You are on page 1of 90

Leak Detector

SmartTest
design and function

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 1

Course objectives

The participant will be able to:


explain the design and the function
operate the unit
perform maintenance work
do troubleshooting

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 2

Definition LEAK"

A LEAK is an untight spot in a container or line,


through which gases, vapors, or even liquids flow
from an area where the pressure is higher to an area
where the pressure is lower.

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 3

Leak rate units

SI - Standard

mol/s (1mol = 6.025E23 particles)

Fluid technology

Nm/s, sccm, sccs

Vacuum technology =

mbar l/s, Pa m3/s, Torr l/s,


atm cc/s

Air conditioning

g/a, oz/y

Concentration

ppm (no leak rate unit)

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 4

Definition of the unit "mbar l/s"

The leak rate is 1 mbar l/s if in an evacuated container


with a volume of 1 Liter, the pressure rises by 1 mbar
per second , or if in a pressurized container with the
same volume, the pressure drops by 1 mbar per
second.

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 5

Example 1: Leak rate in mbar l/s


A bicycle tube may have a maximum pressure
loss of 1000 mbar in 175 days.
Volume
=
1.5 liters
175 days
=
1.5x107 seconds

Which is the maximum


admissible leak rate?
How do you test a bicycle
tube?
Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 6

Example 1

Result:

QL=[(p2 - p1) * V] / t

Bubble test

mbar l 1000 1,5


4
QL =
=
=
1,0

10
mbar l / s
7
s
1,5 10

The leakrate should be not higher than 1x10-04 mbarl/s.

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 7

Example 2: Leak rate in mbar l/s


A bicycle tube is pumped up to 3.0 bar.
The default leak rate is taken from example
Volume

1year

Leak rate

1.5 liters
ca.
=

3.0 x 107 seconds


1,0 E-04 mbar l/s

What is the pressure in the bicycle tube after 1


year?

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 8

Example 2
Result

Leak rate * Time


ploss =
Volumen

1.0x104 *3.0x107
mbar*l * s
==
ploss =
1.5
s *l
3
ploss = 2.0x10 mbar
ptube = 1.0x10 mbar = 1.0bar
3

The pressure in the bicycle tube is 1 bar after 1


year?
Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 9

Leak detection methods

Test object pressurized:


Pressure decay
Bubble test
He sniffing with SmartTest

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 10

Detection limits pressurized

Pressure decay

Bubble test

He sniffing with SmartTest

E1

E0

E-1

E-2

E-3

E-4

E-5

E-6

E-7

E-8

E-9

E-10

E-11

E-12

mbar l/s

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 11

Leak detection methods

Test object under vacuum:


Pressure increase
Gas type dependence ( Pirani gauge)
He leak test with SmartTest

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 12

Detection limits vacuum

Pressure increase

Gas
Gastype
typedependence
dependencePirani
Pirani

He leak test with SmartTest

E1

E0

E-1

E-2

E-3

E-4

E-5

E-6

E-7

E-8

E-9

E-10

E-11

E-12

mbar l/s

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 13

Sniffing methods
Local

Pfeiffer Vacuum 2007

Test gas

Test gas

Integral

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 14

Vacuum methods integral

Pfeiffer Vacuum 2007

Test object evacuated


Test chamber pressurized

Test gas

Test gas

Test object pressurized


Test chamber evacuated

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 15

Vacuum method local

Test gas

Test object evacuated

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 16

SmartTest HLT 5xx


Modular concept

Unit HLT 5xx


2

Cart to SmartTest

Backing pump
3

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 17

Type overview
SmartTest

HLT 550

without Backing pump

SmartTest

HLT 560

Rotary vane pump

UNO 5

SmartTest

HLT 565

Rotary vane pump

UNO 30 M

SmartTest

HLT 570

Diaphragm pump

SmartTest HLT 572

Dry pump XtraDry 150-2

SmartTest HLT 575

Dry pump TS 620

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 18

The leak detector SmartTest


1
1

Test port

Instrument operation

Inlet air filter

Connection for

external backing pump

4
3

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 19

Instrument operation
3

START / STOP button

ZERO button

Softkeys with
changeable meaning

Display

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 20

Disign
1
1
2
3
4
5
6
7
8

Test port
Pressure at Test port
Clibrated leak
Vent of sniff connection
Backing pump
Fore vacuum pressure
Turbo drag pump
Mass spectrometer

