop velocity at 200 mm/s of an integrated M-674 RodDrive 5g Down 1-30 .364 PILine® RodDrive. 1 Channel. 150 mm. up to ࡯ Speeds up to 500 mm/s ࡯ Small Form Factor ࡯ Self-Locking When Powered ࡯ No Shafts. there are no gears. RodDrives can also be operated with conventional servo-controllers. together with high resolution and holding force.D64 (see p. 7 N M-674.pi. shown with C-184 OEM and C-185 bench-top driver electronics.ws. provides 7 N pushing force and travel ranges of 50.164 Analog Stand-Alone Drive Electronics with Power Supply for PILine® P-664 Motors C-867. leadscrews or other mechanical components to contribute play or backlash. RodDrives can be operated in closed-loop with the C-867.18 ࡯ ࡯ ࡯ ࡯ ࡯ Systems Travel Ranges to 150 mm Push/Pull Forces to 7 N Min. RodDrives resist motion with an intrinsic holding force when at rest. 100 mm. or magnetic linear drives integrated into a micropositioner. Because the integrated ceramic motors are preloaded against the rod. This specialized servo-controller also integrats the motor drive electronics and enables highly constant speeds up to 350 mm/s with very short settling times (tens of milliseconds). The maximum travel is determined by the length of the rod and is basically unlimited. stand-alone device or integrated inside a closedloop motion controller and therefore not included in the delivery.164 PILine® RodDrive.05 μm Velocity to 450 mm/s Self-Locking at Rest RodDrives employ a patented ultrasonic drive developed by PI. Depending on the way of integration. Furthermore. Subject to change without notice. RodDrives may replace classical drive elements like rotary motor/leadscrew assemblies. 50 mm. 1-36) System integration for micropositioning products Automation Handling Micromanipulation Biotechnology Metrology ࡯ Higher Accelerations. KG 2008.D64 Piezomotor Controller with Drive Electronics. The drive electronics is available as OEM board.D64 Analog OEM Driver Board for PILine® RodDrive M-674 C-185.264 PILine® RodDrive. integrated P-664 piezomotors can provide velocities of 450 mm/s.Piezo • Nano • Positioning M-674 PILine® RodDrive Piezo Linear Drive Integrated Fast Ultrasonic Piezo Drives Working Principle The M-674 PILine® RodDrive. 4-116) piezo motor controller. 1-28) and guided micropositioning systems such as the M-682 (see p. 7 N M-674. Incremental Motion to 0. 7 N Accessories: C-184. All data are superseded by any new release. Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ They consist of a rod which is preloaded by piezo linear motors from two sides. for PILine® Systems with M-674 RodDrive ࡯ Drive-Component for Integration into Micropositioning © Physik Instrumente (PI) GmbH & Co. 4-32) series stages.

50 0.D64 OEM drive electronics board C-185.D64 OEM drive electronics board C-185.05* 450 10 150 0. **Stiffness at 25 °C.Piezo • Nano • Positioning (to be ordered separately) external drive electronics is required which accepts a ±10 V analog signal from the controller. No.264 M-674.164 M-674.05* 450 10 mm μm mm/s m/s2 x typ. M-674. To reach the specs it is important to follow the mounting guidelines of the OEM-drives. Note The products described in this document are in part protected by the following patents: US-Pat.05* 450 10 100 0.1 1.D64 Controller for closed-loop operation -20 to +50 PEEK-PTFE 0.5 LEMO connector C-184.5 LEMO connector C-184. elec.335 German Patent No. open-loop Max. power consumption drive electronics Miscellaneous Operating temperature range Body material Mass Cable length Connector Recommended controller/driver -20 to +50 PEEK-PTFE 0.D64 OEM drive electronics board C-185. 10154526 Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear.12 1. Nanopositioning / Piezoelectrics Nanometrology Micropositioning Index The M-674 integrated into a Micropositioning Stage Dimensions of the M-674 RodDrive in mm Technical Data Model Motion and positioning Travel range Minimum incremental motion. acceleration Mechanical properties Stiffness when powered down Holding force when powered down Push / pull force Drive properties Resonant frequency Integrated piezo motor Motor voltage range Operating voltage drive electronics Max. ***The operating voltage is supplied by the drive electronics.D64 Controller for closed-loop operation -20 to +50 PEEK-PTFE 0. velocity Max.14 1.D64 Controller for closed-loop operation kg m LEMO connector ±5 % ±10 mm °C 155 2 x PILine® P-664 (Dual Motor) 190 (peak-peak)*** 67 (RMS)*** 12 15 155 2 x PILine® P-664 (Dual Motor) 190 (peak-peak)*** 67 (RMS)*** 12 15 155 2 x PILine® P-664 (Dual Motor) 190 (peak-peak)*** 67 (RMS)*** 12 15 V V W kHz..5 LEMO connector C-184. typ. 6. 5** 7 7 5** 7 7 5** 7 7 N/μm N N ±10 % max.D64 driver ****C-867.D64 driver ****C-867. max.364 Units Tolerance *The minimum incremental motion is a typical value that can be achieved in the open-loop mode of a piezomotor stage.765.D64 driver ****C-867. ****MDR 14-connector for closed-loop systems separate required 1-31 .

2 mm Travel Range. PILine® piezo linear motors offer a number of advantages over classical drives: Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ High velocities ࡯ Compact design ࡯ High push/pull and holding forces relative to the drive size Integration of the P-653 in an application is simple because the moving slider and the piezo actuator are delivered assembled as a unit and already mounted on a PCB board. micro.15 N. mounted on PCB board P-653. During operation. integrated piezomotor can attain velocities of up to 200 mm/s together with high position resolution and—considering its length of only 8 mm—a high holding force. The result is very high position stability. The highly compact. patented. Consumer electronics Miniature mechatronics Micromanipulation Micropositioning Toys Included in the P-653.18 ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ True Linear Motor Slide / No Rotary Conversion Losses Cost-Effective OEM Drive for High Quantity-Applications Preassembled and Mounted on a PCB Board Very Compact: Piezomotor Drive is Only 8 mm Long Fast Response: Full Stroke in <50 ms Force Generation to 0.01 Miniatur PILine® OEM Drive. The newest release for data sheets is available for download at www. Cat120E Inspirations2009 08/10.01 OEM drive together with additional electronics featuring an USB interface 1-32 . There are no gears. 2 mm Travel Range. Subject to change without notice.or electro-mechanical elements fast and precisely. optics. KG 2008. All data are superseded by any new release. 0. nanometer level oscillations (~500 kHz) needed by the PILine® motors are created by driver electronics. the oscillating piezoceramic propels the slider over the length of the motor. which self-adjusts to the resonant frequency of the motor ceramic. Order Information P-653. Mechanical mounting is thus facilitated as well: All that remains is to affix the payload to the slider. These tiny linear positioners can be used to replace classical drive elements like miniaturized motor/spindle systems or other linear motors.ws.pi. without the heat dissipation common with conventional linear motors. ultrasonic piezomotor drive developed by PI.01D demo sample there is the P-653. Simple Control The high-frequency. which P-653 outclasses with its speed of up to 200 mm/s. Demo Sample Kit with USB Interface Ask about custom designs The P-653 miniature drive including the drive electronics measures only 11 mm featuring 2 mm travel range. 0. Because the ceramic stator is pressed against the slider. The motors are designed for moving small objects such as optical fibers. meaning that no individual tuning is necessary.15 N Self Locking at Rest Travel Range 2 mm. WO2006/027031A1 © Physik Instrumente (PI) GmbH & Co. Velocity up to 200 mm/s P-653 PILine® OEM piezomotor drives are ideal for OEM applications where space is limited and moved masses are small. leadscrews or other mechanical components to contribute play or backlash.15 N.01D Miniature PILine® OEM Drive.Piezo • Nano • Positioning P-653 PILine® Miniature Linear Motor / Slide OEM Drive for High Volume Applications Working Principle P-653 drives employ a new. 102004059429 International Patent No. piezomotor drives resist motion with an intrinsic holding force when the unit is at rest. The driver electronics can in turn be controlled by short voltage pulses. Side view of slider (bottom) Note The products described in this document are in part protected by the following patents: German Patent No. Drive electronics is included on the same board and requires a supply voltage of only 5 VDC.

01 All data refer to 100 % duty cycle.) Integrated piezo motor Operating voltage (drive electronics) Current consumption incl.000. Nanopositioning / Piezoelectrics Nanometrology Micropositioning Index P-653.000 cycles 515 kHz PILine® P-653 5 VDC 0. 1-33 .0 ms ON time Max. end view along axis of motion (from left) Technical Data Model Motion and positioning Travel range Step size at 0. @ 5 g: 80 to 140 mm/s. velocity** Mechanical properties Holding force when powered down Max.3 N 0. @ 10 g: 50 to 100 mm/s ** without load.01 dimensions in mm: top view. view from drive side.15 N 2 mm 5 to 15 μm 20 to 120 μm 100 to 200 mm/s 50 to 90 mm/s P-653.1 A 5 V TTL 0.25 ms ON time Step size at 1. * without load.Piezo • Nano • Positioning Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear.. push / pull force Drive properties Resonant frequency (typ. drive electronics Control voltage Miscellaneous Operating temperature range Mass Connectors Recommended driver Dimensions Lifetime -40 to 85 °C 1 g ±5 % Header pin sockets Piezomotor drive electronics included 15 x 11 x 8 mm incl. drive electronics >5. velocity* Typ.

The newest release for data sheets is available for download at www.3 A 5 V TTL 0.5 arcsec 200 to 230 rev/min 120 to 150 rev/min P-653KMRD X P-653KROT θZ Typ.25 ms ON time Step size at 1. without load Mechanical properties Holding force when powered down Max. min.ws. 5 mm high incl.5 arcsec 0.18 ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Cost-Effective OEM Drive for High Quantity-Applications Preassembled and Mounted on a PCB Board Miniature Piezo Motor Drive: 8 mm Length Only! Fast Response: Full Stroke in <50 ms for Single Actuators Force Generation to 0. at 10g: 50 to 100 mm/s 1-34 .pi. drive electronics 25 km -40 to +80 °C 4. clear aperture Ø 14 mm 1. Cat120E Inspirations2009 08/10. Velocity up to 200 mm/s and 230 rev/min.0 ms ON time Max. etc. drive electronics Control voltage Miscellaneous Operating temperature range Mass Connectors Recommended driver Dimensions -40 to +80 °C 2 g ±5% Miniature 4 pin connector Piezomotor drive electronics included 40 x 10 x 4 mm incl. endurance All data refer to 100% duty cycle. Torque to 2 mNm Self Locking at Rest Travel Range 50 mm (Runner).1 A 5 V TTL 515 kHz 3 x P-653 PILine® 5 VDC 0. *no load. All data are superseded by any new release. KG 2008. without load Typ.000. Subject to change without notice.3 N 0.15 N – – – 2 / 4 mNm 50 mm 5 to 15 μm 20 to 120 μm 100 to 200 mm/s* 50 to 90 mm/s >360 deg 0. Differing data at 5g: 80 to 140 mm/s. © Physik Instrumente (PI) GmbH & Co. With the P-653KROT three miniature motors move a ring. respectively The P-653 miniature drive including the drive electronics measures only 11 mm Technical Data Model Active axes Motion and positioning Travel range Step size at 0.15 N. for example for fast positioning of optical elements Rotating Filters.2 to 0. torque active / passive Drive properties Resonant frequency (typ.Piezo • Nano • Positioning P-653K PILine® Miniature Rotary and Linear Piezo Motor Actuators Compact PCB Mounted Motion Control Solutions for OEMs Application Examples ࡯ Consumer electronics ࡯ Miniature mechatronics ࡯ Micromanipulation ࡯ Micropositioning ࡯ Medical technology ࡯ Optomechanics: Two custom piezo motors based on the P-653 ultrasonic miniature motor show the versatility and adaptability of the basic concept: P-653KMRD on the right is based on the RodDrive principle and provides a virtually unlimited linear travel range.5 g ±5% Miniature 4 pin connector Piezomotor drive electronics included Ø 40 mm. drive electronics. velocity.6 to 3. velocity.000 cycles 515 kHz P-653 PILine® 5 VDC 0. push / pull force Max.) Integrated piezo motor Operating voltage driver electronics Current consumption incl.

1 μm Dimensions 120 x 40 x 9 mm Equipped with two ultrasonic piezo-motors. Compact. The newest release for data sheets is available for download at www. Cat120E Inspirations2009 08/10. KG 2008. closed-loop velocity 100 mm/s Resolution 0. The lowprofile design with only 9 mm width allows stacking for multi-channel dispensing in bioautomation tasks Model M-664KCEP Compact PILine® Positioner Travel 50 mm Push/pull force 5N Max. Subject to change without notice. Nanopositioning / Piezoelectrics Nanometrology M-664K Vertical Drive for Bio-Automation High-Speed.18 Stack of 8 M-664KCEP linear actuators. All data are superseded by any new release. Stackable PILine® Actuator ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ High Speed to 100 mm/sec Slim Design.1 μm Resolution Up to 6 N Force Generation Closed-Loop Velocity up to 100 mm/s Low Profile.pi. the slim M-674KCPP offers up to 7 N push and pull force.ws. High-Speed with Piezo Ceramic Motor ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Integrated Non-Magnetic PILine® RodDrive Travel Range 50 mm Integrated Linear Encoders with 0.5 μm Dimensions 120 x 40 x 9 mm M-682K Non-Magnetic Translation Stage Low-Profile. Small Footprint Model Custom non-magnetic M-682KNMS linear stage with integrated RodDrive linear motor M-682KNMS PILine® Positioner Travel 50 mm Load capacity 50 N Max. Matched with Standard Multiwell Plates Travel range 50 mm Cost-Effective Design Stackable Non-Magnetic and Vacuum-Compatible Working Principle Self Locking at Rest Micropositioning Index © Physik Instrumente (PI) GmbH & Co. Matched with Standard ࡯ ࡯ ࡯ ࡯ Multiwell Plates Stackable Integrated Linear Encoder for Highest Accuracy Self Locking at Rest Non-Magnetic and Vacuum-Compatible Working Principle Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Model M-674KCPP Compact PILine® Positioner Travel 50 mm Push/pull force 7N Velocity 100 mm/s Resolution 0. push/ pull force 6N Dimensions 110 x 110 x 20 mm 1-35 ..Piezo • Nano • Positioning M-674K High-Precision Z Actuator for Bio-Automation Ceramic PILine® Motor and Linear Encoder for High Speed & Precision ࡯ High Speed to 100 mm/sec ࡯ High Push/Pull Force to 7 N ࡯ Extremely Slim Design. The integrated ceramic piezomotor provides high speeds to 100 mm/sec. The 9 mm width is matched to standard multiwell plate sizes. Cost-Effective. shown with well plate. ideally suited to automation tasks in biotechnology Patches /Benders/Tubes /Shear.

Both the C-184 and C-185 are available in three versions.164 Analog Stand-Alone Drive Electronics with Power Supply for PILine® P-664 Motors C-184. With an external position sensor and a servo controller. No. 1-36 While the OEM boards are the most economic solution for large quantities.D64 Analog OEM Driver Board for PILine® RodDrive M-674 C-185.335 German Patent No.765. 10154526 The C-184 OEM-board and the C-185 stand-alone unit are single-channel drive electronics for PILine® ultrasonic piezomotors and PILine® stages. ࡯ ࡯ ࡯ ࡯ C-185. 6. Subject to change without notice. for example for system evaluation purposes.D64 Analog Stand-Alone Drive Electronics with Power Supply for PILine® RodDrive M-674 ࡯ Higher Accelerations.164 OEM driver board with PILine® P-664 OEM motor .Piezo • Nano • Positioning C-184 · C-185 PILine® Drive Electronics OEM Boards and Stand-Alone Units fot Ultrasonic Piezomotors sitioners have a number of advantages over classical drives: Ordering Information C-184.D64 single-channel bench-top driver electronics with PILine® M-674 RodDrive featuring travel ranges up to 150 mm and 7 N drive force at 450 mm/s ࡯ up to 5 g Speeds up to 500 mm/s Small Form Factor Self-Locking When Powered Down No Shafts. All data are superseded by any new release.pi. This includes making the drive electronics both independent of control signal type and available either as an OEM board or as a standalone unit in its own case. Analog Control Both drivers control the motor speed based on an analog signal from 0 to 10 V. 4-116) piezo servocontroller is recommended. the C-867 (see p. The newest release for data sheets is available for download at www. Cat120E Inspirations2009 08/10. for use with different motors and translation stages. For optimum closed-loop system performance.161 Analog OEM Driver Board for PILine® P-661 Motors C-185.18 The products described in this document are in part protected by the following patents: US Pat. Advantages of PILine® Micropositioning Systems The ultrasonic piezoceramic drives used in PILine® micropoC-184.161 Analog Stand-Alone Drive Electronics with Power Supply for PILine® P-661 Motors C-184. KG 2008. Gears or Other Rotating Parts Non-Magnetic and VacuumCompatible Drive Principle Note ࡯ For PILine Ultrasonic OEM Motors and Positioners ࡯ Accepts Analog Drive Signal from Standard Controller ࡯ Available as Cost-Effective OEM board and Plug-and-Play ® Desktop Unit © Physik Instrumente (PI) GmbH & Co. OEM and Integrated Electronics The philosophy behind the design of PILine® ultrasonic drives dictates that they be easily adaptable to customer requirements. closedloop system. the standalone units make it possible to plug a system with PILine® stages together and put it into operation quickly and easily.ws. it is possible to set up a very fast.164 Analog OEM Driver Board for PILine® P-664 Motors C-185. Piezomotor drive electronics convert analog input signals into the high-frequency drive signals necessary to excite the required oscillations in the piezomotor stator which cause the motion.

164: 10 W C-184. ±10 % Model dependent: C-184.D64: 190 VPP / 67 VRMS.161: P-661 Motors & Positioners C-184.D64: 15 W Model dependent: C-184.161.D64: M-674 RodDrive 1 Differential.161: 5 W C-185. -10 V up to +10 V. 8 0 Nanopositioning / Piezoelectrics Nanometrology Micropositioning Index 174 Dimensions of single-channel bench-top C-185 in mm Technical Data Model Function C-184 Analog drive electronics (OEM board) for PILine® C-184. 155 kHz C-185 Analog single-channel driver box for PILine® C-185.161: 5 W C-184.Piezo • Nano • Positioning Linear Actuators & Motors 104.164: 168 VPP / 60 VRMS.164: 10 W C-185. polarity controls direction 12 V. 155 kHz C-184.161: 120 VPP / 42 VRMS.D64: 15 W Model dependent: C-185.164: P-664 Motors & Positioners C-184. 14-pin Sub-D connector.164: P-664 Motors & Positioners C-185. 210 kHz C-185.D64: M-674 RodDrive 1 Differential.2 49.1 PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components 0 6 0 11 Guided / Preloaded Actuators 10 Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. 15-pin 1-37 .161: P-661 Motors & Positioners C-185.164: 168 VPP / 60 VRMS. polarity controls direction 12 VDC external power supply (included) Model dependent: C-185. 155 kHz C-185. C-184.D64: 190 VPP / 67 VRMS.164: 15 g C-184.161: 120 VPP / 42 VRMS. 210 kHz C-184.D64: 24 g 65 x 38 mm 174 x 104 x 49 mm (without ground connection. -10 V up to +10 V. pads and fitting panel) 182 x 104 x 49 mm (with ground connection) +5 to +40 °C 690 g Solder pads Solder pads LEMO connector or MDR connector. 155 kHz Channels Electrical properties Control in Operating voltage Output power / channel Output voltage / channel Interfaces and operation Motor connector I/O ports Miscellaneous Operating temperature range Mass Dimensions +5 to +40 °C C-184..

For repeatable minimum incremental motion. 1-61 ff ) Sections. The data refer to the longterm minimum holding force. The data table states typical measured values. Max. no damage to the drive. 1-3 ff ) and Piezo Actuators & Components (p. without current consumption and heat generation. Motor voltage range Required excitation voltage range. Drive properties Resonant frequency Ultrasonic excitation frequency of the piezo ceramic actuator © Physik Instrumente (PI) GmbH & Co. Cat120E Inspirations2009 08/10. All technical data specified in the data sheet refer to room temperature (22 °C ±3 °C). Miscellaneous Operating temperature range Safe operation. it is strongly recommended to use PI driver and control electronics only. The distance between the two limit switches gives the travel range. The average velocity and continuous velocity are lower than the peak value and depend on the load conditions and other environmental parameters. Compatible controllers already include the ultrasonic drive electronics 1-38 . velocity This is the short-term peak value for horizontal mounting. PiezoWalk® Motors / Actuators (p. Holding force when powered down A main feature of piezomotor linear drives is the self-locking capability at rest. Minimum incremental motion The typical minimum motion that can be executed for a given input in open-loop operation. Mass Typical tolerance: ±5 % Cable length Typical tolerance: ±10 mm Recommended controller/driver To reach the specifications and to avid damage to the drive. Piezomotor characteristics cause a decline of the holding-force in long-term offtime. Mechanical properties Stiffness when powered down Stiffness in motion direction. and not intended for continuous operation. Subject to change without notice. referred to in the individual data table. a position feedback sensor and servo loop is required.Piezo • Nano • Positioning Details on Specifications for PILine® Drives Motion and positioning Travel range The maximum allowed travel is limited by the length of the friction bar in a PILine® drive. Typical tolerance: ±10 % Push / pull force Active force limit in operating direction. It is recommended to operate PILine® drives with suitable PI drive electronics only. KG 2008. The maximum force depends on the velocity. For repeatable nanometer or subnanometer resolution see the Piezo Flexure Stages / High-Speed scanning Systems (p. 2-3 ff ). which is sometimes referred to as practical or operational resolution. with no load.18 Operating voltage drive electronics Supply voltage for the drive electronics.

Piezo • Nano • Positioning Linear Actuators & Motors DC-Servo & Stepper Actuators .

6 to 30 30 30 5 *Precision ●●●❍❍ ●●●❍❍ Page 1-42 1-57 1-44 1-45 1-46 1-57 1-48 1-49 1-50 1-52 1-57 1-55 ●●❍❍❍ ●●❍❍❍ ●●●●❍ ●●●●❍ ●●●❍❍ ●●●❍❍ ●●●●❍ ●●●●● ●●❍❍❍ ●●●❍❍ *Relative to products in this class.Piezo • Nano • Positioning Selection Guide: DC Servo & Stepper Actuators Precision Linear Actuators with Servo and Stepper Motors All models provide sub-micrometer resolution. M-168 Stepper Mike. optional linear encoder M-238KHLA Custom. folded drive train. 50 Load Capacity [N] 40 40 20 50 70 400 40 40 120 400 1400 50 Speed (mm/sec) 0. folded drive train M-235 High-force. Stepper and closed-loop DC-Servo motors are offered.18 M-231 Compact. Higher precision models are equipped with non-rotating tips. non-rotating tip. high resolution. very good repeatability Travel [mm] 10. compact. non-rotating tip For suitable motor controllers see “Servo & Stepper Motor Controllers” in the “Micropositioning” section. high-load mike with stepper motor M-230 Non-rotating tip. non-rotating tip M-227KVLA Custom. high resolution. high resolution. limit switches Extra-compact DC / stepper motor-mike. resolution and accuracy. Combination of repeatability. All linear drives and motors are intended for integration into a customer’s system and feature no guidance. If off-axis motion cannot be tolerated external guidance is required. compact stepper actuator © Physik Instrumente (PI) GmbH & Co. piezo tip option Cost-Effective Stepper Mike linear actuator with limit switches Cost-Effective Stepper Mike linear actuator with limit switches DC / Stepper Mike. non-rotating tip.5 to 2 0. very precise M-230KCLA Custom. 4-109 ff 1-40 . 50 50 75 10. M-227 High-resolution DC Mike. 25.009 1. limit switches. ballscrew drive.3 1. Optional linear encoder Custom.5 2. limit switches DC / Stepper Mike. 50 10 10 25 10. p. direct drive. KG 2008. 25. high load capacity and lifetime.5 1. fast M-238 Extra high force DC-Mike actuators. ballscrew drive. high resolution.75 0.5 1. Direct drives with ball screws provide higher speed. non-rotating tip Ultra compact custom stepper mike DC / Stepper Mike. Cat120E Inspirations2009 08/10. ultra-high load linear actuator Stepper Mike. Models M-227 M-227KVLA M-228 M-229 M-230 M-230KCLA M-231 M-232 M-235 M-238 M-238KHLA M-168 Description DC-Mike. non-rotating tip. compact. gear-box drives with lead screws provide higher forces and are self-locking. vacuum compatible DC-Mike actuator M-228 Low cost. high resolution. high ultra-high-load linear actuator resolution. piezo tip option Custom vacuum compatible DC-Mike. high resolution. stepper motor M-229 Low cost . limit switches Heavy duty DC-Mike actuators. high resolution actuator M-232 Extra-compact. Subject to change without notice. 25 4 17 17 20.

high resolution. 250. very good repeatability Manual micrometers Differential micrometer 0. sub-nanometer resolution Stepper Mike.1 μm resolution. 25. PiezoMikes and Stepper Motor Actuators These compact actuators provide sub-micrometer resolution. 25. Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Nanopositioning / Piezoelectrics Nanometrology Micropositioning P-853 – P-854 PiezoMike. compact Travel [mm] 6. p. Models P-853– P-854 M-168 M-631 – M-633 M-619 – M-626 M-653 – M-655 Description PiezoMike. non-rotating tip. p. 400 6. 18.M-619 – M-626 Manual meter. 50 100. 10. 50 10. 18 10. sub-nanometer resolution M-168 Stepper Mike. The PiezoMike combines a piezo fine drive with a manual micrometer. non-rotating tip micrometers M-653 – M-655 Differential micrometer Index For suitable motor controllers see “Servo & Stepper Motor Controllers” in the “Micropositioning” section. 4-109 ff For suitable piezo controllers see “Piezo Drivers / Servo Controllers” in the “Nanopositioning / Piezoelectrics” section. non-rotating tip M-631 – M-633 Precision micro. 15.. non-rotating tip. compact. 25 Load Capacity [N] 10 50 50 10 to 20 20 to 50 Page 1-54 1-55 1-56 1-56 1-56 Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. very good repeatability Precision micrometer.Piezo • Nano • Positioning Micrometers. 2-99 ff Notes on Specifications see page 1-59 ff 1-41 . high resolution.

