Professional Documents
Culture Documents
Vacuum Gauges
Contents
7 Vacuum Gauges
7.1 Introduction . . . . . . . . . . . . . . . . . . .
7.2 Mechanical Gauges . . . . . . . . . . . . . .
7.3 U-Tube Manometers . . . . . . . . . . . . . .
7.4 McLeod Gauge . . . . . . . . . . . . . . . . .
7.5 Capacitance Manometer . . . . . . . . . . . .
7.6 Pirani and Thermocouple Gauges . . . . . . .
7.7 Viscometer Gauge . . . . . . . . . . . . . . .
7.8 Thermionic (Hot-Cathode) Ionization Gauge
7.9 Penning (Cold Cathode) Ionization Gauge . .
7.10 Residual Gas Analyzer (RGA) . . . . . . . .
7.11 Other Gauges . . . . . . . . . . . . . . . . . .
7.12 Costs . . . . . . . . . . . . . . . . . . . . . .
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1
4
4
5
6
7
8
9
9
11
12
12
12
7.1
Introduction
7.3
U-Tube
ters
Manome-
(7.1)
closed tube manometer the second end is at 0 can measure absolute pressure of gases quite
Torr (ideally) and we measure absolute pres- accurately, and is used to calibrate other
gauges.
sure.
The limitations of the manometer should be
obvious from its operation. A closed tube
manometer relies on the pressure above the
closed tube being 0 Torr. Mercury has a
sizable vapor pressure (1.2 mTorr at 20 C)
and so this is a false assumption. We also
must be concerned about capillarity, surface
tension, and adhesion between the liquid and
the tube. Once the mercury gets dirty it
tends to stick erratically to the glass. These
forces were neglected in computing the sum
of forces above.
As shown in Figure 7.4, it traps a fixed volume of gas from the vacuum and then compresses its volume, raising the pressure to
a point where it can be easily read. The
McLeod gauge measures pressure intermittently rather than continuously.
7.4
McLeod Gauge
7
higher pressures in the capillary some vapors present in the system may be condensed
leading to an incorrect reading. The gauge is
bulky and breakable and contains mercury, a
hazardous material. This gauge is primarily
used for calibration of other gauges.
7.5
Capacitance
ter
Manome-
Assuming that the vacuum is at a low presRange 10+4 Torr105 Torr, each gauge
sure,
useful over 4 or 5 decades
Pf Pv Pf = h Torr
(7.3)
This uses a metal diaphragm as one plate of
and using Vf = hA we can write
a capacitor, as shown in Figure 7.5. If the
pressure differs on the two sides of the di
A
2
Pv =
h
(7.4) aphragm, the diaphragm will move and will
V0
change the capacitance. Typically the difference between two capacitors is used, with
The gauges are calibrated by the manufac- the diaphragm serving as a plate in both of
turer so that we can make a direct reading the capacitors.
from 10 Torr down to 106 Torr. Gauges
Absolute pressure units use a sealed chamber
that measure to this level of precision are
on one side that, through the use of getters,
quite large.
A smaller, easily portable
can be maintained at about 106 Torr. DifMcLeod gauge will measure down to 105
ferential manometers use chambers that are
Torr.
both open. A given sensor is only sensitive
This type of gauge makes a direct reading for a range of about 5 decades, although this
of pressure and is easily related to the basic may be chosen from the nine decades of opdefinition of pressure. It is unaffected by the eration, 10+4 Torr to below 105 Torr. At
composition of the gas except for condens- any given time two or three digits are disable vapors. If a condensable vapor such as played on the readout.
water vapor is present it may condense upon
The gauge is easy to use and reads pressure
compression and give a false reading of the
directly. It is insensitive to the type of gas
pressure.
being used. The diaphragm is made of an
The gauge is not a continuous reading gauge, inert metal and is not subject to rapid corand it involves considerable operator inter- rosion. It is a rugged gauge and can safely
vention to make a reading. Vapors from the be exposed to atmospheric pressure while on.
gauge can contaminate the system and thus It covers a pressure range more nicely than
the gauge must be carefully trapped. At the most other competing gauges, and it can be
7.6
As the heat balance changes, the temperature of the wire changes, and hence the resistance of the wire also changes. By measuring either the temperature of the wire or
the resistance of the wire we can determine
the pressure.