8
P2

2
3

V5

V4

V3

V6

V2
V1
5
P1

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 21

Mass spectrometer
1
2
3
4
5
6
7
8
9
10
11

Cathode 1
Anode
Cathode 2
Shielding
Extractor
Shielding
Magnetical field
Suppressor
Shielding
Faraday cup
Pre amplifier

11

10

9
5

M < 4

7
M = 4

M > 4

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 22

Principle of measurement
Magnet
Magnetic field

+
+
+
++
+

Gas inlet

Ionsource
Pre amplifier
Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 23

START/STOP pressed

Pressure value P2
mbar
1000

15

P2

V5

V4

5
0,5
0

V3

V6
V2
V1

P1

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 24

Pump fore vacuum


P2 > 15 mbar
P2

V5

V4

V3

V6
V2
V1

P1

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 25

Measure Counter flow


P2 < 15 mbar
P2 > 5 mbar
P2

V5

V4

V3

V6
V2
V1

P1

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 26

Measure "Twin-Flow low"


P2 < 5 mbar
P2 > 0.5 mbar
P2

V5

V4

V3

V6
V2
V1

P1

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 27

Measure "Twin-Flow high"


P2 < 0,5 mbar
P2

V5

V4

V3

V6
V2
V1

P1

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 28

Sniffing Twin-Flow low

P2

V5

V4

V3

V6
V2
V1

P1

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 29

Calibration

P2

V5

V4

V3

V6
V2
V1

P1

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 30

Running Up

The run-up of the turbo pump is visualized in percentage via


bar graph.

Pfeiffer Vacuum 2007

Details

Menu with selected system data

Sprache, Language
Idioma

Direct link to the menu Language

Setup

Settings of the operating parameters

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 31

Details

For line pressure p1


Rotation speed
TMP current
Emission
Filament
Vent TMP

Present fore-vacuum pressure


Present rotation of the turbo pump
Present consumption of the turbo pump
On if the rotation >= 1450 Hz , p1 < 10 mbar
and the filament test was okay
Active filament 1 or 2
The filament and the turbo pump
will switch off automatically

The menu Vent TMP will displayed only if the menu


Maintenace enable at Yes.

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 32

Venting TMP (1)

The turbo pump is switch off and the leak detector is waiting
until the rotation speed of the turbo pump < 150 Hz.
Restart

Pfeiffer Vacuum 2007

Stops the automatic venting procedure of the turbo


pump and leads back to the run up mode of the unit.

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 33

Venting TMP (2)

The rotation speed of the turbo pump <150 Hz . Thereafter the


turbo pump will be vented for 10 s.
Restart

Pfeiffer Vacuum 2007

Stops the automatic venting procedure of the turbo


pump and leads back to the run up mode of the unit.

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 34

Venting TMP (3)

The turbo pump is vented and the leak detector can be switched off.

Pfeiffer Vacuum 2007

Vent TMP

Vents the turbo pump again

Restart

Stops the automatic venting procedure of the turbo


pump and leads back to the run up mode of the unit.

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 35

Ready to start
Setup main menu

Settings
Mode, Mass,
Last calibration
Filter
Background signal

Display
internal test leak

Direct link to the


menu Mode & Mass

Start the calibration

Start the regeration

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 36

Measured value display

Analog
and
digital

Change
display mode

Graphic

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 37

Activate Zero
Leak rate
50

Measured leak rate


ZERO

40
30
Displayed leak rate
20
10
t

0
t1

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 38

Zero at falling back ground


Leak rate
50
40

Measured leak rate

30

Subrtraction value

20

Displayed leak rate

10
t

0
t1

Pfeiffer Vacuum 2007

t2

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 39

Deactivate Zero
Leak rate
50
Displayed leak rate
40
Measured leak rate
30
20

ZERO

10

>3s
t

0
t3

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 40

Setup main menu

Pfeiffer Vacuum 2007

View

Display configuration

Access control

Set access control

Language

Selection the language

Info

Information

Calibration settings

Setting for the calibration

User settings

Configuration of the user parameters

Maintenance & Service

Menus Maintenance & Service

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 41

View

Pfeiffer Vacuum 2007

Contrast

Settings for display contrast

Units

Settings for leak rate and pressure

Time & Date

Setting for time and date

Display range

Configuration of the display range

Lower display limit

Setting for lower display limit

Background
at ready to start

Setting for Display background signal

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 42

Contrast

Pfeiffer Vacuum 2007

Setting contrast

range 0 99

Invert display

normal / invert display

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 43

Units

Unit Leak rate

mbar*l/s, Pa*m3/s, Torr*l/s


sccm, sccs, atm*cc/s,
ppm, g/a, oz/yr
(only selectable in Sniffing mode)