Cost-Effective M-227 actuators provide a cost-effective solution for industrial and OEM environments. A variety of other tips are also available.000 h M-230 (see p. such as a piezoelectric tip featuring 20 μm travel with sub-nanometer resolution for dynamic scanning and tracking see p. 25 and 50 mm Min. M-227 are ultra-high-resolution linear actuators providing linear motion up to 50 mm with sub-micron resolution in a compact package.10 High-Resolution DC-Mike Linear Actuator.18 ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Travel Ranges 10. 25 mm M-227. M-235 (see p.pi.50 High-Resolution DC-Mike Linear Actuator. driven by a closedloop DC-motor/gearhead combination with motor-shaftmounted high-resolution encoder.10 ball tip option P-855. Integrated Line Drivers All actuators include an integral 0.50 (w/ ball tip). the connector features integrated line drivers for cable lengths up to 10 meters between actuator and controller. They consist of a micrometer with nonrotating tip.10 (w/ piezo tip). 1-50 ff ) and M-238. the non-rotating-tip design offers several advantages: ࡯ Elimination of torqueinduced positioning errors ࡯ Elimination of sinusoidal motion errors ࡯ Elimination of wear at the contact point ࡯ Elimination of tip-angledependent wobble 1-42 Compact.25 High-Resolution DC-Mike Linear Actuator. 50 mm M-219. 1-46 ff).Piezo • Nano • Positioning M-227 DC-Mike High-Resolution Linear Actuator Non-Rotating Tip. Subject to change without notice. M-227. 10 mm M-227.20 piezo tip option . For higher loads and integrated limit switches refer to the M-219. Long Stroke to 50 mm Ordering Information M-227. High-Precision. Non-Rotating Tip Compared to conventional rotating-tip micrometer drives.20 Piezo Actuator for Micrometer Drive © Physik Instrumente (PI) GmbH & Co. Cat120E Inspirations2009 08/10. High-Resolution Piezo Option All models come with standard flat tips. KG 2008. high-resolution DC-Mike actuators and several tip options P-855. The newest release for data sheets is available for download at www.25.5 m cable with 15-pin sub-D connector and come with a 3 m extension cable.ws. The combination of an extremely low stiction/friction construction and high-resolution encoder allows for a minimum incremental motion of 50 nanometers at speeds up to 1 mm/sec. Incremental Motion to 0. M-227. On the DC servo versions.10 Ball Tip M-227. All data are superseded by any new release.05 μm Non-Rotating Tip Closed-Loop DC-Motors Sub-nm Resolution with Optional PZT Drive MTBF >5. 1-73 and 1-58.

75 50 Rotary encoder 2048 0./rev. push/pull force Max.25 DC-motor.Piezo • Nano • Positioning Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. Nanopositioning / Piezoelectrics Nanometrology Micropositioning Index M-227 DC-Mike.0035 0.1 0.12:1 40 0.0035 0.5 69.05 2 0.1 Leadscrew 0. dimensions (in mm). steel 0. μm μm μm μm mm/s mm M-227..10 X M-227.5 69. gearhead 0 to ±12 1.1 N N mm 10 Rotary encoder 2048 0.50 X Units *Higher forces on request 1-43 . steel 0. lateral force Drive properties Motor type Operating voltage Electrical power Miscellaneous Operating temperature range Material Mass Cable length Connector Recommended controller/driver -20 to +65 Al (anodized).25 V W Leadscrew 0.75 Cts. incremental motion Backlash Unidirectional repeatability Max. for up to 4 axes (see p.26 0. gearhead 0 to ±12 1.22 0. 4-120) kg m °C DC-motor. gearhead 0 to ±12 1.05 2 0.1 15-pin sub-D connector C-863 single-axis (see p.1 15-pin sub-D connector C-863 single-axis C-843 PCI-board. for up to 4 axes -20 to +65 Al (anodized). 4-114) C-843 PCI-board.0035 0. for up to 4 axes -20 to +65 Al (anodized). 15/15 pin (m/f) Technical Data Model Active axes Motion and positioning Travel range Integrated sensor Sensor resolution Design resolution Min.12:1 40 0.16 0.75 25 Rotary encoder 2048 0.12:1 40 0. sub-D.1 0. C-815.25 DC-motor. steel 0.25 X M-227.1 15-pin sub-D connector C-863 single-axis C-843 PCI-board.05 2 0.5 69.1 0.38 motor cable included: 3 m.1 Leadscrew 0. velocity Mechanical properties Drive screw Thread pitch Gear ratio Max.

Non-Rotating Tip Compared to conventional rotating-tip micrometer drives.44444:1 384* 20 20 0.pi. max. load Max. the M-228 provides a resolution of 46 nm for loads up to 20 N. Velocity 1. KG 2008. velocity Origin repeatability Mechanical properties Spindle Spindle pitch Gear ratio Motor resolution Max. 24 V chopper voltage. Subject to change without notice.Piezo • Nano • Positioning M-228 Stepper-Mike Linear Actuator Compact & Cost-Effective with Limit Switches the non-rotating-tip design offers several advantages: Ordering Information M-228.5 mm/s Non-contact Limit and Reference Switches Compact Design M-228. The cost-effective design offers many useful features such as a non-rotating tip. 0. All data are superseded by any new release.ws.5* 1 Leadscrew 0. limit and reference switches and a mechanical position display. Decimal places are separated by commas *with C-663 stepper motor controller **preloaded ***2-phase stepper motor. μm μm μm μm μm mm/s μm 0.10S Stepper-Mike Linear Actuator. steps/rev.046* 0.5 28. Limit Switches Ask about custom designs! ࡯ Elimination of torque-in࡯ Elimination of sinusoidal motion errors ࡯ Elimination of wear at the contact point ࡯ Elimination of tip-angledependent wobble Limit and Reference Switches For the protection of your equipment.23 0.5 Sub-D connector 15-pin The linear actuators of the M-228 series provide a travel range of 10 mm and are equipped with high-resolution stepper motors with gearbox./rev. stainless steel C-663 (single-channel) (see p. lateral force Drive properties Motor type Operating voltage Limit and reference switches Miscellaneous Operating temperature range Material Mass Cable length Connector Recommended controller/driver mm/rev. Cat120E Inspirations2009 08/10.15* 5** 2 10 1. N N N V °C kg m Aluminium anodized. 4-112) Dimensions of the M-228 linear actuator in mm. The direction-sensing reference switch supports advanced automation applications with high precision. 10 mm.10S X Units mm Cts. 1-44 . 24 full-steps/rev.1 2-phase stepper motor 24*** Hall-effect -20 to +65 0. The newest release for data sheets is available for download at www. Together with the C-663 controller.25 A/phase. Technical Data Model Active axes Motion and positioning Travel range Sensor resolution Design resolution Minimum incremental motion Backlash 10 duced positioning errors M-228 linear actuator © Physik Instrumente (PI) GmbH & Co.18 ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Cost-Effective Design 10 mm Travel Range 46 nm Resolution with C-663 Controller Non-Rotating Tip Max. Unidirectional repeatability Accuracy Max. push/pull force Max. non-contact Hall-effect limit and reference switches are installed.

25S X 25 0. Velocity 1. limit and reference switches and a mechanical position display. 0.pi. 25 mm. KG 2008.5 mm/s Non-Contact Limit and Reference Switches Compact Design Micropositioning Index Technical Data Model Active axes M-229. N N N mm/rev.5 m *with C-663 Mercury™ Step controller **with preload ***2-phase stepper motor.25 A/phase.25S Stepper-Mike Linear Actuator. Sub-D 15-pin connector.4 kg C-663 single-axis (see p. lateral force Drive properties Motor type Operating voltage Limit and reference switches Miscellaneous Operating temperature range Material Mass Recommended controller/driver ࡯ Elimination of torqueinduced positioning errors ࡯ Elimination of sinusoidal motion errors ࡯ Elimination of wear at the contact point ࡯ Elimination of tip-angledependent wobble M-229 dimensions in mm. Limit Switches Ask about custom designs! Patches /Benders/Tubes /Shear. Force up to 50 N Limit and Reference Switches For the protection of your equipment. All data are superseded by any new release. The newest release for data sheets is available for download at www.5 28. max.44444:1 384* 50 50 0. Non-Rotating Tip Compared to conventional rotating-tip micrometer drives. Subject to change without notice. 4-112) °C V steps/rev. Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Ordering Information M-229.Piezo • Nano • Positioning M-229 Stepper-Mike Linear Actuator Compact & Cost-Effective with Limit Switches. brass 0. The direction-sensing reference switch supports advanced automation applications with high precision. 24 V chopper voltage.. Nanopositioning / Piezoelectrics M-229 high-load stepper mike with C-663 Mercury™ Step stepper motor controller Nanometrology © Physik Instrumente (PI) GmbH & Co.15* 10** ±2 1.ws. 1-45 .18 ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Cost-Efficient Design 25 mm Travel Range 46 nm Resolution (with C-663 Controller) 50 N Load Capacity Non-Rotating Tip Max. non-contact Halleffect limit and reference switches are installed. incremental motion Backlash Unidirectional repeatability Max.046* 0. velocity Origin repeatability Mechanical properties Drive screw Thread pitch Gear ratio Motor resolution Load capacity Push/pull force Max. cable 0. Cat120E Inspirations2009 08/10. The cost-effective design offers many useful features such as a non-rotating tip. mm μm μm μm μm mm/s μm Units M-229 series linear actuators provide a travel range of 25 mm (more than M-228) and are equipped with high-resolution stepper motors with gearboxes. steel. This means the M-229 mike actuator driven by a C-663 stepper motor controller can push and pull loads up to 50 N with a position resolution of 46 nm. 24 full steps/rev.5 2-phase stepper motor 24*** Hall-effect -20 to +65 Al (anodized).5* 1 Leadscrew 0. the non-rotating-tip design offers several advantages: Motion and positioning Travel range Design resolution Min.

05 μm Non-Rotating Tip Max. Limit Switches M-230. All data are superseded by any new release. The direction-sensing reference Fiber positioning Metrology Photonics packaging Quality assurance testing Testing equipment Ball tip (included) Flat tip (included) 1-46 .pi.Piezo • Nano • Positioning M-230 Precision Linear Actuator Non-Rotating Tip. Cat120E Inspirations2009 08/10. Non-Rotating Tip Compared to conventional rotating-tip micrometer drives. 10 and 25 mm travel range © Physik Instrumente (PI) GmbH & Co. high-resolution DC-Mike actuators. M-230 are ultra-high-resolution linear actuators providing linear motion up to 25 mm with sub-micron resolution in a compact package. They consist of a micrometer with non-rotating tip driven by a 2-phase stepper motor or a closed-loop DC motor / gearhead combination with motor-shaft-mounted. Limit Switches M-230. KG 2008. High-Load Versions For higher loads and travel ranges refer to the M-235 (see p. the non-rotating-tip design offers several advantages: Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Elimination of torqueinduced positioning errors ࡯ Elimination of sinusoidal motion errors ࡯ Elimination of wear at the contact point ࡯ Elimination of tip-angledependent wobble High Accuracy & Long Life M-230 actuators provide a costeffective solution for heavierduty industrial and OEM environments.000 h switch supports advanced automation applications with high precision.18 ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Travel Range 10 & 25 mm Min. Incremental Motion to 0.25. Limit and Reference Switches For the protection of your equipment. non-contact Halleffect limit and reference switches are installed. On the DC servo versions. 10 mm.10 High-Resolution DC-Mike Linear Actuator. Limit Switches. Limit Switches M-230. Subject to change without notice. 1-52).ws. The newest release for data sheets is available for download at www. allowing for minimum incremental motion as low as 50 nanometers and speeds up to 2 mm/sec. high-resolution encoder. 25 mm.10S High-Resolution Stepper-Mike Linear Actuator.10. Integrated Line Drivers All actuators include an integral 0. Stroke to 25 mm Ordering Information M-230.25S High-Resolution Stepper-Mike Linear Actuator. M-230. Velocity 2 mm/s Closed-Loop DC Motors and Stepper Motors Non-Contact Limit and Reference Switches Front Mount or Clamp Mount MTBF>20.25 High-Resolution DC-Mike Linear Actuator. 25 mm. low-friction construction. They feature extremely low-stiction. 10 mm. 1-50) and M-238 (see p. Limit Switches M-230.5 m cable with 15-pin sub-D connector and come with a 3 m extension cable. A screw-in ball tip and a flat tip are included. the connector features integrated line drivers for cable lengths up to 10 meters between actuator and controller.

motor resolution with C-663 stepper motor controller 1-47 .1 2 1 Cts.44444:1 384** 45* 30 Leadscrew 0.5 15-pin sub-D connector C-863 single-axis (p.05 2 0..5 15-pin sub-D connector C-663 single-axis (p.1 2 1 0. 0.4 42. 4-120) -20 to +65 Al (anodized).10 X M-230.25 A/phase.2 1 0. velocity Reference switch repeatability Mechanical properties Spindle Spindle pitch Gear ratio Motor resolution** Max.05 2 0.35 0. μm μm μm μm mm/s μm 10 25 mm M-230. Nanopositioning / Piezoelectrics M-230. steel 0.. for up to 4 axes (p.92063:1 Leadscrew 0. steel 0.1 1. gearhead 0 to ±12 2 Hall-effect DC-motor.037 0.05 2 0.Piezo • Nano • Positioning Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear.4 42. 4-114) C-843 PCI board.25 X M-230. Dimensions in mm Nanometrology Technical Data Model Active axes Motion and positioning Travel range Integrated sensor Sensor resolution Design resolution Min. 24 full steps/rev.92063:1 Leadscrew 0. lateral force Drive properties Motor type Operating voltage Electrical power Limit and reference switches Miscellaneous Operating temperature range Material Mass Cable length Connector -20 to +65 Al (anodized). incremental motion Backlash Unidirectional repeatability Max.037 0./rev.4 28.0046 0.4 28.1 1. 15-pin sub-D connector with integrated line drivers (DC motor models).2 1 25 Rotary encoder 2.048 0.3 0. push/pull force Max. steel 0.10S X M-230. N N mm 10 Rotary encoder 2.44444:1 384** 45* 20 steps/rev.5 15-pin sub-D connector -20 to +65 Al (anodized). gearhead 0 to ±12 2 Hall-effect Hall-effect Hall-effect 2-phase stepper motor** 24 2-phase stepper motor** 24 V W 70 30 70 20 Leadscrew 0. steel 0.5 15-pin sub-D connector C-663 single-axis -20 to +65 Al (anodized).25S X Units Micropositioning Index Recommended controller/driver C-863 single-axis C-843 PCI board.048 0.05 2 0. 24 V chopper voltage. 4-112) kg m °C DC-motor.3 0.0046 0. for up to 4 axes *at velocities of up to 1 mm/s **2-phase stepper motor.35 0. max. Cable length: 500 mm.

1-46).ws. © Physik Instrumente (PI) GmbH & Co.18 The M-231 is an ultra-high-resolution linear actuator providing linear motion up to 17 mm with sub-micron resolution in a compact package. 17 mm. non-contact Halleffect limit and reference switches are installed. push/pull force Drive properties Motor type Operating voltage Electrical power Limit and reference switches Miscellaneous Operating temperature range Material Mass Recommended controller/driver -20 to +65 Al (anodized).007 0.17 high-resolution DC-Mike actuator. the connector features integrated line drivers for cable lengths up to 10 meters between actuator and controller.1 2 0. see p. g. refer to the M-230 (see p.1 μm Max. 1-50) and M-238 (see p.). The reference switch supports advanced automation applications with high precision. 1-52)./rev.2 1. It consists of a leadscrew which is driven by a closed-loop DC-motor/gearhead combination with motorshaft-mounted. 15-pin. M-105. gearhead 0 to ±12 2 Hall-effect V W Leadscrew 0. KG 2008. Velocity 2. 17 mm travel range ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Travel Range 17 mm Min. The newest release for data sheets is available for download at www. Subject to change without notice.17 C-863 single-axis (p.000 h Integrated Line Drivers All actuators include an integral 0. high-resolution encoder (2048 counts/rev.Piezo • Nano • Positioning M-231 DC-Mike Precision Linear Actuator With Limit Switches. All data are superseded by any new release. Cable length: 500 mm. Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ M-231 mounted on M-105 XYZ positioning systems Technical Data Model Active axes Motion and positioning Travel range Integrated sensor Sensor resolution Design resolution Min. velocity Reference switch repeatability Mechanical properties Spindle Spindle pitch Gear ratio Max.44444:1 40 N mm 17 Rotary encoder 2. for up to 4 axes (p.17 High-Resolution DC-Mike Linear Actuator. Limit and Reference Switches For the protection of your equipment.5 1 Cts. M-235 (see p.4 28.5 mm/s Closed-Loop DC-Motors Non-Contact Limit and Reference Switches Fits M-105 Fiber Aligners MTBF >5. incremental motion Backlash Unidirectional repeatability Max. Cat120E Inspirations2009 08/10. 4-120) kg °C DC-motor. sub-D connector with integrated line drivers 1-48 . Upgrade for Manual Aligners The M-231 was especially designed to fit existing manual translation stages (e. 4-114) C-843 PCI board. For higher loads and travel ranges.pi.5 m cable with 15-pin sub-D connector and come with a 3 m extension cable. steel 0. μm μm μm μm mm/s μm mm M-231. Incremental Motion to 0. 4-50 ff ) as a direct replacement for a manual micrometer. On the DC servo versions. Limit Switches M-231.048 0. Suitable for Fiber Alignment Ordering Information M-231. dimensions (in mm).17 X Units Fiber positioning Metrology Photonics packaging Quality assurance testing Testing equipment M-231.

M-105 see p. gearhead 0 to ±12 2 Hall-effect V W Leadscrew 0. g. On the DC servo versions. push/pull force Drive properties Motor type Operating voltage Electrical power Limit and reference switches Miscellaneous Operating temperature range Material Mass Recommended controller/driver -20 to +65 Al (anodized). 1-46). Suitable for Fiber Alignment Ordering Information M-232. M-235 (see p. 1-52).). Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ Limit and Reference Switches For the protection of your equipment.17 C-863 single-axis (p. M-232. incremental motion Backlash Unidirectional repeatability Max.000 h Nanopositioning / Piezoelectrics Nanometrology Micropositioning Index The M-232 is an ultra-high-resolution linear actuator providing linear motion up to 17 mm with sub-micron resolution in a compact package.44444:1 40 N mm 17 Rotary encoder 2. They feature a low-stiction. for up to 4 axes (p. steel 0.17 high-resolution DC-Mike actuator mounted on M-105 translation stage ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Travel Range 17 mm Min. Limit Switches Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. 1-50) and M-238 (see p. dimensions (in mm). It features a space-saving design with a leadscrew side-by-side to a closed-loop DC-motor/gearhead combination and a highresolution encoder (2048 counts/rev.2 1. refer to the M-230 (see p. 17 mm. Integrated Line Drivers All actuators include an integral 0.048 0./rev.5 1 Cts. velocity Reference switch repeatability Mechanical properties Spindle Spindle pitch Gear ratio Max.5 mm/sec.5 m cable with 15-pin sub-D connector and come with a 3 m extension cable. For higher loads and travel ranges.5 mm/s Closed-Loop DC-Motors Non-Contact Limit and Reference Switches Fits M-105 Fiber Aligners MTBF >5.007 0.17 Compact High-Resolution DC-Mike Linear Actuator. The reference switch supports advanced automation applications with high precision.1 2 0. M-232.4 28.. Upgrade for Manual Aligners The M-232 was especially designed to fit existing manual translation stages (e.1 μm Max. low-friction construction allowing for minimum incremental motion of 100 nanometers at speeds of up to 2. Velocity 2. the connector features integrated line drivers for cable lengths up to 10 meters between actuator and controller. 15-pin sub-D connector with integrated line drivers Technical Data Model Active axes Motion and positioning Travel range Integrated sensor Sensor resolution Design resolution Min.17 X Units Fiber positioning Metrology Photonics packaging Quality assurance testing Testing equipment 1-49 . 4-114) C-843 PCI board. Incremental Motion to 0. Cable length: 500 mm. non-contact Halleffect limit and reference switches are installed.Piezo • Nano • Positioning M-232 DC-Mike Precision Linear Actuator Compact Package. 4-112) kg °C DC-motor. 4-50 ff ) as a direct replacement for a manual micrometer. μm μm μm μm mm/s μm mm M-232.

Direct-Drive DC Motor M-235.52S High-Power Linear Actuator. compared to conventional lead screws.2DG M-235. Forces to 120 N Ballscrews for High Speed and Long Lifetime The recirculating ballscrew is maintenance-free and preloaded to eliminate mechanical play. Integrated Line Drivers All actuators include an integral 0.5 m cable with 15-pin sub-D connector and come with a 3 m extension cable.2DD M-235.pi. Stepper Motor Ask about custom designs! M-235. 50 mm.x2S versions have a high-power. DC Motor Gearhead M-235. All data are superseded by any new release. 20 mm travel range. non-contact Halleffect limit and reference switches are installed.5DG High-Power Linear Actuator. The newest release for data sheets is available for download at www.5DD High-Power Linear Actuator. A screw-in ball tip and a flat tip are included. allows for higher velocity. ballscrew 1-50 . high-resolution encoder (2048 counts/rev. Stepper Motor M-235.2DD High-Power Linear Actuator. The direction-sensing reference switch supports advanced automation applications with high precision. Ballscrew.2DG High-Power Linear Actuator. On the DC servo versions.000 h Vacuum-Compatible Versions Available to 10-6 hPa The M-235.18 Travel Range 20 & 50 mm Min. 50 mm. Incremental Motion to 0. Ordering Information M-235. KG 2008.Piezo • Nano • Positioning M-235 Heavy-Duty Precision Linear Actuator High-Dynamics. Ballscrew.5DG M-235.5DG (bottom) high-resolution DC-Mike. Thus. Three Different Drives The M-235 is available with three different motor drives: Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Fiber positioning Automation Metrology Photonics packaging Quality assurance testing Testing equipment ࡯ Elimination of torqueinduced positioning errors ࡯ Elimination of sinusoidal motion errors ࡯ Elimination of wear at the contact point ࡯ Elimination of tip-angledependent wobble M-235. The M-235. Ballscrew. low-vibration 2-phase stepper motor. Cat120E Inspirations2009 08/10.1 μm High-Speed Direct Drive Option Push/Pull Load 120 N Lateral Force 100 N Recirculating Ballscrew Drives Provide High Speeds & Long Lifetimes Closed-Loop DC Motors and Stepper Motors Non-Contact Limit and Reference Switches MTBF >20. 20 mm.).5VG Vacuum Version of M-235. Stroke to 50 mm.5DD version is equipped with a direct drive motor for high-speed positioning applications.22S high-resolution Stepper-Mike. the connector features integrated line drivers for cable lengths up to 10 meters between actuator and controller (DC-motors only).2DG (top) and M-235. the non-rotating-tip design offers several advantages: The M-235 is an ultra-highresolution linear actuator providing linear motion of up to 50 mm with sub-micron resolution in a compact package. Non-Rotating Tip Compared to conventional rotating-tip micrometer drives.5DD M-235. Its significantly reduced friction. a bidirectional repeatability of 1 μm is made possible! Limit and Reference Switches For the protection of your equipment. Ballscrew. It consists of a preloaded ultralow-friction. The DC-motor models provide a minimum incremental motion of 100 nm only and are equipped with high-resolution rotary encoders for position control. 50 mm. DC Motor Gearhead M-235. lower power consumption and longer service life. Subject to change without notice.22S High-Power Linear Actuator.2VG Vacuum Version of M-235. 20 mm. Direct-Drive DC Motor M-235. Ballscrew. ballscrew ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ © Physik Instrumente (PI) GmbH & Co.ws.5VD Vacuum Version of M-235. 20 mm. Ballscrew. heavy-duty ballscrew which is driven by a 2-phase stepper motor or a closed-loop DC motor with motor-shaft-mounted.2VD Vacuum Version of M-235.