Both Pirani and thermocouple gauges work The Pirani gauge measures the resistance
on the same principle: a wire carrying an (usually at constant current) while the therelectric current will heat up until it reaches mocouple gauge, Figure 7.6, measures the
7.8
Thermionic
Cathode)
Gauge
(HotIonization
Continuous readings are possible, and vapors are measured as well as gases. No vapors are introduced by the gauge. The gauge Range 0.1 Torr to 1011 Torr.
can safely be exposed to atmospheric presPressure is proportional to the number of
sure.
molecules in the system. If we can count the
The electronics must be calibrated. The molecules we can compute the pressure. The
gauge characteristics will change over time thermionic ionization gauge uses a heated
since the wire may become contaminated by filament to produce electrons (thermionic
gases in the system. The gauge is sensitive emission) which are then accelerated by an
to the type of gas as is shown in the diagram electric field and cause ionization of the
above. This is due to the effect of convection molecules in the system as seen in Figure
especially at higher pressures.
7.7. The positive ions are collected and their
current is measured.
The ion current is proportional to the number of ions in the chamber which is proportional to the number of molecules and
1
4
Range 10 Torr to 10 Torr.
hence the pressure. Lower currents at lower
pressures can be amplified for detection,
The viscosity of a gas varies with pressure in
and so we can change the sensitivity of the
a well-defined way that can be derived from
gauge.
kinetic theory. Viscometer gauges use viscosity to measure pressure. One approach Two basic types of ionization gauges are
uses a wire in a tube with very little clear- found. The Bayert-Alpert gauge is capaance between the wire and the tube. By us- ble of measuring pressures from 103 to
ing the wire as a torsion pendulum and ob- 1011 Torr. The Schultz-Phelps gauge is
serving damping of the oscillations, the vis- designed to measure pressures as high as 1
cous force can be measured and can be re- Torr, but cannot measure below about 106
lated to pressure. A variation uses a rotating Torr.
7.7
Viscometer Gauge
10
The gauge must not be exposed to high pressures when it is on. If it is exposed to
high pressure the filament may oxidize and
break. Usually there are safety interlocks
which turn off the gauge when the ionization current becomes too high, but even so
The collector current, ip , is proportional to the filament is stressed.
the ionizing current (filament current), ie ,
and the pressure is proportional to the col- The gauge is very sensitive to the composilector current. We can put these together to tion of the gas. Lighter gases (He, H2 , H2 O)
will read low while heavier gases (N2 CO2 ,
get
Ar) will read high. The determining factor
1 ic
P =
(7.5) is the ionization energy of the gas species.
S ie
11
Ionization Gauge
12
is sensitive to the composition of the gas in distinguished from an air leak, or a leak in a
the same fashion as the thermionic ioniza- gas line. RGAs start at $10 000.
tion gauge. You must not allow metal particles to fall into the gauge, especially magnetic materials!
7.11 Other Gauges
Alphatron: A radioactive source is used to
ionize gases. This is sensitive in the
range of 1 Atmosphere to 0.1 mTorr,
and the gauge is sensitive to the type
of gas in the system.
The RGA is a low-resolution mass spectrometer. It samples the gas in a system and Convectron: A variation of the Thermotypically produces a scan of relative amplicouple/Pirani type gauge that uses the
tude of different ionized species versus mass
cooling properties of convection as well
of the species over a range of 1 to 200 amu.
as conduction. This allows measureThe RGA can be used to determine the absoments of pressure from 760 Torr down
lute partial pressures of gases in the system,
to about 1 mTorr.
but is more commonly used to indicate what
species are present in the system.
7.10
7.12
Costs
Two approaches to gauging are possible. Individual transducers may have individual
controllers, or one multifunction controller
may have cards inserted to run different
transducers. For the second case, Table 7.2
are 1997 prices (Kurt J. Leskar Co. version).
7.12 Costs
13
Cost
$3 500
$300
$800
$70
$120
$380