Unit Pressure

Pfeiffer Vacuum 2007

mbar, Pa, atm, Torr

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 44

Time & Date

Pfeiffer Vacuum 2007

Date

Setting of the actual date

Time

Setting of the actual time (24 hours format)

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 45

Display range

Pfeiffer Vacuum 2007

Scale

linear
logarithmic
29

Display linear
Display logarithmic
Number of decades in
log. Display

Range

automatic
manual

Automatic range selection


Manual range selection

Time axis

16960

Time axis, time in seconds

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 46

Lower display limit

Lower display limit

for unit mbar*l/s


1E-12 mbar*l/s
1E-11 mbar*l/s
1E-10 mbar*l/s
1E-09 mbar*l/s

This setting limits the display of the leak rate downwards in


the measuring mode. It is only effective for the vacuum mode.

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 47

Background at Ready to start

Pfeiffer Vacuum 2007

yes

Background displayed
at Ready to Start

no

Background not displayed


at Ready to Start

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 48

Access control

Pfeiffer Vacuum 2007

Maintenance enabled

Enables/disables the menu


Maintenance & Service

Access to Cal function

Enables/disables the Calibration


at Ready to Start

Change device PIN

Input/change the device PIN

Change menu PIN

Input/change the menu PIN

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 49

Maintenance enable

Pfeiffer Vacuum 2007

Yes

Menu Maintenance & Service


is enabled

No

Menu Maintenance & Service


is disabled

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 50

Calibration enabled

Pfeiffer Vacuum 2007

Yes

Calibration at Ready to Start enabled

No

Calibration at Ready to Start disabled

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 51

Change device PIN

Pfeiffer Vacuum 2007

New PIN

0000 9999

New device PIN

New PIN (verify)

0000 9999

New device PIN


(repeat for confirmation)

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 52

Change menu PIN

Pfeiffer Vacuum 2007

New PIN

0000 9999

New menu PIN

New PIN (verify)

0000 9999

New menu PIN


(repeat for confirmation)

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 53

Language

The following languages are available for operation:


Language
Francais
Deutsch
Espanol
English

Pfeiffer Vacuum 2007

French
German
Spanish
English

Operating language

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 54

Information

Pfeiffer Vacuum 2007

Settings

Display menu parameters

System data

Display system data

Vacuum diagram

Display vacuum diagram

Error list

Display the last 12 errors

Calibration history

Display the last 12 calibrations

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 55

Settings

Display of the current parameter settings in 4 pages.

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 56

System data

Display of the system data/components in 4 pages.

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 57

Vacuum diagram

Vacuum diagram with the current states of valves, turbo pump


and emission.
Leak rate and pressure values P1, P2 are displayed.

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 58

Error list

List of the last 12 errors in following format:


Date / Time / Error no. / Remark

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 59

Calibration history

List of the last 12 Calibration in following format:


Date / Time / Location / Test gas / Calibration factors

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 60

Calibration settings

Unit

mbar*l/s
Pa*m3/s
Available units for external test leak
Torr*l/s
The unit for internal test leak is fixed to mbar*l/s.

Pfeiffer Vacuum 2007

Test leak rate

Leak rate value of the internal or external test leak


depending on the selected calibration mode

Calibration
mode

int. auto.
int. man.
extern

Internal automatic calibration


Intern manual calibration
External calibration

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 61

User Settings

Pfeiffer Vacuum 2007

Mode & Mass

Operation mode and detected mass

Filter & Zero

Filter and zero settings

Alarm

Alarm settings

Interfaces

Interface settings

Parameter save / load

Sets of parameter, factory settings

Monitoring functions

Diverse functions can be monitored

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 62

Mode & Mass

Pfeiffer Vacuum 2007

Mode

Vacuum
Sniff

Vacuum mode
Sniffing mode

Mass

He4, He3, H2

Test gas (Helium 4, Helium 3, Hydrogen)

Leak rate
factor

Gas
Air
User

Leak rate gas equivalent


Leak rate air equivalent
User defined factor

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 63

Filter & Zero

Filter

without
static
dynamic

No leak rate filter


Filter with fixed time constant
Filter with dynamic adaptation of time constant

Zero

with Start
2s5 min
enabled
disabled
constant

Zero is executed immediately after the


specified time.
Manual Zero released
Manual Zero locked
Manual Zero released and the zero value is retained
after pressing STOP. Automatic BG -tracing is locked.