5 1 >30 0.5 1 >30 0.2DG X M-235./rev.048 0. steel 0.5 0.5DD X M-235.8 A/phase. N N 20 Rotary encoder 2.1 0. 15-pin Sub-D connector M-235.52S X Units *2-phase stepper motor.55 C-863 single-axis C-843 PCI board.8 C-663 single-axis (p.22S and M-235.6:1 6.016 0.016 0. gearhead 0 to ±12 4 Hall-effect DC-motor 0 to ±12 17 Hall-effect 2-phase stepper motor* 24 4. lateral force Drive properties Motor type Operating voltage Electrical power Limit and reference switches Miscellaneous Operating temperature range Material Mass Recommended controller/driver -20 to +65 Al (anodized).5DG X M-235.1 0. for up to 4 axes -20 to +65 Al (anodized).048 0..2DD X M-235. steel 0. for up to 4 axes -20 to +65 Al (anodized). max.5DD and M-235.6 50 Rotary encoder 2.5 0. push/pull force Max. steel 0.2DG.2 1 20 20 50 Rotary encoder 2.5 C-863 single-axis C-843 PCI board.400* 100** 100 steps/rev.156 0.156 0. M-235. 15-pin Sub-D connector with integrated line drivers Technical Data Model Active axes Motion and positioning Travel range Integrated sensor Sensor resolution Design resolution Min. Cable length 500 mm.400* 100** 100 120 100 >50 100 29.6:1 6. 24 V chopper voltage. for up to 4 axes (p. Nanopositioning / Piezoelectrics Nanometrology Micropositioning Index Ball tip (included) M-235. gearhead 0 to ±12 4 Hall-effect DC-motor 0 to ±12 17 Hall-effect 2-phase stepper motor* 24 4.52S dimensions in mm. 4-114) C-843 PCI board.5DG dimensions in mm.. 4-112) kg °C DC-motor. steel 0.1 0. incremental motion Unidirectional repeatability Bidirectional repeatability Max.048 0.2DD.Piezo • Nano • Positioning Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear.65 C-863 single-axis (p. 400 full steps/rev.75 Hall-effect V W 120 100 >50 100 29. μm μm μm μm mm/s 50 mm M-235.1 1 2. 0.65 C-663 single-axis -20 to +65 Al (anodized). cable length 500 mm.6 20 Rotary encoder 2.5 0.048 0. for up to 4 axes -20 to +65 Al (anodized).1 0.22S X M-235. motor resolution with C-663 stepper motor controller **at up to 10 mm/sec Data for vacuum versions may differ. M-235. 1-51 . steel 0.7 C-863 single-axis C-843 PCI board.1 1 2. velocity Mechanical properties Gear ratio Motor resolution* Max.5 0. 4-120) -20 to +65 Al (anodized).75 Hall-effect DC-motor.2 1 20 Cts. steel 0.

400 N.18 ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ High Load Capacity to 400 N Travel Range 50 mm Resolution to 0. non-contact Halleffect limit and reference switches are installed. 50 mm. ActiveDrive™ DC-Motor DC motor drives offer several advantages. All data are superseded by any new release. highprecision actuator providing linear motion up to 50 mm. a load capacity to 400 N and high velocity to 30 mm/s. High-Resolution Linear Actuator Forces to 400 N. KG 2008.4 B 67. The direction-sensing reference switch supports advanced automation applications with high precision. allows for higher velocity.ws. the non-rotating-tip design offers several advantages: M-238. Cat120E Inspirations2009 08/10. by mounting the amplifier and motor together in a single.5PG Heavy-Duty DC-Mike Actuator.000 h ࡯ Vacuum-Compatible Versions Available for 10-6 hPa The M-238 is a high-load. Precision and Lifetime The precision-ground ballscrew is maintenance-free and preloaded to eliminate mechanical play. such as high dynamics.1 μm.5PG. Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Elimination of torque࡯ Elimination of sinusoidal induced positioning errors motion errors ࡯ Elimination of wear at the contact point ࡯ Elimination of tip-angle dependent wobble The lateral guiding of the tip withstands lateral forces of up to 100 N. electrically shielded case Non-Rotating Tip Compared to conventional rotating-tip micrometer drives. ActiveDrive™ DC-Motor with gearbox. drive-train errors like backlash and elastic deformations are eliminated. developed by PI. Subject to change without notice. ActiveDrive™ M-238. lower power consumption and longer lifetime. ActiveDrive™. The newest release for data sheets is available for download at www.pi. Its significantly reduced friction. heavy-duty ballscrew.5PL A 124. A lower-cost version with a rotary encoder is available as model number M-238. compared to conventional leadscrews. An optional linear encoder provides exceptional accuracy and repeatability. by eliminating power losses between the amplifier and motor ࡯ Reduced cost of ownership and improved reliability. The M-238 is therefore well suited for high duty-cycle operation in industrial environments.1 μm Direct-Metrology Linear Encoder for Exceptional Precision ࡯ MTBF >20. high torque at low rotational speed.5PL Heavy-Duty Mike actuator (with CD for size comparison) Ballscrews for High Speed.4 113. features a Quality assurance testing Testing equipment Precision machining Astronomy Flexible automation Metrology tips M-238.5PL model is equipped with a non-contact. low heat and low vibration. The ActiveDrive™ design.5PL* Heavy-Duty DC-Mike Actuator.6 90 M-238 dimensions in mm 1-52 . because no external driver is required ࡯ Elimination of PWM amplifier noise radiation. Velocity 30 mm/s Preloaded Frictionless Ball Screw Optional 0. © Physik Instrumente (PI) GmbH & Co.Piezo • Nano • Positioning M-238 High-Load. It consists of a low-friction. Direct Metrology Linear Encoder to Compensate Mechanical Play The M-238. Because the encoder measures the actual position of the non-rotating actuator tip. Direct-Metrology Encoder *Ask for availability in your region ࡯ Increased efficiency. 400 N. 50 mm.1 μm Max. optical. linear encoder (direct metrology) with an output resolution of 0. driven by a closedloop. Optional Direct Position Measurement high-efficiency PWM (pulse width modulation) servoamplifier mounted side-byside with the DC-Motor and offers several advantages: Ordering Information M-238. Limit and Reference Switches For the protection of your equipment.5PG M-238.

5PL X Units Tolerance 1-53 . 0. mm/rev.71:1 400 100 N N Max.5 3 1 30 1 50 Linear encoder 0.13 0. typ. Nanopositioning / Piezoelectrics Nanometrology Micropositioning M-238.1 0.5PL velocity at 30 mm/s is highly constant. ActiveDrive™ 24 (PWM) 80 DC-motor.Piezo • Nano • Positioning Linear Actuators & Motors M-238.1 μm 0. Max.3 1 0. ActiveDrive™ 24 (PWM) 80 V W nominal 2 3. velocity Origin repeatability Mechanical properties Spindle pitch Gear ratio Push / pull force Lateral force Drive properties Motor type Operating voltage Electrical power Miscellaneous Operating temperature range Material Mass Cable length Connector Recommended controller/driver -10 to 50 Al (anodized).4 3 D-Sub 15 (m) C-863. steel 2. Technical Data Model Active axes Motion and positioning Travel range Integrated sensor Sensor resolution Design resolution Min.3 30 1 μm μm μm μm mm/s μm ±20 % typ.3 μm. typ. steel 2. C-843 -10 to 50 Al (anodized).. Index The settling time for a 30 mm step is less than 1.71:1 400 100 2 3. mm M-238. C-843 (p.5PG X M-238.5PL repeatability is better than 0. typ. 4-114). 50 Rotary encoder 4000 cts/rev. incremental motion Backlash Unidirectional repeatability Max. 4-120) kg m ±5 % ±10 mm °C DC-motor.4 3 D-Sub 15 (m) C-863 (p.5 seconds. PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear.

2-142) System kg Mass Body material Recommended piezo driver 1-54 .00.80 XYZ miniature stage with P-853 PiezoMikes and optional fiber holder LEMO Cable: coaxial FFA.18 Holding-Flange-Standard Holding-Flange-Standard P-853 dimensions (in mm) P-854 dimensions (in mm) Technical Data Model Travel range (micrometer drive) Piezo fine travel range (@ 0 to 100 V) Min.45 P-854. The P-854 can be attached to the M-105 linear positioners (see p. E-500 (p. Piezoelectric Micrometer Drive. FFA. P-854 (right) Ordering Information P-853.pi. The newest release for data sheets is available for download at www. The P-853.5 1. axial push/pull force Micrometer drive Micrometer pitch Stiffness Electrical capacitance (piezo) Electrical connection P-853.5 1 0.5 mm/rev. 2-116).00. RG 178.00 PiezoMike. like standard micrometer drives. incremental motion (piezo drive) Micrometer sensitivity Max.00 6 25 <1 1 10 / 5 M-619.5 1. 25 μm Ask about custom designs! Working Principle A sophisticated wire EDM (electric discharge machining) flexure motion amplifier doubles the displacement of a piezo linear actuator. N/μm μF Units mm μm ±20 % nm μm N M-313. 1 m 0. LEMO Cable: coaxial.pi.Piezo • Nano • Positioning P-853 · P-854 Piezoelectric Micrometer Drive Hybrid PiezoMike Provides Sub-Nanometer Resolution of the micrometer is 1 μm. Sensitivity P-853/P-854 PiezoMikes are micrometer drives with integrated high-resolution piezo © Physik Instrumente (PI) GmbH & Co. They can be operated manually. 6 mm.10 0. It also serves as a linear guide to the micrometer drive. This design is compact and mechanically stable. E-610 (p. Piezoelectric Micrometer Drive. E-610. All data are superseded by any new release. 18 mm.00 is equipped with a 6 mm holding flange and can be directly attached to M-311 miniature translation stages (see www.250. By controlling the piezo voltage. the micrometer tip is automatically moved in and out (up to 25 μm) relative to the manually set position.00 PiezoMike. 4-50).ws).1 N -S E-660 (p.00 18 25 <1 1 20 / 5 M-626. PiezoMike Applications The PiezoMike can be mounted like a micrometer drive by clamping around the sleeve.ws. male. ࡯ ࡯ ࡯ ࡯ ࡯ Alternative for Standard Micrometer Drives Manual Travel to 18 mm Piezoelectric High-Resolution Travel to 25 μm Sub-Nanometer Resolution Dynamic Operation to 10 Hz linear drives. RG 178. male. Subject to change without notice. Resolution of the piezoelectric motion is in the sub-nanometer range. 1 m Teflon coated. which is moved back and forth when the piezo drive voltage is changed. The PiezoMike can therefore be used as a remotely controlled fine positioning element. 2-110).250. E-500 System 0. P-853 (left). KG 2008. Cat120E Inspirations2009 08/10.10 0.05 N -S E-660. Teflon coated. 25 μm P-854.

High-Resolution Piezo Option The optional piezo tip provides 20 μm travel with sub-nanometer resolution for dynamic scanning and tracking (see p. incremental motion Unidirectional repeatability Backlash Max. Non-Rotating Tip Compared to conventional rotating-tip micrometer drives.52S High-Resolution Stepper-Mike Linear Actuator. 50 mm Ask about custom designs! Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. mm/rev. Cat120E Inspirations2009 08/10.025 0. All models come with standard flat tips (see ced positioning errors Technical Data Model Travel range Design resolution Min. The newest release for data sheets is available for download at www.18 ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ 10. max.02 6400* 0. 25 and 50 mm Travel Range Resolution <0.12S.1 2 5 50 0. 1-73). Sub-D connector 15-pin. 24 V chopper voltage.1 2 5 50 0. All data are superseded by any new release.000 h MTBF p..5 0. 0.38) ࡯ Elimination of torque-indu࡯ Elimination of sinusoidal motion errors ࡯ Elimination of wear at the contact point ࡯ Elimination of tip-angledependent wobble M-168 Stepper-Mikes feature an extremely low-stiction.22S and M-168.5 0. Micropositioning Index M-168 are compact.5 0. 400 full steps/rev.05 0.52S 50 0. 10 mm M-168. lateral force Motor resolution* Drive screw pitch Weight Recommended motor controllers M-168.02 6400* 0.52S dimensions in mm.02 6400* 0.ws. M-168 Stepper-Mikes providing 10. 25 mm M-168.pi. 3 m cable included (C-815.12S 10 0. Strokes to 50 mm Ordering Information M-168. Subject to change without notice.05 0.025 0.05 0.4 C-663 single-axis M-168. push/pull force Max. 4-112) Unit mm μm μm μm μm mm/s N N (at tip) steps/rev. velocity Max. 1-58 for spherical tips and other options).22S High-Resolution Stepper-Mike Linear Actuator.5 C-663 single-axis (p.1 2 5 50 0. motor resolution with C-663 stepper motor controller 1-55 .Piezo • Nano • Positioning M-168 Stepper-Mike Precision Linear Actuator Non-Rotating Tip.. lowfriction construction allowing for high resolution and repeatability. the non-rotating-tip design offers several advantages: M-168.1 μm 2-Phase Stepper Motor Manual Positioning Knob Sub-nm-Resolution with Optional PZT Actuator >5. high-resolution linear actuators providing linear motion up to 50 mm with sub-micron resolution. M-168.025 0. kg *2-phase stepper motor. A manual positioning knob provides coarse resolution of 5 μm.45 C-663 single-axis M-168. They consist of a micrometer drive with non-rotating tip driven by a 6400 microstep/rev and 2-phase stepper motor.8 A/phase. KG 2008. 25 and 50 mm travel range (from front to back) Nanopositioning / Piezoelectrics Nanometrology © Physik Instrumente (PI) GmbH & Co.22S 25 0.12S High-Resolution Stepper-Mike Linear Actuator.

25 and 50 mm Travel Range Pitch 0.pi.00 M-622.00 & M-626.5 mm 5.Piezo • Nano • Positioning M-653 · M-655 Differential Micrometer Drive Stroke to 20 mm.10 M-620.00 5/0.0 mm M-631 · M-632 · M-633 Micrometer Drive Non-Rotating Tip.1 μm Sensitivity ࡯ 1 μm Graduations ࡯ Travel Range up to 20 mm Model Travel range coarse/fine Spindle pitch coarse/fine 0.ws.02 mm 0.05 mm Shaft ø 6 mm 12 mm Tip ø 3 mm 6.00 M-623.5 mm 6.4/0.00 M-633.00 M-619.05 M-626.18 Model Travel range Max. Low-Friction Construction 1 μm Manual Sensitivity Sub-nm Resolution with Optional PZT Actuator © Physik Instrumente (PI) GmbH & Co. Manual ࡯ 1 μm Sensitivity ࡯ 10 μm Graduations ࡯ Model M-626.5 mm 87 mm Micrometer drives with up to 25 mm travel 1-56 .10 M-624.05 with Lockable Spindle Model Travel range Shaft ø M-619.5 mm 3.00 M-626.00 differential micrometer drive M-653.5 mm/rev.5 mm 44 mm 45 mm 63 mm 69 mm 53 mm 64. Cat120E Inspirations2009 08/10. All data are superseded by any new release. The newest release for data sheets is available for download at www.2 mm 20/1. M-631 Micrometers (from top) M-632. Manual ࡯ 0. Optional Piezo Drive.00 M-655.5 mm M-631. Manual ࡯ ࡯ ࡯ ࡯ ࡯ 10. KG 2008.5/0.8 mm Total length at 0 mm 56 mm 112 mm M-653.00 10 mm 25 mm 50 mm 50 N 50 N 50 N M-619 – M-626 Precision Micrometer Drive Stroke to 25 mm.00 M-621.5 mm 3 mm 5 mm 5.00 M-633.00 6.5 mm 170.5 mm 3 mm 3 mm 6. push/ pull force Tip ø 12 mm 12 mm 12 mm Shaft ø 16 mm 16 mm 16 mm Total length at 0 mm 76 mm 110. M-632.8 mm Total length at 0 mm 37 mm 44.5 mm 10 mm 10 mm 15 mm 15 mm 18 mm 18 mm 25 mm 6 mm 6 mm 6 mm 8 mm 10 mm 12 mm 6 mm 6 mm 12 mm Tip ø 3. Subject to change without notice.

Ø 19 mm Length 146. Cat120E Inspirations2009 08/10.3 mm/s Dimensions Patches /Benders/Tubes /Shear.18 Model For fine positioning tasks (e. in astronomy applications) the extremely compact M-230KCLA features resolution better than 5 nanometers M-230KCLA Travel range 4 mm Design resolution 4.45 nm Max..Piezo • Nano • Positioning M-227K Vacuum Compatible Linear Actuator High-Resolution DC-Mike Linear Actuator ࡯ ࡯ ࡯ ࡯ Compact Design Vacuum Compatible up to 10-6 hPa Non-Rotating Tip Closed-Loop DC-Motors Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Model The M-227KVLA Vacuum Compatible linear actuator is equipped with rotary encoder and DC-motor with gearhead M-227KVLA Travel range 10 mm Push/pull force 40 N Design resolution 0. All data are superseded by any new release. The newest release for data sheets is available for download at www. KG 2008.1 mm Dimensions 107 x 60 x 30 mm + flange length 24.ws. velocity 0. Incremental Motion to 15 nm Hall-Effect Limit Switches Custom Tip for Load Mounting Micropositioning Index © Physik Instrumente (PI) GmbH & Co.5 ±5 mm Nanopositioning / Piezoelectrics Nanometrology M-230K Compact Stepper Motor Linear Actuator High-Resolution Linear Actuator with Folded Drive ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Push/Pull Force to 400 N Highly Compact with Folded Drive High-Resolution Stepper Motor Min. incremental Motion 2 μm Design resolution 0.g.pi.5 μm Motor power 250 W Dimensions M-238KHLA 75 mm Ø 64 mm Total length 185 +75 mm 1-57 .059 μm Max.5 ±2 mm M-238K Ultra-High-Load Precision Linear Actuator High-Performance Linear Actuator Pushes Up To 1400 N ࡯ High-Resolution Incremental Rotary Encoder + Absolute Position Measurement with Linear Potentiometer ࡯ Push/Pull Force to 1400 N ࡯ Fast: Velocity to 30 mm/s ࡯ Auto Locking at Rest with No Power Consumption & Heat Generation ࡯ Brushless DC-Servomotor Model Travel range M-238KHLA High-Load measures and keeps the absolute position without current Min. Subject to change without notice. velocity 9 μm/s Thread pitch 0.

5 mm M-219. The following optional replacement tips are available (all with M10x 0.20 Tip with M 5 Threaded Stud. M10 x 0. The newest release for data sheets is available for download at www. M10 x 0.00 Spherical Tip. M10 x 0.20 Optional tips. KG 2008.5 mm M-219. All data are superseded by any new release. M-168 Stepper Mikes and M-631 to M-633 manual micrometer drives are supplied with flat tips. Subject to change without notice.5 mm M-219.5 mm fine threads): © Physik Instrumente (PI) GmbH & Co.18 P-855.10 Ball Tip. dimensions in mm 1-58 .Piezo • Nano • Positioning M-219 Optional Tips For Micrometers and Actuators Ordering Information M-219.ws.5 mm Ask about custom designs! M-227 DC-Mikes. Cat120E Inspirations2009 08/10. M10 x 0.30 Hardened Stainless Steel Tip.pi.

based on the selection of the mechanical drive components (drive screw pitch. Several PI motorized micropositioners are available with additional piezo fine positioners for applications where repeatable nanometer scale resolution and / or fast response are required. see also Glossary Pitch / yaw The maximum angular deviation around Y.(pitch) and (see p. For repeatable nanometer or sub-nanometer resolution see the “Piezo Flexure Stages / High-Speed Scanning Systems” Backlash Position error that appears upon reversing direction due to error in the drivetrain. Design resolutions of 1 nm or better can be achieved with many motor. The data table states typical measured values. Given in the data sheet is the distance between the two limit switches. vertical load (horizontal installation). with X being the direction of motion. Unidirectional / bidirectional repeatability Values are typical results (RMS. at center 1-59 of stage.. stiction/friction. Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Motion and positioning Travel range The maximum allowed travel is limited by the length of the drive screw in a spindle/motor combination. For linear encoders. tangent-arm length Angular displacement of tangent-arm rotation stages is determined by the arm length and the linear motion input pushing the arm (see p. which is sometimes referred to as practical or operational resolution. normal load capacity Centered. Some stages may be able to generate higher forces at the cost of reduced lifetime. Max. In practical applications. gear ratio. Rotation / linear input. See “Definition of Axes and Angles” page 4-128 ff. and not intended for continuous operation. The data table states typical measured values. if present. 1 sigma). Stiffness in motion direction Typical tolerance: ±20 % Max. and elastic deformation limit operating resolution. gearbox and leadscrew combinations. angular motor resolution etc. the design describes the resolution of the of the position feedback sensor system. Design resolution is usually better than the practical position resolution (minimum incremental motion). Integrated sensor Rotary or linear encoder Encoder resolution Rotary encoder: counts per drive-screw revolution Linear encoder: interpolated minimum increment that can be distinguished Design resolution The theoretical minimum movement that can be made. Nanopositioning / Piezoelectrics Nanometrology Micropositioning Index Z-axis (yaw) over the whole travel range. velocity This is the short-term peak value for horizontal mounting. 4-82) for information on how to calculate angular displacement from linear input). See page 4-128 ff for details. Max. The average velocity and continuous velocity are lower than the peak value and depend on the load conditions and other environmental parameters. A different motor orientation may result in modified data. 2-3 ff ) and “PiezoWalk® Motors / Actuators” (see p. Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. Origin repeatability Repeatability of the reference switch (if present) Mechanical properties Motor resolution Resolution with micro-stepping specified for PI's stepper motor controllers. windup.Piezo • Nano • Positioning Notes on Specifications for Motorized Actuators Active axes Specifications given in the data sheet are measured in relation to the defined motion axis. The data table states typical measured values. Pitch and yaw are usually given as ± values.). however. push / pull force Active and passive force limit in operating direction. Design resolution and practical resolution have to be distinguished. 1-3 ff ) Sections. . Minimum incremental motion The minimum motion that can be repeatably executed for a given input. with no load.

KG 2008. mounting. Subject to change without notice. and the sign determines the motion direction. All technical data specified in the data sheet refer to room temperature (22 °C ±3 °C). Electrical power Motor manufacturer’s information. Small amounts of other materials may be used (for bearings. Material Micropositioning stages are typically made of anodized aluminum or stainless steel. For further information read “Micropositioning Fundamentals” Section (see p. coupling.Piezo • Nano • Positioning Drive properties Drive type / Operating voltage ActiveDrive™: The operating voltage (usually 24 VDC) for the ActiveDrive™ motors is provided by an external power supply (included in the delivery). etc.18 1-60 . 4-127 ff ). 4-109 ff ) Section. For special applications other materials are possible like Invar. Torque Motor manufacturer’s information. Stepper motors: PI stepper motors are usually driven in chopper mode. Al: Aluminum N-S: Nonmagnetic stainless steel St: Steel I: Invar Mass Typical tolerance: ±5 % Cable length Typical tolerance: ±10 mm Recommended motor controller Compatible motor controllers are described in the “Servo & Stepper Motor Controllers” (see p. preload. Cat120E Inspirations2009 08/10. Miscellaneous Operating temperature range Safe operation. no damage to the mechanics. The operating voltage is usually given as differential value where the magnitude determines the velocity.). DC motors: DC servo motors require a supply voltage of up to 12 VDC. © Physik Instrumente (PI) GmbH & Co.

