You are on page 1of 4

Vacuum Heat Treatment for Epitaxy Susceptor Cleaning Furnace Type COV

Vacuum Systems

COV
Vacuum Heat Treatment for Epitaxy Susceptor Cleaning
Our COV furnaces are graphite-heated systems, designed for heat treatment in vacuum. We provide a wide variety of design, usable space, vacuum level, working temperature and gas treatment. Thanks to this, COV furnaces are particularly suitable for a gentle but efficient cleaning of graphite materials with or without SiC-coating. This treatment preserves the high quality level of MOVPE susceptors and enhances their lifetimes, while circulating through your production steps.

Improve your profit through in-house wafer recycling


In-house heat treatment gives you the chance for on time supply of refurbished wafer susceptors for your MOVPE or epitaxy processes. Saving time for the transportation to an external service provider, you minimize the number of circulating wafers. Recycling processes can be fully integrated into your in-house quality management system. Organization of lean production methods is entirely in your hands. Together with a highest degree of flexibility, in-house heat treatment is one step forward towards a maximized added value.

Life cylces of epitaxy susceptors

SiC-coated Graphite susceptor

MOVPE

Contaminated susceptor (InGaN, InGaAs,...)

Examples of Furnace Systems


Furnace type: Usable volume (approx.): Usable dimensions (WxHxL): Max. charge load (approx.): Max. temperature: Temp. homogeneity: COV 233 R 16 L 200 x 200 x 400 mm 40 kg 1,700 C 10 K

Furnace type: Usable volume (approx.): Usable dimensions (WxHxL): Max. charge load (approx.): Max. temperature: Temp. homogeneity:

COV 733 R 375 L 500 x 750 x 1,000 mm 600 kg 1,700 C 10 K

Furnace type: Usable volume (approx.): Usable dimensions (xH): Max. charge load (approx.): Max. temperature: Temp. homogeneity:

COV 952 R 1,570 L 1,000 x 2,000 mm 1,000 kg 2,000 C 20 K

Furnace type: Usable volume (approx.): Usable dimensions (xH): Max. charge load (approx.): Max. temperature: Temp. homogeneity:

COV 1162 R 3,080 L 1,400 x 2,000 mm 2,500 kg 2,200 C 50 K

General: Working pressure: Mass flow controllers (optional):

110-3 mbar p 1050 mbar (0.1 Pa p 105 kPa). N2, Ar, CH4, H2, HCl, R12, R134a

Other dimensions, temperature- and pressure limits can be designed upon request.

PVA TePla The Company


As a vacuum specialist for high-temperature and plasma treatment processes, PVA TePla AG is one of the worlds leading plant engineering companies. Its core competencies are in the fields of hard metal sintering and crystal growing as well as the use of plasma systems for surface activation and ultra-fine cleaning. With its systems and services, PVA TePla enables and supports the innovative manufacturing processes and developments of its customers, primarily in the semiconductor, hard metal, electrical/electronic and optical industries as well as the energy, photovoltaic and environmental technologies of tomorrow. Corresponding to its main customer markets, PVA TePla is divided into three business divisions, Industrial Systems, Semiconductor Systems and Solar Systems.

Industrial Systems The Division


The Industrial Systems Division of PVA TePla specializes in the development, construction and marketing of thermal plants and systems for processing top-quality materials at high temperatures. With almost 50 years experience from more than 1,000 systems supplied worldwide, testimonials from big names in the industry and a diversified range of process plants, the Industrial Systems Division of PVA TePla AG sets technological standards that have seen it grow to become a global market leader in the provision of vacuum sintering plant for hard metals in particular.

Vacuum Systems The Products


The core competency of PVA TePla is to build resistance and inductively heated systems for vacuum and high temperature applications and heat treatment. Especially graphite resistance heated vacuum (COV) and pressure (COD) systems for the universal application of dewaxing, vacuum sintering and the subsequent isostatic pressing of metals, carbides, alloys and ceramics are main products of the Industrial Systems Division. Metallic heated high-vacuum heat treatment furnaces (MOV), designed for typical applications like vacuum brazing, degassing, sintering and cleaning are a further successful products. Inductively heated melting and casting systems (VSG) for melting of metals, alloys and special materials under high-vacuum, fine-vacuum or inert gas atmosphere and heat treatment furnaces (IOV) for sintering and carburising applications round up PVA TePlas product range of vacuum systems.

PVA TePla AG Germany

Im Westpark 10 12 35435 Wettenberg

Phone Fax

+49 (641) 6 86 90 - 0 +49 (641) 6 86 90 - 800

E-Mail info@pvatepla.com Home www.pvatepla.com