On
Off

Internal background is subtracted at START


Internal background is not subtracted at START

MS-BG
subtraction
Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 64

Alarm

Mode

prop. leak rate


trigger alarm
0 4.5 min
set point
0 4,5 min

pinpoint
Setpoint
Warn limit
Pfeiffer Vacuum 2007

1E-129,9E+2
1100 %

Acoustic signal proportional to the bar display


A multi-frequency signal is generated as soon
as the leak rate exceeds the setpoint value.
An alarm delay time can be entered.
A tone with the frequency proportional to the
leak rate is emitted as soon as the leak rate
exceeds the setpoint value.
An alarm delay time can be entered.
Acoustic signal proportional to the leak rate
between 0,1 and 10*setpoint value
Alarm setpoint value
Warning limit as percentage of setpoint value

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 65

Interfaces

Pfeiffer Vacuum 2007

Analog output
Compact gauge
Control location

Output of the analog signal


Compact gauge settings
Selection of the control location

Relay
Serial port
Bypass option

Relay settings
Selection of port and protocol
Bypass option settings

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 66

Analog output

Channel 1

Channel 2
Scale

Pfeiffer Vacuum 2007

off
Pressure p1
Pressure p2
LR mantissa
LR exponent
LR linear
LR log.
Pressure p(ext)
see channel 1
upper limit
1E-111E+06
V / decade 0.5,
1, 2, 2.5, 5, 10

Channel is off(0V)
Output pressure p1
Output pressure p2
Output leak rate mantissa, linear from 010 V
Output leak rate exponent as a step function
Output leak rate linear, linear from 010 V
Output leak rate logarithmic, upper limit 10V
Output external pressure
upper limit(=10V) for setting LR log
and LR linear
Volt per decade for setting LR log

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 67

Compact gauge

Full scale
(only for linear gauges)
Type

0.1, 1, 10,100, 1000, 2000, 5000,


10000, 50000 mbar
APR, CMR, PCR, PKR, TPR

Setpoint value
1E-109,9E+02

Setpoint value for relay output

Pressure p(ext)

Current pressure value p(ext)

Press.
P2 source

internal
external

Pfeiffer Vacuum 2007

Inlet pressure determined with


internal gauge
Inlet pressure determined with
external gauge

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 68

Control location

Pfeiffer Vacuum 2007

Local

Controlled by START, STOP and ZERO keys

Local and
RS232/RS485

Controlled by START, STOP and ZERO keys


and via RS232/RS485 interface

RS232/RS485

Controlled via RS232/RS485 interface

PLC

Controlled via digital input

ALL

Controlled by START, STOP and ZERO keys,


via digital input and via RS232/RS485 interface

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 69

Relay

Relay 1,2
Off
START
STOP
START/STOP

Pfeiffer Vacuum 2007

Ready
Setpoint
On

Relay is always dropped-out.


Relay is active when V2 is open.
Relay is active when V6 is open.
Relay is active when START is pressed and
is dropped-out when STOP is pressed.
Relay is active in measure.
Relay is active when leak rate exceeds setpoint.
Relay is always active.

Warning limit
Pressure setpoint

Relay is active when leak rate exceeds warn limit.


Relay is active when pressure exceeds setpoint.

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 70

Serial ports

Port

RS 232
RS 485

Control via RS 232


Control via RS 485

Protocol

Pfeiffer
HLT 2xx

Pfeiffer interface protocol


HLT 2xx interface protocol
(selected commands)
Diagnosis interface protocol
(only for internal use)

Binary

Address

Pfeiffer Vacuum 2007

1255

Bus-address of SmartTest
in Pfeifer protocol

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 71

Bypass option

Mode

No bypass

No bypass option selected

Quick pump

The optional Backing pump is ready


for the pumping down process without
being active in the measuring mode.

Partial flow

The optional Backing pump is ready


for the pumping down process and the
measuring mode.

Internal
on / off
evacuation
delay
Pfeiffer Vacuum 2007

Delay time for the activation of the internal


Backing pump is enabled / disabled.

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 72

Parameter save / load

Pfeiffer Vacuum 2007

Load PARA SET 1, 2

Load a saved parameter sets

Save as PARA SET 1, 2

The current parameter setting


can saved as PARA SET 1 or 2.

Load factory settings

Load the default parameter set

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 73

Load parameters

Pfeiffer Vacuum 2007

View
Parameter set

Displays values of parameter set


PARA SET 1,2 .(4 pages)

Load

Loads the parameter set PARA SET 1 or 2.