Piezo • Nano • Positioning Linear Actuators & Motors Piezo Actuators & Components .

with flexure guidance Piezo tip for micrometer Only 6 mm diameter. 45. – – to 4000 / 20 5. fast Please follow the mounting guidelines on p. Benders. with position sensors PICMA® multilayer bender actuators. P-216 P-225. All linear drives are intended for integraDynamics* ●●❍❍❍ ●●●●❍ ●●●❍❍ ●●❍❍❍ ●●●●❍ ●●●●❍ tion into a customer’s system and feature no guidance. P-235 High PL022. 30. 90 15. 15. P-843 P-844. wide variety. XY. e. long travel miniature chip actuators stacks. optional ball tip Preloaded. 0 to 1000 0 to 1000 0 to 1000 ±250 SGS – – Opt.xxH. P-235 PL022. 4500 / 500 to 1000 / 5 ●●●●● ●●●●● ●●●●● ●●●●❍ -20 to 120 – -20 to 120 – ±30 ±30 var.1 10 to 300 160 to 1600 500. 30. P-845 P-212.xxH PT120 PT-Tube piezo tube PICA™ Thru ring actuators actuators P-111 – P-151 Shear-effect actuator: Up to 3 axes. 1-106 ff 1-62 . 300. XYZ. P-016. P-216. 900. 1-67 Notes on Specifications see p. 3000 / 700 2000 / 300.Piezo • Nano • Positioning Selection Guide: Piezo Actuators & Components Great Variety: Flexure Guided. P-841 P-842. 1-3 ff & 1-23 ff P-010. Opt. for scanning-microscopy. 90 15 to 120. extreme lifetime PICMA® multilayer bender actuators. P-225. 60. 45. PI's piezo ceramic design and manufacturing division. PL122-PL144 PICMA® multilayer bender actuators P-876 Piezoelectric patch transducers P-007– P-056 Stack piezo actuators. long travel P-855. very high forces PICMA® Chip. X. PL055 Multilayer P-882 – P-888 Multilayer force. 30 1/1 1/1 to 775 to 80000 / 300 to 60000 / 250 0. high-force capacity. Smallest multilayer piezo actuators. PI CeraModels P-601 P-855. provides the capability and flexibility to offer highly engineered custom sub-assemblies at a very attractive price. opt.1 / 0.) actuators P-820 Smallest preloaded piezo actuators P-840 – P-841 Preloaded P-842 – P-842 Preloaded. P-025. P-016.xxH. low operating voltage. minimum tolerances PICA™ Shear shear-effect actuator: Compact. Cat120E Inspirations2009 08/10. from 2x2x2 mm PICMA® multilayer stacks. optional water-proof case Preloaded. 1-102 ff More Piezo Actuators and Piezo Motors: See p.20 Piezo tip for micrometer P-810 – P-830 Small (6 mm diam. optional clear aperture ●●●●● ●●●●● ●●●●❍ ●●●●● *Relative to products in this class © Physik Instrumente (PI) GmbH & Co. ferromagnetic end pieces Smallest preloaded piezo translator Preloaded. 400 20 15. Push/Pull Force [N] 30 / 10 100 / 5 Travel [μm] 110.18 P-601 Closed-loop. Integrated position feedback sensors are available for high linearity applications in closed-loop operation. preloaded.20 P-810 – P-830 P-820 P-840. /033. 45 15. open-loop DuraAct™ piezoelectric patch transducers: sensor. Preloaded. 60. 30. Tubes. 6. 8 1 to 10x10x10 ●●●●❍ ●●●●❍ P-007– P-056 PICA™ Stack piezo actuators. 2000 – 5 to 300 5 to 300 4. actuators with optional ball tips water-proof case P-212. 30. co-fired ceramic encapsulation. /055 P-882 – P-888 P-871 PL112 – PL140 P-876 Description Closed-loop.xxH PT120 – PT140 P-111 – P-151 PICA™ Thru ring actuators combine the advantages of piezo tubes with the high forces of stack actuators PT-Tube piezo tube actuators. long travel ranges.xxP P-010. PL033. flexure guided. If offaxis motion cannot be tolerated external guidance is required. 9. P-025. extreme lifetime P-871. The patented PICMA® multilayer long-life piezo actuators with cofired ceramic insulation provide more than 10 times higher service life than conventional actuators. 15 to 180 3 Voltage Range Sensor Page 1-68 1-73 1-70 1-72 1-74 1-76 1-78 1-80 1-92 1-82 1-84 1-94 1-96 1-86 1-88 1-90 1-100 1-98 -20 to 120 SGS -20 to 120 – -20 to 120 – -20 to 120 – -20 to 120 SGS -20–120 0 to 1000 SGS SGS / ●●●●❍ 50 / 1 50 / 10 1000 / 50 800 / 300. low operating voltage. g. actuator & electrical charge generation mic. Shear Actuators Piezo Actuators Overview PI piezo actuators are designed to combine ultra-high performance with long lifetime in industrial and scientific applications. optional ball tip. 45 15. co-fired ceramic encapsulation. Version xxP for even higher dynamics Options and Accessories see p. KG 2008. ceramic encapsulation. P-010 – P-056. Stacks. Subject to change without notice.

stiction or friction Immune to magnetic fields Extremely low steady-state power consumption No wear and tear Vacuum and clean-room compatibility Operation at cryogenic temperatures possible Nanopositioning / Piezoelectrics Nanometrology Micropositioning PICMA® piezoelectric actuators Index Piezoelectric translators are solid-state ceramic actuators which convert electrical energy directly into linear motion (mechanical energy) with virtually unlimited resolution. plates. Sub-Nanometer resolution Large force generation (up to 50.000 N and more) Microsecond-range response No backlash.. Variety of piezoceramic stacks Piezo ceramic components: rings. tubes 1-63 .Piezo • Nano • Positioning Piezoelectric Actuators and Components Advantages of PI Piezoelectric Actuators: ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear.

Cat120E Inspirations2009 08/10. the rugged design ensures reliability. KG 2008.18 lation ࡯ Deformation control and stabilization ࡯ Structural health monitoring ࡯ Energy harvesting 1-64 . ࡯ High-dynamics actuators ࡯ Adaptive systems ࡯ Vibration and noise cancel- Applied directly to a substrate. Closedloop piezo actuators and the corresponding control electronics are offered for higher linearity. For high dynamics applications. PI’s proprietary PICMA® technology with ceramic encapsu- lation stands for high reliability and longer lifetime. high resistance to damage and a lifetime well over 109 cycles. High-Force Piezo Systems The long-established and successful high-force / high-voltage piezo system product line has been improved and completely reworked. Piezo-Electric All-Rounder— DuraAct™ Patch Tranducers The laminated patch transducers are suitable both for actuator and sensor tasks in various fields such as adaptronics. the integrated preload and low electric power requirements of the packaged PICA™ Power actuators is a special advantage. DuraAct™ patch tranducers can detect and produce vibrations or contour deformations at the source.Piezo • Nano • Positioning Piezoelectric Actuators and Components Quality and Selection PI offers a comprehensive assortment of high-resolution piezoelectric actuators and drives for industrial and scientific applications. Subject to change without notice. or used as part of the structure itself. All manufacturing steps from the PZT powder to the finished product are controlled by PI. Even in high-dynamics applications. inside the structure © Physik Instrumente (PI) GmbH & Co. In addition to the hundreds of models pre- sented in this catalog. PI can also deliver custom designs. All high-voltage piezo actuators now make exclusive use of the modern PICA™ Power piezo ceramics.

but are also designed for maximum lifetime under actual operating conditions in industrial environments. where the piezo actuator is supplied with a DC voltage to maintain a position for a long time. All of the polymer-insulated samples have failed after 1. Humidity is the main influence on the longterm reliability in low-dynamics or quasi-static operation modes. Extensive knowhow and the most modern equipment make for the unique flexibility and worldwide leadership in piezo matters. PICMA® actuators are insensitive to high humidity in this test. Nanopositioning / Piezoelectrics Nanometrology Micropositioning Index Long Term Tests Prove DC Reliability PI’s monolithic ceramic-encapsulated design provides better humidity protection than conventional polymer-film insulation. Results of an accelerated DC-lifetimetest of PICMA® actuators compared to conventional actuators (100 V DC. room temperature. While polymer-coated piezos typically only survive 30 days of continuous operation . PI piezo actuators not only show an optimal combination of travel and stiffness. PI’s awardwinning.H. Comparative tests with both PICMA® and conventional multilayer piezo actuators have proven the positive effects of the ceramic encapsulation. The expected MTTF (Mean Time To Failure) for PICMA® is 80 years (700 000 hrs of continuous operation). 90 % R. patented PICMA® actuators are based upon the newest technology which reduces the failure rate by a factor 10 compared to conventionally designed multilayer actuators. 2). Diffusion of water molecules into the insulation layer is greatly reduced by the use of co-fired.PICMA® actuators are still working after more than 4 years! PICMA® piezo actuators (lower curve) compared with polymer-insulated multilayer piezo actuators. Currently PI employs more than 100 people fully dedicated to piezo ceramic research.. outer ceramic encapsulation (fig.). In conventional actuators.Piezo • Nano • Positioning PICMA® Piezo Actuators—Extreme Lifetime. the leakage current begins to rise after only a few hours— an indication of degradation of the insulation and reduced lifetime. PICMA award-winning multilayer piezo actuators feature full-ceramic insulation ® Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. Maximum lifetime means highest possible reliability.600 hrs (MTTF 805 hrs = 1 month) 1-65 . development and production. for Industrial Reliability Requirements Full-Ceramic Encapsulation & Patented Design PI has 4 decades of experience with piezo ceramic actuators in motion control applications in industry and research.

0 x 107 cycles per day) at a unipolar operating voltage of 100 V.0 x 109 cycles at 8 samples PICMA® 5x5x18 using a 116 Hz-sine wave excitation (1. Bosotti et al. crack formation inside the ceramic leading to rising leakage currents and delamination of electrodes under extreme dynamic conditions. PICMA® multilayer piezo actuators show no significant decrease in displacement even after many billions of cycles. University of Milano. the piezo is placed in a vacuum chamber (2 • 10-3 mbar) and subjected to dynamic operation at 90 % of AC tests were performed for 4. Inserted in a cryogenic bath of liquid nitrogen (75 K). a huge improvement over the 80 °C limit common for other. electric contact even after billions of cycles.ws. Cat120E Inspirations2009 08/10.Minimum Outgassing Another advantage of fully ceramic-encapsulation PICMA® actuators is the extended operating temperature range. Long-Term Test under Cryogenic Conditions To suit an application requiring 10 years minimum lifetime under cryogenic conditions. up to 150 °C. polymer-insulated. (Dr. KG 2008. © Physik Instrumente (PI) GmbH & Co. There was no significant decrease in displacement. the lack of polymer insulation and the high Curie temperature make for optimal ultra-high-vacuum compatibility (no outgassing / high bakeout temperatures. 1-66 . Thus.18 the maximum voltage range (>105 V) with an operating frequency up to 1000 Hz. Subject to change without notice. Control measurements were taken every 109 cycles. stable. PI reduces the cracking probability by a special patented design where segmented slots take care of excessive tensional stresses. nor electrical concerning electrical capacitance or resonant frequency. All data are superseded by any new release. the well-known lifetimelimiting factors of conventional designs are humidity. 15 MPa preload. a higher operating temperature allows for higher operating frequencies and duty cycles. The newest release for data sheets is available for download at www.Piezo • Nano • Positioning PICMA® Piezo Actuators Continuous Dynamic Operation Here. neither mechanic concerning the displacement. up to 150 °C). Additionally.. The heat generation in dynamic operation is proportional to the operating frequency. Furthermore. monolithic actuators. 2005) Large Operating Temperature Range . After one month of continuous operation there were no degradations in piezo performance to be measured. the special electrode design ensures excellent. Italy. accelerated lifetime tests with PICMA® piezo actuators have been successfully performed. Optimum UHV Compatibility .pi.

A preload of up to 50% of the blocking force is generally recommended. The applied force must be centered very well. which can also be induced by parallelism errors of the endplates. Do not scratch the coating on the side surfaces. This can be ensured by the use of ball tips. The combination of longterm high electric DC fields and high relative humidity values should be avoided with all piezoelectric actuators. IV. The following precautions are recommended during handling of piezoelectric actuators: I. etc). An exception to this requirement is made for the PICA™Shear actuators.. Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators No pulling force without preload Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. Please. adequate guiding mechanisms etc.Piezo • Nano • Positioning Mounting and Handling Guidelines Adherence to the following guidelines will help you obtain maximum performance and lifetime from your piezo actuators: Do not use metal tools for actuator handling. Avoid acetone and excessive ultrasonic cleaning at higher temperatures. Nanopositioning / Piezoelectrics Nanometrology Micropositioning Index No lateral force or torque Ball tips or flexures to decouple lateral forces or bending forces Ball tips or flexures to decouple bending forces Bolting between plates is not recommended 1-67 . respectively. Ground surfaces are preferred. The environment of all actuators should be as dry as possible. Piezoelectric stack actuators may be stressed in the axial direction only. dry air flow. Use a resistor for discharging. flexible tips. VI. III. Piezoelectric stack actuators without axial preload are sensitive to pulling forces. Temperature changes and load changes will induce charges on the stack electrodes which might result in high electric fields if the leads are not shorted: Should the stack become charged. do not exceed the specified working temperature range of the actuator during curing. because they operate in the shear direction. Piezoelectric stack actuators can be mounted by gluing them between even metal or ceramic surfaces by a cold or hot curing epoxy. Isopropanol is recommended for cleaning. PICMA® actuators are guarded against humidity by their ceramic coating. V. It is important to shortcircuit the piezoelectric stack actuators during any handling operation. Tilting and shearing forces. have to be avoided because they will damage the actuator. Prevent any contamination of the piezo ceramic surfaces with conductive or corrosive substances. II. Other actuators must be protected by other measures (hermetic sealing. rapid discharging—especially without a preload—might damage the stack.

All data are superseded by any new release. Compared to direct-driven piezo translators. the P-601 lever amplified actuators are especially suited for OEM applications. 250 μm.18 Non-Magnetic Versions Feasible ࡯ Outstanding Lifetime Due to PICMA® Piezo Actuators ࡯ Choice of Closed-Loop and Open-Loop Models ࡯ Ideal OEM Actuator for Precision Motion Control in Optics. LEMO Connector P-601. Lever-Amplified Actuator. Medical. 250 μm. P-601 PiezoMove™ lever-amplified actuators cover the range between direct-driven preloaded piezo translators. lever-amplified actuators offer larger travel ranges and much higher lateral stiffness and guiding precision. Subject to change without notice. In addition to the standard steel models. Open-Loop P-601. Compared to single-axis nanopositioning stages. Ordering Information P-601. frictionless flexure guidance. Cat120E Inspirations2009 08/10. PiezoMove™ lever-amplified actuators feature a resolution to 0. Lever-Amplified Actuator. KG 2008. Versions with strain-gauge sensors (SGS) are equipped with a full bridge circuit that is insensitive to thermal drift. 100 μm. Application Example ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Nanopositioning Imaging High-speed switching Patch clamp Micro-dispensing Semiconductor testing Adaptronics / Automation Photonics / integrated optics Biotechnology 1-68 .1SL PiezoMove™ OEM Flexure-Guided. lever-amplified PiezoMove™ P-601 actuators provide large vertical travel ranges up to 400 μm. Lever-Amplified Actuator. fast response and high positioning accuracy in a very small package.1S PiezoMove™ OEM Flexure-Guided. SGS-Sensor.ws. LEMO Connector P-601. Ultra-Straight Motion ࡯ Travel Ranges to 400 μm ࡯ Resolution to 0. They are thus far superior to conventional actuators in reliability and lifetime. 400 μm. they offer significantly smaller sizes. Open-Loop P-601. a very high stiffness and excellent straightness of motion are achieved. SGS-Sensor P-601. 250 μm.4S PiezoMove™ OEM Flexure-Guided.2 nm ࡯ High Dynamics and Stiffness ࡯ Custom Designs with Longer Travel or Faster Response and © Physik Instrumente (PI) GmbH & Co. SGS-Sensor. With settling times of only a few milliseconds and a resolution in the sub-nanometer range they are well suited for both static and dynamic applications. LEMO Connector P-601. such as the P-840 series (see p. Versions without sensors are also available for open-loop applications such as in high-speed switches and pumps.40 PiezoMove™ OEM Flexure-Guided.3S PiezoMove™ OEM Flexure-Guided. 1-74) and single-axis nanopositioning stages. Lever-Amplified Actuator.10 PiezoMove™ OEM Flexure-Guided. 400 μm. Lever-Amplified Actuator. like the P-611 series (see p. 400 μm. special invar and non-magnetic versions are available on request.4SL PiezoMove™ OEM Flexure-Guided. SGS-Sensor P-601. Lever-Amplified Actuator. 100 μm. Lever-Amplified Actuator. SGS-Sensor P-601. PICMA® actuators are the only actuators on the market with ceramic-only insulation.2 nm and a repeatability to 8 nm. Biotech and Microfluidics Applications The flexure-guided. 2-20).30 PiezoMove™ OEM Flexure-Guided. Ceramic Insulated Piezo Actuators Provide Long Lifetime Highest possible reliability is assured by the use of awardwinning PICMA® multilayer piezo actuators. Open-Loop PiezoMove™ Lever-amplified piezo actuators of the P-601 series ࡯ Flexure Guidance for Frictionless. 100 μm. Lever-Amplified Actuator. Together with their small dimensions and the costeffective design. which makes them resistant to ambient humidity and leakage-current failures. The newest release for data sheets is available for download at www.pi. SGS-Sensor.3SL PiezoMove™ OEM Flexure-Guided. Lever-Amplified Actuator.Piezo • Nano • Positioning P-601 PiezoMove™ Z-Actuator Flexure-Guided OEM Piezo Actuator with Long Stroke to 400 μm OEM Actuator with Integrated Guidance With their highly precise.

xS μm μm nm nm % nm μrad min.5 S-version: open leads SL-version: LEMO S-version: open leads SL-version: LEMO Recommended controller / amplifier E-610 controller / amplifier (p. typ.3SL Z P-601.4 12 0.1S P-601.9 S-version: 0.3 SL-version: 1.6 PICMA® P-885 4. 2-110).1 8 20 / 10 SGS 250 250 0.28 350 290 15/10 30 as P-601.3 Open leads (no sensor) kg m ±5 % ±10 mm °C PICMA® P-885 1.8 750 620 30/10 30 0.xS as P-601. Max.3 10 20 / 10 SGS 400 400 0. typ.xS as P-601.xS – – – as P-601.11 -20 to 80 Stainless steel as P-601.4SL Z P-601.Piezo • Nano • Positioning Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear..6 1.4S P-601.38 440 350 20/10 30 0.3 30 20 / 10 – as P-601.05 S-version: 0.xS as P-601.xS N/μm Hz Hz N N ±20 % ±20 % ±20 % Max. Nanopositioning / Piezoelectrics Nanometrology Micropositioning P-601 dimensions in mm Index Technical Data Model Active axes Motion and positioning Integrated sensor Open-loop travel. P-601. typ. closed-loop Repeatability Runout θX.xS – as P-601.3 6 0. SGS 100 100 0. 2-114) 1-69 .5 SL-version: 1.4 as P-601.2 2 0.1 1.xS as P-601.3S P-601. -20 to +120 V Closed-loop travel Open-loop resolution Closed-loop resolution Linearity.x0 Open-loop versions Z Units Tolerance Dynamic operating current coefficient 1. (+20 %/-0 %) calibrated typ.5 PICMA® P-885 3.5 S-version: open leads SL-version: LEMO -20 to 80 Stainless steel 0.08 -20 to 80 Stainless steel 0. typ.1SL Z P-601.3 S-version: 0.xS 0. θY Mechanical properties Stiffness in motion direction Unloaded resonant frequency Resonant frequency @ 30 g Push/pull force capacity in motion direction Lateral force Drive properties Ceramic type Electrical capacitance Miscellaneous Operating temperature range Material Mass without cables Cable length Sensor / voltage connection -20 to 80 Stainless steel 0. E-625 bench-top controller (p.xS as P-601.xS as P-601.3 SL-version: 1.xS μF ±20 % μA/(Hz • μm) ±20 % 0.

Controllers & Amplifiers High-resolution amplifiers and servo-control electronics. PICMA® actuators are the only actuators on Attachment is realized via the ferromagnetic end surfaces. They are thus far superior to conventional actuators in reliability and lifetime.18 ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Outstanding Lifetime Due to PICMA® Piezo Ceramics Travel Range to 60 μm Pushing Forces to 1000 N Pulling Forces to 5 N Sub-Millisecond Response Sub-Nanometer Resolution the market with ceramic-only insulation. 1-67).ws. Read details in Mounting and Handling Guidelines (p. Cat120E Inspirations2009 08/10. Ceramic Insulated Piezo Actuators Provide Long Lifetime Highest possible reliability is assured by the use of awardwinning PICMA® multilayer piezo actuators.830 piezo actuators © Physik Instrumente (PI) GmbH & Co. adapter cables and connectors. which makes them resistant to ambient humidity and leakage-current failures. Subject to change without notice. 1-62). For extensions. Mounting The P-810 and P-830 series translators are high-resolution linear actuators for static and dynamic applications. Piezo Drivers.pi. 2-99 ff ). The newest release for data sheets is available for download at www. see “Accessories” (p. Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ Static and dynamic precision positioning Fiber positioning Laser tuning Patch-Clamp Nanotechnology 1-70 . are described in the “Piezo Drivers / Servo Controllers” section (see p. Design These actuators consist of a highly reliable monolithic multilayer piezoceramic stack protected by a stainless steel case. They provide sub-millisecond response and sub-nanometer resolution. PI offers a variety of preloaded translators for applications involving higher tensile loads (see the “Selection Guide” on p. with epoxy or magnets. both digital and analog. All data are superseded by any new release. 1-104 ff ).Piezo • Nano • Positioning P-810 · P-830 Piezo Actuators For Light and Medium Loads P-810 & P. KG 2008.

P-830 dimensions in mm.08 Nm. 2-136) 1-71 . Operating temperature range: -20 to 120° C. Nanopositioning / Piezoelectrics Nanometrology Micropositioning PTFE PTFE Index P-810 dimensions in mm.. Two 0. Max.5 6.3 0. 2-144 **Dynamic small-signal stiffness is ~ 30 % higher. Case: non-magnetic steel.6 4 6 8 10 16 21 27 20 38 56 22 40 58 76 *The resolution of piezo actuators is not limited by stiction or friction.20 P-830.45 0.10 P-830. Recommended preload for dynamic operation: 10–20 MPa.5 Resonant frequency (unloaded) [kHz] ±20 % 22 15 12 23 14 10 8.5 12.40 0.0 1.20 P-810.7 1.1 m long teflon insulated pigtails. Two 0. Value given is noise equivalent motion with E-503 amplifier p.3 P-810.15 0.0 Dynamic operating current coefficient [μA / (Hz • μm)] 3. Recommended amplifiers / controllers One channel: E-831 amplifier (p.5 12. Technical Data and Product Order Numbers Order number Travel range for 0 to 100 V [μm] ±20 % 15 30 45 15 30 45 60 *Resolution [nm] **Static large-signal stiffness [N/μm] ±20 % 14 7 4 57 27 19 15 Push.Piezo • Nano • Positioning Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. Length L: see table.45 0./ pull force capacity [N] 50 / 1 50 / 1 50 / 1 1000 / 5 1000 / 5 1000 / 5 1000 / 5 Electrical capacitance [μF] ±20 % 0.10 P-810.3 0. end pieces: stainless steel.1 m long teflon insulated pigtails. torque at top piece: 0. E-610 amplifier / controller (p.5 12.0 4.0 3. torque at top piece: 0. Length L: see table. 2-110) Multi-channel: E-663 amplifier (p.0 3.30 P-830.3 0.15 0.5 3. 2-164).5 Mass [g] ±5 % Length L [mm] ±0.0 12.30 P-830. Max.2 Nm.

95) is intended to decouple torque and off-center forces from the piezo ceramic. 2-142) with amplifier module E-503 (multi-channel) (p. Length L: see table Ordering Information P-820. with push/pull forces of less than 3 N. The optional ball tip (P-820. Controllers & Amplifiers High-resolution amplifiers and servo-control electronics.08 0. preloaded monolithic piezo ceramic stack integrated in a stainless steel housing.20 30 0.0 22 -20 to +80 VL 8 N-S 26 P-820. P-820.0 15 -20 to +80 VL 11 N-S 44 P-820.10 15 0.10 Preloaded Piezo Actuator.30 45 0.30 piezo actuators © Physik Instrumente (PI) GmbH & Co. 1-67). which makes them resistant to ambient humidity and leakage-current failures.ws. 45 μm Travel range cribed in the “Piezo Drivers / Servo Controllers” (see p. see “Accessories” in the piezo electronics chapter (see p. Value given is noise equivalent motion with E-503 amplifier (p.15 13 50 / 10 0. 2-136) 1-72 .30 is to be glued onto the top piece in order to provide magnetic coupling. 2-110) Modular system E-500 (p. The magnetic adapter P-176. the actuator can be held by clamping the case. are desP-820 dimensions in mm. Factory Installed Options P-820.0 3. Mounting Mounting is at the foot. Piezo Drivers. Design These actuators consist of a friction-free. 1-168 ff ). They are thus far superior to Technical Data Model Displacement at 0 to 100 V *Resolution **Static large-signal stiffness Push/pull force capacity Max. Read details in Mounting and Handling Guidelines (p. torque limit (on tip) Electrical capacitance The P-820 series piezo translators are high resolution linear actuators for static and dynamic applications. 2-146) **Dynamic small-signal stiffness is ~ 30 % higher Recommended amplifiers / controllers One channel: E-610 controller / amplifier (p.Piezo • Nano • Positioning P-820 Preloaded Piezo Actuators For Light and Medium Loads conventional actuators in reliability and lifetime. 2-99 ff ) section. 15 μm Travel range P-820.08 1.95 Ball Tip Accessories P-176 Magnetic Adapter (see p.08 0.7 3. KG 2008.3 Dynamic operating current coefficient (DOCC) Unloaded resonant frequency fo Operating temperature Voltage connection Mass Material: case. 30 μm Travel range P-820.0 12 -20 to +80 VL 14 N-S 62 Units μm ±20 % nm N/μm μm ±20 % N Nm μF μm ±20 % μA / (Hz • μm) kHz μm μm ±20 % °C g ±5 % mm ±0. Cat120E Inspirations2009 08/10.45 4 50 / 10 0. end pieces Length L Static and dynamic precision positioning Fiber positioning Laser tuning Nanotechnology *The resolution of piezo actuators is not limited by stiction or friction. 1-103) For extensions.30 Preloaded Piezo Actuator. Subject to change without notice.pi.18 ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Outstanding Lifetime Due to PICMA® Piezo Actuators Travel Range to 45 μm Pushing Forces to 50 N Pulling Forces to 10 N Sub-Millisecond Response Sub-Nanometer Resolution Optional Ball Tip winning PICMA® multilayer piezo actuators. All data are superseded by any new release.3 7 50 / 10 0. PICMA® actuators are the only actuators on the market with ceramic-only insulation.20 Preloaded Piezo Actuator. both digital and analog.10 and P-820. The newest release for data sheets is available for download at www. 2-146) Multi-channel: E-663 amplifier (p. They provide sub-millisecond response and sub-nanometer resolution. Ceramic Insulated Piezo Actuators Provide Long Lifetime Highest possible reliability is assured by the use of awardApplication Examples ࡯ ࡯ ࡯ ࡯ P-820.3 3. adapter cables and connectors.

PICMA® actuators are the only ceramicencapsulated PZT actuators on the market.18 Displacement 20 μm Mounts Inside Micrometer Tip Sub-msec Response Sub-nm Resolution Micropositioning Index P-855 piezo translators are high-resolution linear actuators specially designed for integration in micrometer tips.ws. 1-67). 2-142) ±20 % ±20 % ±20 % Tolerance ±20 % Application Examples ࡯ ࡯ ࡯ Laser tuning Static and dynamic positioning of small parts Fiber positioning See the “Piezo Drivers / Servo Controllers” (see p. 2-110) E-500 System (p. cable length 1 m Technical Data Model Open-loop travel @ -20 to 120 V *Open-loop resolution **Static large-signal stiffness Push / pull force capacity Operating voltage range Piezo ceramic type Electrical capacitance Unloaded resonant frequency Operating temperature range Voltage connection Mass Recommended amplifier P-855. They fit the M-227 DC-Mike motorized actuators (see p.5 μF 18 kHz -40 bis +80 °C VL 28 g ±5 % E-610 (p. Accessories Extension cables. Cat120E Inspirations2009 08/10.20 20 μm 0. The newest release for data sheets is available for download at www.Piezo • Nano • Positioning P-855 Miniature Piezo Actuator Micrometer-Mountable Open-Loop Piezo Translator Ordering Information P-855. 2-99 ff) section for our comprehensive line of low-noise modular and OEM control electronics for computer and manual control.pi. 1-42).2 nm 48 N/μm 100 / 5 N -20 to 120 V PICMA® 1. They are thus far superior to conventional actuators in reliability and lifetime. adapters & connectors: see in “Accessories” in the “Piezo Drivers / Servo Controllers” (see p.20 Piezo Actuator for Micrometer Drive Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. 2-168 ff) section. KG 2008. the M-168 Stepper Mike (see p. Notes P-855 dimensions in mm. P-855 actuators provide submillisecond response and subnanometer resolution. Nanopositioning / Piezoelectrics P-855. Noise equivalent motion with E-505 amplifier **Dynamic small-signal stiffness ~50 % higher 1-73 . Superior Lifetime with Ceramic-Encapsulated Piezos Highest possible reliability is assured by the use of awardwinning PICMA® multilayer piezo actuators. All data are superseded by any new release. which makes them resistant to ambient humidity and leakage-current failures. 1-55) motorized actuators and the M-631 to M-633 manual micrometers (see p. Dynamic operating current coefficient (DOCC) 12.. Subject to change without notice. 1-56).20 piezo translator Nanometrology ࡯ ࡯ ࡯ ࡯ © Physik Instrumente (PI) GmbH & Co. The piezo translators consist of a monolithic PICMA® piezo ceramic integrated in a stainless steel housing. Read details in Mounting and Handling Guidelines (p.5 μA/(Hz • μm) *Resolution of piezo actuators is not limited by friction or stiction.

They are thus far superior to conventional actuators in reliability and lifetime. the actuator can be held by clamping the case. Controllers & Amplifiers High-resolution amplifiers and servo-control electronics. Mounting Mounting is at the foot. Static and dynamic Precision positioning Disc-drive-testing Adaptronics Smart structures Active vibration control Switches Laser tuning Patch-Clamp Nanotechnology P-840. 30 μm Travel range P-841. Vacuum Version The P-840 and P-841 series translators are high-resolution linear actuators for static and dynamic applications. Design These translators are equipped with highly reliable multilayer piezo ceramic stacks protected by a non-magnetic stainless steel case with internal spring preload. both Ordering Information P-840.60 Preloaded Piezo Actuator with SGS-Sensor.pi.10 Preloaded Piezo Actuator. They provide sub-millisecond response and sub-nanometer resolution.20 Preloaded Piezo Actuator with SGS-Sensor.18 ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Outstanding Lifetime Due to PICMA® Piezo Ceramic Stacks Travel Range to 90 μm Compact Case Pushing Forces to 1000 N Pulling Forces to 50 N Sub-Millisecond Response Sub-Nanometer Resolution Option: Ball Tip.20 Preloaded Piezo Actuator. Version P-841 with integrated high-resolution strain gauge position sensors provides high precision for closed-loop operation (further details see p. 2-199). KG 2008. Read details in Mounting and Handling Guidelines (p. P-841 dimensions in mm. The newest release for data sheets is available for download at www. 15 μm Travel range P-840. P-841 piezo translators (DIP switch for size comparison) © Physik Instrumente (PI) GmbH & Co. PICMA® actuators are the only actuators on the market with ceramic-only insulation. 60 μm Travel range P-841.10 Preloaded Piezo Actuator with SGS-Sensor. 90 μm Travel range P-840. Length L: See table 1-74 . 15 μm Travel range P-841. 1-67).30 Preloaded Piezo Actuator.95) is intended to decouple torque and off-center forces from the piezo ceramic. up to 150 °C). The optional ball tip (P-840. All data are superseded by any new release. 90 μm Travel range P-841.40 Preloaded Piezo Actuator. 60 μm Travel range P-840. Cat120E Inspirations2009 08/10. 45 μm Travel range P-841. are described in the “Piezo Drivers / Servo Controllers” (see p. with push/pull forces of less than 5 N.30 Preloaded Piezo Actuator with SGS-Sensor.Piezo • Nano • Positioning P-840 · P-841 Preloaded Piezo Actuators Optional with Integrated Position Sensor Optimum UHV Compatibility Minimum Outgassing The lack of polymer insulation and the high Curie temperature make for optimal ultra-highvacuum compatibility (no outgassing / high bakeout temperatures. which makes them resistant to ambient humidity and leakage-current failures. Subject to change without notice.20 is to be glued onto the top piece in order to provide magnetic coupling. The preload makes them ideal for dynamic applications and for tensile loads as well. Ceramic Insulated Piezo Actuators Provide Long Lifetime Highest possible reliability is assured by the use of awardwinning PICMA® multilayer piezo actuators.60 Preloaded Piezo Actuator.40 Preloaded Piezo Actuator with SGS-Sensor. 2-99) section. The magnetic adapter P-176. 45 μm Travel range P-840.ws. Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ digital and analog. Piezo Drivers. High Accuracy in Closed-Loop Operation The standard model P-840 is designed for open-loop positioning. 30 μm Travel range P-840.

Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. high-power) (p. 2-146) ***Dynamic small-signal stiffness is ~ 30 % higher. torque limit (on tip) Electrical capacitance Dynamic operating current coefficient (DOCC) Unloaded resonant frequency fo Operating temperature Voltage connection Sensor connection Mass without cables Material: case. E-625 servo-controller. 2-142) with amplifier module E-505 (high-power) (p.10 to a 3 nm peak-topeak square wave control input signal.8 / 0.35 1.15 % and are shipped with performance reports.3 / 0. 2-110).5 12.0 12.5 6 -20 to +80 LEMO LEMO 62 N-S 122 mm ±0.Piezo • Nano • Positioning Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Response of a P-841.20 30 30 / – SGS / – 0. 2-160) Single channel: modular piezo controller system E-500 (p. 2-147) and E-509 controller (p.5 12.35 9. 2-147) and E-509 controller (p.45 19 1000 50 0. 2-114). E-621 controller module (p.30 45 45 / – SGS / – 0.5 10 -20 to +80 LEMO LEMO 46 N-S 68 P-841.5 18 -20 to +80 LEMO LEMO 20 N-S 32 P-841.60 90 90 / – SGS / – 1.10 P-840.30 P-840.35 3.20 P-840.9 10 1000 50 0. bench-top (p.35 4.6 / 0. 2-142) with amplifier module E-503 (three channels) (p.0 12.5 -20 to +80 LEMO LEMO 54 N-S 86 P-841. Value given is noise equivalent motion with E-503 amplifier.5 14 -20 to +80 LEMO LEMO 28 N-S 50 P-841.10 15 15 / – SGS / – 0.60 P-840.5 8. 2-146) or E-505 (1 per axis.0 12.35 6. Nanopositioning / Piezoelectrics Nanometrology Micropositioning Technical Data Model Open-loop travel @ 0 to 100 V Closed-loop travel Integrated feedback sensor* Closed-loop / open-loop resolution** Static large-signal stiffness*** Pushing forces to 1000 N Pulling forces to 50 N Max.40 P-840. 2-152) (optional) 1-75 .3 27 1000 50 0.2 / 0. (p.15 57 1000 50 0. Recommended amplifiers / controllers Single-channel: E-610 servo-controller / amplifier (p.6 15 1000 50 0.9 / 0. **Resolution of piezo actuators is not limited by stiction or friction. end pieces Length L P-841.40 60 60 / – SGS / – 1.3 g ±5 % nm N/μm ±20 % N N Nm μF ±20 % μA / (Hz • μm) kHz ±20 % °C Units μm ±20 % μm Index *Closed-loop models can attain linearity up to 0. measured with servo-control bandwidth set to 240 Hz and 2 msec setting time.. 2-152) (optional) Multi-channel: modular piezo controller system E-500 (p.

High Accuracy in Closed-Loop Operation P-842 and P-844 are designed for open-loop positioning or use with external feedback./ 0.18 ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Outstanding Lifetime Due to PICMA® Piezo Ceramic Stacks Travel Range to 90 μm Pushing Forces to 3000 N Pulling Forces to 700 N Sub-Millisecond Response Sub-Nanometer Resolution Options: Vacuum Version.45 1.60 P-843.40 P-844. They provide submillisecond response and subnanometer resolution. Subject to change without notice.0 12.0 24.0 36.0 6. KG 2008.30 P-843.5 6.3 / 0.ws./ 0./ 0.40 P-843. see p.30 P-844.40 P-842./ 0.60 P-844.0 4. The preload makes them ideal for dynamic applications (such as precision machining.15 .10 P-842./ 0. The newest release for data sheets is available for download at www.9 / 0.5 3.10 P-844. Versions P-843 and P-845 are equipped with integrated highresolution SGS-position sensors for high precision in closed-loop operation (for furApplication Examples ࡯ Static and dynamic precision positioning Disc-drive-testing Optics Metrology / interferometry Smart structures / adaptronics Precision mechanics / machining Active vibration control Switches Laser tuning ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ P-844 piezo actuators (battery for size comparison) © Physik Instrumente (PI) GmbH & Co.40 P-845.30 P-845.15 0. Ceramic Insulated Piezo Actuators Provide Long Lifetime Highest possible reliability is assured by the use of awardwinning PICMA® multilayer piezo actuators.15 .10 P-845. Optional with Integrated Position Sensors The P-842 / P-843 and P-844 / P-845 series piezo translators are high-resolution linear actuators for static and dynamic applications.0 12.15 0.9 0./ 0.30 P-842.0 P-842.45 1.6 1.8 / 0.20 P-842.5 3.2 / 0.6 . active damping etc./ 0. All data are superseded by any new release.5 6.60 P-845. Cat120E Inspirations2009 08/10.0 1.8 / 0.9 Static large-signal stiffness [N/μm] ±20 % 57 27 19 15 10 57 27 19 15 10 225 107 75 57 38 225 107 75 57 38 Push/pull force capacity [N] 800 / 300 800 / 300 800 / 300 800 / 300 800 / 300 800 / 300 800 / 300 800 / 300 800 / 300 800 / 300 3000 / 700 3000 / 700 3000 / 700 3000 / 700 3000 / 700 3000 / 700 3000 / 700 3000 / 700 3000 / 700 3000 / 700 Electrical capacitance [μF] ±20 % 1.0 36./ 0.45 ./ 0.0 4.3 .20 P-843. Design These translators are equipped with PICMA® multilayer piezo ceramic stacks protected by a non-magnetic stainless steel case with internal spring preload.3 0.3 / 0.60 1-76 .) and for tensile loads as well.0 24.0 6.0 18.0 9.3 0.2 / 0.10 P-843.6 / 0.6 .6 / 0.45 ./ 0.0 9.Piezo • Nano • Positioning P-842 – P-845 Preloaded Piezo Actuators For High Loads and Force Generation.20 P-844.9 / 0. 2-199). Water-Resistant Case ther notes see the nanopositioning tutorial.20 P-845.9 .0 18. PICMA® actuators are the only actuators on Technical Data and Product Order Numbers Model Open-loop travel for 0 to 100 V [μm] ±20 % 15 30 45 60 90 15 30 45 60 90 15 30 45 60 90 15 30 45 60 90 Closed-loop travel [μm]* – – – – – 15 30 45 60 90 – – – – – 15 30 45 60 90 Integrated feedback sensor** – – – – – SGS SGS SGS SGS SGS – – – – – SGS SGS SGS SGS SGS Closed-loop / Open-loop reslolution [nm]*** .pi.6 1.3 .9 0.

20 High vacuum options (see p. 1-102 ff ) Accessories P-176.5 Mass without cable [g] ±5 % 31 42 53 64 86 31 42 53 64 86 84 108 132 156 204 84 108 132 156 204 Length L [mm] P-842. **Resolution of piezo actuators is not limited by stiction or friction. bench-top( p.5 12.5 50 50 50 500 50 50 50 50 50 50 Resonant frequency (unloaded) [kHz] ±20 % 18 14 10 8. 2-146) or E-505 (1 per axis. Max.0S. Recommended amplifiers / controllers Single-channel: E-610 servo-controller / amplifier (p.15 % and are shipped with performance reports.5 6 16 12 9 7. P-843 dimensions in mm. 1-103 ff ) Read details in Mounting and Handling Guidelines (p. ***Dynamic small-signal stiffness is ~ 30 % higher.60 can be applied for protection of the ceramics from shearing forces (see p. 2-114). 2-147) and E-509 controller (p.50 / P-176. Optimum UHV Compatibility Minimum Outgassing The lack of polymer insulation and the high Curie temperature make for optimal ultra-highvacuum compatibility (no outgassing / high bakeout temperatures. Sensor connector: LEMO FFA. torque at top piece: 1 Nm Micropositioning Index Dynamic operating current coefficient [μA / (Hz • μm)] 12.Piezo • Nano • Positioning the market with ceramic-only insulation. adapter cables and connectors.00.50 Flexible tip for P-842 / P-843 (see p. 2-142) with amplifier module E-505 (high-power) (p. Case / end pieces: non-magnetic steel. 2-110).250.5 5. Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. 2-142) with amplifier module E-503 (three channels) (p. high-power. Nanopositioning / Piezoelectrics Nanometrology P-844.5 16 12 9 7. which makes them resistant to ambient humidity and leakage-current failures. 1 m coaxial cable with PUR-insulation.5 12. E-625 servo-controller. Noise equivalent motion with E-503 amplifier (see p.5 12. *Closed-loop models can attain linearity up to 0. 2-146). see “Accessories” in the Piezo Actuators & Components section (p. Piezo Drivers. Length L: see table.5 12.5 12.5 5. see p. They are thus far superior to conventional actuators in reliability and lifetime. 1-103 ff ) For extensions. Controllers & Amplifiers High-resolution amplifiers and servo-control electronics.35 Nm 37 55 73 91 127 37 55 73 91 127 47 65 83 0101 137 47 65 83 101 137 Voltage connection: LEMO FFA. up to 150 °C). 1-103 ff ) P-176. Length L: see table. P-845 dimensions in mm.5 12. PTFE. Max.5 12. both digital and analog. Mounting Mounting is at the foot. 2-147) and E-509 controller (p. with push/pull forces of less than 100 N. The flexible tips P-176. the actuator can be held by clamping the case.5 12..5 12.60 Flexible tip for P-844 / P-845 (see p. 2-160) Single channel: modular piezo controller system E-500 (p. Options P-703.5 6 18 14 10 8. coaxial cable. are described in the “Piezo Drivers / Servo Controllers” section. 1-104 ff ). Temperature range: -40 to 80 °C. 2-152) (optional) Multi-channel: modular piezo controller system E-500 (p.304 connector. E-621 controller module (p. 1-67). torque at top piece: 0. RG 178. 2-152) (optional) 1-77 .

Piezo • Nano • Positioning P-212.1S piezo actuators (CD for size comparison) Please read “Options and Accessories” (page 1-102 ff ) for further information.4S and . even after billions (1.1S and . including different interface / display modules. High Flexibility with PI Amplifiers. . Drivers & Controllers PI offers a wide range of control electronics for piezo actuators from low-power drivers to the high-performance amplifier / controller E-481. The E-500 modular system can be easily upgraded from an amplifier to a servo controller. Mechanical Mounting Mounting is at the foot. For highest positioning accuracy and repeatability. Read details in Mounting and Handling Guidelines (p. High-resolution amplifiers and servo-control electronics.18 ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Travel Range to 180 μm Pushing Forces to 4500 N Pulling Forces to 500 N Sub-millisecond Response Sub-nanometer Resolution Options: Vacuum. 2-169 ff ). with push/pull forces of less than 5 N.ws. Extensions cables. 2-168 ff ) section. read the tutorial “Piezo- Optics Metrology / interferometry Adaptronics Precision engineering / micromechanics Adaptive mechanics Active vibration damping Switches Laser tuning Force generation / materials testing Nanotechnology 1-78 .000. In this mode the actuator displacement is roughly proportional to the applied voltage. Here. 4500 N 0 w/o Sensor S w/SGS Position Sensor P-21 T modified for Low Temperature V modified for High Temperature/Vacuum 1 Travel Range 15 μm 2 Travel Range 30 μm 4 Travel Range 60 μm 8 Travel Range 120 μm 9 Travel Range 180 μm (P-216 only) From left: P-212. 1000 V. 1000 V. 2000 N 6 Preloaded Piezo Actuator. For more information. adapters & connectors: see in “Accessories” in the “Piezo Drivers / Servo Controllers” (see p. All materials used are specifically matched for robustness and lifetime. High Displacement with UltraHigh Reliability PICA™ Power actuators are optimized for high-temperature working conditions and highduty-cycle dynamic applications. The P-212 and P-216 series are high-resolution linear piezo actuators (translators) for static and dynamic applications. All data are superseded by any new release. Endurance tests on PICA™ actuators prove consistent performance. All PICA™ piezo ceramics are specifically designed for high-duty-cycle applications. Cat120E Inspirations2009 08/10. For closed-loop operation PI offers a wide variety of analog and digital controllers. Open-loop operation is ideal for applications where fast response and very high resolution with maximum bandwidth are essential. The optional ball tip is intended to decouple torque and off-center forces from the translator. The newest release for data sheets is available for download at www. both digital and analog. P-216. They provide sub-millisecond Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ response and sub-nanometer resolution. High.000) of cycles. see selection guide in the „Piezo Drivers / Servo Controllers“ section (see p. performance does The standard models are ideal for open loop positioning applications. . 1-67). commanding and reading the target position in absolute values is either not important or carried out by external position sensors (see p. KG 2008. With PI’s extensive applications knowledge. P-216 PICA™ Power Piezo Stack Actuators Preloaded Piezo Actuators (HVPZT) w/ Sensor Option Ordering Information 2 Preloaded Piezo Actuator. Subject to change without notice. the actuator can be held by clamping the case.and Closed-Loop Models for Optimum Dynamics and Linearity electrics in Positioning” (see p.pi. The preload makes them ideal for dynamic applications like precision machining or active damping. Open.and Low-Temperature not come at the price of reliability. Option: P-177.8S.50 Dynamic applications (with E-481): temperature sensor and protective air for PICATM HVPZT © Physik Instrumente (PI) GmbH & Co. These actuators have the friction-free. 2-97 ff ). preloaded PICA™ Power actuators inside. 2-104). select the factory installed closed-loop option with integrated ultrahigh-resolution strain gauge position sensors and operate with PI servo-control electronics. gained over several decades.000.9S.

0B.80 P-216.5 18 4. Input voltage connection: LEMO FGG.8 0.701.2 120 2.20 0 to1000 P-212.3 0.2 180 3. 15 0. typ.4 1. 1-106 ff ) 1-79 .6 0.2 120 2. dimensions in mm. The resolution of piezo actuators is not limited by stiction or friction *** Dynamic small-signal stiffness is ~50 % higher Piezo ceramic type: PICATM Power Operating temperature range: -40 to +80 °C Recommended controller/driver see p.Piezo • Nano • Positioning Linear Actuators & Motors PiezoWalk® Motors / Actuators 0.6 1.2 60 1. End pieces and case of stainless steel.3 0.1 Piezo Index P-212 and P-216.3 0.1173.40 P-212. M4 5 Option Sensor Nanopositioning / Piezoelectrics Nanometrology 9.2 30 0.3 0. 2-100 ff For maximum lifetime.6 0.2 0.2 60 1.05 A A0 -0.5 210 17 60 1 140 12 36 1 80 7 23 1 50 4.15 0.2 μm nm nm % typ. Sensor connection: LEMO FFA.0S.40 P-216.. typ. PUR cable.15 0. shielded Technical Data P-212.90 Unit V Tolerance 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 2000 / 300 2000 / 300 2000 / 300 2000 / 300 4500 / 500 4500 / 500 4500 / 500 4500 / 500 4500 / 500 * Requires SGS sensor.CJA.2 30 0.5 34 7 10 0.6 0.80 P-216. voltages in excess of 750 V should be applied only for short durations See Notes (Technical Data) for further information (p.05 M 9 SW D PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators L 0.2 15 0.5 5 4 11 Micropositioning A SW C M8 7 B 0.5 5.20 P-216.2 0.304.5 0.2 0.5 Patches /Benders/Tubes /Shear. SGS versions are shipped with performance reports ** Measured with an Interferometer.5 10 0.4 1.10 Operating voltage Motion and positioning Closed-loop travel* Closed-loop resolution*/** Open-open resolution** Linearity* Mechanical properties Static large-signal stiffness*** 90 Unloaded resonant frequency Push/pull force capacity Shear force limit Torque limit (on tip) Drive properties Electrical capacitance Dynamic operating current coefficient Miscellaneous Mass (with cable) 110 120 150 210 170 200 250 370 480 g ±5 % 47 5 90 5 180 5 370 5 130 13 250 13 500 13 1000 13 1500 13 nF ±20 % μA/(Hz • μm) ±20 % 17 15 0.6 0.2 0. 0 to1000 P-212. 1 m coaxial cable with PUR insulation. 2-conductor.5 23 1 32 3 23 1 N/μm kHz N N Nm ±20 % ±20 % Max.5 60 12 10 0.10 P-216.