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 74

Save parameters

The current parameter setting will be saved after pressing


the button Save in PARA SET 1 or PARA SET 2.

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 75

Load factory settings

The factory settings will be loaded after pressing the button OK.

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 76

Monitoring functions

Flow

Pfeiffer Vacuum 2007

Contamination
protection

Settings for the flow control


(sniffing mode only)
Settings of the protection against
helium contamination

Min. Volume & Beep

Settings of minimal volume and beep

Valves

Settings valve V1, V3 and V4

Evacuation time
& Vent
Calibration request

Settings for evacuation time and vent mode


Enables and disables request for a calibration

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 77

Flow

Flow min
140 sccm

Flow too low appears when the current


value falls below this threshold

Flow max
1050 sccm

Flow too high appears when the current


value exceeds t this threshold

Current flow

Current flow of the sniffer line (measure mode)

These settings only take place in sniffing mode.

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 78

Contamination protection

Protection

On

Off
Limit
1E-091E+3
mbar*l/s

When the leak rate exceeds this threshold


the unit changes from Measure mode to
Ready to Start.
Contamination protection is switched off.
Threshold value for the contamination
protection function

Contamination protection will be activated not before alarm


delay time is finished!

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 79

Minimum volume & beep

Minimum Volume

Beep sound
On
Off

Pfeiffer Vacuum 2007

015

This is the minimum available


value for the volume

An acoustic signal marks the change


in a status.
No acoustic signal marks the change
in a status.

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 80

Valves

Twin-Flow high

Twin-Flow low

Counterflow

Pfeiffer Vacuum 2007

enable
disable
0,01 0,5
mbar
enable
disable
0,1 5 mbar
enable
disable
0,1 25 mbar

Valve V4 opens
Valve V4 always closed
Threshold value when
V4 opens
Valve V3 opens
Valve V3 always closed
Threshold value when
V3 opens
Valve V1 opens
Valve V1 always closed
Threshold value when
V1 opens

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 81

Evacuation time & vent

Maximum
evacuation time

1 s30min
infinitely

Vent

with Stop

Regeneration

Pfeiffer Vacuum 2007

This is the threshold for maximum


pump down time before this process
will stopped.
Inlet is vented automatically after Stop.

manual

Inlet can be vented in Ready to Start


by pressing the Vent softkey.

no

Venting of the inlet is locked.

Start-Stop-cycles with short range intended for


the reduction of a raised helium background.
EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 82

Regeneration

Automated Start-Stop-cycle with short range intended


for the reduction of a raised helium background.
An active Regeneration will be announced in the display
and stops after 60 minutes automatically.
This function can be deactivate in general with the STOP
key or with STOP in the setting Venting with STOP menu.
The Regeneration can only be successful activated
in the setting Venting with STOP menu!

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 83

Calibration request

Pfeiffer Vacuum 2007

Yes

The request for calibration comes up:


- 30 min after switching HLT On
- temperature of HLT has changed
more than 5C

No

The request for calibration does not come up.

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 84

Maintenance & Service

Burn- in

Automatic start-stop cycle

Maintenance intervals
components

Displays the current operating hours


of the components fore pump,
turbo pump and ion source

View Maintenance
intervals list

List of maintenance intervals

Service

Access to menu Service

The maintenance menu can only be chosen when the maintenance


is enabled under Setup / Access control / Maintenance enabled.
Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 85

Burn-In

Start without
Calibration

Automatic start-stop cycle


without calibration

Start with
Calibration

Automatic start-stop cycle


with calibration

You can see in the display when the BurnIn is activated.


The Burn-In can be deactivated with the STOP key.

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 86

Burn-In activ

Run time

Time in minutes since activating


the Burn-In function

Cal factor min.


Cal factor max.

Calibration factor low


Calibration factor high

Anode pot. min.


Anode pot. max.

Anode potential low


Anode potential high

Stop

Deactivate the Burn-In

This menu is available when the Burn-In is active.


(Setup / Maintenance & Service / Burn-In)
Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 87

Maintenance intervals components

Fore pump

Displays the current operating hours of fore pump

TMP

Displays the current operating hours of turbo pump

Ion source

Displays the current operating hours of ion source

After the maintenance work each counter of the appropriate


component can be reset.
The activation of the Save button leads to a new data set
in the list of maintenance intervals.

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 88

Maintenance interval list

List of the last 12 Maintenance in following format:


Date / Time / Component / Operating hours

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 89

Service

The service menu is available after entering the Service-PIN.


This menu offers more information an settings for the service
engineers.

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

page 90