Extensions cables. High Displacement with UltraHigh Reliability PICATM Power actuators are optimized for high-temperature working conditions and highduty-cycle dynamic applications. In this mode the actuator displacement is roughly proportional to the applied voltage.000 N Pulling Forces to 3500 N Travel Ranges to 180 μm Options: Versions for Vacuum.000. 1-67). The newest release for data sheets is available for download at www.8S and . see selection guide in the “Piezo Drivers / Servo Controllers” section (see p.pi. select the factory installed closed-loop option with integrated ultrahigh.ws. The high load capacity and preload makes them ideal for machining applications and active vibration cancellation. P-177. For highest positioning accuracy and repeatability. P-225 and P-235 are preloaded. 30000 N 0 w/o Sensor S w/SGS Position Sensor P-2 5. Read details in Mounting and Handling Guidelines (p.1S (from left) with CD for size comparison © Physik Instrumente (PI) GmbH & Co.00 Water-resistant case High-load piezo actuators P-235.000) of cycles. Subject to change without notice. Drivers & Controllers PI offers a wide range of control electronics for piezo actuators from economical. .1S. For more information. 1000 V. high-load piezo actuators (translators) for static and dynamic applications. High-resolution amplifiers and servo-control electronics. All PICATM piezo ceramics are specifically designed for highdutycycle applications. Endurance tests on PICATM actuators prove consistent performance. High Flexibility with PI Amplifiers. performance does not come at the price of reliability. Cat120E Inspirations2009 08/10. even after billions (1. High. For closed-loop operation a wide variety of analog and digital controllers is available.9S.4S and . P-225.and Low-Temperatures and with Water-Resistant Case al decades. gained over sever- The standard models are ideal for open loop positioning applications. 2-99 ff ).Piezo • Nano • Positioning P-225. Open-loop operation is ideal for applications where the fastest response and the highest bandwidth are essential. 2-169 ff ). All data are superseded by any new release. Open. KG 2008. lowpower piezo drivers to the E-481 high-performance amplifier / controller providing 2000 W of dynamic power. commanding and reading the target position in absolute values is either not important or carried out by an external feedback loop.50 Dynamic applications (with E-481): temperature sensor and protective air for PICATM HVPZT P-706. 12500 N 3 Preloaded High-Load Piezo Actuator. They provide submillisecond re-sponse and subnanometer resolution. With PI’s extensive applications knowledge. All materials used are specifically matched for robustness and lifetime. read Aplication Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Precision engineering / micromechanics Adaptive mechanics Active vibration damping Adaptronics Static and dynamic precision positioning Force generation / materials testing 1-80 . 1000 V. P-235 PICA™ Power Piezo Stack Actuators Preloaded High-Load Piezo Actuators (HVPZT) w/ Sensor Option Ordering Information 2 Preloaded High-Load Piezo Actuator. including different interface / display modules. Here.and Closed-Loop Models for Optimum Dynamics and Linearity the tutorial “Piezoelectrics in Positioning” (see p. These ultra-high-force linear actuators consist of PICATM Power piezoelectric ceramicstacks encapsulated in a stainless steel case with stainless steel end pieces and a frictionless internal spring preload.18 ࡯ ࡯ ࡯ ࡯ ࡯ Extremely High Stiffness Pushing Forces to 30. adapters & connectors: “Accessories” in the “Piezo Drivers / Servo Controllers” (see p. 2-168 ff ) section.resolution strain gauge position sensors and operate with PI servo-control electronics. The E-500 modular system can be easily upgraded from an amplifier to a servo controller. both digital and analog.000. T modified for Low Temperature V modified for High Temperature/Vacuum 1 Travel Range 15 μm Option: 2 Travel Range 30 μm 4 Travel Range 60 μm 8 Travel Range 120 μm 9 Travel Range 180 μm (P-235 only) Please read “Options and Accessories” (page 1-102 ff ) for further information.

SGS versions are shipped with performance reports **Measured with an interferometer. 2-conductor.2 480 14 12500 / 2000 255 1.2 0.20 P-225.2 330 10 12500 / 2000 152 1.15 0.10 P-235.CJA. Sensor connection: LEMO FFA.2 600 10 30000 / 3500 420 2 1100 65 60 1. typ.. The resolution of piezo actuators is not limited by stiction or friction ***Dynamic small-signal stiffness is ~50 % higher Piezo ceramic type: PICATM Power Operating temperature range: -40 to +80 °C Recommended controller/driver see p.5 1300 33 120 2.2 0.3 0.3 0. Nanopositioning / Piezoelectrics Nanometrology Micropositioning Index P-225 and P-235.304.3 0. shielded Technical Data Model Operating voltage Motion and positioning Closed-loop travel* Closed-loop resolution*/** Open-loop resolution** Linearity* Mechanical properies Static large-signal stiffness*** Unloaded resonant frequency Push/pull force capacity Shear force limit Torque limit (on tip) Drive properties El.1173.0S.8 30000 / 3500 147 2 7800 65 typ.10 P-225.2 860 14 30000 / 3500 707 2 550 65 30 0.2 0.2 110 4 12500 / 2000 73 1. typ.6 0.2 200 7 12500 / 2000 84 1. Voltage connection: LEMO FGG.6 0.3 0.6 1.2 380 7 30000 / 3500 232 2 2400 65 120 2.40 P-235.80 P-235. 1 m coaxial cable with PUR insulation.40 P-225.4 1.701. ±20 % μA/(Hz • μm) ±20 % 1-81 .5 630 33 60 1.15 0.4 1.90 Unit V μm nm nm % N/μm kHz N N Nm nF Tolerance 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 15 0. ±20 ±20 % Max. 1-106 ff ) P-225.0B.2 0.6 0. dimensions in mm.Piezo • Nano • Positioning Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. 1 m cable with PUR insultaion.2 210 3.8 0.5 2600 33 15 0.2 150 2.6 0.80 P-235. End pieces and case of stainless steel. capacitance Dynamic operating current coefficient Miscellaneous Mass (with cable) 410 470 610 900 580 690 940 1400 1900 g ±5 % *Requires SGS sensor.9 30000 / 3500 147 2 5100 65 180 3. voltages in excess of 750 V should be applied only for short durations See Notes (Technical Data) for further information (see p.5 320 33 30 0. 2-100 ff For maximum lifetime.20 P-235.

New Production Process. 5 x 5. Such sensors can be easily applied to the actuator surface and exhibit significantly higher stability and linearity than with conventional polymer-insulated actuators. Controllers & High-Voltage Amplifiers High-resolution amplifiers and servo-control electronics. up to 150 °C). They are superior to conventional multilayer actuators in Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ industrial applications and high-endurance situations.ws. Thus the actuators accomplish sub-nanometer resolution in positioning and sub-millisecond response! Increased Lifetime Through Humidity Resistance The monolithic ceramic-encapsulated design provides better humidity protection than poly- Precision mechanics / -machining High-speed switching Active and adaptive Optics Active vibration damping Pneumatic & hydraulic valves Metrology / Interferometry Life science. KG 2008. Read more on PICMA® reliability on page 2-12 ff. 3 x 3.1 m PTFE insulated wire leads and optional rounded top piece for decoupling lateral forces PICMA® actuators. or makes ungainly cooling provisions necessary. PICMA® piezo actuators are available with cross-sections of 2 x 3. Optimum UHV Compatibility Minimum Outgassing The lack of polymer insulation and the high Curie temperature make for optimal ultra-highvacuum compatibility (high bakeout temperatures. 7 x 7 and 10 x 10 mm2 © Physik Instrumente (PI) GmbH & Co. Diffusion of water molecules into the insulation layer is greatly reduced by the use of cofired. At the low end. depending on the load an external preload for dynamic applications is recommended. capacitance. With conventional multilayer actuators.Piezo • Nano • Positioning P-882 · P-888 PICMA® Multilayer Piezo Stack Actuators Ceramic-Insulated High-Power Actuators mer-film insulation. displacement. Piezo Drivers. operation down to a few Kelvin is possible (with reduction in performance specifications). dimensions in mm 1-82 . Ideal for Closed-Loop Operation The ceramic surface of the actuators is extremely well suited for use with resistive or optical fiber strain gauge sensors. outer ceramic encapsulation. where they show substantially longer lifetimes both in static and dynamic operation.pi. temperature stability and lifetime are optimally combined. even in extremely harsh environments.either limits the operating frequency or duty cycle in dynamic operation. both digital and analog.which is proportional to operating frequency . Due to their high resonant frequency the actuators are suitable for highly dynamic applications with small loads. All data are superseded by any new release.18 ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Superior Lifetime Even Under Extreme Conditions Very Large Operating Temperature Range High Humidity Resistance Excellent Temperature Stability High Stiffness Peak Current up to 20 A UHV Compatible to 10-9 hPa Sub-Millisecond Response / Sub-Nanometer Resolution Ideal for Dynamic Operation PICMA® (PI Ceramic Monolithic Multilayer Actuator) piezo stack actuators are characterized by their high performance and reliability. Biotechnology Nanotechnology PICMA® actuator with optional 0. Optimized Piezo Ceramics PICMA® piezo actuators are made from a ceramic material in which the piezoceramic properties such as stiffness. far beyond 80 °C as is common for conventional multilayer actuators. heat generation . The newest release for data sheets is available for download at www. The high Curie temperature of 320 °C gives PICMA® actuators a usable temperature range extending up to 150 °C. Cat120E Inspirations2009 08/10. Subject to change without notice. are described in the “Piezo Drivers / Servo Controllers" section.

3 6.30 P-887.90 P-888.30 P-883. 1 kHz Operating voltage: -20 to +120 V Operating temperature range: -40 to +150 °C Standard Mechanical Interfaces: Ceramics Standard Electrical Interfaces: Solderable pads Available Options: strain gauge sensors.2 3.21 0.5 7 x 7 x 18 7 x 7 x 36 10 x 10 x 13. unloaded.0 Resonant frequency [kHz] ±20 % 135 90 70 135 90 70 135 90 70 40 90 70 40 90 70 40 Index Standard piezo ceramic type: 252 *For optional PTFE insulated wires.15 0. This. Leakage current is an indicator quality and expected lifetime.5 ±20 % 11 ±20 % 15 ±10 % 6.x1 (e. Relative Humidity = 70 % The displacement of PICMA® actuators exhibits very low temperature dependence.10 P-883.5 ±20 % 11 ±20 % 15 ±10 % 6.6 1. special mechanical interfaces.50 P-885. Test conditions: U = 100 VDC.50 P-888.30 P-882.11).22 0.50 P-885.31 0.50 P-887. 1-83 .5 10 x 10 x 18 10 x 10 x 36 Nominal displacement [μm @ 100 V] 6.90 Dimensions AxBxL [mm] 2x3x9 2 x 3 x 13.1 1.0 13.4 4. change order number extension to . makes PICMA® actuators optimal for dynamic operation Nanopositioning / Piezoelectrics Nanometrology Micropositioning Technical Data / Product Order Numbers Order number* P-882. Conventional piezo actuators exhibit increased leakage current after only a few hours. etc. g. Recommended preload for dynamic operation: 15 MPa Maximum preload for constant force: 30 MPa Resonant frequency at 1 Vpp.. P-882. displacement [μm @ 120 V] 8 ±20 % 13 ±20 % 18 ±10 % 8 ±20 % 13 ±20 % 18 ±10 % 8 ±20 % 13 ±20 % 18 ±10 % 38 ±10 % 13 ±20 % 18 ±10 % 38 ±10 % 13 ±20 % 18 ±10 % 38 ±10 % Blocking force [N @ 120 V] 190 210 210 290 310 310 800 870 900 950 1700 1750 1850 3500 3600 3800 Stiffness [N/μm] 24 16 12 36 24 18 100 67 50 25 130 100 50 267 200 100 Electrical capacitance [μF] ±20 % 0. PICMA® piezo actuators (bottom curve) compared with conventional multilayer actuators with polymer insulation (top curve). in combination with their low heat generation.90 P-887. T = 25 °C. Other specifications on request.1 6.10 P-885. free at both sides. The value is halved for unilateral clamping Capacitance at 1 Vpp.5 2 x 3 x 18 3x3x9 3 x 3 x 13.Piezo • Nano • Positioning Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear.1 2.5 3.10 P-882.50 P-883.48 0.5 3 x 3 x 18 5x5x9 5 x 5 x 13.5 ±20 % 11 ±20 % 15 ±10 % 32 ±10 % 11 ±20 % 15 ±10 % 32 ±10 % 11 ±20 % 15 ±10 % 32 ±10 % Max.30 P-888.5 5 x 5 x 18 5 x 5 x 36 7 x 7 x 13.30 P-885. pigtail length 100 mm.35 0. PICMA® actuators are not affected by the high-humidity test conditions.

1S and E-651.6 mm Width. Equipped with high-resolution position feedback sensors they provide better linearity. SGS-Sensor P-871. up to 150 °C). The special bender design allows the direct application of a strain gauge sensor to the surface without the need for a polymer insulation layer in between.6 mm Ceramic Encapsulation for Extended Lifetime Ideal for Scanning Applications Vacuum-Compatible Versions Low Operating Voltage Mounting Hardware Included Special OEM. which makes them resistant to ambient humidity and leakage-current failures.140 PICMA® Multilayer Piezo Bender Actuator.6 mm Width. positioning and beam deflection applications and provide much better accu- vacuum compatibility (no outgassing / high bakeout temperatures.112 closed-loop bender actuators (from left to right) © Physik Instrumente (PI) GmbH & Co.140). stability and repeatability than conventional open-loop actuators.and Bench-Top Amplifiers Available up to 1. 160 μm.2S desktop controllers and the OEM board E-614. P-871. 6. P-871.128 PICMA® Multilayer Piezo Bender Actuator. They feature internal silver-palladium electrodes and ceramic insulation applied in a cofiring process. KG 2008.18 ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Closed-Loop Operation for Superior Accuracy Nanometer-Resolution Displacement to 1. Subject to change without notice. Optimum UHV Compatibility Minimum Outgassing The lack of polymer insulation and the high Curie temperature make for optimal ultra-highOrdering Information P-871.122 and P-871. 9. Closed-Loop Position Control for Higher Accuracy P-871s are ideal devices for scanning.127 PICMA® Multilayer Piezo Bender Actuator. SGS-Sensor P-871. while still providing fast response times in the millisecond range.3 mm Width. 1600 μm. SGS-Sensor P-871.6 mm.5 %. All data are superseded by any new release. The E-651. accuracy and repeatability than other piezo benders on the market.pi. Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Wire bonders Pneumatic valves Fiber optic positioning & switches (Laser). The advantages are faster response. 1-94.128.Piezo • Nano • Positioning P-871 PICMA® Piezo Bender Actuators Low-Voltage Multilayer Piezo Bender Actuators with Position Sensor racy.112 PICMA® Multilayer Piezo Bender Actuator. 11 mm Width. The newest release for data sheets is available for download at www. Due to the thin layers the operating voltage is significantly lower than for classical parallel bimorph bender elements. PICMA® actuators are the only actuators on the market with ceramic-only insulation.140. 9. the units come complete with the mounting hardware. 2-121) are specifically designed to operate P-871 bender actuators. 720 μm.2BS (see p. For ease of installation. cables and connectors. They are thus far superior to conventional actuators in reliability and lifetime. SGS-Sensor P-871.ws. The settling time for a small-signal step (up to 1 % nominal travel) to an accuracy of better than 1 % is between 10 ms (P-871. 9.122 PICMA® Multilayer Piezo Bender Actuator.112) and 30 ms (P-871.6 mm Width. SGS-Sensor Ask about custom designs P-871. Amplifiers. Cat120E Inspirations2009 08/10. P-871 transducers are unique closed-loop piezo benders based on the open-loop PL 122 to PL 140 PICMA® -series multilayer actuators p. P-871 bender actuators achieve longer positioning ranges than typical piezo stack actuators. Drivers & Controllers PI offers a wide range of standard amplifiers and controllers for piezo actuators. Design These multilayer piezoelectric components are manufactured from ceramic layers of only about 50 μm thickness. 400 μm. Ceramic Insulated Piezo Actuators Provide Long Lifetime Highest possible reliability is assured by the use of awardwinning PICMA® multilayer piezo actuators. reduced phase lag and precise position control with non-linearity of <0.Beam steering Micropositioning Acceleration sensors Nanotechnology E-651 2-channel and 1-channel controllers with P-871 bender actuators 1-84 . 720 μm.

Nanopositioning / Piezoelectrics Nanometrology Micropositioning Index P-871 dimensions in mm.122 ±200 SGS 0.140 ±800 SGS 0.. 2-123) Connector: 1 LEMO connector for both sensor and voltage supply Operating temperature range: -20 to +85 °C.127 ±360 SGS 0.5 0.1 2540 480 P-871.5 0.112* ±80 SGS 0.002 ±0.02 ±2.5 2 x 1.0 2 x 3. capacitance at 1 Vpp.0 2 x 1.003 ±1.4 1010 220 P-871.0007 ±0.2 340 100 P-871.01 ±1.4 560 145 P-871.128* ±360 SGS 0. 1-85 .5 g load P-871.5 0.5 0.1 2 x 2.5 0. ** to +150 °C Resonant frequency at 1 Vpp. cable length >1 m Technical Data Model Closed-loop travel Integrated feedback sensor Closed-loop linearity Static large-signal stiffness Blocking force Electrical capacitance Unloaded resonant frequency Resonant frequency @ 6. Other specifications on request.0 195 60 % N/μm N ±20 % μF ±20 % Hz ±20 % Hz ±20 % Units μm Operating voltage: 0 to 60 V (±30 V) Recommended driver / controller: E-651 bench top / E-614 PCI card (p.Piezo • Nano • Positioning Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. 1 kHz All specifications depend on the real clamping conditions and on the applied mechanical load.5 2 x 4.

Rectangular.ws. leadtimes are short and quality is outstanding. Triangular. both PICA™-Stack dimensions. p.000. Subject to change without notice. . see technical data table for further information Variety of standard and custom PICA™ Stack piezo actuators © Physik Instrumente (PI) GmbH & Co.pi. let us provide you with a custom design. KG 2008. 1-80). Ultra-High Reliability. gained over several decades.. With our extensive applications Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ knowledge.000.) ࡯ Custom Load / Force Ranges ࡯ Custom Flat or Spherical Endplates (Alumina. Cat120E Inspirations2009 08/10.Piezo • Nano • Positioning P-007 – P-056 PICA™ Stack Actuator Piezo actuator for highly dynamic applications Flexibility / Short Leadtimes All manufacturing processes at PI Ceramic are set up for flexibility. PICA™ Stack piezo actuators are delivered with metal endcaps for improved robustness and reliability. All standard and custom actuators are delivered with performance test sheets. 1-86 . 2-99 ff ) section.40 digital and analog. All data are superseded by any new release. are descri bed in the “Piezo Drivers / Servo Controllers” (see p.18 ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ High Load Capacity to 100 kN High Force Generation to 80 kN Large Cross Sections to 56 mm Diameter A selection of Variety of Shapes Extreme Reliability >109 Cycles Sub-Millisecond Response. All materials used are specifically matched for robustness and lifetime. Should our standard actuators not fit your application. Nanopositioning High-load positioning Precision mechanics / machining Semiconductor technology / test systems Laser tuning Switches Smart structures (Adaptronics) Standard actuators are covered with heat-shrink tube. The combination of high displacement and low electrical capacitance provides for excellent dynamic behavior with re duced driving power requirements..000 ) of cycles. The newest release for data sheets is available for download at www. Low Power Requirements PICA™ piezo actuators are specifically designed for highduty-cycle applications. Piezo Drivers. Controllers & High-Voltage Amplifiers High-resolution amplifiers and servo-control electronics. 1-78. even after billions (1. even for small quantities.. Some of our custom capabilities are listed below: ࡯ Custom Materials ࡯ Custom Voltage Ranges ࡯ Custom Geometries (Circular. shown here is the model P-025. Sapphire. Sub-Nanometer Resolution Vacuum-Compatible Versions Custom PICA™-Stack actuator with 350 μm displacement PICA™ Stack piezo ceramic actuators are offered in a large variety of standard shapes and sizes with additional custom designs to suit any application. For preloaded versions with steel casings (see p. we know how to build performance that does not come at the price of reliability. Endurance tests on PICA™ actuators prove consistent performance..) ࡯ Extra-Tight Length Tolerances ࡯ Integrated Piezoelectric Sensor Discs ࡯ Special High / Low Temperature Versions ࡯ Vacuum Compatible Versions Because all piezoelectric materials used in PICA™ actuators are manufactured at PI Ceramic. Layer Thickness . Glass. High Displacement. Our engineers will work with you to find the optimum solution at a very attractive price.

90 P-025. Nanopositioning / Piezoelectrics Technical Data / Product Order Numbers Order number P-007. each layer wired individually.80 P-056.5 to 2 mm thick (depends on model) Standard electrical interfaces: two PTFE-insulated wires.150 P-025.90 Displacement [μm] -10/+20% 5 15 30 60 5 15 30 60 120 15 30 60 120 180 15 30 60 120 180 250 300 15 30 60 120 180 30 60 120 180 30 60 120 180 30 60 120 180 Diameter D [mm] 7 7 7 7 10 10 10 10 10 16 16 16 16 16 25 25 25 25 25 25 25 35 35 35 35 35 45 45 45 45 50 50 50 50 56 56 56 56 Length L [mm] ±0.80 P-016. Unpackaged Stack Actuators Custom PICA™-Stack actuator.80 P-050.20 P-025. 0. Nanometrology Micropositioning Index 1-87 .20 P-016.00 P-007.40 P-016.40 P-010. non magnetic.40 P-035. pigtail length 100 mm Available options: integrated piezo force sensor or strain gauge sensors.00 P-010. 1 kHz blocking force at 1000 V Operating voltage: 0 to 1000 V Operating temperature range: -20 to +85 °C Standard mechanical interfaces: steel plates.20 P-007.90 P-050. Patches /Benders/Tubes /Shear. The value is halved for unilateral clamping Capacitance at 1 Vpp.10 P-025. free at both sides.40 P-056.80 P-045. etc.90 P-045.40 P-045.80 P-016.40 P-050.10 P-016.20 P-045.10 P-007.40 P-010.90 P-056.20 P-056.5 8 17 29 54 8 17 30 56 107 17 29 54 101 150 18 30 53 101 149 204 244 20 32 57 104 153 33 58 105 154 33 58 105 154 33 58 105 154 Blocking force [N] 650 850 1000 1150 1400 1800 2100 2200 2400 4600 5500 6000 6500 6500 11000 13000 15000 16000 16000 16000 16000 20000 24000 28000 30000 31000 39000 44000 49000 50000 48000 55000 60000 61000 60000 66000 76000 78000 Stiffness [N/μm] 130 59 35 19 270 120 71 38 20 320 190 100 54 36 740 440 250 130 89 65 54 1300 810 460 250 170 1300 740 410 280 1600 910 500 340 2000 1100 630 430 Capacitance [nF] ±20% 11 33 64 130 21 64 130 260 510 180 340 680 1300 2000 400 820 1700 3400 5100 7100 8500 700 1600 3300 6700 10000 2800 5700 11000 17000 3400 7000 14000 22000 4300 8900 18000 27000 Resonant frequency [kHz] 126 59 36 20 126 59 35 20 10 59 36 20 11 7 56 35 21 11 7 5 5 51 33 19 11 7 32 19 10 7 32 19 10 7 32 19 10 7 Standard piezo ceramic type: PIC 151 Recommended preload for dynamic operation: 15 MPa Maximum preload for constant force: 30 MPa Resonant frequency at 1 Vpp.20 P-050.20 P-035.10 P-035. vacuum compatible. unloaded..20 P-010.10 P-010.200 P-035. Other specifications on request.40 P-025.Piezo • Nano • Positioning Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Custom PICA™-Stack actuators with rectangular cross-sections.90 P-025.80 P-025.80 P-035.

a variety of analog and digital controllers is also available.. PI also designs custom amplifiers and controllers (see p.. Rectangular.18 ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Operating Temperature to 150 °C High Load Capacity to 80 kN High Force Generation to 70 kN Large Cross Sections to 56 mm Diameter Extreme Reliability >109 Cycles Sub-Millisecond Response. let us provide you with a custom design. With PI’s extensive applications knowledge. Should our standard actuators not fit your application. All materials used are specifically matched for robustness and lifetime. The newest release for data sheets is available for download at www. Variety of PICATM Power piezo stack actuators from 5 μm to 180 μm travel range © Physik Instrumente (PI) GmbH & Co. Some of our custom capabilities are listed below: ࡯ Custom Materials ࡯ Custom Voltage Ranges ࡯ Custom Geometries (Circular. All data are superseded by any new release.000) of cycles.xxP PICA™ Power Actuator Piezo Stack Actuators for High-Level Dynamic Applications Flexibility / Short Leadtimes All manufacturing processes at PI Ceramic are set up for flexibility. Glass. Sapphire. KG 2008. performance does not come at the price of reliability.000. The modular E-500 system can be upgraded from an amplifier to a servo-controller and offers a variety of computer interfaces. Our engineers will work with you to find the optimum solution at a very attractive price. All PICA™ piezo ceramics are specifically designed for highduty-cycle applications.Piezo • Nano • Positioning P-010. Subject to change without notice.. . Nanopositioning Active vibration damping High-load positioning Precision mechanics / -machining Semiconductor technology / test systems Laser tuning Switches Smart structures (Adaptronics) Nanotechnology OEM-PICA™ Power piezo actuators are available with cross sections to 56 mm 1-88 . Layer Thickness . from lowpower drivers to the ultra-highperformance E-481 power amplifier delivering 2000 W of dynamic power. High Displacement with Ultra-High Reliability PICA™ Power actuators are optimized for high-temperature working conditions and high-duty-cycle dynamic applications.) ࡯ Custom Load / Force Ranges ࡯ Custom Flat or Spherical Endplates (Alumina. leadtimes are short and quality is outstanding. All standard and custom actuators are delivered with performance test sheets. Controllers & High-Voltage Amplifiers PI offers a wide range of piezo control electronics. Piezo Drivers.xxP – P-056. even for small quantities.pi. Sub-Nanometer Resolution UHV Versions to 10-9 hPa Non-Magnetic Versions Temperature Sensor PT1000 Applied PICA™ Power piezoceramic stack actuators are offered in a large variety of standard shapes and sizes. gained over several decades.) ࡯ Extra-Tight Length Tolerances ࡯ Integrated Piezoelectric Sensor Discs ࡯ Special High / Low Temperature Versions ࡯ Vacuum Compatible Versions Because all piezoelectric materials used in PICA™ actuators are manufactured at PI Ceramic. Based on the PIC 255 material. 2-98 ff ). Endurance tests on PICA™ actuators prove consistent performance. even after billions (1. Triangular.ws. with additional custom designs to suit any application. PICA™ Stack Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Power actuators are optimized for high-temperature working conditions and high-duty-cycle dynamic applications.. Cat120E Inspirations2009 08/10. Of course.000. For closedloop positioning applications.

80P P-016. Other specifications on request.90P P-025.00P P-010.80P P-016. pigtail length 100 mm Available options: integrated piezo sensor or strain gauge sensors. unloaded. Nanopositioning / Piezoelectrics Nanometrology Custom preloaded PICA™ Power piezo actuator with forced-air cooling Micropositioning Index PICA™ Power dimensions in mm.90P P-035.80P P-056. 1 kHz blocking force at 1000 V Operating voltage: 0 to 1000 V Operating temperature range: -20 to +150 °C Standard mechanical interfaces: steel plates. non magnetic.20P P-045.40P P-010.40P P-035. vacuum compatible.5 9 18 31 58 111 18 31 58 111 163 20 33 60 113 165 21 34 61 114 166 36 63 116 169 36 63 116 169 Blocking force [N] 1200 1800 2100 2200 2300 4500 5400 5600 5900 6000 9900 12000 13000 14000 14000 18000 23000 26000 28000 29000 36000 41000 44000 45000 54000 66000 68000 70000 Stiffness [N/μm] 240 120 68 37 19 300 180 94 49 33 660 400 220 120 80 1200 760 430 230 160 1200 680 370 250 1800 1100 570 390 Capacitance [nF] ±20% 17 46 90 180 370 130 250 510 1000 1600 320 630 1300 2600 4000 530 1200 2500 5200 7800 2100 4300 8800 13000 3300 6700 14000 21000 Resonant frequency [kHz] 129 64 37 20 10 64 37 20 10 7 58 35 19 10 7 55 34 19 10 7 32 18 10 7 32 18 10 7 Standard piezo ceramic type: PIC 255 Recommended preload for dynamic operation: 15 MPa Maximum preload for constant force: 30 MPa Resonant frequency at 1 Vpp.80P P-025.10P P-025.40P P-025.20P P-056.5 to 2 mm thick (depends on model) Standard electrical interfaces: two PTFE-insulated wires.10P P-010.20P P-016..40P P-016. 0. see technical data table for further information Technical Data / Product Order Numbers Order number P-010.20P P-035.90P P-056. etc. The value is halved for unilateral clamping Capacitance at 1 Vpp.80P P-045.90P Displacement [μm] -10/+20% 5 15 30 60 120 15 30 60 120 180 15 30 60 120 180 15 30 60 120 180 30 60 120 180 30 60 120 180 Diameter D [mm] 10 10 10 10 10 16 16 16 16 16 25 25 25 25 25 35 35 35 35 35 45 45 45 45 56 56 56 56 Length L [mm] ±0.40P P-056.40P P-045.20P P-010.80P P-035.Piezo • Nano • Positioning Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear.90P P-045.10P P-016.10P P-035. 1-89 .20P P-025.

Sapphire. Low Power Requirements PICA™ piezo actuators are specifically designed for highduty-cycle applications. offered in a large variety of standard shapes and sizes with additional custom designs to meet all customer requirements.pi.Piezo • Nano • Positioning P-010.xxH PICA™ Thru Actuator High-Load Piezo Stack Actuators with Aperture duced driving power requirements. With our extensive applications knowledge. Furthermore the electrical consumption is reduced due to the decreased electrical capacitance. Some of our custom capabilities are listed below: ࡯ Custom Materials ࡯ Custom Voltage Ranges ࡯ Custom Geometries (Circular. Subject to change without notice. Ultra-High Reliability.000.) ࡯ Custom Load / Force Ranges ࡯ Custom Flat or Spherical Endplates (Alumina. we know how to build performance that does not come at the price of reliability. Piezo Drivers. . see technical data table for further information Optics Image stabilization Laser tuning Laser treatment Precision mechanics / -machining Confocal microscopy Nanopositioning Customized PICA™ Thru actuator discs 1-90 . are described in the “Piezo Drivers / Servo Controllers” section. Cat120E Inspirations2009 08/10. The clear aperture faciliApplication Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ tates transmitted-light applications.. even for small quantities. Rectangular. Flexibility / Short Leadtimes All manufacturing processes at PI Ceramic are set up for flexibility. Controllers & High-Voltage Amplifiers High-resolution amplifiers and servo-control electronics..18 PICA™ Thru actuators are hollow piezo stack actuators. Should our standard actuators not fit your application. KG 2008. let us provide you with a custom design.ws. All materials used are specifically matched for robustness and lifetime. leadtimes are short and quality is outstanding. both digital and analog. They combine the advantage of a clear aperture with the strength and force generation of stack actuators. All standard and custom actuators are delivered with performance test sheets. Endurance tests on PICA™ actuators prove consistent performance.. gained over several decades. All data are superseded by any new release. Layer Thickness . even after billions (1. These tubular devices are highresolution linear actuators for static and dynamic applications.. Sub-Nanometer Resolution Vacuum-Compatible Versions © Physik Instrumente (PI) GmbH & Co. PICATM Thru piezo stack actuators with clear aperture ࡯ Clear Aperture for Transmitted-Light Applications for ࡯ ࡯ ࡯ ࡯ ࡯ Mechanical Preloading Extreme Reliability >109 Cycles Large Cross Sections to 56 mm Diameter Variety of Shapes Sub-Millisecond Response. The combination of high displacement and low electrical capacitance provides for excellent dynamic behavior with re- PICA™ Thru dimensions in mm.000) of cycles.xxH – P-025. Triangular. Our engineers will work with you to find the optimum solution at a very attractive price. The newest release for data sheets is available for download at www.) ࡯ Extra-Tight Length Tolerances ࡯ Integrated Piezoelectric Sensor Discs ࡯ Special High / Low Temperature Versions ࡯ Vacuum Compatible Versions Because all piezoelectric materials used in PICA™ actuators are manufactured at PI Ceramic.000. High Displacement. Glass.

15H P-010. pigtail length 100 mm Available options: integrated force piezo sensor or strain gauge sensors. 250 μm displacement.5–2 mm thick (depends on model) Standard electrical interface: two PTFE-insulated wires. vacuum compatible. 8 mm inner diameter.05H P-016.20H P-010.20H P-025.5 5 5 5 5 5 5 5 8 8 8 8 8 8 8 16 16 16 16 7 12 15 21 27 40 54 7 12 15 21 27 40 52 16 27 51 66 Blocking force [N] 1200 1300 1700 1500 1800 1600 1800 2900 3400 4100 3800 4500 4000 4700 7400 8700 9000 9600 Stiffness [N/μm] 230 130 110 76 59 40 29 580 340 270 190 150 100 78 490 290 150 120 Capacitance [nF] ±20 % 15 29 40 59 82 120 180 42 83 120 170 230 340 490 220 430 920 1200 Resonant frequency [kHz] 144 84 67 48 39 28 21 144 84 67 48 39 28 21 63 39 22 17 Piezo ceramic type PIC 151 Recommended preload for dynamic operation: 15 MPa Maximum preload for constant force: 30 MPa Resonant frequency at 1 Vpp. Ask about custom designs and further specifications. Pen for size comparison Technical Data / Product Order Numbers Order numbers P-010..10H P-010.20H) PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. non-magnetic. 1 kHz Blocking force at 1000 V Operating voltage range: 0 to 1000 V Operating temperature range: -20 to +85 °C Standard mechanical interface (top & bottom): ceramic.40H P-025.00H P-016.05H P-010.10H P-025.10H P-016.20H P-016.40H P-016.00H P-010.50H Displacement Diameter [μm] -10/+20 % OD [mm] 5 10 15 20 30 40 60 5 10 15 20 30 40 60 15 30 60 80 10 10 10 10 10 10 10 16 16 16 16 16 16 16 25 25 25 25 Diameter Length L ID [mm] [mm] ±0. free at both sides. 0.15H P-016.40H P-025. etc. 1-91 . unloaded. The value is halved for unilateral clamping Capacitance at 1 Vpp. Nanopositioning / Piezoelectrics Nanometrology Micropositioning Index Custom PICA™ Thru piezo actuator with 56 mm outside diameter.30H P-010.Piezo • Nano • Positioning Linear Actuators & Motors Standard actuators are delivered with black heat shrink tube (shown here is the model P-010.30H P-016.

Thus the actuators accomplish subnanometer resolution in positioning and sub-millisecond response! Increased Lifetime Through Humidity Resistance The monolithic ceramic-encapsulated design provides better humidity protection than polymer-film insulation.2 2. With conventional multilayer actuators.31) Resonant frequency at 1 Vpp. The value is halved for unilateral clamping Capacitance at 1 Vpp. displacement. Controllers & High-Voltage Amplifiers High-resolution amplifiers and servo-control electronics. Biotechnology Photonics * For optional PTFE insulated wire leads change order number extension to . 1 kHz Operating voltage: -20 to +100 V Operating temperature range: 150 °C Standard electrical interfaces: Solderable pads Other specifications on request.30 Static and dynamic precision positioning Laser tuning Micro-dispensing Metrology / Interferometry Life science. B. both digital and analog. PICMA® chip miniature piezo actuator. PL022. Cat120E Inspirations2009 08/10. The newest release for data sheets is available for download at www.2 Blocking force [N] >120 >300 >500 Electrical Resonant capacitance frequency [nF] ±20 % [kHz] 25 50 250 >300 >300 >300 PL022. All data are superseded by any new release.30 PL033. operation down to a few Kelvin is possible (with reduction in performance specifications). temperature stability and lifetime are optimally combined. they are ideally suited to high-level dynamic applications. paper clip for size comparison Optimum UHV Compatibility – Minimum Outgassing The lack of polymer insulation and the high Curie temperature make for optimal ultra-highvacuum compatibility (high bakeout temperatures. Providing sub-nanometer resolution and sub-millisecond response. Diffusion of water molecules into the insulation layer is greatly reduced by the use of cofired. outer ceramic encapsulation. Due to their high resonant frequency the actuators are suitable for highly dynamic applications with small loads. Piezo Drivers.Piezo • Nano • Positioning PL022 · PL033 · PL055 PICMA® Chip Actuators Miniature Multilayer Piezo Stack Actuators conventional multilayer actuators.2 2. New Production Process. unloaded. The high Curie temperature of 320 °C gives PICMA® actuators a usable temperature range extending up to 150 °C. g. up to 150 °C). TH.x1 (e.30 PL055. Recommended preload for dynamic operation: 15 MPa Maximum preload for constant force: 30 MPa 1-92 . Optimized Piezo Ceramics PICMA® actuators are made from a ceramic material in which the piezoceramic propApplication Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Technical Data / Product Order Numbers Order number* Dimensions Nominal A x B x TH displacement in mm [μm @ 100 V] ±20 % 2x2x2 3x3x2 5x5x2 2. See technical data table for A. Lateral tolerances for PL055 0. are described in the “Piezo Drivers / Servo Controllers” section. Subject to change without notice. free at both sides. dimensions in mm. KG 2008. far beyond 80 °C as is common for Smallest Dimensions – High Performance PICMA® Chip actuators sized from 2 x 2 x 2 mm are the smallest monolithic multilayer piezo stack actuators available. capacitance. or makes ungainly cooling provisions necessary.ws.18 ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Superior Lifetime Even Under Extreme Conditions Ultra-Compact: from 2 x 2 x 2 mm Ideal for Dynamic Operation Sub-Millisecond Response Sub-Nanometer Resolution Vacuum Compatible to 109 hPa High Humidity Resistance erties such as stiffness. At the low end.pi. heat generation – which is proportional to operating frequency – either limits the operating frequency or duty cycle in dynamic operation. PICMA® chip miniature piezo actuators are the smallest ceramic encapsulated multilayer piezo actuators available.15 mm © Physik Instrumente (PI) GmbH & Co. depending on the load an external preload for dynamic applications is recommended.

The award-winning PICMA® actuator technology is a result of PI Ceramic’s research and development. tubes Nanopositioning / Piezoelectrics Nanometrology Micropositioning Index Variety of materials: ࡯ lead zirconate titanate (PZT). piezo composite materials 1-93 . Apart from the standard types a multitude of applicationspecific and custom-engineered modifications can be delivered. custom design) ࡯ rings. shape) Patch transducers.. shear elements (plates. and innovative drive solutions such as PILine® ultrasonic ceramic motors and NEXLINE® highforce ceramic motors are based on piezoelectric actuators from PIC. Piezoceramic Materials & Components Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. worldclass supplier of high-performance piezoelectric actuator and transducer components and subassemblies.de).Piezo • Nano • Positioning Piezoelectric Actuators & Components from PI Ceramic─ Leading in Piezo Technology PI Ceramic—a PI Subsidiary —is a long-standing. plates. rings) Custom electrodes (material.piceramic. see the PI Ceramic catalogs and Website (www. PI Ceramic provides a wide range of standard piezoelectric actuator components and develops and produces all piezo ceramic drive systems employed in PI’s precision positioning systems. Piezoceramic rings. block. tubes ࡯ ࡯ For more information on piezoceramic materials and components. barium titanate Variety of shapes: discs (rod.

these devices offer improved humidity resistance due to the ceramic encapsulation. is the drastically reduced (by a factor of 3 to 10) operating voltage of only 60 V. similar to a classical parallel bimorph.18 PICMA® multilayer bender piezo actuators provide a deflection of up to 2 mm. Advantages PICMA® Bender piezo actuators offer several advantages over classic bimorph components manufactured by gluing together two ceramic plates (0. The E-650. The reduced voltage allows smaller drive electronics and new applications. Due to their high resonant frequency the actuators are suitable for highly dynamic applications with small loads. At the low end. Wire bonding Pneumatic valves Fiber optic switches (Laser)-Beam steering Micropositioning Acceleration sensors Bender actuators with strain gauge positioning sensors are available with product number P-871 1-94 . KG 2008.1 to 1 mm thick): faster response time and higher stiffness. however. The main advantage. They feature internal silver-palladium electrodes and ceramic insulation applied in a cofiring process. outer ceramic encapsulation. up to 150 °C). 2-122) are especially designed for operating the PICMA® bender actuators. Additionally.and Bench-Top Amplifiers Available © Physik Instrumente (PI) GmbH & Co. heat generation – which is proportional to operating frequency – either limits the operating frequency or duty cycle in dynamic operation. Closed-Loop Version For closed-loop positioning the versions P-871 with integrated strain gauge sensors are available (see p. or makes ungainly cooling provisions necessary. forces up to 2 N and response times in the millisecond range. such as in medical equipment. 1-84). Subject to change without notice. The newest release for data sheets is available for download at www.pi. Diffusion of water molecules into the insulation layer is greatly reduced by the use of cofired. With conventional multilayer actuators. Cat120E Inspirations2009 08/10. ࡯ Ceramic Encapsulation for Better Protection and Longer ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Lifetime Positioning Range up to 2 mm Fast Response (10 msec) Nanometer-Range Resolution Low Operating Voltage Vacuum-Compatible Versions to 10-9 hPa Available with Integrated Position Sensor Special OEM. Optimum UHV Compatibility – Minimum Outgassing The lack of polymer insulation and the high Curie temperature make for optimal ultra-highvacuum compatibility (high bakeout temperatures.Piezo • Nano • Positioning PL112 · PL140 PICMA® Bender Actuators Multilayer Piezo Bender Actuators with High Travel and Low Operating Voltage Bender actuators with optional wire leads (order number extension . Customized piezo electronics are developed on request.x1). micro processor for size comparison Increased Lifetime Through Humidity Resistance The monolithic ceramic-encapsulated design provides better humidity protection than polymer-film insulation. operation down to a few Kelvin is possible (with reduction in performance specifications). The benders have two Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ outer active areas and one central electrode network dividing the actuator in two segments of equal capacitance. far beyond 80 °C as is common for conventional multilayer actuators. The high Curie temperature of 320 °C gives PICMA® actuators a usable temperature range extending up to 150 °C. Drivers and Controllers PI offers a wide selection of low noise amplifiers and controllers for piezo actuators (see section „Piezo Electronics“).ws.00 and E-650. These multilayer piezoelectric components are manufactured from ceramic layers of only about 50 μm thickness. depending on the load an external preload for dynamic applications is recommended.0E piezo amplifiers ( see p. All data are superseded by any new release.

**to +150 °C Resonant frequency at 1 Vpp.10 PL128.x 1 (e.65 31.1 2 x 2.75 45.0 x 9.5 Electrical capacitance [μF] ±20 % 2 x 1.0 Resonant frequency [Hz] ±20 % >1000 660 380 360 160 *For optional PTFE insulated wire leads change order number extension to .10 Operating voltage [V] 0 .8 x 9.11) Operating temperature range: -20 to +85 °C. 1 kHz All parameters depend on actual clamping conditions and applied load. See table for dimensions Unpackaged stack Actuators Patches /Benders/Tubes /Shear.65 25. 1-95 .2 2 x 4.6 x 0. Nanopositioning / Piezoelectrics Nanometrology Micropositioning Index Differential control of PICMA® bender actuators Pin Assignments: 1: -30 V [or GND] 2: -30 V to +30 V [or 0 to 60 V] 3: +30 V [or +60 V] Dimensions in mm Technical Data / Product Order Numbers Order number* PL112.60 Blocking force [N] ±2.60 (±30) 0 .0 ±1.1 ±1.60 (±30) 0 .4 2 x 1.5 ±0..10** PL122.5 x 6.3 x 0.0 ±0. PL112. Ask about custom designs and further specifications.0 x 9. g. capacitance at 1 Vpp.60 (±30) Nominal displacement [μm] ±20 % ±80 ±250 ±450 ±450 ±1000 Free length [mm] 12 22 27 28 40 Dimensions LxWxT [mm] 17.6 x 0.60 (±30) 0 .6 x 0.10 PL127.0 x 0.0 x 11.10** PL140.Piezo • Nano • Positioning Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Recommended clamping: non-conducting material with rounded clamping end face for protection of ceramics (not included).60 (±30) 0 .4 2 x 3.65 35.

Golf ball for size comparison and bending properties ࡯ Flexible choice of piezo- ࡯ Actuator. Transformation of mechanical vibrations of up to some kilohertz into the corresponding potential difference can yield electrical power in the milliwatt range. Used as bender actuators. Cat120E Inspirations2009 08/10. The newest release for data sheets is available for download at www. KG 2008.ws. Energy Harvesting: Self-Sustaining Systems in a Small Package One possible application of DuraAct™ patch transducers is in the field of energy harvesting. For this purpose the transducers can be affixed to the surfaces of structures or integrated as structural elements themselves.A12 and .8 mm Ask for custom designs! ࡯ Flexible choice of dimensions ࡯ Flexible choice of thickness P-876. Sensor or Energy Source ࡯ Highly Formable Ceramics ࡯ Can be Applied to Curved Surfaces ࡯ Customized Solutions on Request ࡯ Cost-Effective © Physik Instrumente (PI) GmbH & Co. they allow high deflections of up to 0.g.A11 DuraAct™ Patch Transducer. Embedded in a servo-control loop. they can reduce vibrations and control structures in the nanometer range. for structural health monitoring) or for energy harvesting.18 ceramic materials and operating temperature ࡯ Various electrical connection designs ࡯ Combining sensor and actuator functions (multiple ceramic layers) P-876 DuraAct™ patch transducers offer the functionality of piezoceramic materials as sensors and actuators as well as for electrical charge generation and storage. DuraAct™ patch transducers are ideally suited for active and adaptive systems. Robust and Cost-Effective Design for Industrial Applications The laminated design with piezoceramic plate and polymers provide a mechanically preloaded and electrically insulated device for easy handling. Other possible operation modes of DuraAct™ transducers are as high-dynamics sensors (e. All data are superseded by any new release. DuraAct™ transducers can be applied to structure areas where deformations are to be generated or detected. 61 x 35 x 0.A15 actuators.A15 DuraAct™ Patch Transducer. This power can supply miniature electronic devices like diodes.5 mm P-876.8 mm with high force and high precision. Subject to change without notice. DuraAct™ transducers can be offered in highly customized versions: Ordering Information P-876. 61 x 35 x 0.Piezo • Nano • Positioning P-876 DuraAct™ Piezoelectric Patch Transducers a rugged design with the mechanical stability of a structural material.A12 DuraAct™ Patch Transducer. Integration into Adaptive Systems With their compact design.4 mm P-876. Whole areas can be monitored effectively by applying an array of several modules to a surface. sensors or even radio transmitters for remote data control. P-876 patch transducers feature Dimensions of the P-876 in mm Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ High-dynamics actuators Adaptive systems Vibration and noise cancellation Deformation control and stabilization Damage monitoring Energy harvesting Lateral contraction of a DuraAct™ patch transducer when voltage is applied 1-96 . 61 x 35 x 0.pi.

5 mm ±0.2 g Solder pads E-508 (p.A11 -50 to +200 V P-876.D2 (p.6 μm/m/V 650 μm/m 1.Piezo • Nano • Positioning Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged stack Actuators Patches /Benders/Tubes /Shear.A12 -100 to +400 V P-876. A bending transducer consists of a substrate with a P-876 actuator (here: P-876.A15) glued to one side.A15 -250 to +1000 V Tolerances 1-97 .5 g Solder pads E-413.64 μm/m/V min. P-876.3 μm/m/V 800 μm/m 0. 2-120) E-835 -20 to +150 (180) °C 7. 2-166) ±5 % PIC 252 Layer thickness: 100 μm 150 nF PIC 255 Layer thickness: 200 μm 90 nF PIC 255 Layer thickness: 500 μm 45 nF ±20 % 90 N 61 mm 35 mm 0.D2 E-835 -20 to +150 (180) °C 3.1 g Solder pads E-413.5 mm 20 mm 775 N 61 mm 35 mm 0. open-loop Mechanical properties Blocking force Length Width Thickness Bending radius Drive properties Piezo ceramic type Electrical capacitance Miscellaneous Operating temperature range Mass Voltage connection Recommended controller/driver -20 to +150 (180) °C 2.4 mm 12 mm 265 N 61 mm 35 mm 0.5 mm ±0. A contraction of the actuator effects a deflection W Nanometrology Micropositioning Index Design principle of the transducer Technical Data Model Operating voltage Motion and positioning Lateral contraction. Nanopositioning / Piezoelectrics Deflection of a bending transducer as a function of the substrate thickness for different materials.. 400 μm/m 1.05 mm max. 2-150) E-835 (p.8 mm 70 mm ±0.

L Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Nanopositioning Precision mechanics / -machining Active vibration damping Semiconductor technology / test systems Laser tuning Atomic force microscopy Switches Scanning applications Linear motors Nanotechnology Axis and lead assignment for PICA™ Shear actuators The standard actuator P-151. All materials used are specifically matched for robustness and lifetime.and Multi-Axis Actuators X-.ws.10 is delivered with a 10 cm lead 1-98 . let us provide you with a custom design. scanning microscopy. High Reliability under High Duty Cycles. Short Leadtime for Standard & Custom Designs All manufacturing processes at PI Ceramic are set up for maximum flexibility. XZ. both parallel and perpendicular to the motion direction.g. Ceramics. They come in a variety of geometries providing displacements to 10 μm. All data are superseded by any new release. Cat120E Inspirations2009 08/10. Sapphire. Possible applications for these devices are e. Low Power Requirements PICA™ Shear actuators are specifically designed for highduty-cycle applications.Piezo • Nano • Positioning P-111 · P-151 PICA™ Shear Actuators Compact Multi-Axis Actuators Based on the Piezo Shear Effect ment and low electrical capacitance provides for excellent dynamic behavior with reduced driving power requirements.000. XY-.000. Our engineers will work with you to find the optimum solution at a very attractive price. Should our standard actuators not fit your application. Some of our custom capabilities are listed below: ࡯ Custom Materials ࡯ Custom Voltage Range / Custom Displacement ࡯ Clear Aperture ࡯ Custom Load / Force Ranges ࡯ Custom Flat or Spherical Endplates (Metal. even after billions (1.and XYZ-Versions High Resonant Frequencies Extreme Reliability >109 Cycles Picometer-Resolution / Sub-Millisecond Response UHV Versions to 10-9 hPa Non-Magnetic and Clear Aperture Versions The unique PICA™ Shear piezo actuator series are exclusively available from PI. the PICA™ Shear X and XY actuators show almost twice the displacement amplitudes of conventional piezo actuators at the same electric field. see technical data table for A.) / Optical Surface Quality PICATM Shear actuators are available in cross-sections from 3 x 3 mm to 16 x 16 mm ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ © Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. Endurance tests proved consistent performance.18 Compact Single. Consequently they can be made smaller and have higher resonant frequencies. or in motor drives. The newest release for data sheets is available for download at www. B. .and Y-axis operation..000) of cycles. The combination of high displace- PICA™ Shear dimensions. even for small quantities. Based on the piezoelectric shear effect. These devices are extremely compact and feature sub-nanometer resolution and ultra-fast response. This results in reduced power requirements for a given induced displacement in dynamic X.pi.. High Stiffness and High Displacement PICA™ Shear actuators exhibit high stiffness. Glass.

5 14 23 9.3 3. Other specifications on request.01 P-121. are described in the “Piezo Drivers / Servo Controllers” section.05 P-142.2 / 7.5 7.03H P-151.5 15.5 15.05 P-121.03 P-111.2 7/7 17 / 17 28 / 28 50 / 50 43 / 43 71 / 71 130 / 130 1.4 4. non magnetic. All standard and custom actuators are delivered with performance test sheets.5 7.10 P-123.5 3.03 P-143.03 P-142. 1-99 .01 P-123.9 4. Technical Data / Product Order Numbers Order number P-111.5 23 40 40 5. 1 kHz.05 P-151. shear load [N] 20 20 20 50 50 40 200 200 200 300 300 300 20 10 50 40 30 200 100 50 300 300 100 40 10 200 100 50 300 100 60 20 200 200 200 Axial Stiffness [N/μm] 70 45 30 190 120 90 490 360 230 1300 920 580 50 25 140 70 50 280 190 120 730 490 300 90 45 360 170 120 450 300 170 120 870 640 460 Capacitance [nF] ±20% 0.4 4. Other high-resolution amplifiers and servo-control electronics.5 7. Down to Liquid-He ࡯ Vacuum Compatible and Non-Magnetic Versions Because all piezoelectric materials used in these actuators are manufactured at PI Ceramic.2 7 17 28 50 43 71 130 0.05H P-151.6 / 11 17 / 17 / 29 28 / 28 / 47 43 / 43 / 73 71 / 71 / 120 130 / 130 / 230 89 / 89 / 160 30 49 89 Resonant frequency [kHz] 330 210 155 330 210 155 210 155 100 210 155 100 230 120 230 120 85 120 85 50 120 85 50 155 75 155 75 50 75 50 30 30 210 155 100 Nanopositioning / Piezoelectrics Nanometrology Micropositioning Index Standard piezo ceramic type: 255 * Tolerances ±30 % Unloaded (longitudinal) resonant frequency measured at 1 Vpp.05 P-142.05 P-141.5 1..10 P-153.05 P-153.05 P-152.03 P-152.5 5.03 P-122.5 12 5 9.03 P-151.01 P-111.5 / 1.5 1. vacuum compatible.5 14 9.OE bipolar piezo driver is recommended for operating these actuators. pigtail length 100 mm Available options: integrated piezo force sensors.10 P-151.5 7. Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged stack Actuators Patches /Benders/Tubes /Shear.05 P-141.5 5.03 P-122.4 / 2.03 P-143.6 / 5.5 5 9.5 12 Max.5 / 0. capacitance at 1 Vpp.5 5. free aperture etc. unloaded.10H Active axes X X X X X X X X X X X X XY XY XY XY XY XY XY XY XY XY XY XYZ XYZ XYZ XYZ XYZ XYZ XYZ XYZ XYZ X X X Displacement Cross section [μm] -10/+20% A x B / ID for -250 to 250 V [mm] 1* 3* 5 1* 3* 5 3* 5 10 3* 5 10 1 x 1* 3 x 3* 1 x 1* 3 x 3* 5x5 3 x 3* 5x5 10 x 10 3 x 3* 5x5 10 x 10 1 x 1 x 1* 3 x 3 x 3* 1 x 1 x 1* 3 x 3 x 3* 5x5x5 3 x 3 x 3* 5x5x5 10 x 10 x 10 10 x 10 x 10 3* 5 10 3x3 3x3 3x3 5x5 5x5 5x5 10 x 10 10 x 10 10 x 10 16 x 16 16 x 16 16 x 16 3x3 3x3 5x5 5x5 5x5 10 x 10 10 x 10 10 x 10 16 x 16 16 x 16 16 x 16 5x5 5x5 10 x 10 10 x 10 10 x 10 16 x 16 16 x 16 16 x 16 16 x 16 / 10 16 x 16 / 10 16 x 16 / 10 16 x 16 / 10 Length L [mm] ±0.01 P-112.2 / 4.5 7. both digital and analog.03 P-153.5 7.10 P-112.4 / 1.03 P-121.5 1.5 2.2 / 4.10 P-152.Piezo • Nano • Positioning ࡯ Extra-Tight Length Tolerances ࡯ Combination with Piezoelectric Shear Sensors (no Pyroelectric Effect) ࡯ Low-Temperature Designs.03 P-141. Amplifiers and Controllers The E-413. free at both sides Capacitance at 1 Vpp.01 P-122.5 14 23 7.3 5.5 23 15.05 P-153.4 / 1. leadtimes are short and quality is outstanding. 1 kHz Operating voltage: -250 V to +250 V Operating temperature range: -20 to +85 °C Standard mechanical interfaces: Ceramics PTFE-insulated wires.01 P-143.5 12 5.10H P-151.5 1.

but their high resonant frequencies make them especially suitable for dynamic operation with light loads. Options Equations The axial contraction and radial displacement of piezo tubes can be calculated as follows: (Equation 1) Piezo Drivers.ws.18 Single or double wrapped. ultrasonic and sonar applications. both digital and analog. Our engineers will work with you to find the optimum solution at a very attractive price. circumferential bands or quartered outer electrodes. KG 2008. ink-jet printing. are described in the “Piezo Drivers / Servo Controllers” section. U ⌬L ഠ d31 · L · –– d where: d31 = strain coefficient (displacement normal to polarization direction) [m/V] L = length of ceramic tube [m] U = operating voltage [V] d = wall thickness [m] (Equation 2) ⌬d ഠ d33 · U where: d = change in wall thickness [m] d33 = strain coefficient (field and displacement in polarization direction) [m/V] U = operating voltage [V] Typical values for d31 and d33 are -200 pm/V and 500 pm/V. Some of our custom capabilities are listed below: ࡯ Custom Materials ࡯ Custom Voltage Ranges / Displacement ࡯ Custom Geometries ࡯ Extra-Tight Tolerances ࡯ Applied Sensors ࡯ Special High / Low Temperature Versions Application Examples ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Micropositioning Scanning microscopy (AFM.30 mm Electrodes Fired silver-plated inside and outside as standard. thin film electrodes (e. d: 0. Polarization Inner electrode positive potential Tube actuators are not designed to withstand large forces (see PICA™ Thru actuators p. All data are superseded by any new release. OD: 80 mm min. Multi-electrode tubes are available to provide XYZ motion for use in manipulation and scanning microscopy applications. PI also provides ultra-high linearity. Application examples are micro pumps. STM.Piezo • Nano • Positioning PT120 · PT140 PT Piezo Tube Actuators Piezoceramic Tube Actuators with Small Tolerances and Various Options Short Leadtime Because all piezoelectric materials used in PT tube actuators are manufactured at PI Ceramic. ࡯ Sub-Nanometer Resolution ࡯ Ideal for OEM-Applications PT-series piezoceramic tubes are used in a wide range of applications from microdispensing to scanning microscopy. These monolithic components contract laterally (radially) and longitudinally when a voltage is applied between their inner and outer electrodes. respectively. even for small quantities. L: 50 mm max. see table for specifications 1-100 . 1-90). scanning microscopy. copper-nickel or gold) as outer electrodes optional. etc. Should our standard actuators not fit your application. Cat120E Inspirations2009 08/10. Controllers & High-Voltage Amplifiers High-resolution amplifiers and servo-control electronics. g. closed-loop scanning stages for SPM and nanomanipulation.8 mm and tolerances as tight as 0. Precision and Flexibility PT piezo tubes are manufactured to the tightest tolerances. Dimensions max.pi. Subject to change without notice.05 mm.) Fiber stretching / modulation Micropumps Micromanipulation Ultrasonic and sonar applications XY scanning tubes with quartered outer electrodes. leadtimes are short and quality is outstanding. A selection of PT piezoceramic tubes ࡯ Standard & Custom Sizes ࡯ Optional Quartered Electrodes for XYZ-Positioning & Scanning © Physik Instrumente (PI) GmbH & Co. We can provide tubes with diameters as small as 0. All manufacturing processes at PI Ceramic are set up for maximum flexibility. The newest release for data sheets is available for download at www. let us provide you with a custom design.

operating voltage [V] 500 500 500 ±200 500 ±200 500 ±200 1000 1000 1000 Electrical capacitance [nF] ±20% 3 10 12 4 x 2.05 mm.4 18 4 x 3.70 Dimensions [mm] L x OD x ID** 20 x 2.9 0.20 PT130.9 0.2 30 x 6. ID (inner diameter) ±0.00 PT130.0 30 x 10.35 30 x 6.9 1.2 x 1.00: ID ±0.1 mm Other specifications on request. 1-101 .8 36 4 x 8.0 x 9.2 x 2.5 18 35 70 Axial contraction [μm] @ max.7 0.40 PT140.Piezo • Nano • Positioning The radial contraction is the superposition of the increase in wall thickness and the tangential contraction.0 x 9.35 x 5.10 PT130.0 30 x 3.0 30 x 20.24* PT130.8 1. PT120 / PT130. voltage 0.30 PT130.8 3 3 3 6 12 XY deflection [μm] @ ±200 V ±35 ±16 ±10 - *Quartered electrodes for XY deflection **OD (outer diameter).94* PT130.0 40 x 40. due to super- ␲ · ID · d where: ⌬x = scanning range in X and Y (for symmetrical electrodes) [m] d31 = strain coefficient (displacement normal to polarization direction) [m/V] U = operating voltage [V] L = length [m] ID = inner diameter [m] d = wall thickness [m] Nanopositioning / Piezoelectrics Nanometrology Micropositioning Index PT Tube dimensions.0 x 8. U ___ __ ⌬r ഠ d31 _ r d where: r = radius of piezo tube d31 = strain coefficient (displacement normal to polarization direction) [m/V] U = operating voltage [V] d = wall thickness [m] For a given division of the outer electrode of a piezo tube into four 90° sections the differential control (±U) of opposing electrodes results in bending of one of the ends.00 PT130.0 x 38.35 30 x 10.14* PT130.90 PT130.35 x 5.2 30 x 3.0 Max.2 x 2.0 30 x 10. it can be estimated by the following equation: (Equation 3) position of radial and axial contraction..2 x 2.2 30 x 3.0 x 18. Such tubes are applied as XY scanner in scanning-probe microscopes such as atomic force microscopes. The scanning range can be evaluated as follows: (Equation 4) 2 ͙2 · d31 · L2 · U ⌬x ഠ Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged stack Actuators Patches /Benders/Tubes /Shear. V 5 9 9 9 9 9 9 9 9 9 15 Radial contraction [μm] @ max. in mm (see table for further information) Technical Data / Product Order Numbers Order number PT120.

. See “Accessories” page 2-168 ff.1 hPa (100 to 0. Low-Temperature Range -273 °C to +80 °C / -459 °F to +176 °F / 0 K to 353 K Generally all PZT ceramics function down to zero kelvin.18 Vacuum Options All PI piezo translators can be safely used in a vacuum outside the range from 100 to 0. However.xx. The following translators are available with water-resistant cases: P-844.pi. P-235. © Physik Instrumente (PI) GmbH & Co. The electrical connection is via two 1. P-176. P-703. It consists of a specially sealed steel case with integrated flexure zones. and page 2-199 ff. might damage the piezo ceramics. the P703. piezo translators are constructed of a combination of materials (ceramics.Piezo • Nano • Positioning Options and Accessories Factory Installed Options Notes The following options must be installed in the piezo translators during the manufacturing process. oil. the strain gauge position sensor is available. extension cables and adapters are available.ws. in the “Piezo Drivers / Servo Controllers” section for further details.00 Water-Resistant Case The water-resistant case is recommended if PZTs are used in applications where spray of coolants.0S. special insulation material and adhesives must be used.50 Dynamic applications (with E-481): temperature sensor and protective air for PICA™ HVPZT The option for dynamic applications is recommended fort he operation with the E-481 HVPZT Piezo Amplifier / Controller with energy recovery. For applications requiring an extended temperature range the following options are available: High-Temperature Range and High Vacuum (only for HVPZTs) -40 °C to +150 °C / -40 °F to +302 °F / 233 K to 423 K The piezo ceramics are enclosed in a stainless steel case with vent holes. The electrical connection is via two 50 cm long Teflon leads without connector. Extended Temperature Range Standard HVPZTs work in the temperature range from -40 °C to 80 °C (-40 °F to +176 °F). Strain Gauge Position Sensor for HVPZT Stack Actuators For positioning requiring high repeatability and accuracy. Piezos with strain gauge sensors are equipped with a 1 m PUR cable with FFA.CLAC32 LEMO connector in addition to the voltage cable. The PZTs can be baked to 150 °C. etc.10 includes high-temperature range if ordered with HVPZTs. Cables and Cable Adapters A variety of cables. Special electrical insulation materials are used.10 and P-703. This option includes factory calibration of any PI servo-controller (see “Piezo Drivers & Nanopositioning Controllers” section) delivered along with the sensor-equipped piezo translator.xx. See the tutorial “Piezoelectrics in Positioning” section. page 2-205 for discussion. The electrical connection is via two 50 cm Teflon leads without connectors. To qualify the piezoelectric translators for cryogenic temperatures. metal. The P-176. They must be ordered with the piezo actuator and cannot be added later. P-703.20 high-vacuum options are available. If necessary contact your local PI office for details on how to order modified translators. Protective air and integrated temperature sensor prevent damage to the piezo ceramic by overtemperature. The PZTs can be baked up to 150 °C.1 torr).. water. The nominal displacement of the PZT is reduced by about 20% (due to the stiff insulation materials)..20 High Vacuum (for preloaded PZTs) The piezo ceramics are enclosed in a stainless steel case with vent holes. KG 2008. The low-temperature translators are delivered as bare ceramic stacks without case and mechanical preload. P-703. The newest release for data sheets is available for download at www. 1-102 . Subject to change without notice. The nominal displacement of the PZT is reduced by about 20% (due to the stiff insulation materials). P-225.10 High Vacuum (for non-preloaded PZTs) The translators are delivered as bare ceramic stacks without a case.30 Magnetic Adapter To attach P-820 translators to various positioning units the P-176. P-177. See page 2-187 ff.304.xx. for more information on position sensors and closed-loop operation of piezos.xx. Please call for dimensions and further details.30 can be glued on the top piece of the P-820. P-706.) which makes the situation more complex.30 magnetic adapters are available.5 m Kapton leads with LEMO connector. All data are superseded by any new release. P-845. For applications that require reduced outgassing. Cat120E Inspirations2009 08/10. The electrical connection is via two 50 cm Teflon leads without connector. The nominal displacement of the PZT is reduced by about 20% (due to the stiff insulation materials). insulating materials.

Piezo • Nano • Positioning

Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components
Guided / Preloaded Actuators
P-176.30 magnetic adapter P-176.10 magnetic adapter P-176.60 flexible tip

Unpackaged Stack Actuators Patches /Benders/Tubes /Shear..

Accessories
Accessories can be installed after manufacture. P-176.Bxx Ball Tips To avoid bending moments and shear forces on the PZT ceramics, a ball tip is available that can be screwed into the top piece of the individual translators. P-176.B12 Ball tip for P-212 P-176.B16 Ball tip for P-216 P-176.B25 Ball tip for P-225 and P-235 P-176.Fxx Flat Tips Flat Tips are available and can be screwed into the top piece of the individual translators. P-176.F12 Flat tip for P-212 P-176.F16 Flat tip for P-216 P-176.F25 Flat tip for P-225 P-176.F35 Flat tip for P-235 P-176.10/20 Magnetic Adapter To attach P-840/1 and P-212 translators to various positioning units the P-176.10/20 magnetic adapters are available. The P-176.20 can be screwed into the top piece of the P-840/1. The P-176.10 can be screwed into the top piece of the P-212. P-176.50/60 Flexible Tip PZT ceramic stacks cannot withstand bending forces. The P-176.50/60 flexible tips are available for applications where it is not possible to avoid

those forces. They can be screwed into the standard top pieces of the P-842/3 and P-844/5 translators. See drawing.

Nanopositioning / Piezoelectrics

Nanometrology

Micropositioning

Index

P-176.50, P-176.60 flexible tips (dimensions in mm)

Technical Data
Model Thread Ø [mm] L [mm] Tilting angle [deg] Axial stiffness [N/μm] Bending stiffness [Nm/rad] P-176.50 M5/M5 8 20 ±0.5 100 22 P-176.60 M8/M8 12 30 ±0.5 200 40

1-103

Piezo • Nano • Positioning

Accessories (cont.)
Cables, Connectors & Adapters for PICA™ HVPZT Piezo Translators and Nanopositioning Systems
Notes Unless stated otherwise, PI’s preloaded PICA™ HVPZT piezo translators and nanopositioners are equipped with LEMO connectors and 1 m PVC cables. The voltage connector is an FGG.0B.701.CJL.1173. With integrated P-177.10 strain gauge, an additional sensor cable is installed. The length of the sensor cable is 1 m, the material PUR and the connector a LEMO FFA.0S.304.CLAC32 as shown on the P-892 cable.
P-202 PICA™ HVPZT cable

P-202.xx PICA™ HVPZT Cable LEMO plug / solderable end Plug: FGG.0B.701.CJL.1173 (fits PICA™ HVPZT amplifiers, e.g. E-508.00)
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18

This cable can be soldered to PZTs with pigtails P-202.06 P-202.10 P-202.12 P-202.13 P-202.15 0.6 m 1m 2m 3m 5m

Cable with PUR insulation, 2-conductor, shielded

P-203 extension cable for PICA™ HVPZTs

P-203.xx PICA™ HVPZT Extension Cable Plug: FGG.0B.701.CJL.1173 Socket: PHG.0B.701.CJL.1173 Cable: PUR-insulation, 2-conductor, shielded P-203.01 1m P-203.02 2m P-203.03 3m P-203.05 5m P-203.10 10 m P-203.15 15 m
1-104

Piezo • Nano • Positioning

Sensor Extension Cables
P-892.xx Sensor Extension Cable For strain gauge sensors or LVDTs. Plug (right): FFA.0S.304.CLAC32 Socket (left): PCA.0S.304.CLLC32 Cable: 4 wires; Ϸ Ø 0.20 mm; #32 AWG (American) Ϸ #35 SWG (British) PVC-Isolation P-892.01 P-892.02 P-892.03 P-892.05 P-892.10 1 2 3 5 10 m m m m m
Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components
Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear..

Nanopositioning / Piezoelectrics

P-892.xx Sensor extension cables for LVDTs and strain gauges

Nanometrology

D-892 Sensor Extension Cable Set For capacitive sensors. Set of two. Plug (e.g., far left) FFA.00.250.CTLC20 Socket (e.g., far right) PCA.00.250.CTAC22 Cable: LSM 75 (Teflon) D-892.01 1m D-892.02 2m D-892.03 3m

Micropositioning

Index

D-892.xx capacitve sensor extension cables

1-105

Small-signal stiffness and dynamic stiffness may differ because of effects caused by the active nature of piezoelectric material. For details see the tutorial “Piezoelectrics in Positioning” Section (see p. ranging from ±30 V up to ±250 V typ. Example: the dynamic forces generated by sinusoidal operation at 500 Hz. Voltages in excess of +750 V should not be applied for long durations. For details see the tutorial “Piezoelectrics in Positioning” Section (see p. Open-loop travel for PICA™ Ceramic Equipped Piezo Actuators Minimum open-loop travel of high-voltage piezo actuators at 0 to +1000 V operating voltage. For details see the tutorial “Piezoelectrics in Positioning” Section (see p. measured with E-503/E-508 amplifier module in E-500/501 chassis. 1 kg moved mass. Motion and Positioning Performance specifications are valid for room temperature (22 ±3 °C) and closed-loop systems are calibrated at this temperature (specifications for different operating temperatures on request). 2-192 ff ) Push/pull force capacity (in operating direction) Specifies the maximum forces that can be applied to the system along the active axis. Instead of resolution. 1-106 . For PICA™ ceramic equipped piezo actuators: 0 to 1000 V typ. Lowest resonant frequency in operat- ing direction (does not specify the maximum operating frequency). If larger forces are applied. Recalibration is recommended for operation at a significantly higher or lower temperature. Limited by the piezo ceramics. Open-loop travel for PICMA® Ceramic Equipped Piezo Stages and Actuators Minimum open-loop travel at 0 to 100 V operating voltage. Torque limit (on tip) Maximum torque that can be applied before damage occurs.18 Static large-signal stiffness Typical tolerance ±20 %. KG 2008. Integrated feedback sensor Absolute measuring capacitive and SGS sensors are used to provide position information to the controller. etc. are approximately ±100 N. Custom designs for ultra-low or ultra-high temperatures on request. The force limit must also be considered in dynamic applications. the noise-equivalent motion is specified. Max. Operation in the range of -200 to +750 V is recommended for maximum lifetime and displacement. recommended operating voltage range is -20 to +120 V (extremes for short durations only). PI piezo amplifiers have an output voltage range of -20 to +120 V or -30 to +135 V to provide enough margin for the servo-controller to compensate for load changes. Mechanical Properties © Physik Instrumente (PI) GmbH & Co. Subject to change without notice. 2-192 ff ) Shear force limit Maximum lateral force orthogonal to the operating direction. Values are typical results (RMS. 2-187 ff ). For shear and bender type piezo actuators. Closed-loop travel for PICMA® Ceramic Equipped Piezo Stages and Actuators Travel provided in closed-loop operation. etc. bipolar voltage is applied. 20 μm peak-topeak. For details see the tutorial “Piezoelectrics in Positioning” Sec tion (see p. Open-loop / closed-loop resolution Resolution of piezo actuators is basically infinitesimal because it is not limited by stiction or friction. 2-189 ff ) Unloaded resonant frequency Typical tolerance ±20 %.Piezo • Nano • Positioning Notes on Specifications for Piezo Actuators and Components Operating voltage For PICMA® ceramic equipped piezo actuators: 0 to 100 V typ. 1 σ). damage to the piezo ceramic. Static large-signal stiffness of the stage in operating direction at room temperature. Limited by the piezo ceramics. Limited by the piezo ceramic material and the flexure design. the flexures or the sensor can occur. compound effects. Cat120E Inspirations2009 08/10.

and load. For detailed information on power requirements. multiply DOC coefficient by 50 x 30 and check if the result is smaller or equal to the output current of the selected amplifier. recalibration or zero-point-adjustment may be required if the system is operated at different temperatures. mounting. 2-195 ff ). Nevertheless. For example to find out if a selected amplifier can drive a given piezo stage at 50 Hz with 30 μm amplitude. up to 200 % of the unloaded. Small amounts of other materials may be used internally (for spring preload. 1000 Hz. Performance specifications are valid for room temperature range. no load).Piezo • Nano • Positioning Drive Properties Electrical capacitance Typical tolerance ±20%. temperature. 2-99 ff ) Section of this catalog. The piezo capacitance values indicated in the technical data tables are typical small-signal values (measured at 1 V. Linear Actuators & Motors PiezoWalk® Motors / Actuators PILine® Ultrasonic Motors DC-Servo & Stepper Actuators Piezo Actuators & Components Guided / Preloaded Actuators Unpackaged Stack Actuators Patches /Benders/Tubes /Shear. small-signal capacitance at room temperature. For details see the tutorial “Piezoelectrics in Positioning” Section (p. Al: Aluminum N-S: Non-magnetic stainless steel S: Ferromagnetic stainless steel I: Invar T: Titanium See also “Options and Accessories” (p. Material Housings are usually made of stainless steel. 1-107 . Ave rage electrical current (supplied by the amplifier) required to drive a piezo actuator per unit frequency and unit displacement (sine-wave operation). Nanopositioning / Piezoelectrics Nanometrology Micropositioning Index Miscellaneous Operating temperature range The temperature range indicates where the piezo actuator may be operated without damage. etc. piezo coupling. refer to the amplifier frequencyresponse graphs in the Piezo Drivers / Servo Controllers (p. Largesignal values at room temperature are 30 to 50 % higher. thermal compensation. 20 °C. The capacitance of piezo ceramics changes with amplitude.. Dynamic Operating Current Coefficient (DOCC) Typical tolerance ±20 %.). 1-102 ff ).

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